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ENDO Katsuyoshi  遠藤 勝義

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… Alternative Names

ENDOH Katsuyoshi  遠藤 勝義

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Researcher Number 90152008
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2012 – 2013: 大阪大学, 工学(系)研究科(研究院), 教授
2011: 大阪大学, 大学院・工学研究科, 教授
2010: Osaka University, 工学(系)研究科(研究院), 教授
2009 – 2010: Osaka University, 工学研究科, 教授
2007 – 2009: Osaka University, 大学院・工学研究科, 教授 … More
2001 – 2005: Osaka Univ., Grad. School of Eng., Professor, 大学院・工学研究科, 教授
1998 – 2000: Osaka University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授
1992 – 1997: 大阪大学, 工学部, 助教授
1989 – 1990: 大阪大学, 工学部, 助手
1986: 大阪大学, 工学部, 助手
1986: Kanazawa University, Faculty of Engineering, Research Associate (Present; Osaka, 工学部(現在 大阪大学・工学部), 助手 Less
Review Section/Research Field
Principal Investigator
機械工作・生産工学 / Production engineering/Processing studies
Except Principal Investigator
機械工作 / 機械工作・生産工学 / Applied optics/Quantum optical engineering / Production engineering/Processing studies / 電子デバイス・機器工学 / Materials/Mechanics of materials / 機械工作・生産工学 / 機械材料工学
Keywords
Principal Investigator
STS / STM / 超精密加工 / 形状誤差 / 5軸同時制御 / 法線ベクトル / 高精度ミラー / 形状測定 / Si(001)2×1表面 / 局所状態密度 … More / 第一原理分子動力学 / surface defect / surface morphology / high-frequency pulse / surface characterization / ultra-precision machining / insulator / scanning tunneling spectroscopy / scanning tunneling microscope / 表面欠陥 / 表面微細構造 / 高周波パルス / 表面キャラクタリゼーション / 絶縁体 / 走査トンネル分光法 / 走査トンネル顕微鏡 / two-photon absorption / crystalline silicon / silane / excimer laser / cryogenic substrate / condensed phase / deposition / photochemical reaction / ダイヤモンド成膜 / 原子状水素 / 凝集用 / KrF / ArF / 無定形炭素 / ダイヤモンド合成 / μc-Si / 凝集相 / C系薄膜 / Si系薄膜 / エキシマレーザー / 1光子吸収 / 2光子吸収 / 低温凝集相 / 光化学反応 / Si wafer / Elementary analysis / Si (001) 2*1 surface / Local density of states / First principle MD / H-terminated Si surface / Ab-inito MO / 電子構造 / 表面分析 / 金属汚染物 / シリコンウェーハ / 走査型トンネル分光法 / 水素終端化 / 走査型トンネル分光 / 走査型トンネル顕微鏡 / Siウェーハ / 元素分析 / Si (001) 2×1表面 / 水素終端化Si表面 / Ab-initio分子軌道法 / 発光特性 / ウエットエッチング / ワイドギャップ半導体 / 表面清浄化 / 結晶欠陥 / プロセス表面 / 表面原子構造 / 表面科学 / 窒化ガリウム / 5軸同時制御 / 走査型形状測定装置 / ナノ精度 / 非球面ミラー / ロータリーエンコーダー / アルゴリズム / 最小二乗法 / 角度検出光学系 / 高精度ゴニオメータ / ロータリーエンコーダ / スロープエラー / 形状計測 / 絶対形状測定 / 非球面光学素子 / ZrN,AlN / Si単結晶薄膜 / スパッタリング成膜 / 反応性イオンエッチング / プラズマプロセス / 表面反応素過程 … More
Except Principal Investigator
