HORIIKE Yasuhiro 堀池靖浩

… Alternative Names

Researcher Number	20209274
External Links
Affiliation (Current)	2018 : 国立研究開発法人物質・材料研究機構, その他部局等, その他
Affiliation (based on the past Project Information) *help	2003 – 2004 : 独立行政法人物質・材料研究機構, 生体材料研究センター, フェロー 1998 – 2002 : University of Tokyo, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 1998 – 2002 : Univ. of Tokyo, School of Engineering, Professor, 大学院・工学系研究科, 教授 1993 – 1997 : Tokyo University, Electrical Engineering, Professor, 工学部, 教授 1988 – 1993 : 広島大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Material processing/treatments / Science and Engineering / Biomedical engineering/Biological material science / 表面界面物性 Except Principal Investigator Electronic materials/Electric materials / 複合化集積システム / 表面界面物性 / Applied materials / 電子材料工学 / プラズマ理工学
Keywords	Principal Investigator デジタルエッチング / 自己停止反応 / ヘルスケアチップ / 表面反応 / 低エネルギエッチング / 無損傷化 / SiGe / ISFET / フッ素ラジカル / 電気浸透流ポンプ … More Except Principal Investigator 吸着ラジカル / 表面反応 / 質量分析 / STM / 接触抵抗 / エレクトロマイグレーション / 界面反応 / 結晶粒界 / デジタルエッチング / 光励起脱離 / レーザ誘起光化学反応 / 走査トンネル顕微鏡 / 金属ー半導体界面 / SEM / 精密制御技術 / ボイド / ECRスパッタ / 抵抗振動 / プラズマ / 塩素吸着シリコン表面 / 自己維持スパッタ / 共鳴2光子イオン化 / マイクロ波プラズマ / SOR光エッチング / 表面偏析 / 振動 / デジタルCVD / Intelligent Information Processing / 血液検査 / elctromigration / 局所性・非局所性評価 / マイクロロ-ディング / ヘルスケアチップ / Hillock / ポリマー被覆 / 誘電泳動力 / Al Interconnect / 超高濃度ド-ピング / 非線型 / 分子動力学計算 / void / アルミニウム / 紫外レーザー / 射出成型 / 光CVD / 化合物半導体 / ヒロック / シ-ス / アーキテクチャ / 材料 / sustained self-sputtering / 知能エレクトロニクス / 不純物ド-ピング / Resistance Oscillation / 単結晶Si異方性エッチング / ボイド移動 / Nonlinear / 集積化 / healthcare chip / 冷却プラズマCVD / システム / grain boundary / deep glass etching / 価電子励起に伴う表面反応 / プラズマ、固体相互作用 / イオン / 結晶粒界拡散 / in-situ SEM observation / シース / シリコン集積回路 / マイクロ流体デバイス / ラジカルによる膜成長表面反応 / 界面電気伝導 / マイクロTAS / microfluidics / 細胞分析 / 知能情報処理 / Ultimate Material and Process / 細胞免疫電気泳動 / Intelligent electronic systems / blood test / 知的電子システム / 抵抗振動現象 / ディープガラスエッチング / ion plating / ECR sputtering / Crドライエッチング / 回路 / プラズマ・固体相互作用 / 表面吸着構造敏感 / Dislocation / 誘電泳動 / コンタクト埋め込み / cell electrophoresis / 半導体プロセス / 分数波共鳴 / radical / 埋め込み微小電極 / 細胞電気泳動 / ポリマーチップ / 反応性イオンエッチング / 不純物ドーピング / dielectrophoresis / プラズマ・表面相互作用 / イオンプレーティング / STM In-Situ 観察 / 高磁場ECRスパッタ / シリルラジカル / ナノソーターチップ / Silicon Integrated Circuits / ディープエッチング / 金属薄膜 / インピーダンス分光 / フ-リエ変換型イオン分光器 / 析出合金 / ホウ珪酸ガラス加工 / 積層マイクロ流体チップ / 集積回路 / コンタクト抵抗率 / CuAl合金 / 陽極接合 / スパッタリング / 転位 / 表面拡散 / アルミニウム配線 / 反応選択性 / 界面精密制御 / シリコンテクノロジー / 状態弁別測定 / 金属一半導体界面 / マイクロエレクトロニクス / 分子動力学シミュレーション / alloy precipitation / molecular dynamics simulation / ラジカル / エレクトロマイブレーション / 吸着制御 / プラズマ、表面相互作用 / ULSI / Electromigration / 光励起誘起金属気相成長 / Al配線 / マグネトロンスパッタ / 飛行時間 / Void / micro TAS / ボイド生成消滅モデル / SOR励起エッチング / ミリサイド / 反応性プラズマ / プロセス / 界面固相反応 / エレクトロマイグレ-ション / 電子顕微鏡その場観察 / ガラスエッチング / 細胞電気泳動チップ / レーザードーピング / ion / cell sorter chip / コンフォーマルスパッタ堆積 / マイクロキャピラリー電気泳動 / セルソーターチップ / 血液分析 / レ-ザ誘起光化学反応 / ECRプラズマ / シリコン / デバイス / 極限材料・プロセス / 信頼性 Less

