Gao Wei 高偉

… Alternative Names

GAO Wei 高偉

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Researcher Number	70270816
Other IDs
External Links
Affiliation (Current)	2025: 東北大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help	2015 – 2024: 東北大学, 工学研究科, 教授 2016: 東北大学, 大学院工学研究科, 教授 2012 – 2015: 東北大学, 工学(系)研究科(研究院), 教授 2006 – 2012: 東北大学, 大学院・工学研究科, 教授 2006: Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 … More 1999 – 2005: Department of Mechatronics, Tohoku University, Associate Professor, 大学院・工学研究科, 助教授 1997: Tohoku University, Department of Mechatronics, Lecturer, 大学院・工学研究科, 講師 1996: Tohoku University, Department of Mechatronics, Lecturer, 工学部, 講師 1995: 東北大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / 設計工学・機械要素・トライボロジー / Basic Section 18020:Manufacturing and production engineering-related / Production engineering/Processing studies / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Intelligent mechanics/Mechanical systems / Intelligent mechanics/Mechanical systems Except Principal Investigator 機械工作・生産工学 / 設計工学・機械要素・トライボロジー … More / Basic Section 18020:Manufacturing and production engineering-related / Production engineering/Processing studies / Materials/Mechanics of materials / Intelligent mechanics/Mechanical systems / Intelligent mechanics/Mechanical systems Less
Keywords	Principal Investigator 超精密計測 / 角度センサ / 角度 / 測定 / 加工学 / 生産工学 / ナノ計測 / 形状 / 計測 / 精度 … More / 変位 / センサ / 直交型混合法 / 光応用計測 / 光周波数コム / 加工計測 / 精密位置決め / ダイヤモンド工具 / 反転エッジ / 微細形状 / 分解能 / 感度 / 誤差 / AFM / マイクロ / ナノメートル / フォトダイオード / 3次元 / エアスピンドル / 回転運動誤差 / ピコラジアン / 絶対角度 / 自律的計測 / FS-FTS / 原子間力顕微鏡 / 分子動力学シミュレーション / 絶対計測 / 位置 / 自律校正 / トレーサビリティ / ３次元計測 / 位置決め / 超短パルスレーザ / 精密計測 / フェムト秒レーザ / fast tool servo / Force sensor / Stiffness / measurement force / Three-dimensional / Micro-structured surface / Nanofabrication / Nanometrology / 力センサ / 剛性 / 測定力 / ナノ加工 / high-accuracy / optical sensor / profile / calibration / slope sensor / flatness / silicon wafer / metrology / 4分割PD / オートコリメーション / 角度プローブ / 測定時間 / 高精度 / 光センサ / 校正 / 平坦度 / シリコンウエハ / FTS / 圧力センサ / アクチュエータ / MDシミュレーション / マイクロエッジ / 微空間 / 絶対距離 / 非接触 / バイオオプティクス / 金型 / プローブ顕微鏡 / 静電気力 / 反射格子 / レーザ / アッべ誤差 / アッベ誤差 / 光 / 超高感度 / ステージ / 超精密位置決め / 回折格子 / 多軸角度計測 / 3軸レーザオートコリメータ / 回折光 / 平面ステージ / 微細格子 / 多軸計測 / 三次元形状 / アライメント / 光プローブ / 工具 / 3次元形状 / エッジ / ピコメートル / 変調 / 変位センサ / PZT / ナノチューブ / インデンテーション / マルチビーム / バルーン型プローブ / 硬さセンサ / マイクロセンサ / 生体内異物 / 触診 / 癌 / 円形試料 / 直径 / 真円度 / 光学式 / 基準球 / 真円度誤差 … More Except Principal Investigator accuracy / 精度 / センサ / 基準 / 加工学 / 生産工学 / angle grid / sensor / 高速工具サーボ / 角度格子 / 角度情報 / 多自由度 / 位置姿勢検出 / self-calibration / 形状 / autonomous / metrology / 自律 / 計測工学 / 自律校正 / 計測 / 超精密計測 / 波面制御 / 干渉定在波 / 微細構造露光 / 精密位置決め / 加工計測 / 機械工学 / 精密計測 / Nano-positioning / Nano-scale Measurement / Semiconductor / Nano-Indentation / Analysis of Atomic Structure / Thin Film / Reliability / Strength of nano-scale materials / 強度物性 / ナノポジショニング / ナノ計測 / 半導体 / ナノインデンテーション / 原子構造解析 / 薄膜 / 信頼性 / ナノ強度物性 / closed-loop control / slope / multi-degee-of-freedom / surface motor / position measurement / 制御 / エンコーダ / 他自由度 / 高精度化 / クローズドループ制御 / サーフェスモータ / scanning laser beam / angle information / multi degrees of freedom / position and attitude detection / 光走査 / zero-adjustment error / three-probe method / probe / linear collider / long cylinder / straightness / 3点法 / 加速器 / 母線 / 円筒 / 測定 / reference / absolute / displacement / profile / in situ / サブナノメートル / 絶対 / 変位 / その場 / 校正 / lapping pat / PZT actuator / actuator / lever / profile generation / machining / 砥粒 / 圧電アクチュエータ / 弾性レバ- / 圧力転写加工 / 形状創成 / 加工 / 三次元計測 / 機械工学・生産工学 / ナノメートル計測 / 静電容量 / 角度 / 非線形誤差 / 2次元PSD Less

光周波数コムを用いたピコラジアン級次世代ファブリペロー絶対角度計測法の創出Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Tohoku University
その場波面制御で自在に操る干渉定在波によるサブμｍ級自由微細構造の大面積露光創成
- Principal Investigator
  
  清水裕樹
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Hokkaido University
Subatomic 3D Ultra-Precision Measurement by Creation of Optical Comb Dimensional Conversion Optics and In-Situ Autonomous Calibration MethodPrincipal Investigator
- Principal Investigator
  
  Gao Wei
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Tohoku University
Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale combPrincipal Investigator
- Principal Investigator
  
  Gao Wei
- Project Period (FY)
  2015 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limit
- Principal Investigator
  
  Shimizu Yuki
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
ダイヤモンドマイクロ切削工具エッジ形状のサブナノメートル超高精度計測法の研究Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond toolPrincipal Investigator
- Principal Investigator
  
  Gao Wei
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stagePrincipal Investigator
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-opticsPrincipal Investigator
- Principal Investigator
  
  GAO WEI
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beamsPrincipal Investigator
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-ToolsPrincipal Investigator
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
ナノスケール生産基盤におけるコア計測技術に関する企画調査
- Principal Investigator
  
  高増潔
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
ナノチューブを用いた次世代3次元ピコインデンターチップに関する研究Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
Measurement system of fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique
- Principal Investigator
  
  MIURA Hideo
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  TOHOKU UNIVERSITY
High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement FunctionPrincipal Investigator
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
Development of a surface encoder for next generation three-axis precision stages
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  2002 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
An Ultra-precision Measurement System for Next Generation 400 mm Silicon WafersPrincipal Investigator
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
静電容量型2次元角度センサの試作研究
- Principal Investigator
  
  ZHANG Shizhou
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
ソフトウェアデータムによる真円度・直径の機上同時計測に関する研究Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
A new method of position and attitude detection based on an angle sensor
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
Straightness Measurement of Long Cylinder for Construction of Linear Collider
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  TOHOKU UNIVERSITY
エアスピンドルの3次元エラーモーションの動的超精密測定Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
Development of Absolute Self-Calibration Systems for Displacement and Profile Measuring Instruments with Subnanometric Accuracy
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
2次元PSDの高度利用のための自律校正法の研究
- Principal Investigator
  
  林玉池
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
形状誤差と運動誤差の分離によるエアスピンドルの回転運動精度の超精密測定Principal Investigator
- Principal Investigator
  
  高偉
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tohoku University
Basic Study on Ultra-Precision Self-Profile-Generation
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University

[Book] Bilingual edition 精密計測学2024
- Author(s)
  高偉，清水裕樹，水谷康弘，道畑正岐，河野大輔，吉田一朗，伊東聡，清水浩貴
- Total Pages
  182
- Publisher
  朝倉書店
- ISBN
  9784254201789
- Data Source
  KAKENHI-PROJECT-23K22641
[Book] 機械設計「精密位置決めのための多軸センサ活用」2022
- Author(s)
  清水裕樹，高偉
- Total Pages
  6
- Publisher
  日刊工業新聞
- Data Source
  KAKENHI-PROJECT-23K22641
[Book] Unlicensed Published by De Gruyter 2022 Optical Metrology for Precision Engineering2021
- Author(s)
  Wei Gao and Yuki Shimizu
- Total Pages
  644
- Publisher
  Walter de Gruyter GmbH 2022
- ISBN
  9783110541090
- Data Source
  KAKENHI-PROJECT-20H00211
[Book] (Book chapter)モード同期レーザを用いた共焦点プローブ－非走査測定と高分解能の両立－2020
- Author(s)
  佐藤遼，清水裕樹，仲村拓，松隈啓，高偉
- Total Pages
  5
- Publisher
  日本工業出版
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] Surface Metrology for Micro- and Nanofabrication2020
- Author(s)
  Wei Gao
- Total Pages
  448
- Publisher
  Elsevier
- ISBN
  9780128178508
- Data Source
  KAKENHI-PROJECT-20H00211
[Book] Metrology2019
- Author(s)
  Wei Gao
- Publisher
  Springer Singapore
- ISBN
  9789811049392
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] 光技術コンタクト(Book chapter) 微細光学表面計測用プローブ顕微鏡技術2019
- Author(s)
  松隈　啓，清水裕樹，高　偉
- Total Pages
  5
- Publisher
  一般社団法人日本オプトメカトロニクス協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 精密工学会誌「多機能高速工具サーボFS-FTSを用いた超精密微細加工と計測」2019
- Author(s)
  高　偉
- Total Pages
  5
- Publisher
  精密工学会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019
- Author(s)
  Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, and Wei Gao
- Total Pages
  28
- Publisher
  World Scientific
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] 高精度走査プローブ顕微鏡技術2018
- Author(s)
  清水裕樹，松隈啓，高偉
- Total Pages
  3
- Publisher
  先端加工機械技術振興協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械の研究「長ストロークステージ向けの精密姿勢角センサの開発」2016
- Author(s)
  清水裕樹, 石川龍弥, 片岡智史, 陳遠流, 伊東聡, 高偉
- Total Pages
  7
- Publisher
  養賢堂
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械技術「高機能高速工具サーボによる3次元微細形状加工技術のイノベーション」2016
- Author(s)
  清水裕樹, 陳遠流, 盧泳辰, 伊東聡, 高偉
- Total Pages
  5
- Publisher
  日刊工業新聞社
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 機械設計「精密位置決めにおける多軸センサの活用」2016
- Author(s)
  伊東聡，清水裕樹，高偉
- Total Pages
  6
- Publisher
  日刊工業新聞社
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Book chapter) 光学「精密測定機・加工機向け光学式エンコーダ―技術」2015
- Author(s)
  李星輝, 清水裕樹, 高偉
- Total Pages
  34
- Publisher
  日本光学会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Chapter) Controller and sensor technologies for surface motor-driven planar stage, in Multi-Degree-of-Freedom (MDOF) Motors2015
- Author(s)
  Xinghui Li, Songyi Dian and Wei Gao
- Publisher
  Springer(London)
- Data Source
  KAKENHI-PROJECT-24360050
[Book] (Chapter) 精密位置決めセンサの基礎と最新技術2015
- Author(s)
  伊東聡，高偉
- Total Pages
  6
- Publisher
  Interlab
- Data Source
  KAKENHI-PROJECT-24360050
[Book] (Book chapter) 自動化推進「光学式超精密多軸位置決めセンサ」2015
- Author(s)
  高偉, 清水裕樹, 伊東聡, 陳遠流
- Total Pages
  24
- Publisher
  JAAA自動化推進協会
- Data Source
  KAKENHI-PROJECT-15H05759
[Book] (Chapter) 精密位置決めのための角度センサ活用2014
- Author(s)
  清水裕樹，伊東聡，高偉
- Total Pages
  7
- Publisher
  日刊工業新聞
- Data Source
  KAKENHI-PROJECT-24360050
[Book] Precision Nanometrology2010
- Author(s)
  Wei Gao
- Total Pages
  355
- Publisher
  Springer
- Data Source
  KAKENHI-PROJECT-21360057
[Book] 日本機械学会編: 機械工学便覧デザイン編β3 加工学・加工機器2006
- Author(s)
  高増潔他
- Total Pages
  250
- Publisher
  日本機械学会
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder2024
- Author(s)
  Sato Ryo、Liu Tao、Maehara Satoru、Okimura Ryota、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 18 Issue: 2 Pages: 249-256
- DOI
  10.20965/ijat.2024.p0249
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2024-03-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22KJ0173, KAKENHI-PROJECT-20H00211
[Journal Article] Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser2024
- Author(s)
  Liu Tao、Matsukuma Hiraku、Suzuki Amane、Sato Ryo、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 24 Issue: 2 Pages: 370-370
- DOI
  10.3390/s24020370
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor2024
- Author(s)
  Wu Jiucheng、Hong Yifang、Shin Dong Wook、Sato Ryo、Quan Lue、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 18 Issue: 1 Pages: 4-10
- DOI
  10.20965/ijat.2024.p0004
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2024-01-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network2023
- Author(s)
  Li Kuangyi、Zhang Zhiyang、Lin Jiahui、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 6 Issue: 1 Pages: 1-15
- DOI
  10.1007/s41871-023-00206-5
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes2023
- Author(s)
  Sato Ryo、Li Xinghui、Fischer Andreas、Chen Liang-Chia、Chen Chong、Shimomura Rintaro、Gao Wei
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 25 Issue: 1 Pages: 199-223
- DOI
  10.1007/s12541-023-00842-3
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22KJ0173, KAKENHI-PROJECT-20H00211
[Journal Article] Improved peak-to-peak method for cavity length measurement of a Fabry-Perot etalon using a mode-locked femtosecond laser2023
- Author(s)
  Shin Dong Wook、Matsukuma Hiraku、Sato Ryo、Manske Eberhard、Gao Wei
- Journal Title
  
