Sano Yasuhisa 佐野泰久

… Alternative Names

SANO Yasuhisa 佐野泰久

佐野恭久サノヤスヒサ

佐野康久サノヤスヒサ

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Researcher Number	40252598
Other IDs
External Links
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 教授
Affiliation (based on the past Project Information) *help	2021 – 2024: 大阪大学, 大学院工学研究科, 准教授 2016 – 2020: 大阪大学, 工学研究科, 准教授 2011 – 2016: 大阪大学, 工学(系)研究科(研究院), 准教授 2014 – 2015: 大阪大学, 大学院工学研究科, 准教授 2010 – 2012: 大阪大学, 大学院・工学研究科, 准教授 … More 2009: Osaka University, 工学研究科, 准教授 2008: Osaka University, 大学院工学研究科, 准教授 2007 – 2008: Osaka University, 大学院・工学研究科, 准教授 2006: 大阪大学, 大学院工学研究科, 助教授 2003 – 2005: 大阪大学, 工学研究科, 助教授 2003 – 2004: 大阪大学, 大学院・工学研究科, 助教授 2001 – 2002: 大阪大学, 大学院・工学研究科, 助手 1999: 大阪大学, 大学院・工学研究科, 助手 1998 – 1999: 大阪大学, 工学研究科, 助手 1994 – 1997: 大阪大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields Except Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Broad Section C / Materials/Mechanics of materials / Engineering / Science and Engineering
Keywords	Principal Investigator 大気圧プラズマ / プラズマCVM / 特殊加工 / エッチング / SiC / 薄化 / PCVM / 炭化ケイ素 / プラズマ / 数値制御加工 … More / 溝加工 / 無歪 / ダイシング / プラズマ酸化 / SOIウエハ / 犠牲酸化 / ワイドギャップ半導体 / べベル加工 / 内周刃 / 切断加工 / シリコン / 非接触 / 切断火口 / プラズマエッチング / 数値制御形状加工 / 流体解析 / ラジカルガン / セラミックス / 形状加工 / 拡散 / ハロゲン / ラジカル / 高圧力 … More Except Principal Investigator 超精密加工 / X線ミラー / 数値制御加工 / 大気圧プラズマ / EEM / X線自由電子レーザー / X線集光 / X線顕微鏡 / 精密計測 / 精密加工 / 表面改質 / ラジカル / プラズマCVM / SOI / シリコン / プラズマCVD / SiH_4 / Low temperature deposition / Thin film / Silicon / Surface modification / Ion gun / イオン照射 / シリコン薄膜 / 低温成膜 / CMP / 精密研磨 / X線光学 / 非球面ミラー / 放射光 / SPV / 表面電子準位 / 分光 / 表面光起電力 / 高速回転電極 / 形状可変 / 形状可変ミラー / 光学 / 研磨・CMP / 高能率 / ナノバブル / プラズマガス / SiC基板 / 触媒化学 / 多層膜ミラー / X線干渉計 / X線波面計測 / asymmetric aspheric figure / goniometers / normal vector / slope error / surface figuring / EUV / Synchrotron radiation optics / 基準面 / 法線ベクトル測定 / X線光学素子 / 大型ミラー / 非基準面 / 法線ベクトル計測 / 非球面形状 / 集効用ミラー / ナノメータ / 非球面 / スロープエラー / ゴニオメータ / 法線ベクトル / 基準面無し / 形状計測 / plane mirror / synchrotron radiation / numerical controlled / high-speed rotary electrode / radical / atmospheric pressure / plasma CVM / 薄膜化 / 平面ミラー / シンクロトロン放射光 / シリコンイオン / TFT / 太陽電池 / 液体金属イオン源 / 多結晶 / 基板改質 / SF6 / Spatial resolution / Pulse modulation / Radical / Atmospheric plasma / 分解過程 / 六フッ化硫黄 / プラズマの局在化 / パルス変調 / ラジカル加工 / 高圧力プラズマ / ultra-precision machining / crystallographic properties / non-destructive / high sensitive / Si / surface photovaltage effects / 起精密加工 / 半導体 / 低温 / 加工変質層 / 非接触 / 超精密加工面 / 微弱表面電位計測システム / plasma CVD / ultra-fine particle / atmospheric plasma / 微細粉末 / 超微粒子 / 表面制御 / 薄膜用基板 / 薄膜 / イオンガン / 表面 / 平坦化 / エピタキシャル成長 / プラズマ酸化 / 昇華法 / 超平坦表面 / ウェットエッチング / プラズマ処理 / シリコンカーバイド / グラフェン / 超押し込み試験 / SiC, GaN, ダイヤモンド / PCVM / TEM / 超押し込み実験 / SiC, GaN, ﾀﾞｲﾔﾓﾝﾄﾞ / フェムト秒(Fs)レーザ / 融合加工装置 / 超難加工結晶 / 加工レート / 疑似ラジカル / 超難加工材料 / 疑似ラジカル場 / P-CVM / フェムト秒レーザ / 難加工材料 / 表面粗さ / 加工効率 / プラズマ融合CMP / リソグラフィー / プラズマ加工 / 石英ガラス / ローカルウエットエッチング / 平坦度 / ウエットエッチング / フォトマスク基板 / 液晶 / X 線光学 / X線自由電子レーザ / ナノ集光 / 波面光学 / コヒーレントX線 / 超精密形状計測 / CEM / エッチング / ポリシング / アモルファスシリコン / 高速成膜 Less

2D動的フリーフォームプラズマ生成のためのプラズマプロパゲーション制御Principal Investigator
- Principal Investigator
  
  佐野泰久
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  Osaka University
Development of X-ray nanobeam optics by precision wavefront control
- Principal Investigator
  
  山内和人
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Review Section
  
  Broad Section C
- Research Institution
  Osaka University
Highly efficient chemical mechanical polishing method for SiC substrates using enhanced slurry containing bubbles of plasma gas
- Principal Investigator
  
  UNEDA Michio
- Project Period (FY)
  2017 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kanazawa Institute of Technology
触媒反応を利用した純水による機能性材料の超平滑化エッチング
- Principal Investigator
  
  山内和人
- Project Period (FY)
  2016
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Development of zoom condenser system for X-ray free electron laser by high precision deformable reflective optics
- Principal Investigator
  
  Yamauchi Kazuto
- Project Period (FY)
  2016 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Breakthrough in the ultra-precison polishing process of diamond substrates as an ulimate device
- Principal Investigator
  
  DOI Toshiro
- Project Period (FY)
  2012 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu University
Graphene growth on ultraflat SiC surfaces assisted by preferential etching of surface Si atoms
- Principal Investigator
  
  ARIMA KENTA
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Generation of high-density plasma using electrode with narrow slitand its application to groovingPrincipal Investigator
- Principal Investigator
  
  SANO Yasuhisa
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Adaptively controlled multistage nanofocusing systemfor x-ray free electron laser
- Principal Investigator
  
  Yamauchi Kazuto
- Project Period (FY)
  2011 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
High efficiency chemical thinning and dicing process for SiC semiconductor substratePrincipal Investigator
- Principal Investigator
  
  SANO Yasuhisa
- Project Period (FY)
  2009 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
数値制御大気圧プラズマ犠牲酸化による超精密加工Principal Investigator
- Principal Investigator
  
  佐野泰久
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy
- Principal Investigator
  
  YAMAUCHI Kazuto
- Project Period (FY)
  2006 – 2010
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Osaka University
Development of High?precision and High-ef icient Finishing Process of Over Meter Size Photomask Substrate for LCD
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
High efficiency chemical machining process for wide bandgap semiconductor substratePrincipal Investigator
- Principal Investigator
  
  SANO Yasuhisa
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Development of High Precision Profiler
- Principal Investigator
  
  HIGASHI Yasuo
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  High Energy Accelerator Research Organization (KEK)
超高精度X線ミラー作製による高分解能硬X線顕微鏡の開発
- Principal Investigator
  
  山内和人
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
ナノデバイス用基板としての超薄膜SOIウエハの開発Principal Investigator
- Principal Investigator
  
  佐野泰久, 森勇蔵
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
大気圧プラズマエッチングを利用した非接触無歪切断加工Principal Investigator
- Principal Investigator
  
  佐野泰久
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
The development of the equipment for the ultra precision aspherical optics using plasma CVM.
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
表面光起電力を利用したSiウエハの加工変質層の高感度計測
- Principal Investigator
  
  山内和人
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
回転電極を用いた大気圧汎用プラズマCVD装置の開発
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
ラジカセ反応を利用したセラミックス材料形状加工装置の開発-数値制御形状加工システムの試作-Principal Investigator
- Principal Investigator
  
  佐野泰久
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Studies on radical generation mechanism in the atmospheric plasma etching
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Substrate surface modification by ion beam irradiation-Deposition of a polycrystalline silicon at a low temperature-
- Principal Investigator
  
  YAMAUCHI Kazuto
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
ラジカル反応を利用したセラミックス材料形状加工装置の開発-ラジカル流解析による加工形状の解析-Principal Investigator
- Principal Investigator
  
  佐野泰久
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Development of the appratus for making the ultra-fine particles for EEM utilizing atmospheric plasma CVD
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
A high sensitive evalution method for Si surface crystallografic properties by employing surface photovoltage effects.
- Principal Investigator
  
  YAMAUCHI Kazuto
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Osaka University
Study on substrate surface modification by ion beam irradiation
- Principal Investigator
  
  MORI Yuzo
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Osaka University

[Book] New Diamond Vol.322016
- Author(s)
  會田英雄、土肥俊郎、佐野泰久、黒河周平、大山幸希、金聖祐
- Total Pages
  2
- Publisher
  (社）ニューダイヤモンドフォーラム
- Data Source
  KAKENHI-PROJECT-24226005
[Book] 機械の研究Vol672015
- Author(s)
  佐野泰久
- Total Pages
  7
- Publisher
  養賢堂
- Data Source
  KAKENHI-PROJECT-24226005
[Book] Wiley-VCH, Crystal Growth Technology (Chapter 19 : Plasma Chemical Vaporization Machining and Elastic Emission Machining),2008
- Author(s)
  Y. Sano, K. Yamamura, H. Mimura, K. Yamauchi, and Y. Mori
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching2024
- Author(s)
  Toh Daisetsu、Takeda Kodai、Kayao Kiyoto、Ohkubo Yuji、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 18 Issue: 2 Pages: 240-247
- DOI
  10.20965/ijat.2024.p0240
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2024-03-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23K13234, KAKENHI-PROJECT-21H05004
[Journal Article] Bias-assisted photoelectrochemical planarization of GaN (0001) with impurity concentration distribution2023
- Author(s)
  Toh D.、Kayao K.、Ohnishi R.、Osaka A. I.、Yamauchi K.、Sano Y.
- Journal Title
  
  AIP Advances
  
  Volume: 13 Issue: 9
- DOI
  10.1063/5.0151387
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching2023
- Author(s)
  Toh Daisetsu、Kayao Kiyoto、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  CIRP Journal of Manufacturing Science and Technology
  
  Volume: 47 Pages: 1-6
- DOI
  10.1016/j.cirpj.2023.09.001
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Role of Photoelectrochemical Oxidation in Enabling High-Efficiency Polishing of Gallium Nitride2023
- Author(s)
  Kayao Kiyoto、Toh Daisetsu、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 12 Issue: 6 Pages: 063005-063005
- DOI
  10.1149/2162-8777/acde61
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water2023
- Author(s)
  Toh Daisetsu、Kayao Kiyoto、Bui Pho Van、Inagaki Kouji、Morikawa Yoshitada、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  Precision Engineering
  
