HATA Tomonobu 畑朋延

… Alternative Names

畑朋延ハタトモノブ

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Researcher Number	50019767
External Links
Affiliation (based on the past Project Information) *help	1994 – 2003: 金沢大学, 工学部, 教授 1988 – 1991: Kanazawa University, Professor., 工学部, 教授 1986: 金沢大, 工学部, 教授 1986: 金沢大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / 電子材料工学 / Applied physics, general / Applied materials Except Principal Investigator Electronic materials/Electric materials / Electronic materials/Electric materials / 電子デバイス・機器工学 / 工業分析化学 / Science and Engineering / 工業分析化学
Keywords	Principal Investigator Sputtering / スパッタリング / MOSFET / 薄膜 / Metallic Mode / 金属モード / Si / PAS / Photoacoustic Spectroscopy / InP … More / 熱伝導率 / LiNbO_3 / GaAs / GaInP / 光音響分光法 / Plasma control / Silicide / 人工格子 / プラズマ発光分光分析 / プラズマ制御 / 傾斜機能材料 / シリサイド / マグネトロンスパッタ / ZrO2 / Limitted Reaction / High-k Material / Thin Film / S:Ge(シリコンゲルマニウム) / イットリア安定化ジルコニア / 反応性スパッタリング / ヘテロエピタキシャル成長 / イオンプレーラィレグ / SiGe / フラッシュ蒸着 / ヘテロエピタキシャル / 人工超格子 / β-FeSi_2 / エピキシャル成長 / フラッシュ蒸着法 / ZrO_2 / 制限反応 / 高誘電率材料 / Metal-Oxide Combined Target / ZrTi Target / Isotope Oxygen / Oxide Mode / PZT Thin Films / 金属・酸化物複合ターゲット / 金属-酸化物複合ターゲット / ZrTiターゲット / 金属一酸化物複合ターゲット / ZrTr ターゲット / 同位体酸素 / 酸化物モード / PZT薄膜 / Thermal Diffusivity / Photothermal Spectroscopy / Thermal Conductivity / Thermal conductivity / 薄膜の熱拡散率 / 熱拡散率 / Ion implantation / Optical absorption coefficient / Piezoelectric transducer / Multilayered structures / ImP / 積層構造 / PAS(光音響分光法) / 透明トランスジュ-サ法PAS / イオン注入 / 光吸収係数 / 圧電トランスジュ-サ / 多層構造 … More Except Principal Investigator SiGe / ZT / ZrO2 / MOSFET / Epitaxial Growth / ECR / SiC / エピタキシャル成長 / イオンビームスパッタ / 熱電効果 / Crystalline Defect / Seebeck coefficient / Power Factor / Strain / Thermo-electric Effect / 熱電性能指数 / 多層構造膜 / 高濃度ドープ / 結晶欠陥 / ゼーベック係数 / パワーファクター / 歪み緩和 / Limitted Reaction / High-k Material / Metallic Mode / Thin Film / Sputtering / ゲート絶縁膜 / 金属モードスパッタ / 制限反応スパッタ / 短時間熱処理 / high-kゲートテ絶縁物 / SiO2 / 高誘電率 / 制限反応素スパッタ法 / ZrO_2 / 制限反応 / High-K材料 / メタリックモード / 薄膜 / スパッタリング / Ion Beam Sputtering / Amorphous Si / Bipolar Transistor / Heterojunction / 水素プラズマ / プラズマ発光 / エッチング / Si薄膜 / プラズマ / CVD / 非晶質Si / 非晶質SiC / バイポーラトランジスタ / ヘテロ接合 / high sensitive determination / surface / laser / non-radiative processes / thermal lens / optoacoustic / heat conversion / photothermal / 生体情報 / 信号増幅効果 / 超高速現象 / 熱効果 / フォトサーマルスペクトル / フォトサーマル現象 / 高感度分析 / 表面 / レーザー / 無放射過程 / サーマルレンズ / 光音響 / 光熱変換 / フォトサーマル / 相関光響分光法 / 光・熱偏向顕微鏡 / 電子線超音波顕微鏡 / 光・熱放射顕微鏡 / 電子音響スペクトロスコピー / 光音響スペクトロスコピー / ハイドープ / ボロン / シリサイド / 低温エピタキシャル成長 / イオンビームスパッタ法 / 水素サーファクタント成長 / 固相エピタキシャル成長 / 透過電子顕微鏡 / 歪成長 / 転位 / スパッタ粒子のエネルギーの低減 / スパッタ法のMCシミュレーション / 界面層 / 格子欠陥 / 歪緩和バッファ層 / シリコンゲルマニウムカーボン / Bの高濃度ドープ / 走査トンネル顕微鏡 / 2次元逆格子マッピングX線回折法 / B高濃度ドーピング / バッファ層 / 歪緩和 / シリコンゲルマニウムカーボンバッファ層 / シリコンゲルマニウム / 光音響分光法 / 光熱変換分光法 / 光熱変換現象 Less

