Takahashi Kazuo 高橋和生

… Alternative Names

TAKAHASHI Kazuo 高橋和生

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Researcher Number	50335189
Other IDs
External Links
Affiliation (Current)	2025: 京都工芸繊維大学, 電気電子工学系, 教授
Affiliation (based on the past Project Information) *help	2016: 京都工芸繊維大学, 電気電子工学系, 准教授 2015 – 2016: 京都工芸繊維大学, その他部局等, 准教授 2007 – 2014: Kyoto Institute of Technology, 工芸科学研究科, 准教授 2006: 京都工芸繊維大学, 工芸科学研究科, 助教授 2005: 京大, 工学(系)研究科(研究院), 助手 … More 2004 – 2005: 京都大学, 大学院・工学研究科, 助手 2004: 京都大学, 助手 2001 – 2004: 京都大学, 工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator Thin film/Surface and interfacial physical properties / Science and Engineering Except Principal Investigator Plasma science / Material processing/treatments / Science and Engineering / プラズマ理工学 / Material processing/treatments / Sports science / Aerospace engineering / 表面界面物性
Keywords	Principal Investigator プラズマプロセス / 温度計測 / プラズマ / 微粒子プラズマ / ナノ界面プラズマ / ナノデバイス / プラズマ加工 / 湿度計測 / エッチング / フッ素 … More / ダイヤマンド状炭素膜 / MOSFET / ゲート / high-k / ナノビバイス … More Except Principal Investigator プラズマ / MEMS / マイクロ波励起プラズマ / 微粒子プラズマ / ダストプラズマ / 微粒子 / 内部アンテナ / 誘導結合プラズマ / 軸対称表面波励起プラズマ / マイクロノズル / マイクロプラズマ / 半導体マイクロ波素子 / プラズマスラスター / フォノン励起 / plasma surface process / non-equilibrium process / ultra-short pulse laser / phonon excitation / ultra-shallow junction / ミリ波照射 / 非平衡プラズマ照射 / プラズマ処理 / 非平衡プロセス / 超短パルスレーザー / 半導体極浅接合 / Chemical Vapor Deposition / Etching / High-Density Plasma / Feature Profile Evolution / Surface Reaction / Particle Transport / Microstructure / Plasma Processing / 化学気相堆積 / エッチング / 高密度プラズマ / 加工形状進展 / 表面反応過程 / 粒子輸送過程 / 超微細構造 / プラズマプロセス / plasma-based ion implantation / large-volume plasma source / low inductance antenna / internal antenna / inductively coupled plasmas / プラズマイオン注入プロセス / 大容積プラズマ / 低インダクタンス / プラズマ科学 / コンプレックスプラズマ / 核融合装置 / 渦 / 光散乱 / インテグラルフォトグラフィ / 偏光解析 / 微粒子流 / クーロン結晶 / 光計測 / エリプソメトリ / 制御 / 計測 / Dusty Plasma / Control / Measurement / Fine Particles / Plasma / Fine-Particle Plasma / C2C12細胞 / 細胞増殖 / 骨格筋 / 大気圧プラズマ / スポーツ生化学 / マグネトロンプラズマ / 微小重力 / 国際宇宙ステーション / 臨界現象 / 高温反応場 / 亜音速・超音速流れ場 / 高温反応揚 / 亜音速・超音速流れ揚 / プラズマスラスタ / 内部アンテナ型誘導結合プラズマ / 製膜プロセス / 酸化物ナノ粒子 / ナノコンポジット / 超音速流れ / 超小型プラズマスラスター / 超小型電気推進 / 表面波励起プラズマ / 電気推進 / コヒーレントフォノン / 活性化 / 極浅半導体接合 Less

微粒子プラズマナノ界面における化学反応の解析と浮遊型熱センサの開発Principal Investigator
- Principal Investigator
  
  高橋和生
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Kyoto Institute of Technology
Measurements, Analyses and Control of Fine-Particle Plasmas
- Principal Investigator
  
  Hayashi Yasuaki
- Project Period (FY)
  2012 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma science
- Research Institution
  Kyoto Institute of Technology
Skeletal muscle cell activation by atmospheric plasma exposure and application to tissues
- Principal Investigator
  
  NAKAI Naoya
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Sports science
- Research Institution
  Osaka University
微粒子プラズマ中のナノ界面における熱ダイナミクスの解明Principal Investigator
- Principal Investigator
  
