Takenaka Kosuke 竹中弘祐

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TAKENAKA Kosuke 竹中弘祐

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Researcher Number	60432423
Other IDs
Affiliation (Current)	2025: 大阪大学, 接合科学研究所, 准教授
Affiliation (based on the past Project Information) *help	2021 – 2023: 大阪大学, 接合科学研究所, 准教授 2019: 大阪大学, 接合科学研究所, 准教授 2012 – 2018: 大阪大学, 接合科学研究所, 助教 2008 – 2010: 大阪大学, 接合科学研究所, 助教 2007: 大阪大学, 接合科学研究所, 特任研究員
Review Section/Research Field	Principal Investigator Material processing/Microstructural control engineering / Material processing/treatments / Basic Section 26050:Material processing and microstructure control-related Except Principal Investigator Material processing/treatments / Science and Engineering / Composite materials/Surface and interface engineering / Plasma science
Keywords	Principal Investigator 酸化亜鉛 / ミストCVD / 大気圧非平衡プラズマ / 機能性表面 / ガスセンサー / プラズマ支援プロセス / ガスセンサ / 微粒子 / 有機材料 / PEEK … More / 構造部材 / 表面改質 / マルチマテリアル / 透明導電膜 / プラズマ反応機構 / 有機 / 表面処理 / 機能性材料 / 有機/プラズマ反応機構 / 超低電位プラズマ / 有機系材料 / 表面改質・加工 / プラズマ処理・レーザー加工 … More Except Principal Investigator プラズマ加工 / 低侵襲治療 / 生体分子 / 医療・福祉 / プラズマ生成・制御 / プラズマ医療 / 高速製膜 / 反応性制御 / 反応性プラズマＰＶＤ製膜プロセス / 無機／有機積層 / 無機／有機界面 / 無機/有機積層 / 無機/有機界面 / 酸化物半導体 / 低温形成 / 半導体薄膜 / 反応性製膜 / 低損傷プロセス / 高周波プラズマ / 粒子改質 / 液中プラズマ Less

Development of 3D nanostructured zinc oxide thin film formation technology with plasma assisted process using microdropletsPrincipal Investigator
- Principal Investigator
  
  Takenaka Kosuke
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 26050:Material processing and microstructure control-related
- Research Institution
  Osaka University
Development of formation technology of high-performance organic material surface by addition of physical and chemical functionalityPrincipal Investigator
- Principal Investigator
  
  Takenaka Kosuke
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Osaka University
Development of deposition technology of surface nano-structure-controlled ZnO thin films using atmospheric pressure non-equilibrium plasmaPrincipal Investigator
- Principal Investigator
  
  Takenaka Kosuke
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Osaka University
Development of novel atomic-layer-deposition plasma PVD processes for efficient and high-rate reactive film-formation processes
- Principal Investigator
  
  Setsuhara Yuichi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Composite materials/Surface and interface engineering
- Research Institution
  Osaka University
Development of low-temperature high-speed deposition method for forming a high-quality zinc oxide thin films using atmospheric pressure non-equilibrium plasmaPrincipal Investigator
- Principal Investigator
  
  TAKENAKA Kosuke
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Development of novel plasma sources for plasma medicine through advanced spatio-temporal control of atmospheric-pressure discharge
- Principal Investigator
  
  Setsuhara Yuichi
- Project Period (FY)
  2012 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
Development of novel plasma-enhanced processes for low-temperature formation of high quality oxide semiconductor films
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Development of novel function-controlled inorganic/organic layer-formationtechnology through integrated reaction studies on plasma interactions withnanolayers at surface and interface
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
Fabrication of highly-functional polymer surface using very-low-potential plasma and its evaluationPrincipal Investigator
- Principal Investigator
  
  TAKENAKA Kosuke
- Project Period (FY)
  2009 – 2010
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Osaka University
高周波誘導結合による新しい液中プラズマ生成法の開発と粒子処理プロセスの開拓
- Principal Investigator
  
  SETSUHARA Yuichi
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Osaka University

[Journal Article] Control of reactive oxygen and nitrogen species production in liquid by nonthermal plasma jet with controlled surrounding gas2016
- Author(s)
  T. Ito, G. Uchida, A. Nakajima, K. Takenaka, Y. Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 1S Pages: 01AC06-01AC06
- DOI
  10.7567/jjap.56.01ac06
- NAID
  210000147376
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Process controllability of inductively coupled plasma-enhanced reactive sputter deposition for the fabrication of a-InGaZnOx channel TFTs2016
- Author(s)
  K. Takenaka, K. Nakata, H. Otani, S. Osaki, G. Uchida, Y. Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 1S Pages: 01AA18-01AA18
- DOI
  10.7567/jjap.55.01aa18
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Influence of voltage pulse width on the discharge characteristics in an atmospheric dielectric-barrier-discharge plasma jet2016
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 1S Pages: 01AH03-01AH03
- DOI
  10.7567/jjap.55.01ah03
- NAID
  210000146000
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water2016
- Author(s)
  G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 120 Issue: 20 Pages: 203302-203302
- DOI
  10.1063/1.4968568
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009, KAKENHI-PROJECT-16H03895, KAKENHI-PROJECT-25820113
[Journal Article] Low-temperature formation of amorphous InGaZnOx films with inductively coupled plasma-enhanced reactive sputter deposition2015
- Author(s)
  Kosuke Takenaka, Ken Cho, Yasufumi Ohchi, Hirofumi Otani, Giichiro Uchida, Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 6S2 Pages: 06GC02-06GC02
- DOI
  10.7567/jjap.54.06gc02
- NAID
  210000145321
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Influence of He Gas Flow Rate on Optical Emission Characteristics in Atmospheric-Dielectric Plasma Jet2015
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata and Y. Setsuhara
- Journal Title
  
  IEEE Trans. Plasma Sci.
  
  Volume: 43 Issue: 3 Pages: 734-744
- DOI
  10.1109/tps.2014.2387064
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Atmospheric-Pressure Gas-Breakdown Characteristics with a Radio-Frequency Voltage2015
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume: 15 Issue: 3 Pages: 2192-2196
- DOI
  10.1166/jnn.2015.10233
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Dynamic Properties of Helium Atmospheric Dielectric-Barrier-Discharge Plasma Jet2015
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki, K. Kawabata and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume: 15 Issue: 3 Pages: 2324-2329
- DOI
  10.1166/jnn.2015.10232
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Low-temperature formation of a-IGZO films with inductively coupled plasma-enhanced reactive sputter deposition2015
- Author(s)
  Kosuke Takenaka, Ken Cho, Yasufumi Ohchi, Hirofumi Otani, Giichiro Uchida and Yuichi Setsuhara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630335
[Journal Article] Effects of gas flow on oxidation reaction in liquid induced by He/O2 plasma-jet irradiation2015
- Author(s)
  A. Nakajima, G. Uchida, T. Kawasaki, K. Koga, T. Sarinont, T. Amano, K. Takenaka, M. Shiratani, and Y. Setsuhara
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 118 Issue: 4 Pages: 043301-043301
- DOI
  10.1063/1.4927217
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25820113, KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009
[Journal Article] Gas Flow Rate Dependence of the Discharge Characteristics of a Plasma Jet Impinging Onto the Liquid Surface2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 43 Issue: 12 Pages: 4081-4087
- DOI
  10.1109/tps.2015.2488619
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PLANNED-24108009, KAKENHI-PROJECT-24340143
[Journal Article] Plasma Interaction with Organic Molecules in Liquid as Fundamental Processes in Plasma Medicine2015
- Author(s)
  K. Takenaka, A. Miyazaki, H. Abe, G. Uchida and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume: 15 Issue: 3 Pages: 2120-2124
- DOI
  10.1166/jnn.2015.10230
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine2015
- Author(s)
  K. Takenaka, A. Miyazaki, G. Uchida and Y. Setsuhara
- Journal Title
  
