SETSUHARA Setsuhara 節原裕一

… Alternative Names

Researcher Number	80236108
External Links
Affiliation *help	2011 – 2018 : 大阪大学, 接合科学研究所, 教授 2009 : Osaka University, 接合科学研究科, 教授 2004 – 2008 : Osaka University, Joining and Welding Research Institute, Professor, 接合科学研究所, 教授 2008 : 大阪大学, 接合科学研究所接合科学研究所, 教授 2001 – 2003 : 京都大学, 大学院・工学研究科, 助教授 … More
Review Section/Research Field	Principal Investigator Material processing/treatments / Science and Engineering / プラズマ理工学 / Composite materials/Surface and interface engineering / Plasma science / 表面界面物性 / Material processing/treatments Except Principal Investigator Material processing/treatments / Aerospace engineering / Science and Engineering … More
Keywords	Principal Investigator フォノン励起 / プラズマ加工 / 内部アンテナ / 誘導結合プラズマ / 反応性高密度プラズマ / 酸化物半導体 / 低インダクタンス / 活性化反応場 / 超短パルスレーザー照射 / 大容積プラズマ … More Except Principal Investigator PVD / 高密度プラズマ / イオンビーム / cBN / Ion Beam / プラズマスラスター / マイクロ波励起プラズマ / high density plasma / TiSiN / プラズマ医療科学 / TiCuN / MEMS / アルミナ / 超硬質薄膜 / 半導体マイクロ波素子 / プラズマ / 窒化物 / Functional Materials / Adhesion / 密着性 / Chemical Vapor Deposition / Space Environment / 真空アークプラズマ / Simulation Experiment / Feature Profile Evolution / 相似則 / 窒化珪素 / ヘリコン波 / 鉄 / Dynamic Mixing / システムバイオロジー / Oxide / Surface Modification / イオンビ-ムスパッタリング / ミストCVD / ヘリコン波励起プラズマ / シュミレーション実験 / 薄膜 / 加工形状進展 / 選択加熱 / 超小型プラズマスラスター / 酸素プラズマ / Particle Transport / イオンシース / ミリ波 / 真空アーク / プラズマがん治療 / 環境 / 表面波励起プラズマ / 組織 / 化学気相堆積 / 人工脂質二重膜 / 遺伝子導入 / プラズマ活性点滴 / がん細胞 / がん治療 / プラズマ止血 / selective heating / 超微細構造 / 粒子輸送過程 / 安全安心 / nanocomposite film / マイクロプラズマ / 薄膜合成 / プラズマ医療 / 窒化物薄膜 / 軸対称表面波励起プラズマ / 界面制御 / イオン照射 / イオンビ-ム / 医工連携 / Electric Charging / High-Density Plasma / 電磁エネルギー / Kapton / プラズマ診断 / super-hard material / 接合機構 / 摩擦攪拌接合 / Plasma Processing / ポリイミドフィルム / Functional Gdadient / Etching / Intrefacial Control / 表面改質 / aluminum nitride / helicon wave / thin film / セラミックス焼結 / チタニア / 酸化チタン / 窒化アルミ / Ion-Induced Crystallization / ハイブリッド / 大気圧非平衡プラズマ / シミュレーション実験 / 窒化炭素薄膜 / Alumina / 傾斜構造化 / 帯電 / 超音速流れ / 誘導結合型プラズマ / プラズマ活性培養液 / nitride / プラズマ遺伝子注入 / 複合化 / Thermal Control Material / Ion Beam Assisted Deposition / Functional Gradation / Materials Hybridization / Heterogeneous Materials Joining / inductively coupled plsasma / 透明導電膜 / ナノコンポジット / silicon nitride / スパッタリング / Polyimide / Microstructure / カプトン / sintering / 宇宙環境 / ion bombardment / 宇宙材料 / sintering aids / ラジカル / Ion Sheath / ダイナミックミキシング / 機能材料 / イオン誘起結晶化 / 酸化物 / 誘電特性 / millimeter-wave / 超小型電気推進 / マイクロノズル / 表面反応過程 / ナノコンポジット薄膜 / ラジカル計測 / カーボン薄膜 / 酸化物薄膜 / 抗腫瘍効果 / 医療 / 熱制御材料 / 電気推進 / ルチル構造 / エッチング / carbon nitride film / 傾斜機能 / 活性酸素種 / プラズマ中和器 / 非鉄材料 / Ceramics Sintering / Titania / 太陽電池パネル / Surface Reaction / バイオ / 大気圧プラズマ / プラズマ遺伝子導入 / 異材接合 / Electromagnetic Energy / 助剤 / 創傷治癒 / 止血 / Plasma Contactor / 焼結 / イオンビーム支援蒸着 / 酸化亜鉛 / ツール / プラズマプロセス / ポリイミド / 再生医療 Less

Plasma Science Innovation
- Principal Investigator
  
  堀勝
- Project Period (FY)
  2017
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Research Institution
  Nagoya University
次世代酸化物半導体デバイス低温大面積形成のためのプラズマ反応性高度制御法の創成Principal InvestigatorOngoing
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2016 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Composite materials/Surface and interface engineering
- Research Institution
  Osaka University
Development of novel atomic-layer-deposition plasma PVD processes for efficient and high-rate reactive film-formation processesPrincipal Investigator
- Principal Investigator
  
  Setsuhara Yuichi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Composite materials/Surface and interface engineering
- Research Institution
  Osaka University
Development of deposition technology of surface nano-structure-controlled ZnO thin films using atmospheric pressure non-equilibrium plasma
- Principal Investigator
  
  Takenaka Kosuke
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Osaka University
Plasma Medical Science Innovation
- Principal Investigator
  
  HORI Masaru
- Project Period (FY)
  2012 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Nagoya University
Development of novel plasma sources for plasma medicine through advanced spatio-temporal control of atmospheric-pressure dischargePrincipal Investigator
- Principal Investigator
  
  Setsuhara Yuichi
- Project Period (FY)
  2012 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
Development of novel plasma-enhanced processes for low-temperature formation of high quality oxide semiconductor filmsPrincipal Investigator
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Development of novel function-controlled inorganic/organic layer-formationtechnology through integrated reaction studies on plasma interactions withnanolayers at surface and interfacePrincipal Investigator
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
超短パルスレーザー誘起断熱励起過程による次世代半導体ナノ表面の非熱的改質プロセスPrincipal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
フォノン励起型非熱的ナノ表面改質による次世代半導体活性化プロセスの開発Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
高周波誘導結合による新しい液中プラズマ生成法の開発と粒子処理プロセスの開拓Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Development of hybrid friction stir welding for ferrous-materials by using composite tool with low environmental influence and its joining mechanism
- Principal Investigator
  
  NAKATA Kazuhiro
- Project Period (FY)
  2005 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
マイクロプラズマスラスターの研究開発
- Principal Investigator
  
  斧高一
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Kyoto University
気相成長ナノ粒子直接照射による酸化物ナノコンポジット機能材の低温高速成膜法の開発Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Mechanism Investigations and Control of Phonon-Excitation Anneal Process for Ultra-Shallow Junction FormationPrincipal Investigator
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
  Kyoto University
コヒーレントフォノン励起による極浅半導体接合の低温活性化に関する基礎研究Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  表面界面物性
- Research Institution
  Kyoto University
表面波励起プラズマを用いた超小型プラズマスラスターの研究開発
- Principal Investigator
  
  ONO Kouichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Aerospace engineering
- Research Institution
  Kyoto University
A Study of the Particle Transport and Surface Reactions in Microstructures on Substrates during Plasma Processing
- Principal Investigator
  
  ONO Kouichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kyoto University
Synthesis of Super-Hard Nano-Composite Films by High Density Plsama Sputtering
- Principal Investigator
  
  SHOJI Miyake
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Development of Plasma Technologies for Advanced Plasma-Based Ion Implantation Processes Using Internal-Antenna-Driven Large-Volume RF Plasma SourcesPrincipal Investigator
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  KYOTO UNIVERSITY
低インダクタンス型マルチ線状内部アンテナを用いた大容積RFプラズマ源の開発Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kyoto University
  Osaka University
Development of sintering and joining processes of high performance ceramics for next generation by using high power millimeter-wave radiation
- Principal Investigator
  
  MIYAKE Shoji
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Development of highly reactive high-density plasma sputtering process with excitation of helicon wave for synthesis of superhard nitride filmsPrincipal Investigator
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
ヘリコン波励起型反応性高密度金属原子混合プラズマの開発と超硬質薄膜合成への応用Principal Investigator
- Principal Investigator
  
  節原裕一
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Preparation of Super-Hard Nitride Thin Films for Next Generation by High Density Plasma PVD
- Principal Investigator
  
  MIYAKE Shoji
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Research and Development of Ground Simulation Methods for Spacecraft Environment, and Degradation Experiments of Spacecraft Materials
- Principal Investigator
  
  TAHARA Hirokazu
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Aerospace engineering
- Research Institution
  Osaka University
Functional Materials Processing by Electromagnetic Heating
- Principal Investigator
  
