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MATSUMURA Masakiyo
松村 正清
Connect your ORCID iD
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Researcher Number
30110729
External Links
Affiliation (based on the past Project Information)
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2000: Tokyo Insti. Tech., Physical Electronics, Professor, 大学院・理工学研究科, 教授
1987 – 1999: 東京工業大学, 工学部, 教授
1989: Tokyo Inst. of Tech., Eng., Professor, 工学部
1986: Tokyo Institute of Technology, Professor, 工学部, 教授
1985: 東京工業大学, 工, 助教授
Review Section/Research Field
Principal Investigator
電子材料工学
/
電子機器工学
/
Applied materials science/Crystal engineering
/
電子デバイス・機器工学
/
Electronic materials/Electric materials
/
Applied materials
Except Principal Investigator
Electronic materials/Electric materials
/
Applied materials science/Crystal engineering
Keywords
Principal Investigator
Silicon / Germanium / MIS構造 / シリコン / MOCVD / MBE / ヘテロ接合 / Si / 水銀テルル / カドミウムテルル
…
More
/ MISトランジスタ / インジウムアンチモン / ゲルマニウム / 原子層成長 / エキシマレーザ / Hetero Structure / 薄膜トランジスタ / Thin-Film Transistor / MBE成長 / 界面準位 / エピタキシャル成長 / カドミウム・テルル / 水銀・カドミウム・テルル / 原子状水素 / ヘテロ成長 / Atomic Layr Epitaxy / Atomic Hydrogen / Ge人工結晶 / 多結晶シリコン / ALE / 超格子 / SOI / Atomic Layer Epitaxy / Super Lattice / CAICISS / silicon / 熱酸化 / Amorphous-Silicon / Thermal-Oxidation / ヘテロエピタキシ- / 液相堆積 / テトラ・エトキシ・シラン / 二酸化シリコン / 低誘電卒膜 / 層間絶縁膜 / 低誘電率膜 / 結晶成長 / ヘテロエピタキシャル成長 / ジクロロシラン / ジエチルゲルマン / Hetero Epitaxy / 発光 / 電子構造 / 強束縛近似 / レーザ結晶化 / 発光特性 / 溶融再結晶化法 / 発光デバイス / Light Emission / Electronic Structure / Tight Binding sps^* Model / Ge manmade Crystal / 原子層エピタキシ- / AES / 原子層エピロキシ- / 人工結晶 / Manmade Crystal / Hetero Interface / エキシマレーザ結晶化 / 多結晶Si / 横方向成長 / 位相シフト / ディスプレイ / SiC / 結晶粒径 / シリコン薄膜 / デイスプレイ / Excimer-Laser / Poly Si / Lateral Growth / Phase-Shift / Display / Atomic Lager Epitary / Ge界面 / 最表面組成 / Phase Shift / Excimer laser / Poly-Si / Re-crystallization / ELA / TFT / Siグレイン / phase shift / excimer laser annealing / polycrystalline silicon / re-crystallization / thinfilm transistors / large grain size / oxide interface / silicon on glass / 集積回路 / ダイオード / MOS界面 / 二次元デバイスシミュレーション / Integrated Circuit / MOS Interface / Diode / 超薄膜 / アモルファスシリコン / 2段階堆積 / 自己整合 / プラズマCVD / 半導体 / 絶縁体界面 / Ultra-Thin Film / Two-Step deposition / Self-Alignment / Plasma CVD / MISキャパシタ / ヘテロ構造 / MOCVDインジウムアンチモン / MIS構造ヘテロエピタキシャル成長 / 超高速MISトランジスタ / MIS Transistor / Hetero Junction / Indium Antimonide / Cadmium Telluride / Surface States / MIS Capacitor
…
More
Except Principal Investigator
原子層エピタキシ- / 薄膜トランジスタ / 超高速デバイス / 超伝導デバイス / 極微細加工プロセス / 電子ビーム露光技術 / 超薄膜結晶成長 / 量子効果デバイス / Quantum Effect Devices / VHF / 高周波プラズマ / 高温超伝導 / エピタキシャル成長 / MOCVD / 水銀増感光CVD法 / Electron Beam Lithography / グロ-放電プラズマ / プラズマ発光スペクトル / アモルファスシリコン / 電子エネルギ-分布 / 超伝導トランジスタ / YBaCuO / Arレ-ザ励起MOVPE / ハイブリッド励起CVD法 / ゲルマニウム / Ultra-high speed devices / Superconductor Devices / Atomic Layr Epitaxy / Nanofabrications / ラングミュアプロ-ブ / 水素ラジカルアニ-ル / ハイブリッド励起CVD / 光酸素アニ-ル / 光アシスタントCVD / レ-ザ溶融再結晶化法 / ディジタル光CVD法 / 表面光干渉法 / アトミックレジスト / デュアルビーム法 / シリコン / ヘテロ界面 / 原子層エッチング / 塩素 / 極短周期超格子 / プラズマ / プラズマ診断 / ECRプラズマ / Ultra-Fine Structure Processing / Ultra-Thin Film Crystal Growth / Ultra-Fine Structure / Ultra-Thin Film Growth / Thin-Film Transistors / Ultrahigh Speed Devices / Superconducting DEvices / Electron Beam Lighography / Ultrathinfilm Crystal Growth / Thinfilm Transistors / 量子効果デパイス / 原子層エピタキシー / Untrahigh Speed Devices / Superconducting Devices / Thinfilm Crystal Growth / Atomic Layer Epitaxy / Single Electron Transistors
Less
Research Projects
(
28
results)
Co-Researchers
(
26
People)
Project Start Year (Newest)
Project Start Year (Oldest)
Twin Grain Thin Film Transistors
Principal Investigator
Principal Investigator