  J. Nanosci. Nanotechnol.
  
  Volume: 15 Issue: 3 Pages: 2115-2119
- DOI
  10.1166/jnn.2015.10229
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effects of discharge voltage waveform on the discharge characteristics in a helium atmospheric plasma jet2015
- Author(s)
  G. Uchida, K. Takenaka, Y. Setsuhara
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 117 Issue: 15 Pages: 1533011-6
- DOI
  10.1063/1.4918546
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Analysis of Dynamic Discharge Characteristics of Plasma Jet Based on Voltage and Current Measurements Using a Metal Plate2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Nakajima, Kosuke Takenaka
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 43 Issue: 11 Pages: 3821-3826
- DOI
  10.1109/tps.2015.2482998
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Effect of Driving Voltage Frequency on the Discharge Characteristics in Atmospheric Dielectric-Barrier-Discharge Plasma Jet2014
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 53 Issue: 11S Pages: 11RA08-11RA08
- DOI
  10.7567/jjap.53.11ra08
- NAID
  210000144622
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2014
- Author(s)
  K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  J. Phys. : Conf. Ser.
  
  Volume: 518 Pages: 12018-12018
- DOI
  10.1088/1742-6596/518/1/012018
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-26420738
[Journal Article] Molecular-structure variation of biomolecules irradiated with atmospheric-pressure plasma through plasma/liquid interface2014
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54 Issue: 1S Pages: 01AF04-01AF04
- DOI
  10.7567/jjap.54.01af04
- NAID
  210000144756
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 未定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 未定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2014
- Author(s)
  K. Takenaka, A. Miyazaki and Y. Setsuhara
- Journal Title
  
  J. Phys. : Conf. Ser.
  
  Volume: 518 Pages: 12019-12019
- DOI
  10.1088/1742-6596/518/1/012019
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-26420738
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films Using Solution of Zinc Acetate2013
- Author(s)
  Kosuke Takenaka, Yusuke Okumura and Yuichi Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 1S Pages: 01AC11-01AC11
- DOI
  10.7567/jjap.52.01ac11
- NAID
  210000141759
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Plasma-Enhanced Reactive Magnetron Sputtering Assisted with Inductively Coupled Plasma for Reactivity- Controlled Deposition of Microcrystalline Silicon Thin Films2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara and Akinori Ebe
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 11S Pages: 11NB05-11NB05
- DOI
  10.7567/jjap.52.11nb05
- NAID
  210000143099
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325
[Journal Article] Plasma interaction with Zn nano layer on organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation2013
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara
- Journal Title
  
  Surface and Coatings Technology
  
  Volume: 228 Pages: S271-S275
- DOI
  10.1016/j.surfcoat.2012.05.126
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] Plasma Interactions with Biological Molecules in Aqueous Solution2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, and Masaru Hori
- Journal Title
  
  MRS Proc.
  
  Volume: 1598
- DOI
  10.1557/opl.2013.1155
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108002, KAKENHI-PLANNED-24108003
[Journal Article] Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine2013
- Author(s)
  K. Takenaka, K. Cho, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 掲載確定
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-24108003
[Journal Article] Plasma Interactions with Organic Materials in Liquid through Plasma/Liquid Interface2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 11S Pages: 11NE04-11NE04
- DOI
  10.7567/jjap.52.11ne04
- NAID
  210000143115
- Peer Reviewed
- Data Source
  KAKENHI-ORGANIZER-24108001, KAKENHI-PLANNED-24108003, KAKENHI-PROJECT-24760597
[Journal Article] Characterization of Inductivity Coupled RF Plasmas for Plasma-Assisted Mist CVD of ZnO films2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 379 Pages: 12031-12031
- DOI
  10.1088/1742-6596/379/1/012031
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Low-Temperature Deposition of Zinc Oxide Film by Plasma-Assisted Mist Chemical Vapor Deposition2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura and Yuichi Setsuhara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 51 Issue: 8S1 Pages: 08HF05-08HF05
- DOI
  10.1143/jjap.51.08hf05
- NAID
  210000141095
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Effects of Irradiation with Ions and Photons in Ultraviolet-Vacuum Ultraviolet Regions on Nano-Surface Properties of Polymers Exposed to Plasmas2012
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 51 Issue: 1S Pages: 01AJ02-01AJ02
- DOI
  10.1143/jjap.51.01aj02
- NAID
  210000140089
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] Low-Temperature Growth of Zinc Oxide Films from Zinc Acetate Solution Using Plasma-Assisted Mist Chemical Vapor Deposition2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura and Yuichi Setsuhara
- Journal Title
  
  Transactions of the Materials Research Society of Japan
  
  Volume: 37 Pages: 173-176
- NAID
  130003399076
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Investigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation2012
- Author(s)
  Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori
- Journal Title
  
  Thin Solid Films
  
  Volume: 523 Pages: 15-19
- DOI
  10.1016/j.tsf.2012.05.061
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325, KAKENHI-PROJECT-23656465
[Journal Article] フレキシブルデバイス創製に向けたプラズマ－ソフトマテリアル相互作用の解析2011
- Author(s)
  趙研, 節原裕一, 竹中弘祐, 白谷正治, 関根誠, 堀勝
- Journal Title
  
  高温学会誌
  
  Volume: 37 Pages: 289-297
- NAID
  10030167027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656465
[Journal Article] フレキシブルデバイス創製に向けたプラズマーソフトマテリアル相互作用の解析2011
- Author(s)
  趙研, 節原裕一, 竹中弘祐, 白谷正治, 関根誠, 堀勝
- Journal Title
  
  高温学会誌
  
  Volume: 37 Pages: 289-297
- NAID
  10030167027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360325
[Journal Article] Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer2010
- Author(s)
  Yuichi Setsuhara, Ken Cho, Kosuke Takenaka
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.518 Pages: 6320-6324
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Combinatorial Analysis of Plasma-Surface Interactions of Polyethyleneterephthalate with X-ray Photoelectron Spectroscopy2010
- Author(s)
  K.Takenaka, Y.Setsuhara, K.Cho, M.Shiratani, M.Sekine M.Hori
- Journal Title
  