  MIYAKE Shoji
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for international Scientific Research
- Research Institution
  Joining and Welding Research Institute
Formation of Functionally Gradient cBN Films Using Ion Beam
- Principal Investigator
  
  MIYAKE Shoji
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Study on Functional Surface Modification by Ion Dynamic Mixing Method
- Principal Investigator
  
  MIYAKE Shoji
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  溶接工学
- Research Institution
  Osaka university

[Journal Article] Fabrication of high-performance InGaZnOx thin film transistors based on control of oxidation using a low-temperature plasma2018
- Author(s)
  Takenaka Kosuke、Endo Masashi、Uchida Giichiro、Setsuhara Yuichi
- Journal Title
  
  Applied Physics Letters
  
  Volume : 112 Pages : 152103-152103
- DOI
  10.1063/1.5011268
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04509
[Journal Article] Selective production of ROS and RNS in the plasma treated water by using nonthermal low- and high-frequency plasma jets2018
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Keigo Takeda, Kenji Ishikawa, Masaru Hori, Yuichi Setsuhara
- Journal Title
  
  Jpn J Appl Phys
  
  Volume : 57
- DOI
  10.7567/jjap.57.0102b4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-WRAPUP-17H06075, KAKENHI-PROJECT-17H02805
[Journal Article] Low-temperature formation of c-axis-oriented aluminum nitride thin films by plasma-assisted reactive pulsed-DC magnetron sputtering2017
- Author(s)
  Takenaka Kosuke、Satake Yoshikatsu、Uchida Giichiro、Setsuhara Yuichi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 57
- DOI
  10.7567/jjap.57.01ad06
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04509
[Journal Article] Effects of working pressure on the physical properties of a-InGaZnOx films formed using inductively-coupled plasma-enhanced reactive sputtering deposition2016
- Author(s)
  Kosuke Takenaka, Keitaro Nakata, Giichiro Uchida, Yuichi Setsuhara, Akinori Ebe
- Journal Title
  
  EEE Transactions on Plasma Science
  
  Volume : 44 Pages : 3099-3106
- DOI
  10.1109/tps.2016.2593458
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16H04509
[Journal Article] Process controllability of inductively coupled plasma-enhanced reactive sputter deposition for the fabrication of a-InGaZnOx channel TFTs2016
- Author(s)
  K. Takenaka, K. Nakata, H. Otani, S. Osaki, G. Uchida, Y. Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 55
- DOI
  10.7567/jjap.55.01aa18
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Control of reactive oxygen and nitrogen species production in liquid by nonthermal plasma jet with controlled surrounding gas2016
- Author(s)
  T. Ito, G. Uchida, A. Nakajima, K. Takenaka, Y. Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 56
- DOI
  10.7567/jjap.56.01ac06
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Low-temperature atmospheric-pressure plasma sources for plasma medicine2016
- Author(s)
  Y. Setsuhara
- Journal Title
  
  Archives of Biochemistry and Biophysics
  
  Volume : 605 Pages : 3-10
- DOI
  10.1016/j.abb.2016.04.009
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water2016
- Author(s)
  G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara
- Journal Title
  
  J. Appl. Phys
  
  Volume : 120 Pages : 203302-203302
- DOI
  10.1063/1.4968568
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009, KAKENHI-PROJECT-16H03895, KAKENHI-PROJECT-25820113
[Journal Article] Influence of voltage pulse width on the discharge characteristics in an atmospheric dielectric-barrier-discharge plasma jet2016
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 55
- DOI
  10.7567/jjap.55.01ah03
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effects of gas flow on oxidation reaction in liquid induced by a He/O2 plasma-jet irradiation2015
- Author(s)
  A. Nakajima, G. Uchida, T. Kawasaki, K. Koga, T. Sarinont, T. Amano, K. Takenaka, M. Shiratani, and Y. Setsuhara
- Journal Title
  
  J Appl Phys
  
  Volume : 118 Pages : 043301-043301
- DOI
  10.1063/1.4927217
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820113, KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009
[Journal Article] Effects of discharge voltage waveform on the discharge characteristics in a helium atmospheric plasma jet2015
- Author(s)
  G. Uchida, K. Takenaka, Y. Setsuhara
- Journal Title
  
  Journal of Applied Physics
  
  Volume : 117 Pages : 1533011-6
- DOI
  10.1063/1.4918546
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Atmospheric-Pressure Gas-Breakdown Characteristics with a Radio-Frequency Voltage2015
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume : 15 Pages : 2192-2196
- DOI
  10.1166/jnn.2015.10233
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Influence of He Gas Flow Rate on Optical Emission Characteristics in Atmospheric-Dielectric Plasma Jet2015
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata and Y. Setsuhara
- Journal Title
  
  IEEE Trans. Plasma Sci.
  
  Volume : 43 Pages : 734-744
- DOI
  10.1109/tps.2014.2387064
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Low-temperature formation of a-IGZO films with inductively coupled plasma-enhanced reactive sputter deposition2015
- Author(s)
  Kosuke Takenaka, Ken Cho, Yasufumi Ohchi, Hirofumi Otani, Giichiro Uchida and Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Low-temperature formation of amorphous InGaZnOx films with inductively coupled plasma-enhanced reactive sputter deposition2015
- Author(s)
  Kosuke Takenaka, Ken Cho, Yasufumi Ohchi, Hirofumi Otani, Giichiro Uchida, Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 54
- DOI
  10.7567/jjap.54.06gc02
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Dynamic Properties of Helium Atmospheric Dielectric-Barrier-Discharge Plasma Jet2015
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki, K. Kawabata and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume : 15 Pages : 2324-2329
- DOI
  10.1166/jnn.2015.10232
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Plasma Interaction with Organic Molecules in Liquid as Fundamental Processes in Plasma Medicine2015
- Author(s)
  K. Takenaka, A. Miyazaki, H. Abe, G. Uchida and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume : 15 Pages : 2120-2124
- DOI
  10.1166/jnn.2015.10230
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine2015
- Author(s)
  K. Takenaka, A. Miyazaki, G. Uchida and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume : 15 Pages : 2115-2119
- DOI
  10.1166/jnn.2015.10229
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Gas flow rate dependence of the discharge characteristics of a plasma jet impinging onto the liquid surface2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara
- Journal Title
  
  IEEE Trans. Plasma Science
  
  Volume : 43 Pages : 4081-4087
- DOI
  10.1109/tps.2015.2488619
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009, KAKENHI-PROJECT-24340143
[Journal Article] Analysis of Dynamic Discharge Characteristics of Plasma Jet Based on Voltage and Current Measurements Using a Metal Plate2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Nakajima, Kosuke Takenaka
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume : 43 Pages : 3821-3826
- DOI
  10.1109/tps.2015.2482998
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] プラズマを用いたソフトマテリアルプロセス技術の展開　～低温・低ダメージの材料プロセスからプラズマ医療～2014
- Author(s)
  節原裕一
- Journal Title
  
  スマートプロセス学会誌
  
  Volume : 3 Pages : 15-21
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Molecular-structure variation of biomolecules irradiated with atmospheric-pressure plasma through plasma/liquid interface2014
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume : 54
- DOI
  10.7567/jjap.54.01af04
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2014
- Author(s)
  K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume : 518 Pages : 12018-12018
- DOI
  10.1088/1742-6596/518/1/012018
- Peer Reviewed / Open Access / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-26420738
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2014
- Author(s)
  K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume : 518 Pages : 12019-12019
- DOI
  10.1088/1742-6596/518/1/012019
- Peer Reviewed / Open Access / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-26420738
[Journal Article] Effect of Driving Voltage Frequency on the Discharge Characteristics in Atmospheric Dielectric-Barrier-Discharge Plasma Jet2014
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume : 53
- DOI
  10.7567/jjap.53.11ra08
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume : 未定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume : 未定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] プラズマを用いたソフトマテリアルプロセス技術の展開　～低温・低ダメージの材料プロセスからプラズマ医療～2014
- Author(s)
  節原　裕一
- Journal Title
  
  スマートプロセス学会誌
  
  Volume : 3 Pages : 15-21
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325
[Journal Article] Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine2013
- Author(s)
  K. Takenaka, K. Cho, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume : 掲載確定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Plasma Interactions with Biological Molecules in Aqueous Solution2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, and Masaru Hori
- Journal Title
  
  MRS Proceedings (Published online by Cambridge University Press)
  
  Volume : 1598
- DOI
  10.1557/opl.2013.1155
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108002, KAKENHI-PLANNED-24108003
[Journal Article] Plasma Interactions with Amino Acid (L-Alanine) as a Basis of Fundamental Processes in Plasma Medicine2013
- Author(s)
  Y. Setsuhara, K. Cho, M. Shiratani, M. Sekine and M. Hori
- Journal Title
  
  Current Applied Physics
  
  Volume : 13
- DOI
  10.1016/j.cap.2013.01.030
- Peer Reviewed
- Data Source
  KAKENHI-ORGANIZER-24108001, KAKENHI-PLANNED-24108003
[Journal Article] Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine2013
- Author(s)
  Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori
- Journal Title
  