MACHIDA Shinya
, 松村 正清
Project Period (FY)
2000 – 2001
Research Category
Grant-in-Aid for Scientific Research (B)
Research Field
電子デバイス・機器工学
Research Institution
Tokyo Institute of Technology
STUDY OF ULTRA-THIN-FILM/ULTRA-FINE-STRUCTURE DEVICES
Principal Investigator
ODA Shunri
Project Period (FY)
1998 – 1999
Research Category
Grant-in-Aid for Scientific Research (A).
Research Field
Applied materials science/Crystal engineering
Research Institution
Tokyo Institute of Technology
Study of Si/Ge Strain-Controlled Atomic-Laver Super-Lattices
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (A).
Research Field
Applied materials science/Crystal engineering
Research Institution
Tokyo Institute of Technology
テトラ・イソシアネート・シランを用いたシリコンの液相堆積
Principal Investigator
Principal Investigator
松村 正清
Project Period (FY)
1997 – 1998
Research Category
Grant-in-Aid for Exploratory Research
Research Field
Electronic materials/Electric materials
Research Institution
Tokyo Institute of Technology
Study of basic technology for System-on-Glass
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1997 – 1999
Research Category
Grant-in-Aid for Scientific Research (B)
Research Field
電子デバイス・機器工学
Research Institution
Tokyo Institute of Technology
界面ゆらぎを完全に除去したIV族半導体の極短周期超格子の作製
Principal Investigator
今井 茂
Project Period (FY)
1996
Research Category
Grant-in-Aid for Scientific Research (C)
Research Field
Electronic materials/Electric materials
Research Institution
Ritsumeikan University
STUDY OF ULTRA-THIN-FILM/ULTRA-FINE-STRUCTURE DEVEICES
Principal Investigator
ODA Shunri
Project Period (FY)
1996 – 1997
Research Category
Grant-in-Aid for international Scientific Research
Research Field
Applied materials science/Crystal engineering
Research Institution
TOKYO INSTITUTE OF TECHNOLOGY
Preparation and Characterization of Si-based Manmade Crystals
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1995 – 1997
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
Applied materials science/Crystal engineering
Research Institution
Tokyo Institute of Technology
1原子寸法オーダーで急峻なシリコン/ゲルマニウムヘテロ界面の形成法に関する研究
Principal Investigator
IMAI Sigeru
Project Period (FY)
1994
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Electronic materials/Electric materials
Research Institution
Tokyo Institute of Technology
Study of Ultra-Thin-Film/Ultra-Fine-Structure Devices
Principal Investigator
ODA Shunri
Project Period (FY)
1994 – 1995
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
TOKYO INSTITUTE OF TECHNOLOGY
膜形成の基礎研究
Principal Investigator
高橋 清
Project Period (FY)
1992
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
Study of Ultra-Thin-Film/Ultra-Fine-Structure Devices
Principal Investigator
ODA Shunri
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
TOKYO INSTITUTE OF TECHNOLOGY
Atomic-Layr-Epitaxy of Group VI Semiconductors Using Ultra-Activ Gas
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1992 – 1993
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
Tokyo Institute of Technology
Research of High-Efficiency Silicon-Based Light-Emitting Devices
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
電子機器工学
Research Institution
Tokyo Institute of Technology
酸化物高温超伝導体超薄膜のエピタキシャル多層成長と3端子デバイスへの応用
Principal Investigator
小田 俊理
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
膜形成の基礎研究
Principal Investigator
高橋 清
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
VHF帯プラズマの発生と制御
Principal Investigator
小田 俊理
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
酸化物高温超伝導体超薄膜のエピタキシャル多層成長と3端子デバイスへの応用
Principal Investigator
小田 俊理
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
膜形成の基礎研究
Principal Investigator
高橋 清
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
狭ギャップII-VI族半導体の極薄膜成長法に関する研究