Generation of Giant Thermo-electric Power by Ultra-heavily Boron Doped SiGe and Its Application
- Principal Investigator
  
  SASAKI Kimihiro
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kanazawa University
Investigation of YSZ insulator fims with high dielectric constant prepared by limited reaction sputtering technique
- Principal Investigator
  
  SASAKI Kimihiro
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kanazawa University
人工IV族半導体極微細構造デバイス製作のための原子精度要素プロセスの開発
- Principal Investigator
  
  安田幸夫
- Project Period (FY)
  1999 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Nagoya University
Development Research of Appratus for Artificial Lattice Utilizing Sputtering and Ion-Plating Combined TechniquePrincipal Investigator
- Principal Investigator
  
  HATA Tomonobu
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kanazawa University
Low Temperature Preparation of Ferroelectric (PZT) Thin Films by New Sputter Deposition Mode and Investigation of Its MechanismsPrincipal Investigator
- Principal Investigator
  
  HATA Tomonobu, 佐々木公洋
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kanazawa University
Technological applications of photothermal spectroscopy.
- Principal Investigator
  
  OGAWA Teiichiro
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  工業分析化学
- Research Institution
  KYUSHU UNIVERSITY
Study on New Emitter Structure Using Ultra-Thin Silicon Carbide Films as Hole Blocking Layr
- Principal Investigator
  
  SASAKI Kimihiro
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Kanazawa University
Study of high reslution measurement of thin-film-thermal-properties by the ultra-high sensitive PASPrincipal Investigator
- Principal Investigator
  
  HATA Tomonobu
- Project Period (FY)
  1994 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Kanazawa University
光熱変換現象の基礎過程の解明と応用
- Principal Investigator
  
  澤田嗣郎
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Field
  
  工業分析化学
- Research Institution
  The University of Tokyo
Evaluation of Multilayer Structure by Using new High Sensitivity PASPrincipal Investigator
- Principal Investigator
  
  HATA Tomonobu
- Project Period (FY)
  1989 – 1991
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  Kanazawa University
光及び電子音響スペクトロスコピーの研究
- Principal Investigator
  
  御子柴宣夫
- Project Period (FY)
  1986
- Research Category
  
  Grant-in-Aid for Special Project Research
- Research Institution
  Tohoku University
Development of new method to control composition ratio of alloy film by low temperature, high rate depositionPrincipal Investigator
- Principal Investigator
  
  HATA Tomonobu
- Project Period (FY)
  1986 – 1988
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  電子材料工学
- Research Institution
  Kanazawa University

All 2006 2005 2004 2003 Other

All Journal Article Patent

[Journal Article] A novel magnetron sputtering for flexible coatings as a function for production of high quality films2006
- Author(s)
  C.Wang, K.Sasaki, Y.Yonezawa, T.Hata
- Journal Title
  
  Vacuum (In press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Unbalanced Magnetron Sputtering using Cylindrical Target for Low-temperature Optical Costing2005
- Author(s)
  C.Wang, K.Sasaki, Y.Yonezawa, T.Hata
- Journal Title
  
  Jpn.J.Appl.Phys. 44・1B
  
  Pages: 669-672
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Unbalanced Magnetron Sputtering using Cylindrical Target for Low-temperature Optical Costing2005
- Author(s)
  C.Wang, K.Sasaki, Y.Yonezawa, T.Hata
- Journal Title
  
  Jpn.J.Appl.Phys. 44[1B]
  
  Pages: 669-672
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] A novel magnetron sputtering for flexible coatings as a function for production of high quality films2005
- Author(s)
  C.Wang, K.Sasaki, Y.Yonezawa, T.Hata
- Journal Title
  
  Proc.of 8th Intern.Symposium on Sputtering & Plasma process
  
  Pages: 58-61
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Thermoelectric Properties of Si/Ge Multi-nanolaye Films Prepared by Ion-beam Sputtering Technique2004
- Author(s)
  M.Kitai, H.Watase, K.Sasaki, T.Hata
- Journal Title
  
  Abs.2004 Intern.Sypmp.on Organic and Inorganic Materials and Related Nanotechnologies
  