Development of in-vivo pH Measurement Chip in Digestive SystemPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Biomedical engineering/Biological material science
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
次世代多層配線プロセス新微細加工技術の研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
超機能化グローバル・インターフェース・インテグレーション研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  2000 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
Creation of health care device employing micro analysis chip of trace amount of bloodPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Study of healthcare chips for the prompt test of tiny amounts of whole bloods
- Principal Investigator
  
  ICHIKI Takanori
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  複合化集積システム
- Research Institution
  Toyo University
Ultimate Integration of Intelligence on Silicon Electronic Systems
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Tohoku University
Study on low damage engraving of ultra-fine/high aspect ratio hole for ULSI processPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
ハロゲン原子によるSi表面単原子層形成とその低エネルギー除去に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  The University of Tokyo
  Toyo University
Ultimate Materials and Processes for Integrated Intelligent SystemPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1995 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
  Toyo University
水素及びハロゲンラジカルとシリコン表面の単原子反応の制御Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyo University
極限集積化シリコン知能エレクトロニクス
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University
電子サイクロトン分数波共鳴プラズマの生成とスパンタ応用
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Fukuyama University
Ion-Situ observation of ion and radical effects on the semiconductor clean surface in Ultra High Vacuum STM system.
- Principal Investigator
  
  MURAYAMA Yoichi
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  TOYO UNIV.
Investigation on Resistance Oscillation Induced by Direct Current Electromigration
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子層反応の制御Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Fabrication of Fine Si Dot PN Junction pn junction and its Pseudo-One Dimensional Quantum EffectsPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
Fabrication of ULSI highly Functional Thin Film employing High Rate and High Uniformity Digital CVDPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
界面の作製とその精密制御
- Principal Investigator
  
  安田幸夫
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
プロセス用プラズマのシース
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  Applied materials
- Research Institution
  Niihama National College of Technology
  Kyoto University
Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  HIROSHIMA UNIVERSITY
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
界面の作製とその精密制御
- Principal Investigator
  
  安田幸夫
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
界面の作製とその精密制御
- Principal Investigator
  
  YASUDA Yukio
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University

All 2005 2004 2002

All Journal Article Book

[Book] Bio-nano Technology2004
- Author(s)
  Y.Horiike, K.Kataoka, et al.
- Publisher
  Ohm-sha Corp.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] バイオナノテクノロジー2004
- Author(s)
  堀池靖浩, 片岡一則共編
- Total Pages
  224
- Publisher
  オーム社
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] はじめての半導体洗浄技術2002
- Author(s)
  堀池靖浩, et al.
- Total Pages
  250
- Publisher
  工業調査会
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] Semiconductor Cleaning Technology for beginner2002
- Author(s)
  Y.Horiike, et al.
- Publisher
  Kogyo Chosakai Publishing Inc.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] Coming of Highly Aged Society and Creation of Healthcare chip2005
- Author(s)
  Y.Horiike, et al.
- Journal Title
  
  HYOUMENGIJYUTSU 55(6)
  
  Pages : 385-390
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] Home Diagnostic Chip employing Painless Needle2004
- Author(s)
  Y.Horiike
- Journal Title
  
  JIDOUSHA GIJYUTSU 58(7)
  
  Pages : 116-117
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 高齢化社会の到来とヘルスケアチップの創製-ドライエッチング技術の展開-2004
- Author(s)
  堀池靖浩
- Journal Title
  
  表面技術 55(6)
  
