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TAGASHIRA Hiroaki
田頭 博昭
Connect your ORCID iD
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Researcher Number
10001174
External Links
Affiliation (based on the past Project Information)
*help
2001: President, 学長
1999 – 2001: 室蘭工業大学, 工学部, 学長
1985 – 1995: 北海道大学, 工学部, 教授
1985: 北海道大学, 工, 教授
Review Section/Research Field
Principal Investigator
電力工学
/
電力工学・電気機器工学
/
応用物理学一般
Except Principal Investigator
電力工学
/
電子材料工学
/
Electronic materials/Electric materials
/
応用物理学一般(含航海学)
/
Applied materials
/
プラズマ理工学
Keywords
Principal Investigator
プラズマプロセス / プラズマモデリング / 衝突断面積 / モンテカルロ法 / ベーパーミスト誘電体 / 混合ガス / Gas Insulation / GIS / 反応性RFプラズマ / プラズマ診断
…
More
/ 電子スオーム / ファインパウダ / 絶縁破壊 / モノシラン / シリル / ダングリングボンド / 交流破壊電圧 / SF_6 / 【SF_6】 / 相乗効果 / 実効電離係数 / 絶縁破壊特性 / Gas Insulated Cubicle / <SF_6> / プラズマシミュレーション / プラズマシミュレ-ション / 電子スオ-ム / SiO_2パウダ / Si_3N_4パウダ / 粒径 / ファン / 散布 / 破壊電圧 / ダイヤモンド構造 / 堆積率 / 水素含有量 / スピン密度 / 膜密度 / 電気的絶縁破壊 / インパルス破壊電圧 / 微粉体絶縁 / ベ-パ-ミスト絶縁 / ベーパーミスト絶縁 / イオン速度分布 / rfプラズマ / 制御 / 電離係数 / TEOS / 地球環境問題 / 高電圧絶縁 / フロン / 50Hz交流 / 雷インパルス / SiO_2 / Si_3N_4 / 反応性rfプラズマ / 絶縁材料 / ファインパウダー / 絶縁ガス / 平等電界 / ガス絶縁材料 / 気体誘電体 / 液体誘電体 / 計算機シミュレーション / 衝突電離 / Vapor-mist Dielectrics / Gaseous Dielectrics / Electrical Insulation / AC Breakdown Voltage / Uniform Electric Field / Fine Powder Dielectrics / スゥオーム / 電子スゥオーム / イオンスゥオーム / 解離 / 電子エネルギー分布 / 誘導結合プラズマ / プラズマディスプレイ / 気体エレクトロニクス / イオンスオーム / クーロン相互作用 / 緩和現象 / rf非平衡プラズマ / 電子衝突断面積 / 電子衝突 / 原子衝突 / 運動量移行断面積 / 電子-電子衝突 / 過渡特性 / 緩和特性 / Swarm / Electron Swarm / Ion swarm / Collision Crosssection / Dissociation / Plasma Display / ICP Plasma / Electron Energy Distribution / 空気 / GIC / Gas Insulated Switchgear / Air / <SF_6> and Air Gas Mixtures / Breakdown Voltage / ガス絶縁 / ガス絶縁キュービクル / フロロカーボン / c-GIS / 電子付着係数 / Gas Mixtures / Vapor-Mist Dielectrics / Synergism / 電気絶縁耐力 / 誘電液体 / 微粒子計測 / パルス波高分布分析 / 微粒径計測 / vapor-mist dielectric / dielectric strength / dielectric liquids / fine particle measurement
…
More
Except Principal Investigator
プラズマCVD / プラズマプロセシング / 反応性プラズマ / プラズマの制御 / 低周波プラズマ / 表面保護膜 / 薄膜堆積 / ドライプロセス / 二酸化窒素 / 放電分解 / 電離係数 / 電子付着係数 / シリコン酸化膜 / 集積回路ドライプロセス / 薄膜生成 / プラズマプロセス / Plasma CVD / Low frequency plasma / Low temperature process / LID / TEOS / 低温プロセス / 非平衡プラズマ / 層間絶縁膜 / Thin film deposition / FTIR / シース / プラズマ・固体相互作用 / プラズマ・表面相互作用 / シ-ス / プラズマ、固体相互作用 / プラズマ、表面相互作用 / SiH_4+N_2O / 50HzプラズマCVD / 非加熱薄膜堆積 / 表面硬質 / 代替ガラス / ポリマー / SiOx膜 / SiH_4 / GaAs / TiN / 集積回路 / 拡散バリア材 / 微細加工 / プロセシングプラズマ / 液体エキシマレーザ / レーザ光励起 / 希ガス液体 / 電子注入 / アルゴンフッ素混合液体 / パルスパワ- / エネルギ-圧縮用コンデンサ- / 過冷却 / 水 / 親水性ゲル / 誘電体 / 誘電率 / 水コンデンサ- / 過冷却水 / 凍結温度 / スペ-サ効果 / 電場・磁場効果 / Pulse Power / Condenser For Energy Compression / Supercooling / Water / Hydrophilic Gell / Dielectric Material / Dielectric Constant / 気体エレクトロニクス / 半導体IC / 太陽電池 / 気体レ-ザ- / 画像ディスプレイ / 大気環境問題 / プラズマコ-ティング / 放電 / 地球環境問題 / 放射線科学 / gaseous electronics / integrated circuit / plasma coating / electrical discharge / environmental problem / radiation physics / 低周波プラズマCVD法 / CH_4+H_2混合ガス / アモルファスカ-ボン膜 / ダイヤモンド薄膜 / 半導体低温プロセス / RFプラズマCVD法 / 13.56MHzRFプラズマCVD法 / プラズマ解離 / SiH_4+N_2混合ガス / アモルファスカ-ボン薄膜 / Amorphous carbon / Chemical vapor deposition / Diamond thin film / H_2+CH_4 mixture / Passivation film / グロー放電 / 紫外線分解 / コロナ放電 / Nitrogen-dioxide / Decomposition by discharge / lonization coefficient / Glow discharge / Electron attachment coefficient / Decomposition by UV / 50HzプラズマCVD法 / TEOS+O_2 / Plasma (CVD) / Silicon oxide film / Integrated circuit process / Unequilibrium plasma / エキシマ / ランプ / 真空紫外光 / モデリング / レーザ分光診断 / excimer / lamp / vacuum-ultra-violet-light / modeling / laser-spectroscopy / non-equilibrium plasma / 高密度プラズマ / 発光分光 / 質量分析 / FT-IR / 有機シリコン / プラズマリアクタ / RFプラズマ / SiC膜 / RF プラズマ / Plasma / Optical Emission Spectroscopy / Mass Spectrometry / Organic Silane / Plasma Reactor / Thin Film Deposition / SiC Films / 低周波 / デポジション / シリコン窒化膜 / 室温プロセス / 絶縁薄膜 / シラン窒素混合ガス / 最終保護膜 / Silicon nitride / Low frequency(50Hz) / Low temterature process / Interiayer insulation / Device surface passivation
