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TAGASHIRA Hiroaki  田頭 博昭

ORCIDConnect your ORCID iD *help
Researcher Number 10001174
External Links
Affiliation (based on the past Project Information) *help 2001: President, 学長
1999 – 2001: 室蘭工業大学, 工学部, 学長
1985 – 1995: 北海道大学, 工学部, 教授
1985: 北海道大学, 工, 教授
Review Section/Research Field
Principal Investigator
電力工学 / 電力工学・電気機器工学 / 応用物理学一般
Except Principal Investigator
電力工学 / 電子材料工学 / Electronic materials/Electric materials / 応用物理学一般(含航海学) / Applied materials / プラズマ理工学
Keywords
Principal Investigator
プラズマプロセス / プラズマモデリング / 衝突断面積 / モンテカルロ法 / ベーパーミスト誘電体 / 混合ガス / Gas Insulation / GIS / 反応性RFプラズマ / プラズマ診断 … More / 電子スオーム / ファインパウダ / 絶縁破壊 / モノシラン / シリル / ダングリングボンド / 交流破壊電圧 / SF_6 / 【SF_6】 / 相乗効果 / 実効電離係数 / 絶縁破壊特性 / Gas Insulated Cubicle / <SF_6> / プラズマシミュレーション / プラズマシミュレ-ション / 電子スオ-ム / SiO_2パウダ / Si_3N_4パウダ / 粒径 / ファン / 散布 / 破壊電圧 / ダイヤモンド構造 / 堆積率 / 水素含有量 / スピン密度 / 膜密度 / 電気的絶縁破壊 / インパルス破壊電圧 / 微粉体絶縁 / ベ-パ-ミスト絶縁 / ベーパーミスト絶縁 / イオン速度分布 / rfプラズマ / 制御 / 電離係数 / TEOS / 地球環境問題 / 高電圧絶縁 / フロン / 50Hz交流 / 雷インパルス / SiO_2 / Si_3N_4 / 反応性rfプラズマ / 絶縁材料 / ファインパウダー / 絶縁ガス / 平等電界 / ガス絶縁材料 / 気体誘電体 / 液体誘電体 / 計算機シミュレーション / 衝突電離 / Vapor-mist Dielectrics / Gaseous Dielectrics / Electrical Insulation / AC Breakdown Voltage / Uniform Electric Field / Fine Powder Dielectrics / スゥオーム / 電子スゥオーム / イオンスゥオーム / 解離 / 電子エネルギー分布 / 誘導結合プラズマ / プラズマディスプレイ / 気体エレクトロニクス / イオンスオーム / クーロン相互作用 / 緩和現象 / rf非平衡プラズマ / 電子衝突断面積 / 電子衝突 / 原子衝突 / 運動量移行断面積 / 電子-電子衝突 / 過渡特性 / 緩和特性 / Swarm / Electron Swarm / Ion swarm / Collision Crosssection / Dissociation / Plasma Display / ICP Plasma / Electron Energy Distribution / 空気 / GIC / Gas Insulated Switchgear / Air / <SF_6> and Air Gas Mixtures / Breakdown Voltage / ガス絶縁 / ガス絶縁キュービクル / フロロカーボン / c-GIS / 電子付着係数 / Gas Mixtures / Vapor-Mist Dielectrics / Synergism / 電気絶縁耐力 / 誘電液体 / 微粒子計測 / パルス波高分布分析 / 微粒径計測 / vapor-mist dielectric / dielectric strength / dielectric liquids / fine particle measurement … More
Except Principal Investigator
プラズマCVD / プラズマプロセシング / 反応性プラズマ / プラズマの制御 / 低周波プラズマ / 表面保護膜 / 薄膜堆積 / ドライプロセス / 二酸化窒素 / 放電分解 / 電離係数 / 電子付着係数 / シリコン酸化膜 / 集積回路ドライプロセス / 薄膜生成 / プラズマプロセス / Plasma CVD / Low frequency plasma / Low temperature process / LID / TEOS / 低温プロセス / 非平衡プラズマ / 層間絶縁膜 / Thin film deposition / FTIR / シース / プラズマ・固体相互作用 / プラズマ・表面相互作用 / シ-ス / プラズマ、固体相互作用 / プラズマ、表面相互作用 / SiH_4+N_2O / 50HzプラズマCVD / 非加熱薄膜堆積 / 表面硬質 / 代替ガラス / ポリマー / SiOx膜 / SiH_4 / GaAs / TiN / 集積回路 / 拡散バリア材 / 微細加工 / プロセシングプラズマ / 液体エキシマレーザ / レーザ光励起 / 希ガス液体 / 電子注入 / アルゴンフッ素混合液体 / パルスパワ- / エネルギ-圧縮用コンデンサ- / 過冷却 / 水 / 親水性ゲル / 誘電体 / 誘電率 / 水コンデンサ- / 過冷却水 / 凍結温度 / スペ-サ効果 / 電場・磁場効果 / Pulse Power / Condenser For Energy Compression / Supercooling / Water / Hydrophilic Gell / Dielectric Material / Dielectric Constant / 気体エレクトロニクス / 半導体IC / 太陽電池 / 気体レ-ザ- / 画像ディスプレイ / 大気環境問題 / プラズマコ-ティング / 放電 / 地球環境問題 / 放射線科学 / gaseous electronics / integrated circuit / plasma coating / electrical discharge / environmental problem / radiation physics / 低周波プラズマCVD法 / CH_4+H_2混合ガス / アモルファスカ-ボン膜 / ダイヤモンド薄膜 / 半導体低温プロセス / RFプラズマCVD法 / 13.56MHzRFプラズマCVD法 / プラズマ解離 / SiH_4+N_2混合ガス / アモルファスカ-ボン薄膜 / Amorphous carbon / Chemical vapor deposition / Diamond thin film / H_2+CH_4 mixture / Passivation film / グロー放電 / 紫外線分解 / コロナ放電 / Nitrogen-dioxide / Decomposition by discharge / lonization coefficient / Glow discharge / Electron attachment coefficient / Decomposition by UV / 50HzプラズマCVD法 / TEOS+O_2 / Plasma (CVD) / Silicon oxide film / Integrated circuit process / Unequilibrium plasma / エキシマ / ランプ / 真空紫外光 / モデリング / レーザ分光診断 / excimer / lamp / vacuum-ultra-violet-light / modeling / laser-spectroscopy / non-equilibrium plasma / 高密度プラズマ / 発光分光 / 質量分析 / FT-IR / 有機シリコン / プラズマリアクタ / RFプラズマ / SiC膜 / RF プラズマ / Plasma / Optical Emission Spectroscopy / Mass Spectrometry / Organic Silane / Plasma Reactor / Thin Film Deposition / SiC Films / 低周波 / デポジション / シリコン窒化膜 / 室温プロセス / 絶縁薄膜 / シラン窒素混合ガス / 最終保護膜 / Silicon nitride / Low frequency(50Hz) / Low temterature process / Interiayer insulation / Device surface passivation Less
  • Research Projects

