Takamasu Kiyoshi 高増潔

… Alternative Names

TAKAMASU Kiyoshi 高増潔

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Researcher Number	70154896
Other IDs
External Links
Affiliation (Current)	2022: 東京電機大学, 工学部, 客員教授
Affiliation (based on the past Project Information) *help	2015 – 2019: 東京大学, 大学院工学系研究科(工学部), 教授 2011 – 2015: 東京大学, 工学(系)研究科(研究院), 教授 2014: 東京大学, 大学院工学系研究科, 教授 2012 – 2013: 東京大学, 大学院・工学系研究科, 教授 2001 – 2010: 東京大学, 大学院・工学系研究科, 教授 … More 2007: The University of Tokyo, 大学院・工学研究科, 教授 2006: 東京大学, 大学院工学系研究科, 教授 1997: The University of Tokyo, Graduate School of Engneering, Department of Precision Engineering, Associate Professor, 大学院・工学研究科, 助教授 1995 – 1997: 東京大学, 大学院・工学系研究科, 助教授 1993 – 1996: 東京大学, 工学部, 助教授 1986: Lecturer, 1st Faculty of Engineering, Tokyo Denki University, 工学部, 講師 Less
Review Section/Research Field	Principal Investigator Intelligent mechanics/Mechanical systems / Intelligent mechanics/Mechanical systems / Production engineering/Processing studies Except Principal Investigator Production engineering/Processing studies / 設計工学・機械要素・トライボロジー / 機械要素 / Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics
Keywords	Principal Investigator ナノメートル計測 / 三次元計測 / 形状測定 / 三次元測定 / 三次元座標測定機 / 精度評価 / coordinate measuring machine / 不確かさ推定 / 光計測 / キャリブレーション … More / 測定の不確かさ / 三次元測定機 / uncertainty of measurement / 計測工学 / 機械工学・生産工学 / 超精密計測 / トレーサビリティ / フェムト秒レーザ / コムレーザー / 距離測定 / 粗面 / 大型構造物 / 移動ロボット / 三次元位置・変位 / 3次元計測 / 位置計測 / レーザ測長機 / Mobil Robot / Three Dimensional Position and Displacement / Coordinate Metrology / Optical Measurement / Calibration / 熱応力解析 / 精密測定機 / 三次元座標測定 / ナノメール計測 / Coordinate Measureing Machine / Nanometer Measurement / Thermal Force Analysis / Precision Instrument / バーチャル測定機 / virtual CMM / evaluation of accuracy / ステージ / 校正手法 / nanometer measurement / stage / calibration method / 座標測定 / 次世代生産システム / 校正 / 不確かさ / coordinate metrology / accuracy evaluation / next generation manufacturing system / calibration / 座標計測 / 三次元形状測定 … More Except Principal Investigator ナノ欠陥 / 加工計測 / マイクロマシン / エバネッセント光 / 欠陥計測 / 精密位置決め / マイクロ・ナノデバイス / マイクロファクトリ / 光計測 / 光造形 / マイクロ光造形 / 光硬化性樹脂 / マイクロ光造形法 / 超精密平坦加工面 / マルチフォトンプローブ / 局在フォトン / 酸化チタン / 三次元マイクロ加工 / イクロ・ナノデバイス / 高速プロトタイピング / 超精密加工 / ナノ修正加工 / ソフトマテリアル / 精密微細加工 / 微細構造 / 非破壊計測 / 内部情報計測 / 高分解能計測 / 回折限界超越 / 回折限界 / 微小生産科学 / 超解像計測 / 局在光 / 超解像 / ソフトウェアデータム / ナノメートル計測 / 座標計測 / 光プローブ / 超小型精密自走機械 / 仮想三次元測定機 / 結晶格子 / 能動制振 / 自律校正 / ナノCMM / 超小型自走機械 / 微動テーブル / Nanometer metrology / Software datum / Coordinate metrology / Optical probe / Miniature robot / Virtual CMM / Crystalline lattice / Active vibration control / 三次元測定機 / 三次元座標測定システム / 自動測定 / 形状評価法 / 帰還光効果 / 非接触プローブ / Three Dimensional Coordinate Measuring Machine / Three Dimensional Coordinate Measuring System / Automated Measurement / Method To Estimate The Form / External Optical Feed Back Effect / ナノ計測 / シリコンウエハ / ナノ異物 / 欠陥検査 / シリコンウエハ基板 / セルインマイクロファクトリ / ナノマイクロ加工 / マクロファクトリ / ミューオン異常磁気能率 / 電気双極子能率 / 光周波数コム / 絶対測長干渉計 / アライメント / エタロン / 自由スペクトル領域 / パルス間隔 / 圧縮 / 校正 / シミュレーション Less

Development of the alignment monitor for muon g-2/EDM experiment
- Principal Investigator
  
  久米達哉
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics
- Research Institution
  High Energy Accelerator Research Organization
High Sensitive Optical Detection of Nano Particulate Defects with Autonomous Search-and-Split Liquid Probe
- Principal Investigator
  
  TAKAHASHI SATORU
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structures
- Principal Investigator
  
  Takahashi Satoru
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distribution
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Absolute profile measurement for large scale constrcution using comb self beat distance sensorPrincipal Investigator
- Principal Investigator
  
  Takamasu Kiyoshi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shapePrincipal Investigator
- Principal Investigator
  
  Takamasu Kiyoshi
- Project Period (FY)
  2014 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Fundamental research on cell-in-micro-factory based on active parallel controlling of localized light energy
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objects
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2011 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Challenging exploratory research on non-destructive internal
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Generation of traceable absolute three dimensional space in production environment using femtosecond laserPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Estimation Method of Unvertainty on Nanometer Three Dimensional MeasurementPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2010 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Microfabrication of three-dimensional metal structures using localized photon interaction and photocatalyst nanoparticles
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
ナノスケール生産基盤におけるコア計測技術に関する企画調査Principal Investigator
- Principal Investigator
  
  高増潔
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
エバネッセント・マルチフォトンプローブによる超精密平坦加工面のナノ欠陥高速計測法
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
エバネッセント局在フォトンを利用したナノ光造形法に関する基礎的研究
- Principal Investigator
  
  TAKAHASHI Satoru
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Study on uncertainty of measurement of coordinate metrology for next generation manufacturing systemPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2004 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Study on evaluation method of uncertainty in coordinate metrologyPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Development of the coordinate measuring machine with nanometer resolution and establishment of the method for evaluation of the accuracyPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Study on Advanced Coordinate Metrology
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tokyo Institute of Technology
Development of nano-CMM (Coordinate Measuring Machine with Nanometer Resolution)Principal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
Study on Three Dimensional Position and Displacement Measurements for Mobil RobotPrincipal Investigator
- Principal Investigator
  
  TAKAMASU Kiyoshi
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University Of Tokyo
The Construction of The Integrated Three Dimensional Coordinate Measuring System
- Principal Investigator
  
  OZNO Shigeo
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  機械要素
- Research Institution
  University of Tokyo

[Book] ナノ・マイクロスケール機械工学2014
- Author(s)
  石原直，加藤千幸，光石衛，渡邉聡編，高増潔，高橋哲他
- Total Pages
  266
- Publisher
  東京大学出版
- Data Source
  KAKENHI-PROJECT-22246016
[Book] 日本機械学会編:機械工学便覧デザイン編β5計測工学2007
- Author(s)
  高増潔他
- Total Pages
  350
- Publisher
  日本機械学会
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Book] 日本機械学会編:機械工学便覧デザイン編β5計測工学2007
- Author(s)
  高増潔, 他
- Total Pages
  350
- Publisher
  日本機械学会
- Data Source
  KAKENHI-PROJECT-16206025
[Book] 日本機械学会編: 機械工学便覧デザイン編β3 加工学・加工機器2006
- Author(s)
  高増潔他
- Total Pages
  250
- Publisher
  日本機械学会
- Data Source
  KAKENHI-PROJECT-18636002
[Book] 人と共存するコンピュータ・ロボット学(実世界情報システム)2004
- Author(s)
  高増潔, 小谷潔(東京大学21世紀COE実世界情報プロジェクト)
- Total Pages
  292
- Publisher
  オーム社
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats2019
- Author(s)
  Masui Shuzo、Torii Yuki、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Optics Express
  
  Volume: 27 Pages: 31522-31522
- DOI
  10.1364/oe.27.031522
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18J21820, KAKENHI-PROJECT-15H02214
[Journal Article] Comparative evaluation of estimation of step gauge measurement uncertainty via Monte Carlo simulation2019
- Author(s)
  Miura Yuka、Nakanishi Shoichi、Higuchi Eiichi、Takamasu Kiyoshi、Abe Makoto、Sato Osamu
- Journal Title
  
  Precision Engineering
  
  Volume: 55 Pages: 390-396
- DOI
  10.1016/j.precisioneng.2018.10.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] In-process measurement for cure depth control of nano stereolithography using evanescent light2019
- Author(s)
  S. Takahashi, D. Kong, M. Michihata, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 68 Pages: 527-530
- DOI
  10.1016/j.cirp.2019.04.072
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] A new measurement method to simultaneously determine group refractive index and thickness of a sample using low-coherence tandem interferometry2019
- Author(s)
  Winarno Agustinus、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
- Journal Title
  
  Precision Engineering
  
  Volume: 55 Pages: 254-259
- DOI
  10.1016/j.precisioneng.2018.09.013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Comparative evaluation of estimation of hole plate measurement uncertainty via Monte Carlo simulation2019
- Author(s)
  Miura Yuka、Nakanishi Shoichi、Higuchi Eiichi、Takamasu Kiyoshi、Abe Makoto、Sato Osamu
- Journal Title
  
  Precision Engineering
  
  Volume: 56 Pages: 496-505
- DOI
  10.1016/j.precisioneng.2019.02.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Diameter Measurement of a Microsphere Based on Whispering Gallery Mode Resonance2018
- Author(s)
  MICHIHATA Masaki、CHU Bohuai、ZHAO Zheng、HAYASHI Kohei、TAKAMASU Kiyoshi、TAKAHASHI Satoru
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 84 Issue: 1 Pages: 77-84
- DOI
  10.2493/jjspe.84.77
- NAID
  130006301970
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Linewidth roughness of advanced semiconductor features using focused ion beam and planar-transmission electron microscope as reference metrology2018
- Author(s)
  Takamasu Kiyoshi、Takahashi Satoru、Kawada Hiroki、Ikota Masami
- Journal Title
  