  J. Phys.: Conf. Ser.
  
  Volume : 441
- DOI
  10.1088/1742-6596/441/1/012001
- Peer Reviewed
- Data Source
  KAKENHI-ORGANIZER-24108001, KAKENHI-PLANNED-24108002
[Journal Article] Plasma Interactions with Organic Materials in Liquid through Plasma/Liquid Interface2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume : 52
- DOI
  10.7567/jjap.52.11ne04
- Peer Reviewed
- Data Source
  KAKENHI-ORGANIZER-24108001, KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-24760597
[Journal Article] Plasma interaction with Zn nano layer on organicmaterials for analysis of early stage ofinorganic/organic hybrid multi-layer formation2013
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara
- Journal Title
  
  Surface and Coatings Technology
  
  Volume : 228
- DOI
  10.1016/j.surfcoat.2012.05.126
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] Plasma-Enhanced Reactive Magnetron Sputtering Assisted with Inductively Coupled Plasma for Reactivity- Controlled Deposition of Microcrystalline Silicon Thin Films2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara and Akinori Ebe
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 52
- DOI
  10.7567/jjap.52.11nb05
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325
[Journal Article] プラズマとソフトマテリアルとの相互作用－低ダメージの表面プロセスからプラズマ医療にわたる基礎過程－2013
- Author(s)
  節原　裕一
- Journal Title
  
  表面技術
  
  Volume : 64 Pages : 628-633
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effects of Irradiations with Ions and Photons in UV-VUV Regions on Nano-Surface of Polymers Exposed to Plasmas2012
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume : 51
- DOI
  10.1143/jjap.51.01aj02
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] Investigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation2012
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori
- Journal Title
  
  Thin Solid Films
  
  Volume : 523 Pages : 15-19
- DOI
  10.1016/j.tsf.2012.05.061
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] フレキシブルデバイス創製に向けたプラズマーソフトマテリアル相互作用の解析2011
- Author(s)
  趙研, 節原裕一, 竹中弘祐, 白谷正治, 関根誠, 堀勝
- Journal Title
  
  高温学会誌
  
  Volume : 37 Pages : 289-297
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325
[Journal Article] フレキシブルデバイス創製に向けたプラズマ－ソフトマテリアル相互作用の解析2011
- Author(s)
  趙研, 節原裕一, 竹中弘祐, 白谷正治, 関根誠, 堀勝
- Journal Title
  
  高温学会誌
  
  Volume : 37 Pages : 289-297
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656465
[Journal Article] Low-Temperature and Nano-Suiface Modification of Materials with Low-Damage Plasma and Photon-Induced Phonon Excitation Processes2007
- Author(s)
  Y., Setsuhara
- Journal Title
  
  The international workshop on advanced thin films and surface technology, Changwon, Korea., Novemver 13, 2007
  
  Pages : 3-3
- Data Source
  KAKENHI-PROJECT-19026009
[Journal Article] Low-Damage Plasma and Photon-Induced Processes for Low-Temperature and Nano-Surface Modification of Materials2007
- Author(s)
  Y., Setsuhara
- Journal Title
  
  Trans-Pacific Workshop on Flexible Electronics, Dallas, USA, December 3, 2007.
  
  Pages : 16-16
- Data Source
  KAKENHI-PROJECT-19026009
[Journal Article] Designing of Meters-Scale Ultra-Large Area RF Plasma Sources Sustained with Multiple Low-Inductance-Antenna Modules2007
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Proc. 24th Symp. on Plasma Processing, Osaka, Japan, 2007.1.29-31
  
  Pages : 61-62
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Phase Structure Control of Yttrium Iron Garnet Nanoparticle Films Using Inductively-Coupled High-Pressure RF Plasmas2007
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Proc. 24th Symp. on Plasma Processing, Osaka, Japan, 2007.1.29-31
  
  Pages : 111-112
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Properties of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Modules2006
- Author(s)
  K.Takenaka, Y.Setsuhara, K.Nishisaka, A.Ebe, S.Sugiura, K.Takahashi, K.Ono
- Journal Title
  
  Proc.6th International Conf. on Reactive Plasmas and 23rd Symp. on Plasma Processing, Matsushima, Japan, Jan.24-27
  
  Pages : 183-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Development of Meters-Scale Large-Area RF Plasma Sources with Control Capabilities of Power deposition Profiles2006
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Proc.6^<th> International Conf.on Reactive Plasmas and 23^<nd> Symp.on Plasma Processing, Matsushima, Japan, Jan.24-27,(2006)
  
  Pages : 179-180
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2006
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Development of Internal-Antenna-Driven RF Plasma Sources for Ultra-Large-Area Deposition of Carbon-Related Films2006
- Author(s)
  Y.Setsuhara
- Journal Title
  
  11th International Conferences on Modern Materials and Technologies, Acireale, Sicily, Italy, 2006.6.4-9, (2006) (INVITED)
  
  Pages : 179-180
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Nonequilibrium Activation of Boron-Implanted Ultra-Shallow Junctions By Femtosecond-Laser Induced Phonon Excitation Process2005
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita
- Journal Title
  
  4th International Conference on Silicon Epitaxy and Heterostructures (ICSI-4), Awaji, Japan, May 23-26
  
  Pages : 306-307
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Technologies for next-generation shallow junction formation2005
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Research Report for Feasibility of Applications in Optical Technologies - Femtosecond Laser Processing Technologies - (Optoelectronic Industry And Technology Development Association)
  
  Pages : 63-89
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Meter-scale Large-Area Plasma Sources for Next-Generation Processes2005
- Author(s)
  Y.Setsuhara
- Journal Title
  
  J.Plasma and Fusion Research 81(2)
  
  Pages : 85-93
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Plasma Technologies for Meters-scale Large-Area Processes2005
- Author(s)
  Y.Setsuhara, A.Ebe
- Journal Title
  
  J.Surface Finishing Society of Japan 56(5)
  
  Pages : 268-275
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] 次世代メートルサイズ大面積プロセス用プラズマ源2005
- Author(s)
  節原裕一
- Journal Title
  
  プラズマ・核融合学会誌 81・2
  
  Pages : 85-93
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] メートルサイズの大面積プロセスに向けたプラズマ技術2005
- Author(s)
  節原裕一
- Journal Title
  
  表面技術 56・5
  
  Pages : 268-275
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2005
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Microwave-sustained miniature plasmas for an ultra small thruster2005
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Thin Solid Films (in press)
- Data Source
  KAKENHI-PROJECT-14655364
[Journal Article] メートルサイズの大面積プロセスに向けたプラズマ技術2005
- Author(s)
  節原裕一
- Journal Title
  
  表面技術 56・5
  
  Pages : 268-275
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] 次世代半導体接合形成2005
- Author(s)
  節原裕一
- Journal Title
  
  光技術応用システムのフィージビリティー調査報告書-フェムト秒加工技術-(財団法人光産業技術振興協会)
  
  Pages : 63-89
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] 次世代メートルサイズ大面積プロセス用プラズマ源2005
- Author(s)
  節原裕一
- Journal Title
  
  プラズマ・核融合学会誌 81・2
  
  Pages : 85-93
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Nonequilibrium Activation of Boron-Implanted Ultra-Shallow Junctions By Femtosecond-Laser Induced Phonon Excitation Process2005
- Author(s)
  Y.Setsuhara
- Journal Title
  
  4th International Conference on Silicon Epitaxy and Hetereostructures (ICSI-4), Awaji, Japan, May 23-26, (2005)
  
  Pages : 306-307
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Standing-Wave-Free Large-Area Inductively Coupled Plasmas with Multiple Low-Inductance Antenna Modules2004
- Author(s)
  Y.Setsuhara, A.Ebe
- Journal Title
  
  Proc. The International Union of Material Research Society - International Conference in Asian 2004 (IUMRS-ICA-2004), Hsinchu, Taiwan, November 16-18 (CD-ROM)
  
  Pages : 1-12
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] 誘導結合型フルオロカーボンプラズマを用いた高誘電率HfO_2薄膜のエッチング2004
- Author(s)
  高橋和生, 斧高一, 節原裕一
- Journal Title
  
  表面技術 Vol.55 No.12
  
  Pages : 793-799
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Standing-Wave-Free Large-Area Inductively Coupled Plasmas with Multiple Low-Inductance Antenna Modules -Novel Plasma Technologies toward Meters-Scale FPD Processing-2004
- Author(s)
  Y.Setsuhara, A.Ebe
- Journal Title
  
  Proc.The International Union of Material Research Society -International Conference in Asian 2004 (IUMRS-ICA-2004), Hsinchu, Taiwan, November 16-18, (2004) (CDROM)
  
  Pages : 1-12
- Data Source
  KAKENHI-PROJECT-16656226
[Journal Article] Etching of High Dielectric Constant HfO_2 Thin Films in Inductively Coupled Fluorocarbon Plasmas2004
- Author(s)
  K.Takahashi, K.Ono, Y.Setsuhara
- Journal Title
  