  Japanese Journal of Applied Physics 49
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer,2010
- Author(s)
  Y.Setsuhara, K.Cho, K.Takenaka, M.Shiratani, M.Sekine M.Hori
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 6320-6324
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Combinatorial Analysis of Plasma-Surface Interactions of Polyethyleneterephthalate with X-ray Photoelectron Spectroscopy2010
- Author(s)
  Kosuke Takenaka
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.49
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Low-damage surface modification of polymethylmethacrylate with argon.oxygen mixture plasmas driven by multiple low-inductance antenna units,2010
- Author(s)
  Y.Setsuhara, K.Cho, K.Takenaka, M.Shiratani, M.Sekine, M.Hori, E.Ikenaga, S.Zaima,
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 3561-3565
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Plasma Surface Treatment of Polymers with Inductivity Coupled RF Plasmas Driven by Low inductance Antenna Units,2009
- Author(s)
  Y.Setsuhara, K.Cho, K.Takenaka, A.Ebe, M.Shiratani, M.Sekine, M.Hori, E.Ikeitaga, H.Kondo, O.Nakatsuka, S.Zaima
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 1006-1011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760587
[Journal Article] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics : Conference Series
  
  Volume: (Accepted)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Journal Article] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki and Yuichi Setsuhara
- Journal Title
  
