Kawaharamura Toshiyuki 川原村敏幸

… Alternative Names

KAWAHARAMURA Toshiyuki 川原村敏幸

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Researcher Number	00512021
Other IDs
Affiliation (Current)	2025: 高知工科大学, システム工学群, 教授
Affiliation (based on the past Project Information) *help	2018 – 2021: 高知工科大学, システム工学群, 教授 2017: 高知工科大学, システム工学群, 准教授 2015 – 2016: 高知工科大学, 総合研究所, 准教授 2013 – 2015: 高知工科大学, 公私立大学の部局等, 准教授 2012: 高知工科大学, 公私立大学の部局等, 講師 2011: 高知工科大学, ナノテクノロジー研究所, 講師 2008 – 2010: Kochi University of Technology, ナノデバイス研究所, 助教
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / Basic Section 29020:Thin film/surface and interfacial physical properties-related / Crystal engineering / Properties in chemical engineering process/Transfer operation/Unit operation / Electronic materials/Electric materials / Applied materials science/Crystal engineering Except Principal Investigator Applied physics and engineering and related fields / Electron device/Electronic equipment / Crystal engineering / Energy engineering
Keywords	Principal Investigator α-Ga2O3 / ミストCVD / 反応メカニズム / 高電子移動度トランジスタ(HEMT) / 反応活性 / 低環境負荷 / 酸化ガリウム / 酸化亜鉛 / 液滴の挙動 / 薄膜食刻(エッチング) … More / ミスト / ミスト液滴 / 薄膜成長 / ショットキー接合 / パワー素子 / ヘテロ構造 / 超広バンドギャップ / コランダム構造酸化物 / 高移動度トランジスタ(HEMT) / MODFETs / (Cr xGa1-x)2O3 / α-Cr2O3 / (Al xGa1-x)2O3, / heterostructures / HEMT / Ga2O3 / Mist CVD / 超ワイドバンドギャップ金属酸化物量子素子 / 反応メカニズム解明 / デバイス試作 / 反応制御 / 超高品質化 / 装置試作 / ミスト流 / 反応活性・支援 / 量子素子 / 超ワイドバンドギャップ金属酸化物 / ショットキーバリアダイオード(SBD) / 気液混相流 / 溶媒雰囲気反応場における反応解析 / コランダム型結晶構造金属酸化物薄膜物性値特定 / コランダム型 / 組成制御 / 酸化物量子発光デバイス / 高度な反応制御技術 / 酸化物量子素子 / 酸化物量子デバイス / 金属酸化物 / グリーンプロセス / 環境負荷低減 / 機能膜 / 微小液滴挙動 / ライデンフロスト / 瞬間撮影 / 定常状態 / ライデンフロスト効果 / ミスト法の位置付け / ミストの挙動 / 薄膜トランジスタ(TFT) / デバイス作製工程の非真空化 / 金属酸化物薄膜 / 化学気相成長(CVD)法 / 大気圧プロセス / ミスト(液滴) / 電子デバイス / 加工 / 成長 / 薄膜 / 電気・電子材料 / 新手法開発 / ZnO / 酸化亜鉛薄膜 / ミストCVD法 / 半導体物性 / 結晶成長 / 表面反応促進 / 大気圧中プラズマ発生 / 装置開発 / 薄膜エッチング / 機能薄膜 / 酸化亜鉛(ZnO) / 大気圧プラズマ / ミスト化学気相成長(CVD)法 … More Except Principal Investigator 酸化物半導体 / ナノ構造 / モノリシック共振器 / モノリシック集積 / モノリシック微小共振器 / 量子光学 / GaN / ワイドギャップ半導体 / 微小共振器 / モノリシック / 窒化物半導体 / 第二高調波発生 / 波長変換素子 / 非線形光学 / 光物性 / ナノ材料 / 構造・機能材料 / 電子デバイス・機 / oxygen vacancies / sensor / reducing gas / TiO2 / ZnO / oxygen vancancy / nanorods / thermal stability / ethanol / gas sensor / photoluminescence / optical sensor / large surface area / core-shell structures / 水素ガス / 欠陥 / フォトルミネッセンス / 多機能デバイス / 電子デバイス・機器 / 省エネルギー / 結晶成長 / 環境材料 / 色素増感太陽電池 / ナノ構造体 / 高配向 / ナノロート / 酸化亜鉛 / 色素増感型薄膜太陽電池 / アニーリング / 透明導電膜 / 酸化物 / 太陽電池 Less

Basic research on nanostructure control for the fabrication of ultra-wide bandgap oxide quantum devices by mist CVDPrincipal Investigator
- Principal Investigator
  
  KAWAHARAMURA Toshiyuki
- Project Period (FY)
  2018 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 29020:Thin film/surface and interfacial physical properties-related
- Research Institution
  Kochi University of Technology
Development of a high sensitive hydrogen gas detector based on the photoluminescence property of ZnO-based nanostructures
- Principal Investigator
  
  LI CHAOYANG
- Project Period (FY)
  2017 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kochi University of Technology
Development of monolithic cavity wavelength converter made of widegap semiconductors
- Principal Investigator
  
  Katayama Ryuji
- Project Period (FY)
  2017 – 2018
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Research Field
  
  Applied physics and engineering and related fields
- Research Institution
  Osaka University
ミストＣＶＤによる高耐圧ＨＥＭＴの作製Principal Investigator
- Principal Investigator
  
  川原村敏幸
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kochi University of Technology
Development of next generation mist CVD enabling atomic level control & development of oxide quantum devicesPrincipal Investigator
- Principal Investigator
  
  Kawaharamura Toshiyuki
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Crystal engineering
- Research Institution
  Kochi University of Technology
Basic behavior analysis of the Leidenfrost droplet toward the functional thin film fabrication on the three-dimensional objectPrincipal Investigator
- Principal Investigator
  
  Kawaharamura Toshiyuki
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Properties in chemical engineering process/Transfer operation/Unit operation
- Research Institution
  Kochi University of Technology
Evolution of functional single-crystalline oxide thin films by mist deposition
- Principal Investigator
  
  Fujita Shizuo
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Crystal engineering
- Research Institution
  Kyoto University
Development of high efficiency dye-sensitized solar cells combing the ZnO nanostructures and carbon nanotubes as the electrodes
- Principal Investigator
  
  LI CHAOYANG
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Energy engineering
- Research Institution
  Kochi University of Technology
Application technology development harnessing mist characteristics-The mist method for fabrication technology of electronic devices-Principal Investigator
- Principal Investigator
  
  KAWAHARAMURA Toshiyuki
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kochi University of Technology
Development of atmospheric-pressure plasma applied mist chemical vapor deposition and ZnO thin film growth under room temperature using the method.Principal Investigator
- Principal Investigator
  
  KAWAHARAMURA Toshiyuki
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (Start-up)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Kochi University of Technology

All 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 Other

All Journal Article Presentation Patent

[Journal Article] α-(AlxGa1?x)2O3 single-layer and heterostructure buffers for the growth of conductive Sn-doped α-Ga2O3 thin films via mist chemical vapor deposition2020
- Author(s)
  Dang Giang T.、Sato Shota、Tagashira Yuki、Yasuoka Tatsuya、Liu Li、Kawaharamura Toshiyuki
- Journal Title
  
  APL Materials
  
  Volume: 8 Issue: 10 Pages: 101101-101101
- DOI
  10.1063/5.0023041
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Conductive Si-doped α-(AlxGa1-x)2O3 thin films with the bandgaps up to 6.22 eV2020
- Author(s)
  Dang Giang T.、Tagashira Yuki、Yasuoka Tatsuya、Liu Li、Kawaharamura Toshiyuki
- Journal Title
  
  AIP Advances
  
  Volume: 10 Issue: 11 Pages: 115019-115019
- DOI
  10.1063/5.0026095
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Growth mechanism of Zinc Oxide thin film by mist chemical vapor deposition via the modulation of [H2O]/[Zn] ratios2019
- Author(s)
  Phimolphan Rutthongjan, Misaki Nishi, Li Liu, Shota Sato, Yuya Okada, Giang T. Dang, Toshiyuki KAWAHARAMURA
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 12 Issue: 6 Pages: 65505-65505
- DOI
  10.7567/1882-0786/ab2134
- NAID
  210000156005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Electronic devices fabricated on mist-CVD-grown oxide semiconductors and their applications2019
- Author(s)
  Giang T. Dang, Martin Allen, Mamoru Furuta, Toshiyuki KAWAHARAMURA
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: 9 Pages: 90606-90606
- DOI
  10.7567/1347-4065/ab2195
- NAID
  210000156012
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thinfilms grown by mist-chemical vapor deposition2019
- Author(s)
  Shrikant Saini, Paolo Mele, Takafumi Oyeke, Junichiro Shiomi, Janne Petteri Niemela, Maarit karppinen, koji Miyazaki, Chaoyang Li, Toshiyuki Kawaharamura, Ataru Ichinose
- Journal Title
  