  Optics Express
  
  Volume: 31 Issue: 16 Pages: 25797-25797
- DOI
  10.1364/oe.493507
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals2023
- Author(s)
  Li Kuangyi、Lin Jiahui、Zhang Zhiyang、Sato Ryo、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 13 Issue: 2 Pages: 996-996
- DOI
  10.3390/app13020996
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser2023
- Author(s)
  Liu Tao、Wu Jiucheng、Suzuki Amane、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 23 Issue: 10 Pages: 4953-4953
- DOI
  10.3390/s23104953
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Confocal probe based on the second harmonic generation for measurement of linear and angular displacements2023
- Author(s)
  Sato Ryo、Shimizu Yuki、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Optics Express
  
  Volume: 31 Issue: 7 Pages: 11982-11982
- DOI
  10.1364/oe.486421
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser2022
- Author(s)
  Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 9 Pages: 4736-4736
- DOI
  10.3390/app12094736
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction2022
- Author(s)
  Quan Lue、Shimizu Yuki、Sato Ryo、Shin Dong Wook、Matsukuma Hiraku、Archenti Andreas、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 16 Issue: 5 Pages: 572-581
- DOI
  10.20965/ijat.2022.p0572
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2022-09-05
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Fabry-P?rot angle sensor using a mode-locked femtosecond laser source2022
- Author(s)
  Shin Dong Wook、Matsukuma Hiraku、Sato Ryo、Gao Wei
- Journal Title
  
  Optics Express
  
  Volume: 30 Issue: 26 Pages: 46366-46366
- DOI
  10.1364/oe.477435
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range2022
- Author(s)
  Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Shimizu Hiroki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 23 Pages: 9563-9563
- DOI
  10.3390/s22239563
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer2022
- Author(s)
  Xiong Xin、Yin Chenguang、Quan Lue、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Tamiya Hideaki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 23 Pages: 9348-9348
- DOI
  10.3390/s22239348
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe2022
- Author(s)
  Li Kuangyi、Astuti Wijayanti Dwi、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 7 Pages: 3702-3702
- DOI
  10.3390/app12073702
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range2022
- Author(s)
  Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 22 Issue: 8 Pages: 3010-3010
- DOI
  10.3390/s22083010
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser2022
- Author(s)
  Astuti Wijayanti Dwi、Li Kuangyi、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 12 Issue: 10 Pages: 5211-5211
- DOI
  10.3390/app12105211
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact2021
- Author(s)
  Shimizu Yuki、Ma Xu、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 32 Issue: 5 Pages: 054007-054007
- DOI
  10.1088/1361-6501/abd8a6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer2021
- Author(s)
  Xiong Xin、Quan Lue、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 32 Issue: 6 Pages: 064005-064005
- DOI
  10.1088/1361-6501/abe9de
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor2021
- Author(s)
  Quan Lue、Shimizu Yuki、Xiong Xin、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 1-13
- DOI
  10.1016/j.precisioneng.2020.09.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021
- Author(s)
  Shimizu Yuki、Quan Lue、Shin Dong Wook、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Measurement: Sensors
  
  Volume: 18 Pages: 100135-100135
- DOI
  10.1016/j.measen.2021.100135
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Scalability of precision design principles for machines and instruments2021
- Author(s)
  Yague-Fabra Jose A.、Gao Wei、Archenti Andreas、Morse Edward、Donmez Alkan
- Journal Title
  
  CIRP Annals
  
  Volume: 70 Issue: 2 Pages: 659-680
- DOI
  10.1016/j.cirp.2021.05.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer2021
- Author(s)
  Xiong Xin、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 21 Issue: 21 Pages: 7412-7412
- DOI
  10.3390/s21217412
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An absolute surface encoder with a planar scale grating of variable periods2021
- Author(s)
  Shimizu Yuki、Ishizuka Ryo、Mano Kazuki、Kanda Yuri、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 36-47
- DOI
  10.1016/j.precisioneng.2020.09.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors2021
- Author(s)
  Matsukuma Hiraku、Adachi Keisuke、Sugawara Takuma、Shimizu Yuki、Gao Wei、Niwa Eiji、Sasaki Yoshihiro
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 4 Issue: 1 Pages: 53-66
- DOI
  10.1007/s41871-020-00091-2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source2021
- Author(s)
  Matsukuma Hiraku、Department of Finemechanics, Tohoku University 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan、Sato Ryo、Shimizu Yuki、Gao Wei
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 15 Issue: 4 Pages: 529-536
- DOI
  10.20965/ijat.2021.p0529
- NAID
  130008062461
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2021-07-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-22KJ0173
[Journal Article] An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope2021
- Author(s)
  Zhang Kai、Shimizu Yuki、Matsukuma Hiraku、Cai Yindi、Gao Wei
- Journal Title
  
  The International Journal of Advanced Manufacturing Technology
  
  Volume: 117 Issue: 9-10 Pages: 2883-2893
- DOI
  10.1007/s00170-021-07879-6
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool2021
- Author(s)
  Wen Bo、Sekine Sho、Osawa Shinichi、Shimizu Yuki、Matsukuma Hiraku、Archenti Andreas、Gao Wei
- Journal Title
  
  Machines
  
  Volume: 9 Issue: 11 Pages: 271-271
- DOI
  10.3390/machines9110271
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator2021
- Author(s)
  Shimizu Yuki、Kanda Yuri、Ma Xu、Ikeda Kakeru、Matsukuma Hiraku、Nagaike Yasunari、Hojo Masaki、Tomita Keita、Gao Wei
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 339-349
- DOI
  10.1016/j.precisioneng.2020.10.013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation2021
- Author(s)
  Dwi Astuti Wijayanti、Matsukuma Hiraku、Nakao Masaru、Li Kuangyi、Shimizu Yuki、Gao Wei
- Journal Title
  
  Sensors
  
  Volume: 21 Issue: 2 Pages: 670-670
- DOI
  10.3390/s21020670
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser2020
- Author(s)
  Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 11 Pages: 4047-4047
- DOI
  10.3390/app10114047
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] A differential strategy for measurement of a static force in a single point diamond cutting by a force‐controlled fast tool servo2020
- Author(s)
  Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan-Liu Chen, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 7 Pages: 074014-074014
- DOI
  10.1088/1361-6501/ab7d6f
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Fabrication of a Two-dimensional Diffraction Grating with Isolated Photoresist Pattern Structures2020
- Author(s)
  Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu and Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: -
- NAID
  130007869728
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020
- Author(s)
  Shimizu Yuki、Gao Wei、Matsukuma Hiraku、Szipka Karoly、Archenti Andreas
- Journal Title
  
  CIRP Annals
  
  Volume: 69 Issue: 1 Pages: 469-472
- DOI
  10.1016/j.cirp.2020.03.011
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement2020
- Author(s)
  Matsukuma Hiraku、Wen Bo、Osawa Shinichi、Sekine Sho、Shimizu Yuki、Gao Wei
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 3 Issue: 4 Pages: 282-291
- DOI
  10.1007/s41871-020-00084-1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Measurement Uncertainty Analysis of a Stitching Linear-Scan Method for the Evaluation of Roundness of Small Cylinders2020
- Author(s)
  Li Qiaolin、Shimizu Yuki、Saito Toshiki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 14 Pages: 4750-4750
- DOI
  10.3390/app10144750
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact2020
- Author(s)
  Zhang Kai、Cai Yindi、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 14 Pages: 4799-4799
- DOI
  10.3390/app10144799
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer2020
- Author(s)
  Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 9 Pages: 094002-094002
- DOI
  10.1088/1361-6501/ab8b83
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A new signal processing method for a differential chromatic confocal probe with a modelocked femtosecond laser2020
- Author(s)
  Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: - Issue: 9 Pages: 094004-094004
- DOI
  10.1088/1361-6501/ab8905
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] PROFILE MEASUREMENT BY USING A FEMTOSECOND LASER CHROMATIC CONFOCAL PROBE2020
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Marsukuma, Wei Gao
- Journal Title
  
  Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing LEMP2020
  
  Volume: -
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe2020
- Author(s)
  Chen Chong、Shimizu Yuki、Sato Ryo、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Applied Sciences
  
  Volume: 10 Issue: 20 Pages: 7235-7235
- DOI
  10.3390/app10207235
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit2020
- Author(s)
  Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: - Pages: 230-239
- DOI
  10.1016/j.precisioneng.2020.03.014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020
- Author(s)
  Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
- Journal Title
  
  Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
  
  Volume: -
- DOI
  10.1115/lemp2020-8626
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00211
[Journal Article] On-machine and in-process surface metrology for precision manufacturing2019
- Author(s)
  W. Gao, H. Haitjema, F.Z. Fang, R.K. Leach, C.F. Cheung, E. Savio, J.M. Linares
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 68-2 Issue: 2 Pages: 843-866
- DOI
  10.1016/j.cirp.2019.05.005
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings2019
- Author(s)
  Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: 60 Pages: 280-290
- DOI
  10.1016/j.precisioneng.2019.07.022
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2019
- Author(s)
  Yuki Shimizu, Wei Gao, Hiraku Matsukuma, K?roly Szipka, Andreas Archenti
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 69-1
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Integration of a Cr-N Thin Film Displacement Sensor into an XY Micro-stage for Closed-loop Nano-Positioning2019
- Author(s)
  Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: In press Issue: 3 Pages: 131-139
- DOI
  10.1007/s41871-019-00040-8
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source2019
- Author(s)
  Ryo Sato，Yuki Shimizu，Chong Chen，Hiraku Matsukuma，Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9-19 Issue: 19 Pages: 4084-4084
- DOI
  10.3390/app9194084
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser2019
- Author(s)
  Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, and Wei Gao
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 2 Issue: 4 Pages: 187-198
- DOI
  10.1007/s41871-019-00052-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K14857, KAKENHI-PROJECT-15H05759
[Journal Article] Reduction in Cross Talk Errors in a Six Degree of Freedom Surface Encoder2019
- Author(s)
  Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 2-2 Issue: 2 Pages: 111-123
- DOI
  10.1007/s41871-019-00039-1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Accurate polarization control in nanorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings2019
- Author(s)
  Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Optical Engineering
  
  Volume: 58-9 Issue: 09 Pages: 92611-92611
- DOI
  10.1117/1.oe.58.9.092611
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Modelling and traceability for computationally-intensive precision engineering and metrology2018
- Author(s)
  J.M. Linares, G. Goch, A.Forbes, J.M. Sprauel, A. Clement, F.Haertig, W. Gao
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 67(2) Issue: 2 Pages: 815-838
- DOI
  10.1016/j.cirp.2018.05.003
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter2018
- Author(s)
  Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan-Liu Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 7 Pages: 074006-074006
- DOI
  10.1088/1361-6501/aac0a6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings2018
- Author(s)
  Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuanliu Chen, Xiuguo Chen, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: in press Pages: 138-151
- DOI
  10.1016/j.precisioneng.2017.12.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam2018
- Author(s)
  Yuki SHIMIZU, Kentaro UEHARA, Hiraku MATSUKUMA and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 12 Issue: 5 Pages: JAMDSM0097-JAMDSM0097
- DOI
  10.1299/jamdsm.2018jamdsm0097
- NAID
  130007499852
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration2018
- Author(s)
  Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9 Issue: 12 Pages: 2539-2539
- DOI
  10.3390/app8122539
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An optical angle sensor based on chromatic dispersion with a mode-locked laser source2018
- Author(s)
  Yuki SHIMIZU, Shuhei MADOKORO, Hiraku MATSUKUMA and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 12 Issue: 5 Pages: JAMDSM0096-JAMDSM0096
- DOI
  10.1299/jamdsm.2018jamdsm0096
- NAID
  130007498573
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions2018
- Author(s)
  Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Sensors
  
  Volume: 18 Issue: 2 Pages: 398-398
- DOI
  10.3390/s18020398
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Error separation method for precision measurement of the Run-Out of a microdrill bit by using a laser scan micrometer measurement system2018
- Author(s)
  Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, and Wei Gao
- Journal Title
  
  Journal of Manufacturing and Materials Processing
  
  Volume: 2 Issue: 1 Pages: 4-4
- DOI
  10.3390/jmmp2010004
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Generalized method for probing ideal initial polarization states in multibeam Lloyd’s mirror interference lithography of 2D scale gratings2018
- Author(s)
  Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Wei Gao
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 36 Issue: 2
- DOI
  10.1116/1.5016505
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement2018
- Author(s)
  Yuan-Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 6 Pages: 065014-065014
- DOI
  10.1088/1361-6501/aab998
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Laser autocollimation based on an optical frequency comb for absolute angular position measurement2018
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, and WeiGao
- Journal Title
  
  Precision Engineering
  
  Volume: 54 Pages: 284-293
- DOI
  10.1016/j.precisioneng.2018.06.005
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges2018
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 5 Pages: 054004-054004
- DOI
  10.1088/1361-6501/aaa913
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A stitching linear-scan method for roundness measurement of small cylinders2018
- Author(s)
  Yuan-Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 67(1) Issue: 1 Pages: 535-538
- DOI
  10.1016/j.cirp.2018.04.009
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe2018
- Author(s)
  Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Applied Sciences
  
  Volume: 9 Issue: 3 Pages: 454-454
- DOI
  10.3390/app9030454
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] A chromatic confocal probe with a mode-locked femtosecond laser source2018
- Author(s)
  Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Hiraku Matsukuma, Wei Gao
- Journal Title
  
  Optics and Laser Technology
  
  Volume: 103 Pages: 359-366
- DOI
  10.1016/j.optlastec.2018.01.051
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] 光周波数コムを用いた角度計測2018
- Author(s)
  高　偉
- Journal Title
  
  精密工学会誌
  
  Volume: 84(8) Issue: 8 Pages: 696-700
- DOI
  10.2493/jjspe.84.696
- NAID
  130007431066
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithography2017
- Author(s)
  Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan-Liu Chen, and Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 25 Issue: 19 Pages: 22237-22252
- DOI
  10.1364/oe.25.022237
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An edge reversal method for precision measurement of cutting edge radius of single point diamond tools2017
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito and Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: 50 Pages: 380-387
- DOI
  10.1016/j.precisioneng.2017.06.012
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Precision Measurement of Z -Slide Vertical Error Motion of an Ultra-Precision Lathe by Using Three-probe Method2017
- Author(s)
  Zengyuan Niu, Yuan-Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh and Chun Hong Park
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: 18 Issue: 5 Pages: 651-660
- DOI
  10.1007/s12541-017-0078-4
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Nanomanufacturing;Perspective and applications2017
- Author(s)
  F.Z. Fang, X.D. Zhang, W. Gao, Y.B. Guo, G. Byrne, H.N. Hansen
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 66 Issue: 2 Pages: 683-705
- DOI
  10.1016/j.cirp.2017.05.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Auto-tracking single point diamond cutting on non-planar brittlematerial substrates by a high-rigidity force controlled fast tool servo2017
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Journal Title
  