  Journal of Physics : Conference Series
  
  Volume: (Accepted)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760597
[Patent] プラズマ発生装置及びこれを用いたプラズマ生成方法2017
- Inventor(s)
  節原裕一，内田儀一郎，竹中弘祐
- Industrial Property Rights Holder
  大阪大学
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-068320
- Filing Date
  2017-03-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-assisted mist chemical vapor deposition for formation of 3D nanostructured oxide thin films2024
- Author(s)
  Kosuke Takenaka, Susumu Toko and Yuichi Setsuhara
- Organizer
  ISPlasma 2024/IC-PLANTS 2024/APSPT-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] Plasma-assisted Mist CVD for Formation of 3D Nanostructured Zinc Oxide Thin Films2023
- Author(s)
  Kosuke Takenaka, Susumu Toko and Yuichi Setsuhara
- Organizer
  Joint Conference of Global Plasma Forum and 24th Workshop on Fine Particle Plasmas (WFPP24)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] Droplet-Vaporization Behavior Analysis in Plasma for Fabrication of 3D Nanostructured Zinc Oxide Thin Films by Plasma-assisted Mist CVD2023
- Author(s)
  Kosuke Takenaka, Susumu Toko and Yuichi Setsuhara
- Organizer
  ISPlasma 2023 / IC-PLANTS 2023
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] プラズマ支援反応性プロセスを用いた機能性薄膜の低温形成2022
- Author(s)
  竹中　弘祐，都甲　将，内田　儀一郎，江部　明徳、節原　裕一
- Organizer
  第38回九州・山口プラズマ研究会
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] Low-temperature formation of functional oxide materials with plasma-assisted reactive processes2022
- Author(s)
  K. Takenaka, S. Toko and Y. Setsuhara
- Organizer
  第32回日本MRS年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] プラズマ支援ミストCVDによる３次元ナノ構造酸化亜鉛薄膜形成に向けたプラズマ中の液滴蒸発挙動の解析2022
- Author(s)
  竹中弘祐，都甲将，節原裕一
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] Plasma-assisted reactive processes for low-temperature formation of functional materials2021
- Author(s)
  Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara
- Organizer
  5th Asia Pacific Conference on Plasma Physics (AAPPS-DPP2021)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] 反応性プラズマプロセスによる酸化物半導体薄膜形成2021
- Author(s)
  竹中　弘祐，都甲　将，節原　裕一
- Organizer
  2021 (令和3)年度第3回表面改質技術研究委員会
- Invited
- Data Source
  KAKENHI-PROJECT-21K04711
[Presentation] Plasma Surface Modification towards Application of Polymers to Biomaterials2019
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Organizer
  Materials Researchmeeting 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06859
[Presentation] Development of Plasma Surface Modification Technique towards Application of Polymers to Biomaterials2019
- Author(s)
  Yuichi Setauhara, Kosuke Takenaka
- Organizer
  4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06859
[Presentation] Functional thin film deposition using plasma-assisted reactive process2019
- Author(s)
  Kosuke Takenaka, Hiroyuki Hirayama, Yuichi Setsuhara, Keisuke Ide and Toshio Kamiya
- Organizer
  ICMASS2019 / iLIM-s
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06859
[Presentation] Development of functionalization techniques of organic material surfaces for functional materials2018
- Author(s)
  Yuichi Setauhara, Kosuke Takenaka, Giichiro Uchida
- Organizer
  3nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06859
[Presentation] Functionalization of Organic Material Surfaces for Development of Functional Materials2017
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida
- Organizer
  ICMaSS2017/iLIM-2
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06859
[Presentation] Characterization of atmospheric-pressure plasma jets and interaction with liquid for control of reactive species in plasma-activated aqueous solutions2017
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, J. Ikeda, Y. Mino, K. Takenaka
- Organizer
  International Conference on Plasma Medical Science Innovation (ICPMSI) 2017
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2017-02-27
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Liquid Interactions with Atmospheric-Pressure Plasma Jets for Controlling Reactive Species in Plasma-Activated Aqueous Solutions2017
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, J. Ikeda, Y. Mino, K. Takenaka
- Organizer
  The 3rd International Workshop on Advanced Plasma Technology and Applications
- Place of Presentation
  Hochiminh, Vietnam
- Year and Date
  2017-01-11
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of plasma-jet irradiation on the surface of liquid and its effects on ROS and RNS generations in bulk solution2016
- Author(s)
  G. Uchida, T. Ito, K. Takenaka, J. Ikeda, Y. Setsuhara
- Organizer
  26th Annual meeting of MRS-Japan 2016
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-12-19
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatio-temporal behaviors of atmospheric-pressure dielectric barrier discharge plasma jets for reactive interactions with materials2016
- Author(s)
  Yuichi Setsuhara, G. Uchida, A. Nakajima, K. Kawabata, K. Takenaka
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC’2016)
- Place of Presentation
  Graz, Austria
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Control of ROS and RNS productions in liquid in atmospheric pressure plasma-jet system2016
- Author(s)
  Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, Yuichi Setsuhara
- Organizer
  69th Annual Gaseous Electronics Conference
- Place of Presentation
  Bochum, Germany
- Year and Date
  2016-10-10
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] SPATIO‐TEMPORAL BEHAVIORS OF ATMOSPHERIC‐PRESSURE PLASMA JETS FOR INVESTIGATION OF REACTIVE‐SPECIES PRODUCTION IN LIQUID2016
- Author(s)
  Y. Setsuhara, A. Nakajima, G. Uchida, T. Ito, K. Takenaka, J. Ikeda
- Organizer
  43rd IEEE International Conference on Plasma Science
- Place of Presentation
  Banff, Alberta, Canada
- Year and Date
  2016-06-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Spatio-temporal Behaviors of Atmospheric-pressure Dielectric Barrier Discharge Plasma Jets for Reactive Interactions with Materials2016
- Author(s)
  Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka
- Organizer
  9th International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2016)
- Place of Presentation
  Graz, Austria
- Year and Date
  2016-05-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 周辺雰囲気ガス制御型プラズマジェット照射による溶液中活性酸素･窒素種生成2016
- Author(s)
  内田　儀一郎, 中島　厚, 伊藤　泰喜, 竹中　弘祐, 節原　裕一
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of surrounding gas flow on ROS and RNS productions in non-thermal plasma-jet system2016
- Author(s)
  Y. Setsuhara, G. Uchida, T. Ito, A. Nakajima, K. Takenaka, J. Ikeda
- Organizer
  6th International Conference on Plasma Medicine (ICPM-6)
- Place of Presentation
  Bratislava, Slovakia
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of plasma-irradiation distance on ROS and RNS productions in liquid2016
- Author(s)
  G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara
- Organizer
  6th International Conference on Plasma Medicine (ICPM-6)
- Place of Presentation
  Bratislava, Slovakia
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Dynamical Behaviors and Plasma-Liquid Interactions of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets2016
- Author(s)
  Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka
- Organizer
  The 2nd Asian International Workshop on Advanced Plasma Technology and Applications Major Topics: Plasma Technology for Agriculture, Bio and Medicine
- Place of Presentation
  Chiang Mai, Thailand
- Year and Date
  2016-02-23
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Electrical discharge characteristics of atmospheric plasma jets2016
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2016)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2016-03-06
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ支援反応性スパッタリングを用いたアモルファスIGZO薄膜トランジスタの低温形成2016
- Author(s)
  節原　裕一, 中田　慶太郎, 佐竹　義且, 竹中　弘祐, 内田　儀一郎, 江部　明憲
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Spatio‐temporal behaviors of atmospheric‐pressure plasma jets for investigation of reactive‐species production in liquid2016
- Author(s)
  Y. Setsuhara, A. Nakajima, G. Uchida, T. Ito, K. Takenaka, J. Ikeda
- Organizer
  43rd IEEE International Conference on Plasma Science (ICOPS 2016)
- Place of Presentation
  Banff, Canada
- Year and Date
  2016-06-19
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Dynamical-Behavior Characterization of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets for Control of Reactive Oxygen and Nitrogen Species in Liquid2016
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka
- Organizer
  15th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2016-09-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Influence of Mist Size on Surface Structure of ZnO Films Deposited with Plasma Assisted Mist Chemical Vapor Deposition2016
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setauhara
- Organizer
  Visual-JW2016/iLIM-1
- Place of Presentation
  Hotel Hankyu Expo Park, Osaka, Japan
- Year and Date
  2016-10-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Effects of plasma-irradiation distance on oxidation reaction in liquid induced by He/O2 plasma-jet irradiation2015
- Author(s)
  Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2015-12-08
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Dynamical Characterizations of Atmospheric-Pressure Plasma Jets as Evaluation Protocols for Plasma Medicine2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida,, Kazufumi Kawabata Atsushi Nakajima, Kosuke Takenaka
- Organizer
  The 21st Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Material
- Place of Presentation
  Yangyang, Korea
- Year and Date
  2015-10-03
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Assisted Mist CVD for Formation of Textured ZnO Films : Effect of Mists on Surface Structure of ZnO Films2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28)
- Place of Presentation
  Nagasaki University, Nagasaki, Japan
- Year and Date
  2015-12-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Control of discharge characteristics of a plasma jet by ambient gas-flow conditions2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2015-12-08
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療装置に求められている要素と世界動向2015
- Author(s)
  節原　裕一, 内田　儀一郎, 竹中　弘祐, 竹田　圭吾, 石川　健治, 堀　勝
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Atmospheric-Pressure-Plasma Assisted Mist CVD of Zinc Oxide Films2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Ramada Plaza Jeju Hotel, Jeju Island, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Effect of Mists on Surface Structure of ZnO Films Deposited with Plasma-Assisted Mist CVD2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Year and Date
  2015-12-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Low-Temperature Formation of a-IGZO TFTs with ICP-Enhanced Reactivity-Controlled Sputter Deposition2015
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Keitaro Nakata, Giichiro Uchida, Akinori Ebe
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films for Flexible Electronics2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii Convention Center, Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] プラズマ支援ミスト化学気相堆積におけるミストが製膜形状に与える影響2015
- Author(s)
  竹中弘祐，内田儀一郎, 節原裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Growth of Zinc Oxide Films by Atmospheric-Pressure Plasma-Assisted Mist CVD2015
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara
- Organizer
  The 5th International Conference on Characterization and Control of Interfaces for High Quality Advanced Materials (ICCCI 2015)