Principal Investigator
Principal Investigator
松村 正清
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
VHF帯(100メガヘルツ領域)プラズマの発生と制御
Principal Investigator
小田 俊理
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
酸化物高温超伝導体超薄膜のエピタキシャル多層成長と3端子デバイスへの応用
Principal Investigator
小田 俊理
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
狭ギャップII-VI族半導体の極薄膜成長法に関する研究
Principal Investigator
Principal Investigator
松村 正清
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
VHF帯(100メガヘルツ領域)プラズマの発生と制御
Principal Investigator
小田 俊理
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
狭ギャップII-VI族半導体の極薄膜成長法に関する研究
Principal Investigator
Principal Investigator
松村 正清
Project Period (FY)
1987
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Tokyo Institute of Technology
Hetero MIS Structure Using Ultra High Mobility Semiconductor
Principal Investigator
Principal Investigator
MATSUMURA M.
Project Period (FY)
1987 – 1989
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子材料工学
Research Institution
Tokyo Institute of Technology
Investigation of Behaviours of Electrons in Ultra-thin Amorphous Silicon Layer and their Device Applications
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1985 – 1986
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
Applied materials
Research Institution
Tokyo Institute of Technology
Fabrication of High-Speed Amorphous-Silicon Integrated Circuits
Principal Investigator
Principal Investigator
MATSUMURA Masakiyo
Project Period (FY)
1984 – 1985
Research Category
Grant-in-Aid for Developmental Scientific Research
Research Field
電子機器工学
Research Institution
Tokyo Institute of Technology
# of Projects (Dsc)
# of Projects (Asc)
1.
ODA Shunri
(50126314)
# of Collaborated Projects:
15 results
# of Collaborated Products:
0 results
2.
SUGIURA Osamu
(10187643)
# of Collaborated Projects:
12 results
# of Collaborated Products:
0 results
3.
UCHIDA Sasutaka
(80134823)
# of Collaborated Projects:
7 results
# of Collaborated Products:
0 results
4.
IMAI Sigeru
(40223309)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
5.
ZAMA Hideaki
(50206033)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
6.
SUGAHARA Satoshi
(40282842)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
7.
MILNE William I.
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
8.
MOORE David F.
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
9.
川合 真紀
(70177640)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
10.
高橋 清
(10016313)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
11.
吉川 明彦
(20016603)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
12.
垂井 康夫
(10143629)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
13.
坪内 和夫
(30006283)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
14.
岩井 荘八
(40087474)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
15.
KASTNER Marc
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
16.
MACHIDA Shinya
(70313335)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
17.
KIMURA Ryuuhei
(80161587)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
18.
伊藤 明
(30282833)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
19.
畑谷 成郎
(90302942)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
20.
HAYAMA Hiroshi
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
21.
MIMURA Akio
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
22.
W I ミルン
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
23.
D F ムーア
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
24.
WILLIAM Miln
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
25.
DAVID Moore
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
26.
KASTNER Mark
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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