  Precision Engineering
  
  Volume: In press Pages: 253-261
- DOI
  10.1016/j.precisioneng.2017.02.014
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup2017
- Author(s)
  Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan-Liu Chen AND Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 25 Issue: 18 Pages: 21567-21582
- DOI
  10.1364/oe.25.021567
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing2017
- Author(s)
  Yuan-Liu Chen, Zengyuan Niu, Daiki Matsuura, Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeong Seok Oh and Chun Hong Park
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 28 Issue: 10 Pages: 105004-105004
- DOI
  10.1088/1361-6501/aa7d33
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Optical frequency domain angle measurement in a femtosecond laser autocollimator2017
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura and Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 25 Issue: 14 Pages: 16725-16738
- DOI
  10.1364/oe.25.016725
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Equivalent homogeneous model of D31-mode longitudinal piezoelectric transducers2017
- Author(s)
  Yangkun Zhang, Tien-Fu Lu, Wei Gao
- Journal Title
  
  Journal of Intelligent Material Systems and Structures
  
  Volume: - Issue: 19 Pages: 1-8
- DOI
  10.1177/1045389x17692054
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An optical lever by using a mode-locked laser for angle measurement2017
- Author(s)
  Yuki Shimizu, Yukitoshi Kudo, Yuan-Liu Chen, So Ito, Wei Gao
- Journal Title
  
  Precision Engieering
  
  Volume: 47 Pages: 72-80
- DOI
  10.1016/j.precisioneng.2016.07.006
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer2016
- Author(s)
  YUKI SHIMIZU, RYO AIHARA, ZONGWEI REN, YUAN-LIU CHEN, SO ITO, AND WEI GAO
- Journal Title
  
  Optics EXPRESS
  
  Volume: 24 Issue: 24 Pages: 27521-27535
- DOI
  10.1364/oe.24.027521
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact2016
- Author(s)
  Y. L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju
- Journal Title
  
  Precision Engineering
  
  Volume: 43 Pages: 462-467
- DOI
  10.1016/j.precisioneng.2015.09.011
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting2016
- Author(s)
  Y. Cai, Y. L. Chen, Y. Shimizu, S. Ito, W. Gao
- Journal Title
  
  Applied Surface Science
  
  Volume: 369 Pages: 354-365
- DOI
  10.1016/j.apsusc.2016.02.046
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] 超精密形状計測加工システム－ダイヤモンド切削工具の機上ナノ計測－2016
- Author(s)
  清水裕樹、陳遠流、張城豪、伊東聡、高偉
- Journal Title
  
  機械技術
  
  Volume: In Press
- Data Source
  KAKENHI-PROJECT-15K13839
[Journal Article] Determination of the zero-position for an optical angle sensor2016
- Author(s)
  Jun TAMADA, Yukitoshi KUDO, Yuan-Liu CHEN, Yuki SHIMIZU and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0072-JAMDSM0072
- DOI
  10.1299/jamdsm.2016jamdsm0072
- NAID
  130005266534
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-24226004
[Journal Article] A highly stable noncontact SPM for surface profile measurement and its application to insulating samples2016
- Author(s)
  Shigeaki GOTO, Minglei LI, So ITO, Yuki SHIMIZU and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0081-JAMDSM0081
- DOI
  10.1299/jamdsm.2016jamdsm0081
- NAID
  130005266667
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions2016
- Author(s)
  Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan-Liu Chen, Wei Gao
- Journal Title
  
  Optics Express
  
  Volume: 24 Issue: 3 Pages: 2788-2805
- DOI
  10.1364/oe.24.002788
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation2016
- Author(s)
  Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
- Journal Title
  
  Proceedings of the 16th International Conference on Precision Engineering (ICPE2016)
  
  Volume: -
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13839
[Journal Article] Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool2016
- Author(s)
  Yuki Shimizu, SungHo Jang, Wei Gao
- Journal Title
  
  Measurement
  
  Volume: In Press Pages: 934-941
- DOI
  10.1016/j.measurement.2015.11.040
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13839
[Journal Article] Ductile cutting of silicon microstructures with surface inclination measurement and　compensation by using a force sensor integrated single point diamond tool2016
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 26 Issue: 2 Pages: 025002-025002
- DOI
  10.1088/0960-1317/26/2/025002
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Mode-locked laser autocollimator with an expanded measurement range2016
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito and Wei Gao
- Journal Title
  
  Optics EXPRESS
  
  Volume: 24 Issue: 14 Pages: 15554-15569
- DOI
  10.1364/oe.24.015554
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Multi-dimensional measurement of tool edge geometry with an optical probe2016
- Author(s)
  Yuki Shimizu, Shota Nakagawa, SungHo Jang, Yuan-Liu Chen, So Ito, and Wei Gao
- Journal Title
  
  Proceedings of The 5th International Conference on Nanomanufacturing
  
  Volume: 1
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13839
[Journal Article] Molecular dynamics simulation of elastic?plastic deformation associated with tool?workpiece contact in force sensor?integrated fast tool servo2016
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito and Wei Gao
- Journal Title
  
  Journal of Engineering Manufacture, Proc IMechE Part B.
  
  Volume: - Issue: 11 Pages: 1-10
- DOI
  10.1177/0954405416673116
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
[Journal Article] Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer2016
- Author(s)
  Yindi CAI, Xinghui LI, Ryo AIHARA, Ren ZONGWEI, Yuki SHIMIZU, So ITO and Wei GAO
- Journal Title
  
  JAMDSM
  
  Volume: 10 Issue: 5 Pages: JAMDSM0080-JAMDSM0080
- DOI
  10.1299/jamdsm.2016jamdsm0080
- NAID
  130005266659
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor2015
- Author(s)
  Yuan-Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Jub
- Journal Title
  
  Precision Engineering
  
  Volume: 39 Pages: 134-142
- DOI
  10.1016/j.precisioneng.2014.08.001
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630015
[Journal Article] Measurement technologies for precision positioning2015
- Author(s)
  W. Gao, S.W. Kim, H. Bosse, H. Haitjema, Y.L. Chen, X.D. Lu, W. Knapp, A. Weckenmann, W.T. Estler, H. Kunzmann
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: 64 Issue: 2 Pages: 773-796
- DOI
  10.1016/j.cirp.2015.05.009
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Journal Article] Design of a Laser Autocollimator-based Optical Sensor with a Rangefinder for Error Correction of Precision Slide Guideways2015
- Author(s)
  Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, and Wei Gao
- Journal Title
  
  INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  
  Volume: 16-3 Issue: 3 Pages: 423-431
- DOI
  10.1007/s12541-015-0058-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Self-evaluation of the cutting edge contour of a micro diamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. International2015
- Author(s)
  Y.L. Chen, S. Wang, Y. Shimizu, S. Ito, W. Gao, B.F. Ju
- Journal Title
  
  Journal of Advanced Manufacturing Technology
  
  Volume: 77 Issue: 9-12 Pages: 2257-2267
- DOI
  10.1007/s00170-014-6580-2
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060, KAKENHI-PROJECT-26630015
[Journal Article] A two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional diffraction gratings2014
- Author(s)
  Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 63 Issue: 1 Pages: 461-464
- DOI
  10.1016/j.cirp.2014.02.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Drift reduction in a scanning electrostatic force microscope for surface profile measurement2014
- Author(s)
  Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: (In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder2014
- Author(s)
  Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, and Wei Gao
- Journal Title
  
  Optical Engineering, 53(12), 122405.
  
  Volume: 53
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating2014
- Author(s)
  Yuki Shimizu, Takeshi Ito, Xinghui Li, WooJae Kim and Wei Gao
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 25 Issue: 9 Pages: 094002-094002
- DOI
  10.1088/0957-0233/25/9/094002
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] A micro optical probe for edge contour evaluation of diamond cutting tools2014
- Author(s)
  S.H. Jang, Y. Shimizu, S. Ito and W. Gao
- Journal Title
  
  Journal of Sensors and Senosr Systems
  
  Volume: 3 Pages: 69-76
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] A measurement method of cutting tool position for relay fabrication of microstructured surface2014
- Author(s)
  Yuan-Liu Chen, Wei Gao, Bing-Feng Ju, Yuki Shimizu, So Ito
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 25 Issue: 6 Pages: 064018-064018
- DOI
  10.1088/0957-0233/25/6/064018
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630015
[Journal Article] Three-axis vibration measurement by using a grating-interferometric vibrometer2014
- Author(s)
  So Ito, Ryo Aihara, Woo Jae Kim, Yuki Shimizu and Wei Gao
- Journal Title
  
  Advanced Optical Technologies
  
  Volume: 3 Issue: 4 Pages: 435-440
- DOI
  10.1515/aot-2014-0028
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Drift reduction in a scanning electrostatic force microscope for surface profile measurement2014
- Author(s)
  Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizua, and Wei Gao
- Journal Title
  
  Ｍｅａｓｕｒｅｍｅｎｔ　Ｓｃｉｅｎｃｅ　ａｎｄ　Ｔｅｃｈｎｏｌｏｇｙ
  
  Volume: ２５
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface2013
- Author(s)
  Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: Vol. 14 Issue: 9 Pages: 1543-1549
- DOI
  10.1007/s12541-013-0208-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093, KAKENHI-PROJECT-24760097
[Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition2013
- Author(s)
  So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: Vol. 7 Pages: 714-719
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage2013
- Author(s)
  Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian
- Journal Title
  
  Precision Engineering,
  
  Volume: 37 Pages: 771-781
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface2013
- Author(s)
  Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
- Journal Title
  
  INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  
  Volume: 14 Pages: 1543-1549
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Fabrication of Scale Gratings for Surface Encoders by Using Laser Interference Lithography with 405 nm Laser Diodes2013
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
- Journal Title
  
  INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,
  
  Volume: 14 Pages: 1979-1988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition2013
- Author(s)
  So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao
- Journal Title
  
  Int. J. of Automation Technology
  
  Volume: ７ Pages: 714-719
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Precision tool setting for fabrication of a microstructure array2013
- Author(s)
  Wei Gao, Yuan-Liu Chen, Kang-Won Lee, Young-Jin-Noh, Yuki Shimizu, So Ito
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 62 Pages: 523-526
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2012
- Author(s)
  WooJae Kim, Yuki Shimizu, Akihide Kimura and Wei Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing
  
  Volume: (In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement2012
- Author(s)
  Akihide Kimura, Wei Gao, WooJae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
- Journal Title
  
  Precision Engineering
  
  Volume: 36 Pages: 576-589
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360050
[Journal Article] A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement2012
- Author(s)
  Akihide Kimura, Wei Gao, WooJae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
- Journal Title
  
  Precision Engineering
  
  Volume: (In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A noncontact scanning electrostatic force microscope for surface profile measurement2012
- Author(s)
  Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu
- Journal Title
  
  CIRP Annals–Manufacturing Technology
  
  Volume: Vol. 61 Pages: 471-474
- DOI
  10.1117/12.2014460
- URL
  http://dx.doi.org/10.1016/j.cirp.2012.03.097
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] A noncontact scanning electrostatic force microscope for surface profile2012
- Author(s)
  Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 61 Issue: 1 Pages: 471-474
- DOI
  10.1016/j.cirp.2012.03.097
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Modeling and Analysis of a Scanning Electrostatic Force Microscope for Surface Profile Measurement2012
- Author(s)
  Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 2012, Vol. 8759 Pages: 875914-875918
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656093
[Journal Article] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2012
- Author(s)
  WooJae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao
- Journal Title
  
  International Journal of precision Engineering and Manufacturing
  
  Volume: (未定)(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A two-degree-of-freedom linear encoder with a mosaic scale grating2011
- Author(s)
  Akihide Kimura, Koji Hosono, WooJae Kim, Yuki Shimizu and Wei Gao
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: Vol.7 Pages: 73-91
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A two-degree-of-freedom linear encoder with a mosaic scale grating2011
- Author(s)
  Akihide Kimura, Koji Hosono, WooJae Kim, Yuki Shimizu, Wei Gao
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: 7 Pages: 73-90
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Multi-axis grating encoders for stage motion measurement2011
- Author(s)
  WooJae KIM, Akihide Kimura, Koji Hosono, Yuki Shimizu and Wei Gao
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: Vol.7 Pages: 409-426
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Multi-axis grating encoders for stage motion measurement2011
- Author(s)
  WooJae KIM, Akihide Kimura, Koji Hosono, Yuki Shimizu, Wei Gao
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: 7 Pages: 409-426
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] 回折光干渉型多軸サーフェスエンコーダ2011
- Author(s)
  木村彰秀, 細野幸治, 金于載, 荒井義和, 高偉
- Journal Title
  
  光アライアンス
  
  Volume: 2011-3 Pages: 49-52
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Surface Encoders for a Mosaic Scale Grating2011
- Author(s)
  Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 5 Pages: 91-96
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Surface Encoders for a Mosaic Scale Grating2011
- Author(s)
  Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu and Wei Gao
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: Vol.5 Pages: 91-96
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating2010
- Author(s)
  Wei Gao, Akihide Kimura
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: Vol.59 Pages: 505-508
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder2010
- Author(s)
  Akihide Kimura, Wei Gao, Zeng Lijiang
- Journal Title
  
  Measurement Science and Technology
  
  Volume: Vol.21, No.5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness2010
- Author(s)
  Akihide Kimura, Wei Gao, Yoshikazu Arai, Zeng Lijiang
- Journal Title
  
  Precision Engineering 34-1
  
  Pages: 145-155
- NAID
  10029042455
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] 多軸サーフェスエンコーダの基礎2010
- Author(s)
  木村彰秀, 高偉
- Journal Title
  
  精密工学会誌
  
  Volume: 76-7 Pages: 759-762
- NAID
  130000421865
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating2010
- Author(s)
  W.Gao, A.Kimura
- Journal Title
  
  Annals of the CIRP
  
  Volume: 59-1 Pages: 505-508
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness2010
- Author(s)
  Akihide Kimura, Wei Gao, Yoshikazu Arai, Zeng Lijiang
- Journal Title
  
  Precision Engineering
  
  Volume: Vol.34 Pages: 145-155
- NAID
  10029042455
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micra-tools2009
- Author(s)
  W. Gao, T. Asai, Y. Arai
- Journal Title
  
  Annals of the CIRP 58(In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Maching2009
- Author(s)
  Y. Arai, T. Asai, S. Ferdous and W. Gao
- Journal Title
  