  Thin Solid Films
  
  Volume: 685 Pages: 180-185
- DOI
  10.1016/j.tsf.2019.06.010
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Composition control of Zn1-x Mg x O thin films grown using mist chemical vapor deposition2019
- Author(s)
  Rutthongjan Phimolphan、Liu Li、Nishi Misaki、Sakamoto Masahito、Sato Shota、Pradeep Ellawala K C、Dang Giang T、Kawaharamura Toshiyuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: 3 Pages: 035503-035503
- DOI
  10.7567/1347-4065/aafd18
- NAID
  210000135372
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Study on fabrication of conductive antimony doped tin oxide thin films (SnO x :Sb) by 3rd generation mist chemical vapor deposition2019
- Author(s)
  Liu Li、Kawaharamura Toshiyuki、Dang Giang Thai、Pradeep Ellawala K. C.、Sato Shota、Uchida Takayuki、Fujita Shizuo、Hiramatsu Takahiro、Kobayashi Hiroshi、Orita Hiroyuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: 2 Pages: 025502-025502
- DOI
  10.7567/1347-4065/aaf4b6
- NAID
  210000135278
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Fabrication of Molybdenum Disulfide (MoS<sub>2</sub>) Layered Thin Films by Atmospheric-Pressure Solution Based Mist CVD2019
- Author(s)
  SATO Shota、SAKAMOTO Masahito、KAWAHARAMURA Toshiyuki
- Journal Title
  
  Journal of the Society of Materials Science, Japan
  
  Volume: 68 Issue: 2 Pages: 155-161
- DOI
  10.2472/jsms.68.155
- NAID
  130007602358
- ISSN
  0514-5163, 1880-7488
- Year and Date
  2019-02-15
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Growth of α-Cr2O3 single crystals by mist CVD using ammonium dichromate2018
- Author(s)
  Dang Giang T.、Suwa Yuta、Sakamoto Masahito、Liu Li、Rutthongjan Phimolphan、Sato Shota、Yasuoka Tatsuya、Hasegawa Ryo、Kawaharamura Toshiyuki
- Journal Title
  
  Applied Physics Express
  
  Volume: 11 Issue: 11 Pages: 111101-111101
- DOI
  10.7567/apex.11.111101
- NAID
  210000136389
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01873, KAKENHI-PROJECT-16F16373
[Journal Article] Challenges of fabrication of a large-area-uniform molybdenum disulfide layered thin film at low growth temperature by atmospheric-pressure solution-based mist CVD2018
- Author(s)
  Sato Shota、Nitta Noriko、Sakamoto Masahito、Liu Li、Rutthongjan Phimolphan、Nishi Misaki、Ueda Mariko、Yasuoka Tatsuya、Hasegawa Ryo、Tagashira Yuki、Ozaki Tamako、Pradeep Ellawala K. C.、Dang Giang T.、Kawaharamura Toshiyuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 11 Pages: 110306-110306
- DOI
  10.7567/jjap.57.110306
- NAID
  210000149746
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Journal Article] Bandgap engineering of α-(AlxGa1-x)2O3 by a mist chemical vapor deposition two-chamber system and verification of Vegard's Law2018
- Author(s)
  Dang G. T.、Yasuoka T.、Tagashira Y.、Tadokoro T.、Theiss W.、Kawaharamura T.
- Journal Title
  
  Applied Physics Letters
  
  Volume: 113 Issue: 6 Pages: 062102-062102
- DOI
  10.1063/1.5037678
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873, KAKENHI-PROJECT-16F16373
[Journal Article] Single-step simple solvothermal synthetic approach to ultra-fine MgO nanocrystals using high-temperature and high-pressure acetonitrile2017
- Author(s)
  Ellawala K. C. Pradeep, Masataka Ohtani, Toshiyuki Kawaharamura, and Kazuya Kobiro
- Journal Title
  
  Chem. Lett.
  
  Volume: 46 Issue: 7 Pages: 940-943
- DOI
  10.1246/cl.170185
- NAID
  130005709513
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Incorporation of yttrium to yttrium iron garnet thin films fabricated by mist CVD2017
- Author(s)
  Li Liu, Yuta Suwa, Shota Sato, Yoshiaki Nakasone, Misaki Nishi, Giang T. Dang, Ellawala K. C. Pradeep, and Toshiyuki Kawaharamura
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 4S Pages: 04CJ02-04CJ02
- DOI
  10.7567/jjap.56.04cj02
- NAID
  210000147625
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Zinc tin oxide metal semiconductor field effect transistors and their improvement under negative bias (illumination) temperature stress2017
- Author(s)
  G. T. Dang, T. Kawaharamura, M. Furuta, and M. W. Allen
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 110 Issue: 7 Pages: 073502-073502
- DOI
  10.1063/1.4976196
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421, KAKENHI-PROJECT-16F16373, KAKENHI-PROJECT-16K06309
[Journal Article] Silver Oxide Schottky Contacts and Metal Semiconductor Field-Effect Transistors on SnO2 thin films2016
- Author(s)
  Giang T. Dang, Takayuki Uchida, Toshiyuki Kawaharamura, Mamoru Furuta, Adam R. Hyndman, Rodrigo Martinez, Shizuo Fujita, Roger J. Reeves, Martin W. Allen
- Journal Title
  
  Applied Physics Express
  
  Volume: 9 Issue: 4 Pages: 041101-041101
- DOI
  10.7567/apex.9.041101
- NAID
  210000137840
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421, KAKENHI-PROJECT-15J07829, KAKENHI-PROJECT-16K06309
[Journal Article] Atmospheric growth of hybrid ZnO thin films for inverted polymer solar cells2016
- Author(s)
  Chandan Biswas, Zhu Ma, Xiaodan Zhu, Toshiyuki Kawaharamura, Kang L. Wang
- Journal Title
  
  Solar Energy Materials and Solar Cells
  
  Volume: 157 Pages: 1048-1056
- DOI
  10.1016/j.solmat.2016.08.022
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Atmospheric-Pressure Epitaxial Growth Technique of a Multiple Quantum Well by Mist Chemical Vapor Deposition based on Leidenfrost droplets2016
- Author(s)
  Toshiyuki Kawaharamura, Giang T. Dang, Noriko Nitta
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 109 Issue: 15 Pages: 151603-151603
- DOI
  10.1063/1.4964647
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05421, KAKENHI-PROJECT-16F16373
[Journal Article] Stability of In-Ga-Zn-O metal-semiconductor field-effect-transistors under bias, illumination, and temperature stress2015
- Author(s)
  Giang T. Dang, Toshiyuki Kawaharamura, Mamoru Furuta, Saurabh Saxena, Martin W. Allen
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 107 Issue: 14 Pages: 143504-143504
- DOI
  10.1063/1.4931960
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Atmospheric and Aqueous Deposition of Polycrystalline Metal Oxides Using Mist-CVD for Highly Efficient Inverted Polymer Solar Cells2015
- Author(s)
  Xiaodan Zhu, Toshiyuki Kawaharamura, Adam Z Stieg, Chandan Biswas, Lu Li, Zhu Ma, Mark A. Zurbuchen, Qibing Pei, Kang L Wang
- Journal Title
  
  Nano Letters
  
  Volume: 15 Issue: 8 Pages: 4948-4954
- DOI
  10.1021/acs.nanolett.5b01157
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Metal-Semiconductor Field-Effect Transistors With In-Ga-Zn-O Channel Grown by Nonvacuum-Processed Mist Chemical Vapor Deposition2015
- Author(s)
  Giang T. Dang, Toshiyuki Kawaharamura, Mamoru Furuta, Martin W. Allen
- Journal Title
  