  Journal of Micro/Nanolithography, MEMS, and MOEMS
  
  Volume: 17 Pages: 1-1
- DOI
  10.1117/1.jmm.17.4.041010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018
- Author(s)
  Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Pages: 32-38
- DOI
  10.1007/s41871-018-0004-0
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H04900, KAKENHI-PROJECT-26249006
[Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018
- Author(s)
  Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Pages: 054011-054011
- DOI
  10.1088/1361-6501/aab008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] Noncontact method of point-to-point absolute distance measurement using tandem low-coherence interferometry2018
- Author(s)
  Winarno Agustinus、Masuda Shusei、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Pages: 025006-025006
- DOI
  10.1088/1361-6501/aaa16e
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018
- Author(s)
  Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Pages: 112-124
- DOI
  10.1007/s41871-018-0013-z
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference Near Critical Angle2018
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31（3） Issue: 3 Pages: 441-446
- DOI
  10.2494/photopolymer.31.441
- NAID
  130007481467
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Consideration of Measurement Environment2018
- Author(s)
  大西徹、高増潔
- Journal Title
  
  JJSDE
  
  Volume: 53 Issue: 4 Pages: 313-322
- DOI
  10.14953/jjsde.2017.2749
- NAID
  130006639076
- ISSN
  0919-2948, 2188-9023
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Development and Calibration of Reassembled Ultrasonic Diagnosis Robot2018
- Author(s)
  Matsuno Shigeru、Numata Takashi、Iwahashi Toshihide、Takamasu Kiyoshi、Kotani Kiyoshi、Jimbo Yasuhiko
- Journal Title
  
  IEEJ Trans. EIS
  
  Volume: 138 Issue: 9 Pages: 1133-1140
- DOI
  10.1541/ieejeiss.138.1133
- NAID
  130007479917
- ISSN
  0385-4221, 1348-8155
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H05324
[Journal Article] One- shot stereolithography for biomimetic micro hemisphere covered with relief structure2018
- Author(s)
  Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Precision Engineering
  
  Volume: 54 Pages: 353-360
- DOI
  10.1016/j.precisioneng.2018.07.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] A Simulation Study of Plasmonic Substrate for In-Process Measurement of Refractive Index in Nano-Stereolithography2017
- Author(s)
  Michihata Masaki、Kong Deqing、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Int. J. Automation Technol.
  
  Volume: 11 Issue: 5 Pages: 772-780
- DOI
  10.20965/ijat.2017.p0772
- NAID
  130007505873
- ISSN
  1881-7629, 1883-8022
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response2017
- Author(s)
  Takahashi S.、Jin C.、Ye S.、Michihata M.、Takamasu K.
- Journal Title
  
  CIRP Annals
  
  Volume: 66 Pages: 503-506
- DOI
  10.1016/j.cirp.2017.04.064
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale2017
- Author(s)
  Michihata Masaki、Ueda Shin-ichi、Takahashi Satoru、Takamasu Kiyoshi、Takaya Yasuhiro
- Journal Title
  
  Optical Engineering
  
  Volume: 56 Pages: 064103-064103
- DOI
  10.1117/1.oe.56.6.064103
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] High-Precision Aspheric Surface Measurement Using Scanning Deflectometry: Three-Dimensional Error Analysis and Experiments2017
- Author(s)
  Hu Tingzhi、Xiao Muzheng、Wang Xicheng、Wang Chao、Zhang Zhijing、Takamasu Kiyoshi
- Journal Title
  
  Int. J. Automation Technol.
  
  Volume: 11 Issue: 5 Pages: 728-735
- DOI
  10.20965/ijat.2017.p0728
- NAID
  130007505964
- ISSN
  1881-7629, 1883-8022
- Language
  English
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Is the Two-Color Method Superior to Empirical Equations in Refractive Index Compensation?2016
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics and Photonics Journal
  
  Volume: 2016 (6) Pages: 8-13
- DOI
  10.4236/opj.2016.68b002
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target2016
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 78 Pages: 381-387
- DOI
  10.1016/j.measurement.2015.07.053
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Non-contact precision profile measurement to rough-surface objects with optical frequency combs2016
- Author(s)
  Onoe Taro、Takahashi Satoru、Takamasu Kiyoshi、Matsumoto Hirokazu
- Journal Title
  
  Measurement Science Technology
  
  Volume: 27 Pages: 124002-124002
- DOI
  10.1088/0957-0233/27/12/124002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens2016
- Author(s)
  Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
- Journal Title
  
  Precision Engineering
  
  Volume: 46 Pages: 254-262
- DOI
  10.1016/j.precisioneng.2016.05.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Evanescent Light Exposing System under Nitrogen Purge for Nano- Stereolithography2016
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  Procedia CIRP
  
  Volume: 42 Pages: 77-80
- DOI
  10.1016/j.procir.2016.02.192
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target2016
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 43 Pages: 486-492
- DOI
  10.1016/j.precisioneng.2015.09.017
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630087
[Journal Article] Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology2016
- Author(s)
  Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 17 Pages: 1093-1099
- DOI
  10.1007/s12541-016-0133-6
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor2015
- Author(s)
  Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 42 Pages: 276-282
- DOI
  10.1016/j.precisioneng.2015.05.009
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 41 Pages: 63-67
- DOI
  10.1016/j.precisioneng.2015.01.007
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (4th report)2015
- Author(s)
  工藤良太, 高橋哲, 高増潔
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 81 Issue: 7 Pages: 684-691
- DOI
  10.2493/jjspe.81.684
- NAID
  130005084685
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Research on three-dimensional microfabrication using photocatalytic reaction at the vicinity of beam waist2015
- Author(s)
  堀田陽亮，吉越久倫，松田恵介，道畑正岐，高増潔，高橋哲
- Journal Title
  
  Transactions of the JSME (in Japanese)
  
  Volume: 81 Issue: 832 Pages: 15-00309-15-00309
- DOI
  10.1299/transjsme.15-00309
- NAID
  130005118095
- ISSN
  2187-9761
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Concept for laser-assisted nano removal beyond the diffraction limit using photocatalyst nanoparticles2015
- Author(s)
  S. Takahashi, Y. Horita, F. Kaji, Y. Yamaguchi, M. Michihata, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 未定 Pages: 201-204
- DOI
  10.1016/j.cirp.2015.04.041
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-23246028, KAKENHI-PROJECT-26249006
[Journal Article] Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer2015
- Author(s)
  Hirokazu Matsumoto, Kiyoshi Takamasu
- Journal Title
  
  Int. J. Automation Technol.
  
  Volume: 9 Issue: 5 Pages: 482-486
- DOI
  10.20965/ijat.2015.p0482
- NAID
  130007674121
- ISSN
  1881-7629, 1883-8022
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (3rd report)2015
- Author(s)
  工藤良太, 高橋哲, 高増潔
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 81 Issue: 6 Pages: 562-569
- DOI
  10.2493/jjspe.81.562
- NAID
  130005074035
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26249006
[Journal Article] Performance evaluation of a coordinate measuring machine’s axis using a high-frequency repetition mode of a mode-locked fiber laser2014
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 15 (8) Pages: 1507-1512
- DOI
  10.1007/s12541-014-0498-3
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Length Traceability using Optical Frequency Comb2014
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials 625
  
  Volume: 625 Pages: 322-325
- DOI
  10.4028/www.scientific.net/kem.625.322
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630087
[Journal Article] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2014
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials 625
  
  Volume: 625 Pages: 66-72
- DOI
  10.4028/www.scientific.net/kem.625.66
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630087
[Journal Article] A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control2014
- Author(s)
  S. Takahashi, H. Yokozeki, D. Fujii, R. Kudo, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 63 Pages: 465-468
- DOI
  10.1016/j.cirp.2014.03.035
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26630018, KAKENHI-PROJECT-26249006
[Journal Article] Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range2014
- Author(s)
  Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 25 (6) Pages: 0640081-7
- DOI
  10.1088/0957-0233/25/6/064008
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Fabrication and Composition Control of Three-Dimensional Dielectric Metal Microstructure Using Photocatalyst Nanoparticles2014
- Author(s)
  Hisamichi Yoshigoe, Shotaro Kadoya, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 8(4) Pages: 523-529
- NAID
  130007674071
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-23246028
[Journal Article] Lateral resolution improvement of laser-scanning imaging for nano defects detection2014
- Author(s)
  Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Advanced Optical Technologies
  
  Volume: 3(4) Pages: 425-433
- DOI
  10.1515/aot-2014-0030
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26630018
[Journal Article] Two-color absolute length measuring method based on pulse repetition interval lengths2014
- Author(s)
  Wei, Dong Aketagawa, Masato Takamasu, Kiyoshi Matsumoto, Hirokazu
- Journal Title
  
  Optical Engineering 53 (12)
  
  Volume: 53 Pages: 1224131-5
- DOI
  10.1117/1.oe.53.12.122413
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25820171, KAKENHI-PROJECT-26630087, KAKENHI-PROJECT-26249006
[Journal Article] Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage Original Research Article2013
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering 37, No.3 (2013)
  
  Volume: 37 Pages: 599-605
- DOI
  10.1016/j.precisioneng.2013.01.005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Study on nano thickness inspection for residual layer of nanoimprint lithography using near-field optical enhancement of metal tip2013
- Author(s)
  S. Takahashi, Y. Ikeda, K. Takamasu
- Journal Title
  
  CIRP Annals
  
  Volume: 62 Pages: 527-530
- DOI
  10.1016/j.cirp.2013.03.020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Synthetic adjacent pulse repetition interval length method to solve integer ambiguity problem : theoretical analysis2013
- Author(s)
  D. Wei, K. Takamasu, H. Matsumoto
- Journal Title
  
  Journal of the European Optical Society
  
  Volume: 8 Pages: 130161-6
- DOI
  10.2971/jeos.2013.13016
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Workshop Environment2013
- Author(s)
  大西徹，中西正一，高増潔
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 79 Issue: 4 Pages: 338-343
- DOI
  10.2493/jjspe.79.338
- NAID
  130004513541
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb2013
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Precision Engineering
  
  Volume: 37 Pages: 635-639
- DOI
  10.1016/j.precisioneng.2013.01.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Temporal coherence shaping based on spectral-domain destructive interference of pulses with different self-phase modulations2013
- Author(s)
  D. Wei, K. Takamasu, H. Matsumoto
- Journal Title
  
  Journal of the European Optical Society
  
  Volume: 8 Pages: 130181-6
- DOI
  10.2971/jeos.2013.13018
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] A study of the possibility of using an adjacent pulse repetition interval length as a scale using a Helium-Neon interferometer2013
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Precision Engineering
  
