HORIIKE Yasuhiro 堀池靖浩

… Alternative Names

Researcher Number	20209274
External Links
Affiliation (based on the past Project Information) *help	2003 – 2004: 独立行政法人物質・材料研究機構, 生体材料研究センター, フェロー 1998 – 2002: University of Tokyo, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 1998 – 2002: Univ. of Tokyo, School of Engineering, Professor, 大学院・工学系研究科, 教授 1993 – 1997: Tokyo University, Electrical Engineering, Professor, 工学部, 教授 1988 – 1993: 広島大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Science and Engineering / Electronic materials/Electric materials / Material processing/treatments / 表面界面物性 / Biomedical engineering/Biological material science Except Principal Investigator Electronic materials/Electric materials / Applied materials / プラズマ理工学 / 電子材料工学 / 表面界面物性 / 複合化集積システム
Keywords	Principal Investigator デジタルエッチング / 自己停止反応 / 低エネルギエッチング / フッ素ラジカル / 表面反応 / ヘルスケアチップ / ULSI / SiGe / 無損傷化 / Flow-FET … More Except Principal Investigator 表面反応 / 吸着ラジカル / 質量分析 / STM / プラズマ / レーザ誘起光化学反応 / デジタルエッチング / 金属ー半導体界面 / 接触抵抗 / 界面反応 / 精密制御技術 / 光励起脱離 / 走査トンネル顕微鏡 / ECRスパッタ / エレクトロマイグレーション / ボイド / 結晶粒界 / 抵抗振動 / SEM / デジタルCVD / 不純物ドーピング / レ-ザ誘起光化学反応 / 冷却プラズマCVD / マイクロロ-ディング / 金属一半導体界面 / 不純物ド-ピング / 共鳴2光子イオン化 / 状態弁別測定 / 表面吸着構造敏感 / SOR光エッチング / 光CVD / 単結晶Si異方性エッチング / 光励起誘起金属気相成長 / 界面精密制御 / コンタクト抵抗率 / 界面固相反応 / 界面電気伝導 / ミリサイド / 超高濃度ド-ピング / 表面偏析 / 価電子励起に伴う表面反応 / 反応選択性 / 反応性イオンエッチング / SOR励起エッチング / ラジカルによる膜成長表面反応 / 飛行時間 / フ-リエ変換型イオン分光器 / 反応性プラズマ / シース / プラズマ・固体相互作用 / プラズマ・表面相互作用 / シ-ス / プラズマ、固体相互作用 / プラズマ、表面相互作用 / 紫外レーザー / レーザードーピング / 吸着制御 / シリルラジカル / 塩素吸着シリコン表面 / 化合物半導体 / 知能エレクトロニクス / シリコン / 集積化 / ECRプラズマ / 分数波共鳴 / コンフォーマルスパッタ堆積 / 電子顕微鏡その場観察 / 高磁場ECRスパッタ / 自己維持スパッタ / 分子動力学シミュレーション / 析出合金 / マグネトロンスパッタ / 分子動力学計算 / ボイド移動 / 結晶粒界拡散 / コンタクト埋め込み / エレクトロマイグレ-ション / マイクロ波プラズマ / 金属薄膜 / CuAl合金 / 表面拡散 / アルミニウム / スパッタリング / elctromigration / void / molecular dynamics simulation / sustained self-sputtering / ECR sputtering / in-situ SEM observation / grain boundary / alloy precipitation / イオンプレーティング / イオン / ラジカル / STM In-Situ 観察 / ion plating / ion / radical / エレクトロマイブレーション / ヒロック / 非線型 / Al配線 / 転位 / アルミニウム配線 / ULSI / 信頼性 / 振動 / 抵抗振動現象 / 局所性・非局所性評価 / ボイド生成消滅モデル / Electromigration / Resistance Oscillation / Void / Hillock / Nonlinear / Al Interconnect / Dislocation / 知的電子システム / シリコン集積回路 / 知能情報処理 / 極限材料・プロセス / アーキテクチャ / マイクロエレクトロニクス / システム / シリコンテクノロジー / 集積回路 / 半導体プロセス / 回路 / デバイス / プロセス / 材料 / Intelligent electronic systems / Silicon Integrated Circuits / Intelligent Information Processing / Ultimate Material and Process / ヘルスケアチップ / 血液検査 / マイクロTAS / マイクロ流体デバイス / 誘電泳動 / セルソーターチップ / 細胞電気泳動 / ディープガラスエッチング / ホウ珪酸ガラス加工 / 積層マイクロ流体チップ / ポリマーチップ / 射出成型 / 細胞電気泳動チップ / 陽極接合 / 血液分析 / 埋め込み微小電極 / インピーダンス分光 / ポリマー被覆 / 細胞分析 / ナノソーターチップ / マイクロキャピラリー電気泳動 / ディープエッチング / ガラスエッチング / Crドライエッチング / 細胞免疫電気泳動 / 誘電泳動力 / healthcare chip / blood test / micro TAS / microfluidics / dielectrophoresis / cell sorter chip / cell electrophoresis / deep glass etching Less