  IEEE Electron Device Letters
  
  Volume: 36 Issue: 5 Pages: 463-465
- DOI
  10.1109/led.2015.2412124
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition2015
- Author(s)
  Shirahata Takahiro, Kawaharamura Toshiyuki, Fujita Shizuo, Orita Hiroyuki
- Journal Title
  
  Thin Solid Films
  
  Volume: 597 Pages: 30-38
- DOI
  10.1016/j.tsf.2015.11.006
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Mist-CVD Grown Sn-Doped α-Ga2O3 MESFETs2015
- Author(s)
  Giang T. Dang, Toshiyuki Kawaharamura, Mamoru Furuta, Martin W. Allen
- Journal Title
  
  IEEE Transactions on Electron Devices
  
  Volume: 62 Issue: 11 Pages: 3640-3644
- DOI
  10.1109/ted.2015.2477438
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Journal Article] Fabrication of Zinc Oxide Nanostructures by Mist Chemical Vapor Deposition2014
- Author(s)
  Xin Li, Chaoyang Li, Toshiyuki Kawaharamura, Dapeng Wang, Noriko Nitta, Mamoru Furuta, Hiroshi Furuta and Akimitsu Hatta
- Journal Title
  
  Transactions of the Materials Research Society of Japan
  
  Volume: 39(2) Pages: 161-164
- NAID
  130005004316
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Influence of Substrates on Formation of Zinc Oxide Nanostructures by a Novel Reducing Annealing Method2014
- Author(s)
  X. Li, C. Li, T. Kawaharamura, D. Wang, N. Nitta, M. Furuta, H. Furuta, and A. Hatta
- Journal Title
  
  Nanoscience and Nanotechnology Letters
  
  Volume: 6 Issue: 2 Pages: 174-180
- DOI
  10.1166/nnl.2014.1708
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560408, KAKENHI-PROJECT-24561060
[Journal Article] Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow2014
- Author(s)
  Toshiyuki Kawaharamura
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 53 Issue: 5S1 Pages: 05FF08-05FF08
- DOI
  10.7567/jjap.53.05ff08
- NAID
  210000143837
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630395
[Journal Article] Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds2014
- Author(s)
  Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, Toshiyuki Kawaharamura and Mamoru Furuta
- Journal Title
  
  Physica status solidi (c)
  
  Volume: 未定 Issue: 7-8 Pages: 1225-1228
- DOI
  10.1002/pssc.201300655
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560408, KAKENHI-PROJECT-25286050
[Journal Article] Development of Well-Aligned ZnO Nanorods as Photoelectrode for Dye-Sensitized Solar Cell Application2013
- Author(s)
  C. Li, D.Wang, T. Kawaharamura, N. Nitta, H. Furuta, A. Akimitsu
- Journal Title
  
  EUPVSEC proceeding
  
  Volume: 2013 Pages: 434-437
- DOI
  10.4229/28thEUPVSEC2013-1AV.3.24
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Stoichiometry control of ZnO thin film by adjusting working gas ratio during radio frequency magnetron sputtering2013
- Author(s)
  C. Li, D. Wang, Z. Li, X. Li, M. Furuta, T. Kawaharamura
- Journal Title
  
  Journal of Materials
  
  Volume: 2013 Pages: 1-7
- DOI
  10.1155/2013/547271
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Arrayed ZnO Nanorods Fabrication on ZnO Film by Self-catalyst Growth Method in Aqueous Solution2013
- Author(s)
  E. K.C. Pradeep, X. Li, T. Kawaharamura, D.Wang, A. Hatta, C. Li*
- Journal Title
  
  Mater. Res. Soc. Symp. Proc.
  
  Volume: 1584 Pages: 1204-1204
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Influence of Substrates on Formation ofZinc Oxide Nanostructures by a Novel Reducing Annealing Method2013
- Author(s)
  Xin Li, Chaoyang Li, Toshiyuki Kawaharamura, Dapeng Wang,Noriko Nitta, Mamoru Furuta, Hiroshi Furuta, and Akimitsu Hatta
- Journal Title
  
  Nanoscience and Nanotechnology Letters
  
  Volume: 5 Pages: 1-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Well-arrayed ZnO nanostructures formed by multi-annealing processes at low temperature2012
- Author(s)
  Dapeng Wang, Zeming Li, Toshiyuki Kawaharamura, Mamoru Furuta, Tadashi Narusawa, Chaoyang Li
- Journal Title
  
  Physica Status Solidi C
  
  Volume: 9 Pages: 194-197
- NAID
  120005729026
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561060
[Journal Article] Development and Research on the Mechanism of Novel Mist Etching Method for Oxide Thin Films2012
- Author(s)
  T. Kawaharamura and T. Hirao
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol.51 Issue: 3R Pages: 36503-36503
- DOI
  10.1143/jjap.51.036503
- NAID
  40019199870
- Data Source
  KAKENHI-PROJECT-22760232
[Journal Article] Influence of annealing under reducing ambient on properties of ZnO thin films prepared by mist CVD2011
- Author(s)
  T. Kawaharamura, H. Orita, T. Shirahata, A Yoshida, S. Fujita, and T. Hirao
- Journal Title
  
  Physica Status Solidi(c)
  
