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ARAI Eisuke  荒井 英輔

ORCIDConnect your ORCID iD *help
Researcher Number 90283473
Other IDs
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Affiliation *help 2004 : Nagoya Institute of Technology, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授
2003 – 2004 : 名古屋工業大学, 工学研究科, 教授
1998 – 2004 : 名古屋工業大学, 工学部, 教授
2002 : 名古屋工業大学, 工学部・電気情報工学科, 教授
1999 – 2000 : 名古屋工業大学, 工学部・電気情報工学科, 教授
Review Section/Research Field
Principal Investigator
電子デバイス・機器工学
Except Principal Investigator
Science and Engineering
Keywords
Principal Investigator
埋込酸化膜 / 極薄SOI / 埋込み酸化膜 / new donor / SOI / 不純物拡散 / buried oxide / プロセスシミュレータ / シリコンLSI / μ-PCD法 … More / 界面電荷密度 / 埋め込み酸化膜 / SOI基板 / silicon LSI / 拡散モデル / プロセスシミュレーション / P拡散 / 耐圧 / キャリア濃度 / キャリア濃度分布 / process simulation / 低消費電力LSI / ultra thin SOI / LSI / ニュードナー / シュミレーションモデル / 対拡散モデル / active layer / キャリア分布 / 点欠陥再結合速度 / 発生ライフタイム / recombination velocity of point defect density / B拡散 / 界面再結合速度 / carrier concentration / シミュレーションモデル / carrier density distribution / 活性層 / 格子間Si / μ-PCD method / シリコン / pair diffusion model / SOI substrate / ひ素 / アンチモン / 拡がり抵抗法 / spreading resistance / process simulator / impurity diffusion … More
Except Principal Investigator
原子精度要素プロセス / 集積回路 / 極微細構造 / シリコンゲルマニウム / 拡がり抵抗測定 / SOI / 超高速光・電子デバイス / シリコン / プロセスシミュレーション / 光物性 / 不純物拡散 / 人工IV族半導体 / 光エレクトロニクス / 電子物性 / 高性能トランジスタ Less
  • Research Projects

    (4results)
  • Research Products

    (12results)
  • Co-Researchers

    (10People)
  •  Crystallographic Evaluation of Ultrathin SOI Substrates and Impurity Diffusion Modeling for Nanometer LSIsPrincipal Investigator

    • Principal Investigator
      ARAI Eisuke
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Nagoya Institute of Technology
  •  人工IV族半導体の物性制御と超高速光・電子デバイスへの応用

    • Principal Investigator
      白木 靖寛
    • Project Period (FY)
      1999 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Musashi Institute of Technology
      The University of Tokyo
  •  ナノメータLSI用離散的拡散シミュレーション技術の研究

    • Principal Investigator
      ICHIMURA Masaya
    • Project Period (FY)
      1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Nagoya Institute of Technology
  •  Modeling of Impurity Diffusion in SOI Substrates for Future LSIsPrincipal Investigator

    • Principal Investigator
      ARAI Eisuke
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Nagoya Institute of Technology

All 2004 2003 2002

All Journal Article

  • [Journal Article] Conduction type change with annealing in thin silicon-on-insulator wafers2004

    • Author(s)
      Y.Shibata, M.Ichimura, E.Arai
    • Journal Title

      Solid-State Electronics 48

      Pages : 1249-1252

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Applicability of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator2003

    • Author(s)
      E.Arai, D.Iida, H.Asai, Y.Ieki, H.Uchida, M.Ichimura
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages : 1503-1510

    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Applicability of Phosphorus and Boron Diffusin Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Si and Silicon-on-Insulaor2003

    • Author(s)
      E.Arai, D.Iida, H.Asai, Y.Ieki, H.Uchida, M.Ichimura
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages : 1503-1510

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Sb Pile-up at Oxide and Si Interface during Drive-in Process after Predeposition Using Doped Oxide Source2003

    • Author(s)
      T.Ichino, H.Uchida, M.Ichimura, E.Arai
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages : 1139-1144

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] As and Sb Diffusion in Thin Silicon-on-Insulator Wafers2003

    • Author(s)
      Y.Shibata, M.Ichimura, E.Arai
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages : 4282-4283

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Interface recombination velocity of silicon-on-insulator wafers measured by microwave reflectance photoconductivity decay method with electric field2003

    • Author(s)
      T.Kuwayama, M.Ichimura, E.Arai
    • Journal Title

      Appl.Phys.Letters 83

      Pages : 928-930

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] As and Sb diffusion profiles in thin silicon-on-insulator2002

    • Author(s)
      Y.Shibata, M.Ichimura, E.Arai
    • Journal Title

      Extended Abstracts of the 3^<rd> International Workshop on Junction Technology

      Pages : 89-90

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structvires and Their Relation to Crystalline Quality2002

    • Author(s)
      H.Uchida, M.Ichimura, E.Arai
    • Journal Title

      Jpn.J.Appl.Phys. 41

      Pages : 4436-4441

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Applicability of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Si and Silicon-on-Insulator2002

    • Author(s)
      E.Arai, D.Iida, H.Asai, Y.Ieki, H.Uchida, M.Ichimura
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages : 1503-1510

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] As and Sb diffusion profiles in thin silicon-on-insulator wafers2002

    • Author(s)
      Y.Shibata, M.Ichimura, E.Arai
    • Journal Title

      Extended Abstracts of the 3^<rd> International Workshop on Junction Technology

      Pages : 89-90

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality2002

    • Author(s)
      H.Uchida, M.Ichimura, E.Arai
    • Journal Title

      Jpn.J.Appl.Phys. 41

      Pages : 4436-4441

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • [Journal Article] Changes in carrier profiles of bonded SOI wafers with thermal annealing measured by the spreading resistance method2002

    • Author(s)
      M.Ichimura, S.Ito, E.Arai
    • Journal Title

      Solid-State Electronics 46

      Pages : 545-553

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14550323
  • 1.  ICHIMURA Masaya (30203110)
    # of Collaborated Projects : 3results
    # of Collaborated Products : 12results
  • 2.  UCHIDA Hideo (10293739)
    # of Collaborated Projects : 3results
    # of Collaborated Products : 6results
  • 3.  SHAO Chunlin (20242828)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 4.  YOSHIDA Masayuki (80038984)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 5.  KATO Masashi (80362317)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 6.  白木 靖寛 (00206286)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 7.  安田 幸夫 (60126951)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 8.  室田 淳一 (70182144)
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 9.  坂本 統徳
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results
  • 10.  伊澤 達夫
    # of Collaborated Projects : 1results
    # of Collaborated Products : 0results

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