  Volume: 37 Pages: 694-698
- DOI
  10.1016/j.precisioneng.2013.02.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175, KAKENHI-PROJECT-23860013
[Journal Article] Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation2012
- Author(s)
  Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 610-614
- DOI
  10.4028/www.scientific.net/kem.523-524.610
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23246028
[Journal Article] Development of a non-contact precision measurement technique using optical frequency combs2012
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 877-882
- DOI
  10.4028/www.scientific.net/kem.523-524.877
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating2012
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 957-960
- DOI
  10.4028/www.scientific.net/kem.523-524.957
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] New Non-contact Measurement of Small Inside-diameter Using Tandem Lowcoherence Interferometer and Optical Fiber Devices2012
- Author(s)
  Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 523-524 Pages: 871-876
- DOI
  10.4028/www.scientific.net/kem.523-524.871
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Absolute Measurement of Baselines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012
- Author(s)
  Hirokazu Matsumoto, Xiaonan Wang, Kiyoshi Takamasu, Tomohiro Aoto
- Journal Title
  
  Applied Physics Express
  
  Volume: 5 Issue: 4 Pages: 046601-046601
- DOI
  10.1143/apex.5.046601
- NAID
  210000015496
- ISSN
  1882-0778, 1882-0786
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Submicroneter thickness layer fabrication for layer-by-layer microstereo1ithography using evanescent light2012
- Author(s)
  S. Takahashi, Y. Kajihara, K. Takamasu
- Journal Title
  
  Annals of the CIRP
  
  Volume: 61 Pages: 219-222
- DOI
  10.1016/j.cirp.2012.03.069
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23246028, KAKENHI-PROJECT-24686006
[Journal Article] Space position measurement using long-path heterodyne interferometer with optical frequency comb2012
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 20 Pages: 2725-2732
- DOI
  10.1364/oe.20.002725
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Influence of standing wave phase error on super-resolution optical inspection for periodic microstructures2012
- Author(s)
  R. Kudo, S. Usuki, S. Takahashi, K. Takamasu
- Journal Title
  
  Meas. Sci. Technol
  
  Volume: 23 Pages: 0540071-13
- DOI
  10.1088/0957-0233/23/5/054007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Precision Engineering
  
  Volume: 36 Pages: 91-96
- DOI
  10.1016/j.precisioneng.2011.07.012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Absolute measurement of gauge block without wringing using tandem low-coherence interferometry2012
- Author(s)
  AgustinusWinarno, Satoru Takahashi, AkikoHirai, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Meas. Sci. Technol
  
  Volume: 23 Pages: 1250011-8
- DOI
  10.1088/0957-0233/23/12/125001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Remote Internal Diameter Measurement of Ring Gauge based on a Low-coherence Tandem Scheme2012
- Author(s)
  Dong Wei, Nan Wu, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Key Engineering Materials
  
  Volume: 516 Pages: 533-538
- DOI
  10.4028/www.scientific.net/kem.516.533
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656175
[Journal Article] Height measurement of single nanoparticles based on evanescent field modulation2012
- Author(s)
  Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, S. Takahashi, K. Takamasu
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: 8 Pages: 419-430
- DOI
  10.1504/ijnm.2012.051105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Absolute Measurement ｏｆ　Ｂａｓelines up to　403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb2012
- Author(s)
  Narin　Chanthawong ，Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  MEASUREMENT SCIENCE AND TECHNOLOGY
  
  Volume: 23 Pages: 0540031-6
- DOI
  10.1088/0957-0233/23/5/054003
- NAID
  10030593263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Super resolution optical measurements of nanodefects on Si wafer surface using infrared standing evanescent wave2011
- Author(s)
  S. Takahashi, R. Kudo, S. Usuki, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 60 Pages: 523-526
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656097
[Journal Article] Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Pages: 686-692
- DOI
  10.1016/j.precisioneng.2011.05.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Super resolution opticalmeasurements of nanodefects on Siwafer surface using infrared standing evanescent wave2011
- Author(s)
  S. Takahashi, R. Kudo, S. Usuki, K. Takamasu
- Journal Title
  
  CIRP Annals
  
  Volume: 60 Pages: 523-526
- DOI
  10.1016/j.cirp.2011.03.053
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016, KAKENHI-PROJECT-23656097
[Journal Article] Time-of-flight method using multiple pulse train interference as a time recorder2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Optics Express
  
  Volume: 19(6) Pages: 4881-4889
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Precision Engineering
  
  Volume: 35 Pages: 424-430
- DOI
  10.1016/j.precisioneng.2011.01.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb2011
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50(2)
- NAID
  40018283309
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Int.J.of Automation Technology
  
  Volume: 5(2) Pages: 167-172
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles2010
- Author(s)
  Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of CIRP-HPC 1
  
  Pages: 381-384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] 現場環境における三次元測定機の高度化に関する研究(第3報)-低熱膨張ブロックゲージを用いた温度補正の評価-2010
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Journal Title
  
  精密工学会誌
  
  Volume: 76(5) Pages: 541-545
- NAID
  130000421822
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 11,6 Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 11, 6
  
  Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles2010
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 11(6) Pages: 811-815
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] A novel resist surface profilometer for next-generation photolithography using mechano-optical arrayed probe system2010
- Author(s)
  S.Takahashi, K.Watanabe, K.Takamasu
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 59 Pages: 521-524
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 590-594
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices-Error Analysis and Pre-experiment-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 604-608
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles2010
- Author(s)
  Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of CIRP-HPC
  
  Volume: 1 Pages: 381-384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Uncertainty Estimation in Intelligent Coordinate and Profile Measurement2010
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Xin Chen
- Journal Title
  
  Key Engineering Materials
  
  Volume: 447-448 Pages: 564-568
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246016
[Journal Article] Study on resist layer thickness measurement for nanoimprint lithography based on near-field optics2009
- Author(s)
  S. Takahashi, S. Minamiguchi, T. Nakao, S. Usuki, K. Takamasu
- Journal Title
  
  International Journal Surface Science and Engineering (印刷中(掲載確定))
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Novel laser applications to 3-D micromachining and high-resolution measurement for micor/nano-manufacturing2009
- Author(s)
  S.Takahashi, K.Takamasu
- Journal Title
  
  Jsme News -Surface Engineering and Science- 20, 2
  
  Pages: 8-11
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles2009
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of ASPEN2009
  
  Volume: 206
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles2009
- Author(s)
  Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of ASPEN 2009,2C6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Novel laser applications to 3-D micromachining and high-reso lution measurement for micor/nano-manufacturing2009
- Author(s)
  S.Takahashi, K.Takamasu
- Journal Title
  
  Jsme News -Surface Engineering and Science-
  
  Volume: 20, 2 Pages: 8-11
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008
- Author(s)
  S. Liu, K. Watanabe, S. Takahashi, K. Takamasu
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 407-410
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2008
- Author(s)
  X. Chen, K. Takamasu
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 569-572
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light2008
- Author(s)
  Y.Kajihara, T.Takeuchi, S.Takahashi, K.Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9, 3
  
  Pages: 51-54
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2008
- Author(s)
  X.Chen, K.Takamasu
- Journal Title
  
  Key Enineering Materials 381-382
  
  Pages: 569-572
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究(第2報)-定在は照明シフト実験による解像原理の実験的検証-2008
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 74,6(掲載確定・印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究(第1報)-解像特性の理論的検討-2008
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 74,5(掲載確定・印刷中)
- NAID
  110006668363
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations : insight from respiratory-phase domain analysis2008
- Author(s)
  Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
- Journal Title
  
  American Journal of Physiology-Heart and Circulatory Physiology 294
  
  Pages: 1481-1489
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008
- Author(s)
  Y. Kajihara, Y. Inazuki, T. Takeuchi, S. Takahashi, K. Takamasu
- Journal Title
  
  Applied Physics Letters 92
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data2008
- Author(s)
  M. Nara, M. Abbe, K. Takamasu
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 587-590
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2008
- Author(s)
  S.Liu, K.Watanabe, S.Takahashi, K.Takamasu
- Journal Title
  
  Key Emgineering Materials 381-382
  
  Pages: 407-410
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Evanescent light photopolymerization and measurement of cure depth in nanostereolithography2008
- Author(s)
  Y.Kajihara, Y.Inazuki, T.Takeuchi, S.Takahashi, K.Takamasu
- Journal Title
  
  Applied Physics Letters 92
  
  Pages: 931201-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light2008
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9,3
  
  Pages: 51-54
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360062
[Journal Article] Uncertainty Estimation Usin Monte-Carlo Method Constrained by Correlations of the Data2008
- Author(s)
  M.Nara, M.Abbe K.Takamasu
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 587-590
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations: insight from respiratory-phase domain analysis2008
- Author(s)
  Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
- Journal Title
  
  American Journal of Physiology-Heart and Circulatory Physiology 294
  
  Pages: 1481-1489
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations:insight from respiratory-phase domain analysis2008
- Author(s)
  Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto
- Journal Title
  
  American Journal of Phsiolo-Heart and Circulatory Physiology 294
  
  Pages: 1481-1489
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval2008
- Author(s)
  S Takahashi, S Okada, H Nishioka, S Usuki and K Takamasu
- Journal Title
  
  Measurement Science and Technology 19(掲載確定・印刷)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Study on Nano-Stereolithography Using Evanescent Light (2nd report)-Photofabrication of Fine Lattice Structures Using Standing Evanescent Light2007
- Author(s)
  Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Journal of Japan Society for Precision Engineering 73,8
  
  Pages: 934-939
- NAID
  110006368886
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task2007
- Author(s)
  K.Kotani, M.Tachibana, K, Takamasu
- Journal Title
  
  Methods of Information in Medicine 46,3
  
  Pages: 376-385
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Study on Spatial Frequency Domain 2-point Method (1st Report)-Calibration of Systematic Error in Case of Combining Two Sets of 2-point Method2007
- Author(s)
  Xin CHEN, Kiyoshi KOTANI, Kiyoshi TAKAMASU
- Journal Title
  
  Journal of Japan Society for Precision Engineering 73,6
  
  Pages: 653-658
- NAID
  110006278973
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 現場環算における三次元測定機の高度化に関する研究(第2報)一直角誤差補正-2007
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Journal Title
  
  精密工学会誌 73,7
  
  Pages: 818-822
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 空間周波数領域2点法に関する研究(第1報)-2組の2点法を組合わせる場合の系統誤差の補2007
- Author(s)
  陳欣, 小谷潔, 高増潔
- Journal Title
  
  精密工学会誌 73,6
  
  Pages: 653-658
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Workshop Environment-Correction of Squareness Error2007
- Author(s)
  Tohru Ohnishi, Shotoku Takase, Kiyoshi Takamasu
- Journal Title
  
  Journal of Japan Society for Precision Engineering 73,7
  
  Pages: 818-822
- NAID
  110006342951
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 現場環境における三次元測定機の高度化に関する研究(第1報): 温度ドリフトの評価および補正2007
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Journal Title
  
