Sakaue Hiroyuki 坂上弘之

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SAKAUE Hiroyuki 坂上弘之

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Researcher Number	50221263
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Affiliation (Current)	2025: 広島大学, 先進理工系科学研究科(先), 助教
Affiliation (based on the past Project Information) *help	2001 – 2004: Hiroshima University, Graduate School of Advanced Science of Matter, Assistant, 大学院・先端物質科学研究科, 助手 2000: 広島大学, 工学部, 助手 1990 – 1998: 広島大学, 工学部, 助手
Review Section/Research Field	Principal Investigator 表面界面物性 / Electronic materials/Electric materials Except Principal Investigator Electronic materials/Electric materials / Electronic materials/Electric materials / Microdevices/Nanodevices / 電子材料工学 / Science and Engineering / 表面界面物性
Keywords	Principal Investigator selective reaction / DMAIH / Al nano-structure / dissolved oxygen concentration / flattening treatment / terrace structure / step / H-terminated Si surface / テラス周期構造 / 昇温脱離法 … More / 平坦化表面 / アルミニウム選択堆積 / 選択反応 / DMAlH / Al微細構造 / 溶存酸素濃度 / 平坦化処理 / テラス構造 / ステップ / 水素終端シリコン表面 / 赤外反射吸収分光 / X線光電子分光 / エッチング表面反応過程 … More Except Principal Investigator エレクトロマイグレーション / SEM / ULSI / XPS / 量子ドット / SET / エレクトロマイブレーション / 抵抗振動 / 結晶粒界 / ボイド / Al配線 / 信頼性 / 自己組織化 / 表面反応 / フッ素ラジカル / 自己停止反応 / デジタルエッチング / 低エネルギエッチング / Raman / carbonization / stabilization / polyacrylonoitrile / anodic oxidation / polymer nanostructure / aluminum nanohole / 炭化構造 / ラマン / 炭化 / 耐炎化 / ポリアクリロニトリル / 陽極酸化 / 高分子ナノ構造体 / アルミナナノホール / spintronics / Coulomb blockade / tunnel junction / quantum dot / nano ferromagnetic materials / porous alumina / 単一電子効果 / トンネリング / 強磁性体 / エピタキシャル成長 / 強磁性 / ナノホール / スピントロニクス / クーロン・ブロッケイド / トンネル接合 / ナノ磁性体 / ポーラスアルミナ / Thiol / Optical device / Conformation / Optical and electrical properties / σ hyper-conjugation / Self-assembled film / Oligosilane / 量子科学計算 / 電子物性 / 金表面 / EL素子 / チオール末端 / HOMO-LUMOギャップ / PLスペクトル / 可視光スペクトル / UV / チオール / 光デバイス / コンフォメーション / 光・電気特性 / σ超共役 / 自己組織化膜 / オリゴシラン / multi-layered film / tunneling barrier / ultra thin film / insulator / semiconductor / Single Electron / トンネル酸化膜 / トレネル酸化膜 / 多層薄膜 / トンネルバリア / 超薄膜 / 絶縁体 / 半導体 / 単一電子トランジスタ / plasma / electron temperature / self-sputtering / sputtering / electromigration / Copper / バリアメタル / プラズマ / 電子温度 / 自己スパッタ / スパッタ / 銅 / Dislocation / Al Interconnect / Nonlinear / Hillock / Void / Resistance Oscillation / Electromigration / ボイド生成消滅モデル / 局所性・非局所性評価 / 抵抗振動現象 / 振動 / アルミニウム配線 / 転位 / 非線型 / ヒロック / Bias sputtering / Time-modulated plasma / Low dielectric constant film / Conformable CVD / Multi-layr Atacked Interlayr / High quality thin film / Digital CVD / 低誘電率薄膜 / トリエチルシラン / 高速成膜 / 高アスペクト比構造 / 誘導結合プラズマ / デジタル法 / バイアススパッタ / 時間変調プラズマ / 低誘電率膜 / コンフォーマルCVD / 積層層間絶縁膜 / 高機能性薄膜 / デジタルCVD / Ion implantation / Self-limitting reaction / Crystal defect / SOI wire / Double gate MOS wire / Atomic layr digital etching / Pseudo-one dimensional quantum effect / Fine Si dot PN junction / 低次元伝導特性 / 極微細Siドット / 擬一次元PN接合 / 磁気抵抗 / 擬一次元系PN接合 / Si細線 / SOI細線 / 二重ゲートMOS細線 / 結晶欠陥 / イオン注入 / 原子層デジタルエッチング / 擬一次元量子効果 / 極微細SiドットPN接合素子 / alloy precipitation / grain boundary / in-situ SEM observation / ECR sputtering / sustained self-sputtering / molecular dynamics simulation / void / elctromigration / スパッタリング / アルミニウム / 表面拡散 / CuAl合金 / 金属薄膜 / マイクロ波プラズマ / エレクトロマイグレ-ション / STM / コンタクト埋め込み / 結晶粒界拡散 / ボイド移動 / 分子動力学計算 / マグネトロンスパッタ / ECRスパッタ / 析出合金 / 分子動力学シミュレーション / 自己維持スパッタ / 高磁場ECRスパッタ / 電子顕微鏡その場観察 / SAM / 電子ビームリソグラフィー / 金電極 / 伝導特性 / 金 / ナノ粒子 / アルカンチオール / DNA / 赤外線CCDカメラ / 走査サーマルプローブ顕微鏡 / 多層配線 / サーモマイグレーション / ジュール発熱 / Cu配線 / 直流パルス電流 / パルス電流 / LSI / 銅配線 / 水素終端 / シリコン / メゾスコピックサイズ / 平坦化 / テラス / 水素終端Si表面 / 微傾斜研磨表面 / 水素終端シリコン表面 / UHV-STM / テラス構造 / ステップ / 平坦化処理 / 出現電圧質量分析法 / 高選択比 / フロロカーボンラジカル / キャピラリ法 / 赤外反射吸収分光 / フォトルミネッセンス測定 / Si微細ドット / ディジタル・エッチング / inーsitu XPS / Si表面反応 / F,Cl / 側壁損傷評価 / 低温エッチング機構 / 原子層 / デジタル・エッチング Less

