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庄子 大生  ショウジ ダイセイ

ORCIDConnect your ORCID iD *help
Researcher Number 30312672
Affiliation (based on the past Project Information) *help 2000: 東北大, 電気通信研究所, 助手
1999: 東北大学, 電気通信研究所, 助手
Review Section/Research Field
Principal Investigator
表面界面物性
Except Principal Investigator
固体物性Ⅰ(光物性・半導体・誘電体) / 電子デバイス・機器工学
Keywords
Except Principal Investigator
多重内部反射 / 赤外分光 / 半導体 / Multiple internal reflection / Infrared spectroscopy / Semiconductor / 酸化 / 反応機構 / Oxidation / Reaction mechanism … More / Adsorption-desorption / Surface / 吸着・脱離 / 表面 / Large-diameter Si wafer / In-line monitoring / organic materials / surface contamination / インライン・モニタリング / シリコン / 大口径ウェーハ / インライン・モニタ / 有機物 / 表面汚染 / エッチング / 電極反応 / 固液界面 Less
  • Research Projects

    (4 results)
  • Co-Researchers

    (4 People)
  •  窒化による化合物半導体表面の不活性化に関する研究Principal Investigator

    • Principal Investigator
      庄子 大生
    • Project Period (FY)
      2000
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      表面界面物性
    • Research Institution
      Tohoku University
  •  赤外反射分光法による半導体電極-溶液界面反応機構の研究

    • Principal Investigator
      NIWANO Michio
    • Project Period (FY)
      1999
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Tohoku University
  •  Research of hydrogen reaction dynamics at semiconductor surfaces by multiple-internal-reflection infrared spectroscopy

    • Principal Investigator
      NIWANO Michio
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      固体物性Ⅰ(光物性・半導体・誘電体)
    • Research Institution
      Tohoku University
  •  Developmental Research of an Apparatus for In-line Monitoring of Contamination on Si Wafer Surface

    • Principal Investigator
      NIWANO Michio
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tohoku University
  • 1.  NIWANO Michio (20134075)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 2.  KIMURA Yasuo (40312673)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  KAMAKURA Nozomu (50323118)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  遠田 義晴 (20232986)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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