  Volume: Vol.9 Issue: 2 Pages: 190-193
- DOI
  10.1002/pssc.201100281
- Data Source
  KAKENHI-PROJECT-22760232
[Journal Article] Successful growth of conductive highly-crystalline Sn-dopedα-Ga2O3 thin films by fine channel mist chemical vapor deposition2011
- Author(s)
  T. Kawaharamura, Giang T. Dang, and M. Furuta
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol.51 Issue: 4R Pages: 40207-40207
- DOI
  10.1143/jjap.51.040207
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760232, KAKENHI-PROJECT-23560408
[Patent] Ga2O3薄膜の製造方法2020
- Inventor(s)
  川原村敏幸、ダンタイジャン、劉麗、安岡龍哉
- Industrial Property Rights Holder
  川原村敏幸、ダンタイジャン、劉麗、安岡龍哉
- Industrial Property Rights Type
  特許
- Filing Date
  2020
- Data Source
  KAKENHI-PROJECT-18H01873
[Patent] 深紫外発光素子およびその製造方法2017
- Inventor(s)
  川原村敏幸、鄧太江、須和祐太、小島一信、秩父重英
- Industrial Property Rights Holder
  高知工科大学
- Industrial Property Rights Type
  特許
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-16F16373
[Patent] 深紫外発光素子およびその製造方法2017
- Inventor(s)
  川原村敏幸、鄧太江、須和祐太、小島一信、秩父重英
- Industrial Property Rights Holder
  高知工科大学
- Industrial Property Rights Type
  特許
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-15H05421
[Patent] 膜厚算出方法、成膜装置およびプログラム2015
- Inventor(s)
  川原村敏幸、織田真也、人羅俊実
- Industrial Property Rights Holder
  高知工科大学、(株)FLOSPHIA
- Industrial Property Rights Type
  特許
- Filing Date
  2015-02-06
- Data Source
  KAKENHI-PROJECT-26630395
[Patent] エピタキシャル成長方法および成長装置ならびに量子井戸構造の作製方法2014
- Inventor(s)
  川原村敏幸、鄧太江(ダン，タイ　ジャン)、織田真也、人羅俊実
- Industrial Property Rights Holder
  高知工科大学、(株)FLOSPHIA
- Industrial Property Rights Type
  特許
- Filing Date
  2014-08-29
- Data Source
  KAKENHI-PROJECT-26630395
[Patent] 量子井戸構造および半導体装置2014
- Inventor(s)
  川原村敏幸、鄧太江(ダン，タイ　ジャン)、織田真也、人羅俊実
- Industrial Property Rights Holder
  高知工科大学、(株)FLOSPHIA
- Industrial Property Rights Type
  特許
- Filing Date
  2014-08-29
- Data Source
  KAKENHI-PROJECT-26630395
[Patent] 酸化マグネシウム(M g O)絶縁膜の成膜方法、酸化マグネシウム絶縁膜および酸化マブネシウム絶縁膜の成膜装置2011
- Inventor(s)
  白幡孝洋,織田容征,吉田章男,平尾孝,川原村敏幸
- Industrial Property Rights Holder
  高知工科大学,東芝三菱電機産業システム株式会社
- Industrial Property Number
  2011-008549
- Filing Date
  2011-01-17
- Data Source
  KAKENHI-PROJECT-22760232
[Patent] 酸化マグネシウム(MgO)絶縁膜の成膜方法、酸化マグネシウム絶縁膜および酸化マブネシウム絶縁膜の成膜装置2011
- Inventor(s)
  白幡孝洋, 織田容征, 吉田章男, 平尾孝, 川原村敏幸
- Industrial Property Rights Holder
  高知工科大学,東芝三菱電機産業システム株式会社
- Industrial Property Number
  2011-008549
- Filing Date
  2011-01-17
- Data Source
  KAKENHI-PROJECT-22760232
[Patent] ドーパントを添加した結晶性の高い導電性α型酸化ガリウム薄膜およびその生成方法2011
- Inventor(s)
  川原村敏幸
- Industrial Property Rights Holder
  高知工科大学
- Industrial Property Number
  2011-164748
- Filing Date
  2011-07-27
- Data Source
  KAKENHI-PROJECT-22760232
[Patent] ミストエッチング装置及びミストエッチング方法2010
- Inventor(s)
  川原村敏幸
- Industrial Property Rights Holder
  高知工科大学
- Industrial Property Number
  2010-045991
- Filing Date
  2010-03-02
- Data Source
  KAKENHI-PROJECT-20860081
[Patent] ミストエッチング装置及びミストエッチング方法
- Inventor(s)
  川原村敏幸
- Industrial Property Rights Holder
  高知工科大学
- Industrial Property Number
  2010-045991
- Data Source
  KAKENHI-PROJECT-20860081
[Presentation] 機能薄膜成膜装置「KAGUYA」内におけるミスト流れの解析と流路および成膜条件の最適化2019
- Author(s)
  朝子幹太（高知工科大）, 佐藤翔太 ,岡田雄哉, 川原村敏幸
- Organizer
  日本機械学会2019年度年次大会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Development of Fabrication process for tin sulfide (SnSX) thin films by solution-based atmospheric-pressure mist CVD2019
- Author(s)
  S. Sato, P. Rutthongjan, L. Liu, G.T. Dang, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Oxygen Source-supported Fabrication of Yttrium Oxide Thin Films by 3rd Generation Mist CVD for Low Temperature Growth2019
- Author(s)
  Li Liu, Misaki Nishi, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Giang T. Dang, and Toshiyuki Kawaharamura
- Organizer
  The 2019 Spring Meeting of the European Materials Research Society (E-MRS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Crystallinity Improvement of Mist Chemical Vapor Deposition Grown ZnO Thin Films by Controlling Film Crystal Orientation2019
- Author(s)
  Phimolphan Rutthongjan, Misaki Nishi, Li Liu, Giang Dang, Toshiyuki Kawaharamura
- Organizer
  2019 MRS Spring Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Growth Mechanism of mist CVD2019
- Author(s)
  Toshiyuki Kawaharamura, Liu Li, Phimolphan Rutthongjan, Shota Sato, Mariko Ueda, Tatsuya Yasuoka, Yuki Tagashira, Tamako Ozaki, Yuna Ishikawa, Miyabi Fukue, Giang T. Dang
- Organizer
  Materials Research Meeting 2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Effectively Enhanced Electrical Properties of SnO2:Sb Films Fabricated by 3rd Generation Mist CVD Using Supporting Materials2019
- Author(s)
  Li Liu, Mariko Ueda, Misaki Nishi, Giang T. Dang, Hiroshi Yanagimoto, Tomoko Kozaki, Toshiyuki Kawaharamura
- Organizer
  The 2019 Spring Meeting of the European Materials Research Society (E-MRS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Growth mechanism of Zinc Oxide thin film by mist-CVD via the modulation of [H2O]/[Zn] ratios2019
- Author(s)
  P. Rutthongjan, M. Nishi, L. Liu, S. Sato, G.T. Dang, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 高温壁面近傍における液滴挙動とその液滴消滅時間に関する研究2019
- Author(s)
  秦暦, 宮地啓太, 川原村敏幸, 岡田雄哉
- Organizer
  日本機械学会2019年度年次大会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法によるn型およびp型ZnO成膜への挑戦2019
- Author(s)
  西美咲, 劉麗, ルトンジャンピモンパン, 佐藤翔太, 上田真理子, 安岡龍也, 長谷川諒, 田頭侑貴, 尾崎珠子, 鄧太江, 川原村敏幸
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法によるn+-Si(100)基板上への強誘電体HfO2薄膜の作製とその電気特性評価2019
- Author(s)
  田原大祐, 西中浩之, 野田実, 佐藤翔太, 川原村敏幸, 吉本昌広
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 円筒管内壁への機能薄膜作製技術の開発2019
- Author(s)
  朝子幹太, 佐藤翔太, 川原村敏幸
- Organizer
  日本機械学会中国四国支部第57期総会・講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 高温下気相中を流動する微小液滴挙動の観測2019
- Author(s)
  宮地啓太, 秦暦, 岡田雄哉, 川原村敏幸
- Organizer
  日本機械学会2019年度年次大会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 溶液系大気圧ミストCVDによる硫化スズ（SnSx）薄膜の作製プロセスの開発2019
- Author(s)
  佐藤翔太, 劉麗, G. T. Dang, 川原村敏幸
- Organizer
  2019年度応用物理・物理系学会中国四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDプロセス2019
- Author(s)
  川原村敏幸
- Organizer
  CEATEC
- Invited
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 高温壁面近傍における液滴挙動と液滴消滅時間に関する研究2019
- Author(s)
  秦暦, 宮地啓太, 西村一宏, 川原村敏幸
- Organizer
  日本機械学会中国四国支部第57期総会・講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Thin Film Growth Mechanism in CVD using Flow Containing Mist Droplets2019
- Author(s)
  Toshiyuki Kawaharamura, Misaki Nishi, Li Liu, Masahito Sakamoto, Phimolphan Rutthongjan, Shota Sato, Mariko Ueda, Tatsuya Yasuoka, Yuki Tagashira, Tamako Ozaki, Giang T. Dang
- Organizer
  The 2019 Spring Meeting of the European Materials Research Society (E-MRS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法における原料溶媒が薄膜成長に及ぼす影響2019
- Author(s)
  坂本雅仁, 安岡龍哉, 西美咲, 劉麗, ルトンジャンピモンパン, 佐藤翔太, 上田真理子, 田頭侑貴, 長谷川諒, 尾崎珠子, 鄧太江, 川原村敏幸
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDにおける薄膜成長メカニズム2019
- Author(s)
  川原村敏幸, 西美咲, 劉麗, 坂本雅仁, ルトンジャンピモンパン, 佐藤翔太, 上田真理子, 安岡達也, 長谷川諒, 田頭侑貴, 尾崎珠子, 鄧太江
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDによるSn系透明導電膜の作製とその特性2019
- Author(s)
  上田真理子, 劉麗, DANG Tai Giang, 川原村敏幸
- Organizer
  2019年度応用物理・物理系学会中国四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Effect of HCl on fabrication of α-Ga2O3 by Mist CVD2019
- Author(s)
  Tatsuya Yasuoka, Masahito Sakamoto, Tamako Ozaki, Yuki Tagashira, Li Liu, Giang. T. Dang, Toshiyuki Kawaharamura
- Organizer
  The 2019 Spring Meeting of the European Materials Research Society (E-MRS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Growth mechanism of Zinc Oxide thin film by mist-chemical-vapor-deposition via the modulation of [H2O]/[Zn] ratios2019
- Author(s)
  Phimolphan Rutthongjan, Misaki Nishi, Li Liu, Giang Dang, Shota Sato, Toshiyuki Kawaharamura
- Organizer
  The 2nd Materials Research Society of Thailand International Conference (MRS-Thailand 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法によるα‐Ga2O3薄膜作製時におけるHClの影響2019
- Author(s)
  安岡龍哉, 坂本雅仁, 尾﨑珠子, 田頭侑貴, L. Liu, G. T. Dang, 川原村敏幸
- Organizer
  2019年度応用物理・物理系学会中国四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDにより作製した硫化スズ薄膜の特性評価2019
- Author(s)
  佐藤翔太, 坂本雅仁, 西美咲, 劉麗, ルトンジャンピモンパン, 鄧太江, 川原村敏幸
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 第III世代ミストCVDを利用した酸化亜鉛系透明導電薄膜の作製2019
- Author(s)
  石川祐奈, P.RUTTHONGJAN, 安岡龍哉, 上田真理子, 福江雅, 劉麗, G. T. DANG, 川原村敏幸
- Organizer
  2019年度応用物理・物理系学会中国四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDによるCu系薄膜の作製2019