  J.Surface Finishing Soc.Jpn.[in Japanese] Vol.55, No.12
  
  Pages : 793-799
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Low-Temperature Activation of Ion Implanted Nano-Scale Dopant Layer for Ultra-Shallow Semiconductor Junction Formation by Nonequillibrium Phonon Exitation Processes2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita, K.Takahashi, K.Ono
- Journal Title
  
  Ninth International conference on Plasma Surface Engineering(Garmisch-Partenkirchen, Germany, September 13-17,2004)
  
  Pages : 372-372
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Formation of Ultra-Shallow Junctions by Laser-Induced Nonequillibrium Modification Process of Surface Nano Layers2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita
- Journal Title
  
  Proc.7th China-Japan Symposium on Thin Films(Chengdu, China, September 20-22,2004)
  
  Pages : 23-24
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Standing-Wave-Free Large-Area Inductively Coupled Plasmas with Multiple Low-Inductance Antenna Modules - Novel Plasma Technologies toward Meters-Scale FPD Processing -2004
- Author(s)
  Y.Setsuhara, A.Ebe
- Journal Title
  
  Proc.The International Union of Material Research Society - International Conference in Asian 2004 (IUMRS-ICA-2004),Hsinchu, Taiwan, November 16-18,(2004) (CDROM)
  
  Pages : 1-12
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Optical emission spectroscopy of a microwave-excited plasma source for very small propulsion2004
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Bulletin of the American Physical Society Vol.49,No.5
  
  Pages : 40-40
- Data Source
  KAKENHI-PROJECT-16040211
[Journal Article] Formation of Ultra-Shallow Junctions by Laser-Induced Nonequillibrium Modification Process of Surface Nano Layers2004
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Proc.7th China-Japan Symposium on Thin Films (Chengdu, China, September 20-22, 2004)
  
  Pages : 23-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Optical emission spectroscopy of a microwave-excited plasma source for very small propulsion2004
- Author(s)
  Y.Takao, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Bulletin of the American Physical Society Vol.49,No.5
  
  Pages : 40-40
- Data Source
  KAKENHI-PROJECT-14655364
[Journal Article] Formation of Ultra-Shallow Junctions by Laser-Induced Nonequilibrium Modification Process of Surface Nano Layers2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita
- Journal Title
  
  Proc.7th China-Japan Symposium on Thin Films, Chengdu Sichuan, China, September 20-22
  
  Pages : 23-24
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Low-Temperature Activation of Ion Implanted Nano-Scale Dopant Layer for Ultra-Shallow Semiconductor Junction Formation by Nonequilibrium Phonon Excitation Processes2004
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fujita, K.Takahashi, K.Ono
- Journal Title
  
  Ninth International Conference on Plasma Surface Engineering (Garmisch-Partenkirchen, Germany, September 13-17)
  
  Pages : 372-372
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Standing-Wave-Free Large-Area Inductively Coupled Plasmas with Multiple Low-Inductance Antenna Modules - Novel Plasma Technologies toward Meters-Scale FPD Processing -2004
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Proc.The International Union of Material Research Society - International Conference in Asia 2004 (IUMRS-ICA-2004), Hsinchu, Taiwan, November 16-18, (2004) (CDROM)
  
  Pages : 1-12
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Low-Temperature Activation of Ion Implanted Nano-Scale Dopant Layer for Ultra-Shallow Semiconductor Junction Formation by Nonequillibrium Phonon Excitation Processes2004
- Author(s)
  Y.Setsuhara
- Journal Title
  
  Ninth International Conference on Plasma Surface Engineering (Garmisch-Partenkirchen, Germany, September 13-17, 2004)
  
  Pages : 372-372
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] NONEQUILIBRIUM FORMATION OF NANOSCALE ULTRA-SHALLOW JUNCTIONS BY COHERENT PHONON EXCITATION PROCESS2003
- Author(s)
  Y.Setsuhara, M.Hashida, M.Fuita, S.Adachi, B.Mizuno, K.Takahashi, K.Nogi, K.Ono
- Journal Title
  
  International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, Kurashiki, Japan, September 24-27
  
  Pages : 91-91
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] NONEQUILLIBRIUM FORMATION OF NANOSCALE ULTRA-SHALLOW JUNCTIONS BY COHERENT PHONON EXCITATION PROCESS2003
- Author(s)
  Y.Setsuhara
- Journal Title
  
  International Conference on the Characterization and Control of Interfaces for High Qulity Advanced Materials, Kurashiki, Japan, September 24-27
  
  Pages : 91-91
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] PHOTON-INDUCED PHONON EXCITATION PROCESS AS NONEQUILLIBRIUM SUBSURACE MODIFICATION OF ION-IMPLANTED NANO-SCALE LAYER FOR ULTRA-SHALLOW JUNCTION FORMATION2003
- Author(s)
  Y.Setsuhara
- Journal Title
  
  4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003), Jeju, Korea, September 28-October 3
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Photon-Induced Phonon Excitation Process As Nonequilibrium SUBSURFACE MODIFICATION OF ION-IMPLANTED NANO-SCALE LAYER FOR ULTRA-SHALLOW JUNCTION FORMATION2003
- Author(s)
  Y.Setsuhara
- Journal Title
  
  4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003), Jeju, Korea, September 28-October 3
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360388
[Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002
- Author(s)
  A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo, Japan 2002
  
  Pages : 177-182
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002
- Author(s)
  A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
- Journal Title
  
  Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo (IEEJ, Tokyo, 2002)
  