  Volume: 84 Pages: 21-27
- DOI
  10.1016/j.precisioneng.2023.07.003
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system2021
- Author(s)
  Inoue Takato、Nishioka Yuka、Matsuyama Satoshi、Sonoyama Junki、Akiyama Kazuteru、Nakamori Hiroki、Ichii Yoshio、Sano Yasuhisa、Shi Xianbo、Shu Deming、Wyman Max D.、Harder Ross、Kohmura Yoshiki、Yabashi Makina、Assoufid Lahsen、Ishikawa Tetsuya、Yamauchi Kazuto
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 92 Issue: 12 Pages: 123706-123706
- DOI
  10.1063/5.0070465
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K21146, KAKENHI-PROJECT-17H01073, KAKENHI-PROJECT-19J20094, KAKENHI-PROJECT-21H05004
[Journal Article] Nearly diffraction-limited hard X-ray line focusing with hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation2018
- Author(s)
  Goto Takumi、Matsuyama Satoshi、Hayashi Hiroki、Yamaguchi Hiroyuki、Sonoyama Junki、Akiyama Kazuteru、Nakamori Hiroki、Sano Yasuhisa、Kohmura Yoshiki、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
- Journal Title
  
  Optics Express
  
  Volume: 26 Issue: 13 Pages: 17477-17477
- DOI
  10.1364/oe.26.017477
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H06358
[Journal Article] Simulation and Experimental Study of Wavefront Measurement Accuracy of the Pencil-Beam Method2016
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Synchrotron Radiation News
  
  Volume: 29 Issue: 4 Pages: 32-36
- DOI
  10.1080/08940886.2016.1198674
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15J00656, KAKENHI-PROJECT-26286077, KAKENHI-PROJECT-16H06358
[Journal Article] Nearly diffraction-limited X-ray focusing with variable-numerical-aperture focusing optical system based on four deformable mirrors2016
- Author(s)
  Satoshi Matsuyama, Hiroki Nakamori, Takumi Goto, Takashi Kimura, Krishna P. Khakurel, Yoshiki Kohmura, Yasuhisa Sano, Makina Yabashi, Tetsuya Ishikawa, Yoshinori Nishino, and Kazuto Yamauchi
- Journal Title
  
  Scientific Reports
  
  Volume: 6 Issue: 1 Pages: 24801-24801
- DOI
  10.1038/srep24801
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H05737, KAKENHI-PROJECT-15J00656, KAKENHI-PROJECT-16H06358
[Journal Article] High-efficiency planarization method combining mechanical polishing and atmospheric-pressure plasma etching for hard-to-machine semiconductor substrates2016
- Author(s)
  Yasuhisa Sano, Kousuke Shiozawa, Toshiro Doi, Hideo Aida, Tadakazu Miyashita and Kazuto Yamauchi
- Journal Title
  
  Mechanical Engineering Journal
  
  Volume: 3 Issue: 1 Pages: 15-00527-15-00527
- DOI
  10.1299/mej.15-00527
- NAID
  130005126182
- ISSN
  2187-9745
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors2016
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 9965 Pages: 1-9
- DOI
  10.1117/12.2238794
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15J00656, KAKENHI-PROJECT-26286077, KAKENHI-PROJECT-16H06358
[Journal Article] Damage threshold of platinum/carbon multilayers under hard X-ray free-electron laser irradiation2015
- Author(s)
  J. Kim, A. Nagahira, T. Koyama, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Optics Express
  
  Volume: 23(22) Issue: 22 Pages: 29032-29037
- DOI
  10.1364/oe.23.029032
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-13J00129, KAKENHI-PROJECT-23226004
[Journal Article] Numerically controlled atmospheric-pressure plasma sacrificial oxidation using electrode arrays for improving silicon-on-insulator layer uniformity2015
- Author(s)
  H. Takei, K. Yoshinaga, S. Matsuyama, K. Yamauchi, and Y. Sano
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54
- NAID
  210000144748
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors2015
- Author(s)
  Takumi Goto, Hiroki Nakamori, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, and Satoshi Matsuyama
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 86 Issue: 4 Pages: 1-5
- DOI
  10.1063/1.4916617
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15J00656, KAKENHI-PROJECT-23226004
[Journal Article] Basic Study on Etching Selectivity of Plasma Chemical Vaporization Machining by Introducing Crystallographic Damage into Work Surface2015
- Author(s)
  asuhisa Sano, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Osamu Ohnishi, Michio Uneda, Yuu Okada, Hiroaki Nishikawa and Kazuto Yamauchi
- Journal Title
  
  Key Engineering Materials
  
  Volume: 625 Pages: 550-553
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics2015
- Author(s)
  J. Yamada, S. Matsuyama, Y. Sano and K. Yamauchi
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 7 Issue: 9 Pages: 093103-093103
- DOI
  10.1063/1.4929323
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26286077, KAKENHI-PROJECT-23226004
[Journal Article] Consideration of Femtosecond Laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing2015
- Author(s)
  hengwu WANG, Syuhei KUROKAWA, Toshiro DOI, Yasuhisa SANO, Hideo AIDA, Osamu OHNISHI, Michio UNEDA, Koki OYAMA, Terutake HAYASHI, Ji ZHANG, Asakawa EIJI
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 799-800 Pages: 458-462
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Aggregation of Carbon Atoms at SiO2/SiC(0001) Interface by Plasma Oxidation toward Formation of Pit-free Graphene2014
- Author(s)
  Naoki Saito, Daichi Mori, Akito Imafuku, Keisuke Nishitani, Hiroki Sakane, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita and Kenta Arima
- Journal Title
  
  Carbon
  
  Volume: 80 Pages: 440-446
- DOI
  10.1016/j.carbon.2014.08.083
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24656101, KAKENHI-PROJECT-24686020, KAKENHI-PROJECT-26630026
[Journal Article] Dependence of GaN Removal Rate of Plasma Chemical Vaporization Machining on Mechanically Introduced Damage2014
- Author(s)
  Y.Sano, T.K.Doi, S.Kurokawa, H.Aida, O.Ohnishi, M.Uneda, K.Shiozawa, Y.Okada, K.Yamauchi
- Journal Title
  
  Sensors and Materials
  
  Volume: 26 Pages: 429-434
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Approach to High Efficient CMP For Power Device Substrates2014
- Author(s)
  Syuhei KUROKAWA, Toshiro DOI, Chengwu W.WANG, Yasuhisa SANO, Hideo AIDA, Koki OYAMA, Kunimitsu TAKAHASHI
- Journal Title
  
  ECS Transactions
  
  Volume: 60 Pages: 641-646
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Development of a one-dimensional two-stage focusing system with two deformable mirrors2014
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 9208 Pages: 920802-920802
- DOI
  10.1117/12.2061821
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-23226004
[Journal Article] Novel Chemical Mechanical Polishing/Plasma-Chemical Vaporization Machining (CMP/P-CVM) Combined Processing of Hard-to-Process Crystals Based on Innovative Concepts2014
- Author(s)
  Toshiro K. Doi, Yasuhisa Sano, Syuhei Kurowaka, Hideo Aida, Osamu Ohnishi, Michio Uneda and Koki Ohyama
- Journal Title
  
  Sensors and Materials
  
  Volume: 26 Pages: 403-415
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Novel Chemical Mechanical Polishing/Plasma-Chemical Vaporization Machining [CMP/P-CVM] Combined Processing of Hard-to-Process Crystals Based on Innovative Concepts2014
- Author(s)
  T. K. Doi, Y. Sano, S. Kurokawa, Hideo Aida, Osamu Ohnishi, Michio Uneda, Koki Ohyama
- Journal Title
  
  Sensors & Materials
  
  Volume: 未定
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Thinning of a two-inch silicon carbide wafer by plasma chemical vaporization machining using a slit electrode2014
- Author(s)
  Y.Okada, H.Nishikawa, Y.Sano, K.Yamaura, K.Yamauchi
- Journal Title
  
  Materials Science Forum
  
  Volume: 788-780 Pages: 750-753
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Behaviors of Carbon Atoms during Plasma Oxidation of 4H-SiC(0001) Surfaces near Room Temperature2014
- Author(s)
  Naoki Saito, Daichi Mori, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita, and Kenta Arima
- Journal Title
  
  ECS Transactions
  
  Volume: 64 Issue: 17 Pages: 23-28
- DOI
  10.1149/06417.0023ecst
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24656101, KAKENHI-PROJECT-24686020, KAKENHI-PROJECT-26630026
[Journal Article] Development of split-delay x-ray optics using Si(220) crystals at SACLA2014
- Author(s)
  Taito Osaka, Takashi Hirano, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa and Kazuto Yamauchi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 9210 Pages: 921009-921009
- DOI
  10.1117/12.2060238
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-13J00898, KAKENHI-PROJECT-23226004
[Journal Article] Thinning of a two-inch silicon carbide wafer by plasma chemical vaporization machining using a slit electrode2014
- Author(s)
  Yu Okada, Hiroaki Nishikawa, Yasuhisa Sano, Kazuya Yamamura and Kazuto Yamauchi
- Journal Title
  
  Materials Science Forum
  
  Volume: Vol.778-780 Pages: 750-753
- DOI
  10.4028/www.scientific.net/msf.778-780.750
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Basic Study on Etching Selectivity of Plasma Chemical Vaporization Machining by Introducing Crystallographic Damage into Work Surface2014
- Author(s)
  Yasuhisa Sano, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Osamu Ohnishi, Michio Uneda, Yuu Okada, Hiroaki Nishikawa, Kazuto Yamauchi
- Journal Title
  
  Key Engineering Materials
  
  Volume: 625 Pages: 550-553
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24226005
[Journal Article] Dicing of SiC wafer by atmospheric-pressure plasma etching process with slit mask for plasma confinement2014
- Author(s)
  Yasuhisa Sano, Hiroaki Nishikawa, Yu Okada, Kazuya Yamamura, Satoshi Matsuyama and Kazuto Yamauchi
- Journal Title
  
  Materials Science Forum
  
  Volume: Vol.778-780 Pages: 759-762
- DOI
  10.4028/www.scientific.net/msf.778-780.759
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Damage characteristics of platinum/carbon multilayers under X-ray free-electron laser irradiation2013
- Author(s)
  J. Kim, T. Koyama, H. Yumoto, A. Nagahira, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawad, and K. Yamauchi
- Journal Title
  
  Proceedings of SPLE
  
  Volume: 8848 Pages: 88480S-88480S
- DOI
  10.1117/12.2022735
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J00129, KAKENHI-PROJECT-23226004
[Journal Article] Basic experiment on atmospheric-pressure plasma etching with slit aperture for high-efficiency dicing of SiC wafer2013
- Author(s)
  Yasuhisa Sano, Hiroaki Nishikawa, Kohei Aida, Chaiyapat Tangpatjaroen, Kazuya Yamamura, Satoshi Matsuyama and Kazuto Yamauchi
- Journal Title
  
  Materials Science Forum
  
  Volume: Vol.740-742 Pages: 813-816
- DOI
  10.4028/www.scientific.net/msf.740-742.813
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] X-ray nanofocusing using a piezoelectric deformable mirror and at-wavelength metrology methods2013
- Author(s)
  H. Nakamori, S. Matsuyama, S. Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section A
  
  Volume: 710 Pages: 93-97
- DOI
  10.1016/j.nima.2012.11.059
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-23226004
[Journal Article] Planarization of SiC and GaN Wafers Using Polishing Technique Utilizing Catalyst Surface Reaction2013
- Author(s)
  Yasuhisa Sano et al.
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 2 Issue: 8 Pages: N3028-N3035
- DOI
  10.1149/2.007308jss
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656101, KAKENHI-PROJECT-24686020
[Journal Article] Development of achromatic full-field x-ray microscopy with compact imaging mirror system2013
- Author(s)
  S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 8851 Pages: 885107-885107
- DOI
  10.1117/12.2023152
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23226004
[Journal Article] A Bragg beam splitter for hard x-ray free-electron lasers2013
- Author(s)
  T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Optics Express
  
  Volume: 21 Issue: 3 Pages: 2823-2831
- DOI
  10.1364/oe.21.002823
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-23226004
[Journal Article] Thin crystal development and applications for hard x-ray free-electron lasers2013
- Author(s)
  Taito Osaka, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi.
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 8848 Pages: 884804-884804
- DOI
  10.1117/12.2023465
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J00898, KAKENHI-PROJECT-23226004
[Journal Article] Cutting of SiC Wafer by Atmospheric-Pressure Plasma Etching with Wire Electrode2012
- Author(s)
  Yasuhisa Sano, Kohei Aida, Takehiro Kato, Kazuya Yamamura, Hidekazu Mimura, Satoshi Matsuyama and Kazuto Yamauchi
- Journal Title
  
