KONDOH Eiichi 近藤英一

Researcher Number	70304871
Other IDs
External Links
Affiliation (Current)	2023: 山梨大学, 大学院総合研究部, 教授
Affiliation (based on the past Project Information) *help	2017 – 2022: 山梨大学, 大学院総合研究部, 教授 2014 – 2016: 山梨大学, 総合研究部, 教授 2011 – 2013: 山梨大学, 医学工学総合研究部, 教授 2010 – 2011: 山梨大学, 大学院・医学工学総合研究部, 教授 2009: University of Yamanashi, 医学工学総合研究部, 教授 … More 2007 – 2008: University of Yamanashi, 大学院・医学工学総合研究部, 教授 2006: 山梨大学, 大学院医学工学総合研究部, 助教授 2003 – 2005: 山梨大学, 大学院・医学工学総合研究部, 助教授 2002: 山梨大学, 工学部, 助教授 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Science and Engineering / Basic Section 21050:Electric and electronic materials-related Except Principal Investigator Science and Engineering / Applied optics/Quantum optical engineering / Optical engineering, Photon science / Basic Section 21030:Measurement engineering-related
Keywords	Principal Investigator 超臨界流体 / エリプソメトリ / 二酸化炭素 / 集積回路配線 / 薄膜堆積 / supercritical fluids / zinc oxide / 超臨界液体 / ナノ空間 / 薄膜体積 … More / 埋め込み / エリプソメトリー / スーパーミクロ細孔 / 吸着 / 多孔質薄膜 / その場観測 / ナノ構造 / 自己整合 / ボトムアップ / 機能性高密度流体 / 超臨界流 / 形状敏感 / 多層吸着 / 凝集 / 選択堆積 / ゆらぎ / 面計測 / 弾性表面波 / 撮像エリプソメトリ / 粘菌 / 配線 / メタライズ / 金属錯体 / 生物摸倣 / Cu / ZnO / Pt / Ru / 電界放出素子 / NEMS / ナノマシン / ナノピラー / 集積回路 / 薄膜 / thin films / copper / platinum / ruthenium / ポーラスシリコン / エリプソメーター / 多孔質シリコン / 超臨界CO2流体 / porous silicon / 酸化亜鉛 / 発光デバイス / 貴金属エッチング / 貴金属 / エッチング … More Except Principal Investigator 光散乱 / 微細配線技術 / 触媒・化学プロセス / ナノ加工 / マイクロ加工 / シリコン / 触媒 / エッチン / 偏光計測 / 光計測 / 散乱モデル / 偏光 / 偏光指紋 / scattering / polarization / 2次元計測 / ラフな表面 / 散乱計測 / エリプソメトリー顕微鏡 / 反射・透過モード計測 / ミューラー行列 / 顕微鏡 / 解像度 / 物質判定 Less

次世代集積回路配線と液体／金属接面in-situ計測：どこまでわかりどう使うか？Principal Investigator
- Principal Investigator
  
  近藤英一
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  University of Yamanashi
Development of a Mueller Matrix Microscope
- Principal Investigator
  
  金蓮花
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  University of Yamanashi
Thermochemical dry etching of noble and near-noble metals using supercritical carbon dioxide fluidsPrincipal Investigator
- Principal Investigator
  
  Kondoh Eiichi
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  University of Yamanashi
Process technologies for integrating nano-crystalline Si and wide-bandgap semiconductors aiming to fabricating novel optoelectronics devicesPrincipal Investigator
- Principal Investigator
  
  KONDOH Eiichi
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Yamanashi
Development and application of optical model for object recognition with the polarization fingerprint
- Principal Investigator
  
  JIN Lianhua
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  University of Yamanashi
Construction and its application of the polarization fingerprint
- Principal Investigator
  
  JIN Lianhua
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  University of Yamanashi
Interconnect formation for high-band-width packagingPrincipal Investigator
- Principal Investigator
  
  KONDOH Eiichi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Yamanashi
Multiscale control of supercritical fluid thin film processing using fluctuation imaging ellipsometryPrincipal Investigator
- Principal Investigator
  
  KONDOH Eiichd
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Yamanashi
触媒作用を利用したシリコンへの微細配線形成技術の開発
- Principal Investigator
  
  松村道雄
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
超高密度流体中での動的溶解度制御を利用した形状敏感型自己整合ナノプロセスPrincipal Investigator
- Principal Investigator
  
  近藤英一
- Project Period (FY)
  2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  University of Yamanashi
Development of topography-sensitive nano device processing aided by in-situ ellipsometry in supercritical fluidsPrincipal Investigator
- Principal Investigator
  
  KONDOH Eiichi
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Yamanashi
Development of Novel, High-Speed, and Environmentally-Friendly Thin Film Deposition Technology using Supercritical Carbon Dioxide FluidsPrincipal Investigator
- Principal Investigator
  
  KONDOH Eiichi
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Yamanashi
超臨界流体を利用した配線形成技術の研究Principal Investigator
- Principal Investigator
  
  近藤英一
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  University of Yamanashi

[Book] 半導体・MEMSのための超臨界流体2012
- Author(s)
  近藤英一
- Total Pages
  227
- Publisher
  コロナ社
- Data Source
  KAKENHI-PROJECT-23656213
[Book] 超臨界流体技術の開発と応用2008
- Author(s)
  近藤英一
- Publisher
  CMC出版
- Data Source
  KAKENHI-PROJECT-18206031
[Book] 薄膜ハンドブック2008
- Author(s)
  近藤英一
- Publisher
  オーム社
- Data Source
  KAKENHI-PROJECT-18206031
[Book] 最近の化学工学58超臨界流体技術の実用化最前線2007
- Author(s)
  近藤英一
- Publisher
  化学工業社
- Data Source
  KAKENHI-PROJECT-18206031
[Book] 機械・材料系のためのマイクロ・ナノ加工の原理2005
- Author(s)
  近藤英一
- Total Pages
  226
- Publisher
  共立出版
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Characterization of thin films from reflection and transmission ellipsometric parameters2022
- Author(s)
  Jin Lianhua、Mogi Sota、Muranaka Tsutomu、Kondoh Eiichi、Gelloz Bernard
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Pages: 018004-018004
- DOI
  10.35848/1347-4065/ac42af
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04518
[Journal Article] Influence of Plasma Surface Treatment of Polyimide on the Microstructure of Aluminum Thin Films2022
- Author(s)
  Kondoh Eiichi
- Journal Title
  
  Coatings
  
  Volume: 12 Pages: 334-334
- DOI
  10.3390/coatings12030334
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] Lateral ellipsometry resolution for imaging ellipsometry measurement2021
- Author(s)
  Jin Lianhua、Kondoh Eiichi、Iizuka Yuki、Otake Motoyuki、Gelloz Bernard
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Pages: 058003-058003
- DOI
  10.35848/1347-4065/abf5ac
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04518
[Journal Article] Synthesis and Characterization of Ni-Pt Alloy Thin Films Prepared by Supercritical Fluid Chemical Deposition Technique2021
- Author(s)
  Sudiyarmanto Sudiyarmanto、Kondoh Eiichi
- Journal Title
  
  Nanomaterials
  
  Volume: 11 Pages: 151-151
- DOI
  10.3390/nano11010151
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] Supercritical Fluid Processing for Microfabrication2020
- Author(s)
  KONDOH Eiichi
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 86 Issue: 9 Pages: 671-674
- DOI
  10.2493/jjspe.86.671
- NAID
  130007897029
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] 超臨界二酸化炭素流体中における薄膜堆積2020
- Author(s)
  近藤英一
- Journal Title
  
  Journal of the Society of Inorganic Materials, Japan
  
  Volume: 406 Pages: 91-93
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] ミュラー行列の数値解析による多素子列偏光システムにおける各素子の偏光特性の抽出2020
- Author(s)
  金　蓮花，春日翔貴，近藤英一，高和宏行
- Journal Title
  
  光学
  
  Volume: 49 Pages: 289-295
- NAID
  40022348796
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04518
[Journal Article] Design of a spectroscopic imaging ellipsometer2020
- Author(s)
  Lianhua Jin, Makoto Uehara, Takashi Iwao, Yuki Iizuka, Eiichi Kondoh, Bernard Gelloz
- Journal Title
  
  Proc. of SPIE
  
  Volume: 11523
- DOI
  10.1117/12.2574762
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04518
[Journal Article] Hydrosilylation of High Porosity Porous Silicon with 1-Hexene in Supercritical CO2 Fluid2020
- Author(s)
  Naoto Takura、Jin Lianhua、Kondoh Eiichi、Gelloz Bernard
- Journal Title
  
  ECS Transactions
  
  Volume: 98 Pages: 131-137
- DOI
  10.1149/09802.0131ecst
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] エリプソメトリック顕微鏡　～斜め観測用顕微鏡の設計とその応用～2020
- Author(s)
  金　蓮花，上原　誠，ジェローズ　ベルナール，近藤　英一
- Journal Title
  
  精密工学会誌
  
  Volume: 86 Pages: 533-536
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04518
[Journal Article] Cu Wiring Fabrication by Supercritical Fluid Deposition for MEMS Devices2019
- Author(s)
  Kondoh Eiichi
- Journal Title
  