Development of in-vivo pH Measurement Chip in Digestive SystemPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Biomedical engineering/Biological material science
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
次世代多層配線プロセス新微細加工技術の研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
超機能化グローバル・インターフェース・インテグレーション研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  2000 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
Creation of health care device employing micro analysis chip of trace amount of bloodPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Study of healthcare chips for the prompt test of tiny amounts of whole bloods
- Principal Investigator
  
  ICHIKI Takanori
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  複合化集積システム
- Research Institution
  Toyo University
Ultimate Integration of Intelligence on Silicon Electronic Systems
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Tohoku University
Study on low damage engraving of ultra-fine/high aspect ratio hole for ULSI processPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
ハロゲン原子によるSi表面単原子層形成とその低エネルギー除去に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  The University of Tokyo
  Toyo University
Ultimate Materials and Processes for Integrated Intelligent SystemPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1995 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
  Toyo University
水素及びハロゲンラジカルとシリコン表面の単原子反応の制御Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyo University
極限集積化シリコン知能エレクトロニクス
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University
電子サイクロトン分数波共鳴プラズマの生成とスパンタ応用
- Principal Investigator
  
  SHINDO Haruo
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Fukuyama University
Ion-Situ observation of ion and radical effects on the semiconductor clean surface in Ultra High Vacuum STM system.
- Principal Investigator
  
  MURAYAMA Yoichi
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  TOYO UNIV.
Investigation on Resistance Oscillation Induced by Direct Current Electromigration
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子層反応の制御Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Fabrication of Fine Si Dot PN Junction pn junction and its Pseudo-One Dimensional Quantum EffectsPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
Fabrication of ULSI highly Functional Thin Film employing High Rate and High Uniformity Digital CVDPrincipal Investigator
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
界面の作製とその精密制御
- Principal Investigator
  
  安田幸夫
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
プロセス用プラズマのシース
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  Applied materials
- Research Institution
  Niihama National College of Technology
  Kyoto University
Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  HIROSHIMA UNIVERSITY
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
界面の作製とその精密制御
- Principal Investigator
  
  安田幸夫
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究Principal Investigator
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
表面反応の研究
- Principal Investigator
  
  村田好正
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
界面の作製とその精密制御
- Principal Investigator
  
  YASUDA Yukio
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
プラズマ-表面相互作用の制御
- Principal Investigator
  
  広瀬全孝
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University

All 2005 2004 2002

All Journal Article Book

[Book] Bio-nano Technology2004
- Author(s)
  Y.Horiike, K.Kataoka, et al.
- Publisher
  Ohm-sha Corp.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] バイオナノテクノロジー2004
- Author(s)
  堀池靖浩, 片岡一則共編
- Total Pages
  224
- Publisher
  オーム社
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] はじめての半導体洗浄技術2002
- Author(s)
  堀池靖浩, et al.
- Total Pages
  250
- Publisher
  工業調査会
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Book] Semiconductor Cleaning Technology for beginner2002
- Author(s)
  Y.Horiike, et al.
- Publisher
  Kogyo Chosakai Publishing Inc.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] Coming of Highly Aged Society and Creation of Healthcare chip2005
- Author(s)
  Y.Horiike, et al.
- Journal Title
  
  HYOUMENGIJYUTSU 55(6)
  
  Pages: 385-390
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] Home Diagnostic Chip employing Painless Needle2004
- Author(s)
  Y.Horiike
- Journal Title
  
  JIDOUSHA GIJYUTSU 58(7)
  
  Pages: 116-117
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 高齢化社会の到来とヘルスケアチップの創製-ドライエッチング技術の展開-2004
- Author(s)
  堀池靖浩
- Journal Title
  
  表面技術 55(6)
  
  Pages: 385-390
- NAID
  10013272139
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 無痛針採血による在宅健康診断チップ2004
- Author(s)
  堀池靖浩
- Journal Title
  
