Shimizu Jun 清水淳

… Alternative Names

SHIMIZU Jun 清水淳

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Researcher Number	40292479
Other IDs
External Links
Affiliation (Current)	2025: 茨城大学, 応用理工学野, 教授
Affiliation (based on the past Project Information) *help	2024: 茨城大学, 応用理工学野, 教授 2018 – 2024: 茨城大学, 理工学研究科(工学野), 教授 2012 – 2017: 茨城大学, 工学部, 教授 2007 – 2011: 茨城大学, 工学部, 准教授 2003 – 2006: 茨城大学, 工学部, 講師 1998 – 2002: 茨城大学, 工学部, 助手 2001: IBARAKI UNIV., FACULTY OF ENGINEERING, RESEARCH ASSOCIATE, 工学部, 助教授
Review Section/Research Field	Principal Investigator Design engineering/Machine functional elements/Tribology / Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Basic Section 18040:Machine elements and tribology-related / 機械工作・生産工学 / 設計工学・機械要素・トライボロジー Except Principal Investigator Production engineering/Processing studies / 機械工作・生産工学 / Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator 分子動力学 / 加工変質層 / 引っかき / 陽極酸化 / 掘起し / トライボロジー / 研削 / 振動 / 切削 / 結晶異方性 … More / ナノスクラッチ / 次世代半導体基板 / スクラッチ / 環境 / 接触試験 / 摩擦 / 原子間ポテンシャル / 工具 / バリ / 静水圧 / 計算物理 / 機械工作・生産工学 / MOLECULAR DYNAMICS / WORK AFFECTED LAYER / STRAIN RATE / PLASTIC WAVE / PLASTIC FLOW / GRINDING / ULTRA PRECISION MACHINING / SUPER HIGH-SPEED MACHINING / 表面性状 / 風損 / 砥石 / ひずみ速度 / 塑性波 / 塑性流動 / 超精密加工 / 超高速加工 / 酸化チタン / 光触媒 / ナノパターン / 電極 / セリア / ダイヤモンド / 砥粒 / 半導体材料 / 塑性変形 / 加速度 / スティックスリップ / 固体表面像 / プローブ / 剛性 / カンチレバ / 分子動力学法 / 摩擦力顕微鏡 / 原子間力顕微鏡 … More Except Principal Investigator 加工変質層 / 研削加工 / 切削 / 超磁歪材料 / 機械工作・生産工学 / 半導体ウエハ / 切削・研削加工 / Defect free / ECM / 物理特性 / 機械特性 / 圧電効果 / 焦電効果 / 化学・機械融合加工 / CMG / 電子顕微鏡 / アクチュエータ / 結晶構造 / 研削面 / 無機材料 / 顕微Raman断層イメージング計測 / 加工損傷 / 断層計測 / Ramanイメージング / 超解像 / 非破壊計測 / 断層イメージング / 顕微Raman分光 / リアルタイム / 教師なし学習 / 異常検知 / 摩耗 / 潤滑 / なじみ / 境界潤滑 / 摩擦 / 振動援用切削 / きさげ / 表面テクスチャ / 静水圧 / 定送り制御 / 定圧制御 / CFRP / トライボロジー / トライボロジ― / 硬質皮膜 / 付加加工 / 放電加工 / 材料加工・処理 / シリコンウェハ / 極薄ウェハ / 白色光反射分光計測 / 低コヒーレント干渉 / 近赤外分光 / 表面性状 / 分光イメージング / 測定精度 / 干渉 / 分光 / 干渉計 / 画像計測 / 厚さ計測 / ウェハ薄片化 / 表面粗さ / サファイヤ単結晶 / ハイブリッド送り機構 / サファイア単結晶 / 加工変質法 / ハイブリッド化工法 / ハイブリッド加工法 / サファイ / 切削・研削加 / ハイブリッド加工 / サファイア / 機械強度 / 内部応力 / 自発分極 / 強誘電体 / Residual stress / Chemo-Mechanical Grinding / Power devices / Damaged layer / Fixed abrasive technology / Extremely thin Si wafer / 完全表面 / 固定砥流加工技術 / 残留応力 / 無歪み / パワー・デバイス / 固定砥粒加工技術 / 極薄Siウエハ / Shape based pattern matching / Tool path generation / Force feedback control / Pixel coordinates / Mechanical / control / Vision sensing / Egg cell / Micro Manipulation system / クローン技術 / 画素座標 / 細胞操作 / 自動化 / ビジュアルセンシング制御 / 形状ベースマッチング / ツールパス生成 / 力覚フィードバック / 画素座標系 / 機械座標系 / 制御 / ビジュアルセンシング / 卵細胞 / マイクロマニピュレーション / Meso-micro mechanical machining / Desktop Machine / Micro EDM / Micro cutting / Multifunction / Non-Simaterial / Micro-machining / メゾーマイクロ・メカニカル・マニュファクチャリング / メゾ-マイクロ・メカニカル・マニュファクチャリング / デスクトップ・マシン / マイクロ・EDM / マイクロ・カッティング / マルチ・ファンクション / 非シリコン材料 / マイクロ・マシンニング / Grinding / Fixed abrasives / Alignment control / Ultraprecision positioner / Giant magnetostrictive material / Silicon wafer / 省エネ / 局所クリーンルーム / 固定砥粒 / 姿勢制御 / 微小位置決め装置 / シリコンウエハ / ACTUATOR / IMAGE PROCESSING / MAN-MACHINE-INTERFACE / MANIPULATOR / MICRO FABRICATION / MICRO MANIFACTURING / MICRO MACHINING / ELECTRON MICROSCOPE / マン-マシンインターフェイス / マンーマシンインターフェイス / 画像処理 / マン-マシン-インターフェイス / マニピュレータ / マイクロファブリケーション / マイクロマニファクチャリング / マイクロマシニング / テクスチャ / ダイヤモンド工具 / レーザ加工 / ナノマイクロ加工 / 分級 / 除染・洗浄 / 砥粒加工 / 多重反射 / ツイン振動子 / 定在波 / 音響浮揚 / 分子動力学シミュレーション / インデンテーション実験 / "軟脆"材料 / "硬脆"材料 / “硬脆”材料 / “軟脆”材料 / 研削熱の影響 / 機械化学融合加工 / 単結晶 / 硬脆材料 / 軟脆材料 / 色素増感太陽電池 / 転写 / 透明電極 / 振動 / 表面微細構造 / 平坦度 / 分散補償器 / 極薄ウエハ / 単結晶シリコン / エタロン / キーワード / エッチング / き裂 / 塑性変形 / 引っかき / セメンタイト / 炭素鋼 / 遠隔監視装置 / アクチュエーター / トモグラフィ / 地球環境 / 加速度センサー / H∞制御理論 / フイードバック制御 / 超磁歪効果 / 構造物制振機構 / センサ / 振動解析 Less

Development and Validation of Real-time Anomaly Detection AI Models to Revolutionize Smart Manufacturing
- Principal Investigator
  
  周立波
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Clarification of Grinding Mechanism for Minimizing Damaged Layers of Next Generation Semiconductor Substrates Using Nanomachining and MetrologyPrincipal Investigator
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2023 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
超解像Raman断層計測を用いた結晶損傷発生機構の解明と先端加工技術への応用
- Principal Investigator
  
  小貫哲平
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Overcoming weaknesses and elucidating tribological phenomena by a new trial of molecular dynamics analysis considering experimental resultsPrincipal Investigator
- Principal Investigator
  
  Shimizu Jun
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  Ibaraki University
Examination of replaceability of scraping with texturing by micro-vibration assisted cutting
- Principal Investigator
  
  Takeyuki Yamamoto
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Development of hard film texture coated tool by scanning micro discharge additional processing in gas atmosphere
- Principal Investigator
  
  Takeyuki Yamamoto
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of CFRP processing machine and drilling process with hydrostatic pressure application jig and hybrid feed mechanism
- Principal Investigator
  
  Ojima Hirotaka
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of a novel high-integrity cutting method by use of localized materials hardening due to tribo-compressive hydrostatic stressPrincipal Investigator
- Principal Investigator
  
  Shimizu Jun
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Ibaraki University
Feasibility study on effective use of material's physical properties in machining of functional crystal
- Principal Investigator
  
  Zhou Libo
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of mechanical + chemical hybrid manufacturing technology of sapphire crystal wafer
- Principal Investigator
  
  ZHOU LIBO
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Life elongation by texturing and edge formation of monocrystalline diamond tool using ps pulse laser
- Principal Investigator
  
  Yamamoto Takeyuki
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
On machine wide area thickness measurement technology for wafer thinning process development
- Principal Investigator
  
  Onuki Teppei
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Feasibility study on in-tube decontamination system driven by non-contact acoustic levitation
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Study on the characterization and grinding technology of "soft-brittle" functional materials
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Application of micro-transcription by using nano-cutting mold to development of high-functional dye-sensitized solar cell
- Principal Investigator
  
  YAMAMOTO Takeyuki
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of high-functional photocatalytic film using nano/micro double ploughing texturePrincipal Investigator
- Principal Investigator
  
  SHIMIZU Jun
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Ibaraki University
掘起し現象のMEMS利用に関する研究Principal Investigator
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Ibaraki University
Research on Manufacturing Technology of Etalon : A Core Element of Tunable Dispersion Compensator for Optical Communication, by means of CMG Process
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Siおよび次世代半導体基板材料の無欠陥加工メカニズムと最適加工環境・条件の解明Principal Investigator
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Research on Chemo-Mechanical Grinding Process for Extremely-thin Si Wafer Used in Next Generation Power Devices
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
不錆高強度の鋼炭化物適用のマイクロファブリケーションの萌芽研究
- Principal Investigator
  
  江田弘
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
マイクロ・ナノマシニングにおける加速度と振動の有効性Principal Investigator
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of Automated Cell Manipulation System
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
原子間力顕微鏡の固体表面像分解能と二次元量子摩擦現象の解明に関する研究Principal Investigator
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Ibaraki University
Development of Multifunctional Micro-Machining System and its Core Technologies
- Principal Investigator
  
  LIBO Zhou
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
高・低温環境対応テレメータ式超磁歪加速度センサの企画調査-地球環境モニタリング-
- Principal Investigator
  
  江田弘
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
DEVELOPMENT OF 600m/s SUPER HIGH-SPEED AND NANOMETER ORDER ULTRA PRECISION MACHINE TOOLPrincipal Investigator
- Principal Investigator
  
  SHIMIZU Jun
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
DEVELOPMENT OF ONE-STOP MACHINING SYSTEM AND CORE TECHNOLOGIES FOR LARGE-DIAMETER Si WAFER BEING POTENTIALLY USED FROM YEAR 2003
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for University and Society Collaboration
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY
超磁歪アクチュエータ・センサー適用の構造物制振機構とデバイスの創作
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Ibaraki University
DEVELOPMENT OF MICRO PROCESS AND MICRO FABRICATION SYSTEM AND EXPERIMENT UNDER SCANNING ELECTRON MICROSCOPE
- Principal Investigator
  
  EDA Hiroshi
- Project Period (FY)
  1998 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  IBARAKI UNIVERSITY

[Book] 先端半導体製造プロセスの最新動向と微細化技術2023
- Author(s)
  清水淳、他（総執筆者：58名、技術情報協会）
- Total Pages
  630
- Publisher
  技術情報協会
- ISBN
  9784861049828
- Data Source
  KAKENHI-PROJECT-23K26006
[Book] 数値解析と表面分析によるトライボロジーの解明と制御2018
- Author(s)
  佐々木信也，清水　淳，他（全142名）
- Total Pages
  1192
- Publisher
  テクノシステム
- ISBN
  9784924728806
- Data Source
  KAKENHI-PROJECT-15K05753
[Journal Article] ロータリインフィード研削におけるウエハ温度の解析および評価2024
- Author(s)
  塩見山太郎, 髙橋清樹, 周立波，清水淳，小貫哲平，尾嶌裕隆, 金子和暉
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 68 Pages: 140-144
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K26006
[Journal Article] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測,2024
- Author(s)
  小貫哲平，柴教一郎，黒田隼乃介，茂垣有亮，尾嶌裕隆，清水淳，周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 68 Pages: 202-207
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] 振動援用切削でテクスチャ加工した圧痕状パターン周期配置型金属面の乾式すべり特性2023
- Author(s)
  清水　淳，山本武幸，金子和暉，周　立波，小貫哲平，尾嶌裕隆
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 67 Pages: 218-223
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04235
[Journal Article] Modeling of chemical reaction in molecular dynamics simulation of chemical mechanical polishing of silicon wafer2023
- Author(s)
  金子和暉、橋村紀香、清水淳、周立波、小貫哲平、尾嶌裕隆
- Journal Title
  
  Journal of the Japan Society for Abrasive Technology
  
  Volume: 67 Issue: 8 Pages: 452-457
- DOI
  10.11420/jsat.67.452
- ISSN
  0914-2703, 1880-7534
- Year and Date
  2023-08-01
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23K26006
[Journal Article] Abrasive wear damages observation in engineering ceramics using micro-Raman tomography2023
- Author(s)
  Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Journal Title
  
  JAMDSM
  
  Volume: 17 Issue: 1 Pages: JAMDSM0009-JAMDSM0009
- DOI
  10.1299/jamdsm.2023jamdsm0009
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope2022
- Author(s)
  Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Precision Engineering
  
  Volume: 73 Pages: 51-62
- DOI
  10.1016/j.precisioneng.2021.08.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
[Journal Article] Surface Texturing Technique Using Micro-Vibration-Assisted Cutting2022
- Author(s)
  清水　淳
- Journal Title
  
  JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
  
  Volume: 67 Issue: 5 Pages: 337-342
- DOI
  10.18914/tribologist.67.05_337
- ISSN
  0915-1168, 2189-9967
- Year and Date
  2022-05-15
- Language
  Japanese
- Open Access
- Data Source
  KAKENHI-PROJECT-20K04235
[Journal Article] 砥粒による上すべり－原子除去遷移域の分子動力学シミュレーション2021
- Author(s)
  清水　淳
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 65 Pages: 467-470
- Data Source
  KAKENHI-PROJECT-19K04102
[Journal Article] Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire2021
- Author(s)
  Wu Ke、Touse Daichi、Zhou Libo、Lin Wangpiao、Shimizu Jun、Onuki Teppei、Yuan Julong
- Journal Title
  
  Precision Engineering
  
  Volume: 70 Pages: 110-116
- DOI
  10.1016/j.precisioneng.2021.01.015
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] Molecular Dynamics Simulation of Sliding Processes Considering Contact Test2021
- Author(s)
  清水　淳
- Journal Title
  
  JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
  
  Volume: 66 Issue: 4 Pages: 275-280
- DOI
  10.18914/tribologist.66.04_275
- NAID
  130008024835
- ISSN
  0915-1168, 2189-9967
- Year and Date
  2021-04-15
- Language
  Japanese
- Data Source
  KAKENHI-PROJECT-20K04235
[Journal Article] Analysis of Nanoscratch Mechanism of C-Plane Sapphire with the Aid of Molecular Dynamics Simulation of Hcp Crystal2021
- Author(s)
  Wangpiao Lin, Naohiko Yano, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Nanomaterials
  
  Volume: 11 Issue: 7 Pages: 1739-1739
- DOI
  10.3390/nano11071739
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
[Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Tribology International
  
  Volume: 149 Pages: 105634-105634
- DOI
  10.1016/j.triboint.2019.02.042
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04102, KAKENHI-PROJECT-20K04235
[Journal Article] Study on mechanism of rotary in-feed face grinding2019
- Author(s)
  石橋憲，月井裕太，蛯名雄太郎，周立波，清水淳，小貫哲平，山本武幸, 尾嶌裕隆
- Journal Title
  
  Journal of the Japan Society for Abrasive Technology
  
  Volume: 63 Issue: 1 Pages: 31-35
- DOI
  10.11420/jsat.63.31
- NAID
  130007670937
- ISSN
  0914-2703, 1880-7534
- Year and Date
  2019-01-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Molecular Dynamics Simulation of Atomic-Scale Material Removal Processes by an Abrasive Grain2019
- Author(s)
  清水　淳
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 85 Issue: 4 Pages: 314-317
- DOI
  10.2493/jjspe.85.314
- NAID
  130007624097
- ISSN
  0912-0289, 1882-675X
- Year and Date
  2019-04-05
- Language
  Japanese
- Open Access
- Data Source
  KAKENHI-PROJECT-19K04102
[Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2019
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Tribology International
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06000
[Journal Article] Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process2018
- Author(s)
  Wu Ke、Zhou Libo、Onuki Teppei、Shimizu Jun、Yamamoto Takeyuki、Yuan Julong
- Journal Title
  
  Precision Engineering
  
  Volume: 52 Pages: 451-457
- DOI
  10.1016/j.precisioneng.2018.02.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Investigation of the Effect of Grain Size Variation on Ground Wafer Surface by Grinding Experiment/Simulation2018
- Author(s)
  蛯名雄太郎, 前崎智博, 周立波, 清水淳, 小貫哲平, 尾嶌裕隆, 乾正知
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 84 Issue: 7 Pages: 640-645
- DOI
  10.2493/jjspe.84.640
- NAID
  130007393958
- ISSN
  0912-0289, 1882-675X
- Year and Date
  2018-07-05
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K06075, KAKENHI-PROJECT-15H02213
[Journal Article] Evaluation of Subsurface Damage in Silicon Wafer Based on Deflection Analysis2017
- Author(s)
  髙橋清樹、周立波、清水淳
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 83 Issue: 5 Pages: 426-432
- DOI
  10.2493/jjspe.83.426
- NAID
  130005645845
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] シリコンウェハ変形による加工変質層残留応力の評価　－有限要素法を用いた数値シミュレーションによるウェハ変形メカニズム解明－2017
- Author(s)
  髙橋清樹，周立波，清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: 5
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Study on the potential of chemo-mechanical-grinding (CMG) process of sapphire wafer2017
- Author(s)
  Ke Wu, Libo Zhou, Jun Shimizu, Teppei Onuki, Takeyuki Yamamoto, Hirotaka Ojima and Julong Yuan
- Journal Title
  