  Materials Science Forum
  
  Volume: Vol.717-720 Pages: 865-868
- DOI
  10.4028/www.scientific.net/msf.717-720.865
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-bar Electrode with Multiple Gas Nozzles2012
- Author(s)
  Yasuhisa Sano, Kohei Aida, Hiroaki Nishikawa, Kazuya Yamamura, Satoshi Matsuyama, and Kazuto Yamauchi
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.497 Pages: 160-164
- DOI
  10.4028/www.scientific.net/amr.497.160
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Back-side Thinning of Silicon Carbide Wafer by Plasma Etching using Atmospheric-pressure Plasma2012
- Author(s)
  Yasuhisa Sano, Kohei Aida, Hiroaki Nishikawa, Kazuya Yamamura, Satoshi Matsuyama, and Kazuto Yamauchi
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vol.516 Pages: 108-112
- DOI
  10.4028/www.scientific.net/kem.516.108
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] One-dimensional sub-10-nm hard X-ray focusing using laterally graded multilayer mirror2011
- Author(s)
  H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nucl.Instrum.Meth.A 616
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Thinning of 2-inch SiC Wafer by Plasma Chemical Vaporization Machining Using Cylindrical Rotary Electrode2011
- Author(s)
  Yasuhisa Sano
- Journal Title
  
  Materials Science Forum
  
  Volume: 679-680 Pages: 481-484
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Breaking the 10 nm barrier in hard-X-ray focusing2010
- Author(s)
  H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nature Physics 6
  
  Pages: 122-125
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Extended knife-edge method for characterizing Sub-10-nm X-ray beams2010
- Author(s)
  S.Handa, H.Mimura, H.Yumoto, T.Kimura, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi , T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nucl.Instrum.Meth. 616
  
  Pages: 246-250
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Stitching angle measurable microscopic interferometer : surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature2010
- Author(s)
  H.Yumoto, H.Mimura, S.Handa, T.Kimura, S.Matsuyama, Y.Sano, H.Ohashi, K.Yamauchi, T.Ishikawa
- Journal Title
  
  Nucl.Instrum.Meth. 616
  
  Pages: 203-206
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Thinning of SiC wafer by plasma chemical vaporization machining2010
- Author(s)
  Yasuhisa Sano
- Journal Title
  
  Materials Science Forum 645-648
  
  Pages: 857-860
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246027
[Journal Article] Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm2010
- Author(s)
  T.Kimura, H.Mimura, S.Handa, H.Yumoto, H.Yokoyam, S.Imai, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Kohmura, Y.Nishino, M.Yabashi, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Rev.Sci.Instrum. 81
  
  Pages: 123704-123704
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining2009
- Author(s)
  T. Kato, Y. Sano, H. Hara, H. Mimura, K. Yamamura and K. Yamauchi
- Journal Title
  
  Materials Science Forum Vols. 600-603
  
  Pages: 843-846
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide2009
- Author(s)
  Y. Sano, M. Watanabe, T. Kato, K. Yamamura, H. Mimura and K. Yamauchi
- Journal Title
  
  Materials Science Forum Vols. 600-603
  
  Pages: 847-850
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] Trace element mapping of a single cell using a hard x-ray nanobeam focused by a Kirkpatrick-Baez mirror system2009
- Author(s)
  S. Matsuyama, M. Shimura, H. Mimura, M. Fujii, H. Yumoto, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi
- Journal Title
  
  X-ray Spectrometry 38
  
  Pages: 89-94
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide2009
- Author(s)
  Yasuhisa Sano
- Journal Title
  
  Materials Science Forum 600-603
  
  Pages: 847-850
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] Direct determination of the wave field of an x-ray nanobeam2008
- Author(s)
  H.Mimura, H.Yumoto, S.Matsuyama, S.Handa, T.Kimura, Y.Sano, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Phys.Rev.A 77
  
  Pages: 15812-15812
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Highly accurate differential deposition for X-ray reflective optics2008
- Author(s)
  S. Handa, H. Mimura, H. Yumoto, T. Kimura, S. Matsuyama, Y. Sano and K. Yamauchi
- Journal Title
  
  Surface and Interface Analysis 40
  
  Pages: 1019-1022
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Direct Determination of the Wave Field of an X-ray Nanobeam2008
- Author(s)
  H.Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
- Journal Title
  
  Physical Review A 77(1)
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Efficient focusing of hard x rays to 25 nm by a total reflection mirror2007
- Author(s)
  H.Mimura, H.Yumoto, S.Matsuyama, Y.Sano, K.Yamamura, Y.Mori, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Appl.Phys.Lett. vol.90
  
  Pages: 51903-51903
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Polishing Characteristics of 4H-SiC Si-Face and C-Face by Plasma Chemical Vaporization Machining2007
- Author(s)
  Y. Sano, M. Watanabe, K. Yamamura, K. Yamauchi, T. Ishida, K. Arima, A. Kubota, and Y. Mori
- Journal Title
  
  Materials Science Forum Vols. 556-557
  
  Pages: 757-760
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] A New Designed Ultra-high Precision Profiler - Study on Slope Error Measurement of a Mandrel for Wolter type-I mirror Fabrication -2006
- Author(s)
  Yasuo.HIGASHI^<*a>.Yuichi.TAKAIE^b, Katsuyoshi.ENDO^b, Tatsuya.KUME^a, Kazuhiro.ENAMI^a, Kazuto.YAMAUCHI^c, Kazuya.YAMAMURA^c, Toshihisa.SANO^c, Kenji.UENO^a, Yuzo.MORI^c
- Journal Title
  
  Proc.Of the 8^<th> International Conference on X-ray Microscopy ; 26-30, July, at Egret Himeji 2006.6月発行(In printing)
- Data Source
  KAKENHI-PROJECT-16360073
[Journal Article] A New Designed Ultra-high Precision Profiler2006
- Author(s)
  Y.HIGASHI^a, Y.TAKAIE^b, K.ENDO^b, T.KUME^a, K.ENAMI^a, K.YAMAUCHI^c, K.YAMAMURA^c, H.SANO^c, K.UENO^a, Y.MORI^c
- Journal Title
  
  Proc of SPIE : Advances in Mirror Technology for X-ray, EUV Lithography, laser, and Other Applications, 3 August 2005, Sandiego, CA, USA Vol.# 5921(In printing)
- Data Source
  KAKENHI-PROJECT-16360073
[Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics -Calibration of the rotational angle error of the rotary encoders-2006
- Author(s)
  Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
- Journal Title
  
  SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360073
[Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006
- Author(s)
  Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
- Journal Title
  
  SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360073
[Journal Article] Polishing characteristics of silicon carbide by plasma chemical vaporization machining2006
- Author(s)
  Y. Sano, M. Watanabe, K. Yamamura, K. Yamauchi, T. Ishida, K. Arima, A. Kubota and Y. Mori
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 45
  