  高橋和生
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Kyoto Institute of Technology
Analyses of chemical reaction producing carbonized-metal for ULSI plasma etching processPrincipal Investigator
- Principal Investigator
  
  TAKAHASHI Kazuo
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kyoto Institute of Technology
Critical Phenomena in Fine-Particle Plasma
- Principal Investigator
  
  HAYASHI Yasuaki
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Kyoto Institute of Technology
マイクロプラズマスラスタの研究開発:高温反応場と高速流れ場の競合現象の解明と制御
- Principal Investigator
  
  斧高一
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Kyoto University
次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発Principal Investigator
- Principal Investigator
  
  高橋和生
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kyoto Institute of Technology
次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発Principal Investigator
- Principal Investigator
  
  高橋和生
- Project Period (FY)
  2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kyoto University
マイクロプラズマスラスターの研究開発
- Principal Investigator
  
  斧高一
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Kyoto University
気相成長ナノ粒子直接照射による酸化物ナノコンポジット機能材の低温高速成膜法の開発
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Mechanism Investigations and Control of Phonon-Excitation Anneal Process for Ultra-Shallow Junction Formation
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
  Kyoto University
コヒーレントフォノン励起による極浅半導体接合の低温活性化に関する基礎研究
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  表面界面物性
- Research Institution
  Kyoto University
表面波励起プラズマを用いた超小型プラズマスラスターの研究開発
- Principal Investigator
  
  ONO Kouichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Aerospace engineering
- Research Institution
  Kyoto University
A Study of the Particle Transport and Surface Reactions in Microstructures on Substrates during Plasma Processing
- Principal Investigator
  
  ONO Kouichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kyoto University
Development of Plasma Technologies for Advanced Plasma-Based Ion Implantation Processes Using Internal-Antenna-Driven Large-Volume RF Plasma Sources
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  KYOTO UNIVERSITY

[Book] プラズマプロセス技術2017
- Author(s)
  高橋和生（分担執筆）
- Total Pages
  7
- Publisher
  森北出版
- Data Source
  KAKENHI-PROJECT-24244094
[Book] Multifacets of Dusty Plasmas (AIP Conference Proceedings 1041)2008
- Author(s)
  Kazuo Takahashi, et. al.
- Total Pages
  2
- Publisher
  American Institute of Physics
- Data Source
  KAKENHI-PROJECT-19340177
[Book] Ordering of Fine Partciles in a Planar Magnetron Plasma, Multifacets of Dusty Plasmas (AIP Conference Proceedings 1041)2008
- Author(s)
  Y, Hayashi, K. Takahashi, H. Totsuji, O. Ishihara, N. Sato, Y. Watanabe, S. Adachi
- Data Source
  KAKENHI-PROJECT-19340177
[Book] Diagnosis in Complex Plasmas for Microgravity Experiments (PK-3 plus), Multifacets of Dusty Plasmas (AIP Conference Proceedings 1041)2008
- Author(s)
  Kazuo Takahashi, Hubertus M. Thomas, Gregor E. Morfill, Alexei V. Ivlev, Yasuaki Hayashi, Satoshi Adachi
- Data Source
  KAKENHI-PROJECT-19340177
[Journal Article] Behavior of Fine Particle (Dust) Clouds in Plasmas under Gravity and Microgravity2016
- Author(s)
  Hiroo Totsuji, Kazuo Takahashi, Satoshi Adachi
- Journal Title
  
  Int. J. Microgravity Sci. Appl.
  
  Volume: 33
- NAID
  130007842617
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] 微小重力環境下における微粒子プラズマ研究の最前線－プラズマパラメータ計測にもとづく研究の現状－2016
- Author(s)
  高橋和生
- Journal Title
  
  J. Plasma Fusion Res.
  
  Volume: 92 Pages: 378-382
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] Estimation of Plasma Parameters in Dusty Plasmas for Microgravity Experiments2015
- Author(s)
  Takahashi, K, Thomas, H, M, Molotkov, V, I, Morfill, G, E, Adachi, S.
- Journal Title
  
  International journal of microgravity science and application
  
  Volume: 32 Issue: 4 Pages: 320409
- DOI
  10.15011/jasma.32.320409
- NAID
  130007842543
- ISSN
  2188-9783
- Year and Date
  2015-10-31
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] Synthesis of hydrogen-doped zinc oxide transparent conductive films by RF magnetron sputtering2015
- Author(s)
  Ikki Takahashi and Yasuaki Hayashi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54
- NAID
  210000144745
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] International Collaboration on Microgravity Experiments using PK-3 Plus Apparatus and Future Plans2015
- Author(s)
  足立聡, 東辻浩夫, 高橋和生
- Journal Title
  