EEM / 走査型近接場光学顕微鏡 / フォトレジスト / HeCdレーザー / WGMモード / 極微小突起 / 微小共振球 / Tiサファイアレーザー / エバネセント場 / 高空間分解能 / フェムト秒レーザー / SNOM / Fracture mechanics / 破壊力学 / 進行波共振 / ポリスチレン微小球 / 光の近接場 / Helium / Scanning Near-field Optical Microscope / scanning near-field optical microscope / レーザ / 近接場 / 表面処理 / プラズマCVD / CVD / 表面改質 / 粉末粒子 / 薄膜 / LMIS / 3次元境界要素法 / 極微小突起プローブ / 準安定粒子 / 負グロー / シース / 非発光励起種 / 時空間分解発光分光計測 / 大気圧・高周波プラズマ / Avoidance of tool breakage / Interrupted machining / Adaptive control / Tool life prediction / Cutting tool breakage / CNCシステム / 予測制御 / 欠損回避 / 工具欠損寿命 / 工具欠損回避 / 断続切削 / 適応制御 / 工具寿命予測 / CNC / 切削工具欠損 / J-integral / Plastic flow type material removal / Material removal mechanics / High speed microcutting / Engineering ceramics / Ceramics / 部分安定化ジルコニア / J積分 / 塑性変形型材料除去 / 材料除去機構 / 高速マイクロ切削 / エンジニアリングセラミックス / セラミックス / asymmetric aspheric figure / goniometers / normal vector / slope error / surface figuring / EUV / Synchrotron radiation optics / 基準面 / 法線ベクトル測定 / 非球面ミラー / X線光学素子 / 大型ミラー / 非基準面 / 法線ベクトル計測 / 非球面形状 / 集効用ミラー / 放射光 / ナノメータ / 非球面 / スロープエラー / ゴニオメータ / 法線ベクトル / 基準面無し / 形状計測 / repeatability / absolute shape measurement / optical interferometry / Helium-Neon laser / single mode optical fiber / phase shift interferometry / point light source / diffracted Spherical wavefront / EUVL露光装置 / 点光源回折干渉法 / 絶対形状計測 / 光ファイバ / 計測の再現性 / 高精度絶対形状計測 / 光干渉計測 / He-Neレーザー / シングルモード光ファイバ / 位相シフト干渉法 / 点光源 / 回折球面波 / high spatial resolution / multi photon absorption process / 3-dimensional finite element method / ultraviolet resins / micro protrusion probe / femto-second laser / evanescent field / 極微細光加工 / チタンサファイアレーザー / 多光子吸収過程 / 紫外線硬化性樹脂 / three dimensional boundary element method / micro protrusion / HeCd laser / photoresist / Morphology Dependent Resonances / Whispering Gallery Modes / spherical micro resonator / 時間領域差分法 / 走査系近接場光学顕微鏡 / 三次元境界要素法 / MDRs / WGMs / Ultra clean technology / First-principles molecular dynamics simulation / Electrochemical machining in ultrapure water / Atmospheric pressure plasma CVD / Plasma CVM / Ultra precision machining / Perfect surfaces / STM / 第一原理分子動力学シュミレーション / 超純粋電解加工 / ウルトラクリーンテクノロジー / 第一原理分子動力学シミュレーション / 超純水電解加工 / 大気圧プラズマCVD / プラズマCVM / 超精密加工 / 完全表面 / Free radicals / Sheath / Mean free path / Spatiotemporal optical emission spectroscopy / Atmospheric VHF plasma / プラズマシース / プラズマシミュレーション / 局所電界近似法 / 中性Heラジカル / 時空間分解発光分光 / 容量結合型プラズマ / 粒子密度計測 / 温度計測 / 吸収分光 / 平均自由行程 / Boundary Element Method / High Spatial Resolution / Polystirene Latex Sphere / 光による微細加工 / 微小突起 / 高分解能 / ラテックス球プローブ / 境界要素法 / Low temperature deposition / Thin film / Silicon / Surface modification / Ion gun / 表面制御 / 薄膜用基板 / イオン照射 / シリコン薄膜 / 低温成膜 / シリコン / イオンガン / coating / surface preparation / ultra-fine particle / plasma CVD / マイクロ波プラズマ / コーティング / near field / ultra precision machined surface / surface of insulator / laser / piezo actuator / surface roughness / near-field / ニアフィールド / 超精密加工表面 / 絶縁体表面 / 圧電素子 / 表面粗さ / Plasma / Classification / Surface Modification / Powder Particle / RFプラズマ / コ-ティング / プラズマ / 分級 / Ultra-thin-film / Epitaxy / Ion Implantation / アルカリハライド / 超薄膜 / エピタキシ- / イオン注入 / 近接場局所分光 / キャビティーリングダウン分光 / 輸送係数 / 衝突断面積 / ボルツマン方程式 / 吸収分光計測 / 平均自由工程 Less
  • Research Projects

