Kawata Hiroaki 川田博昭

… Alternative Names

KAWATA Hiroaki 川田博昭

川田博昭カワタタカアキ

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Researcher Number	90186099
Other IDs
Affiliation (based on the past Project Information) *help	2022: 大阪公立大学, 大学院工学研究科, 客員研究員 2020 – 2021: 大阪府立大学, 工学(系)研究科(研究院), 客員研究員 2019: 大阪府立大学, 工学(系)研究科(研究院), 教授 2008: Osaka Prefecture University, 大学院・工学研究科, 准教授 2007 – 2008: Osaka Prefecture University, 工学研究科, 准教授 … More 2003: 大阪府立大学, 大学院・工学研究科, 助教授 2001 – 2003: 大阪府立大学, 工学研究科, 助教授 1998: 大阪府立大学, 工学部, 助教授 1995 – 1996: 大阪府立大学, 工学部, 講師 Less
Review Section/Research Field	Principal Investigator Basic Section 29020:Thin film/surface and interfacial physical properties-related / 電子デバイス・機器工学 / Electron device/Electronic equipment Except Principal Investigator Dynamics/Control / 電子デバイス・機器工学 / Intelligent mechanics/Mechanical systems
Keywords	Principal Investigator 自立薄膜 / ナノ孔 / 自立フィルム / 自立樹脂薄膜 / アスペクト比増大 / 分子流 / 樹脂薄膜 / ナノインプリント / ナノ貫通孔 / reactive ion etching … More / Cr pattern / selective growth / Fe catalyst / carbon-nanotubes / field emitter / 電界放出特性 / 垂直配向 / 低電圧動作 / ゲート付き微小電子線源 / 反応性イオンエッチング / Crゲート電極 / 選択成長 / Fe触媒 / ゲート付微小電子線源 / カーボンナノチューブ / 離型 / リソグラフィレス / 移植法 / 微小質量計測 / 薄膜カンチレバー / MEMS / 微細プロセス技術 … More Except Principal Investigator atomic force microscopy / living material / cell / visco-eleastic / 表面粘性 / 表面剛性 / フォースモジュレーション法 / カンチレバー / AFM / 生体 / 細胞 / 粘弾性 / LIFT OFF / HOLOGRAFIC LITHOGRAPHY / SILICON / NICKL / FIELD EMISSION / FIELD EMITTER ARRAY / 微細加工 / タングステン / モリブデン / 電子ビーム蒸着 / リフトオフ / ホログラフィックリソグラフィ / シリコン / ニッケル / 電界放出 / 微小電子線源 / 周波数応答 / 熱励起振動 / 光リソグラフィ / 屈折率 / 減圧気相堆積法 / マイクロ梁 / マイクロマシン / 力・距離曲線 / 力平衡方式 / 原子間力顕微鏡 / 薄膜 / ヤング率 / 3次元静電場 / 大たわみ理論 / カンチレバ- / resonance / viscous fluid / drag force / electric field / large deflection / micro cantilever / リソグラフィ / 量子ドット / インプリンティング Less

Creation of molecular flow devices for environmental gas exchange by self-standing thin films with nano through holesPrincipal Investigator
- Principal Investigator
  
  Kawata Hiroaki
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 29020:Thin film/surface and interfacial physical properties-related
- Research Institution
  Osaka Metropolitan University
  Osaka Prefecture University
Development of fabrication process for disposable micromachinePrincipal Investigator
- Principal Investigator
  
  KAWATA Hiroaki
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopy
- Principal Investigator
  
  HIRAI Yoshihiko
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  Osaka Prefecture University
DEVELOPMENT OF HIGH PERFORMANCE FIERD EMITTER BY USE OF CARBON-NANOTUBESPrincipal Investigator
- Principal Investigator
  
  KAWATA Hiroaki
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  OSAKA PREFECTURE UNIVERSITY
ナノ・インプリンティングによる量子ドット形成に関する研究
- Principal Investigator
  