  －
  
  Volume: －
- DOI
  10.5772/intechopen.81636
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Facile and Efficient Gas-Phase Pressure-Controlled Thermal Functionalization of Nanocrystalline Porous Silicon with 1-Hexene2019
- Author(s)
  Gelloz Bernard、Iriyama Takuma、Takura Naoto、Kondoh Eiichi、Jin Lianhua
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 8
- DOI
  10.1149/2.0051909jss
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Journal Article] Photoetching of Porous Silicon Nanostructures in Hydrofluoric Acid Using Monochromatic Light2018
- Author(s)
  Gelloz B.、Fuwa H.、Kondoh E.、Jin L.
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 7
- DOI
  10.1149/2.0121812jss
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327, KAKENHI-PROJECT-16K04898
[Journal Article] 超臨界二酸化炭素流体中における薄膜堆積2018
- Author(s)
  近藤英一
- Journal Title
  
  Journal of the Society of Inorganic Materials, Japan
  
  Volume: 25 Pages: 431-436
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] 超臨界流体を用いた薄膜堆積・微細埋め込みと関連技術2018
- Author(s)
  近藤英一
- Journal Title
  
  機能材料
  
  Volume: 38
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Oxygen-assisted platinum etching in supercritical carbon dioxide fluids using hexafluoroacetylacetone2018
- Author(s)
  Kondoh Eiichi、Ogihara Yuta
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 57 Issue: 7S2 Pages: 07ME01-07ME01
- DOI
  10.7567/jjap.57.07me01
- NAID
  210000149385
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Polarization characteristics of diffraction scattering from metal rough surface2017
- Author(s)
  L. Jin, T. Takaguchi, E. Kondoh and B. Gelloz
- Journal Title
  
  Applied Surface Science
  
  Volume: 421 Pages: 565-570
- DOI
  10.1016/j.apsusc.2016.10.142
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04898, KAKENHI-PROJECT-16H04327, KAKENHI-PROJECT-15K04694
[Journal Article] Removal of organic template of mesoporous organosilicate thin films using supercritical carbon dioxide fluids2017
- Author(s)
  Kondoh Eiichi、Segawa Koki、Watanabe Mitsuhiro、Jin Lianhua、Zhang Liping、Baklanov Mikhail R.
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 7S2 Pages: 07KF02-07KF02
- DOI
  10.7567/jjap.56.07kf02
- NAID
  210000148111
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Structures of Cu surfaces developing in benzotriazole solutions: Effect of pH2017
- Author(s)
  Kondoh Eiichi、Kawakami Tatsuya、Watanabe Mitsuhiro、Jin Linhua、Hamada Satomi、Shima Shohei、Hiyama Hirokuni
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 7S2 Pages: 07KH01-07KH01
- DOI
  10.7567/jjap.56.07kh01
- NAID
  210000148114
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Extracting calibrated parameters from imaging ellipsometric measurement2017
- Author(s)
  L. Jin, T. Tanaka, E. Kondoh, B. Gelloz, and M. Uehara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 11 Pages: 116602-116602
- DOI
  10.7567/jjap.56.116602
- NAID
  210000148435
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04898, KAKENHI-PROJECT-16H04327, KAKENHI-PROJECT-15K04694
[Journal Article] 各種金属酸化物のCu/ガラス密着向上層としての利用2017
- Author(s)
  林　知里渡邉　満洋近藤　英一
- Journal Title
  
  表面技術
  
  Volume: 68 Pages: 723-726
- NAID
  130007492283
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Optical absorption and quantum confinement in porous silicon nanostructures studied by chemical dissolution in HF solutions and photoconduction2017
- Author(s)
  L. Jin, T. Tanaka, E. Kondoh, B. Gelloz, K. Sano, I. Fujio, Y. Kajiyama, and M. Uehara
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 88
- DOI
  10.1149/2.0321612jss
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04694, KAKENHI-PROJECT-16K04898
[Journal Article] DENSITY EVALUATION OF SUB-100 nm PARTICLES BY USING ELLIPSOMETRY2017
- Author(s)
  Eiichi Kondoh Katsuya Suzuki Satomi Hamada Shohei Shima Hirokuni Hiyama
- Journal Title
  
  Proceedings of International Conference of Planarization/CMP Technology
  
  Volume: None Pages: 60-64
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Extraction of polarization properties of the individual components of a layered system by using spectroscopic Mueller matrix analysis2016
- Author(s)
  Lianhua Jin Daichi Kobayashi Eiichi Kondoh Hiroyuki Kowa Bernard Gelloz
- Journal Title
  
  Optics Express
  
  Volume: 24 Pages: 9757-9765
- DOI
  10.1364/oe.24.009757
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327, KAKENHI-PROJECT-16K04898
[Journal Article] In situ ellipsometry of Cu surfaces immersed in benzotriazole–hydrogen peroxide solutions2016
- Author(s)
  Eiichi Kondoh Tatsuya Kawakami Mitsuhiro Watanabe Lianhua Jin Satomi Hamada Shohei Shima Hirokuni Hiyama
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 55 Issue: 6S3 Pages: 06JG03-06JG03
- DOI
  10.7567/jjap.55.06jg03
- NAID
  210000146736
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Ellipsometric measurement of particle-spiked wafer surfaces2016
- Author(s)
  Eiichi Kondoh Hayato Kotagiri Mitsuhiro Watanabe Satomi Hamada Shohei Shima Hirokuni Hiyama
- Journal Title
  
  Proceedings of 2015 International Conference on Planarization/CMP Technology (ICPT)
  
  Volume: － Pages: 188-190
- Data Source
  KAKENHI-PROJECT-16H04327
[Journal Article] Polarization characteristics of scattered light from macroscopically rough surfaces2015
- Author(s)
  L. Jin, K. Yamaguchi, M. Watanabe, S. Hira, E. Kondoh, and B. Gelloz
- Journal Title
  
  Optical Review
  
  Volume: 22 Pages: 511-520
- DOI
  10.1007/s10043-015-0117-2
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04694
[Journal Article] Correction of the large retardation window effect for ellipsometry measurements by using quasi-Newton method2015
- Author(s)
  L. Jin, S. Kasuga, E. Kondoh, and B. Gelloz
- Journal Title
  
  Applied Optics
  
  Volume: 54 Pages: 2703-2709
- DOI
  10.1364/ao.54.002991
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] In Situ imaging ellipsometer using a LiNbO3 electrooptic crystal2014
- Author(s)
  L. Jin, Y. Wakako, K. Takizawa, and E. Kondoh
- Journal Title
  
  Thin Solid Films
  
  Volume: 571 Pages: 532-537
- DOI
  10.1016/j.tsf.2014.05.017
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] Correction of large birefringent effect of windows for in-situ ellipsometry measurements2014
- Author(s)
  L. Jin and E. Kondoh
- Journal Title
  
  Optics Letters
  
  Volume: 39 Pages: 1549-1552
- DOI
  10.1364/ol.39.001549
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] General window correction method for ellipsometry measurements2014
- Author(s)
  L. Jin, S. Kasuga, and E. Kondoh
- Journal Title
  
  Opt. Express
  
  Volume: 22 Pages: 27811-27820
- DOI
  10.1364/oe.22.027811
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] Supercritical fluid deposition of copper into mesoporous silicon2013
- Author(s)
  L. Jin, E. Kondoh, T. Oya, B. Gelloz
- Journal Title
  
  Thin Solid Films
  
  Volume: 545 Pages: 357-360
- DOI
  10.1016/j.tsf.2013.08.034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560388, KAKENHI-PROJECT-24560043
[Journal Article] Fast Imaging Ellipsometer Using a LiNbO<sub>3</sub> Electrooptic Crystal2013
- Author(s)
  L. Jin, R. Yagi, K. Takizawa, and E. Kondoh
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 3R Pages: 036702-036702
- DOI
  10.7567/jjap.52.036702
- NAID
  210000141901
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] 超臨界流体を利用した生体組織のメタライズ2013
- Author(s)
  近藤英一、望月裕文、渡辺満洋
- Journal Title
  
  表面技術
  
  Volume: 第64巻8号
- NAID
  10031190987
- Data Source
  KAKENHI-PROJECT-23656213
[Journal Article] In-situ Spectroscopic Ellipsometry of the Cu Deposition Process from Supercritical Fluids : Evidence of an Abnormal Surface Layer Formation2012
- Author(s)
  Takuya Sasaki, Yukihiro Tamegai, Takahiro Ueno, Mitsuhiro Watanabe, Lianhua Jin, and Eiichi Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.51
- NAID
  210000140633
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Birefringence Polarimeter Using Dual LiNbO<sub>3</sub> Electrooptic Crystal Modulators2012
- Author(s)
  T. Saitou, M. N. Bin, H. Kowa , N. Umeda, K. Takizawa, E. Kondoh, and L. Jin
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 51/082201 Issue: 8R Pages: 082201-082201
- DOI
  10.1143/jjap.51.082201
- NAID
  210000141033
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656250, KAKENHI-PROJECT-24560043
[Journal Article] In-situ Spectroscopic Ellipsometry of the Cu Deposition Process from Supercritical Fluids: Evidence of an Abnormal Surface Layer Formation2012
- Author(s)
  T. Sasaki, Y. Tamegai, T. Ueno, M. Watanabe, L. Jin, and E. Kondoh
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 51 Issue: 5S Pages: 05EA02-05EA02
- DOI
  10.1143/jjap.51.05ea02
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] 有機結晶の偏光特性を利用した新しい教材2012
- Author(s)
  金　蓮花，大矢　敏史，高和　宏行，近藤　英一
- Journal Title
  