- Author(s)
  福江雅, 安岡龍哉, 石川祐奈, 劉麗, DANG Tai Giang, 川原村敏幸
- Organizer
  2019年度応用物理・物理系学会中国四国支部合同学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD における酸化亜鉛薄膜形成時の水の効果2019
- Author(s)
  ルトンジャンピモンパン, 西美咲, 川原村敏幸, 坂本雅仁, 劉麗, 佐藤翔太, 上田真理子, 安岡龍哉, 長谷川諒, 尾崎珠子, 鄧太江
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] 水蒸気雰囲気下における金属化合物の熱分解挙動2018
- Author(s)
  坂本雅仁, 佐藤翔太, 西美咲, 上田真理子, 川原村敏幸
- Organizer
  材料学会第67期通常総会・学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] FC式ミストCVDにおける高品質金属酸化物薄膜作製を目的とした反応メカニズム解析2018
- Author(s)
  西美咲, 劉麗, 佐藤翔太, ルトンジャンピモンパン, 坂本雅仁, 上田真理子, E.K.C.プラディープ, 鄧太江, 川原村敏幸
- Organizer
  材料学会第67期通常総会・学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法によるGa2O3成膜とその特性2018
- Author(s)
  安岡龍哉, 長谷川諒, 田頭侑貴, 尾崎珠子, 佐藤翔太，劉麗，鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法で作製されたATO薄膜の電気的および光学的特性2018
- Author(s)
  上田真理子，劉麗, 佐藤翔太, 西美咲, 鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法で作製されたATO薄膜の電気的および光学的特性2018
- Author(s)
  上田真理子, 劉麗, 佐藤翔太, ダンジャン, 川原村敏幸, 藤田静雄, 織田容征, 平松孝浩
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDにより作製した二硫化モリブデン(MoS2)層状薄膜2018
- Author(s)
  佐藤翔太, 坂本雅仁, 新田紀子, 劉麗, E.K.C.プラディープ, 鄧太江, 川原村敏幸
- Organizer
  材料学会第67期通常総会・学術講演会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Fabrication of Molybdenum disulfide (MoS2) with environmental-friendly by atmosphericpressure solution-based mist CVD2018
- Author(s)
  S. Sato, N. Nitta, M. Sakamoto, D.T. Giang, E.K.C. Pradeep, L. Liu, R. Phimolphan, M. Nishi, M. Ueda, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法による高品質酸化亜鉛薄膜の作製および反応メカニズムの解明2018
- Author(s)
  西美咲, 長谷川諒, 安岡龍哉, 上田真理子, 坂本雅仁, 佐藤翔太, Phimolphan Ruttongja, Liu Li, Dang. T Gian, 川原村敏幸
- Organizer
  化学工学会第50回秋季大会
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Study on the Behaviors of HNO3 in Highly Conductive Antimony Doped Tin Oxide Thin Films Deposited by Novel Mist CVD System2018
- Author(s)
  L. Liu, T. Kawaharamura, M. Ueda, G.T. Dang, S. Sato, S. Fujita, T. Hiramatsu, H. Orita
- Organizer
  Solid State Devices and Materials (SSDM 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] Influence of H2O on ZnO thin film fabrication by mist CVD2018
- Author(s)
  RUTTHONGJAN Phimolphan, 西美咲, 劉麗，鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] FC式ミストCVDの原料供給濃度変化による反応メカニズム解析2018
- Author(s)
  西美咲, 劉麗, 佐藤翔太, 長谷川諒, 安岡龍哉, 上田真理子, 尾﨑珠子, RUTTHONGJAN Phimolphan, 鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVD法による鉄酸化物系磁性薄膜の作製とその特性2018
- Author(s)
  長谷川諒, 安岡龍哉，尾﨑珠子, 上田真理子，西美咲，坂本雅仁，佐藤翔太，RUTTHONGJAN Phimolphan, 劉麗，鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01873
[Presentation] ミストCVDにより作製した二硫化モリブデン(MoS2)薄膜の特性評価2017
- Author(s)
  佐藤翔太, 坂本雅仁, 新田紀子, 劉麗, E. K. C. プラディープ, 鄧太江, 川原村敏幸
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Properties of corundum structure α-(FexGa1-x)2O3 and α-(AlxGa1-x)2O3 thin films grown via Mist CVD2017
- Author(s)
  Giang T. Dang, Yuta Suwa, and Toshiyuki Kawaharamura
- Organizer
  8th International Conference on Advanced Materials and Nanotechnology
- Place of Presentation
  Queenstown, New Zealand
- Year and Date
  2017-02-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Development of α-Ga2O3-based high power devices2017
- Author(s)
  Giang T. Dang, Toshiyuki Kawaharamura,
- Organizer
  6th International Symposium on Frontier Technology (ISFT 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発2017
- Author(s)
  川原村敏幸, 鄧太江, 劉麗;, E.K.C. プラディープ, 龍田宗孝, 古田守, 須和祐太, 佐藤翔太, 中曽根義晃, 山沖駿友, 西美咲, 小林勇亮, 坂本雅仁, ルトンジャンピモンパン
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜パシフィコ, 横浜市, 神奈川
- Year and Date
  2017-03-17
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVD法における高品質金属酸化物薄膜作製を目的とした反応メカニズム解析(Ⅰ)2017
- Author(s)
  西美咲, 須和祐太, 劉麗, ルトンジャンピモンパン, ジャンダン, 川原村敏幸
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜パシフィコ, 横浜市, 神奈川
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発2017
- Author(s)
  川原村敏幸, 鄧太江, 劉麗;, E.K.C. プラディープ, 龍田宗孝, 古田守, 須和祐太, 佐藤翔太, 中曽根義晃, 山沖駿友, 西美咲, 小林勇亮, 坂本雅仁, ルトンジャンピモンパン
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜パシフィコ, 横浜市, 神奈川
- Year and Date
  2017-03-17
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] The Effect of Mist on the Fabrication of Metal Oxide thin films2017
- Author(s)
  Masahito Sakamoto, Li Liu, Shota Sato, Phimolphan Rutthongjan, Misaki Nishi, Yusuke Kobayashi, Mariko ueda, Ellawala K. C. Pradeep, Giang Thai Dang, Toshiyuki Kawaharamura
- Organizer
  第36回電子材料シンポジウム, 36th Electronic Materials Symposium (EMS-37)
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication on Yttrium Oixde Thin Film with High Dielectric Constant by Solution-Based Mist Chemical Vapor Deposition2017
- Author(s)
  Li Liu, Misaki Nishi, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Yusuke Kobayashi, Ellawala K. C. Pradeep, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  2017 MRS Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 気相中を流動する微小液滴の挙動観測2017
- Author(s)
  宮地啓太, 秦暦, 岡田雄哉, 中村衛典, 西村一宏, 佐藤翔太, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] A Fine Channel Reactor as Novel Multi-Purpose Tool for Continuous Uniform Nano-Fabrication2017
- Author(s)
  Ellawala K. C. Pradeep, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Li Liu, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  The 4th International Conference on Nanoscience and Nanotechnology -2017 (ICNSNT-2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] ミストCVDにおける高品質金属酸化物薄膜作製を目的とした反応メカニズム解析2017
- Author(s)
  西美咲, Li Liu, Phimolphan Rutthongjan, 佐藤翔太, 坂本雅仁, 小林勇亮, 上田真理子, Ellawala K. C. Pradeep, Giang Thai Dang, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Properties of corundum structure α-(CrxGa1-x)2O3 and α-(AlxGa1-x)2O3 thin films grown via Mist CVD2017
- Author(s)
  G. T. Dang, T. Kawaharamura
- Organizer
  The 8th International Conference on Advanced Materials & Nanotechnology
- Place of Presentation
  Queenstown, New Zealand
- Year and Date
  2017-02-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発22017
- Author(s)
  川原村敏幸, ルトンジャンピモンパン, 劉麗, 西美咲, 坂本雅仁, 小林勇亮, E.K.C. プラディープ, 鄧太江, 佐藤翔太, 山沖駿友, 中曽根義晃, 上田真理子
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 金属化合物の熱分解時における水の効果2017
- Author(s)
  Masahito Sakamoto, Li Liu, Shota Sato, Phimolphan Rutthongjan, Misaki Nishi, Yusuke Kobayashi, Mariko ueda, Ellawala K. C. Pradeep, Giang Thai Dang and Toshiyuki Kawaharamura
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVDによるSn系透明導電膜の作製2017
- Author(s)
  上田真理子, 劉麗, 佐藤翔太, Phimolphan Rutthongjan, 西美咲, 坂本雅仁, 小林勇亮, Ellawala K. C. Pradeep, Giang Thai Dang, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 高温壁近傍における液滴挙動を表すモデル式の再検討2017
- Author(s)
  秦暦, 宮地啓太, 岡田雄哉, 中村衛典, 西村一宏, 佐藤翔太, 川原村敏幸
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVD法における金属化合物と反応場雰囲気の影響2017
- Author(s)
  坂本雅仁, 川原村敏幸
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発32017
- Author(s)
  川原村敏幸, ルトンジャンピモンパン, 劉麗, 西美咲, 坂本雅仁, 佐藤翔太, 上田真理子, E.K.C. プラディープ, 鄧太江
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] The effect of Mist CVD growth temperature to ZnMgO thin-film properties on ZnO buffer layer2017
- Author(s)
  Phimolphan Rutthongjan, Li Liu, Nishi Misaki, Masahito Sakamoto, Shota Sato, Ellawala K. C. Pradeep, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  6th International Symposium on Frontier Technology (ISFT 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Properties of Molybdenum Disulfide (MoS2) Thin Film Fabricated by Mist CVD2017
- Author(s)
  Shota Sato, Masahito Sakamoto, Dang T. Giang, E. K. C. Pradeep, Liu Li, Phimolphan Rutthongjan, Yusuke Kobayashi, Mariko Ueda, Toshiyuki Kawaharamura
- Organizer
  第36回電子材料シンポジウム, 36th Electronic Materials Symposium (EMS-38)
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] FC式ミストCVDにおける高品質金属酸化物薄膜作製を目的とした反応メカニズム解析(Ⅱ)2017
- Author(s)
  西美咲, 劉麗, 佐藤翔太, ルトンジャンピモンパン, 坂本雅仁, 上田真理子, E.K.C. プラディープ, 鄧太江, 川原村敏幸
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Development of α-Ga2O3-based high power devices2017
- Author(s)
  Giang T. Dang, Toshiyuki Kawaharamura,
- Organizer
  6th International Symposium on Frontier Technology (ISFT 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Study on the Influence Factors of Antimony Doped Tin Oxide Thin Films With High Conductivity Deposited via Mist CVD2017
- Author(s)
  L. Liu, T. Kawaharamura, T. Uchida, S. Fujita, H. Orita, H. Kobayashi,
- Organizer
  Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Water-Supporting Fabrication of Yttrium Oxide (YOx) Thin Films by Mist CVD2017