  HIRAI Yoshihiko
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka Prefecture University
DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID
- Principal Investigator
  
  TANAKA Yoshio
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  OSAKA PREFECTURE UNIVERSITY
DEVELOPMENT OF VACUUM MICRO DEVICES OPARATING AT LOW VOLTAGES WITH HIGH CURRENT DENSITY
- Principal Investigator
  
  MURATA Kenji
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  OSAKA PREFECTURE UNIVERSITY

All 2022 2021 2020 2019 2009 2008 2007

All Journal Article Presentation Patent

[Journal Article] Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating2020
- Author(s)
  Shimizu Shingo、Tanabe Hideki、Yasuda Masaaki、Hirai Yoshihiko、Kawata Hiroaki
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 33 Issue: 5 Pages: 551-556
- DOI
  10.2494/photopolymer.33.551
- NAID
  130007867667
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-07-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05274
[Journal Article] Fabrication of Self-standing Polystyrene Thin Films with Fine Through Holes by use of Water Soluble Resin Sacrificial Layer2019
- Author(s)
  H. Kawata, K. Uchida, M. Yasuda, and Y. Hirai
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 32 Issue: 1 Pages: 137-141
- DOI
  10.2494/photopolymer.32.137
- NAID
  130007744309
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2019-06-24
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05274
[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics (掲載確定) 48(印刷中)
- NAID
  210000066988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.48(掲載決定)
- NAID
  210000066988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages: 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.47
  
  Pages: 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Patent] 材料パターンの製造方法, テンプレートおよびマイクロマシンの製造方法2008
- Inventor(s)
  川田博昭
- Industrial Property Rights Holder
  大阪府立大学
- Industrial Property Number
  2008-151741
- Filing Date
  2008-06-10
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 熱インプリントとフォトリソ併用による貫通孔付き自立樹脂薄膜の作製2022
- Author(s)
  川田博昭、安田雅昭、平井義彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] ピッチ可変格子パターン付き自立PDMS膜の作製2022
- Author(s)
  長濱瑠星、川田博昭、水谷彰夫、菊田久雄、平井義彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of PDMS self-standing film with embedded fine polystyrene grating for stretchable optical device by nanoimprint process2022
- Author(s)
  Hiroaki Kawata, Ryusei Nagahama, Akio Mizutani, Hisao Kikuta, Yoshihiko Hirai
- Organizer
  The 39th International Conference of Photopolymer Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of self-standing thin films with small through-holes by imprint and photolithography hybrid process2021
- Author(s)
  H. Tanabe, H. Kawata, M. Yasuda, Y. Hirai, and H. Kikuta
- Organizer
  34th International Microprocesses and Nanotechnology Conference (MNC 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] 熱ナノインプリントにおけるインプリント温度の低温化2021
- Author(s)
  田邉英毅, 清水進吾, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of self-standing thin resin film with small through holes by low temperature nanoimprint process2021
- Author(s)
  H. Kawata, S. Shimizu, H. Tanabe, M. Yasuda, H. Kikuta, and Y. Hirai
- Organizer
  38th. International Conference of Photopolymer Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of Multilayer Fine Structures by use of Double Layer Polymethyl Methacrylate Film2020
- Author(s)
  T. Yamamoto, S. Yagi, M. Yasuda, Y. Hirai, and H. Kawata
- Organizer
  37th International Conference of Pheotopolymer Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] 二層PMMAフィルムの貼り合わせによる多段微細構造物の作製2020
- Author(s)
  川田博昭，山本健生，八木駿典，安田雅昭，平井義彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating2020
- Author(s)
  S. Shimizu, H. Tanabe, M. Yasuda, Y. Hirai, and H. Kawata
- Organizer
  37th International Conference of Pheotopolymer Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] キャスティング法を用いた微細貫通孔付きポリスチレン自立薄膜の作製2019
- Author(s)
  川田博昭，清水進吾，安田雅昭，平井義彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] Fabrication of self-standing polystyrene thin films with fine through holes by use of water-soluble resin sacrificial layer2019
- Author(s)
  Hiroaki Kawata, Keito Uchida, Masaaki Yasuda, Yoshihiko Hirai
- Organizer
  The 36th International Conference of Photopolymer Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05274
[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009
- Author(s)
  川田博昭
- Organizer
  地域発技術シース発表会(独立行政法人科学技術振興機構主催)
- Place of Presentation
  大阪
- Year and Date
  2009-02-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] カンチレバーを用いた超小型薄膜用膜厚モニター2009
- Author(s)
  川田博昭
- Organizer
  地域発技術シーズ発表会(独立行政法人科学技術振興機構主催)
- Place of Presentation
  大阪
- Year and Date
  2009-02-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda, Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (NME2008)
- Place of Presentation
  アテネ, ギリシャ
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without Lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda and Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
- Place of Presentation
  Fukuoka(Japan)
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda, Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf, (MNC2008)
- Place of Presentation
  福岡
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda and Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (MNE2008)
- Place of Presentation
  Athens (Greece)
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008
- Author(s)
  川田博昭, 流郷謙一, 安田雅昭, 平井義彦
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever Fabrication by Force Free Release Transfer Process2008
- Author(s)
  H. Kawata, K. Ryugou, M. Yasuda and Y. Hira
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
- Place of Presentation
  Kyoto (Japan)
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007
- Author(s)
  川田博昭, 新甫純也, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  筑波
- Year and Date
  2007-07-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 離型力を要しない移植法によるカンチレバー作製2007
- Author(s)
  川田博昭、安田雅昭、平井義彦
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever Fabrication by Force Free Release Transfer Prooess2007
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda and Y. Hirai
- Organizer
  2007 Int. Microprocesses and Nanotechnology Conf.(NMC2007)
- Place of Presentation
  京都
- Year and Date
  2007-11-08
- Data Source
  KAKENHI-PROJECT-19560349

