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Kawata Hiroaki  川田 博昭

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川田 博昭  カワタ ヒロアキ

KAWATA Hiroaki  川田 博昭

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Researcher Number 90186099
Other IDs
Affiliation (Current) 2022: 大阪公立大学, 大学院工学研究科 , 客員研究員
Affiliation (based on the past Project Information) *help 2020: 大阪府立大学, 工学(系)研究科(研究院), 客員研究員
2019: 大阪府立大学, 工学(系)研究科(研究院), 教授
2008: Osaka Prefecture University, 大学院・工学研究科, 准教授
2007 – 2008: Osaka Prefecture University, 工学研究科, 准教授
2003: 大阪府立大学, 大学院・工学研究科, 助教授 … More
2001 – 2003: 大阪府立大学, 工学研究科, 助教授
1998: 大阪府立大学, 工学部, 助教授
1995 – 1996: 大阪府立大学, 工学部, 講師 Less
Review Section/Research Field
Principal Investigator
Electron device/Electronic equipment / 電子デバイス・機器工学 / Basic Section 29020:Thin film/surface and interfacial physical properties-related
Except Principal Investigator
Intelligent mechanics/Mechanical systems / 電子デバイス・機器工学 / Dynamics/Control
Keywords
Principal Investigator
微細プロセス技術 / MEMS / 薄膜カンチレバー / 微小質量計測 / 移植法 / リソグラフィレス / 離型 / カーボンナノチューブ / ゲート付微小電子線源 / Fe触媒 … More / 選択成長 / Crゲート電極 / 反応性イオンエッチング / ゲート付き微小電子線源 / 低電圧動作 / 垂直配向 / 電界放出特性 / field emitter / carbon-nanotubes / Fe catalyst / selective growth / Cr pattern / reactive ion etching / ナノ貫通孔 / ナノインプリント / 分子流 / 自立樹脂薄膜 / 自立フィルム / ナノ孔 / 自立薄膜 … More
Except Principal Investigator
インプリンティング / 量子ドット / リソグラフィ / micro cantilever / large deflection / electric field / drag force / viscous fluid / resonance / カンチレバ- / 大たわみ理論 / 3次元静電場 / ヤング率 / 薄膜 / 原子間力顕微鏡 / 力平衡方式 / 力・距離曲線 / マイクロマシン / マイクロ梁 / 減圧気相堆積法 / 屈折率 / 光リソグラフィ / 熱励起振動 / 周波数応答 / 微小電子線源 / 電界放出 / ニッケル / シリコン / ホログラフィックリソグラフィ / リフトオフ / 電子ビーム蒸着 / モリブデン / タングステン / 微細加工 / FIELD EMITTER ARRAY / FIELD EMISSION / NICKL / SILICON / HOLOGRAFIC LITHOGRAPHY / LIFT OFF / 粘弾性 / 細胞 / 生体 / AFM / カンチレバー / フォースモジュレーション法 / 表面剛性 / 表面粘性 / visco-eleastic / cell / living material / atomic force microscopy Less
  • Research Projects

    (7 results)
  • Research Products

    (26 results)
  • Co-Researchers

    (10 People)
  •  Creation of molecular flow devices for environmental gas exchange by self-standing thin films with nano through holesPrincipal Investigator

    • Principal Investigator
      川田 博昭
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 29020:Thin film/surface and interfacial physical properties-related
    • Research Institution
      Osaka Prefecture University
  •  Development of fabrication process for disposable micromachinePrincipal Investigator

    • Principal Investigator
      KAWATA Hiroaki
    • Project Period (FY)
      2007 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Osaka Prefecture University
  •  Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopy

    • Principal Investigator
      HIRAI Yoshihiko
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Dynamics/Control
    • Research Institution
      Osaka Prefecture University
  •  DEVELOPMENT OF HIGH PERFORMANCE FIERD EMITTER BY USE OF CARBON-NANOTUBESPrincipal Investigator

    • Principal Investigator
      KAWATA Hiroaki
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      OSAKA PREFECTURE UNIVERSITY
  •  ナノ・インプリンティングによる量子ドット形成に関する研究

    • Principal Investigator
      HIRAI Yoshihiko
    • Project Period (FY)
      1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Osaka Prefecture University
  •  DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID

    • Principal Investigator
      TANAKA Yoshio
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      OSAKA PREFECTURE UNIVERSITY
  •  DEVELOPMENT OF VACUUM MICRO DEVICES OPARATING AT LOW VOLTAGES WITH HIGH CURRENT DENSITY

    • Principal Investigator
      MURATA Kenji
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      OSAKA PREFECTURE UNIVERSITY

All 2021 2020 2019 2009 2008 2007

All Journal Article Presentation Patent

  • [Journal Article] Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating2020

    • Author(s)
      Shimizu Shingo、Tanabe Hideki、Yasuda Masaaki、Hirai Yoshihiko、Kawata Hiroaki
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 33 Issue: 5 Pages: 551-556

    • DOI

      10.2494/photopolymer.33.551

    • NAID

      130007867667

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Journal Article] Fabrication of Self-standing Polystyrene Thin Films with Fine Through Holes by use of Water Soluble Resin Sacrificial Layer2019