  International journal of microgravity science and application
  
  Volume: 32 Issue: 3 Pages: 320303
- DOI
  10.15011/ijmsa.32.320303
- NAID
  130007842555
- ISSN
  2188-9783
- Year and Date
  2015-07-31
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] Study of Cylindrical Dusty Plasmas in PK-4J; Theory and Simulations2014
- Author(s)
  Hiroo Totsuji, Chieko Totsuji, Kazuo Takahashi, Satoshi Adachi
- Journal Title
  
  Int. J. Microgravity Sci. Appl.
  
  Volume: 31 Pages: 55-61
- NAID
  130007842479
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] Study of Cylindrical Dusty Plasmas in PK-4J; Experiments2014
- Author(s)
  Kazuo Takahashi, Manami Tonouchi, Satoshi Adachi, Hiroo Totsuji
- Journal Title
  
  Int. J. Microgravity Sci. Appl.
  
  Volume: 31 Pages: 62-65
- NAID
  130007842475
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24244094
[Journal Article] Measurement of electron density in complex plasmas of the PK-3 plus apparatus on the International Space Station2011
- Author(s)
  Kazuo Takahashi, Yasuaki Hayashi, Satoshi Adachi
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 110 Issue: 1
- DOI
  10.1063/1.3606431
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110507
[Journal Article] Electrode configuration for dusty plasmas with uniform dust clouds under microgravity conditions2011
- Author(s)
  Kazuo Takahashi, Noriyoshi Sato, Yukio Watanabe, Yasuaki Hayashi, Satoshi Adachi
- Journal Title
  
  AIP Conference Proceedings
  
  Volume: 1397 Pages: 319-320
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110507
[Journal Article] 高誘電率(High-k)材料のエッチング反応2010
- Author(s)
  高橋和生、高橋麗
- Journal Title
  
  Material Stage 10
  
  Pages: 45-48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760023
[Journal Article] 高誘電率(High-k)材料のエッチング反応2010
- Author(s)
  高橋和生、高橋麗
- Journal Title
  
  Material Stage 5巻
  
  Pages: 45-48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760023
[Journal Article] Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas2010
- Author(s)
  T.Ide, K.Nishio, K.Takahashi
- Journal Title
  
  IEEE Explore, TENCON 2010-2010 IEEE Region 10 Conference
  
  Volume: 10.1109/TENCON.2010.5685966 Pages: 158-163
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110507
[Journal Article] Development of fine-particle plasma systems for basic and applied research2010
- Author(s)
  Y.Hayashi, M.Imano, Y.Mizobata, K.Takahashi
- Journal Title
  
  Plasma Sources Sci.Technol. 18(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19340177
[Journal Article] Behaviors of Fine Particles in a Planar Magnetron Plasma2009
- Author(s)
  Y.Hayashi, Y.Mizobata, K.Takahashi
- Journal Title
  
  J.Plasma Fusion Res.SERIES 8
  
  Pages: 298-301
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19340177
[Journal Article] Behaviors of Fine Particles in a Planar Magnetron Plasma2009
- Author(s)
  Y. Hayashi, Y. Mizobata, K. Takahashi
- Journal Title
  
  J. Plasma Fusion Res. (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19340177
[Journal Article] Takayanagi: "Experiments of fine particle plasmas toward observation of critical phenomena"2008
- Author(s)
  Y. Hayashi, K. Takahashi, H. Totsuji, O. Ishihara, S. Hamaguchi, N. Sato, Y. Watanabe, S. Adachi, M.
- Journal Title
  
  J. Jpn. Soc. Microgravity Appl 25(3)
  
  Pages: 353-356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19340177
[Journal Article] Micro plasma thruster for ultra small satellites: Plasma chemical and aerodynamical aspects2008
- Author(s)
  Y. Takao, T. Takahashi, K. Eriguchi, and K. Ono
- Journal Title
  
  Pure Appl. Chem. (In press)
- NAID
  120005553869
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030007
[Journal Article] Numerical Analysis and Experiments of a Microwave-excited Microplasma Thruster2007
- Author(s)
  T. Takahashi, Y. Takao, K. Eriguchi, and K. Ono
- Journal Title
  