    (24 results)
  • Research Products

    (78 results)
  • Co-Researchers

    (22 People)
  •  A new high speed nano-profiler using the normal vector tracing method for next generation ultraprecision mirrors.Principal Investigator

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      2010 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Characterization for the atomic structures and electric structures on the GaN substrates during device fabrication processPrincipal Investigator

    • Principal Investigator
      ENDOU Katsuyoshi
    • Project Period (FY)
      2010 – 2011
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Development of a surface gradient integrated profiler for the next generation high accuracy mirrorPrincipal Investigator

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      2007 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Development of High Precision Profiler

    • Principal Investigator
      HIGASHI Yasuo
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      High Energy Accelerator Research Organization (KEK)
  •  Characterization of insulator surfaces after ultra-precision machining by STM/STS with high-frequency pulsesPrincipal Investigator

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Development of a superior PS-PDI(Phase-Shifting Point Diffraction Interferometer) for Absolute Shape Measurement of Large-Diameter Surfaces

    • Principal Investigator
      KATAOKA Toshihiko
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Graduate School of Engineering, Osaka University
  •  微小共振球をプローブとした走査型キャビティーリングダウン顕微分光(CRDMS)法

    • Principal Investigator
      押鐘 寧
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Osaka University
  •  微小球共振器をプローブとした走査型CRDS顕微システムによる極微細構造の分光診断

    • Principal Investigator
      片岡 俊彦
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Osaka University
  •  Application of optical near-field excited with ultra fast laser pulses to microfabrication

    • Principal Investigator
      KATAOKA Toshihiko
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Osaka University
  •  Development of scanning near-field optical microscope with a micro rasonator and a optical resonator

    • Principal Investigator
      OSHIKANE Yasushi
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Osaka University
  •  粒子コードを用いた大気圧・高周波プラズマの構造解析(シース領域を構成する粒子群の振る舞いとその制御パラメータの診断)

    • Principal Investigator
      片岡 俊彦
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  STM/STSによる成膜・エッチングプロセスにおける固体表面反応素過程の解明Principal Investigator

    • Principal Investigator
      遠藤 勝義
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Spatiotemporal optical emission spectroscopy of atmospheric VHF plasma process

    • Principal Investigator
      KATAOKA Toshihiko
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Creation of Perfect Surfaces

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1996 – 2002
    • Research Category
      Grant-in-Aid for COE Research
    • Research Institution
      Osaka University
  •  Experimental Study of Photochemical Deposition in a Condensed Phase on a Cryogenic SubstratePrincipal Investigator

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Elementary Analysis of a single Metallic Atom on Si Wafer Surface by STM/STSPrincipal Investigator

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      1994 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Study on substrate surface modification by ion beam irradiation

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Osaka University
  •  Micro-Machining by Nearfield Optics

    • Principal Investigator
      KATAOKA Toshihiko
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Estimation of ultra precision machined surface by Scanning Near-field Optical Microscope

    • Principal Investigator
      KATOAOKA Toshihiko
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Study on surface coating of ultra-fine particles for EEM machining.

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Osaka University
  •  Study on Substrate Surface Modification

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械材料工学
    • Research Institution
      Osaka University
  •  Development of Surface Treatment Method for Ultra-Fine Powder Particles for Elastic Emission Machining (EEM)

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B).
    • Research Field
      機械工作
    • Research Institution
      Osaka University, The Faculty of Engineering
  •  Tool Life Prediction and Avoidance of Cutting Tool Breakage in CNC System

    • Principal Investigator
      UEDA Kanji
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械工作
    • Research Institution
      Kanazawa University
  •  Research on High Speed Microcutting of Engineering Ceramics

    • Principal Investigator
      SUGITA Tadaaki
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械工作
    • Research Institution
      Kanazawa University

All 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005

All Journal Article Presentation Book Patent

  • [Book] 超精密加工と表面科学原子レベルの-生産技術2014

    • Author(s)
      遠藤 勝義
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Book] Stoichiometry and Materials Science2012

    • Author(s)
      A. N. Hattori, K. Endo InTech
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Book] GaN(0001) surface structure, morphology, and stoichiometry through various cleaning procedures/ Stoichiometry and Materials Scienee2012

    • Author(s)
      A.N.Hattori, K.Endo
    • Total Pages
      22
    • Publisher
      InTech-open science(in-press)
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Journal Article] Three-dimensional surface figure measurement of high-accuracy spherical mirror with nanoprofiler using normal vector tracing method2014

    • Author(s)
      R. Kudo, K. Okuda, K. Usuki, M. Nakano, K. Yamamura, K. Endo
    • Journal Title

      Review of Scientific Instruments

      Volume: vol.85 Issue: 4 Pages: 45101-45105

    • DOI

      10.1063/1.4869473

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Journal Article] Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler2013