  Pages : 177-182
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14380209
[Presentation] Plasma-Enhanced Reactive Processes for Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor and Functional Films for Solar Cells2018
- Author(s)
  Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  5th Japan-Korea Joint Symposium on Advanced Solar Cells 2018 and 2nd International Symposium on Energy Research and Application,Sungkyunkwan University, Swuon, South Korea,(2018.02.05-2018.02.06)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] プラズマ支援反応性プロセスを用いた高移動度IGZO薄膜の低温形成2018
- Author(s)
  節原　裕一、遠藤　雅、竹中　弘祐、内田　儀一郎、江部　明憲
- Organizer
  第65回応用物理学会春季学術講演会,東京,(2018.03.18-2018.03.21)
- Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成2017
- Author(s)
  節原裕一, 遠藤　雅, 竹中弘祐, 内田儀一郎, 江部明憲
- Organizer
  第６４回応用物理学会春季学術講演会
- Place of Presentation
  横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Characterization of atmospheric-pressure plasma jets and interaction with liquid for control of reactive species in plasma-activated aqueous solutions2017
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, J. Ikeda, Y. Mino, K. Takenaka
- Organizer
  International Conference on Plasma Medical Science Innovation (ICPMSI) 2017
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2017-02-27
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Formation of High-mobility IGZO Thin Film Transistors Using ICP-enhanced Reactive Sputter Deposition2017
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Akinori Ebe
- Organizer
  第34回プラズマプロセシング研究会(SPP34), 第29回プラズマ材料科学シンポジウム(SPSM29)
- Place of Presentation
  札幌
- Year and Date
  2017-01-16
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Plasma-Liquid Interactions with Atmospheric-Pressure Plasma Jets for Controlling Reactive Species in Plasma-Activated Aqueous Solutions2017
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, J. Ikeda, Y. Mino, K. Takenaka
- Organizer
  The 3rd International Workshop on Advanced Plasma Technology and Applications
- Place of Presentation
  Hochiminh, Vietnam
- Year and Date
  2017-01-11
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] （特別講演）大気圧プラズマの現状と将来展望2017
- Author(s)
  節原裕一
- Organizer
  日本学術振興会プラズマ材料科学第153委員会プラズマ材料科学スクール
- Place of Presentation
  東京
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor by Advanced Reactive Sputter Deposition Enhanced with ICP2017
- Author(s)
  Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  Frontiers in Materials Processing Applications, Research and Technology,Bordeaux, France,(2017.07.09-2017.07.12)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors for Flexible Electrinics with ICP-Enhanced Reactive Plasma Processes2017
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara, Masashi Endo, Giichiro Uchida, Akinori Ebe
- Organizer
  The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017),Jeju, Korea,(2017.09.11-2017.09.15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of High-Mobility IGZO Thin Films Transistor2017
- Author(s)
  Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  The 22nd Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
- Place of Presentation
  Suwon,Korea,
- Year and Date
  2017-04-05
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Advanced Plasma Processing for Formation of Functional Thin Films2017
- Author(s)
  K. Takenaka, G. Uchida, K. Ide, T. Kamiya, Y. Setsuhara
- Organizer
  2nd Int. Symp. on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-2),Nagoya, Japan ,(2017.09.29-2017.10.02)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes2017
- Author(s)
  Akinori Ebe, Kazuaki Nishisaka, Kazuto Okazaki, Atsushi Osawa, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The 11th Asian-European International Conference on Plasma Surface Engineering,Jeju, Korea,(2017.09.11-2017.09.15)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of High-Mobility IGZO Thin Films Transistor2017
- Author(s)
  Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  The 22nd Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials,Suwon,Korea,(2017.04.05-2017.04.07)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成（II）2017
- Author(s)
  節原裕一、遠藤雅、竹中弘祐、内田儀一郎、江部明憲
- Organizer
  第78回応用物理学会秋季学術講演会 ,福岡,(2017.09.05-2017.09.08)
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Functional Thin Film Deposition by Advanced Plasma Assisted CVD & PVD Process2017
- Author(s)
  Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Y. Setsuhara
- Organizer
  International union of materials research societies-The 15th International conference of advanced materials,Kyoto, Japan,(2017.08.27-2017.09.01)
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors Using ICP-Enhanced Reactive Plasma Processes2017
- Author(s)
  Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  39th International Symposium on Dry Process (DPS2017),Tokyo, Japan,(2017.11.16-2017.11.17)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] 高密度プラズマの基礎から応用まで2016
- Author(s)
  節原　裕一
- Organizer
  日本学術振興会　透明酸化物光・電子材料第166委員会　第72回研究会
- Place of Presentation
  東京
- Invited
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Effects of plasma-irradiation distance on ROS and RNS productions in liquid2016
- Author(s)
  G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara
- Organizer
  6th International Conference on Plasma Medicine (ICPM-6)
- Place of Presentation
  Bratislava, Slovakia
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of plasma-jet irradiation on the surface of liquid and its effects on ROS and RNS generations in bulk solution2016
- Author(s)
  G. Uchida, T. Ito, K. Takenaka, J. Ikeda, Y. Setsuhara
- Organizer
  26th Annual meeting of MRS-Japan 2016
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-12-19
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatio-temporal Behaviors of Atmospheric-pressure Dielectric Barrier Discharge Plasma Jets for Reactive Interactions with Materials2016
- Author(s)
  Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka
- Organizer
  9th International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2016)
- Place of Presentation
  Graz, Austria
- Year and Date
  2016-05-29
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatio‐temporal behaviors of atmospheric‐pressure plasma jets for investigation of reactive‐species production in liquid2016
- Author(s)
  Y. Setsuhara, A. Nakajima, G. Uchida, T. Ito, K. Takenaka, J. Ikeda
- Organizer
  43rd IEEE International Conference on Plasma Science (ICOPS 2016)
- Place of Presentation
  Banff, Canada
- Year and Date
  2016-06-19
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of surrounding gas flow on ROS and RNS productions in non-thermal plasma-jet system2016
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, A. Nakajima, K. Takenaka, J. Ikeda
- Organizer
  6th International Conference on Plasma Medicine (ICPM-6)
- Place of Presentation
  Bratislava, Slovakia
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Dynamical-Behavior Characterization of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets for Control of Reactive Oxygen and Nitrogen Species in Liquid2016
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka
- Organizer
  15th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2016-09-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] SPATIO‐TEMPORAL BEHAVIORS OF ATMOSPHERIC‐PRESSURE PLASMA JETS FOR INVESTIGATION OF REACTIVE‐SPECIES PRODUCTION IN LIQUID2016
- Author(s)
  Y. Setsuhara, A. Nakajima, G. Uchida, T. Ito, K. Takenaka, J. Ikeda
- Organizer
  43rd IEEE International Conference on Plasma Science
- Place of Presentation
  Banff, Alberta, Canada
- Year and Date
  2016-06-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Combinatorial characterization of a-IGZO film properties deposited with ICP-enhanced reactive sputtering2016
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  38th International Symposium on Dry Process (DPS2016)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2016-11-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04509
[Presentation] Control of ROS and RNS productions in liquid in atmospheric pressure plasma-jet system2016
- Author(s)
  Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, Yuichi Setsuhara
- Organizer
  69th Annual Gaseous Electronics Conference
- Place of Presentation
  Bochum, Germany
- Year and Date
  2016-10-10
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ支援反応性スパッタリングを用いたアモルファスIGZO薄膜トランジスタの低温形成2016
- Author(s)
  節原　裕一, 中田　慶太郎, 佐竹　義且, 竹中　弘祐, 内田　儀一郎, 江部　明憲
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Dynamical Behaviors and Plasma-Liquid Interactions of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets2016
- Author(s)
  Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka
- Organizer
  The 2nd Asian International Workshop on Advanced Plasma Technology and Applications Major Topics: Plasma Technology for Agriculture, Bio and Medicine
- Place of Presentation
  Chiang Mai, Thailand
- Year and Date
  2016-02-23
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Electrical discharge characteristics of atmospheric plasma jets2016
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2016)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2016-03-06
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 周辺雰囲気ガス制御型プラズマジェット照射による溶液中活性酸素･窒素種生成2016
- Author(s)
  内田　儀一郎, 中島　厚, 伊藤　泰喜, 竹中　弘祐, 節原　裕一
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatio-temporal behaviors of atmospheric-pressure dielectric barrier discharge plasma jets for reactive interactions with materials2016
- Author(s)
  Yuichi Setsuhara, G. Uchida, A. Nakajima, K. Kawabata, K. Takenaka
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC’2016)
- Place of Presentation
  Graz, Austria
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Plasma-Assisted Mist CVD for Formation of Textured ZnO Films : Effect of Mists on Surface Structure of ZnO Films2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28)
- Place of Presentation
  Nagasaki University, Nagasaki, Japan
- Year and Date
  2015-12-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Effect of Mists on Surface Structure of ZnO Films Deposited with Plasma-Assisted Mist CVD2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Year and Date
  2015-12-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films for Flexible Electronics2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii Convention Center, Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Atmospheric-Pressure-Plasma Assisted Mist CVD of Zinc Oxide Films2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Ramada Plaza Jeju Hotel, Jeju Island, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] プラズマ支援ミスト化学気相堆積におけるミストが製膜形状に与える影響2015
- Author(s)
  竹中弘祐，内田儀一郎, 節原裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Low-Temperature Growth of Zinc Oxide Films by Atmospheric-Pressure Plasma-Assisted Mist CVD2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara
- Organizer
  The 5th International Conference on Characterization and Control of Interfaces for High Quality Advanced Materials (ICCCI 2015)
- Place of Presentation
  Kurashiki Royal Art Hotel, Kurashiki, Japan
- Year and Date
  2015-07-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] プラズマ支援反応性スパッタ製膜プロセスによるIGZO薄膜デバイス低温形成2015
- Author(s)
  節原　裕一, 陶山　悠太郎, 中田　慶太郎, 竹中　弘祐, 内田　儀一郎, 江部　明憲
- Organizer
  第27回酸化物半導体討論会
- Place of Presentation
  東京
- Year and Date
  2015-05-18
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] ICP-Enhanced Reactivity-Controlled Sputter Deposition of a-IGZO Films for Thin Film Transistor Applications2015
- Author(s)
  Yuichi Setsuhara, Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28)
- Place of Presentation
  Nagasaki, Japan
- Year and Date
  2015-12-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] ICP-Enhanced Sputter Deposition for Reactivity Control and Low-Temperature Formation of a-IGZO Films2015
- Author(s)
  Yuichi Setsuhara, Keitaro Nakata, Yoshikatsu Satake, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Low-Temperature Formation of a-IGZO TFTs with ICP-Enhanced Reactivity-Controlled Sputter Deposition2015
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Keitaro Nakata, Giichiro Uchida, Akinori Ebe
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] 液面に入射するプラズマジェットの放電特性2015
- Author(s)
  内田　儀一郎, 中島　厚, 竹中　弘祐, 古閑　一憲, 白谷　正治, 節原　裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療装置に求められている要素と世界動向2015
- Author(s)
  節原裕一
- Organizer
  第76回応用物理学会秋季学術講演会分科企画シンポジウム「プラズマ医療科学の最前線」
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-ORGANIZER-24108001
[Presentation] 非平衡プラズマジェットの動的放電特性2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一, 川崎　敏之, 古閑　一憲, 白谷　正治
- Organizer
  第21回プラズマ新領域研究会「プラズマ流の可視化」
- Place of Presentation
  大阪
- Year and Date
  2015-10-03
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Dynamical Characterizations of Atmospheric-Pressure Plasma Jets as Evaluation Protocols for Plasma Medicine2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida,, Kazufumi Kawabata Atsushi Nakajima, Kosuke Takenaka
- Organizer
  The 21st Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Material
- Place of Presentation
  Yangyang, Korea
- Year and Date
  2015-10-03
- Int'l Joint Research / Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療装置に求められている要素と世界動向2015
- Author(s)
  節原　裕一, 内田　儀一郎, 竹中　弘祐, 竹田　圭吾, 石川　健治, 堀　勝
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療のための大気圧放電プラズマの時空間制御2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一
- Organizer
  新学術領域研究「プラズマ医療科学の創成」＋「統合的神経機能の制御を標準とした糖鎖の作動原理解明」合同公開シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2015-08-05
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧非平衡プラズマ照射による液中ラジカル生成の制御2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一
- Organizer
  応用物理学会九州支部特別講演会
- Place of Presentation
  福岡
- Year and Date
  2015-04-27
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of discharge voltage waveform on discharge characteristics in a helium atmospheric plasma jet2015
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge characteristics of a helium atmospheric plasma jet impinging onto the liquid surface2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara, Kazunori Koga, Masaharu Shiratani
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge characteristics in atmospheric plasma jets produced in various gas flow patterns2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of plasma-irradiation distance on oxidation reaction in liquid induced by He/O2 plasma-jet irradiation2015
- Author(s)
  Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2015-12-08
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Control of discharge characteristics of a plasma jet by ambient gas-flow conditions2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2015-12-08
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧He/O2プラズマジェット照射による液中活性酸素種生成に及ぼすガス流パターンの効果2015