  The International Journal of Advanced Manufacturing Technology
  
  Volume: 90 Issue: 5-8 Pages: 1-8
- DOI
  10.1007/s00170-016-9836-1
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213, KAKENHI-PROJECT-15K13840
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Precision Engineering
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki
- Journal Title
  
  Precision Engineering
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Zhou Libo、Ebina Yutaro、Wu Ke、Shimizu Jun、Onuki Teppei、Ojima Hirotaka
- Journal Title
  
  Precision Engineering
  
  Volume: 50 Pages: 27-31
- DOI
  10.1016/j.precisioneng.2017.04.010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2016
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Advanced Materials Research
  
  Volume: 1136 Pages: 156-161
- DOI
  10.4028/www.scientific.net/amr.1136.156
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-25420043
[Journal Article] Effect of Compressive Hydrostatic Stress on Torsional Deformation of Metal2016
- Author(s)
  植崎圭人，清水淳，周立波
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 82 Issue: 5 Pages: 448-453
- DOI
  10.2493/jjspe.82.448
- NAID
  130005150318
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K05753
[Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Journal Title
  
  トライボロジスト
  
  Volume: 61 Pages: 845-856
- NAID
  130005250169
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K05753
[Journal Article] Research on Development of On-Machine 3D Measuring System of Grinding Wheel Surface Topography by Stereo Images2016
- Author(s)
  尾嶌裕隆，長山拓矢，周立波，清水淳，小貫哲平
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 82 Issue: 2 Pages: 186-191
- DOI
  10.2493/jjspe.82.186
- NAID
  130005124397
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
[Journal Article] Study on grinding of LiTaO3 wafer using effective cooling andelectrolyte solution2016
- Author(s)
  Wei Hang, Libo Zhou, Kehua Zhang, Jun Shimizu, Julong Yuan
- Journal Title
  
  Precision Engineering
  
  Volume: 4 Pages: 62-69
- DOI
  10.1016/j.precisioneng.2015.10.001
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Journal Title
  
  トライボロジスト
  
  Volume: 61 Pages: 845-856
- NAID
  130005250169
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K06000
[Journal Article] Study on grinding of LiTaO3 wafer using effective cooling and electrolyte solution2016
- Author(s)
  Wei Hang, Libo Zhou, Kehua Zhang, Jun Shimizu, Julong Yuan
- Journal Title
  
  Precision Engineering
  
  Volume: 44/2 Pages: 62-69
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Development of Microtextured Titanium Dioxide Surface by using Microcutting Techniques2016
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Ceramics Transactions
  
  Volume: 257 Pages: 35-42
- DOI
  10.1002/9781119234463.ch4
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-16K06000
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 581-585
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 156-161
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Research on Chemo-Mechanical-Grinding (CMG) of Si wafer2015
- Author(s)
  田代芳章，周　立波，清水　淳，篠田知顕，三上祐樹
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 81 Issue: 10 Pages: 957-962
- DOI
  10.2493/jjspe.81.957
- NAID
  130005100542
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectrum analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 806 Pages: 581-585
- DOI
  10.4028/www.scientific.net/amr.1136.581
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 311-316
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] 茨城大学　ナノ・マイクロ表面機能研究室2015
- Author(s)
  清水　淳
- Journal Title
  
  トライボロジスト
  
  Volume: 60 Pages: 373-374
- NAID
  130006929950
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] 切削加工によるテクスチャリング2015
- Author(s)
  清水　淳
- Journal Title
  
  トライボロジスト
  
  Volume: 60 Pages: 177-183
- NAID
  130005628073
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Process study on large-size silicon wafer grinding by using a small-diameter wheel2015
- Author(s)
  Yutaro EBINA, Tomoya YOSHIMATSU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA
- Journal Title
  
  JAMDSM
  
  Volume: 9 Issue: 5 Pages: JAMDSM0073-JAMDSM0073
- DOI
  10.1299/jamdsm.2015jamdsm0073
- NAID
  130005130435
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 581-585
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 156-161
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] 茨城大学　ナノ・マイクロ表面機能研究室2015
- Author(s)
  清水　淳
- Journal Title
  
  トライボロジスト
  
  Volume: 60 Pages: 373-374
- NAID
  130006929950
- Data Source
  KAKENHI-PROJECT-15K05753
[Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 311-316
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Development of non-contact classifying systems by use of acoustic levitation2014
- Author(s)
  Tomohiro Inada, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Takuya Ito
- Journal Title
  
  Advanced Materials Research
  
  Volume: （未定）
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656094
[Journal Article] 近赤外分光器を用いた反射分光方式の薄シリコンウェハ厚さ計2014
- Author(s)
  小貫哲平、小野竜典、尾嶌裕隆、清水淳、周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 58 Pages: 515-519
- NAID
  130004835723
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2014
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Materials Science Forum
  
  Volume: 783-786 Pages: 1488-1493
- DOI
  10.4028/www.scientific.net/msf.783-786.1488
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy2014
- Author(s)
  Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 1017 Pages: 681-685
- DOI
  10.4028/www.scientific.net/amr.1017.681
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Modeling of process mechanisms in pulsed laser micro machining on lithium niobate substrates2014
- Author(s)
  Teppei Onuki, Ippei Murayama, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 8 Pages: 896-902
- NAID
  130007674050
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] 日本縦断研究室巡り「茨城大学　Nano-Engineering Laboratory (nLab)」2014
- Author(s)
  周　立波，清水　淳，小貫哲平，尾嶌裕隆，山本武幸
- Journal Title
  
  レーザ協会誌
  
  Volume: 39 Pages: 33-35
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Proceedings of 15th International conference on Precision Engineering (ICPE2014)
  
  Volume: 1 Pages: 836-837
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Development of metal cutting process accompanied by a localized compressive hydrostatic stress field formation: Examination by molecular dynamics simulation2014
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou
- Journal Title
  
  Precision Engineering
  
  Volume: 38 Issue: 2 Pages: 371-378
- DOI
  10.1016/j.precisioneng.2013.12.002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] 大口径Si ウエハ表面形状の計測評価技術に関する研究-第2報:ウェーブレット変換を用いたノイズ除去手法の適用-2013
- Author(s)
  尾嶌裕隆,周立波,清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: Vol.79, 7 Pages: 677-681
- NAID
  130003385012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on thermal influence of grinding process on LiTaO32013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
- Journal Title
  
  Advanced Materials Research
  
  Volume: 797 Pages: 252-257
- DOI
  10.4028/www.scientific.net/amr.797.252
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] A robust procedure of data analysis for micro/nano indentation2013
- Author(s)
  W. Hang, L. Zhou, J. Shimizu, J. Yuan
- Journal Title
  
  Precision Engineering
  
  Volume: Vol.37 Issue: 2 Pages: 408-414
- DOI
  10.1016/j.precisioneng.2012.11.003
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] A robust procedure of data anal ysis for micro/nano indentation2013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu and Ju long Yuan
- Journal Title
  
  Precision E ngineering
  
  Volume: Vol.37, 2 Pages: 408-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on Surface Profile Evaluation for Large Si Wafer Measurement2013
- Author(s)
  尾嶌裕隆，周立波，清水淳
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 79 Issue: 7 Pages: 677-681
- DOI
  10.2493/jjspe.79.677
- NAID
  130003385012
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062, KAKENHI-PROJECT-24760099
[Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013
- Author(s)
  Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 797 Pages: 549-554
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-Scale Stick-Slip Phenomenon2013
- Author(s)
  J. Shimizu, L. Zhou, T. Yamamoto
- Journal Title
  
  Tribology Online
  
  Volume: 8 Issue: 1 Pages: 38-43
- DOI
  10.2474/trol.8.38
- NAID
  130003368294
- ISSN
  1881-218X, 1881-2198
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Development of Finishing System using Acoustically Levitated Abrasive2013
- Author(s)
  Tomohiro Inada, Libo Zhou, Hirotaka Ojima and Jun Shimizu
- Journal Title
  
  Int. J. of Automation Technology
  
  Volume: Vol.7, 6 Pages: 671-677
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656094
[Journal Article] Study on the Mechanical Properties of Lithium Tantalate and the Influence on Its Machinability2013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu, Julong Yuan, Takeyuki Yamamoto
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 7 Pages: 644-653
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Mold Pattern Fabrication by Nanoscratching2013
- Author(s)
  Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Han Huang
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 7 Pages: 686-693
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Study on the mechanical properties of lithium tantalate and the influence on its machinability2013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu, Julong Yuan and Takeyuki Yamamoto
- Journal Title
  
  Int. J. of Automation Technology
  
  Volume: Vol.7, 6 Pages: 644-653
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] A robust procedure of data analysis for micro/nano indentation2013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
- Journal Title
  
  Precision Engineering
  
  Volume: 37 Pages: 408-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013
- Author(s)
  Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.797 Pages: 549-554
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Development of Finishing System using Acoustically Levitated Abrasive2013
- Author(s)
  Tomohiro Inada, Libo Zhou, Hirotaka Ojima and Jun Shimizu
- Journal Title
  
  Int. J. of Automation Technology
  
  Volume: 6 Pages: 671-677
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656094
[Journal Article] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-Scale Stick-Slip Phenomenon2013
- Author(s)
  Jun Shimizu, Libo Zhou and Takeyuki Yamamoto
- Journal Title
  
  Tribology Online
  
  Volume: 8 Pages: 38-43
- NAID
  130003368294
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on thermal influence of grinding process on LiTaO_32013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol. 797 Pages: 252-257
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Fabrication of Surface Microtexture by Vibration Assisted Cutting2013
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Hirotaka Ojima, Teppei Onuki, Shun-ichi Nagaoka
- Journal Title
  
  Advanced Materials Research
  
  Volume: 797 Pages: 638-641
- DOI
  10.4028/www.scientific.net/amr.797.638
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Study on the mechanical properties of lithium tantalate and the influence on its machinability2013
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu, Julong Yuan and Takeyuki Yamamoto
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: Vol. 7, No. 6 Pages: 644-653
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement2012
- Author(s)
  Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
- Journal Title
  
  Key Engineering Materials
  
  Volume: 615 Pages: 332-336
- DOI
  10.4028/www.scientific.net/kem.516.332
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on micro/nano-indentation of typical soft-brittle materials2012
- Author(s)
  Wei Hang, Libo Zhou, Jun Shimizu, Takeyuki Yamamoto and Julong Yuan
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vol. 523-524
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] A study on the diamond grinding of ultra-thin silicon wafers2012
- Author(s)
  L.Zhou, Y.Tian, H.Huang, H.Sato, J.Shimizu
- Journal Title
  
  Part B : Journal of Engineering Manufacture
  
  Volume: 226 Issue: 1 Pages: 66-76
- DOI
  10.1177/0954405411414768
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film2012
- Author(s)
  J. Shimizu, G. Kobayashi, N. Hasegawa, T. Yamamoto, H. Ojima, T. Onuki, L. Zhou
- Journal Title
  
  Materials Science Forum
  
  Volume: Vols.706-709 Pages: 2646-2651
- DOI
  10.4028/www.scientific.net/msf.706-709.2646
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Study on micro/nano-indentation of typical soft-brittle materials2012
- Author(s)
  W. Hang, L. Zhou, J. Shimizu, T. Yamamoto, J. Yuan
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.523-524 Pages: 7-12
- DOI
  10.4028/www.scientific.net/kem.523-524.7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Research on digital filters for Si wafer surface profile measurement2012
- Author(s)
  Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.565 Pages: 656-661
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on grinding processing of sapphire wafer2012
- Author(s)
  Yutaro Ebina, Wei Hang, Libo Zhou, Jun Shimizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
- Journal Title
  
  Advanced Materials Research
  
  Volume: 565 Pages: 22-27
- DOI
  10.4028/www.scientific.net/amr.565.22
- NAID
  130005031327
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Molecular Dynamics Simulation of Metal Cutting with Local Hydrostatic Pressure Field Formation2012
- Author(s)
  K. Uezaki, J. Shimizu, L. Zhou, T. Onuki, H. Ojima
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.523-524 Pages: 67-172
- DOI
  10.4028/www.scientific.net/kem.523-524.167
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] トライボロジスト2012
- Author(s)
  清水　淳
- Journal Title
  
  アブレシブ摩耗現象のシミュレーション
  
  Volume: 57巻 Pages: 339-344
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] アブレシブ摩耗現象のシミュレーション2012
- Author(s)
  清水淳
- Journal Title
  
  トライボロジスト
  
  Volume: 57巻 Pages: 339-344
- NAID
  10030614027
- URL
  http://www.tribology.jp/publication/journal/journal2012.html
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] A study on the diamond grinding of ultra-thin silicon wafers2012
- Author(s)
  Libo Zhou, Yebing Tian, Han Huang, Hisashi Sato and Jun Shimizu
- Journal Title
  
  Proc IMechE, Part B : J.of Engineering Manufacture
  
  Volume: Vol.226, 1 Pages: 66-75
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2012
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55巻 Pages: 662-667
- URL
  https://www.jstage.jst.go.jp/article/jsat/55/11/55_662/_pdf
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] 大口径Siウエハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011
- Author(s)
  周立波,小野真志,尾嶌裕隆,清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: Vol.77, 12 Pages: 1165-1169
- NAID
  130002121500
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] 大口径Siウェハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011
- Author(s)
  周立波, 小野真志, 尾嶌裕隆, 清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: 77 Pages: 1165-1169
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウェハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平,尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] 近赤外分光計測を用いた薄片シリコンウェハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- NAID
  10030194515
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平,小野龍典,尾嶌隆裕,清水淳,周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: Vol.55, 12 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process2011
- Author(s)
  Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 325 Pages: 672-677
- DOI
  10.4028/www.scientific.net/amr.325.672
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Spectroscopic measurements of silicon wafer thickness for backgrinding process2011
- Author(s)
  Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Advanced Material Research
  
  Volume: Vol.325 Pages: 672-677
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers2011
- Author(s)
  Y.B.Tian, L.Zhou, Z.W.Zhong, H.Sato, J.Shimizu
- Journal Title
  
  Semiconductor Science and Technology
  
  Volume: 26 Issue: 10 Pages: 1-7
- DOI
  10.1088/0268-1242/26/10/105002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Nanogrinding of multi-layered thin film amorphous Si solar panels2011
- Author(s)
  Taro Sumitomo, Han Huang, Libo Zhou, Jun Shimizu
- Journal Title
  
  International Journal of Machine Tools and Manufacture
  
  Volume: 51 Pages: 797-805
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers2011
- Author(s)
  Y.B.Tian, L.Zhou, Z.W. Zhong, H.Sato, J.Shimizu
- Journal Title
  
  Semiconductor Science and Technology
  
  Volume: Vol.26, 10 Pages: 1-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] 大口径Siウエハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011
- Author(s)
  周立波, 小野真志, 尾嶌裕隆, 清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: 77 Pages: 1165-1169
- NAID
  130002121500
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process2011
- Author(s)
  Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya
- Journal Title
  
  Advanced Material Research
  
  Volume: Vol.325 Pages: 678-683
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Nanogrinding of multi-layered thin film amorphous Si solar panels2011
- Author(s)
  Taro Sumitomo, Han Huang, Libo Zhou, Jun Shimizu
- Journal Title
  
  International Journal of Machine Tools and Manufacture
  
  Volume: 51 Issue: 10-11 Pages: 797-805
- DOI
  10.1016/j.ijmachtools.2011.07.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process2011
- Author(s)
  Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya
- Journal Title
  
  Advanced Materials Research
  
  Volume: 325 Pages: 678-683
- DOI
  10.4028/www.scientific.net/amr.325.678
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
- Journal Title
  
  砥粒加工学会
  
  Volume: Vol.55, 11 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] 大口径Siウエハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011
- Author(s)
  周立波, 小野真志, 尾嶌裕隆, 清水淳
- Journal Title
  
  精密工学会誌
  
  Volume: 77 Pages: 1165-1169
- NAID
  130002121500
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Mold Fabricated by Nanoscratching for Nanoimprint Lithography2010
- Author(s)
  W. Ohsone, J. Shimizu, L. Zhou, H. Ojima, T. Onuki, T. Yamamoto, H. Huang
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 843-848
- DOI
  10.4028/www.scientific.net/amr.126-128.843
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters2010
- Author(s)
  Jun Shimizu, Libo Zhou, Takeyuki Yamamoto
- Journal Title
  
  Journal of Computational and Theoretical Nanoscience
  
  Volume: Vol.7 Pages: 2165-2170
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] ポテンシャルパラメータ制御によるシリコンウエハ化学作用援用研削の分子動力学シミュレーション2010
- Author(s)
  清水淳, 周立波, 山本武幸
- Journal Title
  
  砥粒加工学会誌 Vol.45, No.1
  
  Pages: 41-44
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響第1報:モデルと解析2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 54巻
  
  Pages: 45-49
- NAID
  10026236898
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer2010
- Author(s)
  Hidenori Takahashi, Yebing Tian, Yuki Mikami, Jun Shimizu, Libo Zhou, Yoshiaki Tashiro, Hisao Iwase, Sumio Kamiya
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.447-448 Pages: 106-110
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響 (第2報 : 実験的考察)2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 Vol.45, No.2
  