- Author(s)
  Li Liu, Misaki Nishi, Masahito Sakamoto, Shota Sato, Phimolphan Rutthongjan, Yusuke Kobayashi, Ellawala K. C. Pradeep, Giang Thai Dang, and Toshiyuki Kawaharamura
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Investigation on the composition ratio via ZnMgO thin film fabrication by mist CVD2017
- Author(s)
  Phimolphan Rutthongjan, Li Liu, Misaki Nishi, Masahito Sakamoto, Shota Sato, Ellawala K.C. Pradeep, Giang Thai Dang, and Toshiyuki Kawaharamura
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] The effect of Mist CVD growth temperature to ZnMgO thin-film properties on ZnO buffer layer2017
- Author(s)
  Phimolphan Rutthongjan, Li Liu, Nishi Misaki, Masahito Sakamoto, Shota Sato, Ellawala K. C. Pradeep, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  6th International Symposium on Frontier Technology (ISFT 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Study on the Effect of Solvents on Fabricating ZnO Thin Films by Solution-Based Mist Chemical Vapor Deposition2017
- Author(s)
  Misaki Nishi, Li Liu, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Yusuke Kobayashi, Mariko Ueda, Ellawala K. C. Pradeep, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  2017 MRS Fall Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Composition Control of ZnMgO Thin-films by Mist Chemical Vapor Deposition2017
- Author(s)
  P. Rutthongjan, L. Liu, M. Nishi, M. Sakamoto, S. Sato, E. K. C. Pradeep, G. T. Dang, T. Kawaharamura,
- Organizer
  Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Study on the Effect of Solvents on Fabricating ZnO Thin Films By Solution-based Mist Chemical Vapor Deposition2017
- Author(s)
  Misaki Nishi, Li Liu, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Yusuke Kobayashi, Mariko Ueda, Ellawala K. C. Pradeep, Giang Thai Dang, Toshiyuki Kawaharamura
- Organizer
  第36回電子材料シンポジウム, 36th Electronic Materials Symposium (EMS-36)
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発22017
- Author(s)
  川原村敏幸, ルトンジャンピモンパン, 劉麗, 西美咲, 坂本雅仁, 小林勇亮, E.K.C. プラディープ, 鄧太江, 佐藤翔太, 山沖駿友, 中曽根義晃, 上田真理子
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Composition Control of ZnMgO Thin-films by Mist Chemical Vapor Deposition2017
- Author(s)
  P. Rutthongjan, L. Liu, M. Nishi, M. Sakamoto, S. Sato, E. K. C. Pradeep, G. T. Dang, T. Kawaharamura,
- Organizer
  Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Investigation on the composition ratio via ZnMgO thin film fabrication by mist CVD2017
- Author(s)
  Phimolphan Rutthongjan, Li Liu, Misaki Nishi, Masahito Sakamoto, Shota Sato, Ellawala K.C. Pradeep, Giang Thai Dang, and Toshiyuki Kawaharamura
- Organizer
  ナノテク研シンポジウム
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] A Fine Channel Reactor as Novel Multi-Purpose Tool for Continuous Uniform Nano-Fabrication2017
- Author(s)
  Ellawala K. C. Pradeep, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Li Liu, Giang T. Dang, Toshiyuki Kawaharamura
- Organizer
  The 4th International Conference on Nanoscience and Nanotechnology -2017 (ICNSNT-2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 時間的・空間的隔たり産み出すミスト流を用いた新反応制御技術の開発32017
- Author(s)
  川原村敏幸, ルトンジャンピモンパン, 劉麗, 西美咲, 坂本雅仁, 佐藤翔太, 上田真理子, E.K.C. プラディープ, 鄧太江
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Study on the Effect of Solvents on Fabricating ZnO Thin Films By Solution-based Mist Chemical Vapor Deposition2017
- Author(s)
  Misaki Nishi, Li Liu, Phimolphan Rutthongjan, Shota Sato, Masahito Sakamoto, Yusuke Kobayashi, Mariko Ueda, Ellawala K. C. Pradeep, Giang Thai Dang, Toshiyuki Kawaharamura
- Organizer
  第36回電子材料シンポジウム, 36th Electronic Materials Symposium (EMS-36)
- Data Source
  KAKENHI-PROJECT-16F16373
[Presentation] Study on Fabrication of Yttrium Oxide Thin Films Using Mist CVD2017
- Author(s)
  L. Liu, M. Nishi, S. Sato, P. Rutthongjan, M. Sakamoto, Y. Kobayashi, G. T. Dang, E. K. C. Pradeep, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication of molybdenum disulfide (MoS2) thin film at low temperature under atmospheric pressure by mist CVD2016
- Author(s)
  Shota Sato, Toshiyuki Kawaharamura
- Organizer
  35th Electronic Materials Symposium (EMS-35)
- Place of Presentation
  ラフォーレ琵琶湖, 守山, 滋賀
- Year and Date
  2016-07-06
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストを用いた大気圧下で大面積に亘り高品質な機能薄膜を作製する技術の開発2016
- Author(s)
  川原村敏幸, G.T. Dang, 須和祐太, 佐藤翔太, 松﨑俊祐
- Organizer
  化学工学会第48回秋季大会
- Place of Presentation
  徳島大学, 徳島市, 徳島
- Year and Date
  2016-09-06
- Invited
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVD法による酸化インジウム亜鉛薄膜の成膜速度制御制の向上2016
- Author(s)
  龍田宗孝, 川原村敏幸, 古田守
- Organizer
  ナノテク研シンポジウム2016
- Place of Presentation
  高知工科大学永国寺キャンパス, 高知市, 高知
- Year and Date
  2016-11-12
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Development of Innovative Atmospheric-Pressure Epitaxial Growth Technique “Mist Chemical Vapor Deposition2016
- Author(s)
  T. Kawaharamura
- Organizer
  Gloval Forum on Advanced Materials and Technologies for Sustainable Development 2016
- Place of Presentation
  the Toronto Marriott Downtown Eaton Centre Hotel, Toronto, Canada
- Year and Date
  2016-06-28
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVD法による二硫化モリブデン(MoS2)薄膜の作製と特性評価2016
- Author(s)
  佐藤翔太, G.T. Dang, 坂本雅仁, 川原村敏幸
- Organizer
  ナノテク研シンポジウム2016
- Place of Presentation
  高知工科大学永国寺キャンパス, 高知市, 高知
- Year and Date
  2016-11-12
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVD法による高品質なZnO成膜への挑戦2016
- Author(s)
  西美咲, 劉麗;, 須和祐太, 鄧太江, 川原村敏幸
- Organizer
  ナノテク研シンポジウム2016
- Place of Presentation
  高知工科大学永国寺キャンパス, 高知市, 高知
- Year and Date
  2016-11-12
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication of cuprate superconductor thin film by mist CVD2016
- Author(s)
  Y. Nakasnone, Y. Suwa, Toshiyuki Kawaharamura
- Organizer
  35th Electronic Materials Symposium (EMS-35)
- Place of Presentation
  ラフォーレ琵琶湖, 守山, 滋賀
- Year and Date
  2016-07-08
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Simple solvothermal synthetic approach to spherical Al2O3-TiO2 and ZnO-TiO2 composite nanoassemblies2016
- Author(s)
  E. K. C. Pradeep, M. Ohtani, T. Kawaharamura, K. Kobiro
- Organizer
  35th Electronic Materials Symposium (EMS-35)
- Place of Presentation
  ラフォーレ琵琶湖, 守山, 滋賀
- Year and Date
  2016-07-08
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Synthesis of morphology controlled mixed metal oxide nanomaterials2016
- Author(s)
  Ellawala K. C. Pradeep, M. Ohtani, T. Kawaharamura, K. Kobiro
- Organizer
  ナノテク研シンポジウム2016
- Place of Presentation
  高知工科大学永国寺キャンパス, 高知市, 高知
- Year and Date
  2016-11-12
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabricating high quality YIG thin film by mist CVD under open-air atmospheric pressure2016
- Author(s)
  L. Liu, Y. Suwa, Y. Nakasone, M. Nishi, E. K. C. Pradeep and T. Kawaharamura
- Organizer
  35th Electronic Materials Symposium (EMS-35)
- Place of Presentation
  ラフォーレ琵琶湖, 守山, 滋賀
- Year and Date
  2016-07-08
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 狭差二平板間における微小液滴の挙動II2016
- Author(s)
  松崎俊介, 太田垣知輝, 高木耕平, 川原村敏幸
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州大学伊都キャンパス, 福岡市, 福岡
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication of Y2O3 thin film by mist CVD2016
- Author(s)
  Li Liu, M. Nishi, E.K.C. Pradeep, G.T. Dang, Y. Suwa, T. Kawaharamura
- Organizer
  ナノテク研シンポジウム2016
- Place of Presentation
  高知工科大学永国寺キャンパス, 高知市, 高知
- Year and Date
  2016-11-12
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 狭差二平板間における微小液滴の挙動①2016
- Author(s)
  松崎俊介, 太田垣知輝, 高木耕平, 川原村敏幸
- Organizer
  日本機械学会中国四国支部第54期総会･講演会
- Place of Presentation
  愛媛大学工学部, 松山市, 愛媛
- Year and Date
  2016-03-09
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] 狭差二平板間における微小液滴の挙動②2016
- Author(s)
  松崎俊介, 太田垣知輝, 高木耕平, 川原村敏幸
- Organizer
  日本機械学会 2016年度年次大会
- Place of Presentation
  九州大学伊都キャンパス, 福岡市, 福岡
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] 大気圧下における高品質薄膜作製のための高度制御技術2016
- Author(s)
  川原村敏幸
- Organizer
  エネルギー・環境新技術先導プログラム「高品質/高均質薄膜を実現する非真空成膜プロセスの研究開発」シンポジウム　～ミストデポジション法の科学と応用～
- Place of Presentation
  京都リサーチパーク, 京都市, 京都
- Year and Date
  2016-01-18
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] 大気圧下における高品質薄膜作製のための高度制御技術2016
- Author(s)
  川原村敏幸
- Organizer
  エネルギー・環境新技術先導プログラム「高品質/高均質薄膜を実現する非真空成膜プロセスの研究開発」シンポジウム　～ミストデポジション法の科学と応用～
- Place of Presentation
  京都リサーチパーク, 京都市, 京都
- Year and Date
  2016-01-18
- Invited
