Sato Osamu 佐藤理

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SATO Osamu 佐藤理

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Researcher Number	60392619
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員
Affiliation (based on the past Project Information) *help	2014: 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究員
Review Section/Research Field	Except Principal Investigator Production engineering/Processing studies
Keywords	Except Principal Investigator 形状測定 / 不確かさ推定 / 三次元計測 / ナノメートル計測

Estimation Method of Unvertainty on Nanometer Three Dimensional Measurement
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2010 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo

All 2014 2013 2012 2011 2010

All Journal Article Presentation

[Journal Article] Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage Original Research Article2013
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering 37, No.3 (2013)
  
  Volume: 37 Issue: 3 Pages: 599-605
- DOI
  10.1016/j.precisioneng.2013.01.005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb Original Research Article2013
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Precision Engineering 37, No.3 (2013)
  
  Volume: 37 Issue: 3 Pages: 635-639
- DOI
  10.1016/j.precisioneng.2013.01.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation2012
- Author(s)
  Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 610-614
- DOI
  10.4028/www.scientific.net/kem.523-524.610
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23246028
[Journal Article] Development of a non-contact precision measurement technique using optical frequency combs2012
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 877-882
- DOI
  10.4028/www.scientific.net/kem.523-524.877
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Absolute measurement of gauge block without wringing using tandem low-coherence interferometry2012
- Author(s)
  AgustinusWinarno, Satoru Takahashi, AkikoHirai, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Meas. Sci. Technol.
  
  Volume: 23 Issue: 12 Pages: 1250011-8
- DOI
  10.1088/0957-0233/23/12/125001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating2012
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 957-960
- DOI
  10.4028/www.scientific.net/kem.523-524.957
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 36 Issue: 1 Pages: 91-96
- DOI
  10.1016/j.precisioneng.2011.07.012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] New Non-contact Measurement of Small Inside-diameter Using Tandem Low-coherence Interferometer and Optical Fiber Devices2012
- Author(s)
  Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 871-876
- DOI
  10.4028/www.scientific.net/kem.523-524.871
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Space position measurement using long-path heterodyne interferometer with optical frequency comb2012
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 20 Issue: 3 Pages: 2725-2732
- DOI
  10.1364/oe.20.002725
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Absolute Measurement ｏｆ　Ｂａｓelines up to　403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012
- Author(s)
  Narin　Chanthawong ，Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  MEASUREMENT SCIENCE AND TECHNOLOGY
  
  Volume: 23 Issue: 5 Pages: 0540031-6
- DOI
  10.1088/0957-0233/23/5/054003
- NAID
  10030593263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Time-of-flight method using multiple pulse train interference as a time recorder2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 19(6) Pages: 4881-4889
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Issue: 3 Pages: 424-430
- DOI
  10.1016/j.precisioneng.2011.01.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50(2)
- NAID
  40018283309
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Issue: 4 Pages: 686-692
- DOI
  10.1016/j.precisioneng.2011.05.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Int.J.of Automation Technology
  
  Volume: 5(2) Pages: 167-172
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 11(6) Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 590-594
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices-Error Analysis and Pre-experiment-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 604-608
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Uncertainty Estimation in Intelligent Coordinate and Profile Measurement2010
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Xin Chen
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 564-568
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology2014
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada:
- Organizer
  SPIE Advanced Lithography 2014, San Jose, USA, 2014年2月24日～27日
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Line Width and Line Profile Measurement of Photoresist Using STEM Images2013
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift2013
- Author(s)
  Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu:
- Organizer
  LEM21, The 7th International Conference on Leading Edge Manufacturing in 21st CenturyMiyagi, Japan，2013年11月7日～8日
- Place of Presentation
  ホテル松島大観荘，宮城
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography2013
- Author(s)
  Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Non-contact precision distance measurement technique using two optical frequency combs2013
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2013
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Edge Determination Methodology for Cross-Section STEM Image of Photoresist Feature Used for Reference Metrology2013
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2013
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection2013
- Author(s)
  Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator -Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range-2013
- Author(s)
  Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method - Principle Introduction and Experimental Verification -2012
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices - Development of Three Dimensional Measuring Facility and Experiment -2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satom Takahashi, Kiyoshi Takamasu
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Self-calibration for two-dimensional stage using least squares solution2011
- Author(s)
  Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine2011
- Author(s)
  P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2011
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  Proc.SPIE AL 2011
- Place of Presentation
  San Jose, USA
- Year and Date
  2011-02-28
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices - Error Analysis and Experiments -2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Development of high precision Coordinate Measuring Machine - Uncertainty analysis of multi-probe method2011
- Author(s)
  Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms2011
- Author(s)
  Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb2011
- Author(s)
  Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi , Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light2010
- Author(s)
  Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu
- Organizer
  Proc.ASPE2010
- Place of Presentation
  Atlanta, USA
- Year and Date
  2010-11-01
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination2010
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains' interference2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.EOS 2010
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-26
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Advanced Absolute Length Metrology Based On Pulse Trains' Constructive Interference-Towards Measurements of Meter Order with an Accuracy of Nano Order-2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth2010
- Author(s)
  Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser2010
- Author(s)
  Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror-Enlarging Measuring Range of Autocollimator-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb2010
- Author(s)
  Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016

1. TAKAMASU Kiyoshi (70154896)

# of Collaborated Projects: 1 results

# of Collaborated Products: 52 results
2. TAKAHASHI Satoru (30283724)

# of Collaborated Projects: 1 results

# of Collaborated Products: 52 results
3. MATSUMOTO Hirokazu (00358045)

# of Collaborated Projects: 1 results

# of Collaborated Products: 17 results
4. FURUTANI Ryoshu (50219119)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. MISUMI Ichiko (40358099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Sato Osamu 佐藤 理

SATO Osamu 佐藤 理

Research Projects

Research Products

Co-Researchers

Estimation Method of Unvertainty on Nanometer Three Dimensional Measurement

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage Original Research Article2013

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb Original Research Article2013

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Development of a non-contact precision measurement technique using optical frequency combs2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Absolute measurement of gauge block without wringing using tandem low-coherence interferometry2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] New Non-contact Measurement of Small Inside-diameter Using Tandem Low-coherence Interferometer and Optical Fiber Devices2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Space position measurement using long-path heterodyne interferometer with optical frequency comb2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Absolute Measurement ｏｆ Ｂａｓelines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] Time-of-flight method using multiple pulse train interference as a time recorder2011

Author(s)

Journal Title

Data Source

[Journal Article] Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage2011

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy2011

Author(s)

Journal Title

DOI

Sato Osamu 佐藤理

SATO Osamu 佐藤理

[Journal Article] Absolute Measurement ｏｆ　Ｂａｓelines up to　403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012