Less
Research Projects
(
32
results)
Co-Researchers
(
39
People)
Project Start Year (Newest)
Project Start Year (Oldest)
Deposition of Thin Films Using VHF High-Density Plasmas and In Situ Diagnostics by a Mass Spectrometry, a Spatiotemporally Resolved Optical Emission and an Infrared Spectroscopies
Principal Investigator
ITOH Hidenori
Project Period (FY)
1999 – 2001
Research Category
Grant-in-Aid for Scientific Research (B)
Research Field
Electronic materials/Electric materials
Research Institution
MURORAN INSTITUTE OF TECHNOLOGY
地球環境問題を考慮した高電圧電力機器絶縁に関する基礎的研究
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1995
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電力工学・電気機器工学
Research Institution
Hokkaido University
プラズマCVD法による微細トレンチ内壁へのTiN膜低温形成基礎研究
Principal Investigator
下妻 光夫
Project Period (FY)
1995
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Electronic materials/Electric materials
Research Institution
Hokkaido University
Study on Optimization of Barrier Discharge Excimer-Lamp
Principal Investigator
SAKAI Yosuke
Project Period (FY)
1995 – 1996
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
プラズマ理工学
Research Institution
HOKKAIDO UNIVERSITY
プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1994
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
50HzプラズマCVDによるSiOx膜のGaAs表面保護膜低温形成基礎研究
Principal Investigator
下妻 光夫
Project Period (FY)
1994
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Electronic materials/Electric materials
Research Institution
Hokkaido University
プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1993
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
高電圧電力機器絶縁に関する基礎的研究
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1993 – 1994
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電力工学・電気機器工学
Research Institution
Hokkaido University
微粉体誘電体による気体(SF_6、空気)の絶縁耐力上昇機構に関する研究
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電力工学
Research Institution
Hokkaido University
低周波プラズマCVD法によるポリマー上へのSi0x膜低温堆積に関する基礎研究
Principal Investigator
下妻 光夫
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Hokkaido University
MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS
Principal Investigator
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for Co-operative Research (A)
Research Field
応用物理学一般
Research Institution
HOKKAIDO UNIVERSITY
Fundamental Studies on LID Concentration and Discharge Decomposition of Nitrogen-Dioxide
Principal Investigator
SAKAI Yosuke
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電力工学
Research Institution
Faculty of Engineering, Hokkaido University
Development of Low Temperature Deposition Process of Silicon Oxide Film by Low Frequency Plasma CVD (TEOS+O_2)
Principal Investigator
DATE Hiroyuki
,
下妻 光夫
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
応用物理学一般(含航海学)
Research Institution
Hokkaido University
反応性プラズマの制御(とりまとめ)
Principal Investigator
板谷 良平
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
プロセス用プラズマのシース
Principal Investigator
板谷 良平
Project Period (FY)
1991 – 1993
Research Category
Grant-in-Aid for Co-operative Research (A)
Research Field
Applied materials
Research Institution
Niihama National College of Technology
Kyoto University
コロナ放電による窒素酸化物の分解に関する基礎研究
Principal Investigator
SAKAI Yosuke
Project Period (FY)
1991
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電力工学
Research Institution
Hokkaido University
反応性非平衡プラズマのモデリング
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
反応性プラズマの制御
Principal Investigator
板谷 良平
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Gaseous Electronics - Fundamental Processes and Its Applications
Principal Investigator
HAYASHI Makoto
Project Period (FY)
1990 – 1991
Research Category
Grant-in-Aid for Co-operative Research (A)
Research Field
応用物理学一般(含航海学)
Research Institution
Nagoya Institute of Technology
Development of Low Temperature Deposition Process of Carbon Thin Film by Low Frequency 50Hz Plasma CVD.