  Pages: 8277-8280
- NAID
  10018339543
- Data Source
  KAKENHI-PROJECT-18686014
[Journal Article] At-wavelength figure metrology of hard x-ray focusing mirrors2006
- Author(s)
  H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Review of Scientific Instruments 77
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Patent] 「プラズマ融合CMP」「plasma fusion CMP」2016
- Inventor(s)
  土肥俊郎、佐野泰久、黒河周平、不二越機械工業、並木精密宝石
- Industrial Property Rights Holder
  土肥俊郎、佐野泰久、黒河周平、不二越機械工業、並木精密宝石
- Industrial Property Rights Type
  実用新案
- Filing Date
  2016-03-01
- Data Source
  KAKENHI-PROJECT-24226005
[Patent] 加工方法及び該方法を用いる複合加工装置並びに該方法または該装置により加工された加工物2014
- Inventor(s)
  佐野, 土肥, 黒河、會田, 大山, 宮下
- Industrial Property Rights Holder
  佐野, 土肥, 黒河、會田, 大山, 宮下
- Industrial Property Rights Type
  特許
- Filing Date
  2014-02-25
- Data Source
  KAKENHI-PROJECT-24226005
[Patent] 加工方法及び該方法を用いる複合加工装置並びに該方法または該装置により加工された加工物2014
- Inventor(s)
  土肥、佐野、宮下、曾田、大山
- Industrial Property Rights Holder
  土肥、佐野、宮下、曾田、大山
- Industrial Property Rights Type
  特許
- Filing Date
  2014-02-25
- Data Source
  KAKENHI-PROJECT-24226005
[Patent] 半導体ウエハ外周部の加工方法及びその装置2007
- Inventor(s)
  佐野泰久, 山村和也, 原英之, 加藤武寛
- Industrial Property Rights Holder
  大阪大学
- Patent Publication Number
  2009-043969
- Filing Date
  2007
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Design, fabrication, and implementation of XFEL sub-10 nm focusing mirrors2023
- Author(s)
  J. Yamada, T. Inoue, S. Matsuyama, N. Nakamura, Y. Tanaka, A. Ito, K. Shioi, T. Osaka, I. Inoue, Y. Inubushi, Y. Sano, M. Yabashi, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics and Applications (XOPT2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Surface Planarization of YAG Ceramics Using Catalyst-Referred Etching2023
- Author(s)
  Y. Yoshida, K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2023 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] High-speed planarization of GaN (0001) substrate using catalyst-referred etching enhanced with positive-biased photoelectrochemical oxidation2023
- Author(s)
  D. Toh, K. Kayao, K. Yamauchi and Y. Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] High-precision finihing method for a narrow-gap channel-cut crystal X-ray monochromators using atmospheric-pressure plasma with a wire electrode2023
- Author(s)
  S. Matsumura, I. Ogasahara, T. Osaka, K. Yamauchi, M. Yabashi and Y. Sano
- Organizer
  Optical Fabrication and Testing (OF&T)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Distortion-free Processing Method Using Plasma Chemical Vaporization Machining with a Wire Electrode for Narrow-gap Channel-cut Crystal Monochromators2023
- Author(s)
  I. Ogasahara, S. Matsumura, K. Yamauchi and Y. Sano; T. Osaka, M. Yabashi
- Organizer
  American Society for Precision Engineering (ASPE) 2023 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Surface finishing of a micro channel-cut crystal monochromator using high-pressure plasma etching2023
- Author(s)
  S. Matsumura, I. Ogasahara, T. Osaka, I. Inoue, K. Yamauchi, M. Yabashi and Y, Sano
- Organizer
  International Conference on X-ray Optics and Applications (XOPT2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Development of distortion-free processing for narrow-gap channel-cut crystal monochromators using plasma chemical vaporization machining with a wire electrode2023
- Author(s)
  I. Ogasahara, S. Matsumura, T. Osaka, K. Yamauchi, M. Yabashi and Y, Sano
- Organizer
  International Conference on X-ray Optics and Applications (XOPT2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Development of phase-contrast imaging method for X-ray nanotomography with full-field X-ray microscope based on AKB mirror2023
- Author(s)
  A. Yakushigawa, J. Yamada, Y. Tanaka, Y. Sano, H. Takano, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics and Applications (XOPT2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Characteristics of Photoelectrochemical Oxidation Enabling High-efficiency Polishing of Gallium Nitride2023
- Author(s)
  K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Planarization of polymer materials using catalytic reaction in pure water2022
- Author(s)
  K. Takeda, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Development of hard X-ray sub-5-nm focusing system with an adaptive multilayer focusing mirror2022
- Author(s)
  T. Inoue, S. Matsuyama, Y. Tanaka, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Stretching pulse duration of hard X-ray laser up to 50 ps using rotated-inclined crystal2022
- Author(s)
  S. Matsumura, S. Nakano, T. Osaka, I. Inoue, J. Yamada, T. Togashi, K. Tono, K. Yamauchi, Y. Sano and M. Yabashi
- Organizer
  7th International Conference on X-ray Optics and Applications 2022 (XOPT2022) in OPIC2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 硬X線領域におけるバックグラウンドフリー強度自己相関法の実証2022
- Author(s)
  大坂泰斗，井上伊知郎，山田純平，犬伏雄一，登野健介，松村正太郎，中野勝太，小笠原伊織，佐野泰久，山内和人，玉作賢治，矢橋牧名
- Organizer
  第35回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 形状可変ミラーを用いたX線sub-5 nm集光システムの開発2022
- Author(s)
  井上陽登，松山智至，田中優人，伊藤篤輝，一井愛雄，山田純平，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第35回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Damage-free processing of narrow-gap channel-cut crystal X-ray monochromators using atmospheric-pressure plasma with a wire electrode2022
- Author(s)
  I. Ogasahara, S. Matsumura, T. Osaka, K. Yamauchi, M. Yabashi and Y. Sano
- Organizer
  The 19th International Conference on Precision Engineering (ICPE2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Preparation of highly planarized optical surface on Si substrate via catalyst-referred etching2022
- Author(s)
  K. Itagaki, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Fabrication of an atomically smooth polycrystalline surface without grain boundary steps using catalyst-referred etching2022
- Author(s)
  D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] High-Speed Catalyst-Referred Etching of Gallium Nitride Assisted by Ultraviolet Light Irradiation" American Society for Precision Engineering (ASPE) 2022 Annual Meeting2022
- Author(s)
  K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2022 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Surface planarization of polycrystalline silicon carbide by catalyst-referred etching2022
- Author(s)
  K. Futamura, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2022 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 圧電素子駆動型形状可変ミラーを用いたX線sub-5 nm集光システムの開発（第２報）差分成膜を組み合わせたハイブリッド波面修正2021
- Author(s)
  井上陽登，松山智至，田中優人，二村浩平，一井愛雄，山田純平，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Optimization of mirror deformation strategy using mechanical and piezoelectric bending system2021
- Author(s)
  T. Inoue, Y. Nishioka, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi
- Organizer
  SPIE Optics+Photonics2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] X線ミラーを用いたsub-5nm集光システムの開発2021
- Author(s)
  井上陽登，松山智至，一井愛雄，山田純平，佐野泰久，山内和人
- Organizer
  第34回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 触媒表面基準エッチング法を用いた粒界段差フリーな超平滑多結晶材料表面の作製2021
- Author(s)
  藤大雪，Bui Van Pho，松山智至，佐野泰久，山内和人
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 圧電素子駆動型形状可変ミラーを用いたX線sub-5nm集光システムの開発2021
- Author(s)
  井上陽登，松山智至，田中優人，二村浩平，一井愛雄，山田純平，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2021年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 凹・凸面形状可変ミラーを組み合わせたX線アダプティブ集光光学系の開発2020
- Author(s)
  山口浩之，松山智至，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第33回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of X-ray adaptive focusing optics with four mirrors deformable between concave and convex shapes2020
- Author(s)
  Y. Nishioka, H. Yamaguchi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi
- Organizer
  5th International Conference on X-ray Optics and Applications 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Adaptive x-ray zoom condenser system based on concave and convex mirrors2020
- Author(s)
  Y. Nishioka, H. Yamaguchi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi
- Organizer
  5th International Conference on X-ray Optics and Applications 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 凹面・凸面形状可変ミラーを組み合わせたX線アダプティブ光学系の開発2020
- Author(s)
  西岡柚香，山口浩之，松山智至，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2020年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of adaptive X-ray focusing system consisting of concave mirror and convex mirror2019
- Author(s)
  H. Yamaguchi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  XOPT2019
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 凹・凸面形状可変ミラーを組み合わせたX線ズームコンデンサの開発2019
- Author(s)
  山口浩之，松山智至，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2019年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Reflective imaging device using concave-convex mirrors for compact full-field X-ray microscope2019
- Author(s)
  T. Hagiwara, J. Yamada, S. Matsuyama, Y. Sano, R. Hirose, Y. Takeda, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi
- Organizer
  XOPT2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of X-ray adaptive focusing optical system based on the combination of concave mirror and convex mirror2019
- Author(s)
  H.Yamaguchi, S.Matsuyama, J.Sonoyama, K.Akiyama, H.Nakamori, Y.Sano, Y.Kohmura, M.Yabashi, T.Ishikawa, and K.Yamauchi
- Organizer
  SPIE Optics+Photonics2019
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 圧電単結晶を用いた形状可変ミラーの開発2018
- Author(s)
  林宏樹，後藤拓実，松山智至，山口浩之，中森紘基，佐野泰久，山内和人
- Organizer
  第31回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] X線波面計測法を用いた結像ミラーの評価2018
- Author(s)
  萩原拓，山田純平，松山智至，佐野泰久，矢橋牧名，表和彦，石川哲也，山内和人
- Organizer
  第32回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 形状可変ミラーを用いたコンパクトなX線ズームコンデンサの開発2018
- Author(s)
  山口浩之，松山智至，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第32回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 多層膜結像ミラー光学系による高空間分解能なX線顕微鏡の開発2018
- Author(s)
  波多健太郎，山田純平，松山智至，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2018年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of adaptive Kirkpatrick-Baez mirrors based on bimorph and mechanical bending2018
- Author(s)
  H. Nakamori, T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, H. Okada, and K. Yamauchi
- Organizer
  The 6th International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 圧電バイモルフミラーと機械曲げ機構を組み合わせたX線アダプティブ集光システムによる2次元集光ビームの形成2018
- Author(s)
  山口浩之，林宏樹，後藤拓実，松山智至，園山純基，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2018年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 機械曲げ機構と圧電バイモルフミラーによるハイブリッド型形状可変ミラー開発2018
- Author(s)
  山口浩之，後藤拓実，松山智至，林宏樹，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第31回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 機械曲げ機構と圧電バイモルフミラーを組み合わせたハイブリッド型X線アダプティブ集光システムの開発2018
- Author(s)
  山口浩之，林宏樹，後藤拓実，松山智至，園山純基，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2018年度関西地方定期学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 圧電駆動型ミラーと機械曲げ機構を組み合わせたアダプティブ集光システムによるX線集光ビームの形成2018
- Author(s)
  後藤拓実．松山智至，林宏樹，山口浩之，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第31回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 硬X線集光用形状可変ミラーを用いたアダプティブ集光光学系の開発2018
- Author(s)
  山口浩之，林宏樹，後藤拓実，松山智至，園山純基，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] X線波面計測法を用いた結像ミラーの評価―タイコグラフィを用いたシングルグレーチング干渉計のクロスチェック―2018
- Author(s)
  萩原　拓，山田純平，松山智至，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2019年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of adaptive Kirkpatrick-Baez mirrors based on mechanical and piezoelectric bending2018
- Author(s)
  H. Nakamori, T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, Y. Sano, Y, Kohmura, M. Yabashi, T. Ishikawa, H. Okada, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of hybrid X-ray adaptive optical system based on piezo-driven deformable mirror and a mechanical mirror bender2018
- Author(s)
  H. Yamaguchi, T. Goto, H. Hayashi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  The 13th International Conference on Synchrotron Radiation Instrumentation (SRI 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of adaptive X-ray focusing system based on a combination of a piezoelectric bimorph mirror and a mechanical mirror bender2018
- Author(s)
  H. Yamaguchi, T. Goto, H. Hayashi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics and Applications 2018 (XOPT2018) in OPIC2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope2017
- Author(s)
  J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] High-magnification X-ray imaging mirror system consisting of elliptical concave and hyperbolic convex mirrors2017
- Author(s)
  J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Measuring Temporal Profile of Femtosecond X-Ray Pulses with a Hard X-Ray Split-and-Delay Optical System at SACLA2017
- Author(s)
  T. Osaka, T. Hirano, Y. Morioka, Y. Sano, Y. Inubushi, T. Togashi, I. Inoue, K. Tono, S. Matsuyama, K. Yamauchi, and M. Yabashi
- Organizer
  International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of hybrid adaptive x-ray focusing system based on piezoelectric bimorph mirror and mirror bender2017
- Author(s)
  T. Goto, S. Matsuyama, H. Hayashi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of an adaptive x-ray focusing system based on the combination of piezoelectric bimorph mirror and mirror bender2017
- Author(s)
  T. Goto, S. Matsuyama, H. Hayashi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, and K. Yamauchi
- Organizer
  International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] バイモルフ型形状可変ミラーのための低ドリフト制御プロセスの開発2017
- Author(s)
  林宏樹，後藤拓実，山口浩之，中森紘基，松山智至，佐野泰久，山内和人
- Organizer
  2017年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Achromatic and High-Resolution Full-Field X-ray Microscope and its Applicaiton2017
- Author(s)
  S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, H. Okadam, Y. Sano, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 4枚の形状可変ミラーを用いたアダプティブX線光学系による硬X線コリメート光の形成2017
- Author(s)