  自動車技術 58(7)
  
  Pages: 116-117
- NAID
  10013272134
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] プラズマプロセスによるバイオチップの開発と展望2004
- Author(s)
  堀池靖浩他
- Journal Title
  
  応用物理 73(4)
  
  Pages: 470-475
- NAID
  10012857398
- Data Source
  KAKENHI-PROJECT-14208101
[Journal Article] 高齢化社会の到来とヘルスケアチップの創製-ドライエッチング技術の展開-2004
- Author(s)
  堀池靖浩, et al.
- Journal Title
  
  表面技術 55(6)
  
  Pages: 385-390
- NAID
  10013272139
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208101

1. SAKAUE Hiroyuki (50221263)

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# of Collaborated Products: 0 results
2. SHINGUBARA Shoso (10231367)

# of Collaborated Projects: 6 results

# of Collaborated Products: 0 results
3. YASUDA Yukio (60126951)

# of Collaborated Projects: 4 results

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4. SHIRAKI Yasuhiro (00206286)

# of Collaborated Projects: 4 results

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5. ICIKI Takanori (20277362)

# of Collaborated Projects: 3 results

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6. 広瀬全孝 (10034406)

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7. 宮崎誠一 (70190759)

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8. 川崎昌博 (70110723)

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9. 前川禎通 (60005973)

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10. 多田邦雄 (00010710)

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11. 小長井誠 (40111653)

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12. 村田好正 (10080467)

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13. 吉野淳二 (90158486)

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14. 正畠宏祐 (60132726)

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15. OHMI Tadahiro (20016463)

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16. TSUBOUTI Kazuo (30006283)

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17. ISHIWARA Hiroshi (60016657)

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18. ASADA Kunihiro (70142239)

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19. KAMEYAMA Michitaka (70124568)

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20. SHINDO Haruo (20034407)

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21. MASU Kazuya (20157192)

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22. TAKAMURA Yuzuru (20290877)

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23. 川崎三津夫 (50111927)

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24. MURAYAMA Yoichi (40057956)

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25. KASHIWAGI Kunihiro (30058094)

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26. KANDA Yozo (70041845)

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27. HATTORI Takeo (10061516)

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28. TACHIBANA Aketomo (40135463)

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29. FUYUKI Takashi (10165459)

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30. ICHINOSE Hideki (30159842)

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31. NAKAHARA Kazuhiko (70101095)

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32. KATAOKA Kazunori (00130245)

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33. KUZUYA Masayuki (10082984)

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34. NAKASE Hiroyuki (60312675)

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35. 長田昭義 (00164426)

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36. 末宗幾夫 (00112178)

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37. 山西正道 (30081441)

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38. 羽田宏 (60025864)

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39. 岩澤康裕 (40018015)

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40. 板谷良平 (90025833)

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41. 後藤俊夫 (50023255)

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42. 籏野嘉彦 (90016121)

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43. 佐藤徳芳 (40005252)

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44. 田頭博昭 (10001174)

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45. 財満鎭明 (70158947)

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46. 霜垣幸浩 (60192613)

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47. 角南英夫 (10311804)

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48. 岩井洋 (40313358)

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49. 鶴島稔夫 (10236953)

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50. 松波弘之 (50026035)

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51. KANEKO Hisashi

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52. KAWAMURA Kouhei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
53. IKEGAM Naokatsu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
54. 戸所義博

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
55. 岩渕修一

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
56. 三宅潔

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

HORIIKE Yasuhiro 堀池 靖浩

堀池 清浩 ホリイケ ヤスヒロ

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Development of in-vivo pH Measurement Chip in Digestive SystemPrincipal Investigator

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次世代多層配線プロセス新微細加工技術の研究Principal Investigator

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超機能化グローバル・インターフェース・インテグレーション研究Principal Investigator

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Creation of health care device employing micro analysis chip of trace amount of bloodPrincipal Investigator

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Study on low damage engraving of ultra-fine/high aspect ratio hole for ULSI processPrincipal Investigator

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ハロゲン原子によるSi表面単原子層形成とその低エネルギー除去に関する研究Principal Investigator

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Ultimate Materials and Processes for Integrated Intelligent SystemPrincipal Investigator

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水素及びハロゲンラジカルとシリコン表面の単原子反応の制御Principal Investigator

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HORIIKE Yasuhiro 堀池靖浩

堀池清浩ホリイケヤスヒロ