1. MURATA Kenji (30029079)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
2. HIRAI Yoshihiko (50285300)

# of Collaborated Projects: 3 results

# of Collaborated Products: 14 results
3. TANAKA Yoshio (60081246)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. KIKUTA Hisahiro (10214743)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. IWATA Kouichi (20081242)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. AKITA Seiji (60202529)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. NAKAYAMA Yoshikazu (20128771)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. HAGA Hisashi (00292045)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. KAWABATA Kazuhshige (20261274)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 村田一夫

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Kawata Hiroaki 川田 博昭

KAWATA Hiroaki 川田 博昭

川田 博昭 カワタ タカアキ

Research Projects

Research Products

Co-Researchers

Creation of molecular flow devices for environmental gas exchange by self-standing thin films with nano through holesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of fabrication process for disposable micromachinePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopy

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DEVELOPMENT OF HIGH PERFORMANCE FIERD EMITTER BY USE OF CARBON-NANOTUBESPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

ナノ・インプリンティングによる量子ドット形成に関する研究

Principal Investigator

Project Period (FY)

Research Category

Research Institution

DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DEVELOPMENT OF VACUUM MICRO DEVICES OPARATING AT LOW VOLTAGES WITH HIGH CURRENT DENSITY

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating2020

Author(s)

Journal Title

DOI

NAID

ISSN

Year and Date

Language

Data Source

[Journal Article] Fabrication of Self-standing Polystyrene Thin Films with Fine Through Holes by use of Water Soluble Resin Sacrificial Layer2019

Author(s)

Journal Title

DOI

NAID

ISSN

Year and Date

Language

Data Source

[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

Author(s)

Journal Title

Data Source

[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

Kawata Hiroaki 川田博昭

KAWATA Hiroaki 川田博昭

川田博昭カワタタカアキ