- Place of Presentation
  Kurashiki Royal Art Hotel, Kurashiki, Japan
- Year and Date
  2015-07-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Discharge characteristics in atmospheric plasma jets produced in various gas flow patterns2015
- Author(s)
  Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of discharge voltage waveform on discharge characteristics in a helium atmospheric plasma jet2015
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧非平衡プラズマ照射による液中ラジカル生成の制御2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一
- Organizer
  応用物理学会九州支部特別講演会
- Place of Presentation
  福岡
- Year and Date
  2015-04-27
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] プラズマ医療のための大気圧放電プラズマの時空間制御2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一
- Organizer
  新学術領域研究「プラズマ医療科学の創成」＋「統合的神経機能の制御を標準とした糖鎖の作動原理解明」合同公開シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2015-08-05
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 非平衡プラズマジェットの動的放電特性2015
- Author(s)
  内田　儀一郎, 竹中　弘祐, 節原　裕一, 川崎　敏之, 古閑　一憲, 白谷　正治
- Organizer
  第21回プラズマ新領域研究会「プラズマ流の可視化」
- Place of Presentation
  大阪
- Year and Date
  2015-10-03
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge characteristics of a helium atmospheric plasma jet impinging onto the liquid surface2015
- Author(s)
  Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara, Kazunori Koga, Masaharu Shiratani
- Organizer
  The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ICP-Enhanced Sputter Deposition for Reactivity Control and Low-Temperature Formation of a-IGZO Films2015
- Author(s)
  Yuichi Setsuhara, Keitaro Nakata, Yoshikatsu Satake, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68)
- Place of Presentation
  Hawaii, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] ICP-Enhanced Reactivity-Controlled Sputter Deposition of a-IGZO Films for Thin Film Transistor Applications2015
- Author(s)
  Yuichi Setsuhara, Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
- Organizer
  9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28)
- Place of Presentation
  Nagasaki, Japan
- Year and Date
  2015-12-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] プラズマ支援反応性スパッタ製膜プロセスによるIGZO薄膜デバイス低温形成2015
- Author(s)
  節原　裕一, 陶山　悠太郎, 中田　慶太郎, 竹中　弘祐, 内田　儀一郎, 江部　明憲
- Organizer
  第27回酸化物半導体討論会
- Place of Presentation
  東京
- Year and Date
  2015-05-18
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] 液面に入射するプラズマジェットの放電特性2015
- Author(s)
  内田　儀一郎, 中島　厚, 竹中　弘祐, 古閑　一憲, 白谷　正治, 節原　裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧He/O2プラズマジェット照射による液中活性酸素種生成に及ぼすガス流パターンの効果2015
- Author(s)
  中島　厚, 内田　儀一郎, 川崎　敏之, 古閑　一憲, Thapanut Sarinont, 天野　孝昭, 竹中　弘祐, 白谷　正治, 節原　裕一
- Organizer
  第76回応用物理学会学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge characteristics of plasma jet operated in gas-mixture system for plasma biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara
- Organizer
  International workshop on control of fluctuation of plasma processes
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Effects of gas-mixing structure on discharge properties of atmospheric-pressure plasma jet for plasma medicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Irradiation Effects on Properties of ZnO Films Prepared with Plasma-Assisted Mist-CVD2014
- Author(s)
  Kosuke Takenaka and Yuichi Setsuhara
- Organizer
  ISPlasma 2014/IC-PLANTS 2014
- Place of Presentation
  Meijo University, Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma-Enhanced Reactivity- Controlled Sputter Deposition Process for Low-Temperature Formation of Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Atsuki Kanai, Soichiro Osaki
- Organizer
  8th International Conference on Reactive Plasmas (ICRP- 8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Properties of ZnO Film Deposited by Plasma-Assisted Mist Chemical Vapor Deposition2014
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka International Congress Center, Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性2014
- Author(s)
  節原　裕一, 竹中　弘祐, 大崎　創一郎, 陶山　悠太郎, 大谷　浩史, 金井　厚毅, 江部　明憲
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] RF plasma sources for PECVD and soft-material processes2014
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka and Akinori Ebe
- Organizer
  The International Symposium on Plasma-Nano Materials and Processes
- Place of Presentation
  Seoul, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Properties of ICP-Enhanced Reactive Sputter Discharge for Formation of Advanced Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Soichiro Osaki, Yutaro Suyama, Hirofumi Ohtani, Atsuki Kanai
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 気液界面を介した大気圧非平衡プラズマと液体中有機物との相互作用2014
- Author(s)
  竹中弘祐、宮崎敦史、川端一史、内田儀一郎、阿部浩也、節原裕一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－2014
- Author(s)
  節原裕一, 竹中弘祐, 内田儀一郎
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会
- Place of Presentation
  大阪
- Year and Date
  2014-06-02
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma-Enhanced Reactivity-Controlled Sputter Deposition Process for Low-Temperature Formation of Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Atsuki Kanai, Soichiro Osaki
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Irradiation Effects on Properties of ZnO Films Prepared with Plasma-Assisted Mist-CVD2014
- Author(s)
  Kosuke Takenaka and Yuichi Setsuhara
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014)
- Place of Presentation
  Meijo University, Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Discharge Characteristics of Plasma Jet Operated in Gas-Mixture System for Plasma Biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Molecular Structural Change of Soft Materials via Irradiation with Atmospheric-Pressure Plasma Jet for Plasma Medicine2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial profiles of emission spectra from atmospheric-pressure plasma jet for plasma medicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara and Masaru Hori
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Optical Emission Characteristics of Atmospheric-Pressure Plasma Jet for Plasma Biomedicine2014
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara, and Masaru Hori
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－2014
- Author(s)
  節原裕一, 竹中弘祐, 内田儀一郎
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会
- Place of Presentation
  大阪
- Year and Date
  2014-06-02
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Molecular-Structure Variation of Soft Material Irradiated with Atmospheric-Pressure Plasma Jet2014
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Properties of ICP-Enhanced Reactive Sputter Discharge for Formation of Advanced Semiconductor Films2014
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Soichiro Osaki, Yutaro Suyama, Hirofumi Ohtani, Atsuki Kanai
- Organizer
  6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Interactions with Soft Materials in Air and Liquid2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Hiroya Abe, Masaru Hori
- Organizer
  3rd International Symposium for Plasma Biosciences (ISPB2013-3)
- Place of Presentation
  Jeju, Korea
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] DC-Voltage Gas-Breakdown Characteristics at Atmospheric Pressure for Plasma Medicine2013
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Designing Plasma-Enhanced Magnetron Sputtering with Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 6th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2013)
- Place of Presentation
  Gifu, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Surface Structure Control of ZnO Films by Plasma-Assisted Mist-CVD2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma-Assisted Mist Chemical Vapor Deposition for Formation of Textured Zinc Oxide Thin films2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  1st Japan-Taiwan workshop on Materials Design and Joining
- Place of Presentation
  Osaka, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性2013
- Author(s)
  節原裕一、竹中弘祐、大谷浩史、金井厚毅、江部明憲
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  厚木
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Properties of Dielectric-Barrier-Discharge Plasma Jet for Plasma Medicine2013
- Author(s)
  Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Formation of Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofimi Ohtani, Akinori Ebe
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Deposition of Textured Zinc Oxide Thin films Using Plasma-Assisted Mist Chemical Vapor Deposition2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  International Symposium on Interfacial Joining and Surface Technology (IJST2013)
- Place of Presentation
  Icho Kaikan, Osaka University, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma-Biomaterials Interaction Analysis as a Basis of Fundamental Processes in Plasma Medicine2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2013-01-28
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low- inductance antenna modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka and Akinori Ebe
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013)
- Place of Presentation
  Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  The 26th Symposium on Plasma Science for Materials:SPSM-26
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Kyushu University, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Surface Structure Analysis of Zinc Oxide Thin films Deposited by Plasma-Assisted Mist Chemical Vapor Deposition2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Organizer
  第23回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Structure Control of ZnO Film Surface Using Plasma-Assisted Mist CVD2013
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine2013
- Author(s)
  Kosuke Takenaka , Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ICP-Enhanced Reactive Sputter Deposition Processes for Low-Temperature Formation of IGZO TFT2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  35th International Symposium on Dry Process (DPS2013)
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  第26回プラズマ材料科学シンポジウム
- Place of Presentation
  九州大学百年講堂
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Surface Structure Analysis of Zinc Oxide Thin films Deposited by Plasma-Assisted Mist Chemical Vapor Deposition2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Organizer
  第23回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma Interactions with Biological Molecules in Aqueous Solution2013
- Author(s)
  Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka and Masaru Hori
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Characteristics of Atmospheric Pressure Discharge and Interactions with Soft Materials2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka
- Organizer
  The 16th International Workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Okazaki, Japan
- Year and Date
  2013-01-25
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Formation of Textured Zinc Oxide Thin films by Plasma-Assisted Mist Chemical Vapor Deposition2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Organizer
  The 26th Symposium on Plasma Science for Materials:SPSM-26
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Kyushu University, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  第26回プラズマ材料科学シンポジウム
- Place of Presentation
  九州大学百年講堂
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Control Capability of ICP-Enhanced Reactive Sputtering System with Inner Type Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Hirofumi Otani, Atsuki Kanai, Kosuke Takenaka, Akinori Ebe
