All 2016 2015 2014 2009 2008 2007
All Journal Article Presentation
J. Vac. Soc. Jpn.
Volume: 59 Issue: 4 Pages: 87-91
10.3131/jvsj2.59.87
130005149990
Journal of The Vacuum Society of Japan
Volume: 58 Pages: 140-143
130005068695
真空 51
Pages: 131-134
10021156881
Vacuum 83
Pages: 653-657
Proceedings of the ninth international symposium on sputtering and plasma processes 9
Pages: 407-410