  応用物理教育
  
  Volume: 36 Pages: 21-26
- NAID
  10031140483
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24560043
[Journal Article] Behavior of Surface Acoustic Wave Resonators in Supercritical CO_22011
- Author(s)
  Shoji Kakio, Katsuhiro Hayashi, Eiichi Kondoh, and Yasuhiko Nakagawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol.50 Issue: 7S Pages: 07HD08-07HD08
- DOI
  10.1143/jjap.50.07hd08
- ISSN
  0021-4922, 1347-4065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Theoretical Analysis for the Fast Birefringence Measurement System using Dual Electro-optic Crystal Modulators2011
- Author(s)
  L.Jin, Y.Masamura, E.Kondoh, H.Kowa, K.Takizawa
- Journal Title
  
  Journal of the Japanese Society for Experimental Mechanics
  
  Volume: 11
- NAID
  10029700434
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] In situ ellipsometry of porous low-dielectric constant films in supercritical carbon dioxide2011
- Author(s)
  Eiichi Kondoh
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 88 Pages: 623-626
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Theoretical Analysis for the Fast Birefringence Measurement System using Dual Electro-optic Crystal Modulators2011
- Author(s)
  L. Jin, Y. Masamura, E. Kondoh, H. Kowa, and K. Takizawa
- Journal Title
  
  Journal of the Japanese Society for Experimental Mechanics
  
  Volume: Vol.11 Pages: 198-203
- NAID
  10029700434
- URL
  http://www.jstage.jst.go.jp/article/jjsem/11/Special_Issue/11_Special_Issue_s_198/_pdf
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] In-situ ellipsometry of porous low-dielectric constant films in supercritical carbon dioxide2011
- Author(s)
  Eiichi Kondoh and Shosaku Aruga
- Journal Title
  
  Microelectronic Engineering
  
  Volume: Vol.88 Pages: 623-626
- DOI
  10.1016/j.mee.2010.05.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Initial Cu Growth in Cu-Seeded and Ru-Lined Narrow Trenches for Supercritital Fluid Cu Chemical Deposition2010
- Author(s)
  Eiichi Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 49
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] 超臨界流体での化学的薄膜堆積-なぜ被覆性・充填性に優れているのか-2010
- Author(s)
  近藤英一
- Journal Title
  
  表面技術
  
  Volume: 61(8) Pages: 566-570
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) -Diketone Complex2009
- Author(s)
  Masahiro Matsubara, Michiru Hirose, Kakeru Tamai, Yukihiro Shimogaki, and Eiichi Kondoh
- Journal Title
  
  J. Electrochem. Soc. 156, 6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Topography-sensitive copper deposition in supercritical solutions2009
- Author(s)
  Eiichi Kondoh, K. Nagano,C. Yamamoto, J. Yamanaka
- Journal Title
  
  Microelectronics Engineering 86
  
  Pages: 902-905
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Topography-sensitive copper deposition in supercritical solutions2009
- Author(s)
  Eiichi Kondoh
- Journal Title
  
  Microelectronics Engineering 86
  
  Pages: 902-905
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Coverage of Copper Thin Films Deposited on the Sidewall of Through-silicon Vias Using Supercritical Fluids2009
- Author(s)
  松原正弘、近藤英一
- Journal Title
  
  J. Surf. Finish Soc. Jpn.
  
  Volume: Vol.60 Issue: 8 Pages: 533-539
- DOI
  10.4139/sfj.60.533
- NAID
  10025395854
- ISSN
  0915-1869, 1884-3409
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360147
[Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids2008
- Author(s)
  Eiichi Kondoh and Junpei Fukuda
- Journal Title
  
  Journal of Supercritical Fluids, accepted for publication 44
  
  Pages: 466-474
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19026005
[Journal Article] Deposition of zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions2008
- Author(s)
  Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
- Journal Title
  
  Applied Physics Express 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions2008
- Author(s)
  Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
- Journal Title
  
  Applied Physics Express 1, 6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids2008
- Author(s)
  Eiichi Kondoh and Junpei Fukuda,
- Journal Title
  
  Journal of Supercritical Fluids, accepted for publication 44
  
  Pages: 466-474
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Condensation and cleaning of an organometallic copper compound to/from porous low-dielectric constant thin films in super critical carbon dioxide2008
- Author(s)
  E. Kondoh, E. Ukai, S. Aruga
- Journal Title
  
  Physica status solidi (c) 5
  
  Pages: 1219-1222
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] ,Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxid2008
- Author(s)
  Eiichi Kondoh, Shosaku Aruga, and Eiichi Ukai
- Journal Title
  
  physica status solidi c 5
  
  Pages: 1219-1222
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxid2008
- Author(s)
  Eiichi Kondoh, Shosaku Aruga, and Eiichi Ukai
- Journal Title
  
  physica status solidi c 5
  
  Pages: 1219-1222
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19026005
[Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition2008
- Author(s)
  Takeshi Momose, Masakazu Sugiyama, Eiichi Kondoh, Yukihiro Shimogaki
- Journal Title
  
  Applied Physics Express 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Jasco report2008
- Author(s)
  近藤英一
- Journal Title
  
  超臨界流体中薄膜エリプソメトリ
  
  Pages: 18-21
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxide2008
- Author(s)
  E. Kondoh, E. Ukai, and S. Aruga
- Journal Title
  
  physica status solidi c, 5
  
  Pages: 1219-1222
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition2008
- Author(s)
  Takeshi Momose , Masakazu Sugiyama, EiichiKondoh, Yukihiro Shimogaki
- Journal Title
  
  Applied Physics Express 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids2008
- Author(s)
  Eiichi Kondoh and Junpei Fukuda
- Journal Title
  
  Journal of Supercritical Fluids 44
  
  Pages: 466-474
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Reduction of thin oxidized copper films using a hot-filament hydrogen radical source2007
- Author(s)
  E. Kondoh, M. Fukasawa, and T. Ojimi
- Journal Title
  
  Journal of Vacuume Science and Technology 25
  
  Pages: 415-420
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] 超臨界流体を利用した薄膜形成技術とMEMS・NEMS 応用2007
- Author(s)
  近藤英一
- Journal Title
  
  Material Stage Vol.7, No.5
  
  Pages: 21-24
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] How to deliver a high-frequency clock over 100GHz using common BEOL technologies2006
- Author(s)
  H.Kato, T.Kobori, K.Watanabe, Y.Kodaira, E.Kondoh, T.Akitsu, H.Kato
- Journal Title
  
  Proc. Adv. Metallization Conf. 2005
  
  Pages: 165-165
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] A noise-free and jitterless cavity system to distribute clocks over 10GHz2006
- Author(s)
  H.Kato, T.Kohori, E.Kondoh, T.Akitsu
- Journal Title
  
  IEEE Trasn. On Microwave Theory and Techniques 54
  
  Pages: 3960-3960
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Nanostructure formation using supercritical fluids2006
- Author(s)
  Eiichi Kondoh, Michiru Hirose, Eiichi Ukai
- Journal Title
  
  Proceedings of the 8th Internatilanl Symposium on Supercritical Fluids
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] 超臨界流体を利用した薄膜形成技術2006
- Author(s)
  近藤英一
- Journal Title
  
  表面技術 57
  
  Pages: 695-695
- NAID
  10020609638
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] 表面技術協会,超臨界流体を利用した薄膜形成技術2006
- Author(s)
  近藤英一
- Journal Title
  
  表面技術 Vol.57, No.10
  
  Pages: 695-700
- Data Source
  KAKENHI-PROJECT-18206031
[Journal Article] Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper2005
- Author(s)
  E.Kondoh, K.Shigama
- Journal Title
  
  Thin Solid Films 491
  
  Pages: 228-234
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids2005
- Author(s)
  E.Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics 44,7B
  
  Pages: 5799-5802
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids2005
- Author(s)
  E.Kondoh
- Journal Title
  
  Jpn.J.Appl.Phys. Vol.44, No.7B
  
  Pages: 5799-5802
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids2005
- Author(s)
  E.Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics (in press)
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Characteristics of Copper Deposition in a Supercritical CO2 Fluid2005
- Author(s)
  E.Kondoh
- Journal Title
  
  Thin Solid Films (in press)
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper2005
- Author(s)
  E.Kondoh, K.Shigama
- Journal Title
  
  Thin Solid Films Volume 491, Issues 1-2
  
  Pages: 228-234
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Nanoscale Deposition in Supercritical Fluids, Cu Metallization Process and Barrier Metal Deposition Possibility2004
- Author(s)
  E.Kondoh, M.Hishikawa, K.Shigama
- Journal Title
  
  Proc. Advanced Metallization Conference 2003
  
  Pages: 583-588
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Direct Deposition of Cu Barrier Stacks on Dielectric/Nonconductive Layers using Supercritical CO22004
- Author(s)
  E.Kondoh, M.Hishikawa, M.Yanagihara, K.Shigama
- Journal Title
  
  Proc. 2004 IEEE International Interconnect Technology Conference
  
  Pages: 33-33
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Control of selective and blanket ruthenium film deposition chemistry in supercritical CO2 fluid chemical deposition2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc. 2004 International Microprocess and Nanotechnology Conference
  
  Pages: 48-49
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Cu and Ru thin films in deep nanotrenches/holes using supercritical carbon dioxide2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics, E.Kondoh, Barrier/Copper Direct Deposition Vol.43, No.6B
  
  Pages: 3928-3933
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Direct Deposition of Cu Barrier Stacks on Dielectric/Nonconductive Layers using Supercritical CO22004
- Author(s)
  E.Kondoh, M.Hishikawa, M.Yanagihara, K.Shigama
- Journal Title
  
  Proc.2004 IEEE International Interconnect Technology Conference
  
  Pages: 33-33
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] ossibility using Supercritical Carbon Dioxide Fluid (invited)2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc.21st International VLSI Multilevel Interconnection Conference (Sep 30/Oct 1, Hawaii)
  