  後藤拓実，松山智至，林宏樹，中森紘基，佐野泰久，香村芳樹，石川哲也，山内和人
- Organizer
  第30回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Development of an X-ray imaging optical system consisting of concave and convex mirrors2017
- Author(s)
  J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 圧電バイモルフミラーと機械曲げ機構を組み合わせたX線集光用システムの開発2017
- Author(s)
  後藤拓実，松山智至，林宏樹，園山純生，秋山和輝，中森紘基，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2017年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] ビームサイズ可変X線集光光学系の開発－形状可変ミラーの形状制御プロセスの改良－2017
- Author(s)
  林宏樹，後藤拓実，中森紘基，松山智至，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第30回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Fabrication of X-ray imaging mirror for an achromatic and high-resolution full-field X-ray microscope2017
- Author(s)
  J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, and K. Yamauchi
- Organizer
  The 32nd Annual Meeting of American Society for Precision Engineering (ASPE2017)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] High-resolution imaging XAFS using advanced Kirkpatrick-Baez mirror optics2016
- Author(s)
  S. Yasuda, S. Matsuyama, H. Okada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] A Two-stage Adaptive X-ray Focusing System using Four Piezoelectric Deformable Mirrors2016
- Author(s)
  T. Goto, H. Nakamori, S. Matsuyama, H. Hayashi, T. Kimura, K. P. Khakurel, Y. Sano, Y. Kohmura, M. Yabashi, Y. Nishino, T. Ishikawa, and K. Yamauchi
- Organizer
  13th International Conference on X-ray Microscopy (XRM2016)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第11報）－B-Type装置によるGaN基板加工特性とその加工メカニズム-2016
- Author(s)
  大山幸希、土肥俊郎、西澤秀明、會田英雄、佐野泰久、黒河周平山崎直
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Achromatic and high-resolution full-field X-ray microscopy based on four total-reflection mirrors2016
- Author(s)
  S.Matsuyama, S. Yashuda, H. Okada, Y. Kohmura, Y. Sano, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第10報）－基本型装置（A型）によるダイヤモンドの加工－2016
- Author(s)
  佐野泰久, 土肥俊郎, 黒河周平, 會田英雄, 大山幸希, 宮下忠一, 住澤春男, 宮崎俊亘, 山内和人
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 二段アダプティブKBミラー光学系を用いた硬X線平行ビームの形成2016
- Author(s)
  後藤拓実，中森紘基，松山智至，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  千葉，東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的プラズマ融合CMP技術の提案とDiamond基板の加工2016
- Author(s)
  西澤秀明、土肥俊郎、會田英雄、黒河周平、佐野泰久
- Organizer
  第31回精密加工ﾌﾟﾛｾｽ研究会
- Place of Presentation
  リファレンス駅東ビル（福岡）
- Year and Date
  2016-02-25
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 形状可変ミラーによる二段 KB ミラー集光光学系を用いた任意サイズ硬 X 線集光ビームの形成2016
- Author(s)
  後藤拓実，中森紘基，松山智至，木村隆志，Krishna Prasad Khakurel，佐野泰久，香村芳樹，西野吉則，石川哲也，山内和人
- Organizer
  第29回放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  千葉，東京大学柏の葉キャンパス
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第12報）－B-Type装置によるダイヤモンド基板とその加工メカニズム-2016
- Author(s)
  西澤秀明、土肥俊郎、大山幸希、會田英雄、佐野泰久、黒河周平、金聖祐
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 二段アダプティブ KB ミラー光学系を用いた任意サイズの硬 X 線ビームの形成2016
- Author(s)
  林宏樹，後藤拓実，松山智至，佐野泰久，山内和人，中森紘基，香村芳樹，矢橋牧名，石川哲也
- Organizer
  2016年度関西地方定期学術講演会
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] 先端的難加工基板の高能率精密加工法の研究（第6報）-ｆｓレーザ照射による疑似ラジカルば形成基板表面のCMP研磨特性-2016
- Author(s)
  黒河周平、王成武、土肥俊郎、佐野泰久、會田英雄、大山幸希
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of an x-ray adaptive optical system using four deformable mirrors for focusing and collimating2016
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, T. Kimura, K. P. Khakurel, Y. Kohmura, Y. Sano, M. Yabashi, T. Ishikawa, Y. Nishino, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2016
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] High-resolution imaging XAFS using advanced Kirkpatrick-Baez mirror optics2016
- Author(s)
  S. Yasuda, S. Matsuyama, H. Okada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016
- Place of Presentation
  Pacifico Yokohama, Kanagawa, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H02307
[Presentation] 一次元結像ミラーを用いた色収差のない結像型Ｘ線顕微鏡の開発2016
- Author(s)
  安田周平，松山智至，岡田浩巳，青野信也，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第29回放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  千葉，東京大学柏の葉キャンパス
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of an x-ray imaging optical system based on a combination of concave and convex mirrors2016
- Author(s)
  S. Matsuyama, J. Yamada, Y. Sano, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2016
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] A variable-numerical-aperture x-ray focusing system using a two-stage adaptive Kirkpatrick-Baez mirrors based on piezo electric deformable mirrors2016
- Author(s)
  H. Hayashi, T. Goto, H. Nakamori, S. Matsuyama, T. Kimura, K. P. Khakurel, Y. Sano, Y. Kohmura, M. Yabashi, Y. Nishino, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] Size-controllable X-ray beam collimation using a two-stage adaptive Kirkpatrick-Baez mirror system based on piezoelectric deformable mirrors2016
- Author(s)
  T. Goto, H. Nakamori, S. Matsuyama, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Data Source
  KAKENHI-PROJECT-16H06358
[Presentation] XFEL 用分割・遅延光学系の開発　－波面分割型ビームスプリッタの検討－2016
- Author(s)
  平野嵩，大坂泰斗，佐野泰久，犬伏雄一，松山智至，登野健介，石川哲也，山内和人，矢橋牧名
- Organizer
  第29回放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  千葉，東京大学柏の葉キャンパス
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] XFEL 用分割・遅延光学系の開発　－SACLA における性能評価－2016
- Author(s)
  大坂泰斗，平野嵩，犬伏雄一，佐野泰久，松山智至，登野健介，石川哲也，山内和人，矢橋牧名
- Organizer
  第29回放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  千葉，東京大学柏の葉キャンパス
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] High-efficiency planarization method for hard-to-machine semiconductor substrates combining mechanical polishing and atmospheric-pressure plasma etching2015
- Author(s)
  Yasuhisa Sano, Kousuke Shiozawa, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Tadakazu Miyashita, and Kazuto Yamauchi
- Organizer
  2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment
- Place of Presentation
  神戸国際会議場
- Year and Date
  2015-06-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] モノリシックな一次元Wolter mirrorを用いた結像型X線顕微鏡の開発2015
- Author(s)
  安田周平，松山智至，木野英俊，岡田浩巳，青野真也，佐野泰久，香村芳樹，石川哲也，山内和人
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  宮城，東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 結晶光学素子に基づくX線分割・遅延光学系の開発―集光光学系併用時の空間的重複の実現―2015
- Author(s)
  大坂泰斗，平野嵩，犬伏雄一，矢橋牧名，佐野泰久，松山智至，登野健介，佐藤尭洋，小川奏，石川哲也，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東洋大学白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] X線ミラー作製のためのビーム偏向制御を用いた数値制御イオンビーム加工装置の開発2015
- Author(s)
  山田純平，松山智至，佐野泰久，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] SF6ガスを用いたサブ大気圧プラズマエッチングによる SiC 基板の高能率加工, 田尻光毅2015
- Author(s)
  田尻光毅，井上裕貴，佐野泰久，松山智至，山内和人
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] モノリシックな一次元Wolter mirrorを用いた結像型硬X線顕微鏡の開発2015
- Author(s)
  安田周平，松山智至，木野英俊，岡田浩巳，青野真也，佐野泰久，香村芳樹，石川哲也，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東洋大学白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 静電偏向制御を用いたイオンビーム加工法による X 線全反射ミラーの作製2015
- Author(s)
  山田純平，松山智至，佐野泰久，山内和人
- Organizer
  精密工学会関西支部2015年度関西地方定期学術講演会
- Place of Presentation
  京都，京都工芸繊維大学松ヶ崎キャンパス
- Year and Date
  2015-06-03
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的 “Plasma fusion CMP装置”の設計・試作(第9報) －ダイヤモンド単結晶基板の加工特性－2015
- Author(s)
  西澤秀明，大山幸希，土肥俊郎，曾田英雄，金　聖祐，佐野泰久，黒河周平，王　成武
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 数値制御大気圧プラズマ犠牲酸化法における酸化膜厚制御の精度向上2015
- Author(s)
  栗生賢，武居弘泰，松山智至，佐野泰久，山内和人
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of split-delay optics with wide range of photon energy for XFEL pump/XFEL probe experiments2015
- Author(s)
  T. Hirano, T. Osaka, Y. Inubushi, Y. Sano, S. Matsuyama, K. Tono, T. Ishikawa, K. Kazuto and M. Yabashi
- Organizer
  SPIE Optics+Photonics2015
- Place of Presentation
  San Diego, CA, US
- Year and Date
  2015-08-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 形状可変ミラーによる二段集光光学系の開発2015
- Author(s)
  後藤拓実，中森紘基，松山智至，木村隆志，佐野泰久，香村芳樹，玉作賢治，矢橋牧名，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of Split-delay Optics for Capturing femtosecond-scale Dynamics with Hard X-ray Lasers2015
- Author(s)
  T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, S. Matsuyama, K. Tono, T. Ishikawa, K. Yamauchi and M. Yabashi
- Organizer
  The 2nd International Symposium of Interactive Materials Science Cadet Program
- Place of Presentation
  Osaka, Japan
- Year and Date
  2015-11-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第8報） -基本型装置（A型）によるダイヤモンド加工の基礎検討-2015
- Author(s)
  佐野泰久，塩澤昂祐，土肥俊郎，黒河周平，會田英雄，大山幸希，宮下忠一，山内和人
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Fabrication of X-ray mirror with a shape accuracy of 1 nm using ion beam figuring system with electrostatic deflection2015
- Author(s)
  J. Yamada, S. Matsuyama, Y. Sano and K. Yamauchi
- Organizer
  6th International Conference on Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
- Place of Presentation
  Harbin, P. R. China
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 1次元Wolterミラー（Monolithic型）を用いた色収差のない結像型X線顕微鏡の開発2015
- Author(s)
  木野英俊，松山智至，岡田浩巳，佐野泰久，香村芳樹，玉作賢治，矢橋牧名，津村尚史，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] XFEL用オートコリレータの開発；幾何・波動光学計算に基づくアライメント手法の検討2015
- Author(s)
  平野嵩，大坂泰斗，犬伏雄一，矢橋牧名，佐野泰久，松山智至，登野健介，佐藤尭洋，小川奏，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Damage-induced increase of removal rate of atmospheric-pressure plasma etching of diamond substrate2015
- Author(s)
  Y.Sano, K. Shiozawa, T. Doi, S. Kurokawa, H. Aida, K. Oyama, T. Miyashita, H. Sumizawa, K. Yamauchi
- Organizer
  The 9th International Conference on New Diamonds and Nano Carbons 2015
- Place of Presentation
  静岡県コンベンションアーツセンター
- Year and Date
  2015-05-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Consideration of Femtosecond laser-induced Effect on Semiconductor Material SiC Substrate for CMP Processing2015
- Author(s)
  Syuhei Kurokawa, Toshiro Doi, Yasuhisa Sano, Hideo Aida, Osamu Ohnishi, Michio Uneda, Koki Ohyama, Terutake Hayashi, Ji Zhang, Asakawa Eiji
- Organizer
  2015 ASR Bali Conferences(ICMMT2015/ICRE2015/ICLB2015)
- Place of Presentation
  Bali, Indonesia
- Year and Date
  2015-05-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] XFEL用オートコリレータの開発； KBミラー光学系併用時の空間的重複の実現2015
- Author(s)
  大坂泰斗，平野嵩，犬伏雄一，矢橋牧名，佐野泰久，松山智至，登野健介，佐藤尭洋，小川奏，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] サブ大気圧プラズマを用いたプラズマエッチングによる2インチSiC基板の高能率加工2015
- Author(s)
  田尻光毅，岡田悠，佐野泰久，松山智至，山内和人
- Organizer
  精密工学会関西支部2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学松ヶ崎キャンパス
- Year and Date
  2015-06-03
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 数値制御大気圧プラズマ犠牲酸化法における酸化特性2015
- Author(s)
  武居弘泰，栗生賢，松山智至，山内和人，佐野泰久
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] X-ray mirror surface metrology using optical and at-wavelength techniques for hard XFEL single-nanometer focusing2015
- Author(s)
  J. Kim, A. Nagahira, A. Nishikawa, S. Matsuyama, H. Yumoto, Y. Senba, T. Koyama, Y. Sano, H. Ohashi, M. Yabashi, T. Ishikawa and K. Yamauchi
- Organizer
  The 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
- Place of Presentation
  New York, US
- Year and Date
  2015-07-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] モノリシックな一次元 Wolter mirror を用いた結像型Ｘ線顕微鏡の開発2015
- Author(s)
  安田周平，松山智至，木野英俊，岡田浩巳，青野真也，佐野泰久，香村芳樹，石川哲也，山内和人
- Organizer
  精密工学会関西支部2015年度関西地方定期学術講演会
- Place of Presentation
  京都，京都工芸繊維大学松ヶ崎キャンパス
- Year and Date
  2015-06-03
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Demonstration of Feasibility of X-ray Pump-X-ray Probe Experiments Using Hard X-ray Split-and-Delay Optics Combined with Focusing Mirrors2015
- Author(s)
  T. Osaka, T. Hirano, Y. Inubushi, Y. Sano, S. Matsuyama, K. Tono, T. Katayama, T. Ishikawa, K. Yamauchi and M. Yabashi
- Organizer
  The 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
- Place of Presentation
  New York, US
- Year and Date
  2015-07-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of an adaptive K-B mirror for hard x-ray nanofocusing using piezoelectric deformable mirrors2015
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, S. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2015
- Place of Presentation
  San Diego, CA, US
- Year and Date
  2015-08-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of a full-field X-ray microscope with two monolithic imaging mirrors2015
- Author(s)
  S. Yaduda, S. Matsuyama, H. Okada, S. Aono, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa and K. Yamauchi
- Organizer
  The 13th Symposium on X-ray Imaging Optics
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-11-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of a two-stage adaptive X-ray focusing system using piezoelectric deformable mirrors2015
- Author(s)
  H. Nakamori, T. Goto, S. Matsuyama, T. Kimura, Y. Sano, H. Okada, S. Aono, S. Shiroma, A. Ueda, T. Tsumura, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa and K. Yamauchi
- Organizer
  International Workshop on X-Ray Optics and Metrology (IWXM2015)
- Place of Presentation
  Berkeley, CA, US
- Year and Date
  2015-07-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] X線集光ミラー形状測定のための姿勢補正機構を有する三次元測定機の開発2015
- Author(s)
  金章雨，松山智至，佐野泰久，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東洋大学白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Sub-10 nm集光用X線ミラーのための高精度形状計測装置の開発2015
- Author(s)
  金章雨，長平良綾香，西原明彦，松山智至，佐野泰久，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 硬X線自由電子レーザー用分割・遅延光学系の開発（第3報） -SACLAにおける性能評価-2015
- Author(s)
  平野嵩，大坂泰斗，佐野泰久，犬伏雄一，松山智至，登野健介，石川哲也，山内和人，矢橋牧名
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  宮城，東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Optimization of Machining Conditions of Basic-Type CMP/P-CVM Fusion Processing Using SiC Substrate2015
- Author(s)
  Yasuhisa Sano, Kousuke Shiozawa, Toshiro Doi, Syuhei kurokawa, Hideo Aida, Koki Oyama, Tadakazu Miyashita, Haruo Sumizawa, Kazuto Yamauchi
- Organizer
  2015 International Conference on Planarization/CMP Technology (ICPT2015)
- Place of Presentation
