Inoue Haruyuki 井上晴行

… Alternative Names

INOUE Haruyuki 井上晴行

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Researcher Number	30304009
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Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 助教
Affiliation (based on the past Project Information) *help	2012: 大阪大学, 工学(系)研究科(研究院), 助教 2011 – 2012: 大阪大学, 大学院・工学研究科, 助教 2010: 大阪大学, 工学研究科, 助教 2007 – 2008: 大阪大学, 大学院・工学研究科, 助教 2006: Osaka University, Graduate School of Engineering, Assistant Professor, 大学院工学研究科, 助手 1998 – 2005: 大阪大学, 大学院・工学研究科, 助手
Review Section/Research Field	Except Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Applied optics/Quantum optical engineering / 電子デバイス・機器工学
Keywords	Except Principal Investigator シングルモード光ファイバ / HeCdレーザー / WGMモード / フォトレジスト / 極微小突起 / 微小共振球 / Tiサファイアレーザー / エバネセント場 / 走査型近接場光学顕微鏡 / 位相シフト干渉計 … More / 光ファイバ / 回折球面波 / フェムト秒レーザー / SNOM / fiber optic plate / 絶対形状計測 / 進行波共振 / ポリスチレン微小球 / 光の近接場 / 計測の再現性 / 高精度絶対形状計測 / 光干渉計測 / He-Neレーザー / 位相シフト干渉法 / 点光源 / 3次元境界要素法 / 高空間分解能 / 極微小突起プローブ / spherical diffraction wave / measurement error / aspherical surface measurement / absolute surface figure measurement / single-mode optical fiber / phase-shifting interferometry / point diffraction interferometry / デジタルCCDカメラ / 7フレームアルゴリズム / 位相シフト干渉計測法 / 点回折干渉計測法 / 大口径光学素子 / HeNeレーザー / Point Diffraction Inteferometer / 点回折球面波干渉計 / 非球面観測 / 計測誤差 / 非球面計測 / 位相シフト干渉計測 / 点回折干渉計測 / repeatability / absolute shape measurement / optical interferometry / Helium-Neon laser / single mode optical fiber / phase shift interferometry / point light source / diffracted Spherical wavefront / EUVL露光装置 / 点光源回折干渉法 / surface defect / surface morphology / high-frequency pulse / surface characterization / ultra-precision machining / insulator / scanning tunneling spectroscopy / scanning tunneling microscope / 表面欠陥 / 表面微細構造 / 高周波パルス / 表面キャラクタリゼーション / 超精密加工 / 絶縁体 / 走査トンネル分光法 / 走査トンネル顕微鏡 / high spatial resolution / multi photon absorption process / 3-dimensional finite element method / ultraviolet resins / micro protrusion probe / femto-second laser / evanescent field / scanning near-field optical microscope / 極微細光加工 / チタンサファイアレーザー / 多光子吸収過程 / 紫外線硬化性樹脂 / three dimensional boundary element method / micro protrusion / HeCd laser / photoresist / Morphology Dependent Resonances / Whispering Gallery Modes / spherical micro resonator / Scanning Near-field Optical Microscope / 時間領域差分法 / 走査系近接場光学顕微鏡 / 三次元境界要素法 / MDRs / WGMs / Point Diffraction Interierometer / Point Diffraction Interferometer / PDI / 精密加工計測 / PDI(Point Diffraction Interferometer) / 加工計測 / 精密位置決め / 放物面計測 / 非球面形状計測 / ガラスレスCCDカメラ / デジタルホログラフィー / 表面形状計測 / Helmholtz-Kirchhoffの積分定理 / デジタルホログラフ / phase-shifting interferometer / point diffraction interferometer / 点光源回折干渉計 / 近接場局所分光 / キャビティーリングダウン分光 Less

Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical Fibers
- Principal Investigator
  
  NAKANO Motohiro
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Development of Phase-Shifting Point Diffraction Interferometer Assisted by Fiber Optic Window : Highly-Reproducible Absolute Surface Figure Measurement of Large Aperture Aspherical Mirrors
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Absolute surface figure measurement of aspherical surfaces with diffracted wavefronts as reference waves emitted from two optical fibers
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
回折点光源・位相シフト干渉法を応用した平担面の超高精度絶対形状計測法の検討
- Principal Investigator
  