  Pages: 17-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] 超臨界流体を利用した半導体微細加工2004
- Author(s)
  近藤英一
- Journal Title
  
  クリーンテクノロジー 14,No.6
  
  Pages: 55-58
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Cu and Ru thin films in deep nanotrenches/holes using supercritical carbon dioxide2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics 43,6B
  
  Pages: 3928-3933
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Barrier/Copper Direct Deposition Possibility using Supercritical Carbon Dioxide Fluid (invited)2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc. 21st International VLSI Multilevel Interconnection Conference
  
  Pages: 17-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Control of selective and blanket ruthenium film deposition chemistry in supercritical CO2 fluid chemical deposition2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc.2004 International Microprocess and Nanotechnology Conference
  
  Pages: 48-49
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Direct Deposition of CuBarrier Stacks on Dielectric/Nonconductive Layers using Supercritical CO22004
- Author(s)
  E.Kondoh, M.Hishikawa, M.Yanagihara, K.Shigama
- Journal Title
  
  Proc. 2004 IEEE International Interconnect Technology Conference
  
  Pages: 33-35
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of Cu and Ru thin films in deep nanotrenches/holes using supercritical carbon dioxide2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Japanese Journal of Applied Physics. 43
  
  Pages: 3928-3933
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Barrier/Copper Direct Deposition Possibility using Supercritical Carbon Dioxide Fluid2004
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc. 21st International VLSI Multilevel Interconnection Conference (Sep 30/Oct 1, Hawaii)
  
  Pages: 17-18
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] 超臨界流体を利用した超微細加工2004
- Author(s)
  近藤英一
- Journal Title
  
  日本機械学会誌 107
  
  Pages: 45-45
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Nanoscale Deposition in Supercritical Fluids, Cu Metallization Process and Barrier Metal Deposition Possibility2004
- Author(s)
  E.Kondoh, M.Hishikawa, K.Shigama
- Journal Title
  
  Proc.Advanced Metallization Conference 2003, (Oct.21-23, Montreal, Canada / Tokyo, 2003.)
  
  Pages: 583-588
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Metal Filling in Deep Nano Trechnces/Holes using Supercritical Carbon Dioxide2003
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc. 2003 International Microprocess and Nanotechnology Conference,.
  
  Pages: 42-42
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Metal Filling in Deep Nano Trechnces/Holes using Supercritical Carbon Dioxide2003
- Author(s)
  E.Kondoh
- Journal Title
  
  Proc.2003 International Microprocess and Nanotechnology Conference
  
  Pages: 42-42
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions
- Author(s)
  Eiichi Kondoh, Kenji Sasaki, and Yoichi Nabetani
- Journal Title
  
  Applied Physics Express (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19026005
[Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions
- Author(s)
  Eiichi Kondoh, Kenji Sasaki, and Yoichi Nabetani
- Journal Title
  