  精密工学会誌 73・2
  
  Pages: 270-274
- NAID
  110006163414
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] エバネッセント光を利用したナノ光造形疾に関する研究(第2報)一定在エバネッセント光を利用2007
- Author(s)
  幌原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 73,8
  
  Pages: 934-939
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 現場環境における三次元測定機の高度化に関する研究(第2報)-直角誤差補正-2007
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Journal Title
  
  精密工学会誌 73,7
  
  Pages: 818-822
- NAID
  110006342951
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第2報)-定在エバネッセント光を利用2007
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 73,8
  
  Pages: 934-939
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Development of the Method for Estimating Cardiac Vagal Activity in Real-Time during Body Motion and Generation of the Interactive CG2007
- Author(s)
  Kiyoshi Kotani, Fumiaki Iida, Tomohiro Akagawa, Takashi Saitoh Yasuhiko Jimbo, Yoichiro Kawaguchi, Kiyoshi Takamasu
- Journal Title
  
  IEEJ Trans. EIS 127,10
  
  Pages: 1762-1769
- NAID
  10019958910
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 定在エバネッセント光を用いた超解像顕微法に関する研究(第3報)-解像特性の理論的検討-2007
- Author(s)
  岡田真一, 西岡宏晃, 臼杵深, 高橋哲, 高増潔
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集芝浦
  
  Pages: 351-352
- NAID
  130005028469
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task2007
- Author(s)
  K. Kotani, M. Tachibana, K. Takamasu
- Journal Title
  
  Methods of Information in Medicine 46,3
  
  Pages: 376-385
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Investigation of the Influence of Swalloing, Coughing and Vocalizationon Heart Rate Variability with Respiratory-phase Domain Analysis2006
- Author(s)
  K. Kotani, M. Tachibana, K. Takamasu
- Journal Title
  
  Methods of Information in Medicine 46・2
  
  Pages: 179-185
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method2006
- Author(s)
  Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proc. of IMEKO XVIII World Congress 12
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 平面リニアモータの精度校正に関する研究(第1報)-反射ミラーの形状計測-2006
- Author(s)
  陳欣, 高増潔, 小谷潔, 石田敏博
- Journal Title
  
  精密工学会誌 72・12
  
  Pages: 1542-1546
- NAID
  110004863756
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第1報)-欠陥検出特性の検討2006
- Author(s)
  臼杵深, 西岡宏晃, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 268-269
- NAID
  130005027136
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] 定在エバネッセント光を用いた超解像顕微法に関する研究(第2報)-エバネッセント光散乱結像装置の開発-2006
- Author(s)
  岡田真一, 西岡宏晃, 臼杵深, 高橋哲, 高増潔
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集宇都宮
  
  Pages: 169-170
- NAID
  130004658005
- Data Source
  KAKENHI-PROJECT-18656041
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第6報)-ナノ光造形装置による三次元造形-2006
- Author(s)
  梶原優介, 武内徹, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集東京電機
  
  Pages: 773-774
- NAID
  130005027597
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface2006
- Author(s)
  Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Journal of Robotics and Mechatronics 18・6
  
  Pages: 698-704
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第1報)-造形基本特製の理論的・実験敵検討-2006
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 72・11
  
  Pages: 1391-1396
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] 形体計測における不確かさの見積り(第3報)-区分多項式による直線形体の形状偏差モデル-2005
- Author(s)
  高増潔
- Journal Title
  
  精密工学会誌 71・11
  
  Pages: 1454-1458
- NAID
  110002238043
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第4報)-三次元造形における分解能制御の検討-2005
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集慶応
  
  Pages: 39-40
- NAID
  130004657419
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第5報)-ナノ光造形装置の試作と基本機能の検証-2005
- Author(s)
  梶原優介, 武内徹, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集京都
  
  Pages: 1001-1002
- NAID
  130004656647
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第4報) -三次元造形における分解能制御の検討-2005
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集慶応
  
  Pages: 39-40
- NAID
  130004657419
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] 座標測定機のアーティファクト校正(第3報)-校正後の測定の不確かさの推定-2005
- Author(s)
  高増潔
- Journal Title
  
  精密工学会誌 71・7
  
  Pages: 890-894
- NAID
  10016464429
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] エバネッセント光を用いた微小構造造形2005
- Author(s)
  高橋哲, 梶原優介, 高増潔
- Journal Title
  
  第63回レーザ加工学会講演論文集大阪
  
  Pages: 162-168
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] GPS(製品の幾何特性仕様)に基づいた検証方法-幾何公差の解釈と三次元測定機の不確かさ評価2005
- Author(s)
  高増潔
- Journal Title
  
  設計工学 40・2
  
  Pages: 79-85
- NAID
  10014331322
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] ナノ光造形法への新しいレーザー応用技術2005
- Author(s)
  高橋哲, 梶原優介, 高増潔
- Journal Title
  
  成形加工 17(3)
  
  Pages: 161-166
- NAID
  10016675506
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] 座標測定機のアーティファクト校正(第3報)-校正後の測定の不確かさの推定-2005
- Author(s)
  高増潔, 佐藤理, 下嶋賢, 古谷涼秋
- Journal Title
  
  精密工学会誌 71・7(発表予定)
- NAID
  10016464429
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Photofabrication of Periodic submicron structures using standing evanescent light for Nano-Stereolithography2005
- Author(s)
  S.Takahashi, Y.Inazuki, Y.Kajihara, K.Takamasu
- Journal Title
  
  Proceedings of the 20th American Society for Precision Engineering Annual Meeting Norfolk
  
  Pages: 371-374
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第2報)-積層プロセスの検討-2004
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集島根
  
  Pages: 941-942
- NAID
  130004655839
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] 計測標準高度化に関する研究2004
- Author(s)
  高瀬省徳, 大西徹, 高増潔
- Journal Title
  
  技研所報 40・3
  
  Pages: 17-23
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第1報)-定在エバネッセント強度分布の適用-2004
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会春季大会学術講演会講演論文集東京
  
  Pages: 1285-1286
- NAID
  130004656593
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] パラレルメカニズムを用いたマイクロフライス盤の開発(第1報,設計パラメータの決定と試作機の製作)2004
- Author(s)
  佐藤理, 高増潔, 無類井格, Gheorghe Olea
- Journal Title
  
  設計工学 39・4
  
  Pages: 175-181
- NAID
  10012869260
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] 座標測定機のアーティファクト校正(第2報)-冗長座標測定機の自己校正-2004
- Author(s)
  高増潔, 下嶋賢, 古谷涼秋, 佐藤理
- Journal Title
  
  精密工学会誌 70・5
  
  Pages: 711-715
- NAID
  110001823998
- Data Source
  KAKENHI-PROJECT-16206025
[Journal Article] Study of Nano-Stereolithography Using Evaenscent Light2004
- Author(s)
  Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu
- Journal Title
  
  Proceedings of the 19th American Society for Precision Engineering Annual Meeting Vol.34
  
  Pages: 149-152
- Data Source
  KAKENHI-PROJECT-16656049
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第3報)-定在エバネッセント強度分布制御法の確立-2004
- Author(s)
  稲月友一, 梶原優介, 高橋哲, 高増潔
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集島根
  