  Advanced Material Research 69-70(in press)
  
  Pages: 138-142
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] On-machine Measurement of Tool Cutting2009
- Author(s)
  Takemi Asai, Sayeda Ferdous, Yoshikazu Arai, Yi Yang and Wei Gao
- Journal Title
  
  Edge Profiles IJAT Vol.3 No.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験-2009
- Author(s)
  浅井岳見, 荒井義和, 高偉
- Journal Title
  
  精密工学会誌 75(7)(印刷中)
- NAID
  130000421706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools2009
- Author(s)
  W. Gao, T. Asai, Y. Arai
- Journal Title
  
  Annals of the CIRP 58(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験-2009
- Author(s)
  浅井岳見,荒井義和, 高偉
- Journal Title
  
  精密工学会誌 75(印刷中)
- NAID
  130000421706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article]2009
- Author(s)
  木村彰秀, 高偉
- Journal Title
  
  機械設計「超精密位置決めのための変位センサ」(日刊工業新聞社)
  
  Pages: 47-54
- Data Source
  KAKENHI-PROJECT-21360057
[Journal Article] AFM with the Slope Compensation Technique for High-speed Precision Measurement of Micro-structured Surfaces2008
- Author(s)
  Yuguo Cui, BinFeng Ju, Jun Aoki, Yoshikazu Arai, Wei Gao
- Journal Title
  
  Key Engineering Materials 381-382
  
  Pages: 35-38
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces2008
- Author(s)
  Y. G. Cui, Y. Arai, T. Asai, B. F. Ju and W. Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9
  
  Pages: 27-32
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces2008
- Author(s)
  Yuguo Cui, Yoshikazu Arai, Takemi Asai, BinFeng Ju and Wei Gao
- Journal Title
  
  International Journal of Precision Engineering and Manufacturing 9-3
  
  Pages: 27-32
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] 現場環境における三次元測定機の高度化に関する研究(第1報): 温度ドリフトの評価および補正2007
- Author(s)
  大西徹, 高瀬省徳, 高増潔
- Journal Title
  
  精密工学会誌 73・2
  
  Pages: 270-274
- NAID
  110006163414
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] Bing-Feng Ju and Satoshi Kiyono ; An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools2007
- Author(s)
  Takemi Asai, Takenori Motoki, Wei Gao
- Journal Title
  
  IJPEM 8-2
  
  Pages: 54-58
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] Improvement in a surface motor-driven planar motion stage2006
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Journal of Robotics and Mechatronics 18・6
  
  Pages: 808-815
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Improvement in a surface motor-driven planar motion stage2006
- Author(s)
  W.Gao
- Journal Title
  
  Journal of Robotics and Mechatronics 18・6
  
  Pages: 808-815
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor2006
- Author(s)
  W.Gao
- Journal Title
  
  Precision Engineering 30・4
  
  Pages: 396-405
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor2006
- Author(s)
  Wei Gao, Takenori Motoki and Satoshi Kiyono
- Journal Title
  
  Precision Engineering 30(4)
  
  Pages: 396-405
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18206016
[Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2006
- Author(s)
  高偉, 鶴見直也, 渡辺陽司, 木村彰秀, 清野慧
- Journal Title
  
  精密工学会誌 72・3
  
  Pages: 382-386
- NAID
  130004655856
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces2006
- Author(s)
  T.Motoki, W.Gao, S.Kiyono, T.Ono
- Journal Title
  
  Meas.Sci.Technol. 17
  
  Pages: 495-499
- Data Source
  KAKENHI-PROJECT-16656079
[Journal Article] 平面リニアモータの精度校正に関する研究(第1報)-反射ミラーの形状計測-2006
- Author(s)
  陳欣, 高増潔, 小谷潔, 石田敏博
- Journal Title
  
  精密工学会誌 72・12
  
  Pages: 1542-1546
- NAID
  110004863756
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] Improvement in a surface motor-driven planar motion stage2006
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Journal of Robotics and Mechatronics Vol.18, No.6
  
  Pages: 808-815
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor2006
- Author(s)
  W.Gao, M.Tano, S.Sato, S.Kiyono
- Journal Title
  
  Precision Engineering 30(印刷中)
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 輪帯エバネッセント照明による回路パターン付きSiウエハの表面異物欠陥検出法に関する研究(第1報): 欠陥検出原理とその検証実験2006
- Author(s)
  吉岡淑江, 三好隆志, 高谷裕浩, 高橋哲
- Journal Title
  
  精密工学会誌 72・7
  
  Pages: 878-883
- NAID
  110004744884
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] Precision measurement and decoupled control of a planar motion stage2006
- Author(s)
  Song Yi Dian, Wei Gao, Katsutoshi Horie, Satoshi Kiyono
- Journal Title
  
  Journal of CSME Vol.27, No.5
  
  Pages: 567-574
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] エバネッセント光を利用したナノ光造形法に関する研究(第1報)-造形基本特製の理論的・実験敵検討-2006
- Author(s)
  梶原優介, 稲月友一, 高橋哲, 高増潔
- Journal Title
  
  精密工学会誌 72・11
  
  Pages: 1391-1396
- Data Source
  KAKENHI-PROJECT-18636002
[Journal Article] 形状測定機能を持つナノ加工プローブに関する研究-機上形状計測加工実験-2005
- Author(s)
  工藤康人, 高偉, 清野慧
- Journal Title
  
  精密工学会春季大会講演論文集
  
  Pages: 1293-1294
- NAID
  130004657913
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005
- Author(s)
  Shuichi Dejima, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Mechatronics 15・8
  
  Pages: 969-987
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A Dual-Mode Surface Encoder for Position Measurement2005
- Author(s)
  W.Gao, et al.
- Journal Title
  
  Sensors and Actuators A 117・1
  
  Pages: 95-102
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 3次元ナノサーフェス物性評価のためのナノインデンテーション装置2005
- Author(s)
  元木健順, 高偉, 清野慧, 小野崇人
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 1053-1054
- NAID
  130004657779
- Data Source
  KAKENHI-PROJECT-16656079
[Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005
- Author(s)
  Shuichi DEJIMA, Wei GAO, Kei KATAKURA, Satoshi KIYONO
- Journal Title
  
  Precision Engineering (印刷中)
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005
- Author(s)
  田野誠, 高偉, 荒木武, 清野慧
- Journal Title
  
  日本機械学会論文集(C) Vol.71,No.712
  
  Pages: 3602-3607
- Data Source
  KAKENHI-PROJECT-16206013
[Journal Article] A Dual-Mode Surface Encoder for Position Measurement,2005
- Author(s)
  W.Gao, et al.
- Journal Title
  
  Sensors and Actuators A Vol.117, No.1
  
  Pages: 95-102
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 光干渉型サーフェスエンコーダに関する研究2005
- Author(s)
  渡辺陽司, 高偉, 清水浩貴, 清野慧
- Journal Title
  
  精密工学会誌 71・8
  
  Pages: 1051-1055
- NAID
  10016679183
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005
- Author(s)
  田野誠, 高偉, 荒木武, 清野慧
- Journal Title
  
  日本機械学会論文集(C) 71・712
  
  Pages: 3602-3607
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2005
- Author(s)
  高偉, 他.
- Journal Title
  
  精密工学会誌 72・3
  
  Pages: 382-386
- NAID
  130004655856
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Ductile Regime Nano-Machining of Single Crystal Silicon Carbide2005
- Author(s)
  John Patten, Wei Gao, Kudo Yasuto
- Journal Title
  
  ASME Journal of Manufacturing Science and Engineering (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Development of a nanomachining probe with nanometrology function -On-machine nanometrology experiment by the probe -2005
- Author(s)
  Wei Gao, Yasuto Kud, Satoshi Kiyono
- Journal Title
  
  Proceedings of the JSPE Spring Meeting(in Japanese)
  
  Pages: 1293-1294
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Ductile Regime Nano-Machining of Single Crystal Silicon Carbide2005
- Author(s)
  John Patten, Wei Gao, Kudo Yasuto
- Journal Title
  
  ASME Journal of Manufacturing Science and Engineering (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Precision Positioning of a Sawyer motor-driven stage2005
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Journal of JSPE Vol.74, No.1
  
  Pages: 523-527
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決めシステムの提案と微小位置決め実験-2005
- Author(s)
  高偉, 田野誠, 清野慧, 冨田良幸, 佐々木卓也
- Journal Title
  
  精密工学会誌 (印刷中)
- NAID
  110001824158
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A surface encoder with dual sine-grids2005
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Journal of JSPE Vol.72, No.3
  
  Pages: 382-386
- NAID
  130004657418
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決やシステムの提案と微小位置決め実験-2005
- Author(s)
  高偉, 他.
- Journal Title
  
  精密工学会誌 74・1
  
  Pages: 523-527
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYθ Surface Encoder for Precision Positioning2004
- Author(s)
  W.Gao
- Journal Title
  
  Precision Engineering 28-3
  
  Pages: 329-337
- Data Source
  KAKENHI-PROJECT-16206013
[Journal Article] Controller Design and Adjustment for a Three DOF Planar Motion2004
- Author(s)
  Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Proc.of the 1st Int.Conf.on Positioning Technology
  
  Pages: 343-344
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Evaluation of an Instrument for Nanomachining and Nanometrology2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John Patten
- Journal Title
  
  The 2nd International Symposium on Precision Mechanical Measurements (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] 形状測定機能を持つナノ加工プローブの研究-加工プローブにおける加工評価実験-2004
- Author(s)
  高偉, 工藤康人, 清野慧
- Journal Title
  
  日本機械学会年次大会講演論文集
  
  Pages: 317-318
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Design of a nanomachining probe with nanometrology function2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John A Patten
- Journal Title
  
  Proceedings First International Symposium on Standard Materials And Metrology for Nanotechnology
  
  Pages: 110-113
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XY□ Surface Encoder for Precision Positioning2004
- Author(s)
  W.Gao
- Journal Title
  
  Precision Engineering 28・3
  
  Pages: 329-337
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16206013
[Journal Article] Design of a nanomachining probe with nanometrology function2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John A Patten
- Journal Title
  
  Proceedings of First International Symposium on Standard Materials And Metrology for Nanotechnology
  
  Pages: 110-113
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] A Hybrid Nano-Probe for Precision Nanofabrication of Complex Surfaces2004
- Author(s)
  W.Gao, S.Genda, Y.Kudo, S.Kiyono, J.Patten
- Journal Title
  
  Proceedings of 8th International Conference on Control, Automation, Robotics and Vision
  
  Pages: 173-177
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] 3次元ナノ構造体物性評価のためのナノインデンテーションに関する研究2004
- Author(s)
  元木健順, 高偉, 稲川雅樹, 清野慧, 小野崇人
- Journal Title
  
  第48回日本学術会議材料研究連合講演会講演論文集
  
  Pages: 354-355
- Data Source
  KAKENHI-PROJECT-16656079
[Journal Article] A Hybrid Nano-Probe for Precision Nanofabrication of Complex Surfaces2004
- Author(s)
  W.Gao, S.Genda, Y.Kudo, S.Kiyono, J.Patten
- Journal Title
  
  8th International Conference on Control, Automation, Robotics and Vision
  
  Pages: 173-177
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Fabrication of a Multi-cell Photodiode for a MDOF Surface Encoder2004
- Author(s)
  Y.Watanabe, W.Gao, H.Shimizu, S.Kiyono
- Journal Title
  
  Proceedings of the 2nd International Symposium on Nanomanufacturing
  
  Pages: 591-595
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XY□ Surface Encoder for Precision Positioning2004
- Author(s)
  W.Gao
- Journal Title
  
  Precision Engineering Vol.28, No.3
  
  Pages: 329-337
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16206013
[Journal Article] Evaluation of an Instrument for Nanomachining and Nanometrology2004
- Author(s)
  Wei Gao, Yasuto Kudo, Satoshi Kiyono, John Patten
- Journal Title
  
  Proceedings of The 2nd International Symposium on Precision Mechanical Measurements (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYθz Surface Encoder for Precision Positioning,2004
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Precision Engineering Vol.28, No.3
  
  Pages: 329-337
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Development of a nanomachining probe with nanometrology function -Nanomachining experiment by the probe -2004
- Author(s)
  Wei Gao, Yasuto Kud, Satoshi Kiyono
- Journal Title
  
  Proceedings of the JSME Annual Meeting(in Japanese)
  
  Pages: 317-318
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Journal Article] Fabrication and Measurement of a cylinder surface with sinusoidal micro-structures2004
- Author(s)
  Makoto TANO, Shinji SATO, Wei GAO, Satoshi KIYONO
- Journal Title
  
  Proc.of the 1st Int.Conf.on Positioning Technology
  
  Pages: 327-328
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYO_z Surface Encoder for Precision Positioning2004
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Precision Engineering 28・3
  
  Pages: 329-337
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Surface Motor-Driven Planar Motion Stage Integrated with an XYθ_Z A Surface Encoder for Precision Positioning2004
- Author(s)
  Wei Gao, Shuichi Dejima, Hiroaki Yanai, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Precision Engineering 28・3
  
  Pages: 329-337
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision nanometrology of a large area microstructured metrology surface2003
- Author(s)
  W.Gao, et al.
- Journal Title
  
  Optics and Precision Engineering 11・3
  
  Pages: 223-226
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encoder2003
- Author(s)
  W.Gao, et al.
- Journal Title
  
  Annals of CIRP Vol.52, No.2
  
  Pages: 435-438
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision nanometrology of a large area microstructured metrology surface2003
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Optics and Precision Engineering Vol.11, No.3
  
  Pages: 223-226
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Precision Engineering 27・3
  
  Pages: 289-298
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Precision Engineering Vol.27, No.3
  
  Pages: 289-298
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Precision Measurement of Two-Axis Positions and Tilt Moticns Using a Surface Encoder2003
- Author(s)
  Wei Gao, et al.
- Journal Title
  
  Annals of CIRP 52・2
  
  Pages: 435-438
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Ductile Regime Nano-Machining of Single Crystal Silicon Carbide
- Author(s)
  John Patten, Wei Gao, Kudo Yasuto
- Journal Title
  