- Author(s)
  中島　厚, 内田　儀一郎, 川崎　敏之, 古閑　一憲, Thapanut Sarinont, 天野　孝昭, 竹中　弘祐, 白谷　正治, 節原　裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Optical Emission Characteristics of Atmospheric-Pressure Plasma Jet for Plasma Biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara, and Masaru Hori
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of gas-mixing structure on discharge properties of atmospheric-pressure plasma jet for plasma medicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Molecular Structural Change of Soft Materials via Irradiation with Atmospheric-Pressure Plasma Jet for Plasma Medicine2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Properties of ICP-Enhanced Reactive Sputter Discharge for Formation of Advanced Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Soichiro Osaki, Yutaro Suyama, Hirofumi Ohtani, Atsuki Kanai
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Enhanced Reactivity- Controlled Sputter Deposition Process for Low-Temperature Formation of Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Atsuki Kanai, Soichiro Osaki
- Organizer
  8th International Conference on Reactive Plasmas (ICRP- 8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Discharge Characteristics of Plasma Jet Operated in Gas-Mixture System for Plasma Biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] RF plasma sources for PECVD and soft-material processes2014
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka and Akinori Ebe
- Organizer
  The International Symposium on Plasma-Nano Materials and Processes
- Place of Presentation
  Seoul, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Discharge characteristics of plasma jet operated in gas-mixture system for plasma biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara
- Organizer
  International workshop on control of fluctuation of plasma processes
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial profiles of emission spectra from atmospheric-pressure plasma jet for plasma medicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara and Masaru Hori
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Enhanced Reactivity-Controlled Sputter Deposition Process for Low-Temperature Formation of Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Atsuki Kanai, Soichiro Osaki
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性2014
- Author(s)
  節原　裕一, 竹中　弘祐, 大崎　創一郎, 陶山　悠太郎, 大谷　浩史, 金井　厚毅, 江部　明憲
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Dynamics and Reactive Particle Generation in Atmospheric-Pressure Discharge as a Basis for Plasma Medicine2014
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, A. Miyazaki, K. Takenaka, K. Takeda, K. Ishikawa, M. Hori
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-ORGANIZER-24108001
[Presentation] 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－2014
- Author(s)
  節原裕一, 竹中弘祐, 内田儀一郎
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会
- Place of Presentation
  大阪
- Year and Date
  2014-06-02
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Dynamics and Reactive Particle Generation in Atmospheric-Pressure Discharge as a Basis for Plasma Medicine2014
- Author(s)
  Yuichi Setsuhara
- Organizer
  18th International workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－2014
- Author(s)
  節原裕一, 竹中弘祐, 内田儀一郎
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会
- Place of Presentation
  大阪
- Year and Date
  2014-06-02
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Molecular-Structure Variation of Soft Material Irradiated with Atmospheric-Pressure Plasma Jet2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Soft Materials in Air and Liquid2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Hiroya Abe, Masaru Hori
- Organizer
  3rd International Symposium for Plasma Biosciences (ISPB2013-3)
- Place of Presentation
  Jeju, Korea
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ソフトマテリアル－プラズマ相互作用と低ダメージプロセス（無機／有機積層デバイスからプラズマ医療）2013
- Author(s)
  節原裕一
- Organizer
  日本真空学会11月研究例会
- Place of Presentation
  東京
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 医療プラズマ源の創成に向けたプラズマ－生体分子相互作用の究明と放電制御2013
- Author(s)
  節原裕一
- Organizer
  新学術領域研究「プラズマ医療科学の創成」第2回公開シンポジウム
- Place of Presentation
  名古屋大学
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Biomaterials Interaction Analysis as a Basis of Fundamental Processes in Plasma Medicine2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2013-01-28
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Organic Materials in Liquid as Fundamental Processes in Plasma Medicine2013
- Author(s)
  Kosuke Takenaka, Hiroya Abe, Yuichi Setsuhara
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Year and Date
  2013-01-21
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御2013
- Author(s)
  節原裕一, 竹中弘祐, 大谷浩史, 金井厚毅, 大崎創一郎, 江部明憲
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] ICP-Enhanced Reactive Sputter Deposition Processes for Low-Temperature Formation of IGZO TFT2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  35th International Symposium on Dry Process (DPS2013)
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low- inductance antenna modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka and Akinori Ebe
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013)
- Place of Presentation
  Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of advanced ICP-enhanced reactive sputter deposition technologies for flexible devices2013
- Author(s)
  Yuichi Setsuhara
- Organizer
  The workshop of the Joint Institute for Plasma Nano Materials (IPNM)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2013-10-23
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine2013
- Author(s)
  Kosuke Takenaka , Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Atmospheric-Pressure Gas-Breakdown Characteristics with RF and UHF Voltage for Plasma Medicine2013
- Author(s)
  Giichiro Uchida, Atsushi Miyazaki, Kosuke Takenaka, and Yuichi Setsuhara,
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Biological Molecules in Aqueous Solution2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka and Masaru Hori
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-biomaterials interaction analysis as a basis of fundamental processes in plasma medicine2013
- Author(s)
  Yuichi Setsuhara
- Organizer
  5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  名古屋大学東山キャンパス, 名古屋市
- Year and Date
  2013-01-28
- Data Source
  KAKENHI-ORGANIZER-24108001
[Presentation] Low-Temperature Formation of Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofimi Ohtani, Akinori Ebe
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] ICP-Enhanced Reactive Sputtering with Multiple Inner Type Low-Inductance Antenna Modules for Large-Area Formation of Thin Film Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Designing Plasma-Enhanced Magnetron Sputtering with Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 6th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2013)
- Place of Presentation
  Gifu, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性2013
- Author(s)
  節原裕一、竹中弘祐、大谷浩史、金井厚毅、江部明憲
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  厚木
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Degradation of methylene blue in aqueous solution via plasma exposure through gas/liquid interface2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12), The third Asia-Europe Physics Summit (ASEPS3)
- Place of Presentation
  Chiba Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ICP-Enhanced Reactivity-Controlled Sputter Deposition with New Type of Low-Inductance Antenna Modules for High-Rate and Large-Area Deposition of Functional Films2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013)
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Characteristics of Atmospheric Pressure Discharge and Interactions with Soft Materials2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka
- Organizer
  The 16th International Workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Okazaki, Japan
- Year and Date
  2013-01-25
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療の基礎過程としての気液界面を介したプラズマと液体中有機物との相互作用2013
- Author(s)
  竹中弘祐、節原裕一
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Controllability of Plasma-Enhanced Reactive Sputter Deposition Process with ICPs Sustained by Multiple Inner Type Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Soishiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  第26回プラズマ材料科学シンポジウム(SPSM26)
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low-inductance antenna modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013)
- Place of Presentation
  Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Control Capability of ICP-Enhanced Reactive Sputtering System with Inner Type Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Hirofumi Otani, Atsuki Kanai, Kosuke Takenaka, Akinori Ebe
- Organizer
  第23回日本MRS年次大会
- Place of Presentation
  横浜
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Characterization of Atmospheric-Pressure Discharge and its Interaction with Soft Materials as a Basis for Plasma Medicine2013
- Author(s)
  Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Properties of Dielectric-Barrier-Discharge Plasma Jet for Plasma Medicine2013
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Formation of Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofimi Ohtani, Akinori Ebe
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Development of ICP-Enhanced Reactive Sputtering System with Multiple Low-Inductance Antenna Modules for Large-Area Deposition of Silicon Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  34th International symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] nvestigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine2012
- Author(s)
  K. Takenaka, K. Cho, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Organizer
  11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effect of Plasma Irradiation on Interfacial Nano Layers in Inorganic / Organic Hybrid Structures2012
- Author(s)
  Kosuke Takenaka, Ken Cho, Yuichi Setsuhara
- Organizer
  International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012)
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara
- Organizer
  The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Process Control Capabilities Of Plasma-Enhanced Reactive Sputter Deposition With New Type Of Low-Inductance-Antenna Driven ICP For Large-Area Formation Of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Akinori Ebe
- Organizer
  Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka and Akinori Ebe
- Organizer
  The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea
- Year and Date
  2012-06-08
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] プラズマ支援反応性スパッタリング法による透明アモルファス酸化物半導体薄膜トランジスタ低温形成技術の開発2012
- Author(s)
  節原裕一, 趙研, 大地康史, 竹中弘祐, 江部明憲
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma- Enhanced Sputtering Assisted with ICP via New Type of Low-Inductance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Yasufumi Ohchi, Ken Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  13th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  65th Annual Gaseous Electronics Conference
- Place of Presentation
  Texas, USA
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Plasma-Enhanced Reactive Sputter Deposition with Low-Inductance Antenna for Low-Temperature Fabrication of Flexible Photovoltaic Devices2012
- Author(s)
  Yuichi Setsuhara
- Organizer
  The 6th International Conference on Technological Advances of Thin Films & Surface Coatings
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Low-Temperature and Low-Damage Plasma Processing of Inorganic/Organic Hybrid Materials for Development of Flexible Electronics2012
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  5th International Symposium on Advanced Materials Development and Integration of Novel Structural Metallic and Inorganic Materials
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] プラズマ支援反応性スパッタリング法を用いた長尺基板対応大面積プラズマスパッタシステムの開発2012
- Author(s)
  竹中弘祐, 節原裕一, 江部明憲
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Yuichi Setsuhara, Yasufumi OhchiKen Cho, Kosuke Takenaka, Akinori EbePlasma-Enhanced Sputtering Assisted with ICP via New Type of Low-Induetance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Yasufumi OhchiKen Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  13th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Sputtering with ICP Driven by Inner-Type Low-Inductance Antenna2012
- Author(s)
  Yuichi Setsuhara, Ken Cho,Kosuke Takenaka, Akinori Ebe
- Organizer
  4th International Symposi凵m on Advanced PlasmaScience and its Applications (ISPIasma 2012)
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Interactions with Soft Materials as a Basis for Plasma Medicine2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  International Workshop on Advanced Plasma Technology for Green Energy and Biomedical Applications (APT2012)
- Place of Presentation
  Chiang Mai, Thailand,
- Year and Date
  2012-08-24
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Water Plasma Interactions in Solution2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka
- Organizer
  First International Symposium on Advanced Water Science and Technology (ISAWST-1)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2012-11-11
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Radio Frequency Plasma Generation over Water Surface at Saturated Water Vapor Pressure2012
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2012-09-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  65th Annual Gaseous Electronics Conference
- Place of Presentation
  Texas, USA
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 高度時空間制御による生体適合放電生成の基盤確立と革新的医療プラズマ源の創成2012
- Author(s)
  節原　裕一
- Organizer
  新学術領域研究「プラズマ医療科学の創成」第1回公開シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Enhanced Reactive Sputter Deposition with Low-Inductance Antenna for Low-Temperature Fabrication of Flexible Photovoltaic Devices2012
- Author(s)
  Yuichi Setsuhara
- Organizer
  The 6th International Conference on Technological Advances of Thin Films & Surface Coatings
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Process Control Capabilities Of Plasma-Enhanced Reactive Sputter Deposition With New Type Of Low-Inductance-Antenna Driven ICP For Large-Area Formation Of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Akinori Ebe
- Organizer
  Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japa
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Interactions with Soft-Materials as a Basis of Fundamental Processes for Plasma Medicine2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  The 2nd International Symposium for Plasma Biosciences
- Place of Presentation
  Seoul, Korea
- Year and Date
  2012-08-12