  Applied Physics Express (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206031
[Patent] 光学特性の測定方法及び光学特性の測定装置2014
- Inventor(s)
  金　蓮花，近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2014-016281
- Filing Date
  2014-01-31
- Data Source
  KAKENHI-PROJECT-24560043
[Patent] 導電性物質の形成装置及びその形成方法2011
- Inventor(s)
  近藤英一,松原正弘,竹内裕人
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2010-199678
- Filing Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-21360147
[Patent] 特許2011
- Inventor(s)
  近藤英一, 松原正弘, 竹内裕人
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2010-199678
- Filing Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-21360147
[Patent] 導電性物質の形成装置及びその形成方法2011
- Inventor(s)
  近藤英一、松原正弘、竹内裕人
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2011-199678
- Filing Date
  2011
- Data Source
  KAKENHI-PROJECT-23656213
[Patent] 導電性物質の形成装置及びその形成方法2011
- Inventor(s)
  近藤英一、松原正弘、竹内裕人
- Industrial Property Rights Holder
  山梨大学
- Filing Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-23656213
[Patent] 特許2010
- Inventor(s)
  近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2010-197237
- Filing Date
  2010-09-03
- Data Source
  KAKENHI-PROJECT-21360147
[Patent] 細孔を有する薄膜の測定方法とそのシステ2010
- Inventor(s)
  近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2010-197237
- Filing Date
  2010-09-03
- Data Source
  KAKENHI-PROJECT-21360147
[Patent] 超臨界流体中に連続的に低圧の気体を添加する方法およびそのための装置2005
- Inventor(s)
  近藤英一, 福田順平
- Industrial Property Rights Holder
  山梨大学
- Filing Date
  2005-08-29
- Data Source
  KAKENHI-PROJECT-15360162
[Patent] 超臨界流体中に連続的に低圧の気体を添加する方法およびそのための装置2005
- Inventor(s)
  近藤英一, 福田順平
- Industrial Property Rights Holder
  山梨大学
- Filing Date
  2005-08-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Patent] 超臨界流体又は亜臨界流体を用いた酸化物薄膜,または金属積層薄膜の成膜方法,及び成膜装置2004
- Inventor(s)
  近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2004-167782
- Filing Date
  2004-06-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Patent] 超臨界流体又は亜臨界流体を用いた酸化物薄膜,また金属積層薄膜の成膜方法,及び成膜装置2004
- Inventor(s)
  近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2004-249487
- Filing Date
  2004-08-30
- Data Source
  KAKENHI-PROJECT-15360162
[Patent] 超臨界流体中に連続的に低圧の気体を添加する方法およびそのための装置2004
- Inventor(s)
  近藤英一
- Industrial Property Rights Holder
  山梨大学
- Industrial Property Number
  2004-249487
- Filing Date
  2004-08-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360162
[Presentation] 反射・透過型エリプソメトリー計測における透明基板内反射影響2022
- Author(s)
  茂木壮太，有元圭介，近藤英一，金蓮花，ジェローズベルナール
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] 超臨界CO2金属エッチングの温度・エッチャント濃度依存性2022
- Author(s)
  竹内創太，近藤英一
- Organizer
  2022電気化学春季大会
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Copper oxide as Cu/glass adhesion layer and its stability under reduction chemistry2021
- Author(s)
  Eiichi Kondoh, Takeshi Ito
- Organizer
  Interfinish 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] 集積回路配線金属薄膜表面の防食層のエリプソメトリその場解析2021
- Author(s)
  近藤英一
- Organizer
  2021電気化学春季大会
- Invited
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] イメージングエリプソメトリーにおける分解能に関する考察2021
- Author(s)
  金蓮花，近藤英一，飯塚祐基，大竹基之，ジェローズベルナール
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] 反射・透過型エリプソメトリーによる薄膜厚計測2021
- Author(s)
  金蓮花，茂木壮太，村中司，近藤　英一
- Organizer
  Optics & Photonics Japan 2021
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] In-situ ellipsometric measurements of surface layer formation on Co in aqueous solutions corrosion inhibitor and oxidizer2021
- Author(s)
  Eiichi Kondoh, Shota Takeuchi, Lianhua Jin,　Ryota Koshino, Satomi Hamada, Shohei Shima, Hirokuni Hiyama
- Organizer
  Advanced Metallization Conference 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] Application of Supercritical Carbon Dioxide Fluids to Advanced Metallization2020
- Author(s)
  Eiichi Kondoh
- Organizer
  IEEE International Interconnect Technology Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Design of a spectroscopic imaging ellipsometer2020
- Author(s)
  Lianhua Jin, Makoto Uehara, Takashi Iwao, Yuki Iizuka, Eiichi Kondoh, Bernard Gelloz
- Organizer
  Optics & Photonics International Congress 2020
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] 1-ヘキセンを用いた多孔率ポーラスシリコンの超臨界CO2流体中のヒドロシリル化2020
- Author(s)
  田倉　直人，金蓮花，近藤英一，ジェローズベルナール
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] BTA-H2O2混合溶液中におけるCo表面その場分光エリプソメトリ測定2020
- Author(s)
  竹内翔太，金蓮花，近藤英一，濵田聡美，小篠諒太，嶋昇平，檜山浩國
- Organizer
  表面技術協会第141回講演大会
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Deposition of Ni-Based Thin Films in Supercritical Carbon Dioxide Solution Via Flow-Type Reaction System2020
- Author(s)
  Sudiyarmanto, Eiichi Kondoh
- Organizer
  Pacific rim meeting on electrochemical and solid state science (PRiME)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Hydrosilylation of High Porosity Porous Silicon with 1-Hexene in Supercritical CO2 Fluid2020
- Author(s)
  Takura Naoto, Lianhua Jin, Eiichi Kondoh and Bernard Gelloz
- Organizer
  Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] 深層学習を用いた画像処理によるイメージングエリプソメータの空間分解能向上の試み2020
- Author(s)
  飯塚祐基，金蓮花，近藤英一，ジェローズベルナール
- Organizer
  Optics & Photonics Japan 2020
- Data Source
  KAKENHI-PROJECT-20K04518
[Presentation] 超臨界二酸化炭素流体中における薄膜堆積・表面反応プロセス～半導体製造応用を視野に～2019
- Author(s)
  近藤英一
- Organizer
  INCHEM2019
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] マイクロ流通セルを用いたBTA-H2O2混合溶液中におけるCu表面のその場分光エリプソメトリ解析2019
- Author(s)
  近藤英一，遠山真央，濵田聡美，嶋昇平，檜山浩國
- Organizer
  表面技術協会第140回講演大会
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Initial changes of Cu surfaces in H2O2-BTA aqueous solutions studied by using microfluidic reactor2019
- Author(s)
  Eiichi Kondoh, Mao Toyama, Lianhua Jin, Satomi Hamada, Shohei Shima, Hirokuni Hiyama
- Organizer
  Advanced Metallzation Conference Asian Session
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] イメージングエリプソメトリーによるポーラスシリコンの光学定数測定2019
- Author(s)
  秋山泰輝，飯塚祐基，金蓮花，近藤　英一，ジェローズ　ベルナール
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] １-ヘキセン分子を用いたポーラスシリコンの圧力制御ヒドロシリル化と発光安定性2019
- Author(s)
  入山拓未，金蓮花，近藤　英一，ジェローズ　ベルナール
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Etching, photoetching of porous silicon in hydrofluoric acid studied by photoconduction and monochromatic light2019
- Author(s)
  Gelloz, H. Fuwa, E. Kondoh, and L. Jin
- Organizer
  3rd International Symposium on Anodizing Science and Technology (AST2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] Oxygen-assisted etching/removal of Pt in supercritical CO2 solutions2019
- Author(s)
  Eiichi Kondoh
- Organizer
  Materials Research Society Spring Meetings
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] 超臨界流体半導体プロセス応用～薄膜形成・エッチングを中心として～2019
- Author(s)
  近藤英一
- Organizer
  超臨界流体部会第18回サマースクール
- Invited
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] 超臨界流体半導体プロセス応用2019
- Author(s)
  近藤英一
- Organizer
  NEDIA材料部品部会　第二十三回勉強会
- Invited
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] 超臨界流 CO2流体を用いた金属ドライエッチング2019
- Author(s)
  近藤英一
- Organizer
  半導体集積回路シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-19K04466
[Presentation] イメージングエリプソメトリーによるナノ結晶シリコンの製作評価2018
- Author(s)
  秋山泰輝，飯塚祐基，金蓮花，近藤英一，ジェローズベルナール
- Organizer
  第三回フォトニクス研究会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 光伝導を利用したHF溶液中でのポーラスシリコンナノ構造のフォトエッチング観測2018
- Author(s)
  ジェローズベルナール，不破弘樹，近藤英一，金蓮花
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] hoto-Assisted Etching of Porous Silicon Nanostructures in Hydrofluoric Acid using Monochromatic Light2018
- Author(s)
  B. Gelloz, H. Fuwa, E. Kondoh, and L. Jin
- Organizer
  Americas International Meeting on Electrochemistry and Eolid state science
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 分光エリプソメトリー計測の勘所とin-situ計測応用2018
- Author(s)
  近藤英一
- Organizer
  ＯＲＩＳＴ技術情報セミナー(和泉センター)　第 2 回分光エリプソメーター活用セミナー
- Invited
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 超臨界CO2流体中での薄膜堆積2018
- Author(s)
  近藤英一
- Organizer
  電気化学会第85回大会シンポジウムS19. 電子材料及びナノ機能素子技術
- Invited
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Extraction of properties of individual component for the retarder linear diattenuator retarder system and its application2018
- Author(s)
  L. Jin, E. Kondoh, H. Kowa, B. Gelloz
- Organizer
  SPIE
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 分光エリプソメトリーによるsub 100-nm粒子の検出と粒子密度評価2018
- Author(s)
  近藤英一
- Organizer
  プレナリゼーションCMPとその応用技術専門委員会（精密工学会）第163回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] その場分光エリプソメトリ測定を用いたBTA-H2O2混合溶液中におけるCu表面の初期処理過程の解析2017
- Author(s)
  瀬川紘幹近藤英一濱田聡美嶋昇平檜山浩國
- Organizer
  日本機械学会関東支部第23期総会・講演会
- Place of Presentation
  東京理科大学葛飾キャンパス（東京都・葛飾区）
- Year and Date
  2017-03-07
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] ラフな表面における散乱光の偏光特性の波長依存性2017
- Author(s)
  金蓮花，周　聡，近藤　英一
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県横浜市西区みなとみらい　パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K04694
[Presentation] エリプソメトリ法によるSi基板表面の微粒子計測 ―インクジェット装置による粒子付着とエリプソメトリ計測―2017
- Author(s)
  鈴木雄也近藤英一濵田聡美嶋昇平檜山浩國
- Organizer
  精密工学会　2017年度秋季大会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Etching of Transition Metals (Co, Ni, Fe, Pt) Using Supercritical Fluids2017
- Author(s)
  E. Kondoh
- Organizer
  Materials Research Society 2017 Spring Meetings
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] HexafluoroacetylacetoneによるPtエッチング2017
- Author(s)
  近藤英一萩原佑太
- Organizer
  表面技術協会第136回講演大会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] INKJET PARTICLE-SPIKING OF WAFER SURFACES AND EVALUATION OF PARTICLE DENSITY WITH ELLIPSOMETRY2017
- Author(s)
  E. Kondoh, K. Suzuki, L. Jin, S. Hamada, S. Shima, and H. Hiyama
- Organizer
  International Conference on Planariation/CMP Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Early stages of layer formation on Cu in benzotriazole-hydrogen (BTA-H2O2) solutions2017
- Author(s)
  Koki Segawa Eiichi Kondoh Satomi Hamada Shohei Shima Hirokuni Hiyama
- Organizer
  Advanced Metallization Conference plus 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Photo-Assisted Dissolution of Porous Silicon Nanostructures in HF Solutions Monitored by Photoconduction2017
- Author(s)
  Bernard Gelloz, Hiroki Fuwa, Eiichi Kondoh, and Lianhua Jin
- Organizer
  第78回応用物理学会秋季学術講演会
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] マイクロ流通セルを用いたBTA-H2O2混合溶液中におけるCu表面のその場分光エリプソメトリ解析2017
- Author(s)
  瀬川紘幹近藤英一濵田聡美嶋昇平檜山浩國
- Organizer
  精密工学学会　2017年度秋季大会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Novel Pt etching using hexafluoroacetlyacetone2017
- Author(s)
  E. Kondoh Y. Ogihara
- Organizer
  Advanced Metallization Conference plus 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Polarization Dispersion of Scattering from Macroscopically Rough Surface2017
- Author(s)
  L. Jin, C. Zhou, and E. Kondoh
- Organizer
  The 24th congress of the International Commission of Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04694
[Presentation] 表面清浄度・クリーニング評価としてのエリプソメトリ2017
- Author(s)
  近藤英一
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-15
- Invited
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 半導体・MEMSのための超臨界CO2流体2017
- Author(s)
  近藤英一
- Organizer
  CVD研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] 各種金属酸化物のCu/ガラス界面密着層としての利用の試み2017
- Author(s)
  林　知里渡邉満洋近藤英一
- Organizer
  表面技術協会第136回講演大会
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] Polarization characteristics of diffraction scattering from metal rough surface2016
- Author(s)
  Lianhua Jin, Takuma Taguchi, and Eiichi Kondoh
- Organizer
  7th International Conference on Spectroscopic Ellipsometry
- Place of Presentation
  Berlin, Germany
- Year and Date
  2016-06-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04694
[Presentation] Application of supercritical CO2 to porogen removal and metal deposition in nanoscale/HAR features2016
- Author(s)
  Eiichi Kondoh
- Organizer
  International Workshop on Materials for Advanced Interconnects
- Place of Presentation
  North China University of Technology
- Year and Date
  2016-10-31
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] ラフな表面による回折散乱光の偏光特性2016
- Author(s)
  金蓮花，田口拓馬，近藤英一
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学(東京都・目黒区)
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K04694
[Presentation] Optical Absorption of Porous Silicon during Dissolution in HF Investigated by Photoconduction2016
- Author(s)
  Bernard Gelloz Kazuki Ichimura Eiichi Kondoh Lianhua Jin
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] エリプソメトリ測定によるSiウェハ表面の粒子検出評価2016
- Author(s)
  鈴木雄也，近藤英一，渡邉満洋，金蓮花，濵田聡美，嶋昇平，檜山浩國
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04694