  Pages: 943-944
- NAID
  130004655840
- Data Source
  KAKENHI-PROJECT-16656049
[Patent] 母型の製造方法2016
- Inventor(s)
  高橋哲，鈴木裕貴，鈴木邦和，道畑正岐，高増潔，田中大直，西村涼
- Industrial Property Rights Holder
  東京大学，JXエネルギー株式会社
- Industrial Property Rights Type
  特許
- Filing Date
  2016-08-17
- Overseas
- Data Source
  KAKENHI-PROJECT-15H02214
[Patent] 照明装置および顕微観察装置2013
- Inventor(s)
  高橋哲,高増潔,工藤良太,臼杵深
- Industrial Property Rights Holder
  東京大学
- Filing Date
  2013-02-25
- Overseas
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 照明装置および顕微観察装置2013
- Inventor(s)
  高橋哲，高増潔，工藤良太，臼杵深
- Industrial Property Rights Holder
  高橋哲，高増潔，工藤良太，臼杵深
- Industrial Property Rights Type
  特許
- Filing Date
  2013-02-25
- Overseas
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 顕微観察装置2012
- Inventor(s)
  高橋哲,工藤良太,高増潔
- Industrial Property Rights Holder
  東京大学
- Industrial Property Number
  2012-178326
- Filing Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 顕微観察装置2012
- Inventor(s)
  高橋哲，工藤良太，高増潔
- Industrial Property Rights Holder
  高橋哲，工藤良太，高増潔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-178326
- Filing Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-23656097
[Patent] 形状形成方法2010
- Inventor(s)
  高橋哲, 高増潔
- Industrial Property Rights Holder
  高橋哲, 高増潔
- Filing Date
  2010-10-08
- Data Source
  KAKENHI-PROJECT-20360062
[Patent] 移動システム2005
- Inventor(s)
  高増潔, 高橋哲, 小谷潔, 大和淳司
- Industrial Property Rights Holder
  高増潔, 高橋哲, 小谷潔, 大和淳司
- Industrial Property Number
  2005-134471
- Filing Date
  2005-05-02
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第4報) -圧縮されたパルス間隔の基準干渉計を用いた校正2020
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  2020年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Pulse Interval Calibration of an Optical Frequency Comb Compressed by an Etalon2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography2019
- Author(s)
  Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahash
- Organizer
  Proceedings of the 19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Pulse Interval of an Optical Frequency Comb Compressed by an Etalon2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  The 14th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Linewidth and Roughness Measurement of SAOP by Using FIB and Planer-TEM as Reference Metrology2019
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Stefan Decoster, Frederic Lazzarino, Gian Lorusso
- Organizer
  SPIE Advanced Lithography, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror2019
- Author(s)
  S. Masui, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  8th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第3報) -リンギングを用いない光周波数コムパルス間隔の校正2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  2019年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source2018
- Author(s)
  Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Analysing Tapered Fiber-Microsphere Coupling for Diameter Measurement of Microsphere Using Whispering Gallery Mode Resonance2018
- Author(s)
  Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-Contact High Speed Measurements of the Processed-Product Shape Using New Optical Comb Interferometer2018
- Author(s)
  Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第3報）－FDTD法によるマイクロ粒子の整理駆動現象の解明－2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会秋季大会学術講演会，函館，2018
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Self-Calibration Method of Nanometer Profile Measurement on Large Aspheric Optical Surface2018
- Author(s)
  Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Laser Additive Processing for Nanostructures Based on Optical Trapping Potential2018
- Author(s)
  Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Scattered Field Analysis for Diameter Measurement of Tapered Optical Fiber Under Counter-Propagating-Beam Illumination2018
- Author(s)
  Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Investigation of super-resolution microscopy by use of a nano-patterned substrate2018
- Author(s)
  Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] In-Process Measurement of Resin's Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018
- Author(s)
  D. Kong, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation (IMEKO 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 4 報）一定在波制御によるマイクロ粒子整列・搬送に関する研究一2018
- Author(s)
  藤原和，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2019年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 3 報）一FDTD 法によるマイクロ粒子の整理駆動現象の解明一2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Line Width Roughness of Advanced Semiconductor Features by Using FIB and Planar-TEM as Reference Metrology2018
- Author(s)
  Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota
- Organizer
  SPIE Advanced Lithography, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Improvement of Quantitative Depth Evaluation for Diffraction-Limited Microgroove Using LED Light Source2018
- Author(s)
  Ye Shiwei1, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation (IMEKO 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Absolute Measurement of Optical Path Length of the Three-Dimensional Nanoprofiler Based on the Normal Vector Tracing Method by Tandem White Light Interferometer2018
- Author(s)
  Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第2 報）－界面近接光波の任意制御によるマイクロ粒子整理・搬送システムの検討－，2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，P33
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 臨界角照明を用いたナノ光造形硬化樹脂のインプロセス計測（基本原理の検証）2018
- Author(s)
  道畑正岐，孔徳卿，高増潔，高橋哲
- Organizer
  日本機械学会 2018年度年次大会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Development of a Laser Tracker Using Absolute Length Measurement Technique by an Optical Comb Pulsed Interferometer2018
- Author(s)
  Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018
- Author(s)
  D. Kong, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第2 報）－サブ波長表面構造の造形と光学特性評価－，2018
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲，柴沼俊彦，田中大直
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，K08
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] In-Situ Measurement of the Refractive Index and Geometrical Length for Determining the Location of Optical Part Using a Tandem Low-Coherence Interferometry2018
- Author(s)
  Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control - Analysis on handling performance of microparticles based on near-surface light wave -2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Investigation of Super-Resolution Microscopy by Use of a Nano-Patterned Substrate2018
- Author(s)
  Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第 3 報）一うなりによる干渉強度分布の変調特性検討一2018
- Author(s)
  増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第1 報）－RCWA 法を用いた光学特性解析－，2017
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  －，2017 年度精密工学会秋季大会学術講演会，大阪大学，2017，L23
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2017)
- Place of Presentation
  San Jose, USA
- Year and Date
  2017-05-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2017, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer2017
- Author(s)
  Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo
- Organizer
  ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Accuracy Evaluation of Optical Comb Probe for Coordinate Measuring Machines Verification2017
- Author(s)
  Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第27報）-エバネッセント光による面内形状制御性の解析-2017
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲，工藤宏人
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Precision Profile Measurement for Small Aspheric Optical Surface by an Multi-beam Angle Sensor2017
- Author(s)
  Jumpei Miyachi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Double Imaging Micro-Stereolithography for One-Shot Curing of Surface Micro-Structure Unit2017
- Author(s)
  Yuki Matsumoto, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] The Development of an Absolute Internal Distance Measurement Between Two Ball Lenses Within Sub-Micro Accuracy2017
- Author(s)
  Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano-stereolithography2017
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究 (第6報) -数値流体力学を用いた液相プローブの挙動特性に関する解析-2017
- Author(s)
  浅井祥平，橘一輝，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Evaluation Strategy of Spheroidal Distortion for Micro-Sphere Based on Whispering Gallery Mode Resonance2017
- Author(s)
  K.Hayashi, B. Chu, Z. Zhao, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  59th Ilmenau Scientific Colloquium, Ilmenau, Germany
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017
- Author(s)
  Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Coordinate measuring machine verification using an optical comb probe with ball-lens targets2017
- Author(s)
  Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface2017
- Author(s)
  Xiang Guo, Satoru Takahashi, Yohan Kondo, Youichi Bitou, Kiyoshi Takamasu
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2017, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第26報）ー多光束干渉によるミリオーダ領域のサブミクロン表面微細構造創製ー2017
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Non-contact method of an absolute length measurement between two ball-lenses using a tandem low-coherence interferometer2017
- Author(s)
  Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017
- Author(s)
  Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology2017
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota
- Organizer
  SPIE Advanced Lithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Experimental verification of a novel in-process depth measurements of diffraction limited micro-groove based on near-field optical response2017
- Author(s)
  Shiwei Ye, Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究 (第5報) -位相利用高感度観察装置による検出-2017
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines2017
- Author(s)
  Kiyoshi Takamasu
- Organizer
  ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system2017
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Accuracy Improvement in Diameter Measurement of Microsphere Based on Whispering Gallery Mode2017
- Author(s)
  Masaki Michihata, Bohuai Chu, Zhao Zheng, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  59th Ilmenau Scientific Colloquium, Ilmenau, Germany
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Numerical investigation on refractive index compensation performance of three-color method2017
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Monitor Resin Curing Degree for In-process Measurement in Micro-stereolithography2017
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ加工工具に関する基礎的研究（第9報）－ナノ粒子位置同定法の検討－2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-2016
- Author(s)
  Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016
- Author(s)
  Kazuki Tachibana，Shohei Asai，Masaki Michihata，Kiyoshi Takamasu，Satoru Takahashi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2016)
- Place of Presentation
  San Jose, USA
- Year and Date
  2016-06-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb2016
- Author(s)
  Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  euspen2016, 16th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  International Symposium on Optomechatronic Technology 2016
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPE2016, 31st ASPE Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  ASPE2016 Annual Meeting
- Place of Presentation
  Portland, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第2報）－液相内における工具創製の実験的検討－2016
- Author(s)
  堀田陽亮・儲　博懐・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Development of non-destructive optical depth measurement of sub-diffraction limit fine holes2016
- Author(s)
  Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  nanoMan2016, 5th International Conference on Nanomanufacturing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  31st Annual Meeting of the American Society for Precision Engineering
- Place of Presentation
  Portland, Oregon, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: theoretical design of high sensitive phase detection system2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  International Symposium on Optomechatronic Technology 2016
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016
- Author(s)
  Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Development of 3D form measurement of semiconductor structure - Measurement of FinFET profile using TEM and CD-SEM images2016
- Author(s)
  Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  euspen2016, 16th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第3報) 基板上液相プローブの挙動に関する解析2016
- Author(s)
  浅井祥平，橘一輝，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第2報) FDTDシミュレーションに基づいた光学的検出特性解析2016
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究（第4報）-液相プローブ高感度観察装置の検討-2016
- Author(s)
  橘一輝，浅井祥平，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] In-process measurement for micro-stereolithography using surface plasmon resonance2016
- Author(s)
  Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs2016
- Author(s)
  Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography2016
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC2016
- Author(s)
  Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda
- Organizer
  IWAA2016, International Workshop on Accelerator Alignment
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] エバネッセント露光型ナノ光造形法に関する研究―エバネッセント露光用光硬化性樹脂の開発―2016
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会　第11回生産加工・工作機械部門講演会
- Place of Presentation
  愛知
- Year and Date
  2016-10-22
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第25報）ー機能性評価に向けた表面微細構造創製装置の開発ー2016
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春秋学術講演会
- Place of Presentation
  茨城
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light2016
- Author(s)
  Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016
- Author(s)
  Kazuki TACHIBANA, Shohei ASAI, Masaki MICHIHATA, Kiyoshi TAKAMASU, Satoru TAKAHASHI
- Organizer
  16th International Conference on Precision Engineering
- Place of Presentation
  Hamamatsu, Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography2016
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  18th CIRP Conference on Electro Physical and Chemical Machining
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016
- Author(s)
  Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2016, Conference on Lasers and Electro-Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation on Dynamic Interacion with Defects2016
- Author(s)
  Kazuki Tachibana; Shohei Asai; Masaki Michihata; Kiyoshi Takamasu; Satoru Takahashi
- Organizer
  CLEO2016, Laser Science to Photonic Applications
- Place of Presentation
  San Jose, USA
- Year and Date
  2016-06-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface2016
- Author(s)
  Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPE2016, 31st ASPE Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance2016
- Author(s)
  Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  LANE2016, 9th International Conference on Photonic Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system2016
- Author(s)
  Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISOT2016, International Symposium on Optomechatronics Technologies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ工具に関する基礎的研究（第10報）－銀担持による工具チップ性能の向上－2016
- Author(s)
  儲　博懐・堀田陽亮・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 3D-Profile Measurement of Advanced2016
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi
- Organizer
  SPIE Advanced Lithography 2016
- Place of Presentation
  San Jose (USA)
- Year and Date
  2016-02-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造，堀田陽亮，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会年次大会2016
- Place of Presentation
  福岡
- Year and Date
  2016-09-12
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Development of Advanced Measurement Method of 3D Semiconductor Structure - 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -2016
- Author(s)
  Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2016, 16th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第1報）－姿勢制御ユニット創製に関する実験的検討－2015
- Author(s)
  堀田陽亮・儲　博懐・道畑正岐・高増　潔・高橋　哲
- Organizer
  2015年度精密工学会秋季学術講演会
- Place of Presentation
  東北
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  15th euspen International Conference (euspen2015)
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-06-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] Temporal-Coherence Interferometer Using Optical Comb for CMM Verification2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  第16回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構（茨城県つくば市）
- Year and Date
  2015-04-10
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015
- Author(s)
  Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015),
- Place of Presentation
  Harbin (China)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe2015
- Author(s)
  Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  京都リサーチパーク（京都府・京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Line Profile Measurement of Advanced-FinFET Features by Reference Metrology2015
- Author(s)
  Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi
- Organizer
  SPIE Advanced Lithography
- Place of Presentation
  San Jose (USA)
- Year and Date
  2015-02-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface2015
- Author(s)
  Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-contact precision profile measurement to rough surface objects with optical frequency combs2015