  ASME Journal of Manufacturing Science and Engineering (印刷中)
- Data Source
  KAKENHI-PROJECT-15360063
[Patent] 特許出願2021
- Inventor(s)
  清水裕樹，高偉，松隈啓，洪一帆
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，洪一帆
- Industrial Property Rights Type
  特許
- Filing Date
  2021
- Data Source
  KAKENHI-PROJECT-20H00211
[Patent] 回折格子ピッチ偏差測定装置2020
- Inventor(s)
  清水裕樹，高偉，松隈啓，権略，木村彰秀，青木敏彦
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，権略，木村彰秀，青木敏彦
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2020-036006
- Filing Date
  2020
- Data Source
  KAKENHI-PROJECT-15H05759
[Patent] 絶対位置測定装置および絶対位置測定方法2019
- Inventor(s)
  清水裕樹，高偉，松隈啓，石塚稜
- Industrial Property Rights Holder
  清水裕樹，高偉，松隈啓，石塚稜
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2019-057305
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-15H05759
[Patent] 回転角度検出装置および回転角度検出方法2016
- Inventor(s)
  清水裕樹，高偉，伊東聡，陳遠流，丸山泰司
- Industrial Property Rights Holder
  清水裕樹，高偉，伊東聡，陳遠流，丸山泰司
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2016-012697
- Filing Date
  2016-01-26
- Data Source
  KAKENHI-PROJECT-15K13839
[Patent] 変位測定装置および変位測定方法2016
- Inventor(s)
  清水裕樹，高偉，仲村拓
- Industrial Property Rights Holder
  清水裕樹，高偉，仲村拓
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2016-067247
- Filing Date
  2016-03-30
- Data Source
  KAKENHI-PROJECT-15H05759
[Patent] ワーク円筒部の形状測定方法および形状測定装置2015
- Inventor(s)
  横沢志郎, 花岡浩毅, 山崎宏, 柴本裕輔, 高偉, 他3名
- Industrial Property Rights Holder
  横沢志郎, 花岡浩毅, 山崎宏, 柴本裕輔, 高偉, 他3名
- Industrial Property Rights Type
  特許
- Filing Date
  2015
- Acquisition Date
  2019
- Data Source
  KAKENHI-PROJECT-15H05759
[Patent] 絶対角測定装置及び絶対角測定方法2014
- Inventor(s)
  清水裕樹，高偉，伊東聡，工藤幸利
- Industrial Property Rights Holder
  清水裕樹，高偉，伊東聡，工藤幸利
- Industrial Property Rights Type
  特許
- Filing Date
  2014-09-22
- Data Source
  KAKENHI-PROJECT-24360050
[Patent] 回折格子の形状誤差評価方法2010
- Inventor(s)
  木村彰秀, 高偉
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2010-005817
- Filing Date
  2010-01-14
- Data Source
  KAKENHI-PROJECT-21360057
[Patent] 検出装置2004
- Inventor(s)
  清野慧, 渡辺陽司, 高偉, 清水浩貴
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置及びステージ装置2004
- Inventor(s)
  高偉, 清野慧, 富田良幸, 渡辺陽司
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-04-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] ステージ装置2004
- Inventor(s)
  高偉, 清野慧, 富田良幸, 田野誠
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-03-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置及びステージ装置2004
- Inventor(s)
  高偉, 清野慧, 渡辺陽司, 富田良幸, 牧野健一, 平田徹
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-06-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 計測加工一体型装置2004
- Inventor(s)
  高偉, 清野慧
- Industrial Property Rights Holder
  株式会社東北テクノアーチ
- Industrial Property Number
  2004-349434
- Filing Date
  2004-12-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360063
[Presentation] 空間位相変調器を導入した光干渉リソグラフィによる 2次元自由パターン創成に関する研究2024
- Author(s)
  高廣望，清水裕樹
- Organizer
  IIP2024 情報・知能・精密機器部門（IIP 部門）講演会
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] Holographic lithography of scale gratings for ultra-precision positioning2023
- Author(s)
  Wei Gao
- Organizer
  The Third International Conference on Free-form Optics and Application technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Multi-axis measurement by using diffraction gratings2023
- Author(s)
  Wei Gao
- Organizer
  The 2nd International Conference on Optical Imaging and Measurement (ICOIM 2023)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Investigation of the influence of the optical frequency fluctuation on the pitch deviation evaluation of a diffraction grating based on optical angle sensors2023
- Author(s)
  Yuki Shimizu, Tomoki Kitazume, Lue Quan, Wei Gao
- Organizer
  2023 NAMRC-MSEC-LEM&P Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] A Surface Encoder with an Improved Z-range and Reduced Crosstalk Errors2023
- Author(s)
  Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  15th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Investigation of angle measurement based on confocal probe employing second harmonic generation2023
- Author(s)
  Ryo Sato, Yuki Shimiz, Hiraku Matsukuma, Wei Gao
- Organizer
  The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Measurement Technologies for ACSM2023
- Author(s)
  Wei Gao
- Organizer
  The 20th International Manufacturing Conference in China (IMCC 2023 )
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] High-precision optical angle sensor and its applications to dimensional metrology2023
- Author(s)
  Yuki Shimizu, Wei Gao
- Organizer
  Optica Design and Fabrication Congress
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] On-machine measurement technologies for ultraprecision machining2023
- Author(s)
  Wei Gao
- Organizer
  The CHINA-JAPAN International Conference on Ultra-Precision Machining Process (CJUMP2023)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Absolute distance measurement based on Radio-frequency Interferometer using the method of Excess Fraction2023
- Author(s)
  Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Theoretical analysis on gauge block length measurement by a modulated synthetic wavelength method2023
- Author(s)
  Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  15th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2023)
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] The application of neural network for angle measurement based on second harmonic generation2023
- Author(s)
  Zhiyang Zhang, Kuangyi Li, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] アクティブ波面制御を導入した光干渉リソグラフィに関する研究 -空間位相変調器を導入した光学系プロトタイプの構築-2023
- Author(s)
  高廣望，清水裕樹
- Organizer
  精密工学会2023年度秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] Simulation analysis on gauge block length calibration by the method of Excess Fraction2022
- Author(s)
  LiuTao，Jiucheng Wu，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 光干渉リソグラフィにおける干渉定在波の「その場」観察に関する研究2022
- Author(s)
  高廣望，清水裕樹
- Organizer
  日本機械学会IIP2023 情報・知能・精密機器部門（IIP部門）講演会
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] Design and testing of a Fizeau-type two-axis surface encoder2022
- Author(s)
  Yifan Hong, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Eberhard Manske, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Theoretical investigation of angle measurement based on third-harmonic generation (THG) with a femtosecond laser2022
- Author(s)
  Kuangyi Li, Jiahui Lin, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フェムト秒レーザを用いたキャビティ間隔の検出方法2022
- Author(s)
  辛東昱，松隈啓，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of a wide-range differential angle sensor for calibration of image-scanning linear scale2022
- Author(s)
  Jiucheng Wu, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Micro/nano-metrology for nanomanufacturing2022
- Author(s)
  Wei Gao
- Organizer
  The International Conference IEEE 3M-NANO 2022
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Uncertainty analysis of ultra-precision grating pitch calibration by using optical frequency comb2022
- Author(s)
  Dong Wook Shin, Ryo Sato, Hiraku Matsukuma, Yuki shimizu, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Theoretical analysis on gauge block length measurement by a modulated synthetic wavelength method2022
- Author(s)
  Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究 -測定対象物チルト角が極小点追跡法へ与える影響の調査-2022
- Author(s)
  佐藤遼，松隈啓，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Laser interference lithography for nanomanufacturing of scale gratings2022
- Author(s)
  Wei gao
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] The theoretical investigation of angle measurement based on the third harmonic generation（THG） using focused beam2022
- Author(s)
  Li Kuangyi，Lin Jiahui，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] An angle sensor based on second harmonic generation with a collimated femtosecond laser beam2022
- Author(s)
  Jiahui Lin，Kuangyi Li，Ryo Sato，Hiraku Matsukuma，Wei Gao
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of a multi-beam femtosecond laser autocollimator for surface profile measurement2022
- Author(s)
  Yuki Shimizu, Takashi Nomura, Shota Takazono, Wei Gao
- Organizer
  Proceedings of the 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (nanoMan2022)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] Fast self-calibration of diffraction gratings2022
- Author(s)
  Wei Gao
- Organizer
  International Scientific Symposium on the occasion of World Interferometry Day 2022
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 高感度光学式角度センサの限界測定分解能に関する理論的検討2022
- Author(s)
  清水裕樹，林弦成, 北爪智希, 高廣望
- Organizer
  2022年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K22641
[Presentation] Self-calibration for variable line spacing gratings by a lateral distance with Fizeau interferometer2022
- Author(s)
  Chenguang Yin, Wei Gao, Xin Xiong, Ryo Sato, Hiraku Matsukuma
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 第二次高調波共焦点プローブに関する研究　ー角度計測に関する検討ー2022
- Author(s)
  佐藤　遼，清水　裕樹，清水　浩貴，松隈　啓，高　偉
- Organizer
  2023年度精密工学会春季大会学術講演会論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フィゾー型2軸サーフェスエンコーダに関する研究2022
- Author(s)
  洪一帆，清水裕樹，松隈啓，松岡良太，高偉
- Organizer
  2022年度精密工学会東北支部学術講演会講演論文集
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Feasibility study of precise angle measurements with a dual-differentical confocal probe2022
- Author(s)
  Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao, Andreas Fischer
- Organizer
  The 8th International Conference on Nanomanufacturing (nanoMan2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Calibration of grating periods based on laser diffraction method using optical frequency comb2021
- Author(s)
  Dong Wook Shin, Lue Quan, Hiraku Matsukuma, Yuki Shimizu, Wei Gao and Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Fabrication of a variable-line-spacing grating based on the non-othogonal Lloyd's interferometer2021
- Author(s)
  Shusaku Endo, Kai Zhang, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Angular Measurement Method Utilizing Second Harmonic Generation2021
- Author(s)
  Wijayanti Dwi Astuti, Hiraku Matsukuma, Li Kuangyi, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2021
- Author(s)
  Qiaolin Li, Hiraku Matukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Fabrication of a two-dimensional diffraction grating with reduction of the effect of thermal expansion2021
- Author(s)
  Hiraku Matsukuma, Masanori Matsunaga, Yuki Shimizu, Wei Gao
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Scalability of precision design principles for machines and instruments2021
- Author(s)
  Yague-Fabra Jose A.、Gao Wei、Archenti Andreas、Morse Edward、Donmez Alkan
- Organizer
  2021 CIRP General Assembly
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] An absolute surface encoder with a femtosecond laser and a planar scale grating of variable periods2021
- Author(s)
  Satoru Maehara, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 短ピッチ格子を用いた平面ステージ計測用小型サーフェスエンコーダの設計2021
- Author(s)
  洪一帆，清水裕樹，松隈啓，松岡良太，高偉
- Organizer
  2021年度砥粒加工学会学術講演会論文集(C14) 2021/9/1
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Measurement of the angle of a small prism by a mode-locked femtosecond laser autocollimator2021
- Author(s)
  Kakeru Ikeda, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of a small-sized surface encoder with short-period planar gratings for stage motion measurement2021
- Author(s)
  Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Ryota Matsuoka, Wei Gao, Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 3D profile measurement of a diamond tool without the effect of AFM probe tip radius2021
- Author(s)
  Kai ZHANG, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Measurement technologies for future smart manufacturing2021
- Author(s)
  Wei Gao
- Organizer
  International Conference on Future Technologies
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザを利用した回折格子の校正方法2021
- Author(s)
  Shin Dong Wook，Quan Lue，松隈啓，清水裕樹，高偉，Manske Eberhard
- Organizer
  2021年度砥粒加工学会学術講演会論文集 2021/9/1
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究-極小点追跡法を用いた合焦波長検出に関する検討-2021
- Author(s)
  佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会秋季大会学術講演会講演論文集(講演番号 H31) 2021/9/21-23
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] マイクロ光学素子の角度計測に関する研究2021
- Author(s)
  池田翔，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A05) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Evaluation of pitch deviation of a scale linear grating based on the laser autocollimation2021
- Author(s)
  Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao, Eberhard Manske
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of a probe type profiler for measurement of a micro cutting edge2021
- Author(s)
  Wen Bo, Hiraku Matsukuma, Yuki Shimizu, Andreas Archenti, Wei Gao
- Organizer
  The 7th International Conference on Nanomanufacturing (nanoMan2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Investigation of Measurement Range of a Differential Chromatic Confocal Probe employing a Mode-Locked Femtosecond Laser2021
- Author(s)
  Ryo SATO, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO, Andreas FISCHER
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] 非直交型ロイドミラー干渉計によるVLS格子の製作に関する研究2021
- Author(s)
  遠藤秀作，村上裕記，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A06) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] フェムト秒レーザを用いた絶対位置計測に関する研究2021
- Author(s)
  前原智，佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2021年度精密工学会東北支部学術講演会講演論文集(A03) 2021/11/6
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021
- Author(s)
  Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
- Organizer
  XXIII IMEKO World Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020
- Author(s)
  Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Karoly Szipka, Andreas Archenti
- Organizer
  CIRP Video paper sessions 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Three-dimensional profile measurement of a single point diamond tool without the influence of the tip radius of an AFM probe2020
- Author(s)
  Kai Zhang, Yindi Cai, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Design of a small-sized surface encoder for stage motion measurement2020
- Author(s)
  洪一帆, 清水裕樹, 松隈啓, 松岡良太, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2020
- Author(s)
  李橋林, 齋藤俊樹, 町田裕貴, 松隈啓, 清水裕樹, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] ロイドミラー干渉計による微細格子製作に関する研究2020
- Author(s)
  村上裕記, 張凱, 松隈啓, 清水裕樹, 高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The International Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Development of an optical angle sensor unit for the evaluation of pitch deviations2020
- Author(s)
  権略，松隈啓，清水裕樹，高偉
- Organizer
  2020年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00211
[Presentation] Study on the stitching techinque for fast evaluation of the linear scale using a Fizeau interferometer2019
- Author(s)
  熊昕, 松隈啓, 清水裕樹, 高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine and in-process surface metrology for precision manufacturing2019
- Author(s)
  W. Gao
- Organizer
  The 69th General Assembly of CIRP, the International Academy for Production Engineering
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 切削力制御加工のための高安定な切削力検出に関する研究2019
- Author(s)
  栗田悠生，文博，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Design and verification of a measurement system for a micro tool cutting edge with a low measuring force2019
- Author(s)
  Bo WEN，Yu WATANABE，Hiraku MATSUKUMA，Yuki SHIMIZU，Wei GAO
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019
- Author(s)
  Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Organizer
  The 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] In-process metrology for smart manufacturing2019
- Author(s)
  Wei Gao
- Organizer
  The 18th International Manufacturing Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2019
- Author(s)
  李橋林，齋藤俊樹，町田裕貴，松隈啓，清水裕樹，高偉
- Organizer
  2019年度砥粒加工学会学術講演会（ABTEC2019）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] フェムト秒レーザを用いた共焦点顕微鏡における光軸変位計測高安定化に関する研究2019
- Author(s)
  佐藤遼，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Experimental research on measurement range of a chromatic pinhole illumination confocal probe by utilizing side-lobes of axial response2019
- Author(s)
  陳衝，松隈啓，佐藤遼，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation of the lateral resolution of a chromatic confocal microscopy with a mode-locked femtosecond laser source2019
- Author(s)
  Chong CHEN，Ryo SATO，Hiraku MATSUKUMA，Yuki SHIMIZU，Wei GAO
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A nano-indentation system for precision measurement of a single point diamond tool2019
- Author(s)
  張凱，XuMalu，CaiYindi，松隈啓，清水裕樹，高偉
- Organizer
  2019年度砥粒加工学会学術講演会（ABTEC2019）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 非直交型2 軸ロイドミラー干渉計の高精度化に関する研究 -ビームシェイパによるコリメート光強度分布の平坦化-2019
- Author(s)
  村上裕記，石塚稜，松永雅教，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine Surface Metrology by a Force-Sensor Integrated Fast Tool Servo2019
- Author(s)
  文博，余建平，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2軸微細格子製作のための小型露光装置の開発2019
- Author(s)
  松永雅教，真野和樹，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 精密測定のためのファイバ型光周波数コムの開発2019
- Author(s)
  神田悠利，松隈啓，清水裕樹，稲場肇，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 光周波数コムを用いた角度センサの研究2019
- Author(s)
  中村一貴，松隈啓，清水裕樹，高偉
- Organizer
  日本機械学会東北支部　第54期総会・講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 光周波数コムを用いた絶対変位測定に関する研究2019
- Author(s)
  廣田駿介，安達圭祐，石塚稜，松隈啓，清水裕樹，高偉
- Organizer
  2019年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] In-situ dimensional metrology of precision parts for smart manufacturing2018
- Author(s)
  Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage2018
- Author(s)
  Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor2018
- Author(s)
  Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] FS-FTS: an innovation of fast tool servo for nano-fabrication and in-process measurement of large-area micro optics2018
- Author(s)
  Wei Gao
- Organizer
  The 14th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2018) 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] フェムト秒レーザを用いた共焦点顕微鏡の温度安定性に関する研究2018
- Author(s)
  佐藤　遼，松隈　啓，陳　衝，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation of a femtosecond laser chromatic confocal probe with fiber illumination and pinhole illumination2018
- Author(s)
  CHONG CHEN, Xiuguo CHEN, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 17th International Conference on Precision Engineering, ICPE2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response2018
- Author(s)
  Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 微細光学素子形状測定のための走査型プローブ顕微鏡に関する研究2018
- Author(s)
  長岡　将史，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 広帯域光周波数コムのための中赤外超短パルスレーザの開発2018
- Author(s)
  阿隅　結夢，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A new method to evaluate pitch deviations of diffraction gratings by using optical angle sensor2018
- Author(s)
  権　略，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 平面ステージ精密制御用多軸サーフェスエンコーダの高精度化に関する研究2018
- Author(s)
  石塚　稜，松隈　啓，清水裕樹，高　偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine and in-process metrology for large-area microptics by using FS-FTS2018
- Author(s)
  Wei Gao
- Organizer
  4th CIRP Conference on Surface Integrity (CIRP CSI 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Fast evaluation of variable line spacing gratings by using a Fizeau Interferometer2018
- Author(s)
