ITOH Hidenori 伊藤秀範

… Alternative Names

伊藤秀範イトウヒデノリ

Less

Researcher Number	70136282
Other IDs
External Links
Affiliation (based on the past Project Information) *help	1997 – 2001: 室蘭工業大学, 工学部, 教授 1992 – 1993: 室蘭工業大学, 工学部, 助教授 1990: 室蘭工業大学, 工学部, 助教授
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / 機械力学・制御工学 / 電力工学
Keywords	Principal Investigator イメージインテンシファイア / 反応性プラズマ / 画像処理 / 分光診断 / アモルファス・カーボン / モデリング / RFプラズマ / FTIR / Synergism / SF_6 … More / cーC_4F_8 / 絶縁耐力 / 混合ガス / 電子付着 / 電子輸送係数 / 発光プロファイル / 電子衝突断面積 / ボルツマン方程式法 / プラズマ診断 / 発光分光法 / 質量分析法 / 時空分解 / 励起分子 / イメ-ジインテンシファイア / 同時診断 / 周波数依存性 / RF plasma / plasma diagnostics / optical emission spectroscopic method / mass spectrometric method / spatiotemporally resolved profile / excitation molecule / image intensifier / modeling(continue to next page) / 高密度プラズマ / 発光分光 / 質量分析 / FT-IR / 有機シリコン / プラズマリアクタ / 薄膜堆積 / プラズマCVD / SiC膜 / RF プラズマ / Plasma / Optical Emission Spectroscopy / Mass Spectrometry / Organic Silane / Plasma Reactor / Thin Film Deposition / SiC Films Less

Research Projects
(5 results)
Co-Researchers
(3 People)

Deposition of Thin Films Using VHF High-Density Plasmas and In Situ Diagnostics by a Mass Spectrometry, a Spatiotemporally Resolved Optical Emission and an Infrared SpectroscopiesPrincipal Investigator
- Principal Investigator
  
  ITOH Hidenori
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  MURORAN INSTITUTE OF TECHNOLOGY
Diagnostics of Processing Plasmas Using Optical Emission Spectroscopic and Mass Spectrometric MethodsPrincipal Investigator
- Principal Investigator
  
  ITOH Hidenori
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Muroran Institute of Technology
画像処理を用いたプラズマ診断法によるアモルファス・カーボン薄膜生成法の評価と改良Principal Investigator
- Principal Investigator
  
  伊藤秀範
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Muroran Institute of Technology
画像処理を用いたプラズマ診断法によるアモルファス・カーボン薄膜生成法の評価と改良Principal Investigator
- Principal Investigator
  
  伊藤秀範
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学
- Research Institution
  Muroran Institute of Technology
SynergismによるSF_6ガス絶縁の効率化に関する研究Principal Investigator
- Principal Investigator
  
  伊藤秀範
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械力学・制御工学
- Research Institution
  Muroran Institute of Technology

1. SATOH Kohki (50235339)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
2. SHIMOZUMA Mitsuo (70041960)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. TAGASHIRA Hiroaki (10001174)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

ITOH Hidenori 伊藤 秀範

伊藤 秀範 イトウ ヒデノリ

Research Projects

Co-Researchers

Deposition of Thin Films Using VHF High-Density Plasmas and In Situ Diagnostics by a Mass Spectrometry, a Spatiotemporally Resolved Optical Emission and an Infrared SpectroscopiesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Diagnostics of Processing Plasmas Using Optical Emission Spectroscopic and Mass Spectrometric MethodsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

画像処理を用いたプラズマ診断法によるアモルファス・カーボン薄膜生成法の評価と改良Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

画像処理を用いたプラズマ診断法によるアモルファス・カーボン薄膜生成法の評価と改良Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

SynergismによるSF_6ガス絶縁の効率化に関する研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

ITOH Hidenori 伊藤秀範

伊藤秀範イトウヒデノリ