  Proc. 30th Int. Electric Propulsion Conf. (30th IEPC), Florence, Italy, Sep. 2007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030007
[Journal Article] Properties of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Modules2006
- Author(s)
  K.Takenaka, Y.Setsuhara, K.Nishisaka, A.Ebe, S.Sugiura, K.Takahashi, K.Ono
- Journal Title
  
  Proc.6th International Conf. on Reactive Plasmas and 23rd Symp. on Plasma Processing, Matsushima, Japan, Jan.24-27
  
  Pages: 183-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2006
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- NAID
  120005553870
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Plasma Diagnostics and Thrust Performance Analysis of a Microwave -Excited Microplasma Thruster2006
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, K.Eriguchi
- Journal Title
  
  Jpn.J.Appl.Phys.Part 1 Vol.45,No.7(in press)
- NAID
  10018339427
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2006
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films Vol.506-507
  
  Pages: 592-596
- NAID
  120005553870
- Data Source
  KAKENHI-PROJECT-18030007
[Journal Article] Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster2006
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, K.Eriguchi
- Journal Title
  
  Jpn.J.Appl. Phys. Vol.45, No.10B
  
  Pages: 8235-8240
- NAID
  10018339427
- Data Source
  KAKENHI-PROJECT-18030007
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2005
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- NAID
  120005553870
- Data Source
  KAKENHI-PROJECT-14655364
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2005
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- NAID
  120005553870
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Optical emission spectroscopy of a microwave-excited plasma source for very small propulsion2004
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Bulletin of the American Physical Society Vol.49,No.5
  
  Pages: 40-40
- Data Source
  KAKENHI-PROJECT-14655364
[Journal Article] 誘導結合型フルオロカーボンプラズマを用いた高誘電率HfO_2薄膜のエッチング2004
- Author(s)
  高橋和生, 斧高一, 節原裕一
- Journal Title
  
  表面技術 Vol.55 No.12
  
  Pages: 793-799
- NAID
  10014096314
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Low-Temperature Activation of Ion Implanted Nano-Scale Dopant Layer for Ultra-Shallow Semiconductor Junction Formation by Nonequillibrium Phonon Exitation Processes2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita, K.Takahashi, K.Ono
- Journal Title
  
  Ninth International conference on Plasma Surface Engineering(Garmisch-Partenkirchen, Germany, September 13-17,2004)
  
  Pages: 372-372
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Etching of High Dielectric Constant HfO_2 Thin Films in Inductively Coupled Fluorocarbon Plasmas2004
- Author(s)
  K.Takahashi, K.Ono, Y.Setsuhara
- Journal Title
  
  J.Surface Finishing Soc.Jpn.[in Japanese] Vol.55, No.12
  
  Pages: 793-799
- NAID
  10014096314
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Optical emission spectroscopy of a microwave-excited plasma source for very small propulsion2004
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Bulletin of the American Physical Society Vol.49,No.5
  
  Pages: 40-40
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Low-Temperature Activation of Ion Implanted Nano-Scale Dopant Layer for Ultra-Shallow Semiconductor Junction Formation by Nonequilibrium Phonon Excitation Processes2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita, K.Takahashi, K.Ono
- Journal Title
  
  Ninth International Conference on Plasma Surface Engineering (Garmisch-Partenkirchen, Germany, September 13-17)
  
  Pages: 372-372
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Selective etching of HfO_2 high-κ gate materials over Si in C_4F_8/Ar/H_2 plasmas2004
- Author(s)
  K.Takahashi, K.Ono
- Journal Title
  
  Proceedings of the 4th International Symposium on Dry Process, DPS-2004,Tokyo, Japan, November 2004
  
  Pages: 369-274
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] NONEQUILIBRIUM FORMATION OF NANOSCALE ULTRA-SHALLOW JUNCTIONS BY COHERENT PHONON EXCITATION PROCESS2003
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fuita, S.Adachi, B.Mizuno, K.Takahashi, K.Nogi, K.Ono
- Journal Title
  
  International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, Kurashiki, Japan, September 24-27
  
  Pages: 91-91
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002
- Author(s)
  A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo (IEEJ, Tokyo, 2002)
  
  Pages: 177-182
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002
- Author(s)
  A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo, Japan 2002
  