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ICP-Assisted Reactive Sputter-Deposition with Inner-Type Low-Inductance Antenna (LIA)2012
- Author(s)
  Yuichi Setsuhara, Akinori Ebe
- Organizer
  The 14th International Workshop on Advanced Plasma Processing andDiagnostics, The 2nd Workshop for NU-SKKU Joint Institute for Plasma-NanoMaterials
- Place of Presentation
  Fukuoka, Japan(招待講演)
- Year and Date
  2012-01-08
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea(招待講演)
- Year and Date
  2012-06-08
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] ICP-Assisted Reactive Sputter-Deposition with Inner-Type Low-Inductance Antenna (LIA)2012
- Author(s)
  Y. Setsuhara, A. Ebe
- Organizer
  The 14th International Workshop on Advanced Plasma Processing and Diagnostics(招待講演)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Plasma-Enhanced ReactiveSputter Deposition with Low-Inductance Antennafor Low-Temperature Fabrication of FlexiblePhotovoltaic Devices2012
- Author(s)
  Yuichi Setsuhara
- Organizer
  The 6th InternationalConference on Technological Advances of ThinFilms & Surface Coatings
- Place of Presentation
  Singapore
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Process Control Capabilitiesof ICP-Enhanced Sputter Discharge for ReactiveLarge-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara
- Organizer
  The15th Korea-Japan Workshop for AdvancedPlasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] プラズマ支援反応性スパッタリング法による透明アモルファス酸化物半導体薄膜トランジスタ低温形成技術の開発2012
- Author(s)
  節原裕一, 趙研, 大地康史, 竹中弘祐, 江部明憲
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Plasma-Assisted Sputtering with ICP Driven by Inner-Type Low-Inductance Antenna2012
- Author(s)
  Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe
- Organizer
  4th International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2012)
- Place of Presentation
  愛知県春日井市
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] ICP-Enhanced Reactive Processes with Low-Inductance Antenna2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe
- Organizer
  The 5th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2012)
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of Low-Damage Reactive Sputter Deposition Processes with lnner-Type Low Inductance Antenna2011
- Author(s)
  Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  Plasma Conference 2011
- Place of Presentation
  Ishikawa, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 埋め込み型低インダクタンスアンテナを用いたプラズマ支援反応性スパッタリング法により作製したa-IGZO膜の特性評価2011
- Author(s)
  大地康史, 趙研, 竹中弘祐, 節原裕一, 江部明憲
- Organizer
  応用物理学会プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念特別シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2011-10-22
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Characterization of Inductively-Coupled RF Plasmas with Inner-Type Low-Inductance Antennas and Application to Plasma-Assisted Reactive Sputter Deposition2011
- Author(s)
  Ken Cho, Yasufumi Ohchi, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  第21回日本MRS学術シンポジウム
- Place of Presentation
  横浜
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of Plasma-Enhanced Reactive Large-Area Processes2011
- Author(s)
  Yuichi Setsuhara, Akinori Ebe
- Organizer
  Advanced Plasma Technology for Green Energy and Biomedical Apllications
- Place of Presentation
  Chiangmai, Thailand(招待講演)
- Year and Date
  2011-08-12
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Deposition of Functional Thin Films and Process Analyses for Development of Flexible Electronics2011
- Author(s)
  Yuichi Setsuhara
- Organizer
  International Union of Materials Research Society (IUMRS)- International Conference in Asia (ICA) 2011
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2011-09-20
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of ICP-assisted sputter process for large-area production of thin-film solar cells2011
- Author(s)
  Yuichi Setsuhara
- Organizer
  2011 International Workshop on Environment and Resources
- Place of Presentation
  New Taipei City, Taiwa(招待講演)
- Year and Date
  2011-06-18
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of Inner-Type ICPs for Reactive Large-Area Processes2011
- Author(s)
  Yuichi Setsuhara, Akinori Ebe
- Organizer
  The 13th International Workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Deajeon, Korea(招待講演)
- Year and Date
  2011-07-22
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Deposition of Functional Thin Films and Process Analyses for Development of Flexible Electronics2011
- Author(s)
  Yuichi Setsuhara
- Organizer
  International Union of Materials Research Society (IUMRS)-lnternational Conference in Asia (ICA) 2011
- Place of Presentation
  Taipei, Taiwan(招待講演)
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Deposition of Functional Thin Films and Process Analyses for Development of Flexible Electronic2011
- Author(s)
  Y. Setsuhara
- Organizer
  IUMRS-ICA 2011 12th International Conference in Asia(招待講演)
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Development of Plasma-Enhanced Reactive Large-Area Processes2011
- Author(s)
  Y. Setsuhara, A. Ebe
- Organizer
  Advanced Plasma Technology for Green Energy and Biomedical Apllications(招待講演)
- Place of Presentation
  Chiangmai, Thailand
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Investigation of plasma interactions with organic semiconductors for fabrication of flexible electronics devices2011
- Author(s)
  K. Cho, K. Takenaka, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Organizer
  33rd International symposium on Dry Process
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Development of Low-Damage Reactive Sputter Deposition Processes with Inner-Type Low Inductance Antenna2011
- Author(s)
  Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe
- Organizer
  Plasma Conference 2011
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] 埋込型低インダクタンスアンテナによるプラズマ生成技術の開発と大面積・低ダメージ反応性プロセスへの応用2011
- Author(s)
  節原裕一, 趙研, 竹中弘祐, 江部明憲
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Photon-Induced Phonon Excitation Process as Low-Temperature Nonequillibrium Nano-Surface Modification of Semiconductors2009
- Author(s)
  Y.Setsuhara, M.Hashida
- Organizer
  7th Asian-European Int.Conf.Plasma Surface Eng.(AEPSE 2009)
- Place of Presentation
  Busan, Korea
- Year and Date
  2009-09-21
- Data Source
  KAKENHI-PROJECT-20035009
[Presentation] Optical Emission Analysis of Water Vapor Plasmas2008
- Author(s)
  Shogo Kawajiri, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The IUMRS International Conference in Asia 2008, Nagoya, Japan, (2008.12.09-2008.12.13)
- Place of Presentation
  名古屋
- Year and Date
  2008-12-11
- Data Source
  KAKENHI-PROJECT-19654090
[Presentation] Low-Temperature and Nano-Surface Modification of Materials with Low-Damage Plasma and Femtosecond Laser-Induced Processes2008
- Author(s)
  Y. Setsuhara
- Organizer
  Interfinish 2008 17th World Interfinish Congress and Exposition, Busan, Korea, June 16-19, 2008.(INVITED)
- Place of Presentation
  Busan, Korea
- Year and Date
  2008-06-16
- Data Source
  KAKENHI-PROJECT-20035009
[Presentation] Low-Temperature and Nano-Surface Materials Modification with Low-Damage Plasma and Laser-Induced Phonon Excitation Processes2008
- Author(s)
  Y, Setsuhara
- Organizer
  6th International Workshop on Advanced Plasma Processing and Diagnostics & 3rd Plasma Application Monodzukuri, Nagoya, Japan, January 8-9, 2008.
- Place of Presentation
  名古屋大学
- Year and Date
  2008-01-09
- Data Source
  KAKENHI-PROJECT-19026009
[Presentation] Discharge Properties and Radical-Generation Chracteristics in DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  14th Int. Conf. on Plasma Surface Engineering,
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Soft Materials in Air and Liquid
- Author(s)
  Y. Setsuhara, A. Miyazaki, K. Takenaka, H. Abe and M. Hori
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Interaction with Soft Materials in Vacuum, Air and Liquid
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, A. Miyazaki and K. Takenaka
- Organizer
  14th Int. Conf. on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Characteristics of Reactive Particle Production in Atmospheric Pressure DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki, K. Kawabata, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Temporal Behavior of Reactive Particle Production in DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, K. Takeda, K. Ishikawa, M. Hori and Y. Setsuhara
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Radical Generation in Dielectric Barrier Discharge
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  14th Int. Conf. on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial and Temporal Characteristics of Atmospheric-Pressure Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  2014 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Year and Date
  2014-11-30 – 2014-12-05
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Influence of Voltage Pulse Width on Discharge Characteristics in Dbd Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Deposition of Zinc Oxide Film Using Atmospheric-Pressure Non-Equilibrium Plasma
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW 2014)
- Place of Presentation
  Osaka, Japan
- Year and Date
  2014-11-26 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Formation of Zinc Oxide Films Deposited by Plasma-Assisted Mist CVD for Transparent Conducting Oxide Application
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  2015 Japan-Korea Joint Symposium on Advanced Solar Cells
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2015-01-09 – 2015-01-10
- Invited
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Plasma Interactions with Mist in Atmospheric-Pressure Plasma Irradiation
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Deposition of zinc oxide films with atmospheric-pressure plasma-assisted mist CVD
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  ISPlasma 2015 / IC-PLANTS 2015
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-31
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Spatio-temporal behaviors of atmospheric-pressure discharges
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, K. Takenaka, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  The 20th Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-01-27 – 2015-01-29
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 気液界面を介した大気圧非平衡プラズマと生体分子との相互作用
- Author(s)
  竹中弘祐, 川端一史, 宮崎敦史, 阿部浩也, 内田儀一郎, 節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 気液界面を介した大気圧非平衡プラズマ照射が液体中のアミノ酸へ与える影響
- Author(s)
  竹中弘祐, 内田儀一郎, 川端一史, 中島厚, 阿部浩也, 節原裕一
- Organizer
  第62回応用物理学会春季学術講演会, (.3.11-14)
- Place of Presentation
  神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧プラズマジェット放電特性に及ぼす放電電圧パルス幅の効果
- Author(s)
  内田儀一郎, 竹中弘祐, 川端一史, 節原裕一
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] RF plasma sources for PECVD and soft-material processes
- Author(s)
  Y. Setsuhara, S. Osaki, K. Takenaka and A. Ebe
- Organizer
  The International Symposium on Plasma-Nano Materials and Processes
- Place of Presentation
  Seoul, Korea
- Year and Date
  2014-04-01 – 2014-04-05
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] 大気圧プラズマ支援による酸化亜鉛薄膜の形成に向けたプラズマ/ミスト相互作用の解析
- Author(s)
  竹中弘祐，内田儀一郎，節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] ミストプラズマCVDを用いた透明導電酸化物薄膜の形成
- Author(s)
  竹中弘祐、節原裕一
- Organizer
  平成26年度東北大学電気通信研究所共同プロジェクト研究会
- Place of Presentation
  東北大学青葉台キャンパス
- Year and Date
  2014-09-25 – 2014-09-26
- Invited
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Dynamic Properties of Atmospheric Pressure Plasma Jet for Plasma Medicine
- Author(s)
  K. Kawabata, G. Uchida, K. Takenaka and Y. Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics of Atmospheric RF Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial and Temporal Properties of Atmospheric-Pressure Dbd Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Biological Molecules in Atmospheric-Pressure Plasma Irradiation through Gas/Liquid Interface
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Interactions of Atmospheric Pressure Non-equilibrium-Plasma with Organic Materials through Gas/Liquid Interface
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Organic Materials in Liquid through Gas/liquid Interface via Atmospheric-Pressure Plasma
- Author(s)
  K. Takenaka, K. Kawabata, A. Nakajima, G. Uchida and Y. Setsuhara
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma/biomolecules Interaction in Liquid as Fundamental Processes in Plasma Medicine
- Author(s)
  K. Takenaka, K. Kawabata, A. Nakajima, G. Uchida and Y. Setsuhara
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effect of Plasma Excitation Frequency on the Discharge Characteristics of Atmospheric Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  Plasma Conf. 2014
- Place of Presentation
  新潟
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧高周波放電プラズマの動的特性
- Author(s)
  内田儀一郎, 竹中弘祐, 川端一史, 節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics of Atmospheric Pressure Plasma Jet Operated under Various Gas Conditions
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Dynamics of Atmospheric Pressure Plasmas for Plasma Medicine
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata and K. Takenaka
- Organizer
  19th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-06-07 – 2014-06-08
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Deposition of Oxide Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices
- Author(s)
  Y. Setsuhara, G. Uchida, K. Takenaka, Y. Suyama, S. Osaki and A. Ebe
- Organizer
  Plasma Conf. 2014
- Place of Presentation
  新潟
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Process Controllability of ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of IGZO TFT
- Author(s)
  Y. Setsuhara, K. Takenaka, G. Uchida and A. Ebe
- Organizer
  36th Int. Symp. on Dry Process (DPS2014)
- Place of Presentation
  YOKOHAMA, Japan
- Year and Date
  2014-11-27 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Low-temperature Formation of a-IGZO Films with ICP-enhanced Reactive Sputter Deposition
- Author(s)
  Y. Setsuhara, Y. Sutama, K. Nakata, K. Takenaka, G. Uchida and A. Ebe
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th Int. Conf. on Plasma Nano Technology & Science(IC-PLANTS 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Low-Temperature Formation of a-IGZO Films by ICP-Enhanced Reactive Sputter Deposition
- Author(s)
  Y. Setsuhara, S. Osaki, Y. Suyama, K. Takenaka and G. Uchida
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Frequency Dependence of Atmospheric-Pressure Discharge Generation
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, K. Takenaka, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  2014 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Year and Date
  2014-11-30 – 2014-12-05
- Data Source
  KAKENHI-PLANNED-24108003