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe2015
- Author(s)
  Kazuki TACHIBANA，Masaki MICHIATA，Satoru TAKAHASHI，Kiyoshi TAKAMASU
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target2015
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  15th euspen International Conference (euspen2015)
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-contact precision profile measurement to rough surface objects with optical frequency combs2015
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光学的ナノ異物検出を可能とする高感度液相プローブ計測法の研究2015
- Author(s)
  橘一輝，高橋哲，高増潔:
- Organizer
  日本機械学会2015年度年次大会講演論文集
- Place of Presentation
  北海道
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-15K13841
[Presentation] Roundness measurement machine using multi-beam angle sensor - experimental verification of multi-beam angle sensor2015
- Author(s)
  Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  15th euspen International Conference (euspen2015)
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015
- Author(s)
  Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu and Satoru Takahashi
- Organizer
  The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
- Place of Presentation
  Harbin, China
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference2015
- Author(s)
  Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei (Taiwan)
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 知的計測技術によるナノスケール三次元形状測定2015
- Author(s)
  高増潔
- Organizer
  精密測定展2015，精密測定セミナー
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2015-06-09
- Invited
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light2015
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  京都リサーチパーク（京都府・京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] STEMによる半導体構造の形状測定2014
- Author(s)
  高増潔
- Organizer
  日本学術振興会ナノプローブテクノロジー第167委員会第74回研究会
- Place of Presentation
  産業技術総合研究所臨海f区都心センター（東京都江東区）
- Year and Date
  2014-04-24
- Invited
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光職場ナノ粒子を用いた3次元微細構造創製に関する研究(第3報)-FDTD法を用いた電磁波機能素子への応用可能性の検討-2014
- Author(s)
  吉越久倫, 門屋祥太郎, 高橋哲, 高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] 光触媒反応を用いた微細機能ビーズの創製に関する研究2014
- Author(s)
  門屋祥太郎，吉越久倫，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] 三次元座標測定機の基礎2014
- Author(s)
  高増潔
- Organizer
  NMIJ計測クラブ　CMMユーザーズクラブ講演会，東京大学
- Place of Presentation
  東京大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] トレーサビリティと精密測定の歴史，精密測定の条件，精密測定における測定不確かさ2014
- Author(s)
  高増潔
- Organizer
  精密工学会/精密測定技術振興財団第367回講演会「“はかる”を知る，精密測定の理論と最新動向」
- Place of Presentation
  東京大学本郷キャンパス（東京都文京区）
- Year and Date
  2014-06-16
- Invited
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒反応を用いた微細機能ビーズの創製に関する研究2014
- Author(s)
  門屋祥太郎, 吉越久倫, 高橋哲, 高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] Precision measurement technique for rough surface object using self-beat signals of optical frequency comb2014
- Author(s)
  Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  14th euspen International Conference
- Place of Presentation
  Dubrovnik (Croatia)
- Year and Date
  2014-06-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第3報）－FDTD法を用いた電磁波機能素子への応用可能性の検討－2014
- Author(s)
  吉越久倫，門屋祥太郎，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25630018
[Presentation] Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator2014
- Author(s)
  Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi
- Organizer
  ASPE/ASPEN Summer Topical Meeting
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2014-06-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology2014
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada:
- Organizer
  SPIE Advanced Lithography 2014, San Jose, USA, 2014年2月24日～27日
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Measurement of Surface Roundness Using a Multi-Beam Angle Sensor2014
- Author(s)
  Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  11th Laser Metrology for Precision Measurement and Inspection in Industry
- Place of Presentation
  つくば国際会議場（茨城県つくば市）
- Year and Date
  2014-09-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 参照計測ためのTEM画像を用いたレジストおよびFinFETの形状測定2014
- Author(s)
  高増潔
- Organizer
  次世代リソグラフィワークショップ2014
- Place of Presentation
  東京工業大学蔵前会館（東京都目黒区）
- Year and Date
  2014-07-18
- Invited
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb2014
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  11th Laser Metrology for Precision Measurement and Inspection in Industry
- Place of Presentation
  つくば国際会議場（茨城県つくば市）
- Year and Date
  2014-09-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] 記念講演・精密測定の今後2014
- Author(s)
  高増潔
- Organizer
  日本精密測定機器工業会　創立60周年記念講演会
- Place of Presentation
  ホテルアルジュール竹橋（東京都港区）
- Year and Date
  2014-05-21
- Invited
- Data Source
  KAKENHI-PROJECT-26249006
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles2013
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  Proceedings of the 13th euspen International Conference, Berlin, Germany, 2013年5月28日～30日
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 多点法による誤差分離手法と不確かさ推定2013
- Author(s)
  高増潔
- Organizer
  第14回高エネ研メカ・ワークショップ報告集，つくば
- Place of Presentation
  高エネルギー加速器研究機構，茨城
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ工具に関する基礎的研究（第2報）－光放射圧を利用した加工位置制御法の検討－2013
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究2013
- Author(s)
  吉越久倫，向井康仁，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Line Width and Line Profile Measurement of Photoresist Using STEM Images2013
- Author(s)
  Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第16報）－可変NA伝搬光・エバネッセント光ハイブリッド露光システムの開発－2013
- Author(s)
  宮川幸大，松澤亮，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 三次元測定の現状と課題2013
- Author(s)
  高増潔
- Organizer
  カールツァイス東京ショールームオープンハウス，東京
- Place of Presentation
  ホテルメトロポリタンエドモンド，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Edge Determination Methodology for Cross-Section STEM Image of Photoresist Feature Used for Reference Metrology2013
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2013
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] System Using Evanescent Light and Propagating Light for High Throughput Fabrication,2013
- Author(s)
  K. Miyakawa, R. Matsuzawa, S. Takahashi, K. Takamasu:
- Organizer
  ASPE2013, St. Paul, Minnesota, USA, 2013，2013年10月20日～25日
- Place of Presentation
  St. Paul, Minnesota, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 半導体の線幅標準に関する研究（第10報）－AFM及びSTEMによるレジスト形状測定－2013
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 高誘電率マイクロ機能構造の創製に関する研究2013
- Author(s)
  向井康仁，吉越久倫，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on lateral resolution improvement of laser-scanning imaging for nano defects inspection2013
- Author(s)
  H. Yokozeki, R. Kudo, S. Takahashi , K . Takamasu
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments(オーラル採択済み)
- Place of Presentation
  アーヘン(ドイツ)
- Year and Date
  2013-07-03
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光触媒ナノ工具に関する基礎的研究（第2報）－光放射圧を利用した加工位置制御法の検討－2013
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] スポット照明の重複シフトによる光学式超解像検査法－提案手法の理論的検討－2013
- Author(s)
  工藤良太，横関宏樹，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Study on lateral resolution improvement of laser-scanning imaging for nano defects inspection2013
- Author(s)
  H. Yokozeki, R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  アーヘン，ドイツ
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift2013
- Author(s)
  Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu:
- Organizer
  LEM21, The 7th International Conference on Leading Edge Manufacturing in 21st CenturyMiyagi, Japan，2013年11月7日～8日
- Place of Presentation
  ホテル松島大観荘，宮城
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2013
- Author(s)
  N. Chanthawong, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  ASPEN2013
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2013-11-13
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2013
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Length Traceability using Optical Frequency Comb2013
- Author(s)
  Dong Wei1, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] 三次元測定の現状と課題2013
- Author(s)
  高増潔
- Organizer
  機械振興協会　テクノフォーラム　製造現場を支える三次元測定
- Place of Presentation
  機械振興会館ホール，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles2013
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  13th euspen International Conference
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究2013
- Author(s)
  吉越久倫，向井康仁，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 半導体の線幅標準に関する研究(第10報)-AFM及びSTEMによるレジスト形状測定-2013
- Author(s)
  沖藤春樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection2013
- Author(s)
  Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 高誘電率マイクロ機能構造の創製に関する研究2013
- Author(s)
  向井康仁，吉越久倫，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学，東京都
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography2013
- Author(s)
  Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Non-contact precision distance measurement technique using two optical frequency combs2013
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Length Traceability using Optical Frequency Comb2013
- Author(s)
  D. Wei, K. Takamasu, H. Matsumoto
- Organizer
  ASPEN2013
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2013-11-13
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Length Traceability using Optical Frequency Comb2013
- Author(s)
  Dong Wei1, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator -Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range-2013
- Author(s)
  Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2013, The 11thinternational Symposium of Measurement Technology and Intelligent Instruments, 2013年7月1日～5日，Aachen, Germany
- Place of Presentation
  Aachen, Germany
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] スポット照明の重複シフトによる光学式超解像検査法-提案手法の理論的検討-2013
- Author(s)
  工藤良太,横関宏樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Non-contact precision distance measurement technique using two optical frequency combs2013
- Author(s)
  Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser2013
- Author(s)
  Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology, Taipei, Taiwan 2013年11月12日～15日
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第16報）－可変NA伝搬光・エバネッセント光ハイブリッド露光システムの開発－2013
- Author(s)
  宮川幸大，松澤亮，高橋哲，高増潔
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] フォトレジスト形状の断面STEM 画像からエッジを決定する方法2013
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  第3回ユーザーズミーティングプログラム　パーク・システムズ・ジャパン，東京
- Place of Presentation
  ベルサール神田，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Non-contact precision distance measurement technique using two optical frequency combs2013
- Author(s)
  T. Onoe, S. Takahashi, K. Takamasu, Hirokazu Matsumoto
- Organizer
  ASPEN2013
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2013-11-13
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb2012
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT2012
- Author(s)
  R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  釜山，韓国
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT2012
- Author(s)
  R. Kudo, S. Takahashi , K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  釜山(韓国)
- Year and Date
  2012-09-10
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光触媒ナノ工具に関する基礎的研究2012
- Author(s)
  関野貴宏，高橋哲，高増
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学，福岡県
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method - Principle Introduction and Experimental Verification -2012
- Author(s)
  Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb2012
- Author(s)
  D. Wei, K. Takamasu, H. Matsumoto
- Organizer
  euspen2012
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2012-06-06
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第13報)-FDTD法を用いた微細配線の散乱特性解析-2012
- Author(s)
  天野佑基,工藤良太,高橋哲,高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  Sanjose，USA
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 光周波数コムを用いた絶対距離計測2012
- Author(s)
  高増潔
- Organizer
  精密工学会　大規模環境の3次元計測と認識・モデル化技術専門委員会
- Place of Presentation
  東京大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第14報)-コヒーレント結像逐次再構成型超解像法-2012
- Author(s)
  工藤良太,高橋哲,高増潔,臼杵深
- Organizer
  2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東京
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 半導体の線幅標準に関する研究(第9報)-STEM画像を用いたレジスト形状の測定-2012
- Author(s)
  沖藤春樹,高橋哲,高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  福岡
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第13報）－FDTD法を用いた微細配線の散乱特性解析－2012
- Author(s)
  天野佑基，工藤良太，高橋哲，高増潔
- Organizer
  2012年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  San Jose, USA
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第15報）-コヒーレント結像逐次再構成型超解像装置の開発-2012
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 半導体の線幅標準に関する研究（第9報）-STEM画像を用いたレジスト形状の測定-2012
- Author(s)
  沖藤春樹，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb2012
- Author(s)
  X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第15報)-コヒーレント結像逐次再構成型超解像装置の開発-2012
- Author(s)
  工藤良太,高橋哲,高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  福岡
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] 知的精密計測のものづくりへの展開　ートレーサビリティとナノメートル標準ー2012
- Author(s)
  高増潔
- Organizer
  日本機械学会　革新的工作機械技術に関する研究分科会
- Place of Presentation
  東京大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation2012
- Author(s)
  K. Takamasu, S. Takahashi, R. Furutani, M. Abbe
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb2012
- Author(s)
  H. Matsumoto, X. Wang, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb2012
- Author(s)
  H. Matsumoto, X. Wang, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser2012
- Author(s)
  C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices - Development of Three Dimensional Measuring Facility and Experiment -2012
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satom Takahashi, Kiyoshi Takamasu
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb2012
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2012
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  SPIE Advanced Lithography 2012
- Place of Presentation
  Sanjose USA
- Year and Date
  2012-02-15
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb2012
- Author(s)
  D. Wei, K. Takamasu, H. Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb2012
- Author(s)
  X. Wang, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  euspen2012
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2012-06-06
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb2012
- Author(s)
  Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第14報）－コヒーレント結像逐次再構成型超解像法－2012
- Author(s)
  工藤良太，高橋哲，高増潔，臼杵深
- Organizer
  2012年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第15報）ｰエバネッセント露光における樹脂硬化メカニズムの解析ｰ2012
- Author(s)
  宮川幸大，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学，福岡県
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift2012
- Author(s)
  R. Kudo, S. Takahashi, K. Takamasu
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] STEMを用いた半導体線幅測定および線形状測定のサブナノメートル校正2012
- Author(s)
  高増潔
- Organizer
  応用物理学会　次世代リソグラフィワークショップ（NGL2012）
- Place of Presentation
  東京工業大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Step Gauge Measurement Using High-Frequency Repetitions of a ModeLocked Fiber Laser2012
- Author(s)
  C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第15報）ｰエバネッセント露光における樹脂硬化メカニズムの解析ｰ2012
- Author(s)
  宮川幸大，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser2012
- Author(s)
  C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ工具に関する基礎的研究2012
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光周波数コムを用いた絶対距離計測2012
- Author(s)
  高増潔
- Organizer
  精密工学会　大規模環境の3次元計測と認識・モデル化技術専門委員会
- Place of Presentation
  東京大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb2012
- Author(s)
  X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto
- Organizer
  12th euspen International Conference
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] 近赤外エバネッセント定在波を用いた半導体ウエハ表面の超解像光学式欠陥検査(第2報)-フィルタによるエラーの影響抑制-2011
- Author(s)
  工藤良太,高橋哲,高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  金沢
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Development of high precision Coordinate Measuring Machine - Uncertainty analysis of multi-probe method2011
- Author(s)
  Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices - Error Analysis and Experiments -2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Pulse repetition interval-based excess fraction method2011
- Author(s)
  Dong WEI, Kiyoshi TAKAMASU, Hirokazu MATSUMOTO
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices: Error Analysis and Experiments -2011
- Author(s)
  Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  Proceedings of the 11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM2011
- Author(s)
  Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada
- Organizer
  Proc.SPIE AL 2011
- Place of Presentation
  San Jose, USA
- Year and Date
  2011-02-28
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 近赤外エバネッセント定在波を用いた半導体ウエハ表面の超解像光学式欠陥検査（第2報）－フィルタによるエラーの影響抑制－2011
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Remote internal diameter measurement of ring gauge based on a low-coherence tandem scheme2011
- Author(s)
  D. Wei, N. Wu, K. Takamasu and H. Matsumoto
- Organizer
  ASPEN201
- Place of Presentation
  Hong Kong
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第5報)-創製構造体の気相下観察に基づく加工特性の解析-2011
- Author(s)
  吉越久倫, 関野貴宏, 高橋哲, 高増潔
- Organizer
  2011年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東洋大学