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabricating High Quality YIG Thin Film by Mist CVD under Open-Air Atmospheric Pressure2016
- Author(s)
  L. Liu, Y. Suwa, Y. Nakasone, M. Nishi, E.K.C. Pradeep, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Ibaraki, Japan
- Year and Date
  2016-09-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Preparation of IGZO Thin Layer by a Low-temperature Non-vacuum Technique2016
- Author(s)
  E.K.C. Pradeep, G.T. Dang, M. Ohtani, K. Kobiro, T. Kawaharamura
- Organizer
  Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Ibaraki, Japan
- Year and Date
  2016-09-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication of MoS2 Thin Film at Low Temperature By Atmospheric-Pressure Solution Based2016
- Author(s)
  S. Sato, T. Kawaharamura
- Organizer
  PRiME 2016
- Place of Presentation
  the Hilton Hawaiian Village and the Hawaii Convention Center, Honolulu, Hawaii, USA
- Year and Date
  2016-10-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストアニールによる二硫化モリブデン(MoS2)層状膜作製への挑戦2015
- Author(s)
  佐藤翔太, 川原村敏幸, 古田守
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-14
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow2015
- Author(s)
  川原村敏幸
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-15
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] 反応支援型ミストCVD法により低温成長した酸化アルミニウム(AlOx)薄膜のパッシベーション応用特性2015
- Author(s)
  内田貴之, 川原村敏幸, 藤田静雄, 平松孝浩, 織田容征
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] Fabrication Challenge of Quantum Devices by Mist CVD with Highly-Controlled Fluid Technology under Atmospheric Pressure2015
- Author(s)
  Tosihyuki Kawaharamura
- Organizer
  The 2nd Annual International Conference on Nanoscience and Nanotechnology -2015 (ICNSNT-2015)
- Place of Presentation
  Hotel Garadari, Colombo, Sri Lanka
- Year and Date
  2015-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication of Functional Thin Films and Electrical Devices by Mist CVD Equipping Highly Accurate Flow Control Technology under Atmospheric Pressure2015
- Author(s)
  Toshiyuki Kawaharamura, Giang T. Dang, Takayuki Uchida, Mamoru Furuta, Noriko Nitta, Tadahiro Kaida, Yuta Suwa, Munetaka Tatsuda, Martin W. Allen, and Shizuo Fujita
- Organizer
  2015 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-06-30
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] Fabrication and Characterization of Corundum-type Indium Oxide (rh-In2O3) thin film by Mist Chemical Vapor Deposition2015
- Author(s)
  Yuta Suwa, Toshiyuki Kawaharamura
- Organizer
  第34回電子材料シンポジウム, 34th Electronic Materials Symposium (EMS-34)
- Place of Presentation
  ラフォーレ琵琶湖, 守山, 滋賀
- Year and Date
  2015-07-15
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] High-Crystalline Corundum In2O3 Thin Film Fabricated by Mist Chemical Vapor Deposition2015
- Author(s)
  Yuta Suwa, Toshiyuki Kawaharamura
- Organizer
  2015 MRS Fall Meeting & Exhibit
- Place of Presentation
  Hynes Convention Center, Boston, Massachusetts, USA
- Year and Date
  2015-12-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] ミストCVDによって作製したコランダム型酸化インジウム(α-In2O3)の特性評価2015
- Author(s)
  須和祐太, 川原村敏幸, 小島一信, 秩父重英
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-13
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow2015
- Author(s)
  川原村敏幸
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-15
- Invited
- Data Source
  KAKENHI-PROJECT-15H05421
[Presentation] 大気開放下によるSnO薄膜の作製とその物性評価2014
- Author(s)
  内田貴之, 川原村敏幸, 藤田静雄
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-19
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] ライデンフロスト効果を利用したミストCVDによるFe2O3/Ga2O3多重量子井戸の作製2014
- Author(s)
  川原村敏幸, 鄧太江, 新田紀子
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] ミストCVD法による酸化ガリウムバッファ層を用いたコランダム型In2O3薄膜の作製2014
- Author(s)
  須和祐太, 川原村敏幸
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-19
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] A Multiple Quantum Well Fe2O3/Ga2O3 Fabricated Under Atmospheric Pressure by Mist Chemical Vapor Deposition Based on Leidenfrost Effect2014
- Author(s)
  Toshiyuki Kawaharamura, Giang T. Dang, Noriko Nitta
- Organizer
  2014 MRS Fall Meeting & Exhibit
- Place of Presentation
  Hynes Convention Center, Boston, Massachusetts, USA
- Year and Date
  2014-12-01
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] ミストCVD法によるコランダム型In2O3薄膜の作製2014
- Author(s)
  須和祐太, 川原村敏幸
- Organizer
  平成26年度日本材料科学会四国支部総会及び第23回講演大会
- Place of Presentation
  高知工科大学香美キャンパス
- Year and Date
  2014-06-14
- Data Source
  KAKENHI-PROJECT-26630395
[Presentation] Ultrasonc-assisted mist chemical vapor deposition of II-oxide and related oxide compounds2013
- Author(s)
  Shizuo Fujita, Kentaro Kaneko, Toshiyuki Kawaharamura, and Mamoru Furuta
- Organizer
  16th International Conference on II-VI Compounds and Related Materials
- Place of Presentation
  Nagahama, Japan
- Data Source
  KAKENHI-PROJECT-25286050
[Presentation] ミストCVD法によるIGZO TFTの作製2012
- Author(s)
  川原村敏幸, 王大鵬, 古田守
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] 誘電泳動法による半導体CNT薄膜トランジスタの作製2012
- Author(s)
  戸田達也, 古沢浩, 古田守, 川原村敏幸
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] Influence of annealing under reducing ambient on properties of ZnO thin films prepared by mist deposition2011
- Author(s)
  T.Kawaharamura, H.Orita, T.Shirahata, A Yoshida, S.Fujita, T.Hirao
- Organizer
  38th International Symposium on Compound Semiconductors-ISCS 2011
- Place of Presentation
  Maritim proArte Hotel, Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] Green processes of ZnO transparent conducting thin films with mist CVD2011
- Author(s)
  Toshiyuki Kawaharamura, Hiroyuki Orita, Takahiro Shirahata, Takashi Hirao, Shizuo Fujita
- Organizer
  2011 MRS Fall Meeting & Exhibit
- Place of Presentation
  Hynes Convention Center, Boston, MA, USA
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミストCVD法によるIGZO TFTの作製2011
- Author(s)
  川原村敏幸, 王大鵬, 〓太江, 古田守
- Organizer
  薄膜材料デバイス研究会第8回研究集会
- Place of Presentation
  龍谷大学アバンティ響都ホール&マリアージュ・グランデ
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] Study on the behavior of mist droplets and the mechanism in the mist Chemical Vapor Deposition2011
- Author(s)
  T. Kawaharamura, S. Fujita, and T. Hirao
- Organizer
  15th Intl. Conference on II-VI Compounds-II-VI 2011
- Place of Presentation
  Mayan Riviera, Mexico
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミストCVD法によるIGZO TFTの作製2011
- Author(s)
  川原村敏幸, 王大鵬, 登太江, 古田守
- Organizer
  薄膜材料デバイス研究会第8回研究集会
- Place of Presentation
  龍谷大学アバンティ響都ホール & マリアージュ・グランデ
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] Study on the behavior of mist droplets and the mechanism in the mist Chemical Vapor Deposition2011
- Author(s)
  T.Kawaharamura, S.Fujita, T.Hirao
- Organizer
  15th Intl.Conference on II-VI Compounds-II-VI 2011
- Place of Presentation
  Mayan Riviera, Mexico
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミストデポジション法による酸化マグネシウム(MgO)薄膜作製～大気圧下、低温成長への挑戦～2011
- Author(s)
  川原村敏幸, 織田容征, 白幡孝洋, 井川拓人, 伊藤大師, 吉田章男, 藤田静雄, 平尾孝
- Organizer
  発光型/非発光型ディスプレイ合同研究会
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] A Novel Solution-based Vapor-etching Technique : Mist-etching2010
- Author(s)
  川原村敏幸
- Organizer
  2010 MRS Fall Meeting
- Place of Presentation
  Hynes Convention Center, Boston, MA, USA. G6.50
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミスト法における局所反応場でのミスト液滴の挙動2010
- Author(s)
  川原村敏幸, 平尾孝
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミスト法を用いた新規エッチング手法の開発2010
- Author(s)
  川原村敏幸
- Organizer
  2010年春季第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-20860081
[Presentation] A Novel Solution-based Vapor-etching Technique : Mist-etching2010
- Author(s)
  川原村敏幸(Toshiyuki Kawaharamura)、平尾孝(Takashi Hirao)
- Organizer
  2010 MRS Fall Meeting & Exhibit
- Place of Presentation
  Hynes Convention Center, Boston, MA, USA
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミスト法における局所反応場でのミスト液滴の挙動2010
- Author(s)
  川原村敏幸
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学合同セッションK
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-22760232
[Presentation] ミスト技術の応用 -薄膜作製技術への挑戦-2009
- Author(s)
  川原村敏幸
- Organizer
  CVD研究会
- Place of Presentation
  名古屋大学環境総合館LH
- Year and Date
  2009-12-04
- Data Source
  KAKENHI-PROJECT-20860081
[Presentation] ミスト技術の応用-薄膜作製技術への挑戦-2009
- Author(s)
  川原村敏幸
- Organizer
  CVD研究会
- Place of Presentation
  名古屋大学環境総合館LH
- Year and Date
  2009-12-04
- Data Source
  KAKENHI-PROJECT-20860081