  Pages: 92-96
- NAID
  10026236943
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters2010
- Author(s)
  Jun Shimizu, Libo Zhou, Takeyuki Yamamoto
- Journal Title
  
  Journal of Computational and Theoretical Nanoscience 7/10
  
  Pages: 1-6
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Rubbing Phenomena in Ultra-Precision Abrasive Machining2010
- Author(s)
  J. Shimizu, L. Zhou, T. Yamamoto, H. Huang
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vol.443 Pages: 417-422
- DOI
  10.4028/www.scientific.net/kem.443.417
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響(第1報:モデルと解析)2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 45/1
  
  Pages: 45-49
- NAID
  10026236898
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] ポテンシャルパラメータ制御によるシリコンウエハ化学作用援用研削の分子動力学シミュレーション2010
- Author(s)
  清水淳, 周立波, 山本武幸
- Journal Title
  
  砥粒加工学会誌 54巻
  
  Pages: 41-44
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Enhancement of Photocatalytic Reaction of Titanium, Dioxide Film by Surface Texturing2010
- Author(s)
  Jun Shimizu, Libo Zhou, Kaoru Takamori, Hirotaka Ojima, Takeyuki Yamamoto, Han Huang
- Journal Title
  
  Materials Science Forum
  
  Volume: Vols.654-656 Pages: 1784-1787
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters2010
- Author(s)
  Jun Shimizu, Libo Zhou, Takeyuki Yamamoto
- Journal Title
  
  Journal of Computational and Theoretical Nanoscience
  
  Volume: Vol.7 Pages: 2165-2170
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Design of digital filters for Si wafer surface profile measurement-Noise reduction by lifting scheme wavelet transform-2010
- Author(s)
  Kazutaka Nonomura, Masashi Ono, Libo Zhou, Jun Shimizu, Hirotaka Ojima
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 544-548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Design of digital digital filters Si wafer surface prlfile measurement-Noise reduction by lifting scheme wavelet transform2010
- Author(s)
  Kazutaka Nonomura, Masashi Ono, Libo Zhou, Jun Shimizu, Hirotaka Ojima
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 544-548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Effect of Wheel Additive On Chemo-Mechanical Grinding(CMG)of Single Crystal Si Wafer2010
- Author(s)
  Hidenori Takahashi, Yebing Tian, Yuki Mikami, Jun Shimizu, Libo Zhou, Yoshiaki Tashiro, Hisao Iwase, Sumio Kamiya
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.447-448 Pages: 106-110
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Enhancement of Photocatalytic Reaction of Titanium Dioxide Film by Surface Texturing2010
- Author(s)
  J. Shimizu, L. Zhou, K. Takamori, H. Ojima, T. Yamamoto, H. Huang
- Journal Title
  
  Materials Science Forum
  
  Volume: Vols.654-656 Pages: 1784-1787
- DOI
  10.4028/www.scientific.net/msf.654-656.1784
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響(第2報:実験的考察)2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 45/2
  
  Pages: 92-96
- NAID
  10026236943
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010
- Author(s)
  Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 701-706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement-Noise Reduction by Wavelet Transform-2010
- Author(s)
  Masashi Ono, Kazutaka Nonomura, Libo Zhou, Jun Shimizu
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.447-448 Pages: 544-548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] ポテンシャルパラメータ制御によるシリコンウエハ化学作用援用研削の分子動力学シミュレーション2010
- Author(s)
  清水淳, 周立波, 山本武幸
- Journal Title
  
  砥粒加工学会誌 45/1
  
  Pages: 41-44
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010
- Author(s)
  Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 701-706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters2010
- Author(s)
  J. Shimizu, L. Zhou, T. Yamamoto
- Journal Title
  
  J.of Computational and Theoretical Nanoscience Vol.7, No.10
  
  Pages: 1-6
- NAID
  10026236879
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響第2報:実験的考察2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 54巻
  
  Pages: 92-96
- NAID
  10026236943
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measuremen-Noise Reduction by Wavelet Transform2010
- Author(s)
  Masashi Ono, Kazutaka Nonomura, Libo Zhou, Jun Shimizu
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.447-448 Pages: 544-548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Siウエハインフィード研削における切削軌跡密度と機械剛性の影響 (第1報 : モデルと解析)2010
- Author(s)
  周立波, 光田孝仁, 清水淳, 田業氷, 山本武幸
- Journal Title
  
  砥粒加工学会誌 Vol.45, No.1
  
  Pages: 45-49
- NAID
  10026236898
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Enhancement of Photocatalytic Reaction of Tifanium Dioxide Film by Surface Texturing2010
- Author(s)
  Jun Shimizu, Libo Zhou, Kaoru Takamori, Hirotaka Ojima, Takeyuki Yamamoto, Han Huang
- Journal Title
  
  Materials Science Forum
  
  Volume: Vols.654-656 Pages: 1784-1787
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Study on Path Control Scheme by Laplacian Potential Field and Configuration Space for Vision Guided Micro Manipulation System2009
- Author(s)
  Hirotaka Ojima, Yoshitaka Yanai, Libo Zhou, Jun Shimizu
- Journal Title
  
  Advanced Materials Research Vol.76～78
  
  Pages: 725-730
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Study on Improvement of Material Removal Rate in Chemo-mechanical Grinding (CMG) of Si Wafer2009
- Author(s)
  J. Sasaki, T. Tsuruga, B. Soltani., H, T. Mitsuta, Y.B. Tian, J. Shimizu, L. Zhou, H. Eda, Y. Tashiro, H. Iwase, S. Kamiya
- Journal Title
  
  Key Engineering Materials Vols.389-390
  
  Pages: 13-17
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 砥粒上すべり現象の分子動力学シミュレーション2009
- Author(s)
  清水淳, 周立波, 山本武幸
- Journal Title
  
  砥粒加工学会誌 53巻
  
  Pages: 751-755
- NAID
  10026236816
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] A Novel Single Step Thinning Process for Extremely Thin Si Wafers2009
- Author(s)
  Y.B.Tian, L.Zhou, J.Shimizu, H.Sato R.K.Kang
- Journal Title
  
  Advanced Materials Research 76-78
  
  Pages: 434-439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process2009
- Author(s)
  Y.B. Tian, L. Zhou, J. Shimizu, T. Tashiro, R.K. Kang
- Journal Title
  
  J.of App.Surface Science Vol.255, No.7
  
  Pages: 4205-4211
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Improvement of Material Removal Rate in Chemo-mechanical Grinding (CMG) of Si Wafer2009
- Author(s)
  J. Sasaki, T. Tsumga, B. SoltaniH, T. Mitsuta, Y.B. Tian, J. Shimizu, L. Zhou, H. Eda, Y. Tashiro, H. Iwase and S. Kamiya
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 13-17
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Chemo-mechanical Grinding (CMG) by Controlling Interatomic Potential Parameters to Imitate Chemical Reaction2009
- Author(s)
  清水淳, 周立波, 山本武幸
- Journal Title
  
  Advanced Materials Research Vol.76～78
  
  Pages: 82-87
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Fundamental Study on Influence of Surface Topography on Photocatalytic Reaction2009
- Author(s)
  K. Azusawa, Y. Ishii, J. Shimizu, L. Zhou, H. Eda
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 417-423
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Siウエーハのレーザダイシングに関する研究=ピコ秒パルスレーザによる液中加工の検討=2009
- Author(s)
  山本武幸, 周立波, 清水淳, 溝口高史
- Journal Title
  
  光アライアンス 20(7)
  
  Pages: 20-23
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] ステレオ視法によるSEM画像の3次元形状計測および復元2009
- Author(s)
  尾嶌裕隆, 村上幸博, 大塚春樹, 笹本侑弥, 周立波, 清水淳, 江田弘
- Journal Title
  
  精密工学会誌 75巻
  
  Pages: 773-777
- NAID
  130000421687
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Effects of sodium carbonate and ceria concentration on chemo-mechanical grinding of single crystal Si wafer2009
- Author(s)
  Hidekazu Takahashi, Yebing Tian, Junichi Sasaki, Jun Shimizu, Libo Zhou, Yoshiaki Tashiro, Hisao Iwase, Sumio Kamiya
- Journal Title
  
  Advanced Materials Research Vol.76～78
  
  Pages: 428-433
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Elimination of surface scratch/texture on the surface of single crystal Sisubstrate in chemo-mechanical grinding (CMG) process2009
- Author(s)
  Y. B. Tian, L. Zhou, J. Shimizu, Y. Tashiro, R. K. Kang
- Journal Title
  
  Journal of Moiled Surface Science 255/7
  
  Pages: 4205-4211
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on a Micro Lathe with Visual Feedback Control2009
- Author(s)
  Hirotaka Ojima, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Abrasive Technology 2
  
  Pages: 60-69
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Fundamental Research on Generation of Nanostructure by Means of Local Anodic Oxidation2009
- Author(s)
  Yumetaka Suehisa, Toshiaki Aoki, Jun Shimizu, Libo Zhou and Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 424-429
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Elimination of Surface Scratch/texture on the Surface of Single Crystal Si Substrate in Chemo-mechanical Grinding (CMG) Process2009
- Author(s)
  Y. B. Tian, L. Zhou, J. Shimizu, Y. Tashiro, R. K. Kang
- Journal Title
  
  Applied Surface Science 255
  
  Pages: 4205-4211
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Research on Chemo-Mechanical-Grinding of Large Size Quartz Glass Substrate2009
- Author(s)
  L. ZHOU, T. SHIINA, Z.J. QIU, J. SHIMIZU, T. YAMAMOTO, Y. TASHIRO
- Journal Title
  
  Precision Engineering Vol.33
  
  Pages: 499-504
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Research on Chemo-mechanical Grinding of Large Size Quartz Glass Substrate2009
- Author(s)
  Libo Zhou, Takeshi Shiina, Zhongjun Qiu, Jun Shimizu, Takeyuki Yamamoto, Toshiaki Tashiro
- Journal Title
  
  Precision Engineering Vol.33
  
  Pages: 499-504
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Modeling and Analysis of Effects of Machine Tool Stiffness and Cutting Path Density on Infeed Surface Grinding of Silicon Wafer2009
- Author(s)
  L.Zhou, T.Mitsuta, J.Shimizu, T.Tajima
- Journal Title
  
  Advanced Materials Research 76-78
  
  Pages: 445-450
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Research on Chemo-Mechanical-Grinding of Large Size Quartz Glass Substrate2009
- Author(s)
  Libo ZHOU, Takeshi SHIINA, Zhongjun QIU, Jun SHIMIZU, Takeyuki YAMAMOTO, Toshiaki TASHIRO
- Journal Title
  
  Precision Engineering 33
  
  Pages: 499-504
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fundamental Study on Influence of Surface Topography on Photocatalytic Reaction2009
- Author(s)
  Keisuke Azusawa, Yuta Ishii, Jun Shimizu, Libo Zhou and Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 389-390
  
  Pages: 417-423
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fundamental Research on Generation of Nanostructure by Means of Local Anodic Oxidation2009
- Author(s)
  Y. Suehisa, T. Aoki, J. Shimizu, L. Zhou, H. Eda
- Journal Title
  
  Key Engineering Materials 389
  
  Pages: 424-429
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Modeling and analysis of effects of machine tool stiffness and cutting path density on infeed surface grinding of silicon wafer2009
- Author(s)
  Libo Zhou, Takahito Mitsuta, Jun Shimizu, Takuji Tajima
- Journal Title
  
  Advanced Materials Research Vol.76～78
  
  Pages: 445-450
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Molecular Dynamics Simulation of Chemo-Mechanical Grinding(CMG)by Controlling Interatomic Potential Parameters to Imitate Chemical Reaction2009
- Author(s)
  J.Shimizu, L.Zhou, T.Yamamoto
- Journal Title
  
  Advanced Materials Research 76-78
  
  Pages: 82-86
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Effects of Sodium Carbonate and Ceria Concentration on Chemo-Mechanical Grinding of Single Crystal Si Wafer2009
- Author(s)
  H.Takahashi, Y.B.Tian, J.Sasaki J.Shimizu, L.Zhou, Y.Tashiro, H.Iwase, S.Kamiya
- Journal Title
  
  Advanced Materials Research 76-78
  
  Pages: 428-433
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] A novel single step thinning process for extremely thin Si wafers2009
- Author(s)
  Yebing Tian, Junichi Sasaki, Libo Zhou, Jun Shimizu, Hisashi Sato, R.K.Kang
- Journal Title
  
  Advanced Materials Research Vol.76～78
  
  Pages: 434-439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史, 岡部秀光, 江田弘
- Journal Title
  
  砥粒加工学会誌 Vol.52, No.10
  
  Pages: 601-606
- NAID
  10021923685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史, 岡部秀光, 江田弘
- Journal Title
  
  砥粒加工学会誌 52
  
  Pages: 603-608
- NAID
  10021923685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer2008
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou, Hidemitsu Okabe
- Journal Title
  
  Tribology Online Vol.3, No.5
  
  Pages: 248-253
- NAID
  130000067618
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史, 岡部秀光, 江田弘
- Journal Title
  
  砥粒加工学会誌 52/10
  
  Pages: 601-606
- NAID
  10021923685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer2008
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou, Hidemitsu Okabe
- Journal Title
  
  Tribology Online 3/5
  
  Pages: 248-253
- NAID
  130000067618
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer2008
- Author(s)
  J. Shimizu, H. Eda, L. Zhou, H. Okabe
- Journal Title
  
  Tribology Online+ 3
  
  Pages: 248-253
- NAID
  130000067618
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Molecular Dynamics Simulation of Effect of Grinding Wheel Stiffness on Nanogrinding Process2008
- Author(s)
  J. Shimizu, L. Zhou, H. Eda
- Journal Title
  
  International Journal of Abrasive Technology 1
  
  Pages: 316-326
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20656028
[Journal Article] Molecular Dynamics Simulation of Effect of Grinding Wheel Stiffness on Nannarinding Process2008
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Abrasive Technology 1/3・4
  
  Pages: 316-326
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Effect of Grinding Wheel Stiffness on Nanogrinding Process2008
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int'l J.of Abrasive Technology Vol.1, No.3/4
  
  Pages: 316-326
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Path Control Scheme for Vision Guided Micro Manipulation System2007
- Author(s)
  Hirotaka OJIMA, Hiroyuki ASANO, Genki SHIMIZU, Libo ZHOU, Jun SHIMIZU and Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 605-608
- NAID
  130007891031
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Nanomachining Process of Si Wafer using an Atomic Force Microscope2007
- Author(s)
  Jun SHIMIZU, Takashi TSUMURA, Yumetaka SUEHISA, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 153-156
- NAID
  130007890917
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Research on Chemo-Mechanical-Grinding (CMG) of large size silica glass substrate2007
- Author(s)
  Takeshi SHIINA, Libo ZHOU, Zhongjun QIU, Takeyuki YAMAMOTO, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 65-68
- NAID
  130007890884
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-2007
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science ＆ Technology (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process2007
- Author(s)
  T. Mitsuta, B. Soltani, T. Tsuruga, J. Sasaki, L. Zhou, J. Shimizu and H. Eda
- Journal Title
  
  Proceedings of ISAAT2007
  
  Pages: 75-81
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fabrication and evaluation for extremely thin Si wafer2007
- Author(s)
  Libo Zhou, Bahman Soltani Hosseini, Tatsuya Tsuruga, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase and Yoshiaki Tashiro
- Journal Title
  
  Int. J. Abrasive Technology 1/1
  
  Pages: 94-105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer2007
- Author(s)
  Hidemitsu Okabe, Takashi Tsumura, Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 379-384
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Simulation and Experimental Study on Nanoscracthig of Silicon Wafer2007
- Author(s)
  Jun Shimizu, Hidemotsu Okabe, Takashi Tsumura, Yumetaka Suehisa, Libo Zhou and Hiroshi EDA
- Journal Title
  
  Proceedings of Int'l Conference on Tribology in Manufacturing Process (ICTMP) 2007
  
  Pages: 307-310
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] 3D Data Acquisition and Configuration by Means of Binocular Stereopsis2007
- Author(s)
  H. Otsuka, Y. Myrakami, Z. Qiu, H. Ojima, L. Zhou, J. Shimizu and H. Eda
- Journal Title
  
  Proceedings of the 35th International MATADOR Conference
  
  Pages: 393-396
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of AFM/FFM Surface Observation: Influence of Probe Tip Shape2007
- Author(s)
  J.Shimizu, L.Zhou and H.Eda
- Journal Title
  
  Proceedings of the 35th International MATADOR Conference
  
  Pages: 271-274
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Structure Transformation of Si Wafer in Grinding Process2007
- Author(s)
  Libo Zhou, Makoto Yamaguchi, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 373-378
- NAID
  40015624684
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Simulation of Nano-Grinding-Influence of Tool Stiffness-2007
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science & Technology 1/9
  
  Pages: 69-75
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fundamental Study on Cleavage-Cutting of Silicon Wafer by Ultra-Short Pulsed Laser2007
- Author(s)
  Atsushi HAGIYA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Libo ZHOU, Jun SHIMIZU and Hiroshi EDA
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 879-882
- NAID
  130007890953
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-2007
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal for Manufacturing Science and Technology 9・1
  
  Pages: 69-76
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-2007
- Author(s)
  J. Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int.J.Manufacturing Science & Technology Vol.9, No.1
  
  Pages: 69-75
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Fabrication and evaluation for extremely thin Si wafer2007
- Author(s)
  L. Zhou, B. S. Hosseini, T. Tsuruga, J. Shimizu, H. Eda, S. Kamiya, H. Iwase, Y. Tashiro
- Journal Title
  
