Shimogaki Yukihiro 霜垣幸浩

… Alternative Names

SHIMOGAKI Yukihiro 霜垣幸浩

霜垣幸浩シモガキユキヒロ

SHIMOGAMI Yukihiro 霜垣幸浩

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Researcher Number	60192613
Other IDs
External Links
Affiliation (Current)	2025: 東京大学, 大学院工学系研究科(工学部), 教授
Affiliation (based on the past Project Information) *help	2012: 東京大学, 工学(系)研究科(研究院), 教授 2010 – 2012: 東京大学, 大学院・工学系研究科, 教授 2007: The University of Tokyo, 大学院・工学系研究科, 准教授 2004: 国立大学法人東京大学, 大学院・工学系研究課, 助教授 1998 – 2003: Univ.of Tokyo, Graduate School of Engineering, Associate Professor, 大学院・工学系研究科, 助教授 … More 2000: 東京大学, 大学院・工学系研究科, 教授 1998: 東京大学, 大学院工学系研究科, 助教授 1997 – 1998: Univ.of Tokyo, School of Engineering, Associate Professor, 工学系研究科, 助教授 1996: 東京大学, 工学系研究科, 講師 1995: Dept.of Chemical System Engineering, University of Tokyo, 大学院・工学系研究科, 講師 1991 – 1994: 東京大学, 工学部, 講師 Less
Review Section/Research Field	Principal Investigator 反応・分離工学 / Applied materials science/Crystal engineering / Material processing/treatments / Reaction engineering/Process system / Material processing/treatments / Science and Engineering Except Principal Investigator Applied optics/Quantum optical engineering / 電子デバイス・機器工学 / エネルギー学一般 / Applied materials science/Crystal engineering / 電子材料工学 / Science and Engineering
Keywords	Principal Investigator 化合物半導体 / MOVPE / CVD / 変調操作 / 核発生 / 低誘電率 / ステップカバレッジ / プラズマCVD / シミュレーション / エッチング … More / Integration / Simulation / In Situ Monitoring / Reaction Mechanism / Selective Growth / Crystal Growth / Compound Semiconductor / 集積化 / シュミレーション / その場観察 / 反応機構 / 選択成長 / 結晶成長 / Resistivity / Impurity Control / Crystallization / Thin Film Growth / Nucleation / Sequential Process / Barrier Metal / CDV / 比抵抗 / 不純物制御 / 結晶化 / 薄膜成長 / バリアメタル / 金属・酸化膜積層構造形成 / 薄膜形成 / メモリーデバイス / 電極金属 / 超臨界 / BiTiO3 / SrTiO3 / SrRuO3 / 電極形成 / ナノキャパシタ / 強誘電体 / 超臨界流体薄膜合成 / 強誘電体 / 高誘電体 / 電極 / FeRAM / DRAM / プロセス開発 / 薄膜合成 / 超臨界流体 / Coナノ粒子 / 高密度核発生 / 超臨界流体製膜 / カーボンナノチューブ配線 / ULSI配線形成 / 薄膜作製 / 吸着・表面反応 / 半導体超微細化 / 表面・界面物性 / デバイス製造プロセス / InP / ECR-RIBE / エッチングプロセス / SiO_2 / CVD法 / シリコン酸化膜 / 膜組成 / 気相中間体 / 気相反応 / 温度勾配 / タングステンシリサイド / 熱CVD / マイクロロ-ディング効果 / 塩素ラジカル / ECRプラズマ … More Except Principal Investigator MOVPE / InP / DFBレーザ / 分布帰還型レーザ / 半導体レーザ / 光フリップフロップ / WDM / GDC / MOVE / 選択成長 / MOCVD / 波長トリミング / 量子細線 / 歪み量子井戸 / 進行波型光変調器 / SEED / InGaAs / DFB laser / semiconductor laser / 利得結合 / Polarization independent optical modulation / Quantum well with mass dependent width / Coupled quantum well / 偏光無依存 / 量子井戸 / 偏光無依存光変調 / 結合量子井戸 / all-optical flip-flop / optical logic gate / bistable laser diode / multimode interference coupler / passive integration / active / selective area growth / metal-organic vapor phase epitaxy / 方向性結合器 / 電界吸収光非線形性 / 有機金属気相エピタキシー / 光論理ゲート / 双安定半導体レーザ / 多モード干渉カプラ / 受動集積 / 能動 / 有機金属気相エピキタシー / optical flip-flop / optical bistability / wavelength trimming / DFB laser array / distributed feedback laser / quantum wire / 波長変換 / 波長多重 / 光双安定 / DFBレーザアレイ / anode reaction mechanism / fuel cell / solid oxide / dry methane / hydrocarbon fuel / fuel cell electric vehicle / ドライメタン燃料 / 電気自動車 / 燃料極反応機構 / 燃料電池 / 固体酸化物 / ドライメタン / 炭化水素燃料 / 燃料電池自動車 / Blue-chip optical modulator / Polarization-independent optical modulator / Traveling-wave optical modulator / Potential-tailored quantum well / Modified-potential quantum well / Quantum well / Optical switch / Optical modulator / マッハツェンダー干渉計 / 電界光吸収 / 屈折率変調 / 半導体光スイッチ / 半導体光変調器 / 非対称結合量子井戸 / InPドライエッチング / 光制御デバイス / ブルーチャープ光変調器 / 偏光無依存光変調器 / ポテンシャル制御量子井戸 / 変調ポテンシャル量子井戸 / 光スイッチ / 光変調器 / Optical amplifier gate switch / MMI coupler / Growth simulation / Spectroscopic ellipsometry / Selective-area growth / 気相拡散 / シミュレーション / MOVE2 / 光アンプゲートスイッチ / MMIカプラ / 成長シミュレーション / 分光エリプソメトリ / Quantum wire / Analog modulation distortion / Laser triode / Wavelength trimming / Absorptive grating / Gain coupling / Distributed feedback laser / 歪み多重量子井戸 / InGaAsP / アナログ変調歪み / レーザトライオード / 発振波長トリミング / 吸収性回折格子 / Five-step asymmetric coupled quantum well / Traveling wave optical modulator / lnP / lnAlAs / lnGaAs / lnGaAs pseudo substrate / 超高速光変調 / JnAlAs / 5段階非対称結合量子井戸 / InAlAs / InGaAs疑似基板 / 偏向無依存光変調 / 質量依存幅量子井戸 / electro-absorption modulator / wavelength tunable / quantum well disordering / coupling coefficient / gain coupling / distributed-feedback laser / 電界吸収変調器 / 波長可変 / 量子井戸無秩序化 / 結合係数 / Bistable optical device / Directional cou ; ler optical switch / Quantum confined Stark effect / Tensile-strained quantum well / Parabolic potential quantum well / 偏光無依存スイッチング / 電界デカップリング効果 / 電気光学効果 / 放物線型ポテンシャル / 歪量子井戸・歪超格子 / 分子線エピタキシ-(MBF) / 結合係数変調 / 多重量子井戸 / 偏光無依存光スイッチング / X線回折 / 臨界膜厚 / 伸張歪 / 歪量子井戸 / スイッチ / 光変調 / 放物線ポテンシャル / 伸張歪み / ポテンシャル制御 / 光双安定素子 / 方向性結合器型光スイッチ / 量子閉じ込めシュタルク効果 / 伸張歪み量子井戸 / 有効質量依存幅量子井戸 / 放物線量子井戸 / 異種材料 / 半導体プロセス / チップ搭載チップ / 異分野融合 / モバイル端末 / ヒューマン・インターフェース・デバイス / 超高速・低消費 / 超機能グローバル / 多機能化 / ヘルスケアチップ / 半導体 / インターフェース / 微細加工 / システム / 超機能化 / シリコン / 集積回路 / インテグレーション Less