- Organizer
  第23回日本MRS年次大会
- Place of Presentation
  横浜
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Interactions with Organic Materials in Liquid as Fundamental Processes in Plasma Medicine2013
- Author(s)
  Kosuke Takenaka, Hiroya Abe, Yuichi Setsuhara
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Year and Date
  2013-01-21
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Atmospheric-Pressure Gas-Breakdown Characteristics with RF and UHF Voltage for Plasma Medicine2013
- Author(s)
  Giichiro Uchida, Atsushi Miyazaki, Kosuke Takenaka, and Yuichi Setsuhara,
- Organizer
  International Conference on Surface Engineering (ICSE 2013)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Formation of Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofimi Ohtani, Akinori Ebe
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  浜松
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] プラズマ医療の基礎過程としての気液界面を介したプラズマと液体中有機物との相互作用2013
- Author(s)
  竹中弘祐、節原裕一
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] ICP-Enhanced Reactive Sputtering with Multiple Inner Type Low-Inductance Antenna Modules for Large-Area Formation of Thin Film Devices2013
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] プラズマ支援ミストCVDによる微小凹凸構造を有した酸化亜鉛薄膜形成2013
- Author(s)
  竹中弘祐,節原裕一
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御2013
- Author(s)
  節原裕一, 竹中弘祐, 大谷浩史, 金井厚毅, 大崎創一郎, 江部明憲
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] ICP-Enhanced Reactivity-Controlled Sputter Deposition with New Type of Low-Inductance Antenna Modules for High-Rate and Large-Area Deposition of Functional Films2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013)
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Formation of Textured Zinc Oxide Thin films by Plasma-Assisted Mist Chemical Vapor Deposition2013
- Author(s)
  Kosuke Takenaka, and Yuichi Setsuhara
- Organizer
  第26回プラズマ材料科学シンポジウム
- Place of Presentation
  九州大学百年講堂
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Controllability of Plasma-Enhanced Reactive Sputter Deposition Process with ICPs Sustained by Multiple Inner Type Low-Inductance Antenna Modules2013
- Author(s)
  Yuichi Setsuhara, Soishiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  第26回プラズマ材料科学シンポジウム(SPSM26)
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Degradation of methylene blue in aqueous solution via plasma exposure through gas/liquid interface2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12), The third Asia-Europe Physics Summit (ASEPS3)
- Place of Presentation
  Chiba Japan
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low-inductance antenna modules2013
- Author(s)
  Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe
- Organizer
  International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013)
- Place of Presentation
  Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma2013
- Author(s)
  Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara
- Organizer
  The 26th Symposium on Plasma Science for Materials:SPSM-26
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Kyushu University, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Effect of Plasma Irradiation on Interfacial Nano Layers in Inorganic / Organic Hybrid Structures2012
- Author(s)
  Kosuke Takenaka, Ken Cho, Yuichi Setsuhara
- Organizer
  International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012)
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Plasma-Assisted Mist CVD for Formation of Zinc Oxide Film as Transparent Conducting Oxide2012
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2012)
- Place of Presentation
  Osaka, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] プラズマ支援反応性スパッタリング法による透明アモルファス酸化物半導体薄膜トランジスタ低温形成技術の開発2012
- Author(s)
  節原裕一, 趙研, 大地康史, 竹中弘祐, 江部明憲
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka and Akinori Ebe
- Organizer
  The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea
- Year and Date
  2012-06-08
- Invited
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Enhanced Sputtering Assisted with ICP via New Type of Low-Inductance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Yasufumi Ohchi, Ken Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  13th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] プラズマ支援反応性スパッタリング法を用いた長尺基板対応大面積プラズマスパッタシステムの開発2012
- Author(s)
  竹中弘祐, 節原裕一, 江部明憲
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma Interactions with Soft Materials as a Basis for Plasma Medicine2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  International Workshop on Advanced Plasma Technology for Green Energy and Biomedical Applications (APT2012)
- Place of Presentation
  Chiang Mai, Thailand,
- Year and Date
  2012-08-24
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Development of ICP-Enhanced Reactive Sputtering System with Multiple Low-Inductance Antenna Modules for Large-Area Deposition of Silicon Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  34th International symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] プラズマ支援ミストCVDを用いた酸化亜鉛薄膜の形成と表面形状評価2012
- Author(s)
  竹中　弘祐, 奥村　祐介, 節原　裕一
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Low-Temperature and Low-Damage Plasma Processing of Inorganic/Organic Hybrid Materials for Development of Flexible Electronics2012
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  5th International Symposium on Advanced Materials Development and Integration of Novel Structural Metallic and Inorganic Materials
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] ICP-Enhanced Reactive Processes with Low-Inductance Antenna2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe
- Organizer
  The 5th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2012)
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Radio Frequency Plasma Generation over Water Surface at Saturated Water Vapor Pressure2012
- Author(s)
  Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2012-09-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature and High-Rate Deposition of Crystalline Zinc Oxide Films by Plasma-Enhanced Mist Chemical Vapor Deposition2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara
- Organizer
  Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Process Control Capabilities Of Plasma-Enhanced Reactive Sputter Deposition With New Type Of Low-Inductance-Antenna Driven ICP For Large-Area Formation Of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Akinori Ebe
- Organizer
  Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] nvestigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine2012
- Author(s)
  K. Takenaka, K. Cho, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Organizer
  11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics
- Place of Presentation
  Seoul, Korea(招待講演)
- Year and Date
  2012-06-08
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Sputtering with ICP Driven by Inner-Type Low-Inductance Antenna2012
- Author(s)
  Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe
- Organizer
  4th International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2012)
- Place of Presentation
  愛知県春日井市
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Plasma-Assisted Mist CVD for Low-Temperature and High-Rate Formation of Zinc Oxide Films2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara
- Organizer
  The Fourth International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials (ICCCI 2012)
- Place of Presentation
  Kurashiki, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma Interactions with Soft-Materials as a Basis of Fundamental Processes for Plasma Medicine2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine. Masaru Hori
- Organizer
  The 2nd International Symposium for Plasma Biosciences
- Place of Presentation
  Seoul, Korea
- Year and Date
  2012-08-12
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Yuichi Setsuhara, Yasufumi OhchiKen Cho, Kosuke Takenaka, Akinori EbePlasma-Enhanced Sputtering Assisted with ICP via New Type of Low-Induetance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Yasufumi OhchiKen Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  13th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Water Plasma Interactions in Solution2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka
- Organizer
  First International Symposium on Advanced Water Science and Technology (ISAWST-1)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2012-11-11
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  65th Annual Gaseous Electronics Conference
- Place of Presentation
  Texas, USA
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] プラズマ支援ミストCVDを用いた酸化亜鉛薄膜の低温・高速形成2012
- Author(s)
  竹中　弘祐, 節原　裕一
- Organizer
  第28回九州・山口プラズマ研究会
- Place of Presentation
  大分
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma- Enhanced Sputtering Assisted with ICP via New Type of Low-Inductance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Yasufumi Ohchi, Ken Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  13th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Inductively Coupled Plasma-Assisted Mist CVD for Low Temperature and High Rate Deposition of ZnO Films2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara
- Organizer
  34th International symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] Plasma-Assisted Mist CVD with Inductively-Coupled RF Plasma Source for ZnO Film Formation2012
- Author(s)
  Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara
- Organizer
  International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012)
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-24760597
[Presentation] プラズマ支援反応性スパッタリング法による透明アモルファス酸化物半導体薄膜トランジスタ低温形成技術の開発2012
- Author(s)
  節原裕一, 趙研, 大地康史, 竹中弘祐, 江部明憲
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Plasma-Assisted Sputtering with ICP Driven by Inner-Type Low-Inductance Antenna2012
- Author(s)
  Yuichi Setsuhara, Ken Cho,Kosuke Takenaka, Akinori Ebe
- Organizer
  4th International Symposi凵m on Advanced PlasmaScience and its Applications (ISPIasma 2012)
- Place of Presentation
  Aichi, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Process Control Capabilities Of Plasma-Enhanced Reactive Sputter Deposition With New Type Of Low-Inductance-Antenna Driven ICP For Large-Area Formation Of Semiconductor Films2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Akinori Ebe
- Organizer
  Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25)
- Place of Presentation
  Kyoto, Japa
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices2012
- Author(s)
  Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
- Organizer
  65th Annual Gaseous Electronics Conference
- Place of Presentation
  Texas, USA
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Characterization of Inductively-Coupled RF Plasmas with Inner-Type Low-Inductance Antennas and Application to Plasma-Assisted Reactive Sputter Deposition2011
- Author(s)
  Ken Cho, Yasufumi Ohchi, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  第21回日本MRS学術シンポジウム
- Place of Presentation
  横浜
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] 埋め込み型低インダクタンスアンテナを用いたプラズマ支援反応性スパッタリング法により作製したa-IGZO膜の特性評価2011
- Author(s)
  大地康史, 趙研, 竹中弘祐, 節原裕一, 江部明憲
- Organizer
  応用物理学会プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念特別シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2011-10-22
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of Low-Damage Reactive Sputter Deposition Processes with Inner-Type Low Inductance Antenna2011