    • Author(s)
      Koji Usuki, Takao Kitayama, Hiroki Matsumura, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi and Katsuyoshi Endo
    • Journal Title

      Nanoscale Research Letters

      Volume: vol.8 Issue: 1 Pages: 231-241

    • DOI

      10.1186/1556-276x-8-231

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Journal Article] Effects of a Laser Beam Profile to Measure an Aspheric Mirror on a High-Speed Nanoprofiler Using Normal Vector Tracing Method2012

    • Author(s)
      H. Matsumura, D.Tanarua,T. Kitayama, K. Usuki, T.Kojima, J. Uchikoshi, Y. Higashi, and K. Endo
    • Journal Title

      Current Applied Physics

      Volume: vol.12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Journal Article] Effects of a laser beam profile to measure an aspheric mirror on a high-speed nanoprofiler using normal vector tracing method2012

    • Author(s)
      Hiroki Matsumura, Daisuke Tonaru, Takao Kitayama, Koji Usuki, Takuya, Kojima, Junichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo
    • Journal Title

      Current Applied Physics

      Volume: vol.12 Pages: S47-S51

    • DOI

      10.1016/j.cap.2012.04.022

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Journal Article] Development of a High-Speed Nanoprofiler Using Normal Vector Tracing2012

    • Author(s)
      Takao Kitayama, Daisuke Tonaru, Hiroki Matsumura,Junichi Uchikoshi, Yasuo Higashi and Katsuyoshi Endo
    • Journal Title

      Key Engineering Materials

      Volume: Vol. 516 Pages: 606-611

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Journal Article] Surface treatments toward obtaining clean GaN(0001) surfaces on commercial hydride vapor phase epitaxy and metal-organic chemical vapor deposition substrates in ultra high vacuum2010

    • Author(s)
      A. N. Hattori, K. Endo, K. Hattori, and H. Daimon
    • Journal Title

      Applied Surface Science

      Volume: 256 Pages: 4745-4756

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Journal Article] Surface Science Chemical etchant dependence of surface structure and morphology on GaN(0001) substrates2010

    • Author(s)
      A. N. Hattori, F. Kawamura, M. Yoshimura, Y. Kitaoka, Y. Mori, K. Hattori, H. Daimon, and K. Endo
    • Journal Title

      Surface Science

      Volume: 604 Pages: 1247-1253

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Journal Article] A New Designed Ultra-high Precision Profiler - Study on Slope Error Measurement of a Mandrel for Wolter type-I mirror Fabrication -2006

    • Author(s)
      Yasuo.HIGASHI^<*a>.Yuichi.TAKAIE^b, Katsuyoshi.ENDO^b, Tatsuya.KUME^a, Kazuhiro.ENAMI^a, Kazuto.YAMAUCHI^c, Kazuya.YAMAMURA^c, Toshihisa.SANO^c, Kenji.UENO^a, Yuzo.MORI^c
    • Journal Title

      Proc.Of the 8^<th> International Conference on X-ray Microscopy ; 26-30, July, at Egret Himeji 2006.6月発行(In printing)

    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics -Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] シンクロトロン放射光用ミラーのための超精密非球面形状測定装置の開発2006

    • Author(s)
      森勇蔵, 遠藤勝義, 宮脇崇, 瀬戸口大輔, 鷹家優一, 東保男, 久米達哉, 江並和宏
    • Journal Title

      2006年精密工学会春季大会学術講演会講演論文集

    • NAID

      130005027107

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics-Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A New Designed Ultra-high Precision Profiler2006

    • Author(s)
      Y.HIGASHI^a, Y.TAKAIE^b, K.ENDO^b, T.KUME^a, K.ENAMI^a, K.YAMAUCHI^c, K.YAMAMURA^c, H.SANO^c, K.UENO^a, Y.MORI^c
    • Journal Title

      Proc of SPIE : Advances in Mirror Technology for X-ray, EUV Lithography, laser, and Other Applications, 3 August 2005, Sandiego, CA, USA Vol.# 5921(In printing)

    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler-Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Himeji, Japan (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler - Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Hirneji, Japan, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Patent] NORMAL VECTOR TRACING ULTRA-PRECISION SHAPE MEASUREMENT METHOD2013

    • Inventor(s)
      遠藤勝義、打越純一、東保男
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-02-17
    • Overseas
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Patent] 法線ベクトル追跡型超精密形状測定法2011

    • Inventor(s)
      遠藤勝義, 打越純一
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2011-06-11
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Patent] 法線ベクトル追跡型超精密形状測定方法2010

