KAWATA Hiroaki 川田博昭

Researcher Number	90186099
Other IDs
Affiliation *help	2016 – 2018 : 大阪府立大学, 工学(系)研究科(研究院), 教授 2008 : Osaka Prefecture University, 大学院・工学研究科, 准教授 2007 – 2008 : Osaka Prefecture University, 工学研究科, 准教授 2003 : 大阪府立大学, 大学院・工学研究科, 助教授 2001 – 2003 : 大阪府立大学, 工学研究科, 助教授 1998 : 大阪府立大学, 工学部, 助教授 1995 – 1996 : 大阪府立大学, 工学部, 講師
Review Section/Research Field	Principal Investigator 電子デバイス・機器工学 / Electron device/Electronic equipment Except Principal Investigator Dynamics/Control / 電子デバイス・機器工学 / Intelligent mechanics/Mechanical systems
Keywords	Principal Investigator reactive ion etching / Cr pattern / 垂直配向 / Crゲート電極 / 微細プロセス技術 / field emitter / 反応性イオンエッチング / リソグラフィレス / 電界放出特性 / 選択成長 … More Except Principal Investigator リフトオフ / ヤング率 / NICKL / micro cantilever / 力平衡方式 / FIELD EMISSION / SILICON / フォースモジュレーション法 / 薄膜 / viscous fluid / マイクロマシン / タングステン / 周波数応答 / 力・距離曲線 / インプリンティング / visco-eleastic / 表面剛性 / カンチレバ- / 微小電子線源 / atomic force microscopy / cell / マイクロ梁 / 熱励起振動 / ホログラフィックリソグラフィ / AFM / 生体 / 屈折率 / モリブデン / FIELD EMITTER ARRAY / 粘弾性 / 微細加工 / 細胞 / 大たわみ理論 / HOLOGRAFIC LITHOGRAPHY / リソグラフィ / living material / 電界放出 / 表面粘性 / 電子ビーム蒸着 / 光リソグラフィ / 量子ドット / large deflection / 3次元静電場 / 原子間力顕微鏡 / シリコン / 減圧気相堆積法 / electric field / drag force / resonance / カンチレバー / LIFT OFF / ニッケル Less

Development of fabrication process for disposable micromachinePrincipal Investigator
- Principal Investigator
  
  KAWATA Hiroaki
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopy
- Principal Investigator
  
  HIRAI Yoshihiko
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  Osaka Prefecture University
DEVELOPMENT OF HIGH PERFORMANCE FIERD EMITTER BY USE OF CARBON-NANOTUBESPrincipal Investigator
- Principal Investigator
  
  KAWATA Hiroaki
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  OSAKA PREFECTURE UNIVERSITY
ナノ・インプリンティングによる量子ドット形成に関する研究
- Principal Investigator
  
  HIRAI Yoshihiko
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka Prefecture University
DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID
- Principal Investigator
  
  TANAKA Yoshio
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  OSAKA PREFECTURE UNIVERSITY
DEVELOPMENT OF VACUUM MICRO DEVICES OPARATING AT LOW VOLTAGES WITH HIGH CURRENT DENSITY
- Principal Investigator
  
  MURATA Kenji
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  OSAKA PREFECTURE UNIVERSITY

All 2009 2008 2007

All Journal Article Presentation

[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics (掲載確定) 48(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.48(掲載決定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages : 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.47
  
  Pages : 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009
- Author(s)
  川田博昭
- Organizer
  地域発技術シース発表会(独立行政法人科学技術振興機構主催)
- Place of Presentation
  大阪
- Year and Date
  2009-02-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009
- Author(s)
  川田博昭
- Organizer
  地域発技術シーズ発表会(独立行政法人科学技術振興機構主催)
- Place of Presentation
  大阪
- Year and Date
  2009-02-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda, Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (NME2008)
- Place of Presentation
  アテネ, ギリシャ
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008
- Author(s)
  川田博昭, 流郷謙一, 安田雅昭, 平井義彦
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda, Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf, (MNC2008)
- Place of Presentation
  福岡
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever Fabrication by Force Free Release Transfer Process2008
- Author(s)
  H. Kawata, K. Ryugou, M. Yasuda and Y. Hira
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
- Place of Presentation
  Kyoto (Japan)
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda and Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (MNE2008)
- Place of Presentation
  Athens (Greece)
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008
- Author(s)
  川田博昭, 流郷謙一, 安田雅昭, 平井義彦
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without Lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda and Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
- Place of Presentation
  Fukuoka(Japan)
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever Fabrication by Force Free Release Transfer Prooess2007
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda and Y. Hirai
- Organizer
  2007 Int. Microprocesses and Nanotechnology Conf.(NMC2007)
- Place of Presentation
  京都
- Year and Date
  2007-11-08
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 離型力を要しない移植法によるカンチレバー作製2007
- Author(s)
  川田博昭、安田雅昭、平井義彦
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007
- Author(s)
  川田博昭, 新甫純也, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  筑波
- Year and Date
  2007-07-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 離型力を要しない移植法によるカンチレバー作製2007
- Author(s)
  川田博昭、安田雅昭、平井義彦
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007
- Author(s)
  川田博昭, 新甫純也, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  筑波
- Year and Date
  2007-07-02
- Data Source
  KAKENHI-PROJECT-19560349

1. MURATA Kenji (30029079)

# of Collaborated Projects : 4results

# of Collaborated Products : 0results
2. HIRAI Yoshihiko (50285300)

# of Collaborated Projects : 3results

# of Collaborated Products : 17results
3. TANAKA Yoshio (60081246)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
4. KIKUTA Hisahiro (10214743)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
5. IWATA Kouichi (20081242)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
6. AKITA Seiji (60202529)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
7. NAKAYAMA Yoshikazu (20128771)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
8. HAGA Hisashi (00292045)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
9. KAWABATA Kazuhshige (20261274)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
10. 村田一夫

# of Collaborated Projects : 1results

# of Collaborated Products : 0results

KAWATA Hiroaki 川田 博昭

Research Projects

Research Products

Co-Researchers

Development of fabrication process for disposable micromachinePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopy

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DEVELOPMENT OF HIGH PERFORMANCE FIERD EMITTER BY USE OF CARBON-NANOTUBESPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

ナノ・インプリンティングによる量子ドット形成に関する研究

Principal Investigator

Project Period (FY)

Research Category

Research Institution

DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DEVELOPMENT OF VACUUM MICRO DEVICES OPARATING AT LOW VOLTAGES WITH HIGH CURRENT DENSITY

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

Author(s)

Journal Title

Data Source

[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

Author(s)

Journal Title

Data Source

[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

Author(s)

Journal Title

Data Source

[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

Author(s)

Journal Title

Data Source

[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Cantilever fabrication by use of two step transfer printing process2008

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008

KAWATA Hiroaki 川田博昭