- Author(s)
  Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe
- Organizer
  Plasma Conference 2011
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] Investigation of plasma interactions with organic semiconductors for fabrication of flexible electronics devices2011
- Author(s)
  K. Cho, K. Takenaka, Y. Setsuhara, M. Shiratani, M. Sekine and M. Hori
- Organizer
  33rd International symposium on Dry Process
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23656465
[Presentation] 埋込型低インダクタンスアンテナによるプラズマ生成技術の開発と大面積・低ダメージ反応性プロセスへの応用2011
- Author(s)
  節原裕一, 趙研, 竹中弘祐, 江部明憲
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Development of Low-Damage Reactive Sputter Deposition Processes with lnner-Type Low Inductance Antenna2011
- Author(s)
  Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe
- Organizer
  Plasma Conference 2011
- Place of Presentation
  Ishikawa, Japan
- Data Source
  KAKENHI-PROJECT-23360325
[Presentation] Effects of Photoemissions in UV and VUV Regions on Nano-Surface Structures of Soft Materials during Plasma Processes2010
- Author(s)
  K.Cho, K.Takenaka, Y.Setsuhara, M.Shiratani, M.Sekine, M.Hori
- Organizer
  7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63)
- Place of Presentation
  Maison de la Chimie, Paris, France
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] X線光電子分光によるプラズマーソフト材料相互作用の解析-UV-VUV領域の発光がナノ表面に及ぼす影響-2010
- Author(s)
  趙研、節原裕一、竹中弘祐、白谷正治、関根誠、堀勝
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学文教キャンパス
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] 低温・低ダメージプラズマプロセスによる無機/有機ハイブリッド積層構造の形成2010
- Author(s)
  竹中弘祐
- Organizer
  応用物理学関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] X線光電子分光によるプラズマーソフト材料相互作用の解析-UV-VUV領域の発光がナノ表面に及ぼす影響-2010
- Author(s)
  趙研, 節原裕一, 竹中弘祐
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学文教キャンパス(長崎県)
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] 低温・低ダメージプラズマプロセスの開発に向けたX線光電子分光法を用いたプラズマ-ポリマー相互作用の解析2010
- Author(s)
  趙研、竹中弘祐、節原裕一、白谷正治、関根誠、堀勝、池永英司、中塚理、財満鎭明
- Organizer
  第27回プラズマプロセシング研究会
- Place of Presentation
  横浜市開港記念会館
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] 低温・低ダメージプラズマプロセスによる無機/有機ハイブリッド積層構造の形成2010
- Author(s)
  竹中弘祐、趙研、節原裕一、白谷正治、関根誠、堀勝
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] 低温・低ダメージプラズプロセスの開発に向けたプラズマ・ポリマー相互作用のナノ表面解析2010
- Author(s)
  趙研、竹中弘祐、節原裕一、白谷正治、関根誠、堀勝
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス
- Data Source
  KAKENHI-PROJECT-21760587
[Presentation] Optical Emission Analysis of Water Vapor Plasmas2008
- Author(s)
  Shogo Kawajiri, Kosuke Takenaka, Yuichi Setsuhara
- Organizer
  The IUMRS International Conference in Asia 2008, Nagoya, Japan, (2008.12.09-2008.12.13)
- Place of Presentation
  名古屋
- Year and Date
  2008-12-11
- Data Source
  KAKENHI-PROJECT-19654090
[Presentation] RF plasma sources for PECVD and soft-material processes
- Author(s)
  Y. Setsuhara, S. Osaki, K. Takenaka and A. Ebe
- Organizer
  The International Symposium on Plasma-Nano Materials and Processes
- Place of Presentation
  Seoul, Korea
- Year and Date
  2014-04-01 – 2014-04-05
- Invited
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Plasma Interactions with Soft Materials in Air and Liquid
- Author(s)
  Y. Setsuhara, A. Miyazaki, K. Takenaka, H. Abe and M. Hori
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 気液界面を介した大気圧非平衡プラズマ照射が液体中のアミノ酸へ与える影響
- Author(s)
  竹中弘祐, 内田儀一郎, 川端一史, 中島厚, 阿部浩也, 節原裕一
- Organizer
  第62回応用物理学会春季学術講演会, (.3.11-14)
- Place of Presentation
  神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Interaction with Soft Materials in Vacuum, Air and Liquid
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, A. Miyazaki and K. Takenaka
- Organizer
  14th Int. Conf. on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial and Temporal Characteristics of Atmospheric-Pressure Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  2014 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Year and Date
  2014-11-30 – 2014-12-05
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Deposition of Oxide Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices
- Author(s)
  Y. Setsuhara, G. Uchida, K. Takenaka, Y. Suyama, S. Osaki and A. Ebe
- Organizer
  Plasma Conf. 2014
- Place of Presentation
  新潟
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Characteristics of Reactive Particle Production in Atmospheric Pressure DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, A. Miyazaki, K. Kawabata, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatio-temporal behaviors of atmospheric-pressure discharges
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, K. Takenaka, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  The 20th Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-01-27 – 2015-01-29
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Dynamics of Atmospheric Pressure Plasmas for Plasma Medicine
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata and K. Takenaka
- Organizer
  19th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-06-07 – 2014-06-08
- Invited
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Organic Materials in Liquid through Gas/liquid Interface via Atmospheric-Pressure Plasma
- Author(s)
  K. Takenaka, K. Kawabata, A. Nakajima, G. Uchida and Y. Setsuhara
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Influence of Voltage Pulse Width on Discharge Characteristics in Dbd Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧プラズマ支援による酸化亜鉛薄膜の形成に向けたプラズマ/ミスト相互作用の解析
- Author(s)
  竹中弘祐，内田儀一郎，節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] 大気圧高周波放電プラズマの動的特性
- Author(s)
  内田儀一郎, 竹中弘祐, 川端一史, 節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-Temperature Formation of a-IGZO Films by ICP-Enhanced Reactive Sputter Deposition
- Author(s)
  Y. Setsuhara, S. Osaki, Y. Suyama, K. Takenaka and G. Uchida
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Effect of Plasma Excitation Frequency on the Discharge Characteristics of Atmospheric Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  Plasma Conf. 2014
- Place of Presentation
  新潟
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Spatial and Temporal Properties of Atmospheric-Pressure Dbd Plasma Jet
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Low-temperature Formation of a-IGZO Films with ICP-enhanced Reactive Sputter Deposition
- Author(s)
  Y. Setsuhara, Y. Sutama, K. Nakata, K. Takenaka, G. Uchida and A. Ebe
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th Int. Conf. on Plasma Nano Technology & Science(IC-PLANTS 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] ミストプラズマCVDを用いた透明導電酸化物薄膜の形成
- Author(s)
  竹中弘祐、節原裕一
- Organizer
  平成26年度東北大学電気通信研究所共同プロジェクト研究会
- Place of Presentation
  東北大学青葉台キャンパス
- Year and Date
  2014-09-25 – 2014-09-26
- Invited
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Interactions of Atmospheric Pressure Non-equilibrium-Plasma with Organic Materials through Gas/Liquid Interface
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Organizer
  5th Int. Conf. on Plasma Medicine (ICPM5)
- Place of Presentation
  Nara, Japan
- Year and Date
  2014-05-18 – 2014-05-23
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 大気圧プラズマジェット放電特性に及ぼす放電電圧パルス幅の効果
- Author(s)
  内田儀一郎, 竹中弘祐, 川端一史, 節原裕一
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Mist in Atmospheric-Pressure Plasma Irradiation
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜開港記念会館他
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Frequency Dependence of Atmospheric-Pressure Discharge Generation
- Author(s)
  Y. Setsuhara, G. Uchida, K. Kawabata, K. Takenaka, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  2014 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Year and Date
  2014-11-30 – 2014-12-05
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Process Controllability of ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of IGZO TFT
- Author(s)
  Y. Setsuhara, K. Takenaka, G. Uchida and A. Ebe
- Organizer
  36th Int. Symp. on Dry Process (DPS2014)
- Place of Presentation
  YOKOHAMA, Japan
- Year and Date
  2014-11-27 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26630335
[Presentation] Temporal Behavior of Reactive Particle Production in DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, K. Takeda, K. Ishikawa, M. Hori and Y. Setsuhara
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Deposition of zinc oxide films with atmospheric-pressure plasma-assisted mist CVD
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  ISPlasma 2015 / IC-PLANTS 2015
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-31
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Dynamic Properties of Atmospheric Pressure Plasma Jet for Plasma Medicine
- Author(s)
  K. Kawabata, G. Uchida, K. Takenaka and Y. Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma/biomolecules Interaction in Liquid as Fundamental Processes in Plasma Medicine
- Author(s)
  K. Takenaka, K. Kawabata, A. Nakajima, G. Uchida and Y. Setsuhara
- Organizer
  The 2nd Int. Workshop on Plasma for Cancer Treatment (IWPCT2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-16 – 2015-03-17
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Plasma Interactions with Biological Molecules in Atmospheric-Pressure Plasma Irradiation through Gas/Liquid Interface
- Author(s)
  K. Takenaka, A. Miyazaki, K. Kawabata, G. Uchida and Y. Setsuhara
- Organizer
  Int. Union of Materials Research Societies-The IUMRS Int. Conf. in Asia 2014
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Deposition of Zinc Oxide Film Using Atmospheric-Pressure Non-Equilibrium Plasma
- Author(s)
  Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara
- Organizer
  The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW 2014)
- Place of Presentation
  Osaka, Japan
- Year and Date
  2014-11-26 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Formation of Zinc Oxide Films Deposited by Plasma-Assisted Mist CVD for Transparent Conducting Oxide Application
- Author(s)
  Kosuke Takenaka, Giichiro Uchida and Yuichi Setsuhara
- Organizer
  2015 Japan-Korea Joint Symposium on Advanced Solar Cells
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2015-01-09 – 2015-01-10
- Invited
- Data Source
  KAKENHI-PROJECT-26420738
[Presentation] Discharge Characteristics of Atmospheric Pressure Plasma Jet Operated under Various Gas Conditions
- Author(s)
  G. Uchida, K. Kawabata, K. Takenaka and Y. Setsuhara
- Organizer
  第24回日本MRS年次大会
- Place of Presentation
  横浜
- Year and Date
  2014-12-10 – 2014-12-12
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics of Atmospheric RF Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  7th Int. Symp. on Adv. Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-03-26 – 2015-03-30
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] 気液界面を介した大気圧非平衡プラズマと生体分子との相互作用
- Author(s)
  竹中弘祐, 川端一史, 宮崎敦史, 阿部浩也, 内田儀一郎, 節原裕一
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Characteristics and Radical Generation in Dielectric Barrier Discharge
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  14th Int. Conf. on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Data Source
  KAKENHI-PLANNED-24108003
[Presentation] Discharge Properties and Radical-Generation Chracteristics in DBD Plasma Jet
- Author(s)
  G. Uchida, K. Takenaka, K. Kawabata, A. Miyazaki, Y. Setsuhara, K. Takeda, K. Ishikawa and M. Hori
- Organizer
  14th Int. Conf. on Plasma Surface Engineering,
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2014-09-15 – 2014-09-19
- Data Source
  KAKENHI-PLANNED-24108003