  片岡俊彦
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Characterization of insulator surfaces after ultra-precision machining by STM/STS with high-frequency pulses
- Principal Investigator
  
  ENDO Katsuyoshi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of a superior PS-PDI(Phase-Shifting Point Diffraction Interferometer) for Absolute Shape Measurement of Large-Diameter Surfaces
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Graduate School of Engineering, Osaka University
微小共振球をプローブとした走査型キャビティーリングダウン顕微分光(CRDMS)法
- Principal Investigator
  
  押鐘寧
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Osaka University
微小球共振器をプローブとした走査型CRDS顕微システムによる極微細構造の分光診断
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Osaka University
Application of optical near-field excited with ultra fast laser pulses to microfabrication
- Principal Investigator
  
  KATAOKA Toshihiko
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Osaka University
Development of scanning near-field optical microscope with a micro rasonator and a optical resonator
- Principal Investigator
  
  OSHIKANE Yasushi
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Osaka University

All 2012 2011 2010 2008 2007 2006 2005 2004

All Journal Article Presentation Book

[Book] Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers, Selected Topics on Optical Fiber Technology, Part 2, Chapter 142012
- Author(s)
  Oshikane Yasushi, Nakano Motohiro and Inoue Haruyuki
- Total Pages
  67
- Publisher
  (Moh. Yasin, Sulaiman W. Harun and Hamzah Arof, eds.), InTech, Croatia
- Data Source
  KAKENHI-PROJECT-22560109
[Book] Selected Topics on Optical Fiber Technology, Part 2, Chapter 14, Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers2012
- Author(s)
  Oshikane Yasushi, Nakano Motohiro, Inoue Haruyuki
- Publisher
  InTech (ISBN 978-953-51-0091-1)
- Data Source
  KAKENHI-PROJECT-22560109
[Journal Article] Numerical Reconstruction of Wavefront in Phase-Shifting Point Diffraction Interferometer by Digital Holography2008
- Author(s)
  Toshiaki Matsuura, Satoru Okagaki, Yasushi Oshikane, Haruyuki Inoue, Motohiro Nakano, Toshihiko Kataoka
- Journal Title
  
  Surface and Inter face Analysis Vol. 40
  
  Pages: 1028-1032
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360066
[Journal Article] Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers2007
- Author(s)
  Toshiaki MATSUURA, Satoru OKAGAKI, Takaaki NAKAMURA, Yasushi OSHIKANE, Haruyuki INOUE, Motohiro NAKANO, andToshihiko KATAOKA
- Journal Title
  
  Optical Review Vol. 14
  
  Pages: 401-405
- NAID
  10020010020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360066
[Journal Article] ファイバ型PS-PDI装置(Phase-Shifting Point Diffraction Interferometer)の開発-光ファイバからの回折球面波同士の干渉計測による精度の検証-2007
- Author(s)
  松浦敏晋, 岡垣覚, 中村崇亮, 押鐘寧, 井上晴行, 中野元博, 片岡俊彦
- Journal Title
  
  2007年度精密工学会春季大会学術講演会講演論文集
- NAID
  130005028613
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] ファイバ型PS/PDIによる大口径ミラーの計測2007
- Author(s)
  松浦敏晋, 岡垣覚, 中村崇亮, 押鐘寧, 井上晴行, 中野元博, 片岡俊彦
- Journal Title
  
  第54回応用物理学関経連合講演会講演予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] FOW(Fiber Optic Window)を用いた絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発2006
- Author(s)
  中村崇亮, 岡垣覚, 松浦敏晋, 押鐘寧, 片岡俊彦, 井上晴行, 中野元博
- Journal Title
  
  精密工学会2006年度関西地方定期学術講演会講演論文集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] FOW(Fiber Optic Window)投影面を用いた大口径ミラー絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発2006
- Author(s)
  岡垣覚, 中村崇亮, 松浦敏晋, 片岡俊彦, 押鐘寧, 井上晴行, 中野元博
- Journal Title
  
  2006年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 161-161
- NAID
  130004658297
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] Absolute surface profiling of large diameter mirror by point diffraction interferometer2006
- Author(s)
  S.Okagaki, T.Nakamura, T.Matsuura, Y.0shikane, T.Kataoka, H.Inoue, M.Nakanao
- Journal Title
  