Formation of multiple tunneling junctions of quantum dots using self-organized nanoholes and its application to spintronics
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Kansai University
  Hiroshima University
Fabrication of Carbon Rod Arrays Structure Using Self-organized Nano-hole Template and Its Application for Emitter
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
量子ドット-DNA三次元結合体の自己組織形成による新機能素子の探索
- Principal Investigator
  
  新宮原正三
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Hiroshima University
極微細ハイブリッド多層配線の高信頼化に関する研究
- Principal Investigator
  
  新宮原正三
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Hiroshima University
Fabrication of Self-assembled Film of Silicon Atomic Thin Wires and Its Applications for Optical Devices
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
Fabrication study of multiply connected SETs by sequential depositions of semiconductor and insulator
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素終端Si表面のメゾスコピック周期構造の自己組織化と反応特異性の研究
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Hiroshima University
Research on the highly reliable Cu multilevel interconnects employing the sustained self-sputtering
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
Self-orgnization of Al nano-structure using selective reactivity of step/terrace structure on Si surfacePrincipal Investigator
- Principal Investigator
  
  SAKAUE Hiroyuki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子反応の制御
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyo University
極表面その場分析による金属及び半導体エッチング表面の反応過程観察Principal Investigator
- Principal Investigator
  
  坂上弘之
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Hiroshima University
Investigation on Resistance Oscillation Induced by Direct Current Electromigration
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子層反応の制御
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Fabrication of Fine Si Dot PN Junction pn junction and its Pseudo-One Dimensional Quantum Effects
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
Fabrication of ULSI highly Functional Thin Film employing High Rate and High Uniformity Digital CVD
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  HIROSHIMA UNIVERSITY
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University

All 2005

All Journal Article

[Journal Article] Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning2005
- Author(s)
  H.Miya, S.Shingubara, H.Sakaue, T.Takahagi
- Journal Title
  
  Japanese J.of Appl.Phys. 44-6A
  
  Pages: 3860-3863
- NAID
  10016441158
- Data Source
  KAKENHI-PROJECT-15201034
[Journal Article] Fabrication of Carbon Nanotube and Nanorod Arrays Using Nanoporous Template2005
- Author(s)
  S.Huang, T.Shimizu, H.Sakaue, S.Shingubara, T.Takahagi
- Journal Title
  
  Japanese Journal of Applied Physics 44-7A
  
  Pages: 5289-5291
- NAID
  10016610107
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15201034
[Journal Article] Fabrication of Carbon Nanotube and Nanorod Arrays Using Nanoporous Template2005
- Author(s)
  S.Huang, T.Shimizu, H.Sakaue, S.Shingubara, T.Takahagi
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44-7A
  
  Pages: 5289-5291
- NAID
  10016610107
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15201034

1. SHINGUBARA Shoso (10231367)

# of Collaborated Projects: 15 results

# of Collaborated Products: 3 results
2. TAKAHAGI Takayuki (40271069)

# of Collaborated Projects: 9 results

# of Collaborated Products: 3 results
3. HORIIKE Yasuhiro (20209274)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
4. IWABUCHI Shuichi (40294277)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. SHINDO Haruo (20034407)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. KIKKAWA Takamaro (60304458)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. WAKAYA Fujio (60240454)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KANEKO Hisashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. KAWAMURA Kouhei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 戸所義博

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Sakaue Hiroyuki 坂上 弘之

SAKAUE Hiroyuki 坂上 弘之

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Self-orgnization of Al nano-structure using selective reactivity of step/terrace structure on Si surfacePrincipal Investigator

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極表面その場分析による金属及び半導体エッチング表面の反応過程観察Principal Investigator

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Sakaue Hiroyuki 坂上弘之

SAKAUE Hiroyuki 坂上弘之