  Pages: 177-182
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Patent] プラズマを用いた微粒子配列装置及び微粒子配列方法2011
- Inventor(s)
  高橋和生, 美山遼
- Industrial Property Rights Holder
  京都工芸繊維大学
- Industrial Property Number
  2011-174128
- Filing Date
  2011-08-09
- Data Source
  KAKENHI-PUBLICLY-22110507
[Patent] マイクロアレイ用基板及びその製造方法2008
- Inventor(s)
  新田祐樹, 上原健一, 岡本圭司, 中谷達行, 高橋麗, 高橋和生, 大嶋悟
- Industrial Property Rights Holder
  国立大学法人京都工芸繊維大学, トーヨーエイテック株式会社
- Industrial Property Number
  2008-164791
- Filing Date
  2008-06-11
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] 微小重力環境下における微粒子プラズマクーロン結晶の構造2015
- Author(s)
  高橋和生, 足立聡, 東辻浩夫
- Organizer
  第15回宇宙科学シンポジウム
- Place of Presentation
  宇宙研相模原
- Year and Date
  2015-01-07
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] 微小重力環境を利用した微粒子プラズマのイオンウェイクの可視化2015
- Author(s)
  高橋和生, 足立聡, 東辻浩夫
- Organizer
  第29回宇宙環境利用シンポジウム
- Place of Presentation
  宇宙研相模原
- Year and Date
  2015-01-24
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] 国際協力による微小重力実験を目指した航空機による実験条件検討2014
- Author(s)
  高橋和生, *足立聡, 東辻浩夫
- Organizer
  日本マイクログラビティ応用学会第28回学術講演会
- Place of Presentation
  イーグレひめじ
- Year and Date
  2014-11-27
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] 微粒子プラズマのボイドにおけるプラズマ診断2014
- Author(s)
  高橋和生
- Organizer
  Plasma Conference 2014
- Place of Presentation
  新潟朱鷺メッセ
- Year and Date
  2014-11-21
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] PK-4J における円筒状ダストプラズマ: 理論・シミュレーション2014
- Author(s)
  東辻浩夫, 東辻千枝子, 高橋和生, 足立聡
- Organizer
  日本マイクログラビティ応用学会第28回学術講演会
- Place of Presentation
  イーグレひめじ
- Year and Date
  2014-11-27
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] 微粒子プラズマにおけるダブルプローブを用いたイオン密度と電子温度の測定2013
- Author(s)
  高橋和生
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] 微粒子プラズマにおける微粒子表面とガス分子の温度の測定2013
- Author(s)
  高橋和生
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Year and Date
  2013-01-22
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Application of guided particles in dusty plasmas for carbon nanotube syntheses2012
- Author(s)
  高橋和生, 美山遼, 黒田将成
- Organizer
  39th European Physical Society Conference on Plasma Physics joint with the 16th International Congress on Plasma Physics
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2012-07-04
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] 大気球を利用した微粒子プラズマ実験構想2012
- Author(s)
  高橋和生, 東辻浩夫, 足立聡
- Organizer
  大気球シンポジウム
- Place of Presentation
  宇宙航空研究開発機構宇宙科学研究所相模原キャンパス
- Year and Date
  2012-10-17
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Ion impact heating on surface of dust particles in plasmas2012
- Author(s)
  高橋和生
- Organizer
  11th Asia Pacific Conference on Plasma Science and Technology and 25th Symposium on Plasma Science for Materials
- Place of Presentation
  京都
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] 多目的実験ラック利用を目指したプラズマ発生装置の開発(RT2011報告)2012
- Author(s)
  高橋和生, 佐藤徳芳, 渡辺征夫, 林康明, 足立聡, Hubertus M.Thomas, U.Konopka, Gregor E.Morfill, Tanja Hagl, V.I.Molotkov, V.Fortov, A.Lipaev
- Organizer
  宇宙利用シンポジウム(第28回)
- Place of Presentation
  東京(日本学術会議)
- Year and Date
  2012-01-23
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] 微粒子プラズマにおける微粒子の輸送解析と誘導制御2012
- Author(s)
  高橋和生
- Organizer
  第73 回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Measurements with Probes in Dusty (Fine Particle or Dusty) Plasmas for Ideas of a New Apparatus on KIBO2012
- Author(s)
  高橋和生
- Organizer
  13th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Year and Date
  2012-12-07
- Invited
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Trapping Dust Particles in Cylindrical DC/AC Discharges2011
- Author(s)
  Manami Tonouchi, Kazuo Takahashi
- Organizer
  12th Workshop on Fine Particle Plasmas
- Place of Presentation
  土岐(核融合科学研究所)
- Year and Date
  2011-11-27
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] Iron carbide nanocrystal in fluorine-added carbon sputtering plasmas2011
- Author(s)
  Toshiaki Sachi, Koji Nishio, Kazuo Takahashi
- Organizer
  第24回プラズマ材料科学シンポジウム
- Place of Presentation
  大阪大学
- Year and Date
  2011-07-19
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] Transporting and Patterning of Dust Particles in 13.56 MHz RF Plasmas2011
- Author(s)
  Ryo Miyama, Kazuo Takahashi
- Organizer
  12th Workshop on Fine Particle Plasmas
- Place of Presentation
  土岐(核融合科学研究所)(招待講演)
- Year and Date
  2011-11-27
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] Measurements in Fine Particle (Dusty, Complex) Plasmas and Experiments on the International Space Station in a Joint Russian/German Scientific Project微粒子プラズマの計測と国際宇宙ステーション実験2011