    • Inventor(s)
      遠藤勝義、打越純一、東保男
    • Industrial Property Rights Holder
      大阪大学、大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2010-182197
    • Filing Date
      2010-08-17
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 回転対称形状の超精密形状測定方法及びその装置2009

    • Inventor(s)
      遠藤勝義、東保男
    • Industrial Property Rights Holder
      大阪大学、大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2009-180408
    • Filing Date
      2009-08-03
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 回転対称形状の超精密形状測定法及びその装置2009

    • Inventor(s)
      遠藤勝義
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2009-180408
    • Filing Date
      2009-08-03
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 法線ベクトル追跡型超精密形状測定装置における駆動軸制御方法2008

    • Inventor(s)
      遠藤勝義、東保男
    • Industrial Property Rights Holder
      大阪大学、大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2008-203495
    • Filing Date
      2008-08-06
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 光路長の自律校正を用いた法線ベクトル追跡型超精密形状測定方法2008

    • Inventor(s)
      遠藤勝義, 東保男
    • Industrial Property Rights Holder
      大阪大学, 大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2008-203494
    • Acquisition Date
      2008-08-06
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 法線ベクトル追跡型超精密形状測定装置における駆動軸制御方法2008

    • Inventor(s)
      遠藤勝義, 東保男
    • Industrial Property Rights Holder
      大阪大学, 大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2008-203495
    • Acquisition Date
      2008-08-06
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 超精密形状測定方法2008

    • Inventor(s)
      遠藤勝義、稲垣耕司
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2008-169911
    • Filing Date
      2008-06-01
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 光路長の自律校正を用いた法線ベクトル追跡型超精密形状測定方法2008

    • Inventor(s)
      遠藤勝義、東保男
    • Industrial Property Rights Holder
      大阪大学、大学共同利用機関法人高エネルギー加速器研究機構
    • Industrial Property Number
      2008-203494
    • Filing Date
      2008-08-06
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 法線ベクトル追跡型超精密形状測定装置における駆動軸制御方法2008

    • Inventor(s)
      遠藤勝義, 東保男
    • Industrial Property Rights Holder
      大阪大学, 大学共同利用機関法人高エネルギー加速器研究機構
    • Filing Date
      2008-08-06
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Patent] 超精密形状測定方法2008

    • Inventor(s)
      遠藤勝義, 稲垣耕司
    • Industrial Property Rights Holder
      大阪大学
    • Filing Date
      2008-06-01
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 法線ベクトル追跡型高速ナノ形状測定法の開発-自律較正法を用いた光路の絶対長決定-2012

    • Author(s)
      北山貴雄, 戸成大輔, 松村拓己, 薄木宏治, 小嶋拓也, 打越純一, 遠藤勝義, 東保男
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京(Japan)
    • Year and Date
      2012-03-14
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Development of a new high-speed nano-profiler based on normal vector tracing for high-accuracy aspheric mirrors2012

    • Author(s)
      K. Endo
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka Japan
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Siウェハ表面の原子構造・電子状態2011

    • Author(s)
      遠藤勝義
    • Organizer
      第31回表面科学学術講演会講演
    • Place of Presentation
      タワーホール船堀(Japan)(招待講演)
    • Year and Date
      2011-12-17
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] 法線ベクトル追跡型高速ナノ形状測定法の開発-小曲率半径R=10mm球面ミラー形状測定の可能性-2011

    • Author(s)
      松村拓己, 戸成大祐, 北山貴雄, 薄木宏治, 小嶋拓也, 打越純一, 東保男, 遠藤勝義
    • Organizer
      精密工学会2011年度関西地方定期学術講演会
    • Place of Presentation
      兵庫県立大学(Japan)
    • Year and Date
      2011-06-30
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Design of Optical Head for New High-Speed Nanoprofiler2011

    • Author(s)
      H. Matsumura, D. Tonaru,T. Kitayama, K. Usuki, T.Kojima, J. Uchikoshi, Y. Higashi, and K. Endo
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-31
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] 法線ベクトル検出型超精密形状測定法による球面ミラーの形状測定2011

    • Author(s)
      戸成大祐、松村拓己、北山貴雄、打越純一、東保男、遠藤勝義
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学、東京都
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] 法線ベクトル追跡型高速ナノ精度形状測定法の開発-誤差解析と測定装置の校正-2011