  Int.J.Abrasive Technology Vol.1, No.1
  
  Pages: 94-105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on Thinning Process of Large Size Si wafer2007
- Author(s)
  T. Tsuruga, B. Soltani, J. Sasaki, T. Mitsuta, J. Shimizu, L. Zhou and H. Eda
- Journal Title
  
  Proceedings of ISAAT2007
  
  Pages: 67-73
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Development of High Performance Wheels for Chemo-Mechanical-Grinding2007
- Author(s)
  Yoshiaki Tashiro, Masaaki Kenmochi, Bahman Soitani, Tatsuya Tsuruga, Libo Zhou, Jun Shimizu and Hiroshi Eda
- Journal Title
  
  Proceeding of 4th LEM21
  
  Pages: 69-72
- NAID
  130007890888
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360056
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 1lth International Conference on Precision Engineering (ICPE)
  
  Pages: 309-303
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 材料加工層-分析と評価法-2006
- Author(s)
  高橋裕和, 江田弘, 清水淳
- Journal Title
  
  機械の研究 58・1
  
  Pages: 17-24
- NAID
  40007083390
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Path Control Study for Vision Guided Micro Manipulation System2006
- Author(s)
  Hiroyuki Asano, Zhougjun Qiu, Libo Zhou, Hirotaka Ojima, Jun Shimizu, Tomohiko Ishikawa, Hiroshi Eda
- Journal Title
  
  Proceedings of the 11th International Conference on Production Engineering (11th ICPE), Tokyo
  
  Pages: 321-322
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc.of 3rd Asia Int.Conf.on Tribology (ASIATRIB 2006)
  
  Pages: 525-526
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proceedings of the 3rd Asia International Conference on Tribology (ASIATRIB 2006), Kanazawa
  
  Pages: 525-526
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Simulation of Vibration-Assisted Cutting : Influences of Vibration Parameters2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 9・2
  
  Pages: 120-129
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc. of 3rd Asia Int. Conf. on Tribology (ASIATRIB 2006)
  
  Pages: 525-526
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] SiウエハのChemo-Mechanical-Grinding (CMG)に関する研究,-第2報:固定砥粒によるφ300mmSiウエハの完全表面創成-2006
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  砥粒加工学会誌 50・3
  
  Pages: 130-133
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering(ICPE)
  
  Pages: 309-313
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Elementary Process of Coating by a High-Temperature, High-Speed Droplet2006
- Author(s)
  Jun Shimizu, Etsuji Ohmura, Yoshifumi Kobayashi, Shoichi Kiyoshima, Hiroshi Eda
- Journal Title
  
  JSME International Journal C 49・2
  
  Pages: 505-511
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] 顕微鏡観察視野外を含む接触圧と接触点維持制御機能を有する半導体デバイス評価用プロービングシステムの開発2006
- Author(s)
  石川友彦, 江田弘, 周立波, 清水淳, 尾嶌裕隆, 山本佳男, 川上辰男
- Journal Title
  
  砥粒加工学会誌 50・6
  
  Pages: 318-323
- NAID
  10019172718
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 55・1
  
  Pages: 313-316
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Vibration-Assisted Micro and Nanocutting : Influences of Vibration, Acceleratin and Velocity2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Nanomanufacturing 1・1
  
  Pages: 105-116
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Experimental and Simulation Research Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer2006
- Author(s)
  H.Okabe, T.Tsumura, J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 379-384
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis of Anisotropic Friction at an Atomic-Scale2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Proc. of 3rd Asia Int. Conf. on Tribology(ASIATRIB 2006)
  
  Pages: 525-526
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Vibration-Assisted Cutting : Influences of Vibration, Acceleration and Velocity2006
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  International Journal of Nanomanufacturing 1・1
  
  Pages: 105-116
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Visual Feedback Control of a Micro Lathe2006
- Author(s)
  Hirotaka Ojima, Katsuhiro Saito, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of the 11th International Conference on Production Engineering (11th ICPE), Tokyo
  
  Pages: 133-137
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer2006
- Author(s)
  H.Okabe, T.Tsumura, J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 379-384
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Path control scheme for vision guided micro manipulation system2006
- Author(s)
  Hiroyuki Asano, Tomohiko Ishikawa, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Zhongjun Qiu, Hiroshi Eda
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering(ICPE)
  
  Pages: 321-322
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on Structure Transformation of Si Wafer in Grinding Process2006
- Author(s)
  Libo Zhou, Makoto Yamaguchi, Jun Shimizul, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 373-378
- NAID
  40015624684
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on Structure Transformation of Si Wafer in Grinding Process2006
- Author(s)
  Libo Zhou, Makoto Yamaguchi, Jun Shimizu1, Hiroshi Eda
- Journal Title
  
  Key Engineering Materials 329
  
  Pages: 373-378
- NAID
  40015624684
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Defect-free Favrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 55・1
  
  Pages: 313-316
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Visual Feedback Control of a Micro Lathe2006
- Author(s)
  Hirotaka Ojima, Katsuhiro Saito, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of 11th International conference on Precision engineering (ICPE)
  
  Pages: 133-137
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Study on subsurface damage generated in ground Si wafer2006
- Author(s)
  Soltani Hossini Bahman, Libo Zhou, Tsuruga Tatsuya, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of 11th International Conference on Precision Engineering (ICPE)
  
  Pages: 309-313
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  L.Zhou, H.Eda, J.Shimizu, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Annals of the CIRP 1/55
  
  Pages: 313-316
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 顕微鏡観察視野外を含む接触圧と接触点維持制御機能を有する半導体デバイス評価用プロービングシステムの開発2006
- Author(s)
  石川友彦, 江田弘, 周立波, 清水淳, 尾嶌裕隆, 山本佳男, 川上辰男
- Journal Title
  
  砥粒加工学会誌 51・6
  
  Pages: 318-323
- NAID
  10019172718
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Study on Subsurface Damage Generated in Ground Si Wafer2006
- Author(s)
  Bahman Soltani Hosseini, Libo Zhou, Tatsuya Tsuruga, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase
- Journal Title
  
  Proceedings of the 11th International Conference on Production Engineering (11th ICPE), Tokyo
  
  Pages: 309-313
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Defect-free Fabrication for Single Crystal Silicon Substrate by Chemo-Mechanical Grinding2006
- Author(s)
  Libo Zhou, Hiroshi Eda, Jun Shimizu, Sumio Kamiya, Hisao Iwase, Shun-ichiro Kimura
- Journal Title
  
  CIRP Annals 55・1
  
  Pages: 313-316
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Analysis on Vibration Assisted Cutting - Effect of Vibration Parameter -2005
- Author(s)
  Jun Shimizu, Hidekazu Tanaka, Libc Zhou, Hirotaka Ojima, Hiroshi Eda
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 861-864
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析 (液滴の偏平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- NAID
  110006264528
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第2報:固定砥粒によるφ300mmSiウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Effects of Tool Stiffness and Infeed Scheme on Planarization (Integrated model for simulation of planarization process)2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 490-503
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int. Tribology Conference 349
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Analysis on Elementary Process of Coating by High-Temperature and High-Speed Droplet (Flattening Process and Atomic Behavior of Droplet)2005
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  J.JSME Trans.C (in Japanese) 71(701)
  
  Pages: 298-303
- NAID
  110004728867
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] A Novel Fixed Abrasive Process : Chemo-Mechanical Grinding Technology2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-451
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation,2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int.Tribology Conference
  
  Pages: 349-349
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process -Surface and Subsurface Analysis of Wafer Produced by CMG-2005
- Author(s)
  L.Zhou, Y.Kumagai, J.Shimizu, H.Eda, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Proceedings of International Conference on Leading Edge Manufacturing in 21st Century, (LEM21), Nagoya 2
  
  Pages: 889-892
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の偏平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- NAID
  110006264528
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Research on Chemo-Mechanical Grinding of Si Wafer, 2^<nd> Report : Generation of Defect free surface on Φ300mm Si Wafer2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda, Shun'ichiro Kimura
- Journal Title
  
  Journal of the Japan Society of Precision Engineering 4/71
  
  Pages: 466-470
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of a Visual Guided Micro Lathe2005
- Author(s)
  K.Saito, H.Ojima, L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of International Conference on Leading Edge Manufacturing in 21st Century, (LEM21), Nagoya 3
  
  Pages: 1229-1234
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の扁平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Effects of Tool Stiffness and Infeed Scheme on Planarization, (Integrated model for simulation of planarization process)2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 490-503
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析(液滴の扁平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development and Evaluation of CMG Wheels made by Electrophoretic Deposition2005
- Author(s)
  Libo Zhou, Isao Toita, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Journal of the Japan Society of Abrasive Technology 3/55
  
  Pages: 130-133
- NAID
  10017285120
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第2報 : 固定低位によるφ300mm Siウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] A Novel Fixed Abrasive Process : Chemo-Mechanical Grinding Technology2005
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-454
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Siウエハの Chemo-Mechanical-Grinding(CMG)に関する研究-第2報 : 固定砥粒によるφ300mm Siウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- NAID
  10015505910
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] A Novel Fixed Abrasive Process: Chemo-Mechanical Grinding Technology2005
- Author(s)
  Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-451
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Effects of Tool Stiffness and Infeed Scheme on Planarisa-tion (Integrated Model for Simulation of Planarisation Process)2005
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  International Journal of Manufacturing Technology and Management 7・5/6
  
  Pages: 441-454
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第2報:固定砥粒によるφ300mmSiウエハの完全表面創成-2005
- Author(s)
  周立波, 清水淳, 江田弘, 木村俊一郎
- Journal Title
  
  精密工学会誌 71・4
  
  Pages: 466-470
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Patterned Si Wafer (Improvements in accuracy of simulation model)2005
- Author(s)
  H.Okubo, L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of International Conference on Leading Edge Manufacturing in 21st Century, (LEM21), Nagoya 2
  
  Pages: 883-888
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Molecular Dynamics Analysis on Vibration Assisted Cutting -Effect of Vibration Parameter-2005
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Ojima, H.Eda
- Journal Title
  
  Proceedings of International Conference on Leading Edge Manufacturing in 21st Century, (LEM21), Nagoya 2
  
  Pages: 861-864
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析 (液滴の偏平過程と原子挙動)2005
- Author(s)
  清水淳, 大村悦二, 小林圭史, 清島祥一, 江田弘
- Journal Title
  
  日本機械学会論文集(C編) 71・701
  
  Pages: 298-303
- NAID
  110006264528
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation on Planarization Process of Patterned Si Wafer (Improvements in accuracy of simulation model)2005
- Author(s)
  Hitomi Okubo, Libo Zhou, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 883-890
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of Int. Tribology Conference
  
  Pages: 349-349
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] 電気泳動法によるCMG砥石の開発とその性能評価2005
- Author(s)
  周立波, 戸井田勲, 清水淳, 江田弘
- Journal Title
  
  加工学会誌 50・3
  
  Pages: 130-133
- NAID
  10017285120
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] パターンウエハの平坦化シミュレーション(モデルの理論構築)2005
- Author(s)
  周立波, 大久保瞳, 清水淳, 江田弘
- Journal Title
  
  日本機械学会論文集C編 71・702
- NAID
  110006264589
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Molecular Dynamics Simulation of Friction Process in AFM/FFM Surface Observation2005
- Author(s)
  J.Shimizu, L.Zhou, H.Eda, H.Ojima
- Journal Title
  
  Synopsis of International Trabology Conference, (ITC Kobe 2005), Kobe
  
  Pages: 349-349
- Data Source
  KAKENHI-PROJECT-17760099
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process (Surface and Sub-surface Analysis of Si Wafer Produced by CMG)2005
- Author(s)
  L.Zhou, Y.Kumagai, J.Shimizu, H.Eda, S.Kamiya, H.Iwase, S.Kimura
- Journal Title
  
  Proceedings of International Conference Leading Edge Manufacturing in 21 Century 2
  
  Pages: 889-892
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Patterned Si Wafer (Establishment of an analytical model)2005
- Author(s)
  Libo Zhou, Hitomi Ohkubo, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  J.JSME Trans.C (in Japanese) 72(701)
  
  Pages: 725-730
- NAID
  110006264589
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of the 4th euspen International conference (Scotland/UK)
  
  Pages: 113-114
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qiu, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (Liege, Belgium)
  
  Pages: 387-394
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Japanese J.of Tribology 49・3
  
  Pages: 223-232
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Japanese Journal of Tribology Vol.49(3)
  
  Pages: 223-232
- NAID
  10013113666
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diameter Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- NAID
  110002512005
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.257-258
  
  Pages: 21-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effect of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proc.of the 4th euspen Int.Conf., Glasgow, UK
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diamond Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qiu, L.Zhou, K.Nishida, J.Shimizu.H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 21-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Micro Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qiu, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 4th euspen International conference, Glasgow, UK
  
  Pages: 165-166
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004 (Bursa/Turkey)
  
  Pages: 393-396
- NAID
  110002512007
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization of Patterned Si Wafer, (Establishment of an Analysis Model)2004
- Author(s)
  Libo Zhou, Hitomi Ohkubo, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Transaction of the Japan Society of Mechanical Engineers, C Edition 702/71
  
  Pages: 725-730
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qiu, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 1st Int'l Conference on Positioning Technology
  
  Pages: 457-461
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  Libo Zhou, Zhongjun Qiu, Keisuke Nishida, Tomohiko Ishikawa, Jun Shimizu, Hiroshi Eda
- Journal Title
  
  Proceedings of 4^<th> International Workshop on Microfactories (Shanhai/China)
  
  Pages: 152-159
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diamond Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 101-106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (REWAS'2004), Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] マイクロ・ナノトライボロジーにおける分子動力学シミュレーションの適用2004
- Author(s)
  江田弘, 清水淳
- Journal Title
  
  トライボロジスト 49・6
  
  Pages: 466-472
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- NAID
  110002512007
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology(REWAS'2004) Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004) Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of the 4th euspen International conference, Glasgow, UK
  
  Pages: 113-114
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004). Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- NAID
  110002512007
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (REWAS'2004), Spain
  
  Pages: 1999-2008
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] マイクロ・ナノトライボロジーにおける分子動力学シミュレーションの適用2004
- Author(s)
  江田弘, 清水淳
- Journal Title
  
  トライボロジスト 49・6
  
  Pages: 466-472
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology (Spain)
  
  Pages: 1999-2008
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Recycling Type Filtration Machine by Means of Solid-Liquid Automation Separation System for Machining Fluids2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the Global Symposium on Recycling, Waste Treatment and Clean Technology(REWAS'2004). Spain
  
  Pages: 1999-2008
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] [Introduction of Laboratory] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2004
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, H.Ojima, T.Yamamoto
- Journal Title
  
  J.JSAT (in Japanese) Vol.70(9)
  
  Pages: 1165-1166
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Axisymmetric Aspherical Form Generation for Large Diameter Optical Components2004
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.257-258
  
  Pages: 101-106
- NAID
  110002512005
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 1st Int'l Conference on Positioning Technology (Shizuoka/Japan)
  
  Pages: 457-461
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004), Osaka (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Automated Cell Manipulation System by Use of Visual Information2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation on Planrization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of ISAAT 2004
  
  Pages: 393-396
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Journal of Japanese Society of Tribologists (in Japanese) Vol.49(6)
  
  Pages: 466-472
- NAID
  10013113666
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of the 3rd Int. Conf.and Exhibition on Design and Production of Dies and Molds 7th Int.Symposium on Advances in Abrasive Technology, (ISAAT 2004), Turkey
  
  Pages: 393-396
- NAID
  110002512007
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Application of Molecular Dynamics Simulation in Micro/Nano Tribology2004
- Author(s)
  H.Eda, J.Shimizu
- Journal Title
  
  Japanese J.of Tribology 49・3
  
  Pages: 223-232
- NAID
  10013113666
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004), Liege, Belgium
  
  Pages: 387-394
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, Z.Qio, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Micro Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, K.Nishida, Z.Qio, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of the 4th euspen International conference (Scotland,/UK)
  
  Pages: 165-166
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Manipulation System for Bio-applications2004
- Author(s)
  L.Zhou, Z.Qio J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 165-166
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004), Osaka (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf.,(ITSC'2004),Osaka
  
  Pages: 7-12
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Planarization Process of Device Wafer, Proc.of the 3rd Int.Conf. and Exhibition on Design and Production of Dies and Molds2004
- Author(s)
  L.Zhou, H.Ohkubo, J.Shimizu, H.Eda
- Journal Title
  
  7th Int.Symposium on Advances in Abrasive Technology, (ISAAT 2004), Turkey
  
  Pages: 393-396
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining,2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Key Engineering Materials 257-258
  
  Pages: 21-26
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of Cell Manipulation System under Microscope2004
- Author(s)
  Z.Qio, L.Zhou, K.Nishida, J.Shimizu, H.Eda, T.Ishikawa
- Journal Title
  
  Proceedings of 1st Int'l Conference on Precision Technology
  
  Pages: 457-461
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Simulation on Effects of Ultra High-Frequency Vibration for Nanomachining2004
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proceedings of 4th euspen International conference
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories
  
  Pages: 152-159
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2004
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, H.Ojima, T.Yamamoto
- Journal Title
  
  [Introduction of Laboratory] Database of leading-edge processing technology (JSPE) (in Japanese)
  
  Pages: 30-31
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL INFORMATION2004
- Author(s)
  L.Zhou, Z.Qiu, K.Nishida, T.Ishikawa, J.Shimizu, H.Eda
- Journal Title
  