    (32 results)
  • Co-Researchers

    (39 People)
  •  Deposition of Thin Films Using VHF High-Density Plasmas and In Situ Diagnostics by a Mass Spectrometry, a Spatiotemporally Resolved Optical Emission and an Infrared Spectroscopies

    • Principal Investigator
      ITOH Hidenori
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      MURORAN INSTITUTE OF TECHNOLOGY
  •  地球環境問題を考慮した高電圧電力機器絶縁に関する基礎的研究Principal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学・電気機器工学
    • Research Institution
      Hokkaido University
  •  プラズマCVD法による微細トレンチ内壁へのTiN膜低温形成基礎研究

    • Principal Investigator
      下妻 光夫
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Hokkaido University
  •  Study on Optimization of Barrier Discharge Excimer-Lamp

    • Principal Investigator
      SAKAI Yosuke
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      HOKKAIDO UNIVERSITY
  •  プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究Principal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  50HzプラズマCVDによるSiOx膜のGaAs表面保護膜低温形成基礎研究

    • Principal Investigator
      下妻 光夫
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Hokkaido University
  •  プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究Principal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  高電圧電力機器絶縁に関する基礎的研究Principal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電力工学・電気機器工学
    • Research Institution
      Hokkaido University
  •  微粉体誘電体による気体(SF_6、空気)の絶縁耐力上昇機構に関する研究Principal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1992
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  低周波プラズマCVD法によるポリマー上へのSi0x膜低温堆積に関する基礎研究

    • Principal Investigator
      下妻 光夫
    • Project Period (FY)
      1992
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電子材料工学
    • Research Institution
      Hokkaido University
  •  MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONSPrincipal Investigator

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      応用物理学一般
    • Research Institution
      HOKKAIDO UNIVERSITY
  •  Fundamental Studies on LID Concentration and Discharge Decomposition of Nitrogen-Dioxide

    • Principal Investigator
      SAKAI Yosuke
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電力工学
    • Research Institution
      Faculty of Engineering, Hokkaido University
  •  Development of Low Temperature Deposition Process of Silicon Oxide Film by Low Frequency Plasma CVD (TEOS+O_2)