    • Author(s)
      戸成大祐, 松村拓己, 北山貴雄, 打越純一, 東保男, 遠藤勝義
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(Japan)
    • Year and Date
      2011-09-20
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Nano-radian resolution gradient integrated surface profiler2011

    • Author(s)
      Y. Higashi, Zhang Xiao-Wei,J. Uchikoshi, T. Kume, K.Enami, and K. Endo
    • Organizer
      SPIE 0ptifab2011
    • Place of Presentation
      Rochester, NY, USA
    • Year and Date
      2011-05-10
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] UHV in-situ Photoluminescence for GaN(0001) Substrates in Different Preparations2011

    • Author(s)
      A. N. Hattori, K. Hattori, Y. Moriwaki, A. Yamamoto, H. Daimon, and K. Endo
    • Organizer
      International Symposium on Surface Science6
    • Place of Presentation
      タワーホール船堀(東京都)
    • Year and Date
      2011-12-12
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] Development of a High-Speed Nanoprofiler Using NormalVector Tracing2011

    • Author(s)
      T.Kitayama, D.Tonaru, H.Matsumura, J.Uchikoshi, Y.Higashi, and K.Endo
    • Organizer
      4th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2011-11-14
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] 表面の原子構造観察とナノ形状測定2011

    • Author(s)
      遠藤勝義
    • Organizer
      精密工学会2011年度関西地方定期学術講演会
    • Place of Presentation
      兵庫県立大学(Japan)(招待講演)
    • Year and Date
      2011-06-30
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] 表面清浄化前後のGaN(0001)基板の超高真空その場発光測定2011

    • Author(s)
      服部梓、服部賢、森脇祐太、山本愛士、大門寛、遠藤勝義
    • Organizer
      日本物理学会
    • Place of Presentation
      富山大学五福キャンパス
    • Year and Date
      2011-09-21
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] 次世代非球面レンズ製作のための傾斜角積分型ナノ精度形状測定装置の開発-測定原理と測定方法-2010

    • Author(s)
      東保夫、遠藤勝義、打越純一、久米達哉、江並和宏
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      名古屋大学、名古屋市
    • Year and Date
      2010-09-28
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Development of a new high-speed nano-profiler using normal vector tracing method for next-generation ultraprecision mirrors2010

    • Author(s)
      K.Endo, J.Uchikoshi, Y.Higashi
    • Organizer
      Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka、Japan
    • Year and Date
      2010-09-28
    • Data Source
      KAKENHI-PROJECT-22226005
  • [Presentation] Surface treatments toward obtaining clean GaN(0001) substrate surfaces2010

    • Author(s)
      A.N.Hattori, K.Hattori, H.Daimon, K.Endo
    • Organizer
      Asia Pacific Interfinish 2010
    • Place of Presentation
      Singapore (Singapore)
    • Year and Date
      2010-11-20
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] GaN(0001)表面の清浄化手法2010

    • Author(s)
      服部梓、遠藤勝義、服部賢、大門寛
    • Organizer
      第57回応用物理学会
    • Place of Presentation
      長崎大学(長崎市)
    • Year and Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] Clean GaN(0001) substrate surface structures and their optical properties2010

    • Author(s)
      A.N.Hattori, K.Hattori, H.Daimon, K.Endo
    • Organizer
      Core Research and Engineering of Advanced Materials-Interdisciplinary Education Center for Materials Science
    • Place of Presentation
      Osaka (Japan)
    • Year and Date
      2010-06-01
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] GaN(0001)表面の清浄化手法2010

    • Author(s)
      服部梓、遠藤勝義、服部賢、大門寛
    • Organizer
      日本物理学会第59回秋季大会
    • Place of Presentation
      大阪府立大学(堺市)
    • Year and Date
      2010-09-25
    • Data Source
      KAKENHI-PROJECT-22656038
  • [Presentation] 超精密非球面形状計測法に関する研究 -法線ベクトル測定値からの形状導出アルゴリズムの開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 遠藤勝義, 東保男
    • Organizer
      精密工学会2009年度精密工学会春季大会
    • Place of Presentation
      東京都文京区
    • Year and Date
      2009-03-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis2009

    • Author(s)
      T.Ueno, S.Tachibanada, Y.Higashi, J.Uchikoshi, K.Endo
    • Organizer
      3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      福岡県北九州市
    • Year and Date
      2009-11-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis-2009