  Xin XIONG, Xiuguo CHEN, Yuki SHIMIZU, Hiraku MATSUKUMA, and Wei GAO
- Organizer
  The 17th International Conference on Precision Engineering, ICPE2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An Ultra-Sensitive Optical Angle Sensor for Pitch Deviations Measurement of Diffraction Gratings2018
- Author(s)
  Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Development of a fiber-laser-based frequency comb for precision dimensional metrology2018
- Author(s)
  Yuri KANDA, Hiraku MATSUKUMA, Shaoqing YANG, Yuki SHIMIZU, Hajime INABA, and Wei GAO
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Fast evaluation of a linear scale by using a Fizeau interferometer and stitching technique2018
- Author(s)
  Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
- Organizer
  IEEE International conference on advanced manufacturing, ICAM 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A differential compensation strategy based piezoelectric force sensor system for force controlled ultra-precision diamond cutting2018
- Author(s)
  Yuan-Liu Chen, Keisuke Tohyama, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
- Organizer
  The 6th International Conference on Nanomanufacturing, nanoMan20188
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 力センサを組み込んだ高速工具サーボによる切削力制御加工2018
- Author(s)
  栗田　悠生，松隈啓，遠山佳祐，清水裕樹，高偉
- Organizer
  2018年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine Measurement of Workpiece Inclination for Double-face Turning2017
- Author(s)
  Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  The 7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 回折格子の校正に関する研究2017
- Author(s)
  上原　健太郎，陳　遠流，清水　裕樹，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Evaluation of grating periods by using pulsed laser source2017
- Author(s)
  Kentaro Uehara, Yuki Shimizu, Yuan-Liu Chen, Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 平面ステージ精密制御用多自由度光センサのクロストーク誤差低減に関する研究2017
- Author(s)
  石塚　稜，古田　雅也，清水　裕樹，陳　遠流，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 超精密角度センサに関する研究2017
- Author(s)
  間所　周平，陳　遠流，清水　裕樹，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Uncertainty analysis in the evaluation of pitch deviation and out-of-flatness of planar scale gratings by Fizeau interferometry2017
- Author(s)
  Xiuguo Chen, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
- Organizer
  The 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Design and Verification of an XYZ Three-axis Micro Stage2017
- Author(s)
  Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan-Liu Chen, Wei Gao, Eiji Niwa and Yoshihiro Sasaki
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Polarization ray-tracing model for orthogonal two-axis Lloyd’s mirror interference lithography2017
- Author(s)
  Xiuguo Chen, Zongwei Ren, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究―コリメート光強度分布の評価―2017
- Author(s)
  真野　和樹，相原　涼，李　星輝，清水　裕樹，陳　遠流，陳　修国，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Force-controlled Diamond Cutting on Brittle Materials by Utilizing a Force Sensor Integrated Fast Tool Servo2017
- Author(s)
  Bo Wen, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
- Organizer
  The 13th China-Japan International Conference on Ultra-Precision Machining Process(CJUMP2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Precision Manufacturing Metrology Based on Scanning Probe Systems2017
- Author(s)
  Wei Gao
- Organizer
  The 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Optical Instruments for Measurement of the next-generation Stage Systems for Dimensional Metrology2017
- Author(s)
  Yuki Shimizu, Yuan-Liu Chen, Wei Gao
- Organizer
  Optical Society of Korea Summer Meeting 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of Workpiece Inclination by Using FS-FTS on a Diamond Turning Machine2017
- Author(s)
  Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Precision measurement of microoptics with double steep sidewalls by an atomic force microscopy with a linear-rotary scanning strategy2017
- Author(s)
  Yuan-Liu Chen, Bo Wen, Minglei Li, Yuki Shimizu and Wei Gao
- Organizer
  The 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement Technologies for Precision Manufacturing of Large-area Microoptics2017
- Author(s)
  Wei Gao
- Organizer
  International Symposium on Green Manufacturing and Applications (ISGMA2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Surface form measurement of a small roll workpiece2017
- Author(s)
  Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] エッジ反転法によるダイヤモンド工具刃先丸み半径の精密測定に関する研究2017
- Author(s)
  徐　馬禄，陳遠流，蔡　引※（※は女偏に弟），清水　裕樹，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Evaluation of relative vertical error motions of a bench center by using an optical micrometer2017
- Author(s)
  Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer2017
- Author(s)
  Kazuki Mano, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] In situ, in-line, on-machine and in-process surface metrology of precision parts2017
- Author(s)
  Wei Gao
- Organizer
  39th International MATADOR Conference on Advanced Manufacturing
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A confocal microscope with a mode-locked laser source2017
- Author(s)
  Yuki Shimizu, Taku Nakamura, Yuan-Liu Chen and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 小型円筒ワークの精密表面形状測定に関する研究2017
- Author(s)
  齋藤　俊樹，町田　祐貴，清水　裕樹，陳　遠流，松隈　啓，高　偉
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] XYZ3軸マイクロステージに関する研究2017
- Author(s)
  安達　圭祐，菅原　拓馬，清水　裕樹，陳　遠流，高　偉，丹羽　英二，佐々木　祥弘
- Organizer
  2017年度精密工学会東北支部学術講演会
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Ultra-precision Angle Sensor with a Mode-locked Laser Source2017
- Author(s)
  Shuhei Madokoro, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Diamond cutting of brittle materials on inclined surfaces based on a thrust force controlled cutting strategy2016
- Author(s)
  Yuan-Liu Chen, K. Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau, Macau, China
- Year and Date
  2016-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of the Optical Frequency Stability of a Mode-Locked Laser2016
- Author(s)
  Shaoqing YANG, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究2016
- Author(s)
  真野和樹，相原涼，李星輝，伊東聡，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Nano-manufacturing and metrology of scale gratings for ultra-precision positioning2016
- Author(s)
  Wei Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau, Macau, China
- Year and Date
  2016-08-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] An optical configuration for the Lloyd’s mirror interferometer for fabrication of gratings having symmetrical profiles2016
- Author(s)
  任宗偉，相原涼，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Precision On-machine Measurement of Error Motion of Carriage Slide on a Drum Roll Lathe2016
- Author(s)
  Zengyuan NIU, Yuan-LIU CHEN, Daiki MATSUURA, Yuki SHIMIZU, So ITO, Wei GAO, Jeongseok OH, Chunhong Park
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A Design Study of an XYZ Micro-stage2016
- Author(s)
  Yuki SHIMIZU, Takuma SUGAWARA, Keisuke ADACHI, So ITO, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 低測定力測定機を用いた工具刃先の形状測定に関する研究2016
- Author(s)
  渡邉佑，高偉，清水裕樹，伊東聡，山本泰河，金山利彦
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Molecular dynamics characterization of diamond tool probe and workpiece contact for FS-FTS based on-machine surface form measurement2016
- Author(s)
  陳遠流，サイインテイ，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城県水戸市　茨城大学
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope2016
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
- Place of Presentation
  宮城県松島町　ホテル松島大観荘
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Molecular dynamics simulation of scanning process in Atomic Force Microscope form measurement2016
- Author(s)
  Y.D. Cai, Y.L. Chen, Yuki Shimizu, So Ito and W. Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau, Macau, China
- Year and Date
  2016-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Performance Investigation of Ductile-Regime Single Point Diamond Microcutting of Optical Glass2016
- Author(s)
  Yuan-Liu Chen, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
- Place of Presentation
  宮城県松島町　ホテル松島大観荘
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Optical Analysis of a Confocal Microscope2016
- Author(s)
  Taku NAKAMURA, Yuki SHIMIZU, So ITO, Yuan-liu CHEN, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Development of an orthogonal two-axis Lloyd’s mirror interferometer for fabrication of two-axis scale grating2016
- Author(s)
  Zongwei Ren, Yuki Shimizu, Ryo Aihara, Yuan-Liu Chen, So Ito, Wei Gao
- Organizer
  The 12th China-Japan International Conferences on Ultra-Precision Machining Processes (CJUMP2016)
- Place of Presentation
  Hunan Fenglin Hotel, Hunan, China
- Year and Date
  2016-11-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Profile Measurement of a Micro Cutting Edge by using a Contact-type Stylus Probe with Low Measuring Force2016
- Author(s)
  Yu WATANABE, Sho SEKINE, So ITO, Yuki SHIMIZU, Wei GAO, Taiga YAMAMOTO, Toshihiko KANAYAMA
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Profile measurement of a steep slope surface by using a long　stroke scanning probe microscope2016
- Author(s)
  徐延昊，陳遠流，伊東総，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] In-process Tilt Measurement of a Brittle Material Workpiece by using a Force-sensor Integrated Diamond Cutting Tool2016
- Author(s)
  Keisuke TOHYAMA, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 水平走査型測定法による小型円筒試料の精密形状測定2016
- Author(s)
  齋藤俊樹，町田裕貴，清水裕樹，伊東聡，高偉，山崎宏，柴本裕輔，花岡浩毅
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope2016
- Author(s)
  Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito, and Wei Gao
- Organizer
  IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2016)
- Place of Presentation
  ホテル松島大観荘（宮城県宮城郡松島町）
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 力センサ搭載型ダイヤモンド切削工具を用いた脆性材料ワークのインプロセスチルト測定2016
- Author(s)
  遠山佳祐，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement of the Repetition Rate　Stability of a Mode-Locked Laser2016
- Author(s)
  楊紹青，陳遠流，伊東総，清水裕樹，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A Long Stroke Atomic Force Microscope for Surface Profile Measurement of Micro-optics2016
- Author(s)
  So ITO, Minglei LI, Yuanliu CHEN, Yanhao XU, Zengyuan NIU, Masaya FURUTA, Yuki SHIMIZU, Wei GAO
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hotel, Seoul, Korea
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] シングルセル受光素子を用いた光学式角度センサの高感度化に関する研究2016
- Author(s)
  間所周平，丸山泰司，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Multi-dimensional measurement of tool edge geometry with an optical probe2016
- Author(s)
  Yuki Shimizu, Shota Nakagawa, SungHo Jang, Yuan-Liu Chen, So Ito, and Wei Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  University of Macau (マカオ, 中国)
- Year and Date
  2016-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13839
[Presentation] Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation2016
- Author(s)
  Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
- Organizer
  The 16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  アクトシティ浜松 (静岡県浜松市)
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13839
[Presentation] 光周波数コム光源を用いた光学式センサに関する研究2016
- Author(s)
  上原健太郎，工藤幸利，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings2016
- Author(s)
  Zongwei REN, Ryo AIHARA, Yuki SHIMIZU, So ITO, Yuan-Liu Chen, Wei GAO
- Organizer
  IEEE 16th International Conference on Nanotechnology (IEEE NANO 2016)
- Place of Presentation
  仙台国際センター (宮城県仙台市)
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 白色共焦点顕微鏡の光学系設計に関する研究2016
- Author(s)
  仲村拓，清水裕樹，伊東聡，陳遠流，高偉
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] XYZマイクロステージに関する研究2016
- Author(s)
  安達圭祐，清水裕樹，伊東聡，高偉，丹羽英二，佐々木祥弘
- Organizer
  2016年度精密工学会東北支部学術講演会
- Place of Presentation
  一関高専（岩手県一関市）
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Investigation on the sensitivity of an optical angle sensor based on laser autocollimation2016
- Author(s)
  Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
- Organizer
  Optical Measurement Technology and Instrument (OTA2016)
- Place of Presentation
  China National Convention Center, Beijing China
- Year and Date
  2016-05-09
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Diamond cutting of brittle materials on inclined surfaces based a thrust force controlled cutting strategy2016
- Author(s)
  Y.L. Chen, K. Tohyama, , Y. Shimizu, S. Ito, W. Gao
- Organizer
  The 5th International Conference on Nanomanufacturing (nanoMan2016)
- Place of Presentation
  中国　マカオ
- Year and Date
  2016-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Recent Advances in Sensor Technologies for Precision Positioning2016
- Author(s)
  Wei Gao
- Organizer
  The 7th International Conference on Positioning Technology (ICPT2016)
- Place of Presentation
  Seoul Garden Hoteh, Seoul, Korea
- Year and Date
  2016-11-08
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Determination of the origin position for an angle sensor with a femtosecond laser2015
- Author(s)
  Jun Tamada,Yukitoshi Kudo,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
- Place of Presentation
  京都リサーチパーク（京都府京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle2015
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク，京都府京都市
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Detection and repair of micro defects in the process of diamond cutting of a microstructure array2015
- Author(s)
  陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学，宮城県仙台市
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] 光周波数コムを用いた角度スケールコムに関する研究2015
- Author(s)
  清水裕樹，玉田純，工藤幸利，陳遠流，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Detection and repair of micro defects in the process of diamond cutting of a microstructure array2015
- Author(s)
  陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学，宮城県仙台市
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Molecular dynamics simulation on nanoindentation response of a copper workpiece2015
- Author(s)
  蔡引テイ，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学，宮城県仙台市
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] 3ビームロイドミラー干渉計による2軸回折格子加工に関する研究2015
- Author(s)
  相原涼，李星輝，Yindi Cai，伊東聡，清水裕樹，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A New Fast Tool Servo with Integrated Functions for In-process Measurement and Fabrication of Microstructured Surfaces2015
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 11th China-Japan International Conference on Ultra-Precision Machining Process
- Place of Presentation
  板橋区立グリーンホール，東京都板橋区
- Year and Date
  2015-11-25
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle2015
- Author(s)
  Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク，京都府京都市
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] Laser interference lithography with a modified two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional micro patterns2015
- Author(s)
  Yindi Cai, Xinghui Li,Ryo Aihara,Yuki Shimizu,So Ito,Wei Gao
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
- Place of Presentation
  京都リサーチパーク（京都府京都市）
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact2015
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 12th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15F15060
[Presentation] 2次元格子とフィゾー干渉計の一括自律校正に関する研究-自律校正法の提案-2015
- Author(s)
  大野敦子，金于載，Yindi Cai，陳遠流，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 超高感度角度センサに関する研究2015
- Author(s)
  丸山泰司，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Measurement technologies for precision positioning2015
- Author(s)
  W. Gao, S.W. Kim, H. Bosse, H. Haitjema, Y.L. Chen, X.D. Lu, W. Knapp, A. Weckenmann, W.T. Estler, H. Kunzmann
- Organizer
  The 65th General Assembly of CIRP, the International Academy for Production Engineering (CIRP 2015)
- Place of Presentation
  Capetown, South Africa
- Year and Date
  2015-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] 平面ステージ精密制御用多自由度光センサに関する研究2015
- Author(s)
  古田雅也，李星輝，Yindi Cai，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A three-axis angle sensor with a linear encoder scale reflector2015
- Author(s)
  Yuki Shimizu, Taiji Maruyama, So Ito, Wei Gao
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2015-09-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] A New Fast Tool Servo with Integrated Functions for In-process Measurement and Fabrication of Microstructured Surfaces2015
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 11th China-Japan International Conference on Ultra-Precision Machining Process
- Place of Presentation
  板橋区立グリーンホール，東京都板橋区
- Year and Date
  2015-11-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Surface Profile Measurement of Micro-optics by Using a Long Stroke AFM2015
- Author(s)
  Minglei Li, So Ito, Zhigang Jia, Yuki Shimizu, Wei Gao
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05759
[Presentation] Investigation of the deformation mechanism of a copper workpiece during nanoindentation by using molecular dynamics2015
- Author(s)
  Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 11st Chain-Japan International Conference on Ultra-Precision machining process
- Place of Presentation
  板橋区立グリーンホール，東京都板橋区
- Year and Date
  2015-11-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Molecular dynamics simulation on nano-contact between a diamond cutting tool and a copper surface2015
- Author(s)
  Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク，京都府京都市
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] A two-axis Lloyd's mirror interferometer for fabrication of two dimensional diffraction gratings2015
- Author(s)
  Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
- Organizer
  2014 CIRP Winter meetings
- Place of Presentation
  Nantes, France
- Year and Date
  2015-01-23
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究 -切削工具切れ刃輪郭形状の測定-2015
- Author(s)
  中川翔太，張城豪，清水裕樹，伊東聡，高偉
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（宮城県仙台市）
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15K13839
[Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact2015
- Author(s)
  Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  The 12th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] 光学式3軸角度センサの小型化に関する研究2014
- Author(s)
  丸山泰司，清水裕樹，Siew-Leng TAN，村田大，伊東聡，高偉
- Organizer
  2014年度精密工学会東北支部学術講演会
- Place of Presentation
  青森県弘前市弘前大学
- Year and Date
  2014-11-29
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 微細形状測定のための非接触静電気力顕微鏡に関する研究―形状測定の拘束・高精度化のための走査方式の検討―2014
- Author(s)
  細渕啓一郎,賈志剛,伊東聡,清水裕樹,高偉
- Organizer
  精密工学会2014年度春季大会学術講演会
- Place of Presentation
  東京大学(東京)
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 超高感度角度センサに関する研究2014
- Author(s)
  村田大，清水裕樹，伊東聡，高偉
- Organizer
  精密工学会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 微細形状測定のための非接触静電気力顕微鏡に関する研究－形状測定の高速・高精度化のための走査方式の検討－2014
- Author(s)
  細渕啓一郎，賈志剛，伊東聡，清水裕樹，高偉
- Organizer
  精密工学会２０１４年度春季大会学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] XYZ三軸振動センサに関する研究-第二報信号処理系の最適化と微小振動計測について-2014
- Author(s)
  相原涼，伊藤武志，伊東聡，清水裕樹，高偉
- Organizer
  2014年度精密工学会東北支部学術講演会
- Place of Presentation
  青森県弘前市弘前大学
- Year and Date
  2014-11-29
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] 形状測定用静電気力顕微鏡の周波数ドリフトの補正に関する研究2014
- Author(s)
  賈志剛, 細渕啓一郎, 伊東聡, 清水裕樹, 高偉
- Organizer
  日本機械学会東北支部第49期総会・講演会
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 形状測定用静電気力顕微鏡の周波数ドリフトの補正に関する研究2014
- Author(s)
  賈志剛,細渕啓一郎,伊東聡,清水裕樹,高偉