1. SETSUHARA Yuichi (80236108)

# of Collaborated Projects: 6 results

# of Collaborated Products: 169 results
2. UCHIDA Giichiro (90422435)

# of Collaborated Projects: 3 results

# of Collaborated Products: 99 results
3. ABE Hiroya (50346136)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
4. 小野亮 (90323443)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 小田哲治 (90107532)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 川崎敏之

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
7. 堀勝

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Takenaka Kosuke 竹中 弘祐

TAKENAKA Kosuke 竹中 弘祐

Research Projects

Research Products

Co-Researchers

Development of 3D nanostructured zinc oxide thin film formation technology with plasma assisted process using microdropletsPrincipal Investigator

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Development of formation technology of high-performance organic material surface by addition of physical and chemical functionalityPrincipal Investigator

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Development of deposition technology of surface nano-structure-controlled ZnO thin films using atmospheric pressure non-equilibrium plasmaPrincipal Investigator

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Development of novel atomic-layer-deposition plasma PVD processes for efficient and high-rate reactive film-formation processes

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Development of low-temperature high-speed deposition method for forming a high-quality zinc oxide thin films using atmospheric pressure non-equilibrium plasmaPrincipal Investigator

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Development of novel plasma sources for plasma medicine through advanced spatio-temporal control of atmospheric-pressure discharge

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Development of novel plasma-enhanced processes for low-temperature formation of high quality oxide semiconductor films

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Development of novel function-controlled inorganic/organic layer-formationtechnology through integrated reaction studies on plasma interactions withnanolayers at surface and interface

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Fabrication of highly-functional polymer surface using very-low-potential plasma and its evaluationPrincipal Investigator

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高周波誘導結合による新しい液中プラズマ生成法の開発と粒子処理プロセスの開拓

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[Journal Article] Control of reactive oxygen and nitrogen species production in liquid by nonthermal plasma jet with controlled surrounding gas2016

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NAID

Data Source

[Journal Article] Process controllability of inductively coupled plasma-enhanced reactive sputter deposition for the fabrication of a-InGaZnOx channel TFTs2016

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Data Source

[Journal Article] Influence of voltage pulse width on the discharge characteristics in an atmospheric dielectric-barrier-discharge plasma jet2016

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DOI

Takenaka Kosuke 竹中弘祐

TAKENAKA Kosuke 竹中弘祐