  Proceedings of 4th International Workshop on Microfactories, China
  
  Pages: 152-159
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Finish Grinding Conditions for Optimum Physical Properties and Metallurgic Structure in High-Temperature Rolling of Stainless Steels2004
- Author(s)
  H.Eda, Y.Tomita, J.Shimizu
- Journal Title
  
  Proc.of the 2nd Int.Conf.on Thermomechanical Processing of Steels (TMP 2004), Liege, Belgium
  
  Pages: 387-394
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004) (Osaka) 042.pdf(CD-ROM)
  
  Pages: 7-12
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004
- Author(s)
  J.Shimizu, E.Ohmura, Y.Kobayashi, S.Kiyoshima, H.Eda
- Journal Title
  
  Proc.Int.Thermal Spray Conf., (ITSC'2004), Osaka (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism, -Behaviors of Zero Wear-Wear transition Region -2003
- Author(s)
  Jun Shimizu, Hiroshi Eda, Libo Zhou
- Journal Title
  
  Tribologist (in Japanese) Vol.48(9)
  
  Pages: 741-751
- NAID
  10011734712
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 金属粒子適用マイクロファブリケーションの基礎研究,第1報:鋼の微少引っかきに及ぼす第2相合金の影響2003
- Author(s)
  谷山久法, 江田弘, 清水淳, 周立波, 中沢由加里, 佐藤潤一
- Journal Title
  
  砥粒加工学会誌 47,5
  
  Pages: 263-268
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism -Behaviors of Zero-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48(5)
  
  Pages: 437-452
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism - Behaviors of Zero Wear-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48・5
  
  Pages: 437-452
- NAID
  10011734712
- Data Source
  KAKENHI-PROJECT-15760074
[Journal Article] Molecular Dynamics Simulation of Material Removal Mechanism beyond Propagation Speed of Plastic Wave2003
- Author(s)
  J.Shimizu, H.Tanaka, L.Zhou, H.Eda
- Journal Title
  
  Proc.of Int.Conf.on Leading Edge Manufacturing in 21st Century, (LEM21), Niigata
  
  Pages: 309-315
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Material Removal Mechanism beyond Propagation Speed of Plastic Wave2003
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of International Conference on LEM21 (Niigata)
  
  Pages: 309-315
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Biological-Micro-Manipulation System in Scanning Electron Microscope2003
- Author(s)
  H.Eda, T.Ishikawa, Y.Tomita, Y.Yamamoto, L.Zhou, T.Kawakami, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int.Symposium on Micromechatronics and Human Science (MHS2003), Nagoya
  
  Pages: 211-214
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Three Dimensional Kinematical Analyses for Surface Grinding of Large Scale Substrate2003
- Author(s)
  Libo ZHOU, Kazuhiro SHINOHARA, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Precision Engineering 27,2
  
  Pages: 175-184
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Material Removal Mechanism Beyond Plastic Wave Propagation Rate2003
- Author(s)
  Libo Zhou, Jun Shimizu, Akihito Muroya, Hiroshi Eda
- Journal Title
  
  Precision Engineering 27,2
  
  Pages: 109-116
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] φ300シリコンウエハ超精密研削加工シミュレーション2003
- Author(s)
  佐川克雄, 江田弘, 周立波, 清水淳, 白石昌武
- Journal Title
  
  砥粒加工学会誌 47,8
  
  Pages: 440-445
- NAID
  10011753390
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Three Dimensional Kinematical Analyses for Surface Grinding of Large Scale Substrate2003
- Author(s)
  Libo ZHOU, Kazuhiro SHINOHARA, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  Precision Engineering Vol.27(2)
  
  Pages: 175-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Manipulation of the Universal Rotational Mechanism for Biological Application2003
- Author(s)
  T.Ishikawa, H.Eda, Y.Yamamoto, K.Kawakami, L.Zhou, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int'l Symposium on Microelectronics and Human Science, Nagoya, Oct.(IEEE Robotics & Automation 2003)
  
  Pages: 215-220
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Basic research on microfabrication applied to metal particles, -1^<st> report : Effect of second phase in steels on microscratching -2003
- Author(s)
  Hisanori Taniyama, Hiroshi Eda, Jun Shimizu, Libo Zhou, Yukari Nakazawa, Jun'ichi Sato
- Journal Title
  
  J.JSAT (in Japanese) Vol.47(5)
  
  Pages: 263-268
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] すべり摩擦・摩耗機構の分子動力学解析-ゼロ摩耗-摩耗遷移領域の挙動-2003
- Author(s)
  清水淳, 江田弘, 周立波
- Journal Title
  
  トライボロジスト 48,9
  
  Pages: 741-751
- NAID
  10011734712
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 巨大重量主軸台の原子レベル超磁歪位置決め/アライメントシステムの開発,-φ300Siウエハ超加工機械の中核技術-2003
- Author(s)
  江田弘, 中野博民, 近藤良, 周立波, 森輝夫, 清水淳
- Journal Title
  
  精密工学会誌 69,1
  
  Pages: 100-104
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Biological-Micro-Manipulation System in Scanning Electron Microscope2003
- Author(s)
  H.Eda, T.Ishikawa, Y.Tomita, Y.Yamamoto, L.Zhou, T.Kawakami, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int'l Symposium on Microelectronics and Human Science,(IEEE Robotics & Automation 2003)
  
  Pages: 211-214
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process2003
- Author(s)
  L.Zhou, S.Kawai, S.Kimura, J.Shimizu, H.EDA
- Journal Title
  
  Proc.of International Conference on LEM21 (Niigata)
  
  Pages: 316-321
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism - Behaviors of Zero Wear-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48・5
  
  Pages: 437-452
- NAID
  10011734712
- Data Source
  KAKENHI-PROJECT-15656033
[Journal Article] Simulation of ultra precision grinding of φ300 Si wafer2003
- Author(s)
  Katsuo Sagawa, Hiroshi Eda, Libo Zhou, Jun Shimizu, Masatake Shiraishi
- Journal Title
  
  J.JSAT (in Japanese) Vol.47(8)
  
  Pages: 440-445
- NAID
  10011753390
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Manipulation of the Universal Rotational Mechanism for Biological Application2003
- Author(s)
  T.Ishikawa, H.Eda, Y.Yamamoto, T.Kawakami, L.Zhou, J.Shimizu
- Journal Title
  
  Proc.of 2003 Int.Symposium on Micromechatronics and Human Science (MHS2003), Nagoya
  
  Pages: 215-220
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Experimental Investigation of Micro Scratching on Two Phases Alloy Steel -Plastic Flow Mechanism of the Ferrite and Cementite Phase -2003
- Author(s)
  H.Taniyama, H.Eda, L.Zhou, J.Shimizu, J.Sato
- Journal Title
  
  Key Engineering Materials Vol.238-239
  
  Pages: 15-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Chemo-Mechanical Grinding (CMG) Process2003
- Author(s)
  L.Zhou, S.Kawai, S.Kimura, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of Int.Conf.on Leading Edge Manufacturing in 21st Century, (LEM21), Niigata
  
  Pages: 316-321
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Multifunctional Micro-Machining System and its Applications2003
- Author(s)
  L.Zhou, Y.Yaguchi, T.Fuji, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials Vol.238-239
  
  Pages: 3-8
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Material Removal Mechanism Beyond Plastic Wave Propagation Rate2003
- Author(s)
  Libo Zhou, Jun Shimizu, Akihito Muroya, Hiroshi Eda
- Journal Title
  
  Precision Engineering Vol.27(2)
  
  Pages: 109-116
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Multifunctional Micro-Machining System and Applications2003
- Author(s)
  L.Zhou, Y.Yaguchi, T.Fujii, J.Shimizu, H.Eda
- Journal Title
  
  Key Engineering Materials 238-239
  
  Pages: 15-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Experimental Investigation of Micro Scratching on Two Phases Alloy Steel - Plastic Flow Mechanism of Ferrite and Cementite Phase -2003
- Author(s)
  H.Taniyama, H.Eda, L.Zhou, J.Shimizu, J.Sato
- Journal Title
  
  Key Engineering Materials 238-239
  
  Pages: 3-8
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Development of Atomic Level GMM Positioning/Alignment System for Driving a Gigantic Weight Spindle, -Core Technology for Advanced φ300mm Si Wafer Ultraprecision Machine Tool -2003
- Author(s)
  Hiroshi EDA, Hirotami NAKANO, Ryou KONDO, Libo ZHOU, Teruo MORI, Jun SHIMIZU
- Journal Title
  
  J.JSPE (in Japanese) Vol.69(1)
  
  Pages: 100-104
- NAID
  110001373477
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Analysis of Sliding Friction and Wear Mechanism - Behaviors of Zero-Wear Transition Regions -2003
- Author(s)
  J.Shimizu, H.Eda, L.Zhou
- Journal Title
  
  Japanese J.of Tribology 48,5
  
  Pages: 437-452
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (IMCC 2002), China (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 3D Kinematic Analysis of Large Scale Substrate Surface Grinding.2002
- Author(s)
  Libo ZHOU, Jun SHIMIZU, Kazuhiro SHINOHARA, Hiroshi EDA
- Journal Title
  
  Proceedings of ASPE 2002 Annual Meeting
  
  Pages: 140-143
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  Libo ZHOU, Jun SHIMIZU, Hiroshi EDA
- Journal Title
  
  J.Materials Processing Technology Vol.129(1-3)
  
  Pages: 34-40
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Research on Chemo-Mechanical-Grinding (CMG) of Si wafer, -1^<st> Report : Development of CMG Wheel -2002
- Author(s)
  Libo ZHOU, Shinji KAWAI, Masayuki HONDA, Jun SHIMIZU, Hiroshi EDA, Kazuaki YAKITA
- Journal Title
  
  J.JSPE (in Japanese) Vol.68(12)
  
  Pages: 1559-1563
- NAID
  110001373342
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of the Contact Process in AFM Surface Observations2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Tribotest Journal 9,2
  
  Pages: 101-115
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Crystal Dependence in Micro Scratching of Carbon Steel - Groove Formation on Pearlite -2002
- Author(s)
  H.Taniyama, H.Eda, J.Sato, J.Shimizu, L.Zhou
- Journal Title
  
  Proc.Int.Conf.ASIATRIB2002, Korea
  
  Pages: 197-198
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Journal of Materials Processing Technology 129,1-3
  
  Pages: 34-40
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] [Introduction of Laboratory] Micro Machining and Fabrication Laboratory, Department of Systems Engineering, Faculty of Engineering, Ibaraki University2002
- Author(s)
  H.Eda, L.Zhou, J.Shimizu, T.Yamamoto
- Journal Title
  
  J.JSAT (in Japanese) Vol.46(5)
  
  Pages: 230-231
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM/FFM Surface Observation2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.Int.Conf.ASIATRIB2002, Korea
  
  Pages: 61-62
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  Jun SHIMIZU, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  J.Materials Processing Technology Vol.129(1-3)
  
  Pages: 19-24
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (IMCC 2002), China (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Crystal Dependence in Micro Scratching of Carbon Steel -Groove Formation of Cementite and Ferrite Phases -2002
- Author(s)
  H.Taniyama, H.Eda, J.Sato, J.Shimizu, L.Zhou
- Journal Title
  
  Proc.of 2^<nd> Asia Int.Conf.on Tribology Korea
  
  Pages: 197-198
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 3D Kinematical Analysis of Large Scale Substrate Surface Grinding2002
- Author(s)
  L.Zhou, J.Shimizu, K.Shinohara, H.Eda
- Journal Title
  
  Proc.of American Society for Precision Engineering 2002 Annual Meeting, USA
  
  Pages: 140-143
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  Jun SHIMIZU, Libo ZHOU, Hiroshi EDA
- Journal Title
  
  Journal of Materials Processing Technology 129,1-3
  
  Pages: 19-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Simulation and Experimental Analysis of Super High-Speed Grinding of Ductile Material2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] State-of-the-art Technologies and Kinematical Analysis for One-Stop Finishing of φ300mm Si Wafer2002
- Author(s)
  L.Zhou, J.Shimizu, H.Eda
- Journal Title
  
  Proc.of 10th Int.Manufacturing Conf.in China (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] 熱・電・磁場附加による工具機能の改善に関する研究2002
- Author(s)
  周立波, 福田勇夫, 清水淳, 江田弘, 加藤明彦, 谷山久法
- Journal Title
  
  砥粒加工学会誌 46,10
  
  Pages: 507-510
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM/FFM Surface Observation2002
- Author(s)
  J.Shimizu, L.Zhou, H.Eda
- Journal Title
  
  Proc.of 2^<nd> Asia Int.Conf.on Tribology, Korea
  
  Pages: 61-62
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Cutting tool performance enhanced with thermal/electrical/magnetic processing2002
- Author(s)
  Libo ZHOU, Isao FUKUDA, Jun SHIMIZU, Hiroshi EDA, Akihiko KATO, Hisanori TANIYAMA
- Journal Title
  
  J.JSAT (in Japanese) Vol.46(10)
  
  Pages: 506-509
- NAID
  10010081510
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究-第1報:CMG砥石の開発-2002
- Author(s)
  周立波, 河合真二, 本田将之, 清水淳, 江田弘, 焼田和明
- Journal Title
  
  精密工学会誌 68,12
  
  Pages: 1559-1563
- NAID
  110001373342
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Contact Process in AFM Surface Observations2002
- Author(s)
  J.Shimizu, L.ZHOU, H.EDA
- Journal Title
  
  Tribotest Journal Vol.9(2)
  
  Pages: 101-115
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究 -第2報:固定砥粒によるφ300mm Siウエハの完全表面創成-
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 (掲載待ち)
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Development of non-contact classifying systems by use of acoustic levitation
- Author(s)
  Tomohiro Inada, Libo Zhou, Jun Shimizu, Hirotaka Ojima and Takuya Ito
- Journal Title
  
  Advanced Materials Research
  
  Volume: (掲載決定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656094
[Journal Article] SiウエハのChemo-Mechanical-Grinding(CMG)に関する研究 -第2報:固定砥粒によるφ300mm Siウエハの完全表面創成-
- Author(s)
  周立波, 清水淳, 江田弘, 木村伸一郎
- Journal Title
  
  精密工学会誌 (掲載待ち)
- NAID
  10015505910
- Data Source
  KAKENHI-PROJECT-14350065
[Journal Article] Molecular Dynamics Simulation of Nano Grinding -Influence of Tool Stiffness-
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int. J. Manufacturing Science ＆ Technology, (印刷中)
- Data Source
  KAKENHI-PROJECT-16360061
[Journal Article] Molecular Dynamics Simulation of Nano Grinding-Influence of Tool Stiffness-
- Author(s)
  Jun Shimizu, Libo Zhou, Hiroshi Eda
- Journal Title
  