- Organizer
  日本機械学会東北支部第49期総会・講演会
- Place of Presentation
  東北大学(仙台)
- Year and Date
  2014-03-14
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric2013
- Author(s)
  Gaofa HE, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  LEM21
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 三次元微細形状測定のための静電気力顕微鏡に関する研究2013
- Author(s)
  細渕啓一郎,賈志剛,伊東聡,清水裕樹,何高法,高偉
- Organizer
  日本機械学会東北支部第48期総会・講演会
- Place of Presentation
  東北大学(仙台)
- Year and Date
  2013-03-15
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric2013
- Author(s)
  Gaofa HE, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  ISPMM 2014
- Place of Presentation
  Guizhou, China
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Measurement of contact potential difference and material distribution by using an SEFM2013
- Author(s)
  Keiichiro HOSOBUCHI, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
- Organizer
  LEM21
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Surface Profile Measurement of Micro-optics by using a Scanning Electrostatic Force Microscope2013
- Author(s)
  So Ito, Zhigang Jia, Shigeaki Goto, Gaofa He, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Precision Positioning of a Longstroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface2013
- Author(s)
  Zhigang JIA, Gaofa HE, Shigeaki GOTO, Keiichiro HOSOBUCHI, So ITO, Yuki SHIMIZU and Wei GAO
- Organizer
  LEM21
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric2013
- Author(s)
  Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  6th International Symposium of Precision Mechanical Measurement (ISPMM2013)
- Place of Presentation
  Guizhou, China
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Surface form measurement of micro-optics2013
- Author(s)
  Wei Gao
- Organizer
  International Conference on Optics in Precision Engineering and Nanotechnology
- Place of Presentation
  Singapore EXPO, Singapore
- Year and Date
  2013-04-09
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric2013
- Author(s)
  Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Matsushima, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Investigation of a femtosecond laser for measurement of angular displacement2013
- Author(s)
  Yukitoshi KUDO, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
- Organizer
  LEM21
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Precision Positioning of a Long-stroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface2013
- Author(s)
  Zhigang Jia, Gaofa He, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Matsushima, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 超高感度角度センサに関する研究2013
- Author(s)
  村田大,清水裕樹,伊東聡,高偉
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学(東京都)
- Year and Date
  2013-03-14
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Measurement of contact potential difference and material distribution by using an SEFM2013
- Author(s)
  Keiichiro Hosobuchi, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Matsushima, Japan
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Surface profile measurement of large amplitude micro-optics by using a scanning electrostatic force microscope2013
- Author(s)
  Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  精密工学会東北支部講演会
- Place of Presentation
  たざわこ芸術村(秋田)
- Year and Date
  2013-12-07
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Surface profile measurement of large amplitude micro-optics by using a　scanning electrostatic force microscope2013
- Author(s)
  Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  精密工学会東北支部学術講演会
- Place of Presentation
  秋田
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement2013
- Author(s)
  Dai MURATA, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
- Organizer
  LEM21
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Low-cost and compact interference lithography of grating fabrication for surface encoder2012
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学工学部(米沢市)
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode2012
- Author(s)
  Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
- Organizer
  8th International Symposium on Precision Engineering Measurements and Instrumentation
- Place of Presentation
  Chengdu, China
- Year and Date
  2012-08-10
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A scanning electrostatic force microscope for surface profile measurement2012
- Author(s)
  Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学(山形)
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 光学式3軸角度センサの高精度化に関する研究2012
- Author(s)
  村田大,清水裕樹,伊東聡,高偉
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形大学工学部(米沢市)
- Year and Date
  2012-12-01
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Measurement of micro-structures2012
- Author(s)
  Wei Gao
- Organizer
  2012 Taiwan AOI Forum
- Place of Presentation
  Hsinchu, Taiwan
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Fast calibration of XY gratings2012
- Author(s)
  WooJae Kim, Yuki Shimizu, So Ito, Wei Gao
- Organizer
  第47回日本機械学会東北支部講演会
- Place of Presentation
  東北大学(仙台)
- Year and Date
  2012-03-13
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] モザイク格子サーフェスエンコーダに関する研究-マルチプローブセンサヘッドの開発2012
- Author(s)
  細野幸治, 金于載, 清水裕樹, 伊東聡, 高偉
- Organizer
  精密工学会2012春季大会
- Place of Presentation
  首都大学東京(東京)
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] モザイク格子サーフェスエンコーダに関する研究マルチプローブセンサヘッドの開発2012
- Author(s)
  細野幸治, 金于載, 清水裕樹, 伊東聡, 高偉
- Organizer
  精密工学会2012春季大会
- Place of Presentation
  首都大学東京南大沢キャンパス(東京)
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Sensors and Measuring Instruments for Precision Positioning2011
- Author(s)
  Wei Gao Seung-Woo Kim, Albert Weckenmann, Robert J.Hocken
- Organizer
  the 10th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII-2011)
- Place of Presentation
  KATST(韓国テジョン市)(招待講演)
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Industry-Oriented Precision Nanometrology2011
- Author(s)
  Wei Gao, Kang-Won Lee, Yuki Shimizu, So Ito
- Organizer
  APMP.TCL Workshop-Collaboration and Support for Industry in Dimensional Metrology
- Place of Presentation
  大阪国際交流センター(大阪市)(招待講演)
- Year and Date
  2011-12-03
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Evaluation of the linear scale for a linear encoder2011
- Author(s)
  WooJae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
- Organizer
  2011年度精密工学会東北支部学術講演会
- Place of Presentation
  ウェスティンホテル仙台(仙台)
- Year and Date
  2011-10-21
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Industry Oriented Precision Nanometrology, APMP. TCL Workshop2011
- Author(s)
  Kang-Won Lee, Wei Gao, Yuki Shimizu, So Ito
- Organizer
  Collaboration and Support for Industry in Dimensional Metrology
- Place of Presentation
  Osaka
- Year and Date
  2011-12-03
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Surface Encoders for Precision Measurement of Multi-axis Motions2011
- Author(s)
  Yuki Shimizu, Wei Gao, So Ito, Woojae Kim, Akihide Kimura, Kouji Hosono
- Organizer
  the 4th International Conference of Asia Society for Precision Engineering and Nanotechnology (ASPEN2011)
- Place of Presentation
  Hong Kong
- Year and Date
  2011-11-11
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Surface Encoders for Precision Measurement of Multi-axis Motions2011
- Author(s)
  Wei Gao, Yuki Shimizu, So Ito, Woojae Kim, Akihide Kimura, Kouji Hosono
- Organizer
  the 4th International Conference of Asia Society for Precision Engineering and Nanotechnology (ASPEN-2011)
- Place of Presentation
  Langham Place Hong Kong Hotel (Hong Kong, China)(招待講演)
- Year and Date
  2011-11-16
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2011
- Author(s)
  Wooujae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
- Organizer
  the 10th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII-2011)
- Place of Presentation
  KATST(韓国テジョン市)
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Sensors and Measuring Instruments for Precision Positioning2011
- Author(s)
  Wei Gao, Seung-Woo Kim, Albert Weckenmann, Robert J. Hocken
- Organizer
  The 10th International Symposium on Measurement Technology and Intelligent Instruments(ISMTII2011)
- Place of Presentation
  KAIST (Korae)
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2011
- Author(s)
  Woojae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
- Organizer
  The 10th International Symposium on Measurement Technology and Intelligent Instruments(ISMTII2011)
- Place of Presentation
  KAIST (Korae)
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] A MULTI-PROBE SURFACE ENCODER FOR MOSAIC XY GRATING2010
- Author(s)
  Koji Hosono, Akihide Kimura, Woojae Kim, Wei Gao, Lijiang Zeng
- Organizer
  The 10th International Symposium on Measurement and Quality Control (ISMQC)
- Place of Presentation
  Osaka Japan
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Micro and Nano Measurement Instruments2010
- Author(s)
  Wei Gao
- Organizer
  10th International Conference of the European Society for Precision Engineering & Nanotechnology (Euspen2010)
- Place of Presentation
  Delft,(Netherlands)
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] A Surface Encoder for Mosaic XY Grating2010
- Author(s)
  Koji Hosono, Akihide Kimura, Wei Gao, Lijiang Zeng
- Organizer
  International Symposium on Measurement and Quality Control 2010
- Place of Presentation
  日本・大阪市
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] 回折光干渉型3軸サーフェスエンコーダに関する研究-XYZ格子形状誤差マップによる計測誤差非線形成分の補正-2010
- Author(s)
  木村彰秀, 高偉, 曽理江
- Organizer
  2010年度精密工学会春季大会学術講演会
- Place of Presentation
  埼玉大学(さいたま市)
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] モザイクXY格子用光干渉型サーフェスエンコーダに関する研究-マルチプローブ型光学系の提案と原理確認実験-2010
- Author(s)
  細野幸治, 木村彰秀, 高偉
- Organizer
  日本機械学会東北支部第45期総会・講演会
- Place of Presentation
  東北大学(仙台)
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] 回折光干渉型3軸サーフェスエンコーダに関する研究-XYZ格子形状誤差マップによる計測誤差非線形分の補正-2010
- Author(s)
  木村彰秀, 高偉, 曽理江
- Organizer
  2010年度精密工学会春季大会学術講演会
- Place of Presentation
  さいたま
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Micro and Nano Measurement Instruments2010
- Author(s)
  Wei Gao
- Organizer
  欧州精密工学会euspen 2010
- Place of Presentation
  オランダ・デルフト市(招待講演)
- Year and Date
  2010-06-03
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Sensors and Measuring Systems for Ultra-Precision Manufacturing2010
- Author(s)
  Wei Gao
- Organizer
  The Sixth International Symposium on Precision Engineering Measurements and Instrumentation
- Place of Presentation
  中国・杭州市(招待講演)
- Year and Date
  2010-08-09
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Fast measuring technologies for ultra-precision manufacturing(招待講演)2009
- Author(s)
  Wei Gao, Yoshikazu Arai, Yusuke Saito, Akihide Kimura, Takemi Asai
- Organizer
  The 9th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Saint-Petersburg, Russia
- Year and Date
  2009-07-01
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Evaluation of multi degree of freedom displacement sensors2009
- Author(s)
  Akihide Kimura, Yoshikazu Arai, Wei Gao
- Organizer
  The 9th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2009)
- Place of Presentation
  Saint Petersburg (Russia)
- Year and Date
  2009-01-07
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] 超精密切削工具切れ刃の三次元形状測定に関する研究-加工機上測定実験-2009
- Author(s)
  浅井岳見, 荒井義和, 高偉
- Organizer
  2009年度精密工学会春季大会
- Place of Presentation
  中央大学
- Year and Date
  2009-03-11
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] Fast Measuring Technologies for Ultra-Precision Manufacturing2009
- Author(s)
  Wei Gao, Yoshikazu Arai, Yusuke Saito, Akihide Kimura and Takemi Asai
- Organizer
  The 9th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2009)
- Place of Presentation
  Saint Petersburg (Russia)
- Year and Date
  2009-01-07
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] 回折光干渉型3軸サーフェスエンコーダに関する研究2009
- Author(s)
  木村彰秀, 荒井義和, 高偉, 曽理江
- Organizer
  精密工学会2009年度秋季大会学術講演会
- Place of Presentation
  神戸大学(神戸)
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] Evaluation of multi-degree-of-freedom displacement sensors2009
- Author(s)
  Akihide Kimura, Yoshikazu Arai, Wei Gao
- Organizer
  The 9th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Saint-Petersburg, Russia
- Year and Date
  2009-07-01
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] 回折光干渉型3軸サーフェスエンコーダに関する研究-短ピッチXY格子に対応したセンサヘッドの開発-2009
- Author(s)
  木村彰秀, 荒井義和, 高偉, 曽理江
- Organizer
  2009年度精密工学会秋季大会学術講演会
- Place of Presentation
  神戸
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-21360057
[Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定に関する研究2008
- Author(s)
  浅井岳見, 荒井義和, 高偉
- Organizer
  2008年度砥粒加工学会学術講演会
- Place of Presentation
  滋賀県立大学
- Year and Date
  2008-09-05
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] Compensation of motion error in a high accuracy AFM2008
- Author(s)
  Cui, Y., Arai, Y., He, G., Asai, T. and Gao, W.
- Organizer
  ISIST2008
- Place of Presentation
  Shenyang, China
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] Precision Measurement of Edge Profiles of Cutting Micro-tools2008
- Author(s)
  Takemi ASAI, Yoshikazu ARAI and Wei GAO
- Organizer
  3rd International Conference on Positioning Technology
- Place of Presentation
  Hamamatsu, Japan
- Year and Date
  2008-12-26
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] Nanometric Edge Profile Measurement of CuttingTools on a Diamond Turning Machine2008
- Author(s)
  Asai, T., Arai, Y., Cui, Y. and Gao, W.
- Organizer
  ISIST2008
- Place of Presentation
  Shenyang, China
- Year and Date
  2008-12-17
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] An Instrument for Three-Dimensional Edge Profile Measurement of Micro-Cutting Tools2008
- Author(s)
  T. Asai, Y. Arai, Y. Cui, W. Gao
- Organizer
  euspen 2008
- Place of Presentation
  Zurich, Switzerland
- Year and Date
  2008-05-20
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining2008
- Author(s)
  Yoshikazu ARAI, Takemi ASAI and Wei GAO
- Organizer
  The 6th CHINA-JAPAN International Conference on Ultra-Precision Machining (6th CJICUPM, 2008)
- Place of Presentation
  Hunan University, Changsha, China
- Year and Date
  2008-12-24
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] 高速高精度原子間力顕微鏡に関する研究2008
- Author(s)
  崔玉国, 荒井義和, 高偉
- Organizer
  2008年度砥粒加工学会学術講演会
- Place of Presentation
  滋賀県立大学
- Year and Date
  2008-09-05
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] A spiral scanning-type AFM for high-speed and largearea measurement euspen 20082008
- Author(s)
  Y. Cui, G. He, Y. Arai, T. Asai, W. Gao
- Organizer
  Zurich, Switzerland
- Year and Date
  2008-05-21
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] 高速高精度微細形状計測用AFMに関する研究-傾斜補正による測定の高速化-2007
- Author(s)
  崔玉国, 荒井義和, 浅井岳見, 高偉
- Organizer
  007年度精密工学会東北支部学術講演会
- Place of Presentation
  八戸工業大学
- Year and Date
  2007-12-01
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] イヤモンド切削工具切れ刃形状測定装置の開発2007
- Author(s)
  浅井岳見, 荒井義和, 高偉
- Organizer
  2007年度精密工学会東北支部学術講演会
- Place of Presentation
  八戸工業大学
- Year and Date
  2007-12-01
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] ダイヤモンド切削工具3Dエッジ形状の高精度自動測定装置の開発2007
- Author(s)
  浅井岳見, 元木健順, 高偉, 清野慧
- Organizer
  2007年度精密工学会春季大会
- Place of Presentation
  芝浦工業大学
- Year and Date
  2007-03-21
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] AFM with Slope Compensation Teqnique for High-speed Precision Measurement of Micro-structured Surfaces2007
- Author(s)
  Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai and W. Gao
- Organizer
  ISMTII 2007
- Place of Presentation
  Poster session
- Year and Date
  2007-09-20
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] An AFM-based measuring instrument for edge profile measurement of diamond cutting tool2006
- Author(s)
  Takemi Asai, Takenori Motoki, Wei Gao Bing-Feng Ju and Satoshi Kiyono
- Organizer
  2nd International Conference on Positioning Technology(Jeju-do, Korea)
- Place of Presentation
  Poster session
- Year and Date
  2006-10-26
- Data Source
  KAKENHI-PROJECT-18206016
[Presentation] A six degree-of-freedom surface motor-driven stage with aerostatic bearings
- Author(s)
  Masaya Furuta, Yuki Shimizu, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Surface form measurement of micro-optics
- Author(s)
  高　偉
- Organizer
  International Conference on Optics in Precision Engineering and Nanotechnology
- Place of Presentation
  シンガポール，シンガポール
- Invited
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 三次元微細形状測定のための静電気力顕微鏡に関する研究
- Author(s)
  細渕啓一郎, 賈志剛, 伊東聡, 清水裕樹, 何高法, 高偉
- Organizer
  日本機械学会東北支部第48期総会・講演会
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] 光学式3軸角度センサの小型化に関する研究
- Author(s)
  丸山泰司，清水裕樹, 伊東聡, 高偉
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京都文京区東洋大学白山キャンパス
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact
- Author(s)
  YuanLiu Chen, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22 – 2015-09-25
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] A miniaturized three-axis angle sensor
- Author(s)
  Taiji Maruyama, Siew-Leng Tan, Yuki Shimizu, Dai Murata, So Ito, and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A multi-probe surface encoder for multi-degree-of-freedom position measurement
- Author(s)
  Yuki Shimizu, Ryo Aihara, Yingdi Cai, Xinghui Li, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Cutting tool positioning by utilizing a force sensor-integrated fast tool servo
- Author(s)
  Shu Wang, Yuan-Liu Chen, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  International Conference on Positioning Technology
- Place of Presentation
  北九州国際会議場，福岡県
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Investigation of surface damages in contact and form measurement with a force sensor-integrated fast tool servo
- Author(s)
  Y.D Cai, Y.L. Chen, S. Ito, Y. Shimizu, W. Gao
- Organizer
  38th International MATADOR Conference
- Place of Presentation
  Huwei, Taiwan
- Year and Date
  2015-03-28 – 2015-03-30
- Data Source
  KAKENHI-PROJECT-26630015
[Presentation] Nano-fabrication and metrology of large-area micro-optics
- Author(s)
  Wei Gao
- Organizer
  The 38th International MATADOR Conference on Advanced Manufacturing
- Place of Presentation
  Yunlin, Taiwan
- Year and Date
  2015-03-28 – 2015-03-31
- Invited
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] A scanning electrostatic force microscope for surface profile measurement
- Author(s)
  Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
- Organizer
  2012年度精密工学会東北支部学術講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Development of a six-degree-of-freedom surface encoder
- Author(s)
  Yindi Cai, Yuki Shimizu, Xinghui Li, So Ito and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
- Author(s)
  Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito and Wei Gao
- Organizer
  3rd International Conference on Optical and Photonic ENgineering (icOPEN2015)
- Place of Presentation
  Singapore, Singapore
- Year and Date
  2015-04-14 – 2015-04-16
- Invited
- Data Source
  KAKENHI-PROJECT-24360050
[Presentation] Measurement of micro-structures
- Author(s)
  高　偉
- Organizer
  2012 Taiwan AOI Forum
- Place of Presentation
  新竹，台湾
- Invited
- Data Source
  KAKENHI-PROJECT-24656093
[Presentation] Measurement of three-axis vibration of an air-bearing stage
- Author(s)
  Ryo Aihara, Takeshi Ito, So Ito, Yuki Shimizu and Wei Gao
- Organizer
  The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
- Place of Presentation
  福岡県北九州市北九州国際会議場
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24360050

