メニュー
Search
Search Research Projects
Search Researchers
How to Use
Japanese
English
Back to previous page
NAKAMURA Yoshiharu
中村 義春
Connect your ORCID iD
*help
Researcher Number
90051763
Affiliation (based on the past Project Information)
*help
1994: Keio Univ., Dept.of Elec.Eng., Asso.Prof., 理工学部, 教授
1994: 慶應義塾大学, 理工学部, 教授
1993: 慶応義塾大学, 理工学部, 助教授
1993: 慶応義塾大学, 理工学部, 教授
1989 – 1990: 慶応大学, 理工学部, 助教授
…
More
1988: 慶應義塾大学, 理工学部, 助教授
1988: KEIO UNIVERSITY, 理工学部, 助教授
1987 – 1988: 慶応義塾大学, 理工学部, 助教授
Less
Review Section/Research Field
Except Principal Investigator
応用物理学一般
/
表面界面物性
/
電子機器工学
Keywords
Principal Investigator
電子スオーム研究 / モノシラン / 電子輸送係数
Except Principal Investigator
プラズマプロセス / 衝突断面積 / 反応性RFプラズマ / プラズマモデリング / プラズマ診断 / 電子スオーム / モンテカルロ法
…
More
/ プラズマシミュレーション / プラズマシミュレ-ション / 電子スオ-ム / スゥオーム / 電子スゥオーム / イオンスゥオーム / 解離 / 電子エネルギー分布 / 誘導結合プラズマ / プラズマディスプレイ / 気体エレクトロニクス / イオンスオーム / クーロン相互作用 / 緩和現象 / rf非平衡プラズマ / 電子衝突断面積 / 電子衝突 / 原子衝突 / 運動量移行断面積 / 電子-電子衝突 / 過渡特性 / 緩和特性 / Swarm / Electron Swarm / Ion swarm / Collision Crosssection / Dissociation / Plasma Display / ICP Plasma / Electron Energy Distribution / ドライエッチング / 狭ギャップ・RIE / VHPプラズマ / 非平衡プラズマ / モデリング / 微粒子成長 / rfプラズマ / VHFプラズマ / 狭ギャップRIE / Dry etching / Plasma processing / Narrow gap RIE / VHF plasma / Non-equilibrium plasma / Modeling / Particle growth / RF plasma / 紫外光源 / 真空紫外光源 / エキシマ / フラッシュランプ / パルス放電 / マイクロ波放電 / EXCIMER / MICROWAVE DISCHARGE / ULTRVIOLET LIGHT SOURCE / VACUUM ULTRVIOLET LIGHT SOURCE
Less
Research Projects
(
6
results)
Co-Researchers
(
15
People)
Project Start Year (Newest)
Project Start Year (Oldest)
Physics and Optimum Control of the Next Stage VHF Narrow gap Reactive Ion Etcher
Principal Investigator
MAKABE Toshihaki
Project Period (FY)
1993 – 1994
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
表面界面物性
Research Institution
Keio University
MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for Co-operative Research (A)
Research Field
応用物理学一般
Research Institution
HOKKAIDO UNIVERSITY
反応性非平衡プラズマのモデリング
Principal Investigator
田頭 博昭
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
反応性非平衝プラズマのモデリング
Principal Investigator
TAGASHIRA Hiroaki
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Hokkaido University
電子スオーム法による半導体製造ガス分子の電子衝突断面積の決定
Principal Investigator
Principal Investigator
中村 義春
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Keio University
DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)
Principal Investigator
OBARA Minoru
Project Period (FY)
1987 – 1988
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
KEIO UNIVERSITY
# of Projects (Dsc)
# of Projects (Asc)
1.
MAKABE Toshiaki
(60095651)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
2.
TAGASHIRA Hiroaki
(10001174)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
3.
生田 信皓
(30035802)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
4.
OBARA Minoru
(90101998)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
5.
北守 一隆
(40153134)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
6.
佐藤 信安
(20001290)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
7.
FUJIMOTO Takashi
(90026203)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
8.
TACHIBANA Kunihide
(40027925)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
9.
HATANO Yoshihiko
(90016121)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
10.
TAKEBE Masahiro
(30005392)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
11.
KANNARI Fumihiko
(40204804)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
12.
NOGUCHI Akira
(90051648)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
13.
林 眞
(40024179)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
14.
近藤 敬一
(10043978)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
15.
YAMAGUCHI Yukio
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
×
Are you sure that you want to connect your ORCID iD to this researcher?
* This action can be performed only by the researcher themselves.
この研究者とORCID iDの連携を行いますか?
※ この処理は、研究者本人だけが実行できます。
×
×