NAKAMURA Yoshiharu 中村義春

Researcher Number	90051763
Affiliation (based on the past Project Information) *help	1994: Keio Univ., Dept.of Elec.Eng., Asso.Prof., 理工学部, 教授 1994: 慶應義塾大学, 理工学部, 教授 1993: 慶応義塾大学, 理工学部, 助教授 1993: 慶応義塾大学, 理工学部, 教授 1989 – 1990: 慶応大学, 理工学部, 助教授 … More 1988: 慶應義塾大学, 理工学部, 助教授 1988: KEIO UNIVERSITY, 理工学部, 助教授 1987 – 1988: 慶応義塾大学, 理工学部, 助教授 Less
Review Section/Research Field	Except Principal Investigator 応用物理学一般 / 表面界面物性 / 電子機器工学
Keywords	Principal Investigator 電子スオーム研究 / モノシラン / 電子輸送係数 Except Principal Investigator プラズマプロセス / 衝突断面積 / 反応性RFプラズマ / プラズマモデリング / プラズマ診断 / 電子スオーム / モンテカルロ法 … More / プラズマシミュレーション / プラズマシミュレ-ション / 電子スオ-ム / スゥオーム / 電子スゥオーム / イオンスゥオーム / 解離 / 電子エネルギー分布 / 誘導結合プラズマ / プラズマディスプレイ / 気体エレクトロニクス / イオンスオーム / クーロン相互作用 / 緩和現象 / rf非平衡プラズマ / 電子衝突断面積 / 電子衝突 / 原子衝突 / 運動量移行断面積 / 電子-電子衝突 / 過渡特性 / 緩和特性 / Swarm / Electron Swarm / Ion swarm / Collision Crosssection / Dissociation / Plasma Display / ICP Plasma / Electron Energy Distribution / ドライエッチング / 狭ギャップ・RIE / VHPプラズマ / 非平衡プラズマ / モデリング / 微粒子成長 / rfプラズマ / VHFプラズマ / 狭ギャップRIE / Dry etching / Plasma processing / Narrow gap RIE / VHF plasma / Non-equilibrium plasma / Modeling / Particle growth / RF plasma / 紫外光源 / 真空紫外光源 / エキシマ / フラッシュランプ / パルス放電 / マイクロ波放電 / EXCIMER / MICROWAVE DISCHARGE / ULTRVIOLET LIGHT SOURCE / VACUUM ULTRVIOLET LIGHT SOURCE Less

Research Projects
(6 results)
Co-Researchers
(15 People)

Physics and Optimum Control of the Next Stage VHF Narrow gap Reactive Ion Etcher
- Principal Investigator
  
  MAKABE Toshihaki
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Keio University
MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS
- Principal Investigator
  
  TAGASHIRA Hiroaki
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  応用物理学一般
- Research Institution
  HOKKAIDO UNIVERSITY
反応性非平衡プラズマのモデリング
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
反応性非平衝プラズマのモデリング
- Principal Investigator
  
  TAGASHIRA Hiroaki
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
電子スオーム法による半導体製造ガス分子の電子衝突断面積の決定Principal Investigator
- Principal Investigator
  
  中村義春
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Keio University
DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)
- Principal Investigator
  
  OBARA Minoru
- Project Period (FY)
  1987 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電子機器工学
- Research Institution
  KEIO UNIVERSITY

1. MAKABE Toshiaki (60095651)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
2. TAGASHIRA Hiroaki (10001174)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. 生田信皓 (30035802)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. OBARA Minoru (90101998)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 北守一隆 (40153134)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. 佐藤信安 (20001290)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. FUJIMOTO Takashi (90026203)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. TACHIBANA Kunihide (40027925)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. HATANO Yoshihiko (90016121)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. TAKEBE Masahiro (30005392)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. KANNARI Fumihiko (40204804)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. NOGUCHI Akira (90051648)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 林眞 (40024179)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 近藤敬一 (10043978)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. YAMAGUCHI Yukio

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

NAKAMURA Yoshiharu 中村 義春

Research Projects

Co-Researchers

Physics and Optimum Control of the Next Stage VHF Narrow gap Reactive Ion Etcher

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

反応性非平衡プラズマのモデリング

Principal Investigator

Project Period (FY)

Research Category

Research Institution

反応性非平衝プラズマのモデリング

Principal Investigator

Project Period (FY)

Research Category

Research Institution

電子スオーム法による半導体製造ガス分子の電子衝突断面積の決定Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

NAKAMURA Yoshiharu 中村義春