1. MIYAKE Shoji (40029286)

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2. TAKAHASHI Kazuo (50335189)

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19. SHIMIZU Nobuyuki (70262128)

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24. IKEUCHI Kenji (10030058)

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27. TAGAWA Masahito (10216806)

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28. YASUI Toshiaki (10263229)

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29. FUJITA Masayuki (30260178)

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38. KOHATA Mamoru

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39. SANO Saburou

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47. 石川健治

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SETSUHARA Setsuhara 節原 裕一

節原 祐一 セツハラ ユウイチ

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次世代酸化物半導体デバイス低温大面積形成のためのプラズマ反応性高度制御法の創成Principal InvestigatorOngoing

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Development of novel atomic-layer-deposition plasma PVD processes for efficient and high-rate reactive film-formation processesPrincipal Investigator

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Development of novel plasma sources for plasma medicine through advanced spatio-temporal control of atmospheric-pressure dischargePrincipal Investigator

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Development of novel plasma-enhanced processes for low-temperature formation of high quality oxide semiconductor filmsPrincipal Investigator

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Development of novel function-controlled inorganic/organic layer-formationtechnology through integrated reaction studies on plasma interactions withnanolayers at surface and interfacePrincipal Investigator

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超短パルスレーザー誘起断熱励起過程による次世代半導体ナノ表面の非熱的改質プロセスPrincipal Investigator

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フォノン励起型非熱的ナノ表面改質による次世代半導体活性化プロセスの開発Principal Investigator

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高周波誘導結合による新しい液中プラズマ生成法の開発と粒子処理プロセスの開拓Principal Investigator

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気相成長ナノ粒子直接照射による酸化物ナノコンポジット機能材の低温高速成膜法の開発Principal Investigator

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SETSUHARA Setsuhara 節原裕一

節原祐一セツハラユウイチ