Principal Investigator
SHIMOZUMA Mitsuo
Project Period (FY)
1990 – 1991
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子材料工学
Research Institution
College of Medical Technology, Hokkaido University
反応性非平衝プラズマのモデリング
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
反応性プラズマの制御
Principal Investigator
板谷 良平
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Mechanism of Increase of Dielectric Strength of Gaseous Dielectics by Vapor Mist
Principal Investigator
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電力工学
Research Institution
Hokkaido University
Studies on Production of Supercooling State and Electrical Properties of Water Condenser for Energy Compression
Principal Investigator
SAKAI Yosuke
Project Period (FY)
1989 – 1990
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電力工学
Research Institution
Hokkaido University
反応性非平衡プラズマのモデリング
Principal Investigator
Principal Investigator
田頭 博昭
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
反応性プラズマの制御
Principal Investigator
板谷 良平
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応性プラズマの制御
Principal Investigator
板谷 良平
Project Period (FY)
1987
Research Category
Grant-in-Aid for Co-operative Research (B)
Research Institution
Kyoto University
小型・高出力希ガス液体エキシマレーザの基礎研究
Principal Investigator
酒井 洋輔
Project Period (FY)
1987
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電力工学
Research Institution
Hokkaido University
Fundamental Research of Vapor-Mist Dielectrics for Insulation of Electric Power Apparatus
Principal Investigator
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電力工学
Research Institution
HOKKAIDO UNIVERSITY
Deveiopment of Room Temperature Deposition Process of Silicon Nitride Film by Low Frequency Plasma CVD.
Principal Investigator
SHIMOZUMA Mitsuo
Project Period (FY)
1986 – 1987
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電子材料工学
Research Institution
College of Medical Technology, Hokkaido University
STUDY OF ELECTRICAL INSULATION CONDITION FOR GAS INSULATED CUBICLE (C-GIS) BY <SF_6> AND FLUOROCABON MIXTURES
Principal Investigator
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1985 – 1986
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電力工学
Research Institution
Hokkaido University
Study on Insulation Condition of <SF_6> Gas Insulated Cubicle (GIC)
Principal Investigator
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1983 – 1985
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電力工学
Research Institution
Hokkaido University
# of Projects (Dsc)
# of Projects (Asc)
1.
SAKAI Yosuke
(20002199)
# of Collaborated Projects:
14 results
# of Collaborated Products:
0 results
2.
SHIMOZUMA Mitsuo
(70041960)
# of Collaborated Projects:
14 results
# of Collaborated Products:
0 results
3.
HATANO Yoshihiko
(90016121)
# of Collaborated Projects:
8 results
# of Collaborated Products:
0 results
4.
SUGAWARA Hirotake
(90241356)
# of Collaborated Projects:
7 results
# of Collaborated Products:
0 results
5.
SATO Nobuyasu
(20001290)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
6.
KANEKO Yoshimatsu
(90001271)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
7.
板谷 良平
(90025833)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
8.
後藤 俊夫
(50023255)
# of Collaborated Projects:
6 results
# of Collaborated Products:
0 results
9.
DATE Hiroaki
(10197600)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
10.
MAKABE Toshiaki
(60095651)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
11.
広瀬 全孝
(10034406)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
12.
IKUTA Nobuaki
(30035802)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
13.
VENTZEK Peter
(80261329)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
14.
OHNO Hideo
(00152215)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
15.
中村 義春
(90051763)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
16.
北守 一隆
(40153134)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
17.
菅野 卓雄
(50010707)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
18.
SATOH Takashi
(90048025)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
19.
HAYASHI Makoto
(40024179)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
20.
TACHIBANA Kunihide
(40027925)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
21.
FUJIMOTO Takashi
(90026203)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
22.
横澤 亜由美
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
23.
TAKEBE Masahiro
(30005392)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
24.
TABATA Masayoshi
(50091476)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
25.
ITOH Hidenori
(70136282)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
26.
SATOH Kohki
(50235339)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
27.
堀池 靖浩
(20209274)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
28.
佐藤 徳芳
(40005252)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
29.
山本 徹
(80261361)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
30.
諸隈 之彦
(60051611)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
31.
土手 敏彦
(20087422)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
32.
近藤 敬一
(10043978)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
33.
沢田 孝幸
(40113568)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
34.
IGARASHI Tatsusi
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
35.
OHMORI Yoshiyuki
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
36.
中神 芳武
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
37.
中村 聡
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
38.
鈴木 敬三
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
39.
小川 岩雄
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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