[Presentation] Fabrication of catalyst membrane for long-length nanocarbon growt: Atmospheric pressure CVD fill of Fe and FexOy to nano-through-holes of selfstanding anodic alumina2016
- Author(s)
  Eiichi Kondoh Shigeaki Tamekuni Mitsuhiro Watanabe Soichiro Okubo Takeshi Hikata Akira Nakayama
- Organizer
  42nd International Conference on Micro and Nano Engineering
- Place of Presentation
  Reed Messe Wien, Congress Center, Vienna
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] In-situ Ellipsometry of Cu Surfaces Immersed in BTA-H2O2 Solutions2016
- Author(s)
  Eiichi Kondoh
- Organizer
  Clarkson University 20th International Symposium on Chemical-Mechanical Planarization
- Place of Presentation
  Crowne Plaza Lake Placid, NY
- Year and Date
  2016-08-08
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04327
[Presentation] その場エリプソ計測における観測窓の影響の補正2014
- Author(s)
  金蓮花，近藤英一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] ラフな鉄表面による散乱光の偏光特性および光学モデリング2014
- Author(s)
  山口晃司，近藤英一，ジェローズ　ベルナール，金蓮花
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] Cu埋め込みされたマイクロポーラスシリコンの電気特性2014
- Author(s)
  大矢敏史，近藤英一，ジェローズ　ベルナール，金蓮花
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] Photo-assisted metal fill to nanopores using a supercritical fluid along with in-situ spectroscopic ellipsometric observation2013
- Author(s)
  E. Kondoh, Y. Tamegai, M. Watanabe, and L. Jin
- Organizer
  39th International Conference on Micro and Nano Engineering
- Place of Presentation
  London, England
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 超臨界流体を用いたメソポーラスシリコンへのCu 埋め込み2013
- Author(s)
  金蓮花，大矢敏史，近藤英一，Bernard Gelloz
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学（神奈川県）
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] Can bioveins be used as interconnects?2013
- Author(s)
  Eiichi Kondoh, Hirofumi Mochizuki,and Mitsuhiro Watanabe
- Organizer
  Materials for Advanced Metallization
- Place of Presentation
  Kotholike Universiteit Leuven
- Year and Date
  2013-03-11
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 超臨界流体中Cu薄膜堆積のその場分光エリプソメトリ解析（第3報）2013
- Author(s)
  近藤英一，五味瞭汰，田部井幸寛，渡邉満洋，金蓮花
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学（神奈川県）
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 生体のネットワーク解探索機能を活用した配線構造の提案と生体メタライズ2013
- Author(s)
  近藤英一,渡邉満洋,望月裕文, 後藤利章
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] Scattering light pattern of rough surface2013
- Author(s)
  Yamaguchi，A. Muhammad，B. Gelloz，E. Kondoh, and L. Jin
- Organizer
  The 6th International Conference on Spectroscopic Ellipsometry
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] In-Situ imaging ellipsometer using a LiNbO3 electrooptic crystal2013
- Author(s)
  Y. Wakako, K. Takizawa, E. Kondoh, and L. Jin
- Organizer
  The 6th International Conference on Spectroscopic Ellipsometry
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] “LiNbO3電気光学結晶を用いたその場イメージングエリプソメーターの開発2013
- Author(s)
  若子裕亮，滝沢國治，近藤英一，金蓮花
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学（神奈川県）
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 生体を利用した高バンド幅立体配線構造の提案2013
- Author(s)
  近藤英一
- Organizer
  電気学会C部門大会(招待講演)
- Place of Presentation
  北見工業大学
- Year and Date
  2013-09-06
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] ラフな面におけるIn-plane散乱光パターン2013
- Author(s)
  山口晃司，アティラムハマド，近藤英一，金蓮花
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学（神奈川県）
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] In-situ Spectroscopic Ellipsometry of Cu Deposition Process from Supercritical Fluids - Evidence for a Surface Condensation Layer Formation2012
- Author(s)
  E. Kondoh, T. Sasaki, Y. Tamegai, M. Watanabe, and L. Jin
- Organizer
  10th International Symposium on Supercritical Fluids
- Place of Presentation
  Hyatt Regency San Francisco, USA
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 光変調技術の偏光計測への応用2012
- Author(s)
  令蓮花,齋藤壮,八木亮磨,山口晃司,若子裕亮,近藤英一
- Organizer
  精密工学会
- Place of Presentation
  首都大学
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界二酸化炭素を用いた金属超微粒子/多孔質カーボン複合体の作製2012
- Author(s)
  渡邉満洋, 秋本竜昇, 近藤英一
- Organizer
  日本金属学会
- Place of Presentation
  横浜国立大学
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 生体組織を利用した金属配線形成の試み2012
- Author(s)
  望月裕文,渡邉満洋,近藤英一
- Organizer
  表面技術協会第126回講演大会
- Place of Presentation
  室蘭工業大学(北海道)
- Year and Date
  2012-09-28
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 超臨界CO_2を用いて堆積したNi薄膜の成膜特性2012
- Author(s)
  長田和真,渡邉満洋,近藤英一
- Organizer
  表面技術協会
- Place of Presentation
  東京都市大学
- Year and Date
  2012-03-13
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界CO_2を用いた多孔質カーボン表面へのPt-Ru超微粒子担持2012
- Author(s)
  渡邉満洋, 秋本竜昇, 近藤英一
- Organizer
  化学工学会年会
- Place of Presentation
  工学院大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体を用いた金属薄膜堆積 -メリットと展望-2012
- Author(s)
  近藤英一
- Organizer
  化学工学会第44回秋季大会(招待講演)
- Place of Presentation
  東北大学(宮城県)
- Year and Date
  2012-09-21
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 超臨界流体中Cu薄膜堆積のその場分光エリプソメトリ解析(第2報)2012
- Author(s)
  佐々木拓哉,田部井幸寛,植野隆大,渡邉満洋,金蓮花,近藤英一
- Organizer
  応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体を利用した金属薄膜堆積技術2012
- Author(s)
  近藤英一
- Organizer
  表面技術協会将来めっき技術検討部会第十回例会「あたらしいめっき関連技術」
- Place of Presentation
  回路会館(東京都)
- Year and Date
  2012-11-19
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] デュアル電気光学結晶を用いた高速複屈折計測システムの開発2012
- Author(s)
  齋藤壮,ヌルディンムハマド,高和宏行,手島昂太朗,梅田倫弘,滝沢國治,近藤英一,金蓮花
- Organizer
  応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-18
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体中Cu堆積過程のその場分光エリプソメトリ2012
- Author(s)
  佐々木拓哉, 田部井幸寛, 植野隆大, 渡邉満洋, 金蓮花, 近藤英一
- Organizer
  化学工学会年会
- Place of Presentation
  工学院大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 光変調技術の偏光計測への応用2012
- Author(s)
  金蓮花, 斎藤壮, 八木亮磨, 山口晃司, 若子裕亮, 近藤英一
- Organizer
  精密工学会
- Place of Presentation
  首都大学東京(招待講演)
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] デュアル電気光学結晶を用いた高速複屈折計測システムの開発及び応用2012
- Author(s)
  斎藤壮, ヌルディンムハマド, 高和宏行, 手島昂太朗, 梅田倫弘, 滝沢國治, 近藤英一, 金蓮花
- Organizer
  応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-18
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 偏光指紋による物体の同定2012
- Author(s)
  金　蓮花，山口　晃司，近藤　英一
- Organizer
  Optics & Photonics Japan 2012
- Place of Presentation
  東京，船堀タワーホール
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 超臨界CO_2中における弾性表面波共振子の共振特性2011
- Author(s)
  林克洋、垣尾省司、近藤英一
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  USA, Orlando
- Year and Date
  2011-10-31
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 3 次元集積回路電極用 Si マイクロ孔内側壁に超臨界流体を利用して Cu を堆積した際の被覆特性2011
- Author(s)
  松原正弘, 近藤英一
- Organizer
  一般社団法人表面技術協会第124回講演大会(招待講演)
- Place of Presentation
  名古屋大学東山キャンパス
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] Conformal Copper Coating of True 3D Through-holes Using Supercritical Carbon Dioxide2011
- Author(s)
  M.Watanabe, Y.Takeuchi, T.Ueno, M.Matsubara, E.Kondoh, S.Yamamoto, N.Kikukawa, T.Suemasu
- Organizer
  Advanced Metallizaion Conference Asian Session
- Place of Presentation
  東京大学
- Year and Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界CO_2を利用して作製したNi/ガラス構造体の密着性と界面組織2011
- Author(s)
  渡邉満洋,青山央,近藤英一
- Organizer
  表面技術協会
- Place of Presentation
  名古屋大学
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Conformal Copper Coating of True 3D Through-holes Using Supercritical Carbon Dioxide2011
- Author(s)
  M.Watanabe, Y.Takeuchi, T.Ueno, M.Matsubara, E.Kondoh, S.Yamamoto, N.Kikukawa, T.Suemasu
- Organizer
  Advanced Metallizaion Conference USA
- Place of Presentation
  USA San Diego
- Year and Date
  2011-10-04
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Resonance properties of surface acoustic wave resonators in supercritical CO_22011
- Author(s)
  K. Hayashi, S. Kakio, and E. Kondoh
- Organizer
  Symposium Ulstrasonic Electronics
- Place of Presentation
  京都大学
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Sciences in micro-and nanoelectronics processes using an environmentally-friendly medium supercritical CO_2 fluid and its application2011
- Author(s)
  E. Kondoh
- Organizer
  NATO Advanced Research Workshop
- Place of Presentation
  Riga, Latvia
- Year and Date
  2011-06-20
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界CO2を用いた多孔質カーボン上への金属微粒子担持における表面処理の影響2011
- Author(s)
  秋本竜昇・近藤英一・渡邉満洋
- Organizer
  化学工学会第43回秋季大会
- Place of Presentation
  名古屋工業大学
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] Sciences in micro-andnanoelectronics processes using anenvironmentally-friendly medium2011
- Author(s)
  E. Kondoh
- Organizer
  Nanodevices andNanomaterials for Ecological Security
- Place of Presentation
  HotelJurmala SPA, Latvia
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] Sciences in micro- and nanoelectronics processes using an environmentally-friendly medium . supercritical CO2 fluid and its application2011
- Author(s)
  E. Kondoh
- Organizer
  NATO Advanced Research Workshop, Nanodevices and Nanomaterials for Ecological Security(招待講演)
- Place of Presentation
  Hotel Jurmala SPA, Latvia
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 超臨界CO_2を用いた高アスペクトマイクロ孔への均一Cu被覆2011
- Author(s)
  竹内裕人,松原正弘,渡邉満洋,近藤英一
- Organizer
  応用物理学会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性2011
- Author(s)
  松原正弘,近藤英一
- Organizer
  表面技術協会
- Place of Presentation
  名古屋大学
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界CO_2 を用いた多孔質カーボン上への金属微粒子担持における表面処理の影響2011
- Author(s)
  秋本竜昇、近藤英一、渡邉満洋
- Organizer
  化学工学会第43回秋季大会
- Place of Presentation
  名古屋工業大学
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] In-situ Spectroscopic Ellipsometry of Cu Deposition Process from Supercritical Fluids-An Evidence for an Abnormal Surface Layer Formation2011
- Author(s)
  T. Sasaki, Y. Tamegai, M. Watanabe, L. Jin, and E. Kondoh
- Organizer
  Advanced Metallizaion Conference Asian Session
- Place of Presentation
  東京大学
- Year and Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界CO_2を用いた多孔質カーボン上への金属微粒子担持における表面処理の影響2011
- Author(s)
  秋本竜昇, 近藤英一, 渡邉満洋
- Organizer
  化学工学会
- Place of Presentation
  名古屋工業大学
- Year and Date
  2011-09-16
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Resonance properties of surface acoustic wave resonator in supercritical CO_22011
- Author(s)
  S. Kakio, K. Hayashi, and E. Kondoh
- Organizer
  IEEE Internatilal Ultrasonic Symposium
- Place of Presentation
  USA, Orlando
- Year and Date
  2011-10-21
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性2011
- Author(s)
  松原正弘, 近藤英一
- Organizer
  表面技術協会
- Place of Presentation
  名古屋大学(招待講演)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Sciences in micro- and nanoelectronics processes using an environmentally-friendly medium. supercritical CO_2 fluid and its application2011
- Author(s)
  E.Kondoh
- Organizer
  NATO Advanced Research Workshop
- Place of Presentation
  Riga, Latvia(招待講演)
- Year and Date
  2011-06-20
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] In-situ Spectroscopic Ellipsometry of Cu Deposition Process from Supercritical Fluids -An Evidence for an Abnormal Surface Layer Formation-2011
- Author(s)
  T.Sasaki, Y.Tamegai, M.Watanabe, L.Jin, E.Kondoh
- Organizer
  Advanced Metallizaion Conference Asian Session
- Place of Presentation
  東京大学
- Year and Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Mechanisms of Chemical Deposition from Supercritical Fluids for Advanvced Microelectronics Appilicitions(Invited)2010
- Author(s)
  E.Kondoh
- Organizer
  International Conference on Modern Problems in the Physics of Surface and Nanostructures
- Place of Presentation
  Yanoslavl State University Yaroslavl, Russia
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体を用いた多孔質低誘電率薄膜プロセス～細孔の評価と洗浄～2010
- Author(s)
  近藤英一
- Organizer
  電子情報通信学会電子部品・材料研究会
- Place of Presentation
  道の駅しゃり会議室 (招待講演)
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] In-situ Spectroscopic Ellipsometry in Superchtical CO_2 Solutions and Its Application to Low-k Thin Film Characterization2010
- Author(s)
  E.Kondoh
- Organizer
  Advanced Metalization Conference 20th Asian Session 2010
- Place of Presentation
  Takeda Building, The Univ. of Tbkyo, Tokyo
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Science in Porosity Engineering of Low-k Dielectrics Using Supercritical Carbon Dioxide-Pore Characterization and Pore Cleaning(Invited)2010
- Author(s)
  E.Kondoh
- Organizer
  15th International Symposium on Chemical-Mechanical Planarization
- Place of Presentation
  Lake Placid , NY
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Science in porosity engineering of low-k dielectrics using supercritical carbon dioxide-pore characterization and pore cleaning (invited)2010