  アリゾナ（米国）
- Year and Date
  2015-09-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] SF6ガスを用いたサブ大気圧プラズマエッチングによるSiC基板の高能率加工2015
- Author(s)
  田尻光毅，井上裕貴，佐野泰久，松山智至，山内和人
- Organizer
  応用物理学会先進パワー半導体分科会第2回講演会
- Place of Presentation
  大阪国際交流センター
- Year and Date
  2015-11-09
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 触媒表面基準エッチング法によるSiCおよびGaN基板の平坦化2015
- Author(s)
  佐野泰久, 有馬健太, 山内和人
- Organizer
  表面技術協会第132回講演大会
- Place of Presentation
  信州大学長野キャンパス
- Year and Date
  2015-09-09
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 形状可変ミラーを用いた二段Kirkpatrick-Baezミラー集光光学系による硬X線集光ビームの形成 -開口数制御による任意集光ビーム径の実現-2015
- Author(s)
  後藤拓実，中森紘基，松山智至，木村隆志，Khakurel Krishna，佐野泰久，香村芳樹，西野吉則，石川哲也，山内和人
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  宮城，東北大学川内北キャンパス
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 硬X線集光用形状可変ミラーによる二段KBミラー集光光学系の開発2015
- Author(s)
  後藤拓実，中森紘基，松山智至，木村隆志，Khakurel Krishna，佐野泰久，香村芳樹，石川哲也，西野吉則，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東洋大学白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] XFEL用集光ミラー用Pt/C多層膜の性能評価2015
- Author(s)
  長平良綾香，金章雨，小山貴久，松山智至，西原明彦，湯本博勝，佐野泰久，大橋治彦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of a two-stage adaptive Kirkpatrick-Baez mirror system for hard x-ray focusing using piezoelectric deformable mirrors2015
- Author(s)
  T. Goto, H. Nakamori, S. Matsuyama, T. Kimura, K. P. Khakurel, Y. Sano, Y. Kohmura, M. Yabashi, Y. Nishino, T. Ishikawa and K. Yamauchi
- Organizer
  The 13th Symposium on X-ray Imaging Optics
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2015-11-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Ion Beam Figuringを用いた高精度X線ミラーの作製（第7報）―静電偏向制御による非球面形状の作製と評価―2015
- Author(s)
  山田純平，松山智至，佐野泰久，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東洋大学白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 次世代半導体基板のダメージフリー加工法2014
- Author(s)
  佐野泰久
- Organizer
  第33回電子材料シンポジウム(EMS-33)
- Place of Presentation
  ラフォーレ修善寺（静岡県伊豆市）
- Year and Date
  2014-07-09
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of the innovative CMP/P-CVM combined apparatus (basic type)2014
- Author(s)
  K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, T. Miyashita, H. Sumizawa and K. Yamauchi
- Organizer
  International Conference on Planarization/CMP Technology 2014 (ICPT2014)
- Place of Presentation
  神戸国際会議場（兵庫）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Accumulation of C Atoms at SiO2/SiC Interface by Plasma Oxidation of 4H-SiC(0001) at Room Temperature: Toward Formation of PIt-Free Graphene2014
- Author(s)
  Kenta Arima, Naoki Saito, Kentaro Kawai, Yasuhisa Sano and Mizuho Morita
- Organizer
  2014 MRS Spring Meeting & Exhibit
- Place of Presentation
  San Francisco, USA
- Year and Date
  2014-04-24
- Data Source
  KAKENHI-PROJECT-24656101
[Presentation] Fabrication of Gallium Nitride Substrate with Novel Approaches –Internally Focused Laser Processing for Crystal Growth and Advanced CMP for Wafering–2014
- Author(s)
  H. AIDA, T. DOI, H. TAKEDA, K. KOYAMA, S. KUROKAWA, Y. SANO
- Organizer
  EMN Spring 2014
- Place of Presentation
  Hotel. red rock(米国・ラスベガス）
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of split-delay x-ray optics using Si(220) crystals at SACLA2014
- Author(s)
  T. Osaka, T. Hirano, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, K. Ogawa, S. Matsuyama, T. Ishikawa, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2014
- Place of Presentation
  San Diego, CA, US
- Year and Date
  2014-08-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of Autocorrelator for Hard X-ray Free-Electron Laser2014
- Author(s)
  T. Hirano, T. Osaka, Y. Inubushi, M. Yabashi, Y. Sano, S. Matsuyama, K. Tono, K. Ogawa, T. Ishikawa, and K. Yamauchi
- Organizer
  The 1st International Symposium on Interactive Materials Science Cadet Program
- Place of Presentation
  Osaka, Japan
- Year and Date
  2014-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 位相回折格子を用いたX線レーザナノビームの波面計測法の研究―フーリエ変換法と縞走査法の2つの解析法の検討―2014
- Author(s)
  西原明彦，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  精密工学会関西支部2014年度関西地方定期学術講演会
- Place of Presentation
  大阪，近畿大学東大阪キャンパス
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of a two-stage x-ray focusing system with ultraprecise deformable mirrors2014
- Author(s)
  T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2014
- Place of Presentation
  San Diego, CA, US
- Year and Date
  2014-08-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 硬X線自由電子レーザー用オートコリレータの開発―アライメント手法の検討―2014
- Author(s)
  平野嵩，大坂泰斗，犬伏雄一，矢橋牧名，佐野泰久，松山智至，登野健介，佐藤尭洋，小川奏，石川哲也，山内和人
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学，鳥取
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 加工変質層を残さない超精密加工法2014
- Author(s)
  佐野泰久
- Organizer
  精密工学会第365回講習会
- Place of Presentation
  東京理科大学（東京）
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 位相回折格子を用いたX線レーザーナノビームの高精度波面計測2014
- Author(s)
  西原明彦，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学，鳥取
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Behaviors of Carbon Atoms during Plasma Oxidation of 4H-SiC(0001) Surfaces near Room Temperature2014
- Author(s)
  Naoki Saito, Daichi Mori, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita, and Kenta Arima
- Organizer
  226th Meeting of The Electrochemical Society
- Place of Presentation
  Cancun, Mexico
- Year and Date
  2014-10-06
- Data Source
  KAKENHI-PROJECT-24656101
[Presentation] X線ミラー作製のためのビーム偏向制御用いた数値制御イオンビーム加工装置の開発2014
- Author(s)
  山田純平，松山智至，佐野泰久，山内和人
- Organizer
  精密工学会関西支部2014年度関西地方定期学術講演会
- Place of Presentation
  大阪，近畿大学東大阪キャンパス
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Ion Beam Figuringを用いた高精度X線ミラーの作製（第6報）～静電偏向制御による数値制御加工～2014
- Author(s)
  山田純平，松山智至，佐野泰久，山内和人
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学，鳥取
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第1報）―装置化の基本のコンセプトと試作装置―2014
- Author(s)
  土肥俊郎、佐野泰久、黒河周平、曾田英雄
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of high-precision figure measurement system for x-ray optics using laser focus microscope2014
- Author(s)
  J. Kim, S. Matsuyama, Y. Sano, and K. Yamauchi
- Organizer
  SPIE Optics+Photonics2014
- Place of Presentation
  San Diego, CA, US
- Year and Date
  2014-08-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Combination of Plasma Oxidation and Wet Etching to Create Monolayer-scale C Source for Pit-free Graphene on SiC Surfaces2014
- Author(s)
  Kenta Arima, Naoki Saito, Daichi Mori, Kentaro Kawai, Mizuho Morita and Yasuhisa Sano
- Organizer
  Collaborative Conference on 3D&Materials Research 2014
- Place of Presentation
  Incheon/Seoul, South Korea
- Year and Date
  2014-06-24
- Invited
- Data Source
  KAKENHI-PROJECT-24656101
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作－基本型融合加工装置(A-type)とその基本特性－2014
- Author(s)
  塩澤昂祐, 佐野泰久, 土肥俊郎, 黒河周平, 會田英雄, 宮下忠一, 住澤春男, 山内和人
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Removal Rate of Plasma Chemical Vaporization Machining of Intentionally Damaged Surface by Mechanical Action2014
- Author(s)
  K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, O.Ohnishi, M. Uneda, Y. Okada, and K. Yamauchi
- Organizer
  15th International Conference on Precision Engineering (ICPE2014)
- Place of Presentation
  石川県政記念しいのき迎賓館（石川）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 硬X線自由電子レーザー用オートコリレータの開発―χ軸回転に対する許容角度誤差の検討―2014
- Author(s)
  平野嵩，大坂泰斗，犬伏雄一，矢橋牧名，佐野泰久，松山智至，登野健介，佐藤尭洋，小川奏，石川哲也，山内和人
- Organizer
  精密工学会関西支部2014年度関西地方定期学術講演会
- Place of Presentation
  大阪，近畿大学東大阪キャンパス
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Formation of Graphene with Reduced Pits on SiC(0001) Assisted by Plasma Oxidation and Wet Etching2014
- Author(s)
  Daichi Mori, Naoki Saito, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita and Kenta Arima
- Organizer
  The 7th International Symposium on Surface Science (ISSS-7)
- Place of Presentation
  Shimane Prefectural Convention Center (Shimane, Matsue)
- Year and Date
  2014-11-06
- Data Source
  KAKENHI-PROJECT-24656101
[Presentation] Development of Hard X-Ray Split-Delay Optics Based on Si(220) Crystals2014
- Author(s)
  T. Osaka, T. Hirano, Y. Inubushi, M. Yabashi, Y. Sano, S. Matsuyama, K. Tono, T. Sato, K. Ogawa, T. Ishikawa, and K. Yamauchi
- Organizer
  JSAP-OSA Joint Symposia 2014
- Place of Presentation
  Hokkaido University, Hokkaido, Japan
- Year and Date
  2014-09-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Basic Study on Etching Selectivity of Plasma Chemical Vaporization Machining by Introducing Crystallographic Damage into Work Surface2014
- Author(s)
  Y. Sano, T. Doi, S. Kurokawa, H. Aida, O. Ohnishi, M. Uneda, Y. Okada, H. Nishikawa, and K. Yamauchi
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
- Place of Presentation
  Howard Civil International Centre(台湾）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 革新的CMP／P-CVM 融合加工法の提案とその加工特性－ワイドギャップ結晶材料の高効率加工へのブレークスルー－2014
- Author(s)
  大山幸希, 土肥俊郎, 佐野泰久, 會田英雄,黒河周平, 金聖祐, 宮下忠一
- Organizer
  日本機械学会2014 年度年次大会
- Place of Presentation
  東京電機大学（東京都）
- Year and Date
  2014-09-10
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Diamond Substrate Planarization Polishing Technique2013
- Author(s)
  K. OYAMA, T. DOI, H. AIDA, S. KUROKAWA, Y.SANO, H. TAKEDA, K. KOYAMA, T. YAMAZAKI, and K. TAKAHASHI
- Organizer
  International Conference on Planarization/CMP Technology
- Place of Presentation
  Ambassador Hotel (台湾）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Advanced high efficient precision processing method based on the III-N semiconductor processing-A proposal of a process with new concepts for hard-to-process crystal wafers2013
- Author(s)
  T. Doi, Y. Sano, S. Kurokawa, H. Aida
- Organizer
  WUPP for III-Nitride 2013
- Place of Presentation
  The BEST WESTERN PLUS(米国）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Dicing of SiC Wafer by Atmospheric-Pressure Plasma Etching Process with Slit Mask for Plasma Confinement2013
- Author(s)
  Y. Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013)
- Place of Presentation
  Seagaia Convention Center (宮崎市)
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] 硬X線用多層膜集光ミラーの反射率向上に関する研究2013
- Author(s)
  長平良綾香，金章雨，松山智至，佐野泰久，山内和人
- Organizer
  精密工学会2013年度関西地方定期学術講演会
- Place of Presentation
  大阪，大阪工業大学
- Year and Date
  2013-06-14
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 先端的難加工基板の高効率精密加工法の研究（第4報）－加工変質層の断面TEM による評価とそのPCVM加工特性－2013
- Author(s)
  塩澤昂祐, 佐野泰久, 土肥俊郎, 黒河周平, 會田英雄, 大西修, 畝田道雄, 岡田悠, 山内和人
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Formation and Evaluation of Quasi-radical Site Induced by Femtosecond Laser on the Surface of Diamond2013
- Author(s)
  C. WANG, S. KUROKAWA, S. KOMAI, H. AIDA, K. OYAMA, K. TAKAHASHI, Y. SANO, K. TSUKAMOTO, and Toshiro DOI
- Organizer
  the 13th International Symposium on Aerospace Technology
- Place of Presentation
  サンポートホール高松（香川）
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] スリット電極を用いたPCVM (Plasma Chemical Vaporization Machining)による2インチSiC基板の裏面薄化2013
- Author(s)
  岡田悠、西川央明、佐野泰久、山村和也、松山智至、山内和人
- Organizer
  SiC及び関連半導体研究　第22回講演会
- Place of Presentation
  埼玉会館（さいたま市）
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] 硬X線ナノ集光ミラー用Pt/C多層膜の作製と評価2013
- Author(s)
  金章雨，長平良綾香，松山智至，福井亮介，西原明彦，小山貴久，湯本博勝，佐野泰久，矢橋牧名，大橋治彦，石川哲也，山内和人
- Organizer
  X線ナノ集光技術研究会2013
- Place of Presentation
  大阪，中ノ島センター
- Year and Date
  2013-11-17
- Invited
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] PCVM (Plasma Chemical Vaporization Machining) による2インチSiC 基板の全面加工2013
- Author(s)
  岡田　悠、西川央明、佐野泰久、山村和也、松山智至、山内和人
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（目黒区）
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] プラズマ発生領域制限マスクを用いたPCVM(Plasma Chemical Vaporization Machining) によるSiC基板の切断加工の検討2012
- Author(s)
  西川央明、佐野泰久、会田浩平、岡田　悠、山村和也、松山智至、山内和人
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学戸畑キャンパス（北九州市）
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] PCVM (Plasma Chemical Vaporization Machining) による2インチSiC基板の薄化－スリット電極の検討－2012
- Author(s)
  西川央明、佐野泰久、会田浩平、岡田悠、山村和也、松山智至、山内和人
- Organizer
  SiC 及び関連ワイドギャップ半導体研究会第21 回講演会
- Place of Presentation
  大阪市中央公会堂（大阪市）
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] 大気圧プラズマを用いたSiC及び関連材料の高能率無歪加工2012
- Author(s)
  佐野泰久
- Organizer
  学振「結晶加工と評価技術」第145委員会第132回研究会
- Place of Presentation
  明治大学(千代田区)
- Year and Date
  2012-12-13
- Invited
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Basic experiment on atmospheric-pressure plasma etching with slit aperture for high-efficiency dicing of SiC wafer2012
- Author(s)
  Y. Sano
- Organizer
  9th European Conference on Silicon Carbide & Related Materials (ECSCRM2012)
- Place of Presentation
  Saint-Petersburg (Russia)
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-bar Electrode with Multiple Gas Nozzles2011
- Author(s)
  Yasuhisa Sano
- Organizer
  The 8th CHINA-JAPAN Conference on Ultra-Precision Machining
- Place of Presentation
  Hangzhou, China
- Year and Date
  2011-11-21
- Invited
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Cutting of SiC Wafer by Atmospheric-Pressure Plasma Etching with Wire Electrode2011
- Author(s)
  Yasuhisa Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials 2011
- Place of Presentation
  Cleveland, USA
- Year and Date
  2011-09-14
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Back-Side Thinning of Silicon Carbide Wafer by Plasma Etching using Atmospheric-Pressure Plasma2011
- Author(s)
  Y. Sano
- Organizer
  4th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Hong Kong, China
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Development of Chemical Processing Methods for Silicon Carbide Wafering and Device Processing2010
- Author(s)
  Yasuhisa Sano
- Organizer
  Third International Symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka
- Year and Date
  2010-11-24
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Development of Chemical Processing Methods for Silicon Carbide Wafering and Device Processing2010
- Author(s)