    • Author(s)
      T.Ueno, S.Tachibanada, Y.Higashi, J.Uchikoshi, K.Endo
    • Organizer
      3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Kitakyusyu, Japan
    • Year and Date
      2009-11-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究-法線ベクトル測定値からの形状導出アルゴリズムの開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 打越純一, 遠藤勝義, 東保男
    • Organizer
      精密工学会2009年度関西地方定期学術講演会
    • Place of Presentation
      豊中市
    • Year and Date
      2009-05-13
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究-法線ベクトル測定値からの形状導出アルゴリズムの開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 遠藤勝義, 東保男
    • Organizer
      精密工学会2009年度精密工学会春季大会
    • Place of Presentation
      東京都
    • Year and Date
      2009-03-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究-小型試料の高精度,高速計測装置の開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 打越純一, 遠藤勝義, 東保男
    • Organizer
      2009年度精密工学会秋季大会学術講演会
    • Place of Presentation
      神戸市
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] High-precision profile measurement of a small radius lens by surface gradient integrated profiler2009

    • Author(s)
      Y.Higashi, T.Kume, K.Enami, K.Endo, J.Uchikoshi, K.Nomura, T.Miyawaki, S.Tachibanada, T.Ueno
    • Organizer
      SPIE Optics+Photonics 2009
    • Place of Presentation
      San Diego, California USA
    • Year and Date
      2009-08-02
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究-小型試料の高精度,高速計測装置の開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 打越純一, 遠藤勝義, 東保男
    • Organizer
      2009年度精密工学会秋季大会学術講演会
    • Place of Presentation
      兵庫県神戸市
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] High-precision prof ile measurement of a small radius lens by surface gradient integrated profiler2009

    • Author(s)
      Y. Higashi, T. Kume, K. Enami, K. Endo, J. Uchikoshi, K. Nomura, T. Miyawaki, S. Tac hibanada, T. Ueno
    • Organizer
      SPIE Optics+Photonics 2009
    • Place of Presentation
      SanDiego, USA
    • Year and Date
      2009-08-02
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] High-precision profile measurement of a small radius lens by surface gradient integrated profiler2009

    • Author(s)
      Y.Higashi, T.Kume, K.Enami, K.Endo, J.Uchikoshi, K.Nomura, T.Miyawaki, S.Tachibanada, T.Ueno
    • Organizer
      SPIE Optics+Photonics 2009
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2009-08-02
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of surface gradient integrated profiler -Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector to surface profile-2009

    • Author(s)
      T. Ueno, S. Tachibanada, Y. Higashi, K. Endo
    • Organizer
      First International Symposium on Atomically Controlled Fabrication Technology -Surface and Thin Film Processing-
    • Place of Presentation
      大阪府吹田市
    • Year and Date
      2009-02-16
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究 -法線ベクトル測定値からの形状導出アルゴリズムの開発-2009

    • Author(s)
      上野智裕, 橘田繁樹, 打越純一, 遠藤勝義, 東保男
    • Organizer
      精密工学会2009年度関西地方定期学術講演会
    • Place of Presentation
      大阪府豊中市
    • Year and Date
      2009-05-13
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector tosurface profile-2009

    • Author(s)
      T.Ueno, S.Tachibanada, Y.Higashi, K.Endo
    • Organizer
      First International Symposium on Atomically Controlled Fabrication Technology-Surface and Thin Film Processing-
    • Place of Presentation
      Suita
    • Year and Date
      2009-02-16
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究 -法線ベクトル測定値からの形状導出アルゴリズムの開発-2008

    • Author(s)
      上野智裕, 遠藤勝義, 東保男
    • Organizer
      精密工学会2008年度関西地方定期学術講演会
    • Place of Presentation
      大阪府堺市
    • Year and Date
      2008-07-30
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 超精密非球面形状計測法に関する研究,-法線ベクトル測定値からの形状導出アルゴリズムの開発-2008

    • Author(s)
      上野智裕, 遠藤勝義, 東保男
    • Place of Presentation
      堺市
    • Year and Date
      2008-07-30
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of a surface gradient integrated profiler : precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector to surface profile2008

    • Author(s)
      Y. Higashi, K. Endo, et al.
    • Organizer
      SPIE Optics+Photonics 2008
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2008-08-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of asurface gradient integrated profiler : precise coordinate determination of normal vector measured points by self-calibration method and new data analysis fromnormal vector to surface profile2008

    • Author(s)
      Y.Higashi, T.Ueno, K.Endo, J.Uchikoshi, T.Kume, K.Enami
    • Organizer
      SPIE Optics+Photonics 2008
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2008-08-11
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状計測法 -自立較正法による法線ベクトル測定点の座標位置の高精度化-2008