- Year and Date
  2011-03-16
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser2011
- Author(s)
  X. Wang, S. Takahashi, K. Takamasu, Hirokazu Matsumoto
- Organizer
  ISMTII2011
- Place of Presentation
  Daejeon, Korea
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第1報）－酸化チタン光触媒ナノ粒子による微細除去加工基本機能の検証－2011
- Author(s)
  関野貴宏，高橋哲，高増潔
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine2011
- Author(s)
  Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms2011
- Author(s)
  Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Self-calibration for two-dimensional stage using least squares solution2011
- Author(s)
  Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Remote Internal Diameter Measurement of Ring Gauge based on a Low-coherence Tandem Scheme2011
- Author(s)
  D. Wei, N. Wu, K. Takamasu, H. Matsumoto
- Organizer
  ASPEN2011
- Place of Presentation
  Hong Kong, China
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb2011
- Author(s)
  Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu
- Organizer
  FIO/LS Technical Digest, OSA
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi , Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination2011
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments, ISMTII2011
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine2011
- Author(s)
  P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji
- Organizer
  11th euspen International Conference
- Place of Presentation
  Como, Italy
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Experimental analysis of influence of error on super-resolution optical inspection using standing wave2011
- Author(s)
  R. Kudo, S. Usuki, S. Takahashi, K.Takamasu
- Organizer
  10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Year and Date
  2011-07-01
- Data Source
  KAKENHI-PROJECT-23656097
[Presentation] Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser2011
- Author(s)
  Xiaonan Wang, Satoru Takahashi , Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proceedings 10th International Symposium of Measurement Technology and Intelligent Instruments
- Place of Presentation
  Daejeon, Korea
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Remote Internal Diameter Measurement of Ring Gauge based on a Low-coherence Tandem Scheme2011
- Author(s)
  D. Wei, N. Wu, K. Takamasu and H. Matsumoto
- Organizer
  Proc. of ASPEN2011
- Place of Presentation
  Hong Kong, China
- Data Source
  KAKENHI-PROJECT-23656175
[Presentation] Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth2010
- Author(s)
  Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light2010
- Author(s)
  Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu
- Organizer
  Proc.ASPE2010
- Place of Presentation
  Atlanta, USA
- Year and Date
  2010-11-01
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM2010
- Author(s)
  Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains' interference2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.EOS 2010
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-26
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy2010
- Author(s)
  高橋哲, 高増潔
- Organizer
  4th TU-SNU-UT Joint Symposium
- Place of Presentation
  Tokyo
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Uncertainty Estimation for Profile Measurement by Multi-Sensors Method2010
- Author(s)
  Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination2010
- Author(s)
  Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Advanced Absolute Length Metrology Based On Pulse Trains' Constructive Interference-Towards Measurements of Meter Order with an Accuracy of Nano Order-2010
- Author(s)
  Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer2010
- Author(s)
  W.Agustinus, A.Hirai, S.Takahashi, K.Takamasu, H.Matsumoto
- Organizer
  Proc.of the euspen International Conference
- Place of Presentation
  Delft, Netherlands
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy2010
- Author(s)
  Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  4th TU-SNU-UT Joint Symposium
- Place of Presentation
  Tokyo,武田ホール
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image2010
- Author(s)
  K.Takamasu, K.Kuwabara, S.Takahashi, T.Mizuno, H.Kawada
- Organizer
  Proc.of the euspen International Conference
- Place of Presentation
  Delft, Netherlands
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror-Enlarging Measuring Range of Autocollimator-2010
- Author(s)
  Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第4報)-インプロセス観察に基づく創製特性の実験的検討-2010
- Author(s)
  松田恵介, 吉越久倫, 高橋哲, 高増潔
- Organizer
  2010年度精密工学会秋季大会学術講演会講演論文集
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser2010
- Author(s)
  Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb2010
- Author(s)
  Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  Proc.10th ISMQC
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第3報)-3次元創製プロセスの顕微観察-2009
- Author(s)
  松田恵介, 高橋哲, 高増潔
- Organizer
  2009年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  神戸大学
- Year and Date
  2009-09-07
- Data Source
  KAKENHI-PROJECT-20360062
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第5報)-定在波照明の2方向シフトを用いた2次元超解像特性の検討-2008
- Author(s)
  工藤良太, 臼杵深, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  明治大学
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第2報)-創製構造体の気相取り出し方法の実験的検討-2008
- Author(s)
  吉田大助, 武内徹, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] レジスト表面形状の計測(第五報)-マルチトポセンサの提案-2008
- Author(s)
  徳田雄一郎高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第5報)-定在波照明の2方向シフトを用いた2次元超解像特性の検討-2008
- Author(s)
  工藤良太, 臼杵深, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 半導体の線幅標準に関する研究(第3報)-STEM画像による線幅のエッジおよびピッチの決定2008
- Author(s)
  桑原一樹, 澤内佑介, 高橋哲, 高増潔
- Organizer
  2008年度精密工学会春季大会学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System2007
- Author(s)
  Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimenta Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究(第4報)-定在波シフトによる変調散乱光観察実験-2007
- Author(s)
  岡田真一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Development for a High Percisin Positioning Systems Family with Parallel Structure and Short Planar Motion2007
- Author(s)
  G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu
- Organizer
  Euspen 2007
- Place of Presentation
  Germany
- Year and Date
  2007-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data2007
- Author(s)
  M. Nara, M. Abbe, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors2007
- Author(s)
  Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi
- Organizer
  ISMQC 2007
- Place of Presentation
  India
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resoltition Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007
- Author(s)
  S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
- Organizer
  ISMQC2007
- Place of Presentation
  India
- Year and Date
  2007-11-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification fbr Super-resolution Optical Inspection fbr Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kioshi Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  8th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  東北大学,仙台
- Year and Date
  2007-09-25
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Uncertainty Estimation for Coordinate Metrology : Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illuminatio Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors2007
- Author(s)
  Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi
- Organizer
  ISMQC2007
- Place of Presentation
  India
- Year and Date
  2007-11-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertain Evaluation of CMM b Modelin with Satial Constraint2007
- Author(s)
  M. Abbe M. Nara K. Takamasu
- Organizer
  ISMQC 2007
- Place of Presentation
  India
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Stud on Scanning Suareness Measurement Method and Uncertainty Estimation2007
- Author(s)
  Y. Chen, Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Study on Scanning Squareness Measurement Method and Uncertainty Estimation2007
- Author(s)
  X. Chen, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] エバネッセント光を利用したナノ光造形法の研究(第9報)-DMDによるエバネッセント強度分布制御法の検討-2007
- Author(s)
  武内徹, 梶原優介, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Lisht2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究(第4報)-定在波シフトによる変調散乱光観察実験-2007
- Author(s)
  岡田真一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Year and Date
  2007-09-14
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Development of laser-assisted microfabrication sysetm for three-dimensional metal structures by photocatalysis2007
- Author(s)
  S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu
- Organizer
  Euspen 2007
- Place of Presentation
  Germany
- Year and Date
  2007-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 近接場光を用いたナノインプリント残膜測定法に関する研究(第3報)-偏光特性を利用した残膜厚計測-2007
- Author(s)
  南口修一, 臼杵深, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterode Interferometer2007
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Study on alorithm of reconstructing topography based on topography difference2007
- Author(s)
  X. Chen, K. Kotani, K. Takamasu
- Organizer
  Euspen 2007
- Place of Presentation
  Germany
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift2007
- Author(s)
  S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
- Organizer
  8th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  東北大学,仙台
- Year and Date
  2007-09-26
- Data Source
  KAKENHI-PROJECT-18656041
[Presentation] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2007
- Author(s)
  S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 半導体の線幅標準に関する研究(第2報)-ラインエッジの不確かさ要因-2007
- Author(s)
  澤内佑介, 高橋哲, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 平面リニアモータシステムの開発(第6報)-6自由度パラレルメカニズムの校正実験-2007
- Author(s)
  吉田敬亮, 妹尾達也, 陳欣, 小谷潔, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Study on algorithm of reconstructing topography based on topography difference2007
- Author(s)
  X. Chen, K. Kotani, K. Takamasu
- Organizer
  Euspen 2007
- Place of Presentation
  Germany
- Year and Date
  2007-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 現場環境における三次元測定機の高精度化に関する研究(第5報)-時間的な影響を考慮した温度補正-2007
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Organizer
  2007年度精密工学会秋季大会学術講演会
- Place of Presentation
  旭川
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics2007
- Author(s)
  S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu
- Organizer
  ISMQC 2007
- Place of Presentation
  India
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Estimation for Coordinate Metrology:Calibration, Form Deviation and Strategy of Measurement2007
- Author(s)
  K. Takamasu, S. Takahashi, M. Abbe, R. Furutani
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] Uncertainty Evaluation of CMM by Modeling with Spatial Constraint2007
- Author(s)
  M. Abbe, M. Nara, K. Takamasu
- Organizer
  ISMQC2007
- Place of Presentation
  India
- Year and Date
  2007-11-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterodyne Interferometer2007
- Author(s)
  Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
- Organizer
  ISMTII2007
- Place of Presentation
  Japan
- Year and Date
  2007-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206025
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第4報）－THz波制御素子への応用可能性の検討－
- Author(s)
  吉越久倫，堀田陽亮，高橋哲,　高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb
- Author(s)
  Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  LMPMI2014 (11th Laser Metrology for Precision Measurement and Inspection in Industry)
- Place of Presentation
  EPOCHAL Tsukuba, Tsukuba, Japan
- Year and Date
  2014-09-02 – 2014-09-05
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] 光触媒ナノ粒子を用いた3次元微細構造創製に関する研究（第2報）－創製構造物の機能化に向けた実験的検討－
- Author(s)
  吉越久倫，門屋祥太郎，高橋哲，高増潔
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  大阪
- Year and Date
  2013-09-11 – 2013-09-13
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Fundamental study on the world’s thinnest layered micro-stereolithography using evanescent light
- Author(s)
  S. Takahashi, H. Tahara, K. Miyakawa, Y. Kajihara, and K. Takamasu
- Organizer
  ASPE2014 Spring Topical Meeting
- Place of Presentation
  Berkerley, USA
- Year and Date
  2014-04-14 – 2014-04-16
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第5報）－光放射圧制御加工の実験的検証－
- Author(s)
  山口祐樹，加地史弥，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography
- Author(s)
  Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2013-11-13 – 2013-11-15
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator
- Author(s)
  Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi
- Organizer
  Proceeding of ASPE/ASPEN Summer Topical Meeting
- Place of Presentation
  Hawaii, USA
- Year and Date
  2014-06-26 – 2014-06-27
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] 不確かさ算出持ち回り測定：ソフトウェアの誤差伝播による不確かさ解析
- Author(s)
  高増潔
- Organizer
  CMM公開講座
- Place of Presentation
  東京電機大学，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Distance Measurement Using Temporal-Coherence Interferometer with Optical Frequency Comb and Fiber Etalons
- Author(s)
  Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  Conference Paper Frontiers in Optics
- Place of Presentation
  Tucson, USA
- Year and Date
  2014-10-19 – 2014-10-23
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第19 報）－3 光束干渉定在波照明の自動生成法の検討－
- Author(s)
  久米大将，横関宏樹，高橋哲，高増潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] スポット重複移動情報を用いた光学式超解像検査法の開発
- Author(s)
  金成碩，久米大将，横関宏樹，高橋哲，高増潔
- Organizer
  日本機械学会2015年度年次大会
- Place of Presentation
  北海道
- Year and Date
  2015-09-13 – 2015-09-16
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] Absolute Length-Measuring System by Automatic Interference-Fringe-Peak Detection with Optical-Comb Fiber Interferometer
- Author(s)
  Hirokazu Matsumoto, Kiyoshi Takamasu
- Organizer
  LMPMI2014 (11th Laser Metrology for Precision Measurement and Inspection in Industry)
- Place of Presentation
  EPOCHAL Tsukuba, Tsukuba, Japan
- Year and Date
  2014-09-02 – 2014-09-05
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles
- Author(s)
  H. Yoshigoe, S. Takahashi, K. Takamasu
- Organizer
  the 13th euspen International Conference (euspen2013)
- Place of Presentation
  Berlin, Germany
- Year and Date
  2013-05-28 – 2013-05-30
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第８報）－放射圧動的制御による高安定トラップ－
- Author(s)
  加地史弥，堀田陽亮，高橋　哲，高増　潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] スポット照明の重複シフトによる光学式超解像検査法（第4報）－スポット照明超解像型基礎実験装置の基本的機能検証－
- Author(s)
  横関宏樹，工藤良太，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] スポット照明の重複シフトによる光学式超解像検査法(第5報) －離散的サンプルを用いた提案超解像原理の実験的検証－
- Author(s)
  横関宏樹，久米大将，高橋哲，高増潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] 光触媒ナノ工具に関する基礎的研究（第6報）－インプロセス工具位置観察ユニットの実装－
- Author(s)
  加地史弥，山口祐樹，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] レーザー集光点近傍の光触媒反応を用いた3次元微細構造創製に関する研究
- Author(s)
  堀田陽亮，吉越久倫，高橋哲，高増潔
- Organizer
  日本機械学会第10回生産加工・工作機械部門講演会
- Place of Presentation
  徳島
- Year and Date
  2014-11-15 – 2014-11-16
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する基礎的研究（第７報）－回折限界を超えた微細除去加工の検討－
- Author(s)
  堀田陽亮，加地史弥，高橋　哲，高増　潔
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] GPS規格の概要　－高精度の形状・大きさ・寸法を実現するためのGPS規格－
- Author(s)
  高増潔
- Organizer
  2012年度精密工学会春季大会シンポジウム
- Place of Presentation
  首都大学東京，東京
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査（第18報）－コヒーレント結像逐次再構成型超解像による二次元超解像法のシミュレーションによる検討－
- Author(s)
  工藤良太，高橋哲，高増潔
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-26630018
[Presentation] Theoretical Analysis of the Spatial Process Resolution of Evanescent Light Exposure for Nano-stereolithography
- Author(s)
  Hiroyuki TAHARA, Kodai MIYAKAWA, Toshimune NAGANO, Satoru TAKAHASHI and Kiyoshi TAKAMASU
- Organizer
  the 15th International Conference on Precision Engineering
- Place of Presentation
  Kanazawa
- Year and Date
  2014-07-23 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ工具に関する研究（第3報）－微小除去加工特性の実験的解析－
- Author(s)
  山口祐樹，加地史弥，高橋哲，高増潔
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  大阪
- Year and Date
  2013-09-11 – 2013-09-13
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] Analysis of TiO2 nanotool handling characteristics for microplastic structures based on laser trapping technique
- Author(s)
  Fumiya KAJI, Yuki YAMAGUCHI, Satoru TAKAHASHI and Kiyoshi TAKAMASU
- Organizer
  the 15th International Conference on Precision Engineering
- Place of Presentation
  Kanazawa
- Year and Date
  2014-07-23 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 光触媒ナノ加工工具に関する基礎的研究（第4報）－光放射圧によるTiO2工具チップ把持特性－
- Author(s)
  加地史弥，山口祐樹，高橋哲，高増潔
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23246028
[Presentation] 三次元測定機の課題
- Author(s)
  高増潔
- Organizer
  CMM技術交流会：TTDC
- Place of Presentation
  豊田，愛知
- Invited
- Data Source
  KAKENHI-PROJECT-22246016
[Presentation] Precision measurement technique for rough surface object using self-beat signals of optical frequency comb
- Author(s)
  Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
- Organizer
  Proceedings of the 14th euspen International Conference
- Place of Presentation
  Dubrovnik, Croatia
- Year and Date
  2014-06-02 – 2014-06-05
- Data Source
  KAKENHI-PROJECT-26630087
[Presentation] 微細加工構造の超回折限界光学式計測法の開発
- Author(s)
  久米大将，横関宏樹，工藤良太，高橋哲，高増潔
- Organizer
  日本機械学会第10回生産加工・工作機械部門講演会
- Place of Presentation
  徳島
- Year and Date
  2014-11-15 – 2014-11-16
- Data Source
  KAKENHI-PROJECT-26630018