  Pages: 203-203
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Sputter Growth SiGe Films -Epitaxy, Strain and Thermo-electric Properties2004
- Author(s)
  K.Sasaki, T.Hata
- Journal Title
  
  Abs.3^<rd> Intern.Workshop on New Group IV(Si-Ge-C) Semiconductors
  
  Pages: 45-46
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Sputtering Epitaxy of SiGe Films Using Mixture Target2004
- Author(s)
  K.Yoshimori, K.Sasaki, T.Hata
- Journal Title
  
  Abs.2004 Intern.Sypmp.on Organic and Inorganic Materials and Related Nanotechnologies
  
  Pages: 202-202
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Thermoelectric Properties of Si/Ge Multi-nanolayer Films Prepared by Ion-beam Sputtering Technique2004
- Author(s)
  M.Kitai, H.Watase, K.Sasaki, T.Hata
- Journal Title
  
  Abs.2004 Intern.Sypmp.on Organic and Inorganic Materials and Related Nanotechnologies
  
  Pages: 203-203
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Sputter Growth SiGe Films-Epitaxy, Strain and Thermo-electric Properties2004
- Author(s)
  K.Sasaki, T.Hata
- Journal Title
  
  Abs.3^<rd> Intern.Workshop on New Group IV(Si-Ge-C) Semiconductors
  
  Pages: 45-46
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] Anomalous large thermoelectric power on heavily B-doped SiGe thin films with thermal annealing2003
- Author(s)
  T.Kawahara, S.M.Lee, Y.Okamoto, J.Morimoto, K.Sasaki, T.Hata
- Journal Title
  
  Jpn.J.Appl.Phys. 41(8B)
- NAID
  110004081121
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Journal Article] A novel magnetron sputtering for flexible coatings as a function for production of high quality films
- Author(s)
  C.Wang, K.Sasaki, Y.Yonezawa, T.Hata
- Journal Title
  
  Vacuum (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360161
[Patent] 傾斜材料とこれを用いた機能素子2005
- Inventor(s)
  畑朋延, 佐々木公洋, 森田信一
- Industrial Property Rights Holder
  IHI
- Filing Date
  2005-05-13
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360161

1. SASAKI Kimihiro (40162359)

# of Collaborated Projects: 6 results

# of Collaborated Products: 11 results
2. HORITA Susumu (60199552)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. TERAMAE Norio (70114569)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. 升島努 (10136054)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. OGAWA Teiichiro (50028156)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. TOODA Taro (40217576)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. UCHIYAMA Katumi (40151899)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. IMASAKA Totaro (30127980)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. HASEGAWA Seiichi (10019755)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 澤田嗣郎 (90011105)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 北森武彦 (60214821)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 稲垣卓 (70030442)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 安田幸夫 (60126951)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 酒井朗 (20314031)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 財満鎭明 (70158947)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 中塚理 (20334998)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 池田浩也 (00262882)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 御子柴宣夫 (70006279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 中島信一 (20029226)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 柊元宏 (50013488)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 生駒俊明 (80013118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 川端昭 (80025832)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 杉谷嘉則 (80015552)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. OKADA Osamu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. 守本純

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 和佐清孝

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. WASA Kiyotaka

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

HATA Tomonobu 畑 朋延

畑 朋延 ハタ トモノブ

Research Projects

Research Products

Co-Researchers

Generation of Giant Thermo-electric Power by Ultra-heavily Boron Doped SiGe and Its Application

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Investigation of YSZ insulator fims with high dielectric constant prepared by limited reaction sputtering technique

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

人工IV族半導体極微細構造デバイス製作のための原子精度要素プロセスの開発

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development Research of Appratus for Artificial Lattice Utilizing Sputtering and Ion-Plating Combined TechniquePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Low Temperature Preparation of Ferroelectric (PZT) Thin Films by New Sputter Deposition Mode and Investigation of Its MechanismsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Technological applications of photothermal spectroscopy.

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Study on New Emitter Structure Using Ultra-Thin Silicon Carbide Films as Hole Blocking Layr

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Study of high reslution measurement of thin-film-thermal-properties by the ultra-high sensitive PASPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

光熱変換現象の基礎過程の解明と応用

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Evaluation of Multilayer Structure by Using new High Sensitivity PASPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

光及び電子音響スペクトロスコピーの研究

Principal Investigator

Project Period (FY)

Research Category

Research Institution

Development of new method to control composition ratio of alloy film by low temperature, high rate depositionPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] A novel magnetron sputtering for flexible coatings as a function for production of high quality films2006

Author(s)

Journal Title

Description

HATA Tomonobu 畑朋延

畑朋延ハタトモノブ