    • Author(s)
      上野智裕, 遠藤勝義, 東保男
    • Organizer
      2008年度精密工学会秋季大会学術講演会
    • Place of Presentation
      宮城県仙台市
    • Year and Date
      2008-09-19
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状計測法,-自立較正法による法線ベクトル測定点の座標位置の高精度化-2008

    • Author(s)
      上野智裕, 遠藤勝義, 東保男
    • Organizer
      2008年度精密工学会秋季大会学術講演会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-09-19
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状測定装置の研究-自立校正法による法線ベクトル測定点の座標位置の高精度化-2008

    • Author(s)
      東保男、遠藤勝義、打越純一、他
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川県川崎市
    • Year and Date
      2008-03-18
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状測定装置の研究-自立校正法による法線ベクトル測定点の座標位置の高精度化-2008

    • Author(s)
      東保男、遠藤勝義、打越純一, 他
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      川崎市
    • Year and Date
      2008-03-18
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Development of a s urface gradient integrated profiler : precise coordinate determination of norm al vector measured points by self-cali bration method and new data analysis from normal vector to surface profile2008

    • Author(s)
      Y. Higashi, T. Ueno, K. Endo, J. Uchikosh i, T. Kume, K. Enami
    • Organizer
      SPIE Optics+Photonics 2008
    • Place of Presentation
      SanDiego, USA
    • Year and Date
      2008-08-01
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状測定法-焦点距離150mmの軸外し放物面での測定点座標の決定-2007

    • Author(s)
      東保男、遠藤勝義、打越純一、他
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北海道旭川市
    • Year and Date
      2007-09-13
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Surface Gradient Integrated Profiler for X-ray and EUV Optics2007

    • Author(s)
      Y.Higashi, K.Endo, T.Kume, J.Uchikoshi, K.Ueno, Y.Mori
    • Organizer
      SPIE Annual Meeting
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2007-08-30
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] 傾斜角積分法による超精密形状測定法-焦点距離150mmの軸外し放物面での測定点座標の決定-2007

    • Author(s)
      東保男、遠藤勝義、打越純一, 他
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      旭川市
    • Year and Date
      2007-09-13
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Surface Gradient Integrated Profiler for X-ray and EUV Optics2007

    • Author(s)
      Y. Higashi, K. Endo, T. Kume, J. Uchikosh i, K. Ueno, Y. Mori
    • Organizer
      SPIE Annual Meeting
    • Place of Presentation
      SanDiego, USA
    • Year and Date
      2007-08-30
    • Data Source
      KAKENHI-PROJECT-19206019
  • [Presentation] Surface Gradient Integrated Profiler for X-ray and EUV Optics2007

    • Author(s)
      Y. Higashi, K. Endo, et. al.
    • Organizer
      SPIE Annual Meeting
    • Place of Presentation
      San Diego, UAS
    • Year and Date
      2007-08-30
    • Data Source
      KAKENHI-PROJECT-19206019
  • 1.  KATOAOKA Toshihiko (50029328)
    # of Collaborated Projects: 16 results
    # of Collaborated Products: 0 results
  • 2.  OSHIKANE Yasushi (40263206)
    # of Collaborated Projects: 10 results
    # of Collaborated Products: 0 results
  • 3.  MORI Yuzo (00029125)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 11 results
  • 4.  YAMAUCHI Kazuto (10174575)
    # of Collaborated Projects: 8 results
    # of Collaborated Products: 10 results
  • 5.  INOUE Haruyuki (30304009)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 6.  ENAMI Kazuhiro (00370073)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 16 results
  • 7.  YAMAMURA Kazuya (60240074)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 10 results
  • 8.  KUME Tatsuya (40353362)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 18 results
  • 9.  HIGASHI Yasuo (70208742)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 38 results
  • 10.  UCHIKOSHI Jyunichi (90273581)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 28 results
  • 11.  SUGIYAMA Kazuhisa (30112014)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 12.  佐野 泰久 (40252598)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 4 results
  • 13.  SUGITA Tadaaki (70019769)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 14.  UEDA Kanji (50031133)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 15.  HATTORI Azusa (80464238)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 10 results
  • 16.  HIROSE Kikuji (10073892)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  YOSHII Kumayasu (30029152)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  MORITA Mizuho (50157905)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  UENO Kenji (40370069)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 10 results
  • 20.  NISHI Makoto (00189250)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  青野 正和 (10184053)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  安武 潔 (80166503)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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