  Extended abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
  
  Pages: 121-122
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] 光ファイバ型点光源を2つ用いたPDI干渉計による大口径ミラーの形状計測2005
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 岡垣覚, 中野元博, 井上晴行
- Journal Title
  
  第66回応用物理学会学術講演会講演予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] 大口径ミラーの絶対形状評価のためのファイバ型2光源PDI干渉計測装置の開発-ミラー保持方法の改良とノイズの低減-2005
- Author(s)
  岡垣覚, 中村崇亮, 押鐘寧, 片岡俊彦, 井上晴行, 中野元博
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集
- NAID
  130004657236
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] レーザー光散乱法によるSiウエハ表面の微小欠陥計測2005
- Author(s)
  井上晴行, 片岡俊彦
- Journal Title
  
  光アライアンス Vol.16, No.2
  
  Pages: 36-41
- NAID
  40006601718
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] ファイバ光源を利用したPDI計測装置による大口径ミラーの絶対形状計測2004
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 井上晴行, 中野元博
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
- NAID
  130004655911
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360067
[Journal Article] ファイバ光源を利用したPDI計測装置による大口径ミラーの絶対形状計測2004
- Author(s)
  押鐘寧, 片岡俊彦, 中村崇亮, 中野元博, 井上晴行
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 1069-1070
- NAID
  130004655911
- Data Source
  KAKENHI-PROJECT-16360067
[Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point Light Sources of Single-Mode Optical Fibers2011
- Author(s)
  N. Ogawa, T. Nishioka, M. Nakano, Y. Oshikane, H. Inoue
- Organizer
  Fourth international symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka University
- Year and Date
  2011-11-24
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-ファイバ保持方法の改良とノイズの低減-2011
- Author(s)
  小川尚利,西岡孝純,中野元博,押鐘寧,井上晴行
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point light Sources of Single-Mode Optical Fibers2011
- Author(s)
  N.Ogawa, T.Nishioka, M.Nakano, Y.Oshikane, H.Inoue
- Organizer
  Fourth international symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated by two Optical Fibers2010
- Author(s)
  N.Ogawa, Y.Oshikane, H.Inoue, M.Nakano
- Organizer
  Third International Symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  大阪大学(大阪市)
- Year and Date
  2010-11-24
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010
- Author(s)
  小川尚利, 中野元博, 押鐘寧, 井上晴行, 山内和人
- Organizer
  2010年度精密工学会秋季大会学術講演会
- Place of Presentation
  名古屋大学(名古屋市)
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22560109
[Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010
- Author(s)
  小川尚利,中野元博,押鐘寧,井上晴行,山内和人、
- Organizer
  2010年度精密工学会秋季大会学術講演会
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22560109

1. OSHIKANE Yasushi (40263206)

# of Collaborated Projects: 10 results

# of Collaborated Products: 18 results
2. KATAOKA Toshihiko (50029328)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
3. ENDO Katsuyoshi (90152008)

# of Collaborated Projects: 6 results

# of Collaborated Products: 0 results
4. NAKANO Motohiro (40164256)

# of Collaborated Projects: 4 results

# of Collaborated Products: 18 results
5. 山内良昭 (00252619)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. MATSUURA Toshiaki (60525145)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
7. 片岡秀彦

# of Collaborated Projects: 0 results

# of Collaborated Products: 12 results

Inoue Haruyuki 井上 晴行

INOUE Haruyuki 井上 晴行

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[Book] Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers, Selected Topics on Optical Fiber Technology, Part 2, Chapter 142012

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[Book] Selected Topics on Optical Fiber Technology, Part 2, Chapter 14, Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers2012

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[Journal Article] Numerical Reconstruction of Wavefront in Phase-Shifting Point Diffraction Interferometer by Digital Holography2008

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[Journal Article] Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers2007

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[Journal Article] ファイバ型PS-PDI装置(Phase-Shifting Point Diffraction Interferometer)の開発-光ファイバからの回折球面波同士の干渉計測による精度の検証-2007

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[Journal Article] ファイバ型PS/PDIによる大口径ミラーの計測2007

Inoue Haruyuki 井上晴行

INOUE Haruyuki 井上晴行