  Yasuhisa Sano
- Organizer
  Third International Symposium on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka, Japan
- Year and Date
  2010-11-26
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Thinning of 2-inch SiC wafer by plasma chemical vaporization machining2010
- Author(s)
  Yasuhisa Sano
- Organizer
  The 8th European Conference on Silicon Carbide and Related Materials
- Place of Presentation
  Oslo, Norway
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Dicing of SiC wafer by atmospheric-pressure plasma etching process with wire electrode2010
- Author(s)
  Yasuhisa Sano
- Organizer
  The 16th International Conference on Crystal Growth
- Place of Presentation
  Beijing, China
- Year and Date
  2010-08-10
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Thinning of SiC wafer by plasma chemical vaporization machining2009
- Author(s)
  Yasuhisa Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials 2009
- Place of Presentation
  Nurnberg, Germany
- Year and Date
  2009-10-14
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Crystal machining using atmospheric pressure plasma2008
- Author(s)
  Y. Sano, K. Yamamura, K. Yamauchi and Y. Mori
- Organizer
  4th International Workshop on Crystal Growth Technology
- Place of Presentation
  Beatenberg, Switzerland
- Year and Date
  2008-05-20
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM(Plasma Chemical Vaporization Machining)を用いたSiC基板の切断加工の検討2008
- Author(s)
  会田浩平, 佐野泰久, 加藤武寛, 山村和也,三村秀和, 松山智至, 山内和人
- Organizer
  応用物理学会SiC及び関連ワイドギャップ半導体研究会第17回講演会予稿集
- Place of Presentation
  大田区
- Year and Date
  2008-12-08
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] SBDのI-V測定によるSiC加工表面の結晶性評価2008
- Author(s)
  白沢佑樹, 佐野泰久, 岡本武志, 山内和人
- Organizer
  SiC及び関連ワイドギャップ半導体研究会第17回講演会予稿集
- Place of Presentation
  大田区
- Year and Date
  2008-12-08
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM(Plasma Chemical Vaporization Machining)を用いたSiC基板の薄化2008
- Author(s)
  加藤武寛, 佐野泰久, 堀勉, 原英之, 山村和也, 三村秀和, 勝山義昭, 山内和人
- Organizer
  2008年春季第55回応用物理学関係連合講演会予稿集
- Place of Presentation
  船橋市
- Year and Date
  2008-03-28
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM(Plasma Chemical Vaporization Machining)を用いたSiC基板の切断加工の検討2008
- Author(s)
  加藤武寛, 佐野泰久, 会田浩平, 山村和也,三村秀和, 松山智至, 山内和人
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  春日井市
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Thinning of SiC wafers by Plasma Chemical Vaporization Machining2008
- Author(s)
  T. Kato, Y. Sano, T. Hori, K. Yamamura, H. Mimura, Y. Katsuyama, and K. Yamauchi
- Organizer
  The 4th Asian Conference on Crystal Growth and Crystal Technology
- Place of Presentation
  仙台
- Year and Date
  2008-05-24
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Plasma Chemical VaporizationMachiningを用いたSiC基板の薄化2008
- Author(s)
  加藤武寛, 佐野泰久, 会田浩平, 堀勉, 山村和也, 三村秀和, 松山智至, 勝山義昭, 山内和人
- Organizer
  応用物理学会SiC及び関連ワイドギャップ半導体研究会第17回講演会予稿集
- Place of Presentation
  大田区
- Year and Date
  2008-12-08
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide2007
- Author(s)
  Y. Sano, M. Watanabe, T. Kato, K. Yamamura, H. Mimura, and K. Yamauchi
- Organizer
  International Conference on Silicon Carbide and Related Materials 2007
- Place of Presentation
  大津市
- Year and Date
  2007-10-15
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM(Plasma Chemical Vaporization Machining)を用いたSiCウエハのベベル加工2007
- Author(s)
  加藤武寛, 佐野泰久, 原英之, 三村秀和, 山村和也, 山内和人
- Organizer
  第68回応用物理学会学術講演会講演予稿集
- Place of Presentation
  札幌市
- Year and Date
  2007-09-04
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining2007
- Author(s)
  T. Kato, Y. Sano, H. Hara, H. Mimura, K. Yamamura and K. Yamauchi
- Organizer
  International Conference Silicon Carbide and Related Materials 2007 (ICSCRM2007)
- Place of Presentation
  大津市
- Year and Date
  2007-10-17
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Carbide2007
- Author(s)
  佐野泰久
- Organizer
  The International Conference on Silicon Carbide and Related Materials 2007 (ICSCRM2007)
- Place of Presentation
  大津
- Year and Date
  2007-10-15
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM ( Plasma Chemical Vaporization Machining)を用いたSiCウエハーのベベル加工の検討2007
- Author(s)
  加藤武寛, 佐野泰久, 三村秀和, 原英之, 山内和人
- Organizer
  精密工学会2007年度関西地方定期学術講演会講演論文集
- Place of Presentation
  大東市
- Year and Date
  2007-08-09
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] PCVM(Plasma Chemical Vaporization Machining)を用いたSiCウエハの薄化2007
- Author(s)
  加藤武寛, 佐野泰久, 堀勉, 原英之, 山村和也, 三村秀和, 勝山義昭, 山内和人
- Organizer
  応用物理学会SiC及び関連ワイドギャップ半導体研究会第16回講演会予稿集
- Place of Presentation
  名古屋市
- Year and Date
  2007-11-29
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Polishing characteristics of 4H-SiC Si-face and C-face by plasma chemical vaporization machining2006
- Author(s)
  Y. Sano, M. Watanabe, K. Yamamura, K. Yamauchi, T. Ishida, K. Arima, A. Kubota and Y. Mori
- Organizer
  The 6th European Conference on Silicon Carbide and Related Materials (ECSCRM 2006)
- Place of Presentation
  Newcastle upon Tyne, UK
- Year and Date
  2006-09-06
- Data Source
  KAKENHI-PROJECT-18686014
[Presentation] Thin crystal development and applications for hard x-ray free-electron lasers
- Author(s)
  T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, K. Yamauchi
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Year and Date
  2013-08-26 – 2013-08-29
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Nanofocusing and single shot wavefront diagnosis of SACLA
- Author(s)
  K. Yamauchi, M. Yabashi, H. Mimura, H. Yumoto, T. Koyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Katayama, S. Matsuyama, J. Kim, R. Fukui, Y. Sano, W. Yashiro, T. Ohmori, S. Goto, H. Ohashi, A. Momose, and T. Ishikawa
- Organizer
  SPIE Optics+Optelectronics
- Place of Presentation
  Clarion Congress Hotel, Prague, Czech
- Year and Date
  2013-04-17 – 2013-04-18
- Invited
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 硬X線用多層膜集光ミラーの反射率向上に関する研究
- Author(s)
  長平良綾香，金章雨，松山智至，佐野泰久，山内和人
- Organizer
  2013年度精密工学会秋季大会学術講演
- Place of Presentation
  大阪，関西大学
- Year and Date
  2013-09-12 – 2013-09-14
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Development of Basic-Type CMP/P-CVM Fusion Processing System (Type A) and Its Fundamental Characteristics
- Author(s)
  K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, K. Oyama, T. Miyashita, H. Sumizawa, and K. Yamauchi
- Organizer
  2014 International Conference on Planarization/CMP Technology (ICPT2014)
- Place of Presentation
  神戸国際会議場（兵庫県神戸市）
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Innovation in Chemical Mechanical Polishing(CMP): Plasma Fusion CMP for Highly Efficient Processing of Next-Generation Optoelectronics Single Crystals
- Author(s)
  Hideo Aida, Toshiro Doi, Yasuhisa Sano, Syuhei Kurokawa, Seong Woo Kim, Koki Oyama, Tadakazu Miyashita, Michio Uneda, Osamu Ohnishi, Chengwu Wang
- Organizer
  The 8th Manufacturing Institute for Research on Advanced Initiatives
- Place of Presentation
  Taiwan
- Year and Date
  2015-03-25 – 2015-03-26
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Removal Rate of Plasma Chemical Vaporization Machining of Intentionally Damaged Surface by Mechanical Action
- Author(s)
  K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, O. Ohnishi, M. Uneda, Y. Okada, and K. Yamauchi
- Organizer
  15th International Conference on Precision Engineering (ICPE2014)
- Place of Presentation
  ホテル日航金沢（石川県金沢市）
- Year and Date
  2014-07-22 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Fabrication of Thin Si Crystal for X-Ray Beam Splitter
- Author(s)
  T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, and K. Yamauchi
- Organizer
  28th The American Society for Precision Engineering Annual Meeting
- Place of Presentation
  St. Paul, USA
- Year and Date
  2013-10-20 – 2013-10-25
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] チェス盤回折格子を用いたXFELナノビームのシングルショット波面計測
- Author(s)
  西原明彦，福井亮介，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  第27回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  大阪，中ノ島センター
- Year and Date
  2014-01-11 – 2014-01-13
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的plasma fusion CMP装置の設計・試作（第7報）― plasma fusion CMP装置”（B型）による加工メカニズムの検討―
- Author(s)
  塩澤昂祐，平岡佑太，佐野泰久，土肥俊郎，黒河周平，會田英雄，大山幸希，宮下忠一，住澤春男，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学白山キャンパス（東京都文京区）
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] PCVM (Plasma Chemical Vaporization Machining) による2インチSiC基板の薄化―加工速度の向上を目的とした電極の開発
- Author(s)
  岡田悠，田尻光毅，佐野泰久，松山智至，山内和人
- Organizer
  応用物理学会先進パワー半導体分科会　第１回講演会
- Place of Presentation
  ウインクあいち（愛知県名古屋市）
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 先端的難加工基板の高効率精密加工法の研究（第2報）－疑似ラジカル場を想定した加工変質層の形成によるPCVM加工速度の増大－
- Author(s)
  佐野泰久、土肥俊郎、黒河周平、曾田秀雄、大西修、畝田道雄、岡田悠、西川央明、山内和人
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] X線自由電子レーザーを用いた硬X線集光用Pt/C多層膜の特性評価
- Author(s)
  金章雨，長平良綾香，小山貴久，湯本博勝，松山智至，佐野泰久，矢橋牧名，大橋治彦，石川哲也，山内和人
- Organizer
  2013年度精密工学会秋季大会学術講演
- Place of Presentation
  大阪，関西大学
- Year and Date
  2013-09-12 – 2013-09-14
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 二次元位相回折格子を用いたXFELナノビームのシングルショット波面計測
- Author(s)
  西原明彦，福井亮介，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東京大学
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] PCVM (Plasma Chemical Vaporization Machining) による2インチSiC 基板の裏面薄化
- Author(s)
  岡田　悠、西川央明、佐野泰久、山村和也、松山智至、山内和人
- Organizer
  精密工学会 2013年度関西地方定期学術講演会
- Place of Presentation
  大阪工業大学大宮キャンパス（大阪市）
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] Study on a novel CMP/P-CVM fusion processing system(Type B) and its basic characteristics
- Author(s)
  Koki Oyama, Toshiro K. Doi, Yasuhisa Sano, Syuhei Kurokawa, Hideo Aida, Tadakazu Miyashita, Seongwoo Kim, Hideakli Nishizawa, Tsutomu Yamazaki
- Organizer
  2014 International Conference on Planarization/CMP Technology (ICPT2014)
- Place of Presentation
  神戸国際会議場（兵庫県神戸市）
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 大気圧プラズマを用いたSiC及び関連材料の高能率無歪加工
- Author(s)
  佐野泰久
- Organizer
  学振「結晶加工と評価技術」第145委員会第132回研究会
- Place of Presentation
  明治大学駿河台キャンパス（千代田区）
- Invited
- Data Source
  KAKENHI-PROJECT-21246027
[Presentation] 大気圧プラズマを用いたSiC及び関連材料の高能率無歪加工
- Author(s)
  佐野泰久
- Organizer
  日本学術振興会「結晶加工と評価技術」第145委員会第132回研究会
- Place of Presentation
  明治大学
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] FEL用オートコリレータの開発；チャネルカット結晶内壁部の無歪み・平滑化
- Author(s)
  大坂泰斗，平野嵩，矢橋牧名，佐野泰久，登野健介，犬伏雄一，佐藤尭洋，小川奏，松山智至，石川哲也，山内和人
- Organizer
  第27回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  大阪，中ノ島センター
- Year and Date
  2014-01-11 – 2014-01-13
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Damage characteristics of platinum/carbon multilayers under focused x-ray free-electron laser irradiation
- Author(s)
  J. Kim, T. Koyama, H. Yumoto, A. Nagahira, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, K. Yamauchi
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Year and Date
  2013-08-26 – 2013-08-29
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] SiC・GaN基板の新しい加工技術
- Author(s)
  佐野泰久
- Organizer
  名古屋大学グリーンモビリティ連携研究センター第８回次世代自動車公開シンポジウム
- Place of Presentation
  ポートメッセなごや
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of ultra-precise piezoelectric deformable mirrors for x-ray nanofocusing
- Author(s)
  H. Nakamori, S. Matsuyama, S. Imai, T. Goto, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San Diego, USA
- Year and Date
  2013-08-26 – 2013-08-29
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] PCVM (Plasma Chemical Vaporization Machining) による2インチSiC 基板の全面加工
- Author(s)
  岡田悠・西川央明・佐野泰久・山村和也・松山智至・山内和人
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 革新的CMP/P-CVM融合装置の設計・試作（第4報）；A-type装置による炭化ケイ素を加工対象とした平坦化特性の評価
- Author(s)
  塩澤昂祐，佐野泰久，土肥俊郎，黒河周平，會田英雄，大山幸希，宮下忠一，山内和人
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学（鳥取県）
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] Development of one-dimensional Wolter Mirror figured on a single substrate for full-field X-ray microscopy
- Author(s)
  H. Kino, S. Matsuyama, Y. Emi, H. Okada, Y. Sano, and K. Yamauchi
- Organizer
  The 12th symposium on X-ray Imaging Optics
- Place of Presentation
  Osaka, Japan
- Year and Date
  2013-10-18 – 2013-10-20
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Two-dimensional X-ray nanofocusing using piezoelectric deformable mirrors
- Author(s)
  H. Nakamori, S. Matsuyama, T. Goto, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  The 12th symposium on X-ray Imaging Optics
- Place of Presentation
  Osaka, Japan
- Year and Date
  2013-10-18 – 2013-10-20
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 硬X線自由電子レーザーシングルナノ集光用Pt/C多層膜の破壊特性評価
- Author(s)
  金章雨，長平良綾香，松山智至，福井亮介，西原明彦，小山貴久，湯本博勝，佐野泰久，大橋治彦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  第27回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  大阪，中ノ島センター
- Year and Date
  2014-01-11 – 2014-01-13
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 革新的 CMP/P-CVM加工装置の設計・試作(第５報)- B-type装置による各種難加工材料の基本的加工特性とその評価 -
- Author(s)
  大山幸希, 土肥俊郎, 佐野泰久, 黒河周平, 會田英雄, 塩澤昂祐, 宮下忠一, 金聖祐
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学（鳥取県）
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] High-speed Etching of Wide-gap Semiconductors Using Atmospheric Pressure Plasma
- Author(s)
  Y. Sano
- Organizer
  Workshop on Ultra-Precision Processing (WUPP) for Wide-gap Semiconductors 2014
- Place of Presentation
  Hilton Bath City Hotel (英国)
- Year and Date
  2014-08-20 – 2014-08-22
- Invited
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 革新的plasma fusion CMP装置の設計・試作（第6報）― 基本型(A型）の平坦化特性についての詳細な検討－
- Author(s)
  塩澤昂祐，平岡佑太，佐野泰久，土肥俊郎，黒河周平，會田英雄，大山幸希，宮下忠一，住澤春男，山内和人
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学白山キャンパス（東京都文京区）
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-24226005
[Presentation] 先端的難加工基板の高効率精密加工法の研究（第1報）-新しい概念を導入した加工プロセスの提案－
- Author(s)
  土肥俊郎、佐野泰久、黒河周平、曾田秀雄、大西修、畝田道雄
- Organizer
  2013年度精密工学会春季大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24226005

