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鶴島 稔夫  ツルシマ トシオ

ORCIDConnect your ORCID iD *help
Researcher Number 10236953
External Links
Affiliation (based on the past Project Information) *help 1998: 九州大学, 大学院システム情報科学研究科, 教授
1997 – 1998: 九州大学, 大学院・システム情報科学研究科, 教授
1995 – 1997: 九州大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Applied materials science/Crystal engineering
Except Principal Investigator
表面界面物性
Keywords
Principal Investigator
Oxidation / Crystallization / Silicidation / Rradiation-induced defect / Ion-beam / Silicon / 酸化 / 結晶成長 / シリサイド / 照射誘起欠陥 / イオンビーム / シリコン … More
Except Principal Investigator
… More SiGe / ferroelectric / field effect transistor / quantum chemistry calculation / low contact resistance / high aspect ratio / point defect relaxation process / ultra thin Si oxide / 無損傷化 / 欠陥緩和 / ヘテロ界面 / 欠損測定 / Siプロセス量子化学研究 / 高アスペクト比プロセス / 低抵抗コンタクト / 極薄酸化膜 / Ge歪超格子 / Si / Si高精度化プロセス / 強誘電体 / 電界効果型トランジスタ / 量子化学計算 / 低抵抗コンタクト抵抗 / 高アスペクト比 / 点欠陥緩和過程 / 極薄Si酸化膜 / マイクロマシン / エッチング / LIGA / リソグラフィ / LSI / シンクロトロン放射光 Less
  • Research Projects

    (3 results)
  • Co-Researchers

    (12 People)
  •  Dynamic Behavior of Radiation-induced Defects in Silicon Crystal and Its Application to Semiconductor TechnologyPrincipal Investigator

    • Principal Investigator
      SADOH Taizoh, 鶴島 稔夫
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      KYUSHU UNIVERSITY
  •  九州シンクロトロン放射光のエレクトロニクス応用研究に関する調査研究

    • Principal Investigator
      黒木 幸令
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      表面界面物性
    • Research Institution
      Kyushu University
  •  Ultimate Materials and Processes for Integrated Intelligent System

    • Principal Investigator
      HORIIKE Yasuhiro
    • Project Period (FY)
      1995 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      The University of Tokyo
      Toyo University
  • 1.  SADOH Taizoh (20274491)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 2.  黒木 幸令 (40234596)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  日高 昌則 (50037298)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  柿本 浩一 (90291509)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  HORIIKE Yasuhiro (20209274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  HATTORI Takeo (10061516)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  SHIRAKI Yasuhiro (00206286)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  YASUDA Yukio (60126951)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  TACHIBANA Aketomo (40135463)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  FUYUKI Takashi (10165459)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  松波 弘之 (50026035)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  KENJO Atsushi (20037899)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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