    • Author(s)
      H. Kawata, K. Uchida, M. Yasuda, and Y. Hirai
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 32 Issue: 1 Pages: 137-141

    • DOI

      10.2494/photopolymer.32.137

    • NAID

      130007744309

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics (掲載確定) 48(印刷中)

    • NAID

      210000066988

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics vol.48(掲載決定)

    • NAID

      210000066988

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 5248-5251

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics vol.47

      Pages: 5248-5251

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Patent] 材料パターンの製造方法, テンプレートおよびマイクロマシンの製造方法2008

    • Inventor(s)
      川田博昭
    • Industrial Property Rights Holder
      大阪府立大学
    • Industrial Property Number
      2008-151741
    • Filing Date
      2008-06-10
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 熱ナノインプリントにおけるインプリント温度の低温化2021

    • Author(s)
      田邉英毅, 清水進吾, 川田博昭, 安田雅昭, 平井義彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] Fabrication of Multilayer Fine Structures by use of Double Layer Polymethyl Methacrylate Film2020

    • Author(s)
      T. Yamamoto, S. Yagi, M. Yasuda, Y. Hirai, and H. Kawata
    • Organizer
      37th International Conference of Pheotopolymer Science and Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] 二層PMMAフィルムの貼り合わせによる多段微細構造物の作製2020

    • Author(s)
      川田博昭,山本健生,八木駿典,安田雅昭,平井義彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating2020

    • Author(s)
      S. Shimizu, H. Tanabe, M. Yasuda, Y. Hirai, and H. Kawata
    • Organizer
      37th International Conference of Pheotopolymer Science and Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] キャスティング法を用いた微細貫通孔付きポリスチレン自立薄膜の作製2019

    • Author(s)
      川田博昭,清水進吾,安田雅昭,平井義彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] Fabrication of self-standing polystyrene thin films with fine through holes by use of water-soluble resin sacrificial layer2019

    • Author(s)
      Hiroaki Kawata, Keito Uchida, Masaaki Yasuda, Yoshihiko Hirai
    • Organizer
      The 36th International Conference of Photopolymer Science and Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K05274
  • [Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009

    • Author(s)
      川田博昭
    • Organizer
      地域発技術シース発表会(独立行政法人科学技術振興機構主催)
    • Place of Presentation
      大阪
    • Year and Date
      2009-02-05
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009

    • Author(s)
      川田博昭
    • Organizer
      地域発技術シーズ発表会(独立行政法人科学技術振興機構主催)
    • Place of Presentation
      大阪
    • Year and Date
      2009-02-05
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever fabrication by use of two step transfer printing process2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Kubo, M. Yasuda, Y. Hirai
    • Organizer
      34th International Conference on Micro and Nano Engineering (NME2008)
    • Place of Presentation
      アテネ, ギリシャ
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発2008

    • Author(s)
      流郷謙一, 川田博昭, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      仙台
    • Year and Date
      2008-06-13
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Fabrication of cantilevers by two step transfer process without Lithography2008

    • Author(s)
      K. Ryugou, S. Kubo, H. Kawata, M. Yasuda and Y. Hirai
    • Organizer
      2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka(Japan)
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Fabrication of cantilevers by two step transfer process without lithography2008

    • Author(s)
      K. Ryugou, S. Kubo, H. Kawata, M. Yasuda, Y. Hirai
    • Organizer
      2008 Int. Microprocesses and Nanotechnology Conf, (MNC2008)
    • Place of Presentation
      福岡
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever fabrication by use of two step transfer printing process2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Kubo, M. Yasuda and Y. Hirai
    • Organizer
      34th International Conference on Micro and Nano Engineering (MNE2008)
    • Place of Presentation
      Athens (Greece)
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008

    • Author(s)
      川田博昭, 流郷謙一, 安田雅昭, 平井義彦
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      春日井
    • Year and Date
      2008-09-02
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever Fabrication by Force Free Release Transfer Process2008

    • Author(s)
      H. Kawata, K. Ryugou, M. Yasuda and Y. Hira
    • Organizer
      2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Kyoto (Japan)
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008

    • Author(s)
      流郷謙一, 川田博昭, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      仙台
    • Year and Date
      2008-06-13
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007

    • Author(s)
      川田博昭, 新甫純也, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      筑波
    • Year and Date
      2007-07-02
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 離型力を要しない移植法によるカンチレバー作製2007

    • Author(s)
      川田博昭、安田雅昭、平井義彦
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever Fabrication by Force Free Release Transfer Prooess2007

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda and Y. Hirai
    • Organizer
      2007 Int. Microprocesses and Nanotechnology Conf.(NMC2007)
    • Place of Presentation
      京都
    • Year and Date
      2007-11-08
    • Data Source
      KAKENHI-PROJECT-19560349
  • 1.  MURATA Kenji (30029079)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 2.  HIRAI Yoshihiko (50285300)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 14 results
  • 3.  TANAKA Yoshio (60081246)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  KIKUTA Hisahiro (10214743)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  IWATA Kouichi (20081242)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  AKITA Seiji (60202529)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  NAKAYAMA Yoshikazu (20128771)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  HAGA Hisashi (00292045)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  KAWABATA Kazuhshige (20261274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  村田 一夫
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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