  Pages : 385-390
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 無痛針採血による在宅健康診断チップ2004
- Author(s)
  堀池靖浩
- Journal Title
  
  自動車技術 58(7)
  
  Pages : 116-117
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] プラズマプロセスによるバイオチップの開発と展望2004
- Author(s)
  堀池靖浩他
- Journal Title
  
  応用物理 73(4)
  
  Pages : 470-475
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 高齢化社会の到来とヘルスケアチップの創製-ドライエッチング技術の展開-2004
- Author(s)
  堀池靖浩, et al.
- Journal Title
  
  表面技術 55(6)
  
  Pages : 385-390
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101

1. SAKAUE Hiroyuki (50221263)

# of Collaborated Projects : 8results

# of Collaborated Products : 0results
2. SHINGUBARA Shoso (10231367)

# of Collaborated Projects : 6results

# of Collaborated Products : 0results
3. YASUDA Yukio (60126951)

# of Collaborated Projects : 4results

# of Collaborated Products : 0results
4. SHIRAKI Yasuhiro (00206286)

# of Collaborated Projects : 4results

# of Collaborated Products : 0results
5. ICIKI Takanori (20277362)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
6. 広瀬全孝 (10034406)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
7. 宮崎誠一 (70190759)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
8. 川崎昌博 (70110723)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
9. 前川禎通 (60005973)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
10. 多田邦雄 (00010710)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
11. 小長井誠 (40111653)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
12. 村田好正 (10080467)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
13. 吉野淳二 (90158486)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
14. 正畠宏祐 (60132726)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
15. OHMI Tadahiro (20016463)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
16. TSUBOUTI Kazuo (30006283)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
17. ISHIWARA Hiroshi (60016657)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
18. ASADA Kunihiro (70142239)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
19. KAMEYAMA Michitaka (70124568)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
20. SHINDO Haruo (20034407)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
21. MASU Kazuya (20157192)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
22. TAKAMURA Yuzuru (20290877)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
23. 川崎三津夫 (50111927)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
24. MURAYAMA Yoichi (40057956)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
25. KASHIWAGI Kunihiro (30058094)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
26. KANDA Yozo (70041845)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
27. HATTORI Takeo (10061516)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
28. TACHIBANA Aketomo (40135463)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
29. FUYUKI Takashi (10165459)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
30. ICHINOSE Hideki (30159842)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
31. NAKAHARA Kazuhiko (70101095)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
32. KATAOKA Kazunori (00130245)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
33. KUZUYA Masayuki (10082984)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
34. NAKASE Hiroyuki (60312675)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
35. 長田昭義 (00164426)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
36. 末宗幾夫 (00112178)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
37. 山西正道 (30081441)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
38. 羽田宏 (60025864)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
39. 岩澤康裕 (40018015)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
40. 板谷良平 (90025833)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
41. 後藤俊夫 (50023255)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
42. 籏野嘉彦 (90016121)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
43. 佐藤徳芳 (40005252)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
44. 田頭博昭 (10001174)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
45. 財満鎭明 (70158947)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
46. 霜垣幸浩 (60192613)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
47. 角南英夫 (10311804)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
48. 岩井洋 (40313358)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
49. 鶴島稔夫 (10236953)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
50. 松波弘之 (50026035)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
51. KANEKO Hisashi

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
52. KAWAMURA Kouhei

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
53. IKEGAM Naokatsu

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
54. 戸所義博

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
55. 岩渕修一

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
56. 三宅潔

# of Collaborated Projects : 1results

# of Collaborated Products : 0results

HORIIKE Yasuhiro 堀池 靖浩

堀池 清浩 ホリイケ ヤスヒロ

Research Projects

Research Products

Co-Researchers

Development of in-vivo pH Measurement Chip in Digestive SystemPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

次世代多層配線プロセス新微細加工技術の研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

超機能化グローバル・インターフェース・インテグレーション研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Creation of health care device employing micro analysis chip of trace amount of bloodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Institution

Study on low damage engraving of ultra-fine/high aspect ratio hole for ULSI processPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

ハロゲン原子によるSi表面単原子層形成とその低エネルギー除去に関する研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Ultimate Materials and Processes for Integrated Intelligent SystemPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

水素及びハロゲンラジカルとシリコン表面の単原子反応の制御Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

HORIIKE Yasuhiro 堀池靖浩

堀池清浩ホリイケヤスヒロ