- Author(s)
  高橋和生, 林康明
- Organizer
  Plasma Conference 2011
- Place of Presentation
  金沢(招待講演)
- Year and Date
  2011-11-25
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] Electrode Configuration for Dusty Plasmas with Uniform Dust Clouds under Microgravity Conditions2011
- Author(s)
  Kazuo Takahashi, Noriyoshi Sato, Yukio Watanabe, Yasuaki Hayashi, Satoshi Adachi
- Organizer
  6th International Conference on the Physics of Dusty Plasmas
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2011-05-17
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] 微粒子プラズマを用いた基板表面におけるパターンの形成と制御2011
- Author(s)
  美山遼, 高橋和生
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学小白川キャンパス
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] 国際宇宙ステーションにおける微粒子プラズマの実験-電子密度計測からのアプローチ-2010
- Author(s)
  高橋和生, 林康明, 他4名
- Organizer
  第27回プラズマプロセシング研究会
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2010-02-03
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas2010
- Author(s)
  Tomo Ide, Koji Nishio, Kazuo Takahashi
- Organizer
  2010 IEEE Region 10 Conference
- Place of Presentation
  福岡市,福岡国際会議場
- Year and Date
  2010-11-21
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] Nano-crystalline structure of carbon and iron synthesized in dusty plasmas2010
- Author(s)
  Kazuo Takahashi, Tomo Ide, Toshiaki Sachi, Koji Nishio
- Organizer
  第20回日本MRS学術シンポジウム
- Place of Presentation
  横浜市,横浜開港記念会館(招待講演)
- Year and Date
  2010-12-20
- Data Source
  KAKENHI-PUBLICLY-22110507
[Presentation] COおよびH_2添加CF_4プラズマにおけるHfO_2のエッチング特性2010
- Author(s)
  美山遼、高橋和生
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] 国際宇宙ステーションにおける微粒子プラズマ実験2010
- Author(s)
  林康明, 高橋和生, 東辻浩夫, 石原修, 三重野哲, 他5名
- Organizer
  宇宙利用シンポジウム (第26回)
- Place of Presentation
  宇宙航空研究開発機構・相模原キャンパス
- Year and Date
  2010-01-25
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] COおよびH2添加CF4プラズマにおけるHfO2のエッチング特性2010
- Author(s)
  美山遼、高橋和生
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] Analyses of surface reaction on cellulose and glycine treated in atmospheric microwave-exited plasmas for elucidating the mechanism of sterilization2009
- Author(s)
  吉田昇平、小川達也、福田匡、高橋和生、浦山卓也、青木慎二
- Organizer
  The 31^<st> International Symposium on Dry Process
- Place of Presentation
  Busan Exhibition & Conve ntion Center, Busan, Korea
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] 微粒子プラズマにおける周波数シフトプローブを用いた電子密度測定2009
- Author(s)
  高橋和生, H. Thomas, G. Morfill, 林康明, 足立聡
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学筑波キャンパス
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] プラズマエッチングにおけるダイヤモンド状炭素膜の表面形状2009
- Author(s)
  松田尚輝、高橋和生、中谷達行、岡本圭司
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] Experiments of Fine-Particle Plasma Using Planar Magnetron System2009
- Author(s)
  Y.Hayashi, Y.Mizobata, K.Takahashi
- Organizer
  10^<th> Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Year and Date
  2009-11-27
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Ground-Based Experiments of Electron Density Measurement for Complex Plasmas in PK-3 PLUS on the ISS2009
- Author(s)
  K.Takahashi, Y.Hayashi., et.al.
- Organizer
  10^<th> Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Year and Date
  2009-11-26
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] フルオロカーボンプラズマにおけるバイオチップ応用のためのダイヤモンド状炭素膜のエッチング特性2009
- Author(s)
  高橋和生, 高橋麗, 松田尚輝, 大嶋悟, 中谷達行, 岡本圭司
- Organizer
  プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
- Place of Presentation
  名古屋
- Year and Date
  2009-02-02
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] Analyses of surface reaction on cellulose and glycine treated in atmospheric microwave-excited plasmas elucidating the mechanism of sterilization2009
- Author(s)
  吉田昇平、小川達也、福田匡、高橋和生、浦山卓也、青木慎二
- Organizer
  The 31st International Symposium on Dry Process
- Place of Presentation
  Busan Exhibition & Convention Center, Busan, Korea
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] Ground-Based Experiment of Plasma Parameter Measurement for Complex Plasmas in PK-3 PLUS on the ISS2009
- Author(s)
  K.Takahashi, Y.Hayashi., et.al.
- Organizer
  ELGRA Biennial Symposium
- Place of Presentation
  Bonn, Germany
- Year and Date
  2009-09-02
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Experiments of fine-particle plasmas under gravity and microgravity conditions using planar-magnetron plasma systems2009
- Author(s)
  Y.Hayashi, K.Takahashi
- Organizer
  ELGRA Biennial Symposium
- Place of Presentation
  Bonn, Germany