    • Principal Investigator
      DATE Hiroyuki, 下妻 光夫
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      応用物理学一般(含航海学)
    • Research Institution
      Hokkaido University
  •  反応性プラズマの制御(とりまとめ)

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  プロセス用プラズマのシース

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1991 – 1993
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      Applied materials
    • Research Institution
      Niihama National College of Technology
      Kyoto University
  •  コロナ放電による窒素酸化物の分解に関する基礎研究

    • Principal Investigator
      SAKAI Yosuke
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  反応性非平衡プラズマのモデリングPrincipal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  Gaseous Electronics - Fundamental Processes and Its Applications

    • Principal Investigator
      HAYASHI Makoto
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      応用物理学一般(含航海学)
    • Research Institution
      Nagoya Institute of Technology
  •  Development of Low Temperature Deposition Process of Carbon Thin Film by Low Frequency 50Hz Plasma CVD.

    • Principal Investigator
      SHIMOZUMA Mitsuo
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      College of Medical Technology, Hokkaido University
  •  反応性非平衝プラズマのモデリングPrincipal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  Mechanism of Increase of Dielectric Strength of Gaseous Dielectics by Vapor MistPrincipal Investigator

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  Studies on Production of Supercooling State and Electrical Properties of Water Condenser for Energy Compression

    • Principal Investigator
      SAKAI Yosuke
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  反応性非平衡プラズマのモデリングPrincipal Investigator

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1987
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Institution
      Kyoto University
  •  小型・高出力希ガス液体エキシマレーザの基礎研究

    • Principal Investigator
      酒井 洋輔
    • Project Period (FY)
      1987
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  Fundamental Research of Vapor-Mist Dielectrics for Insulation of Electric Power ApparatusPrincipal Investigator

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電力工学
    • Research Institution
      HOKKAIDO UNIVERSITY
  •  Deveiopment of Room Temperature Deposition Process of Silicon Nitride Film by Low Frequency Plasma CVD.

    • Principal Investigator
      SHIMOZUMA Mitsuo
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子材料工学
    • Research Institution
      College of Medical Technology, Hokkaido University
  •  STUDY OF ELECTRICAL INSULATION CONDITION FOR GAS INSULATED CUBICLE (C-GIS) BY <SF_6> AND FLUOROCABON MIXTURESPrincipal Investigator

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  •  Study on Insulation Condition of <SF_6> Gas Insulated Cubicle (GIC)Principal Investigator

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1983 – 1985
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電力工学
    • Research Institution
      Hokkaido University
  • 1.  SAKAI Yosuke (20002199)
    # of Collaborated Projects: 14 results
    # of Collaborated Products: 0 results
  • 2.  SHIMOZUMA Mitsuo (70041960)
    # of Collaborated Projects: 14 results
    # of Collaborated Products: 0 results
  • 3.  HATANO Yoshihiko (90016121)
    # of Collaborated Projects: 8 results
    # of Collaborated Products: 0 results
  • 4.  SUGAWARA Hirotake (90241356)
    # of Collaborated Projects: 7 results
    # of Collaborated Products: 0 results
  • 5.  SATO Nobuyasu (20001290)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 6.  KANEKO Yoshimatsu (90001271)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 7.  板谷 良平 (90025833)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 8.  後藤 俊夫 (50023255)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 9.  DATE Hiroaki (10197600)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 10.  MAKABE Toshiaki (60095651)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 11.  広瀬 全孝 (10034406)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 12.  IKUTA Nobuaki (30035802)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 13.  VENTZEK Peter (80261329)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 14.  OHNO Hideo (00152215)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 15.  中村 義春 (90051763)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 16.  北守 一隆 (40153134)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 17.  菅野 卓雄 (50010707)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 18.  SATOH Takashi (90048025)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 19.  HAYASHI Makoto (40024179)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 20.  TACHIBANA Kunihide (40027925)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 21.  FUJIMOTO Takashi (90026203)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 22.  横澤 亜由美
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 23.  TAKEBE Masahiro (30005392)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  TABATA Masayoshi (50091476)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  ITOH Hidenori (70136282)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  SATOH Kohki (50235339)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  堀池 靖浩 (20209274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  佐藤 徳芳 (40005252)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  山本 徹 (80261361)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  諸隈 之彦 (60051611)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 31.  土手 敏彦 (20087422)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 32.  近藤 敬一 (10043978)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 33.  沢田 孝幸 (40113568)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 34.  IGARASHI Tatsusi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 35.  OHMORI Yoshiyuki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 36.  中神 芳武
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 37.  中村 聡
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 38.  鈴木 敬三
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 39.  小川 岩雄
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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この研究者とORCID iDの連携を行いますか?
※ この処理は、研究者本人だけが実行できます。

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