  Int.J.Manufacturing Science ＆ Technology, Key Engineering Materials (to be published)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360061
[Presentation] マグネシウムシリサイドウエハ表層の顕微Raman3D 断層イメージング2024
- Author(s)
  渡邉和馬，小貫哲平，尾嶌裕隆，清水淳，周立波，鵜殿治彦
- Organizer
  応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Observation of potential failures in ceramic cutting tools using microscopic Raman imaging2024
- Author(s)
  Teppei Onuki, Ryohei Tazawa, Shuo Liu, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  Optical Technology and Measurement for Industrial Applications (OPTM)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] C面サファイア基板のナノスクラッチ特性（第3報）－シングルとマルチ・スクラッチにおける現象の相違－2024
- Author(s)
  清水淳，三枝剣悟，林旺票，金子和暉，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] 3D Micro-Raman Tomographic Measurement on Subsurface of Magnesium Silicide Wafer2024
- Author(s)
  Kazuma Watanabe, Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou and Haruhiko Udono
- Organizer
  The 13th Advanced Lasers and Photon Sources Conference (ALPS2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測2023
- Author(s)
  柴教一郎，小貫哲平，黒田隼乃介，茂垣有亮，尾嶌裕隆，清水淳，周立波
- Organizer
  砥粒加工学会学術講演会(ABTEC)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] ポテンシャル制御を用いたシリコンCMPの分子動力学解析における砥粒強度の影響2023
- Author(s)
  橋村紀香，金子和暉，清水淳，周立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] Characterization of Subsurface Damaged Layers in Wide-bandgap Semiconductor Wafers Using High-resolution Depth Slice Raman Imaging2023
- Author(s)
  Kyo-ichiro Shiba, Teppei Onuki, Jun-nosuke Kuroda, Yusuke Mogaki, Hirotaka Ojima, Jun Shimizu and Libo Zhou,
- Organizer
  The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] ロータリインフィード研削におけるウェハ温度の解析及び評価2023
- Author(s)
  塩見山太郎, 髙橋清樹, 周立波，清水淳，小貫哲平，尾嶌裕隆, 金子和暉
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] C面サファイア基板のナノスクラッチ特性（第2報）－nmオーダ送りにおけるスクラッチ異方性の考察－2023
- Author(s)
  清水淳，林旺票，矢野直彦，三枝剣悟，金子和暉，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Study on Machining Anisotropy of C-plane Sapphire Wafer by Nanoscratching Experiments2023
- Author(s)
  Kengo Saegusa, Wangpiao Lin, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] 環境調和半導体マグネシウムシリサイドウエハ表面への顕微Raman断層イメージング計測2023
- Author(s)
  小貫哲平, 渡邉和馬, 尾嶌裕隆, 清水淳, 周立波, 鵜殿治彦
- Organizer
  茨城講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Molecular Dynamics Simulation of Abrasive Wear of Hcp Crystal to Clarify Nanoscratch Phenomena of C-plane Sapphire Wafer2023
- Author(s)
  Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kengo Saegusa, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  International Tribology Conference (ITC 2023), Fukuoka
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] 顕微Raman イメージング非破壊検査技術の工具品質計測への応用2023
- Author(s)
  劉爍, 小貫哲平, 黒田隼乃介, 柴教一郎, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  精密工学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] First-principles electronic structure calculation for analyzation of crystallographic damage states in Raman spectral data2022
- Author(s)
  Jun-nosuke KURODA, Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Organizer
  The 19th International Conference on Precision Engineering (ICPE 2022)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Molecular Dynamics Simulation of Chemical Mechanical Polishing of Si Wafer using Potential Control2022
- Author(s)
  Norika Hashimura, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  International conference on Precision Engineering (ICPE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] ナノスクラッチによるC面単結晶サファイア基板の加工特性の検討（単溝スクラッチにおける加工異方性）2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，金子和暉，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  日本機械学会第14回生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 顕微Raman断層イメージング計測における測定データ品質指標の検討2022
- Author(s)
  小貫哲平，黒田隼乃介，劉爍，柴教一郎，金子和暉，尾嶌裕隆，清水淳
- Organizer
  砥粒加工学会学術講演会（ABTEC）
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Damage into Sapphire for Laser Cleaving Process2022
- Author(s)
  Teppei ONUKI, Junnosuke KURODA, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  The 15th Pacific Rim Conference on Lasers and Electro-Optics (CLEO Pacific Rim, CLEO-PR 2022）
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 第一原理電子構造計算によるRamanスペクトルシミュレーションを用いた結晶格子損傷状態の解析法の検討2022
- Author(s)
  黒田隼乃介, 小貫哲平, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] hcp結晶の分子動力学解析結果を利用したc面サファイアのアブレシブ摩耗特性の評価2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，金子和暉，山本武幸
- Organizer
  日本トライボロジー学会トライボロジー会議2022春
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] シリコンCMPの分子動力学シミュレーション第１報：ポテンシャル制御に基づく化学的作用のモデル化2022
- Author(s)
  金子和暉，橋村紀香，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第７報）－テクスチャ表面の摩耗挙動－2022
- Author(s)
  大矢一輝，山本武幸，清水淳，周立波，小貫哲平，尾嶌裕隆，金子和暉，深堀良彬
- Organizer
  精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Improvement of Tribological Properties by Surface Texturing Applying Vibration-Assisted Cutting2022
- Author(s)
  Jun Shimizu
- Organizer
  International Symposium on Advances in Abrasive Technology (ISAAT 2022)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Boundary Lubricity of Metal Surfaces Textured by Vibration-assisted Cuttin2022
- Author(s)
  Jun Shimizu, Kazuki Ohya, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Kazuki Kaneko, Yoshiaki Fukahori
- Organizer
  International conference on Precision Engineering (ICPE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Study on Brittle-Ductile Transition in Grinding Process on Sapphire Wafer Using Micro-Raman Tomographic Imaging2022
- Author(s)
  Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  The 24th International Symposium on Advances in Abrasive Technology (ISAAT2022)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] C面サファイア基板のナノスクラッチ特性－nmオーダ送りにおけるスクラッチ異方性－2022
- Author(s)
  三枝剣悟，林　王票，矢野直彦，清水　淳，金子和暉，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 微小振動援用切削でテクスチャ加工した圧痕状パターンの周期的配置による金属表面の乾式すべり特性2022
- Author(s)
  清水　淳，山本武幸，金子和暉，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第４報）－hcp 結晶のアブレシブ摩耗異方性－2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，山本武幸，金子和暉
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Study on Abrasive Wear Mechanism of C-plane Sapphire Using Nanoscratch Test and Molecular Dynamics Simulation of HCP Crystal2022
- Author(s)
  Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kengo Saegusa
- Organizer
  The 24th International Symposium on Advances in Abrasive Technology (ISAAT 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第5報）－境界潤滑における油量の影響－2021
- Author(s)
  菊池晃太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第２報）－スライダの強度による影響に関する検討－2021
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第３報）－hcp結晶の加工異方性に関する検討－2021
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，山本武幸，金子和暉
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Observation on abrasive wear damages on engineering ceramics using micro-Raman tomography2021
- Author(s)
  Teppei ONUKI, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  Proceedings of 11st International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 局所静水圧が切削現象に及ぼす効果の分子動力学シミュレーション―転がり要素の適用―2021
- Author(s)
  清水　淳，山本武幸，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第5報）－境界潤滑における油量の影響－2021
- Author(s)
  菊池晃太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Friction and Wear Behaviors of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2021
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] hcp 結晶の分子動力学解析を用いたc 面サファイアのアブレシブ摩耗特性の考察2021
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，金子和暉，山本武幸
- Organizer
  日本トライボロジー学会トライボロジー会議2021秋
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Molecular Dynamics Simulation of Localized Hydrostatic Pressure-Assisted Cutting with a Rolling Element2021
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Friction Characteristics of Metal Surfaces Textured by Vibrationassisted Cutting under Lubricated Environment2021
- Author(s)
  Daiki Hagio, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第６報）－境界潤滑におけるすべり速度の影響－2021
- Author(s)
  山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆，金子和暉
- Organizer
  精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Machining into Sapphire2021
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  the 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第５報）－境界潤滑における初歩的な検討－2021
- Author(s)
  清水淳，山本武幸，菊池晃太，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  日本トライボロジ―学会トライボロジー会議2021春
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 工学的計測データ分析のための深層学習モデル開発の研究2021
- Author(s)
  木戸浦建吾、小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 振動援用切削によるテクスチャ表面の潤滑特性の評価2021
- Author(s)
  萩尾大輝，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第３報）ー塑性盛上りの除去による効果ー2020
- Author(s)
  清水　淳, 山本武幸, 中山智隆, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第１報）－酸化膜による影響に関する検討－2020
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 分子動力学シミュレーションによるhcp 結晶の変形・摩耗挙動の解析2020
- Author(s)
  矢野直彦, 林　旺票, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 山本武幸
- Organizer
  砥粒加工学会学術講演会(ABTEC2020)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  18th International conference on Precision Engineering (ICPE2020)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第4報）－境界潤滑条件下における検討－2020
- Author(s)
  山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削によるテクスチャ表面の乾式すべり特性2020
- Author(s)
  清水　淳, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
- Organizer
  砥粒加工学会学術講演会(ABTEC2020)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第４報）－容積と面積密度の影響－2020
- Author(s)
  清水　淳, 中山智隆, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議秋別府
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  18th International conference on Precision Engineering (ICPE2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第2報）ーテクスチャ面積密度の影響ー2019
- Author(s)
  山本武幸, 中山智隆, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Friction Characteristics of Textured Surfaces by Vibration-Assisted Microcutting in Dry Sliding2019
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC 2019), Sendai
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 顕微Raman断層計測によるサファイア研削面損傷の評価2019
- Author(s)
  管駿輔, 小貫哲平, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  先進テクノフェアATF（Advanced Technology Fair）2019
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 放電付加加工による表面テクスチャの創成（第1報）―直線走査による単純テクスチャの創成―2019
- Author(s)
  小井沼陽希, 石井雅人, 川尻淳裕, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第３報）－塑性盛上り除去と被覆率の効果－2019
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジ―学会トライボロジー会議2019春
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による切削性能への効果―2019
- Author(s)
  清水　淳, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆, 小松崎一気
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Investigation on high temperature grinding of mono-crystal sapphire wafer2018
- Author(s)
  Nao Sugano, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Ken Ishibashi, Mituru Kaneyasu
- Organizer
  The 17th International Conference on Precision Engineering (ICPE2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] ロータリー型インフィード平面研削メカニズムに関する研究－無線式動力計の開発と研削抵抗の評価－2018
- Author(s)
  石橋　憲, 月井裕太, 蛯名雄太郎, 周　立波, 清水　淳, 山本武幸, 小貫哲平, 尾嶌裕隆
- Organizer
  2018年度砥粒加工学会学術講演会(ABTEC2018)
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] サファイアへの深部レーザ加工の検討2018
- Author(s)
  小貫哲平, 尾嶌裕隆, 清水　淳, 周　立波
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018
- Author(s)
  清水　淳, 芦野洸人, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] CFRP穴開け加工機および加工プロセスの開発2018
- Author(s)
  青柳晃太, 竹之内大輔, 尾嶌裕隆, 周　立波, 清水　淳, 小貫哲平
- Organizer
  第19回高エネ研メカ・ワークショップ
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] マイクロ切削による表面テクスチャがすべり時のなじみ過程に及ぼす影響―慣用および振動援用切削の比較―2018
- Author(s)
  中山智隆, 渡辺康太, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] サファイアウエハの研削メカニズムに関する研究―盛り上がり係数が除去モードに及ぼす影響―2018
- Author(s)
  長谷川滉輔, 菅野直, 周立波, 清水淳, 小貫哲平, 尾嶌裕隆
- Organizer
  第26回茨城講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Rolling Element2018
- Author(s)
  Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Kazuki Komatsuzaki
- Organizer
  International Conference on Precision Engineering (ICPE2018), Kamakura
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Comparative investigation of subsurface damages induced on sapphire with different machining methods using micro Raman spectroscopy2018
- Author(s)
  Teppei Onuki, Ke Wu, Kazuki Kamoshida, Piao Lin, Nao Sugano, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] CRFP穴あけ加工機および加工プロセスの開発2018
- Author(s)
  尾嶌裕隆, 青柳晃汰, 宇野倫和, 周　立波, 清水　淳, 小貫哲平
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Sliding Element2018
- Author(s)
  Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018), Toronto, Canada
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018
- Author(s)
  清水　淳, 芦野洸人, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Development of high efficiency CMG pellets for finishing mono-crystal sapphire2018
- Author(s)
  Jianbin Wang, Tomohito Maezaki, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討2018
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議春東京
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Running-in Behavior of Mechanically Microtextured Metal Surfaces in Dry Sliding2018
- Author(s)
  Tomotaka Nakayama, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kouta Watanabe
- Organizer
  The 17th International Conference on Precision Engineering (ICPE2018), Kamakura
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 単結晶サファイアウエハの湿式・乾式研削の比較2018
- Author(s)
  前崎智博, Wang Jianbin, 周　立波, 清水　淳, 小貫哲平, 尾嶌裕隆
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Cu-W細電極による微小放電堆積過程の検討2018
- Author(s)
  山本武幸, 石井雅人, 小井沼陽希, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第2報）― 被覆率による影響 ―2018
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議秋伊勢
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Cross-sectional measurement of laser damage in sapphire using confocal micro Raman spectrometer2018
- Author(s)
  Teppei Onuki, Kazuki Kamoshida, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  The 17th International Conference on Precision Engineering (ICPE2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] C面サファイア基板のナノ引っかきに関する研究－hcp金属のナノ引っかきシミュレーションによる変形挙動の解析－2018
- Author(s)
  林旺票, 清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 矢野直彦
- Organizer
  2018年度砥粒加工学会学術講演会(ABTEC2018)
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 局所圧縮静水圧援用切削の開発－微小切削実験と分子動力学解析－2017
- Author(s)
  清水淳，山本武幸，尾嶌裕隆，小貫哲平，周立波，市村浩貴
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学（矢上）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
- Organizer
  The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―ナノインデント試験結果と酸化膜の影響を考慮したモデルによる検討―2017
- Author(s)
  清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
- Organizer
  日本トライボロジー学会　トライボロジー会議2017春東京
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―FFMによる摩擦・摩耗実験とシミュレーションとの比較―2017
- Author(s)
  清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
- Organizer
  日本トライボロジー学会　トライボロジー会議2017秋香川
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] The development of hybrid-feed system and technology of CFRP machining2017
- Author(s)
  Daisuke Takenouchi, Hirotaka Ojima, Libo Zhou, Teppei Onuki, Jun Shimizu
- Organizer
  9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Cu-W細電極による微小放電堆積加工メカニズム2017
- Author(s)
  山本武幸, 石井雅人, 高濱　到, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Raman analysis of machining qualities on ground surfaces of sapphire wafers2017
- Author(s)
  Teppei Onuki, Ke Wu, Nao Sugano, Hirotaka Ojima, Jun Shimizu1 and Libo Zhou
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Examination of Micro EDM Deposition Mechanism using Thin Cu-W Electrode2017
- Author(s)
  Masato Ishii, Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Study on the Effect of Grain Size Variation on Ground Surface Roughness2017
- Author(s)
  Tomohiro Maezaki, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Masatomo Inui, Yutaro Ebina and Libo Zhou
- Organizer
  7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Study on Nanoscratching of C-plane Sapphire Wafer2017
- Author(s)
  Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima and Takeyuki Yamamoto
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of wireless dynamometer for rotary infeed surface grinding2017
- Author(s)
  Yuta Tsukii, Libo Zhou, Hirotaka Ojima, Jun Shimizu and Teppei Onuki
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] ハイブリッド送り機構を用いたCFRP研削加工機の開発2017
- Author(s)
  尾嶌裕隆, 竹之内大輔, 青柳晃汰, 周立波, 清水淳, 小貫哲平
- Organizer
  2017年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] 局所圧縮静水圧援用切削の開発―すべり式冶具を用いた旋削実験―2017
- Author(s)
  清水　淳, 山本武幸, 尾嶌裕隆, 小貫哲平, 周　立波, 芦野洸人
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Analysis of variance in optical inspections of wafer thickness2017
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
- Organizer
  The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Development of localized compressive hydrostatic stress-assisted cutting method: Examination by molecular dynamics simulation and microcutting experiment2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Keito Uezaki
- Organizer
  euspen's 17th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] The development of hybrid-feed system and technology of CFRP machining2017
- Author(s)
  Daisuke Takenouchi, Hirotaka Ojima, Teppei Onuki, Jun Shimizu
- Organizer
  The 9th International Conference on Leading Edge Manufacuturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] Study on micro EDM deposition in Ar atmosphere2016
- Author(s)
  Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  アクトシティ浜松
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討 ―ナノインデント試験を用いた二固体間ポテンシャル関数の導出―2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Organizer
  日本トライボロジ―学会トライボロジー会議(新潟 2016-10)
- Place of Presentation
  朱鷺メッセ（新潟）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Theoretical analysis on effects of grain size variation2016
- Author(s)
  Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  19th Int’l Symposium on Advances in Abrasive Technology (ISAAT2016)
- Place of Presentation
  Stockholm/Sweden
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Texturing of metal surface by using vibration-assisted microcutting2016
- Author(s)
  Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  euspen's 16th International Conference & Exhibition
- Place of Presentation
  East Midlands Conference Centre, Nottingham, UK
- Year and Date
  2016-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 研削シリコンウエハのナノ引っかき2016
- Author(s)
  清水　淳，林　旺票, 周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  兵庫県立大学（姫路）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Stress analysis of LT wafer during grinding process2016
- Author(s)
  Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
- Organizer
  Int’l Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] CFRP の穴あけ加工技術の開発2016
- Author(s)
  會田和樹, 竹之内大輔, 尾嶌裕隆, 周　立波, 清水　淳, 小貫哲平
- Organizer
  第17回高エネ研メカ・ワークショップ
- Place of Presentation
  KEK３号館１階セミナーホール（茨城県つくば市）
- Year and Date
  2016-04-15
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] Theoretical analysis on effects of grain size variation2016
- Author(s)
  Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  19th International Symposium on Advances in Abrasive Technology (ISAAT2016)
- Place of Presentation
  Stockholm/Sweden
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 振動援用切削によるサブミクロンスケールの表面テクスチャ加工2016
- Author(s)
  小島純弥，渡辺康太, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本機械学会関東支部・精密工学会　茨城講演会
- Place of Presentation
  茨城大学（日立）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Stress analysis of LT wafer during grinding process2016
- Author(s)
  Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] アルゴンガス中におけるマイクロ放電堆積に関する研究2016
- Author(s)
  高濱　到, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  第17回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構（つくば）
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 微小テクスチャ金型の開発とその応用（第４報）－振動援用引っかき条件の微小化－2016
- Author(s)
  渡辺康太，山本武幸，清水　淳，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学（野田）
- Year and Date
  2016-03-17
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 幾何光学と波動光学の連成解析によるウェハ厚さ計測の誤差特性2016
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Cu-W電極を用いた微小放電堆積加工2016
- Author(s)
  高濱　到，石井雅人，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学（水戸）
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Error characteristics analyses in optical wafer-thickness measurements2016
- Author(s)
  Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Error characteristics analyses in optical wafer-thickness measurements2016
- Author(s)
  Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  Int’l Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2016
- Author(s)
  根本祐気，小貫哲平，蛯名雄太郎，尾嶌裕隆，清水淳，周立波
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] ハイブリッド送り機構を用いたCFRP加工技術の開発2016
- Author(s)
  會田和樹, 竹之内大輔, 尾嶌裕隆, 周　立波, 清水　淳, 小貫哲平, 山本武幸
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学水戸キャンパス（茨城県水戸市）
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-16K06001
[Presentation] Fabrication and characterisation of nanoscale structures on Si wafer using nanoscratching and molecular dynamics simulation2016
- Author(s)
  Jun Shimizu
- Organizer
  International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS2016)
- Place of Presentation
  Cordelier Campus of the University Pierr, Paris, France
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Texturing of metal surface by using vibration-assisted microcutting2016
- Author(s)
  Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  euspen's 16th International Conference & Exhibition
- Place of Presentation
  East Midlands Conference Centre, Nottingham, UK
- Year and Date
  2016-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference 2015
- Place of Presentation
  東京理科大学（葛飾）
- Year and Date
  2015-09-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
- Place of Presentation
  Vancouver, Canada
- Year and Date
  2015-06-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] イメージングウェハ厚さ全面計測技術の開発2015
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第16回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構　つくば
- Year and Date
  2015-04-10
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 振動援用引っかきによる表面微小テクスチャリング2015
- Author(s)
  清水　淳，山本武幸，周　立波，小貫哲平，尾嶌裕隆，岡山幸洋
- Organizer
  日本トライボロジー学会トライボロジー会議（春）
- Place of Presentation
  姫路商工会議所
- Year and Date
  2015-05-29
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工－簡単な表面テクスチャの創成－2015
- Author(s)
  山本武幸，薄憲司朗，小貫哲平，尾嶌裕隆，清水　淳，周　立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（川内北）
- Year and Date
  2015-09-06
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  The 18th International Symposium on Advances in Abrasive Technology (ISAAT2015)
- Place of Presentation
  Jeju island, Korea
- Year and Date
  2015-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference 2015
- Place of Presentation
  東京理科大学（葛飾）
- Year and Date
  2015-09-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
- Place of Presentation
  Hyatt Regency, Vancouver, Canada
- Year and Date
  2015-06-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 研削シリコンウエハ加工変質層のナノインデンテーション2015
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  慶應義塾大学（日吉）
- Year and Date
  2015-09-10
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 振動援用切削による表面微小テクスチャ加工2015
- Author(s)
  渡辺康太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会関東支部主催「茨城講演会」
- Place of Presentation
  茨城大学工学部
- Year and Date
  2015-08-28
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE)
- Place of Presentation
  Vancouver, Canada
- Year and Date
  2015-06-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2015
- Author(s)
  小貫哲平，根本祐気，蛯名雄太郎，尾嶌裕隆，清水淳，周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Molecular Dynamics Simulation of Relationship between Friction Anisotropy and Atomic-scale Stick-slip Phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク
- Year and Date
  2015-10-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 局所圧縮静水圧場の生成を伴う切削過程の分子動力学シミュレーション－工具形状の改良－2015
- Author(s)
  清水淳，植崎圭人，馬海東，宮田翔哉，小貫哲平，尾嶌裕隆，山本武幸，周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（川内北）
- Year and Date
  2015-09-05
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 光スペクトラムアナライザを用いたウェハ厚さ計測2015
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
- Organizer
  he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工－マイクロ溝加工の検討－2014
- Author(s)
  山本武幸，植崎圭人，岩井俊樹，小貫哲平，清水　淳，周　立波，尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学（鳥取）
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 薄シリコンウェハ検査における白色光干渉断層計と白色光分光厚さ計の比較検討2014
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第61回応用物理学関係連合講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] ウェハ極薄化加工におけるオンサイト厚さ計測技術2014
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第15回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構
- Year and Date
  2014-04-11
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 振動援用引っかきによる掘起しを利用した表面微小テクスチャリング2014
- Author(s)
  清水　淳，山本武幸，周　立波，尾嶌裕隆，小貫哲平，岡山幸洋
- Organizer
  日本トライボロジー学会トライボロジー会議（秋岩手）
- Place of Presentation
  アイーナいわて
- Year and Date
  2014-11-07
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  15th International Conference on Precision Engineering (ICPE2014)
- Place of Presentation
  ホテル日航金沢
- Year and Date
  2014-07-24
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 固定砥粒ダイヤモンド砥石構造のモデル化2014
- Author(s)
  蛯名雄太郎, 周　立波, 清水　淳, 小貫哲平, 尾嶌裕隆
- Organizer
  2014年度精密工学会春季大会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 分子動力学によるシリコンウエハ加工変質層のナノインデンテーションの解析2014
- Author(s)
  古牧允彦，清水　淳，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  岩手大学工学部
- Year and Date
  2014-09-11