- Year and Date
  2009-09-02
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Electron Density Measured by Frequency Shift Probe in Complex Plas mas (PK-3 Plus)2008
- Author(s)
  K. Takahashi, H. Thomas, G. Morfill, Y. Hayashi, S. Adachi
- Organizer
  9^<th> Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Year and Date
  2008-12-18
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Japanese parabolic flight campaigns with PK-3 Plus2008
- Author(s)
  K. Takahashi
- Organizer
  Complex Plasma Ringberg Meeting
- Place of Presentation
  Ringberg, Germany
- Year and Date
  2008-07-03
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] プレーナマグネトロンプラズマ中の微粒子の挙動2008
- Author(s)
  溝端洋平、林康明、高橋和生
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学理工学部
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] フッ素系プラズマを用いたダイヤモンド状薄膜のエッチング2008
- Author(s)
  高橋麗、高橋和生、中谷達行、浦山卓也
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学理工学部船橋キャンパス
- Year and Date
  2008-03-28
- Data Source
  KAKENHI-PROJECT-18760029
[Presentation] Etching of diamond-like carbon in fluorocarbon plasmas2008
- Author(s)
  Rei Takahashi, Kazuo Takahashi
- Organizer
  International Congress on Plasma Physics 2008
- Place of Presentation
  福岡
- Year and Date
  2008-09-08
- Data Source
  KAKENHI-PROJECT-20760023
[Presentation] Electron density and temperature in complex plasmas (PK-3 Plus)on the ISS2007
- Author(s)
  K. Takahashi.
- Organizer
  8th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Year and Date
  2007-12-21
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Plasma Parameters Estimated in Complex Plasmas of PKE-Nefedov on the ISS and PK-3 Plus on the Ground2007
- Author(s)
  K. Takahashi.
- Organizer
  3rd Int. Sympo. Physical Sci. in Space (3rd ISPS)
- Place of Presentation
  奈良県新公開堂
- Year and Date
  2007-10-23
- Data Source
  KAKENHI-PROJECT-19340177
[Presentation] Temperature on Surface of Dust Particles in Plasmas, 14th Workshop on Fine Particle Plasmas
- Author(s)
  Kazuo Takahashi
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Mist in Atmospheric Pressure Plasmas
- Author(s)
  Atsushi Yuri, Kazuo Takahashi
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] Parabolic Flight Experiments for Dust Clouds in Cylindrical Discharges
- Author(s)
  Kazuo Takahashi, Hiroo Totsuji, Satoshi Adachi
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] Growth of sputter-deposited metal nanoparticles on ionic liquids
- Author(s)
  Tetsuya Kato, Kazuo Takahashi, Koji Nishio
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Temperature on Surface of Dust Particles Determined by Spectroscopic Method and Verified by Measurement of Ion Density and Electron Temperature in RF Plasmas
- Author(s)
  Kazuo Takahashi
- Organizer
  8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] Carbon nanotubes growing on metal particles in fluorocarbon plasmas
- Author(s)
  Masanari Kuroda, Kazuo Takahashi, Koji Nishio
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Measurement of ion density and electron temperature determining temperature on dust surface in PK-3 plus
- Author(s)
  Kazuo Takahashi
- Organizer
  International Symposium Plasma Crystals in Space - a Russian-German Program
- Place of Presentation
  Presidium of the Russian Academy of Sciences, Moscow
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Development of Misty Plasmas for Sterilization
- Author(s)
  Atsushi Yuri, Kazuo Takahashi
- Organizer
  8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] Measurement of ion density and electron temperature determining temperature on dust surface in PK-3 plus
- Author(s)
  Kazuo Takahashi
- Organizer
  International Symposium Plasma Crystals in Space - a Russian-German Program
- Place of Presentation
  Presidium of the Russian Academy of Science
- Data Source
  KAKENHI-PROJECT-24244094
[Presentation] Growth of Carbon Nanotubes on Surface of Metal Particles in C4F8 – added CH4/H2 Plasmas (II)
- Author(s)
  Masanari Kuroda, Kazuo Takahashi, Koji Nishio
- Organizer
  8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] Temperature on Surface of Dust Particles Determined by Spectroscopic Method and Verified by Measurement of Ion Density and Electron Temperature in RF Plasmas
- Author(s)
  Kazuo Takahashi
- Organizer
  8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PUBLICLY-24110710
[Presentation] 微粒子プラズマの計測と微小重力下実験
- Author(s)
  林　康明, 高橋和生
- Organizer
  日本物理学会第69回年次大会
- Place of Presentation
  東海大学
- Invited
- Data Source
  KAKENHI-PROJECT-24244094