1. LI CHAOYANG (50461380)

# of Collaborated Projects: 2 results

# of Collaborated Products: 6 results
2. FURUTA Hiroshi (10389207)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
3. Fujita Shizuo (20135536)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
4. Katayama Ryuji (40343115)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 谷川智之 (90633537)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 上向井正裕 (80362672)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. DANG GIANG

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
8. DANG Tai Giang

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
9. DANG THAI GIANG

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
10. 古田守

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

Kawaharamura Toshiyuki 川原村 敏幸

KAWAHARAMURA Toshiyuki 川原村 敏幸

Research Projects

Research Products

Co-Researchers

Basic research on nanostructure control for the fabrication of ultra-wide bandgap oxide quantum devices by mist CVDPrincipal Investigator

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Development of a high sensitive hydrogen gas detector based on the photoluminescence property of ZnO-based nanostructures

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Development of monolithic cavity wavelength converter made of widegap semiconductors

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ミストＣＶＤによる高耐圧ＨＥＭＴの作製Principal Investigator

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Development of next generation mist CVD enabling atomic level control & development of oxide quantum devicesPrincipal Investigator

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Basic behavior analysis of the Leidenfrost droplet toward the functional thin film fabrication on the three-dimensional objectPrincipal Investigator

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Evolution of functional single-crystalline oxide thin films by mist deposition

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Development of high efficiency dye-sensitized solar cells combing the ZnO nanostructures and carbon nanotubes as the electrodes

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Application technology development harnessing mist characteristics-The mist method for fabrication technology of electronic devices-Principal Investigator

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Development of atmospheric-pressure plasma applied mist chemical vapor deposition and ZnO thin film growth under room temperature using the method.Principal Investigator

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[Journal Article] α-(AlxGa1?x)2O3 single-layer and heterostructure buffers for the growth of conductive Sn-doped α-Ga2O3 thin films via mist chemical vapor deposition2020

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[Journal Article] Conductive Si-doped α-(AlxGa1-x)2O3 thin films with the bandgaps up to 6.22 eV2020

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[Journal Article] Growth mechanism of Zinc Oxide thin film by mist chemical vapor deposition via the modulation of [H2O]/[Zn] ratios2019

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NAID

Kawaharamura Toshiyuki 川原村敏幸

KAWAHARAMURA Toshiyuki 川原村敏幸