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Development of Areal Wavelet Transform applying to 2D image2013
- Author(s)
  鈴木泰樹，尾嶌裕隆，周立波，清水淳，小貫哲平
- Organizer
  2013年度精密工学会春季学術講演会国際フォーラム
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2013
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  THERMEC 2013
- Place of Presentation
  Rio Hotel, Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 4H-SiC ウエハの鏡面研削加工技術2013
- Author(s)
  蛯名雄太郎, 周立波, 清水淳, 成田潔
- Organizer
  砥粒加工学会,ABTEC2013
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013
- Author(s)
  村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013
- Author(s)
  Teppei Onuki, Ippei Murayama, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  ホテル松島大観荘（宮城県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013
- Author(s)
  蛯名雄太郎,杭偉,周立波,清水淳,小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 微小テクスチャ金型の開発とその応用（第2報）－振動切削の高周波化によるテクスチャの微小化－2013
- Author(s)
  清水　淳
- Organizer
  精密工学会春季大会
- Place of Presentation
  東京工業大学（大岡山）
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 脆性強誘電体材料(LiNbO3)への非熱的レーザアブレーション微細加工技術2013
- Author(s)
  村山一平, 小貫哲平, 尾嶌裕隆, 清水　淳, 周　立波
- Organizer
  第14回高エネ研メカ・ワークショップ
- Place of Presentation
  筑波
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 高品位サファイアウエハの研削加工技術2013
- Author(s)
  蛯名雄太郎,周立波, 清水淳
- Organizer
  砥粒加工学会,ABTEC2013
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013
- Author(s)
  村山一平，小貫哲平，尾嶌裕隆，清水淳，周立波
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of Areal Wavelet Transform applying to 2D image2013
- Author(s)
  鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
- Organizer
  日本機械学会，6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 薄ウェハデバイス加工・検査工程の研究開発‐反射分光計測技術をベースとした検査技術‐2013
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  STARCワークショップ
- Place of Presentation
  新横浜国際ホテル
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 高品位サファイアウエハの研削加工技術2013
- Author(s)
  蛯名雄太郎, 周立　波, 清水　淳
- Organizer
  砥粒加工学会、ABTEC2013
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 微小テクスチャ金型の開発とその応用(第2報)-振動切削の高周波化によるテクスチャの微小化-2013
- Author(s)
  清水淳
- Organizer
  精密工学会春季大会
- Place of Presentation
  東京工業大学(大岡山)
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 4H-SiC ウエハの鏡面研削加工技術2013
- Author(s)
  蛯名雄太郎, 周　立波, 清水　淳, 成田　潔
- Organizer
  砥粒加工学会、ABTEC2013
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] ダイヤモンドペレットによる単結晶サファイアウェーハの平坦加工技術に関する研究2013
- Author(s)
  田代芳章, 周立波, 清水淳, 三井義則, 篠田知顕
- Organizer
  砥粒加工学会,ABTEC2013
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo Zhou, Yutaro Ebina, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  ホテル松島大観荘（宮城県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 微小テクスチャ金型の開発とその応用（第2報）－振動切削の高周波化によるテクスチャの微小化－2013
- Author(s)
  清水　淳
- Organizer
  精密工学会春季大会
- Place of Presentation
  東京工業大学（大岡山）
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] ダイヤモンドペレットによる単結晶サファイアウェーハの平坦加工技術に関する研究遊離砥粒方式に代替する新たなソリューションの提供2013
- Author(s)
  田代芳章, 周　立波, 清水　淳, 三井義則, 篠田知顕
- Organizer
  砥粒加工学会、ABTEC2013
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 微小テクスチャ金型の開発とその応用(第2報)-振動切削の高周波化によるテクスチャの微小化-2013
- Author(s)
  清水淳
- Organizer
  精密工学会春季大会
- Place of Presentation
  東京工業大学(大岡山)
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Development of fixed diamond abrasive pellet for final finishing of monocrystallined sapphire wafers2013
- Author(s)
  Yoshiaki TASHIRO, Libo ZHOU, Jun SHIMIZU, Noriaki SHINODA, Yoshinori MITSUI
- Organizer
  Proceedings of 7th LEM21
- Place of Presentation
  Sendai/Japan (査読有,298-301)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013
- Author(s)
  Teppei ONUKI, Ippei MURAYAMA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Organizer
  Proceedings of 7th LEM21
- Place of Presentation
  Sendai/Japan (査読有,67-70)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of fixed diamond abrasive pellet for final finishing of mono-crystallined sapphire wafers2013
- Author(s)
  Yoshiaki TASHIRO, Libo ZHOU, Jun SHIMIZU, Noriaki SHINODA, Yoshinori MITSUI
- Organizer
  日本機械学会，6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 微小テクスチャ金型の開発とその応用（第３報）－圧子の稜を用いた微小切削によるテクスチャパターンの複雑化－2013
- Author(s)
  山本武幸，清水　淳，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学（千里山）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
- Organizer
  Proceedings of 6th LEM21
- Place of Presentation
  Sendai/Japan (査読有,79-84)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 脆性強誘電材料(LiNbO_3)への非熱的レーザアブレーション微細加工技術2013
- Author(s)
  村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
- Organizer
  第14回高エネ研メカ・ワークショップ
- Place of Presentation
  筑波
- Year and Date
  2013-04-12
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013
- Author(s)
  蛯名雄太郎，杭偉，周立波，清水淳小貫哲平，尾嶌裕隆，山本武幸，渡辺拓也
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 化学作用援用研削の分子動力学シミュレーション－シリコンウエハ-砥粒間の凝着の影響－2013
- Author(s)
  清水　淳, 周　立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
- Organizer
  砥粒加工学会、ABTEC2013
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ/砥粒間の凝着の影響-2013
- Author(s)
  清水淳, 周立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
- Organizer
  砥粒加工学会,ABTEC2013
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 反射分光式シリコンウェハ厚さ計で用いる短波長近赤外帯(SWIR)光学定数分散の検討2013
- Author(s)
  小貫哲平、小野竜典、鈴木晃、尾嶌裕隆、清水淳、周立波
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 掘起しの有効活用による表面微小テクスチャの創成2013
- Author(s)
  清水　淳，山本武幸，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  日本トライボロジー学会トライボロジー会議（秋福岡）
- Place of Presentation
  アクロス福岡（福岡県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響-セリア砥粒による前加工面のナノスクラッチ実験-2012
- Author(s)
  清水淳
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  同志社大学(京田辺)
- Year and Date
  2012-08-31
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 掘起しを利用した微小テクスチャ加工に関する研究2012
- Author(s)
  清水淳
- Organizer
  日本トライボロジー学会トライボロジー会議
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Year and Date
  2012-05-16
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] 定在音場における微粒子分級の一考案2012
- Author(s)
  伊藤拓哉，稲田智広，牛腸広人，周立波，清水淳，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会第9回生産加工・工作機械分門講演会
- Place of Presentation
  秋田県立大学
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 原子スケールのスティックスリップ現象を伴う摩擦におけるエネルギー散逸過程の分子動力学解析2012
- Author(s)
  清水　淳
- Organizer
  日本機械学会第４回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 固定砥粒によるシリコンウエハの薄片化に関する加工技術2012
- Author(s)
  谷口博則,周立波,清水淳,小貫哲平,尾嶌裕隆,呉天旭
- Organizer
  日本機械学会第9回生産加工・工作機械部門講演会
- Place of Presentation
  秋田県立大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響2012
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸，高野巧一郎
- Organizer
  2012年度砥粒加工学会（ABTEC2012）
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響－セリア砥粒による前加工面のナノスクラッチ実験－2012
- Author(s)
  清水　淳
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  同志社大学（京田辺）
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012
- Author(s)
  牛腸広人,伊藤拓哉,稲田智広,周立波,清水淳,小貫哲平,尾嶌裕隆
- Organizer
  日本機械学会第20回茨城講演会論文集
- Place of Presentation
  茨城大学 (11-114)
- Year and Date
  2012-08-24
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012
- Author(s)
  牛腸広人，伊藤拓哉，稲田智広，周立波，清水淳，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会第20回茨城講演会
- Place of Presentation
  茨城大学日立キャンパス
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] ナノインデンテーションにおけるデータの解析手法2012
- Author(s)
  杭偉,周立波,清水淳,山本武幸
- Organizer
  砥粒加工学会,ABTEC2012
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Si ウエハ仕上げ加工に及ぼす加工変質層の影響2012
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸
- Organizer
  砥粒加工学会,ABTEC2012
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] ナノインデンテーションにおけるデータ解析手法2012
- Author(s)
  杭偉，周立波，清水淳，山本武幸
- Organizer
  2012年度砥粒加工学会（ABTEC2012）
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 分子動力学によるすべり摩擦機構の解析-原子スケールのスティックスリップ現象におけるエネルギー散逸-2012
- Author(s)
  清水淳
- Organizer
  日本トライボロジー学会トライボロジー会議
- Place of Presentation
  室蘭工業大学
- Year and Date
  2012-09-16
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 原子スケールのスティックスリップ現象を伴う摩擦におけるエネルギー散逸過程の分子動力学解析2012
- Author(s)
  清水淳
- Organizer
  日本機械学会第4回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 原子スケールのスティックスリップ現象を伴う摩擦におけるエネルギー散逸過程の分子動力学解析2012
- Author(s)
  清水淳
- Organizer
  日本機械学会第4回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] 定在音場における微粒子分級の一考案2012
- Author(s)
  伊藤拓哉,稲田智広,牛腸広人,周立波,清水淳,小貫哲平,尾嶌裕隆
- Organizer
  日本機械学会第9回生産加工・工作機械分門講演会論文集
- Place of Presentation
  秋田県立大学 (265-266)
- Year and Date
  2012-10-26
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 掘起しを利用した微小テクスチャ加工に関する研究2012
- Author(s)
  清水淳
- Organizer
  日本トライボロジー学会トライボロジー会議
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Year and Date
  2012-05-16
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 分子動力学によるすべり摩擦機構の解析－原子スケールのスティックスリップ現象におけるエネルギー散逸－2012
- Author(s)
  清水　淳
- Organizer
  日本トライボロジー学会トライボロジー会議
- Place of Presentation
  室蘭工業大学
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011
- Author(s)
  清水淳, 高野巧一郎, 尾嶌裕隆, 小貫哲平, 山本武幸, 周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学(角間)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2011
- Author(s)
  清水淳
- Organizer
  International Tribology Congress (ASIATRIB 2010)
- Place of Presentation
  Hyatt Regency Perth, Australia
- Year and Date
  2011-12-07
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] 微小切削テクスチャによる光触媒機能の向上に関する研究2011
- Author(s)
  山本武幸, 小林剛, 清水淳, 尾嶌裕隆, 小貫哲平, 周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学(角間)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.SHIMIZU, W.OHSONE, H.OJIMA, T.ONUKI, L.ZHOU, T.YAMAMOTO
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011
- Author(s)
  J.Shimizu, L.Zhou, T.Yamamoto
- Organizer
  Int'l Tribology Conference 2011
- Place of Presentation
  Hiroshima, Japan
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011
- Author(s)
  J.Shimizu, L.Zhou, T.Yamamoto
- Organizer
  Int'l Tribology Conference 2011
- Place of Presentation
  Hiroshima, Japan
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011
- Author(s)
  J.Shimizu, L.Zhou, Takeyuki Yamamoto
- Organizer
  Int'l Tribology Conference 2011
- Place of Presentation
  Hiroshima, Japan
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J. Shimizu
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  大宮ソニックシティ
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011
- Author(s)
  J. Shimizu
- Organizer
  Int'l Tribology Conference 2011
- Place of Presentation
  広島国際会議場
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Image based defect detection Algorithm by use of wavelet transformation2011
- Author(s)
  Kaoru TAKAMORI, Hirotaka OJIMA, Libo ZHOU, Teppei ONUKI, Jun SHIMIZU and Takeyuki YAMAMOTO
- Organizer
  Proceedings of 6thLEM21
- Place of Presentation
  Saitama/Japan (CD-ROM)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Image based defect detection Algorithm by use of wavelet transformation2011
- Author(s)
  K.TAKAMORI, H.OJIMA, L.ZHOU, T.ONUKI, J.SHIMIZU, T.YAMAMOTO
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011
- Author(s)
  J. Shimizu
- Organizer
  Int'l Tribology Conference 2011
- Place of Presentation
  広島国際会議場
- Year and Date
  2011-11-01
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J. Shimizu
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  大宮ソニックシティ
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011
- Author(s)
  清水淳
- Organizer
  精密工学会秋季大会
- Place of Presentation
  金沢大学(角間)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2010
- Author(s)
  J. Shimizu
- Organizer
  International Tribology Congress (ASIATRIB 2010)
- Place of Presentation
  Hyatt Regency Perth (Australia)
- Year and Date
  2010-12-07
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2010
- Author(s)
  J. Shimizu
- Organizer
  International Tribology Congress (ASIATRIB 2010)
- Place of Presentation
  Hyatt Regency Perth (Australia)
- Year and Date
  2010-12-07
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2010
- Author(s)
  清水淳
- Organizer
  International Tribology Congress(ASIATRIB 2010)
- Place of Presentation
  Hyatt Regency Perth, Australia
- Year and Date
  2010-12-07
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] CMG砥石の開発に関する研究2010
- Author(s)
  三上祐樹, 高橋秀典, 周立波, 清水淳
- Organizer
  砥粒加工学会・ATF2010
- Place of Presentation
  東京・PIO
- Year and Date
  2010-03-12
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Molecular Dynamics Simulation of Chemical Reactions Assisted Grinding with Control of Interatomic Potential Parameters2009
- Author(s)
  清水淳
- Organizer
  World Tribology Congress 2009 (WTC2009), Kyoto
- Place of Presentation
  国立京都国際会館(京都府)
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] 大口径薄片SiウエハのOn-machine 3D形状計測システムの開発第2報2009
- Author(s)
  野々村和隆, 小野真志, 周立波, 清水淳
- Organizer
  日本機械学会・茨城講演会
- Place of Presentation
  茨城県,筑波大学
- Year and Date
  2009-08-25
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] シリコンウエハ研削における切込み回数の影響の分子動力学シミュレーション2009
- Author(s)
  清水淳
- Organizer
  砥粒加工学会2009年度学術講演会(ABTEC2009)
- Place of Presentation
  ものつくり大学(埼玉県)
- Year and Date
  2009-09-03
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] ポテンシャルパラメータ制御によるシリコンウエハ化学作用援用研削・研磨現象の分子動力学シミュレーション2009
- Author(s)
  清水淳, 周立波, 山本武幸
- Organizer
  トライボロジー会議2009春
- Place of Presentation
  東京,国立オリンピック記念青少年総合センター
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Research on Enhancement of Photocatalystic Activities of Titanium Dioxide Film Surface by Generating Microcutting Grooves2009
- Author(s)
  清水淳
- Organizer
  5th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  大阪大学(大阪府)
- Year and Date
  2009-12-04
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] Development of integrated cup grinding wheel for Si wafer thinning process2009
- Author(s)
  田業氷, 周立波, 佐藤悠, 清水淳, 山本武幸
- Organizer
  2009年度精密工学会春季大会
- Place of Presentation
  中央大学後楽園キャンパス
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 物理・化学作用によるSiC加工に関する研究2009
- Author(s)
  三浦伸互, 周立波, 清水淳, 山本武幸
- Organizer
  日本機械学会・茨城講演会
- Place of Presentation
  茨城県,筑波大学
- Year and Date
  2009-08-25
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Modeling and Analysis of Effects of Machine Tool Stiffness and Cutting Path Density on Infeed Surface Grinding of Silicon Wafer2009
- Author(s)
  L. Zhou, T. Mitsuta, J. Shimizu, T. Tajima
- Organizer
  Advanced Materials Research
- Place of Presentation
  Gold Coast/Australia
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ポテンシャルパラメータ制御によるシリコンウエハ化学作用援用研削・研磨現象の分子動力学シミュレーション2009
- Author(s)
  清水淳
- Organizer
  日本トライボロジー学会トライボロジー会議2009春東京
- Place of Presentation
  国立オリンピック記念青少年総合センター(東京都)
- Year and Date
  2009-05-20
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] CMGによるエタロン基板加工に関する研究2009
- Author(s)
  佐藤悠, 田業氷, 清水淳, 周立波
- Organizer
  日本機械学会第48回学生員卒業研究発表講演会
- Place of Presentation
  茨城大学水戸キャンパス
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] マイクロ加工による光触媒機能制御に関する研究2009
- Author(s)
  清水淳
- Organizer
  日本機械学会年次大会
- Place of Presentation
  岩手大学(岩手県)
- Year and Date
  2009-09-15
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] Effects of Sodium Carbonate and Ceria Concentration on Chemo-Mechanical Grinding of Single Crystal Si Wafer2009
- Author(s)
  H. Takahashi, Y.B. Tian, J. Sasaki, J. Shimizu, L. Zhou, Y. Tashiro, H. Iwase, S. Kamiya
- Organizer
  Advanced Materials Research
- Place of Presentation
  Gold Coast/Australia
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on ultra-precision machining process of silicon-based etalon, -Effects of diamond grinding on breakage of ultra-thin etalon-2009
- Author(s)
  H. SATO, Y.B. TIAN, J. SHIMIZU, L. ZHOU
- Organizer
  Proceedings of Asian Symposium for Precision Engineering and Nanotechnology
- Place of Presentation
  Kitakyushu/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Molecular Dynamics Simulation of Chemo-Mechanical Grinding by Controlling Interatomic Potential Parameters to Imitate Chemical Reaction2009
- Author(s)
  J. Shimizu, L. Zhou, T. Yamamoto
- Organizer
  Advanced Materials Research
- Place of Presentation
  Gold Coast/Australia
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] シリコンウエハ研削における切込み回数の影響の分子動力学シミュレーション2009
- Author(s)
  清水淳, 周立波, 山本武幸
- Organizer
  砥粒加工学会・ABTEC2009
- Place of Presentation
  埼玉県・ものつくり大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 光触媒膜に関する基礎的研究(第2報)-マイクロ切削によるテクスチャリングの効果-2009
- Author(s)
  清水淳, 梓沢慶介, 北條敬之, 周立波, 山本武幸, 尾嶌裕隆
- Organizer
  2009年度精密工学会春季大会学術講演会
- Place of Presentation
  中央大学後楽園キャンパス
- Year and Date
  2009-03-13
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] Study on ultra-precision machining process of silicon-based etalon, -Effects of diamond grinding on breakage of ultra-thin etalon-2009
- Author(s)
  Hisashi SATO, Yebing TIAN, Jun SHIMIZU, Libo ZHOU
- Organizer
  Asian Symposium for Precision Engineering and Nanote chnology 2009
- Place of Presentation
  Kitakyushu/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] CMG (Chemo-mechanical grinding)砥石およびCMGプロセスの開発に関する研究2009
- Author(s)
  高橋秀典, 佐々木淳一, 周立波, 清水淳
- Organizer
  日本機械学会第48回学生員卒業研究発表講演会
- Place of Presentation
  茨城大学水戸キャンパス
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Research on Chemical Reaction Assisted Ultra-short Pulsed Laser Cleavage-cutting of Sillicon Wafer2009
- Author(s)
  Takashi Mizoguchi, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  5th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
- Place of Presentation
  Osaka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] A Novel Single Step Thinning Process for Extremely Thin Si Wafers2009
- Author(s)
  Y.B. Tian, L. Zhou, J. Shimizu, H. Sato, R.K. Kang
- Organizer
  Advanced Materials Research
- Place of Presentation
  Gold Coast/Australia
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Molecular Dynamics Simulation of Influence of Two-dimensional Stick-slip Phenomenon on Atomic-scale Friction Anisotropy2009
- Author(s)
  清水淳
- Organizer
  Asian Symposium for Precision Engineering and Nanotechnology 2009 (ASPEN2009)
- Place of Presentation
  小倉ステーションホテル(福岡県)
- Year and Date
  2009-11-12
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] 化学作用を模擬したシリコンウエハ研削・研磨加工の分子動力学シミュレーション2008
- Author(s)
  清水淳, 周立波, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] SPMによるナノ構造の創成に関する研究-反復と試料-プローブ間距離が陽極酸化パターンに及ぼす影響-2008
- Author(s)
  清水淳, 陶久夢高, 周立波, 山本武幸, 青木俊暁
- Organizer
  2008年度精密工学会秋季大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] シリコンウエハのナノスクラッチングに関する研究2008
- Author(s)
  川口恵理子, 陶久夢高, 清水淳, 周立波, 山本武幸
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学日立キャンパス
- Year and Date
  2008-09-12
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Observation of Surface Topography during Chemo-Mechanical Grinding (CMG) Process2008
- Author(s)
  田業氷, 佐藤悠, 佐々木淳一, 周立波, 清水淳, 山本武幸
- Organizer
  2008年度精密工学会秋季大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 光触媒膜に関する基礎的研究-表面性状の影響-2008
- Author(s)
  梓沢慶介, 石井勇多, 清水淳, 周立波, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ステレオ法による三次元計測および形状データ構築2008
- Author(s)
  大塚春樹, 笹本侑弥, 尾嶌裕隆, 周立波, 清水淳, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 電気・機械的手法によるナノ構造の創成に関する研究2008
- Author(s)
  清水淳, 周立波, 山本武幸
- Organizer
  日本機械学会第7回生産加工・工作機械部門講演会
- Place of Presentation
  長良川国際会議場
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] シリコンウエハ研削における凝着の影響の分子動力学シミュレーション2008
- Author(s)
  清水淳, 江田弘, 周立波
- Organizer
  トライボロジー会議2008春
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] CMGによる大口径石英ガラスの研削加工2008
- Author(s)
  周立波, 清水淳, 椎名剛志, 山本武幸, 田代芳章
- Organizer
  2008年度砥粒加工学会
- Place of Presentation
  滋賀県立大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 微小引っかきによるシリコンウエハ研削現象の解析2008
- Author(s)
  清水淳, 周立波, 山本武幸, 津村貴史
- Organizer
  2008年度砥粒加工学会
- Place of Presentation
  滋賀県立大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] SPMによるナノ構造の創成に関する研究-反復と試料-プローブ問距離が陽極酸化パターンに及ぼす影響-2008
- Author(s)
  清水淳, 陶久夢高, 周立波, 山本武幸, 青木俊暁
- Organizer
  2008年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス
- Year and Date
  2008-09-19
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] シリコンウエハ研削における凝着の影響の分子動力学シミュレーション2008
- Author(s)
  清水淳, 江田弘, 周立波
- Organizer
  (社)日本トライボロジー学会トライボロジー会議
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Year and Date
  2008-05-14
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] 大口径・高平坦・極薄Siウエハの評価及び加工技術に関する研究2008
- Author(s)
  光田孝仁, 小野真志, 周立波, 清水淳
- Organizer
  2008年度砥粒加工学会
- Place of Presentation
  滋賀県立大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 高能率CMG砥石の開発2008
- Author(s)
  佐藤悠, 佐々木淳一, 周立波, 清水淳
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学日立キャンパス
- Year and Date
  2008-09-12
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 細胞操作用マイクロマニピュレータの最適経路生成に関する研究2008
- Author(s)
  尾嶌裕隆, 土屋大基, 周立波, 清水淳, 江田弘
- Organizer
  2008年度精密工学会春季大会
- Place of Presentation
  明治大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 引っかきによるナノパターン創成に関する研究2008
- Author(s)
  清水淳, 周立波, 山本武幸, 大谷健太郎
- Organizer
  2008年度砥粒加工学会
- Place of Presentation
  滋賀県立大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 引っかきによるナノパターン創成に関する研究2008
- Author(s)
  清水淳, 周立波, 山本武幸, 大谷健太郎
- Organizer
  2008年度砥粒加工学会学術講演会
- Place of Presentation
  滋賀県立大学
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20656028
[Presentation] 原子間ポテンシャルパラメータの制御によるシリコンウエハ機械・化学研削の分子動力学シミュレーション2008
- Author(s)
  清水淳, 周立波, 山本武幸
- Organizer
  日本機械学会第21回計算力学講演会
- Place of Presentation
  琉球大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 超短パルスレーザによる単結晶ダイヤモンド加工に関する研究2008
- Author(s)
  溝口高史, 萩谷淳史, 山本武幸, 清水淳, 周立波, 江田弘
- Organizer
  精密工学会・第15回学生会員卒業研究発表
- Place of Presentation
  明治大学
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 大口径薄片SiウエハのOn-Machine 3D形状計測システムの開発2008
- Author(s)
  小野真志, 光田孝仁, 周立波, 清水淳
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学日立キャンパス
- Year and Date
  2008-09-12
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Simulation and Experimental Study on Nanoscracthig of Silicon Wafer2007
- Author(s)
  J. Shimizu, H. Okabe, T. Tsumura, Y. Suehisa, L. Zhou, H. EDA
- Organizer
  Proceedings of Int'l Conference on Tribology in Manufacturing Process (ICTMP) 2007
- Place of Presentation
  Yokohama/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ステレオ法によるSEM画像からの3次元計測および形状復元2007
- Author(s)
  笹本侑弥, 大塚春樹, 周立波, 尾嶌裕隆, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Development of High Performance Wheels for Chemo-Mechanical-Grinding2007
- Author(s)
  Y. Tashiro, M. Kenmochi, B. Soitani, T. Tsuruga, L. Zhou, J. Shimizu, H. Eda
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on Nanomachining Process of Si Wafer using an Atomic Force Microscope2007
- Author(s)
  J. SHIMIZU, T. TSUMURA, Y. SUEHISA, L. ZHOU, H. EDA
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] SPMによるナノ構造の創成に関する研究-加工パラメータの陽極酸化パターンに及ぼす影響-2007
- Author(s)
  陶久夢高, 青木俊暁, 清水淳, 周立波, 江田弘
- Organizer
  2007年度精密工学会秋季大会
- Place of Presentation
  旭川高専
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 研削加工におけるSiウエハの構造変化2007
- Author(s)
  周立波, 清水淳, 江田弘, Han Huang
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Research on CMG of large size silica glass substrate2007
- Author(s)
  T. Shina, L. Zhou, Z.J Qiu, T. Yamamoto, J. Shimizu, H. Eda
- Organizer
  Proceeding of LEM21
- Place of Presentation
  Fukuoka/Japan
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 金型の微細加工に関する研究2007
- Author(s)
  川瀬大智, 山本武幸, 周立波, 清水淳.江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] TiO2膜の基本特性に関する研究2007
- Author(s)
  梓沢慶介, 石井勇多, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 工具剛性がナノ研削に及ぼす影響の分子動力学シミュレーション2007
- Author(s)
  清水淳, 周立波, 江田弘
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Siウエハのナノ引っかきによるナノ構造創成の検討2007
- Author(s)
  津村貴史, 大谷健太郎, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Study on Thinning Process of Large Size Si wafer, Advances in Abrasive technology X2007
- Author(s)
  T. Tsuruga, B. Soltani, J. Sasaki, T. Mitsuta, J. Shimizu, L. Zhou, H. Eda
- Organizer
  Proceedings of ISAAT2007
- Place of Presentation
  Detroit/USA
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 大口径Siウェハ加工プロセスの評価技術に関する研究2007
- Author(s)
  ソルタニ・ホセイニ・バーマン, 光田孝仁, 佐々木淳一, 敦賀達也, 清水淳, 周立波, 江田弘
- Organizer
  ABTEC2007
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] プローブ陽極酸化を用いたSi基板上のナノ構造の創成に関する研究2007
- Author(s)
  青木俊暁, 陶久夢高, 清水淳, 周立波, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] ポテンシャルパラメータ制御を施したシリコンウエハ研削の分子動力学シミュレーションーシミュレーションモデルの提案-2007
- Author(s)
  清水淳, 岡部秀光, 周立波, 江田弘
- Organizer
  2007年度精密工学会秋季大会
- Place of Presentation
  旭川高専
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 石英ガラスのCMG加工に関する研究2007
- Author(s)
  土屋大基, 椎名剛志, 周立波, 山本武幸, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 分子動力学シミュレーションによる摩擦異方性の微視的解析2007
- Author(s)
  清水淳, 江田弘, 周立波
- Organizer
  トライボロジー会議2007春
- Place of Presentation
  国立オリンピック記念青少年総合センター
- Year and Date
  2007-05-29
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] 超短パルスレーザによるSiウエハ割断法に関する研究2007
- Author(s)
  溝口高史, 萩谷淳史, 山本武幸, 周立波, 清水淳, 江田弘
- Organizer
  日本機械学会茨城講演会
- Place of Presentation
  茨城大学
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process, Advances in Abrasive technology X2007
- Author(s)
  T. Mitsuta, B. Soltani, T. Tsuruga, J. Sasaki, L. Zhou, J. Shimizu, H. Eda
- Organizer
  Proceedings of ISAAT2007
- Place of Presentation
  Detroit/USA
- Data Source
  KAKENHI-PROJECT-19360056
[Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  15th International conference on Precision Engineering (ICPE2014)
- Place of Presentation
  ホテル日航金沢
- Year and Date
  2014-07-22 – 2014-07-24
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy
- Author(s)
  Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  The 17th International Symposium on Advances in Abrasive Technology (ISAAT2014)
- Place of Presentation
  Courtyard by Marriott King Kamehameha's Kona Beach Hotel, Kona, Hawaii Island, USA
- Year and Date
  2014-09-22 – 2014-09-25
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 白色反射光計測によるウェハ厚さ測定における表面性状の影響
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25709005