- Author(s)
  Eiichi Kondoh
- Organizer
  SEMICON Korea 2010
- Place of Presentation
  COEX Seoul
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Evalaution of the connectivity of micropores (<2 nm) and supermicropores (<0.5 mn) in low-k thin films using supercritical fluids2010
- Author(s)
  Eiichi Kondoh
- Organizer
  MAM 2010
- Place of Presentation
  Lamot Mechelen, Belgium
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価2009
- Author(s)
  近藤英一, 有賀庄作, 伊藤文則, 林喜弘
- Organizer
  化学工学会第74年会
- Place of Presentation
  横浜国立大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積2009
- Author(s)
  近藤英一
- Organizer
  社団法人表面技術協会第119回講演大会
- Place of Presentation
  山梨大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価2009
- Author(s)
  .近藤英一, 有賀庄作, 伊藤文則, 林喜弘
- Organizer
  化学工学会第74年会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Siナノホールの作製と超臨界CO2によるCu埋め込み2009
- Author(s)
  玉井架, 松原正弘, 近藤英一, 李佳龍, 松村道雄
- Organizer
  日本機械学会第15期総会講演会
- Place of Presentation
  茨城大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Initial Cu growth in Cu-seeded and Ru-lined narrow trenches for super criticalfluid Cu chemical deposition2009
- Author(s)
  Eiichi Kondoh
- Organizer
  Advanced Metallization Conference 19th Asian Session 2009
- Place of Presentation
  Sanjo Conference Hall, The University of Tokyo,
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] Deposition kinetics of Cu thin films in supercritical carbon dioxide from a Cu (II) beta-diketonate complex2009
- Author(s)
  Eiichi Kondoh
- Organizer
  Supergreen 2009
- Place of Presentation
  Sakura Hall, Tohoku University
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討2009
- Author(s)
  小高和也, 有賀庄作, 近藤英一
- Organizer
  2009年春季第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k膜の開孔性評価法の検討2009
- Author(s)
  有賀庄作, 齋藤雄亮, 米山明里, 近藤英一
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積2009
- Author(s)
  近藤英一
- Organizer
  (社)表面技術協会第119回講演大会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中Cu堆積法におけるCuシード付トレンチ内への初期堆積特性2009
- Author(s)
  近藤英一
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-21360147
[Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討2009
- Author(s)
  小高和也, 有賀庄作, 近藤英一
- Organizer
  2009 年春季第56回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体を用いたCu薄膜堆積~成膜特性検討と貫通電極プロセスへの適用の試み2008
- Author(s)
  松原正弘, 近藤英一
- Organizer
  電子材料研究会
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] フロー超臨界薄膜装置による薄膜の堆積特性と長時間成膜への適用2008
- Author(s)
  近藤英一, 松原正弘
- Organizer
  日本機械学会第14期総会講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体を用いた各種細胞からの核酸のとりだし2008
- Author(s)
  近藤英一, 堀内愛, 御園生拓
- Organizer
  化学工学会第40回秋季大会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Si ナノホールの作製と超臨界CO_2によるCu 埋め込み,2008
- Author(s)
  玉井架, 松原正弘, 近藤英一, 李佳龍(阪大), 松村道雄
- Organizer
  日本機械学会第15 期総会講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測2008
- Author(s)
  有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
- Organizer
  化学工学会第40 回秋季大会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions2008
- Author(s)
  Eiichi Kondoh, Michiru Hirose, Eiichi Ukai, Kodai Nagano, Junju Yamanaka, Chiaya Yamamoto
- Organizer
  MNE2008
- Place of Presentation
  Athens Hilton Hotel Greece
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Cu filmd eposition from super critical carbon dioxide fluids for 3D-IC THRU via formation2008
- Author(s)
  Masahiro Matsubara, Eiichi Kondoh
- Organizer
  11th European Meeting on Supercritical Fluids
- Place of Presentation
  Serhs Campus Hotel, Barcelona,Spain
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測2008
- Author(s)
  有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
- Organizer
  化学工学会第40回秋季大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界CO2 堆積法を用いたMEMS 貫通電極ヴィア孔内のCu 薄膜形成(フロー方式第6 報)2008
- Author(s)
  近藤英一, 松原正弘
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Cu film deposition from super critical carbon dioxide fluids for 3D-IC THRU via formation2008
- Author(s)
  M, Matsubara, E, Kondoh
- Organizer
  11th European Meeting on Supercritical Fluids
- Place of Presentation
  Serhs Campus Hotel Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体を用いたCu薄膜堆積〜成膜特性検討と貫通電極プロセスへの適用の試み2008
- Author(s)
  松原正弘, 近藤英一
- Organizer
  電気学会研究会電子材料研究会
- Place of Presentation
  社団法人電気学会
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] A fast new approach for evaluating the connectivity of micropores(<2nm)and supermicropores(<0.5mn) in low-k thin films2008
- Author(s)
  Eiichi Kondoh, Shosaku Aruga,Fuminori Ito and Yoshinori Hayashi
- Organizer
  Advanced Metallization Conference Asian Session 2008
- Place of Presentation
  The University of Tokyo
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] A Fast New Approach for Evaluating the Connectivity of Micropores (<2 nm) and Supermicropores (<0.5 nm) in Low-k Thin Films2008
- Author(s)
  E. Kondoh, S. Aruga, F. Ito, Y. Hayashi
- Organizer
  Advanced Metallization Conference 2008 18th Asian Session
- Place of Presentation
  The Univ. of Tokyo
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] βジケトン錯体原料を用いたフロー式Cu 薄膜堆積の堆積特性2008
- Author(s)
  松原正弘, 近藤英一
- Organizer
  化学工学会第73 年会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界CO2 流体を利用したDNA 抽出の試み2008
- Author(s)
  .近藤英一, 堀内愛, 御園生拓
- Organizer
  化学工学会第73年会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions2008
- Author(s)
  E. Kondoh, M. Hirose, E. Ukai, K. Nagano, J. Yamanaka, C. Yamamoto
- Organizer
  MNE2008 34th International Conference
- Place of Presentation
  Athens Hilton Hotel Greece
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 多孔質Low-k 膜を超臨界二酸化炭素洗浄した際の共溶媒の挙動2008
- Author(s)
  有賀庄作, 小高和也, 近藤英一
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] In-situ 偏光解析法による超臨界流体中での有機金属浸透のモニタリング2008
- Author(s)
  近藤英一, 有賀庄作, 鵜飼栄一
- Organizer
  化学工学会第73 年会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k 膜の開孔性評価法の検討2008
- Author(s)
  .有賀庄作, 齊藤雄亮, 米山明里, 近藤英一
- Organizer
  2008 年秋季第69回応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] In-situ ellipsometric study on the condensation and cleanign of a metalorganic copper compond to/from porous low-k thin films in supercritical carbon dioxide2007
- Author(s)
  E. Kondoh
- Organizer
  12th International Symposium on Chemical-Mechanical Plarnization
- Place of Presentation
  Lake Placid, NY, USA
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability(invited)2007
- Author(s)
  E. Kondoh
- Organizer
  The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007)
- Place of Presentation
  hotel "Lipki", Zvenigorod, Moscow region
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界二酸化炭素中その場偏光解析法の開発~多孔質low-k 膜の洗浄過程の解析2007
- Author(s)
  近藤英一, 有賀庄作
- Organizer
  第1回偏光計測研究会
- Year and Date
  2007-11-16
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体中薄膜堆積法における「形状敏感」堆積モード : Beyond Scalability2007
- Author(s)
  近藤英一, 廣瀬みちる, 鵜飼栄一, 有賀庄作, 長能広大
- Organizer
  2007年春季第54回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] フロー堆積システムによるCu薄膜堆積2007
- Author(s)
  近藤英一, 廣瀬みちる, 福田順平, 松原正弘
- Organizer
  化学工学会第39回秋季大会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Condensation and cleaning of an orgnometallic copper com-pound to/from porous low-dielectric constant thin films in su-percritical carbon dioxide2007
- Author(s)
  E. Kondoh, E. Ukai, and S. Aruga
- Organizer
  The 4th International Conference on Spectroscopic Ellipsometry (ICSE4)
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体の配線技術への応用2007
- Author(s)
  近藤英一, 廣瀬みちる
- Organizer
  日本機械学会関東支部2007年総会・講演会
- Year and Date
  2007-03-16
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Novel "Topography-sensitive" Bottom-up mode for Filling Nano-features Using Superciritical Fluids as a Deposition Medium2007
- Author(s)
  E.Kondoh and M. Hirose
- Organizer
  MRS 2007 Spring Meeting Symposium D: Deposition on Nonplanar Substrates
- Place of Presentation
  San Francisco
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界二酸化炭素中その場偏光解析法の開発(2)~多孔質low-k 膜の洗浄過程の解析2007
- Author(s)
  有賀庄作, 鵜飼栄一, 近藤英一
- Organizer
  2007年秋季第68回応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Bottom-up interconnect formation possibility using supercritical fluids:beyond scalability(invited)2007
- Author(s)
  E.Kondoh
- Organizer
  The International Conference"Micro- and nanoele ctronics-2007"(ICMNE-2007)
- Place of Presentation
  hotel"Lipki",Zvenigorod,Moscow region
- Data Source
  KAKENHI-PROJECT-19026005
[Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability2007
- Author(s)
  E. Kondoh
- Organizer
  The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007) and co-located Symosium"Quantum Informatics-2007"(QI-2007) will be held at the holiday hotel "Lipki"
- Place of Presentation
  Zvenigorod, Moscow region
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Deposition of Oxide Thin Films in Supercritical Carbon Dioxide Fluids2007
- Author(s)
  E. Kondoh
- Organizer
  the Sixth Pacific Rim International Conference on Advanced Materials and Processing
- Place of Presentation
  ICC Cheju
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 機能性高密度流体プロセッシング2007
- Author(s)
  近藤英一
- Organizer
  2007年秋季第68回応用物理学会学術講演会講演
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Metalization using supercritical fluids for post-scalability ULSI processing,8th Seminar Porous Glasses-Special Glasses;2007
- Author(s)
  E. Kondoh
- Organizer
  Porous Glass Technology for Detection of Chemical Agents
- Place of Presentation
  in Wroclaw/Szklarska Poreba, Poland from the 4
- Year and Date
  2007-09-08
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Nanostructure formation using supercritical fluids2006
- Author(s)
  E.kondoh
- Organizer
  32nd International Conference on Micro- and Nano- Engineering (MNE06)
- Place of Presentation
  Barcelona WTC, Spain
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体を利用した薄膜形成技術2006
- Author(s)
  近藤英一
- Organizer
  産業技術総合研究所new-SIC研究会第3回研究会
- Year and Date
  2006-09-20
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] フロー方式超臨界薄膜堆積装置の開発とCu成膜特性(フロー方式第5報)-全流体型システムの構築2006
- Author(s)
  廣瀬みちる, 小林直, 近藤英一
- Organizer
  2006年第67回応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 超臨界流体をもちいたZnO 薄膜の堆積2006
- Author(s)
  近藤英一, 佐々木健二
- Organizer
  2006 年第67 回応用物理学会学術講演会
- Place of Presentation
  立命館大学びわこくさつキャンパス
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] Kinetics and Narrow-Gap Filling in Cu Thin Film Deposition from Supercritical Carbon Dioxide Fluids-Precise and Reliable Experiments using a Flow-Type Deposition Processor2006
- Author(s)
  E. Kondoh, M. Hirose and J. Fukuda
- Organizer
  Advanced Metallization Conference 2006: 16th Asian Session, Sept
- Place of Presentation
  The University of Tokyo
- Data Source
  KAKENHI-PROJECT-18206031
[Presentation] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性
- Author(s)
  松原正弘，近藤英一
- Organizer
  一般社団法人表面技術協会第124回講演大会(招待講演)
- Place of Presentation
  名古屋大学　東山キャンパス
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 生体組織を利用した金属配線形成の試み
- Author(s)
  望月裕文，渡邉満洋，近藤英一
- Organizer
  表面技術協会第126回講演大会
- Place of Presentation
  室蘭工業大学（北海道）
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 準ニュートン法を用いたエリプソメトリー計測の窓補正
- Author(s)
  金蓮花,春日翔貴，近藤英一
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] その場エリプソメトリーにおける窓の補正方法およびその応用
- Author(s)
  春日翔貴，近藤英一, 金蓮花
- Organizer
  Optics & Photonics Japan 2014
- Place of Presentation
  筑波大学（東京都文京区）
- Year and Date
  2014-11-05 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-24560043
[Presentation] 超臨界流体を利用した金属薄膜堆積技術
- Author(s)
  近藤英一
- Organizer
  表面技術協会将来めっき技術検討部会第十回例会「あたらしいめっき関連技術」
- Place of Presentation
  回路会館（東京都）
- Invited
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] Can bio veins be used as interconnects?
- Author(s)
  Eiichi Kondoh, Hirofumi Mochizuki, and Mitsuhiro Watanabe
- Organizer
  Materials for Advanced Metallization 2013
- Place of Presentation
  Kotholike Universiteit Leuven　（ベルギー）
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 生体のネットワーク解探索機能を活用した配線構造の提案と生体メタライズ
- Author(s)
  近藤英一，渡邉満洋，望月裕文，後藤利章
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学（神奈川県）
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 生体を利用した高バンド幅立体配線構造の提案
- Author(s)
  近藤英一
- Organizer
  電気学会C部門大会
- Place of Presentation
  北見工業大学（北海道）
- Invited
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] 超臨界流体を用いた金属薄膜堆積―メリットと展望―
- Author(s)
  近藤英一
- Organizer
  化学工学会第44回秋季大会
- Place of Presentation
  東北大学（宮城県）
- Invited
- Data Source
  KAKENHI-PROJECT-23656213
[Presentation] エリプソメトリーにおける観測窓補正の一般化
- Author(s)
  金蓮花，春日翔貴，近藤英一
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-24560043