1. YAMAUCHI Kazuto (10174575)

# of Collaborated Projects: 16 results

# of Collaborated Products: 147 results
2. YAMAMURA Kazuya (60240074)

# of Collaborated Projects: 14 results

# of Collaborated Products: 7 results
3. MORI Yuzo (00029125)

# of Collaborated Projects: 13 results

# of Collaborated Products: 4 results
4. MATSUYAMA Satoshi (10423196)

# of Collaborated Projects: 4 results

# of Collaborated Products: 128 results
5. INAGAKI Kouji (50273579)

# of Collaborated Projects: 3 results

# of Collaborated Products: 2 results
6. MIMURA Hidekazu (30362651)

# of Collaborated Projects: 3 results

# of Collaborated Products: 16 results
7. ENDO Katsuyoshi (90152008)

# of Collaborated Projects: 2 results

# of Collaborated Products: 4 results
8. UNEDA Michio (00298324)

# of Collaborated Projects: 2 results

# of Collaborated Products: 14 results
9. TAKAHASHI Yukio (00415217)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. DOI Toshiro (30207675)

# of Collaborated Projects: 1 results

# of Collaborated Products: 40 results
11. KUROKAWA Syuhei (90243899)

# of Collaborated Projects: 1 results

# of Collaborated Products: 39 results
12. OHNISHI Osamu (50315107)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
13. ARIMA KENTA (10324807)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
14. KATAOKA Toshihiko (50029328)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. HIGASHI Yasuo (70208742)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
16. UENO Kenji (40370069)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
17. KUME Tatsuya (40353362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
18. ENAMI Kazuhiro (00370073)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
19. TAMASAKU KENJI (30300883)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
20. OHASHI HARUHIKO (30443550)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
21. YUMOTO HIROKATSU (20423197)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
22. KOYAMA TAKAHISA (20468276)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
23. 山田純平 (10845027)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
24. 藤大雪 (70910678)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
25. AIDA Hideo

# of Collaborated Projects: 1 results

# of Collaborated Products: 36 results
26. SAITO Naoki

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
27. MORI Daichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
28. 西野吉則

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
29. 木村隆志

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Sano Yasuhisa 佐野 泰久

SANO Yasuhisa 佐野 泰久

佐野 恭久 サノ ヤスヒサ

佐野 康久 サノ ヤスヒサ

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2D動的フリーフォームプラズマ生成のためのプラズマプロパゲーション制御Principal Investigator

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Generation of high-density plasma using electrode with narrow slitand its application to groovingPrincipal Investigator

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High efficiency chemical thinning and dicing process for SiC semiconductor substratePrincipal Investigator

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数値制御大気圧プラズマ犠牲酸化による超精密加工Principal Investigator

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High efficiency chemical machining process for wide bandgap semiconductor substratePrincipal Investigator

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Sano Yasuhisa 佐野泰久

SANO Yasuhisa 佐野泰久

佐野恭久サノヤスヒサ

佐野康久サノヤスヒサ