1. ZHOU Libo (90235705)

# of Collaborated Projects: 24 results

# of Collaborated Products: 507 results
2. OJIMA Hirotaka (90375361)

# of Collaborated Projects: 20 results

# of Collaborated Products: 266 results
3. ONUKI Teppei (70400447)

# of Collaborated Projects: 15 results

# of Collaborated Products: 228 results
4. YAMAMOTO Takeyuki (40396594)

# of Collaborated Projects: 14 results

# of Collaborated Products: 222 results
5. EDA Hiroshi (60007995)

# of Collaborated Projects: 10 results

# of Collaborated Products: 198 results
6. NAKANO Hirotami (90257329)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
7. YAMAMOTO Yoshio (20272114)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. KAMIYA Sumio

# of Collaborated Projects: 2 results

# of Collaborated Products: 6 results
9. 仇中軍

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. MA Shugen (20250988)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. KONDO Ryo (90186867)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 乾正知 (90203215)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 谷山久法 (80110211)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 金子和暉 (60909216)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
15. IWASE Hisao

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
16. YAMASHITA Teruki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. TASHIRO Yoshiaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
18. TIAN Yebin

# of Collaborated Projects: 1 results

# of Collaborated Products: 41 results
19. INAGAKI Masatoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. WATANABE Kazushi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. KAWAKAMI Tatuso

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
22. ISHIKAWA Tomohiko

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
23. LU Wentong

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
24. 館義雄

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. 稲村正寿

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 飯田克彦

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. QIO Zhongjun

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
28. 太田一史

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. 木村俊一郎

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

Shimizu Jun 清水 淳

SHIMIZU Jun 清水 淳

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Clarification of Grinding Mechanism for Minimizing Damaged Layers of Next Generation Semiconductor Substrates Using Nanomachining and MetrologyPrincipal Investigator

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Overcoming weaknesses and elucidating tribological phenomena by a new trial of molecular dynamics analysis considering experimental resultsPrincipal Investigator

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Development of a novel high-integrity cutting method by use of localized materials hardening due to tribo-compressive hydrostatic stressPrincipal Investigator

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Shimizu Jun 清水淳

SHIMIZU Jun 清水淳