1. SETSUHARA Yuichi (80236108)

# of Collaborated Projects: 7 results

# of Collaborated Products: 13 results
2. ONO Kouichi (30311731)

# of Collaborated Projects: 6 results

# of Collaborated Products: 19 results
3. HAYASHI Yasuaki (30243116)

# of Collaborated Projects: 2 results

# of Collaborated Products: 17 results
4. SHIRATANI Masaharu (90206293)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. MIENO Tetsu (50173993)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
6. ISHIHARA Osamu (20313463)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
7. TOTSUJI Hiroo (40011671)

# of Collaborated Projects: 2 results

# of Collaborated Products: 11 results
8. KAMIMURA Tetsuo (20023731)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. ADACHI Satoshi (80358746)

# of Collaborated Projects: 2 results

# of Collaborated Products: 13 results
10. SHOJI Tatsuo (50115581)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. SATO Noriyoshi

# of Collaborated Projects: 2 results

# of Collaborated Products: 7 results
12. WATANABE Yukio

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
13. MORFILL Gregor E.

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
14. YODA Shin-Ichi (00344276)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. NAKAI Naoya (90324508)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. MASUZAKI SUGURU (80280593)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. MIYAKE Shoji (40029286)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. FUJITA Masayuki (30260178)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
19. HASHIDA Masaki (50291034)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
20. 藤山寛 (20112310)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 江利口浩二 (70419448)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
22. 齋藤和史 (70251080)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. SANPEI AKIO

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. MASAMUNE SADAO

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. HIMURA HARUHIKO

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. KUROE YASUAKI

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. FUJIWARA SUSUMU

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. MIYATA QUI TRAN-CONG

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. SHIBATA HIROMI

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. HAMAGUHCI SATOSHI

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. KUMAGAI Masao

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. THOMAS M.Hubertus

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
33. MOLOTKOV Vladimir I.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. Boufendi Laifa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. Konopka Uwe

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. Thomas Edward, Jr.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
37. Petrov Oleg F.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. Thomas Hubertus M.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
39. Fortov V. E.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
40. 緒方潔

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Takahashi Kazuo 高橋 和生

TAKAHASHI Kazuo 高橋 和生

Research Projects

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微粒子プラズマナノ界面における化学反応の解析と浮遊型熱センサの開発Principal Investigator

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微粒子プラズマ中のナノ界面における熱ダイナミクスの解明Principal Investigator

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Analyses of chemical reaction producing carbonized-metal for ULSI plasma etching processPrincipal Investigator

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次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発Principal Investigator

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次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発Principal Investigator

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Takahashi Kazuo 高橋和生

TAKAHASHI Kazuo 高橋和生

[Journal Article] 微小重力環境下における微粒子プラズマ研究の最前線－プラズマパラメータ計測にもとづく研究の現状－2016