1. SHIMIZU Yuki (70606384)

# of Collaborated Projects: 9 results

# of Collaborated Products: 295 results
2. SHIMIZU Hiroki (50323043)

# of Collaborated Projects: 7 results

# of Collaborated Products: 3 results
3. KIYONO Satoshi (40005468)

# of Collaborated Projects: 7 results

# of Collaborated Products: 22 results
4. ZHANG Shizhou (30282099)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
5. KURIYAGAWA Tsunemoto (90170092)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. ITO So (00624818)

# of Collaborated Projects: 3 results

# of Collaborated Products: 80 results
7. ONO Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 5 results
8. JU Bingfeng (10431529)

# of Collaborated Projects: 2 results

# of Collaborated Products: 5 results
9. YAMANAKA Masashi (20292229)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. 荒井義和 (20455801)

# of Collaborated Projects: 2 results

# of Collaborated Products: 30 results
11. 松隈啓 (90728370)

# of Collaborated Projects: 2 results

# of Collaborated Products: 140 results
12. ISAWA Yoshiaki (00143016)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. HITOMI Nobuteru (30300669)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. HIGASHI Yashuo (70208742)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. MIURA Hideo (90361112)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. OGAWA Kazuhiro (50312616)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. SASAGAWA Kazuhiko (50250676)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 林玉池 (90270818)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 松本健郎 (30209639)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 高増潔 (70154896)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
21. 高谷裕浩 (70243178)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
22. 高辻利之 (20357362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 笹島和幸 (80170702)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. 古谷涼秋 (50219119)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. 青木純 (40374954)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 陳遠流 (90794058)

# of Collaborated Projects: 1 results

# of Collaborated Products: 19 results
27. 佐藤遼 (20993421)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. UDA Yutaka

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. OKAZAKI Yuichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. OHISHI Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. 岩崎富生

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. CHEN YUANLIU

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results

Gao Wei 高 偉

GAO Wei 高 偉

Research Projects

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Co-Researchers

光周波数コムを用いたピコラジアン級次世代ファブリペロー絶対角度計測法の創出Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Subatomic 3D Ultra-Precision Measurement by Creation of Optical Comb Dimensional Conversion Optics and In-Situ Autonomous Calibration MethodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

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Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale combPrincipal Investigator

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２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出Principal Investigator

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ダイヤモンドマイクロ切削工具エッジ形状のサブナノメートル超高精度計測法の研究Principal Investigator

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A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond toolPrincipal Investigator

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Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stagePrincipal Investigator

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A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-opticsPrincipal Investigator

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XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beamsPrincipal Investigator

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High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-ToolsPrincipal Investigator

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Gao Wei 高偉

GAO Wei 高偉