1. JIN Lianhua (40384656)

# of Collaborated Projects: 6 results

# of Collaborated Products: 68 results
2. KAKIO Shoji (70242617)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
3. WATANABE Mitsuhiro (90532036)

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
4. KONDOH Eiichi (40304871)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 松村道雄 (20107080)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 池田茂 (40312417)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 原田隆史 (00379314)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 平井豪 (80423086)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. Bernard Gelloz (40343157)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. BERNAD GELLOZ

# of Collaborated Projects: 0 results

# of Collaborated Products: 14 results
11. 梅田倫弘

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

KONDOH Eiichi 近藤 英一

Research Projects

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Co-Researchers

次世代集積回路配線と液体／金属接面in-situ計測：どこまでわかりどう使うか？Principal Investigator

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Development of a Mueller Matrix Microscope

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Thermochemical dry etching of noble and near-noble metals using supercritical carbon dioxide fluidsPrincipal Investigator

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Process technologies for integrating nano-crystalline Si and wide-bandgap semiconductors aiming to fabricating novel optoelectronics devicesPrincipal Investigator

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Development and application of optical model for object recognition with the polarization fingerprint

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Construction and its application of the polarization fingerprint

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Interconnect formation for high-band-width packagingPrincipal Investigator

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Multiscale control of supercritical fluid thin film processing using fluctuation imaging ellipsometryPrincipal Investigator

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触媒作用を利用したシリコンへの微細配線形成技術の開発

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超高密度流体中での動的溶解度制御を利用した形状敏感型自己整合ナノプロセスPrincipal Investigator

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Development of topography-sensitive nano device processing aided by in-situ ellipsometry in supercritical fluidsPrincipal Investigator

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Development of Novel, High-Speed, and Environmentally-Friendly Thin Film Deposition Technology using Supercritical Carbon Dioxide FluidsPrincipal Investigator

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超臨界流体を利用した配線形成技術の研究Principal Investigator

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KONDOH Eiichi 近藤英一