1. TAKAHASHI Satoru (30283724)

# of Collaborated Projects: 12 results

# of Collaborated Products: 334 results
2. FURUTANI Ryoshu (50219119)

# of Collaborated Projects: 5 results

# of Collaborated Products: 6 results
3. OZONO Shigeo (10010878)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. 道畑正岐 (70588855)

# of Collaborated Projects: 2 results

# of Collaborated Products: 46 results
5. MATSUMOTO Hirokazu (00358045)

# of Collaborated Projects: 1 results

# of Collaborated Products: 31 results
6. MISUMI Ichiko (40358099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. SATO Osamu (60392619)

# of Collaborated Projects: 1 results

# of Collaborated Products: 52 results
8. SHIMOKOHBE Akira (40016796)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. MIYOSHI Takashi (00002048)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. TAKADA Koji (80126474)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. KIYONO Satoshi (40005468)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. KATO Junichi (70177450)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 高谷裕浩 (70243178)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 高偉 (70270816)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
15. 高辻利之 (20357362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 笹島和幸 (80170702)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 久米達哉 (40353362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
18. 三部勉 (80536938)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
19. WEI Dong

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
20. 明田川正人

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
21. 小谷潔

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Takamasu Kiyoshi 高増 潔

TAKAMASU Kiyoshi 高増 潔

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Absolute profile measurement for large scale constrcution using comb self beat distance sensorPrincipal Investigator

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Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shapePrincipal Investigator

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Generation of traceable absolute three dimensional space in production environment using femtosecond laserPrincipal Investigator

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Estimation Method of Unvertainty on Nanometer Three Dimensional MeasurementPrincipal Investigator

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ナノスケール生産基盤におけるコア計測技術に関する企画調査Principal Investigator

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Takamasu Kiyoshi 高増潔

TAKAMASU Kiyoshi 高増潔