Nano-capacitor fabrication process development by using supercritical fluidPrincipal Investigator
- Principal Investigator
  
  SHIMOGAKI Yukihiro
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Reaction engineering/Process system
- Research Institution
  The University of Tokyo
超臨界流体を利用したULSIカーボンナノチューブ配線用ナノ触媒粒子の高密度合成Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Research and development of semiconductor digital all-optical devices and integrated circuits
- Principal Investigator
  
  NAKANO Yoshiaki
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  The University of Tokyo
変調操作CVD法による薄膜形成における初期核発生・成長過程の制御Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokyo
超機能化グローバル・インターフェース・インテグレーション研究
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  2000 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  National Institute for Materials Science
  The University of Tokyo
Novel wavelength division multiplexed optical functional devices based on semiconductor lasers
- Principal Investigator
  
  NAKANO Yoshiaki
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  The University of Tokyo
Advanced ULSI multilevel metallization using non-steady state by Flow Modulation techniquePrincipal Investigator
- Principal Investigator
  
  SHIMOGAKI Yukihiro
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Research and development of selective area MOVPE process for the fabrication of monolithic OEIC devicesPrincipal Investigator
- Principal Investigator
  
  SHIMOGAKI Yukihiro
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  The University of Tokyo
Improvement of conversion efficiency of solid oxide fuel cell to apply to electric vehicle
- Principal Investigator
  
  IHARA Manabu
- Project Period (FY)
  1998 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  エネルギー学一般
- Research Institution
  TOHOKU UNIVERSITY
Selective-area metal-organic vapor phase epitaxy for monolithically-integrated semiconductor photonic circuits
- Principal Investigator
  
  NAKANO Yoshiaki
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  The University of Tokyo
Research on Optical Modulators and Switches Based on Potential-Tailored Quantum Microstructures for the Advanced Optical Communication Infrastructure
- Principal Investigator
  
  TADA Kunio
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Yokohama National University
  The University of Tokyo
ECR-RIBEによる化合物半導体エッチングプロセスの反応工学的解析Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  反応・分離工学
- Research Institution
  The University of Tokyo
Development of ultrahigh performance semiconductor lasers for photonic information infrastructure
- Principal Investigator
  
  TADA Kunio
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  University of Tokyo
CVD製膜における微小温度勾配が製膜速度と物性に及ぼす効果Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
酸化物薄膜のCVD合成及びエッチングプロセスの反応工学的解析と低誘導率化Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  反応・分離工学
- Research Institution
  The University of Tokyo
Joint Research on Gain-Coupled DFB Semiconductor Laser
- Principal Investigator
  
  TADA Kunio
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for international Scientific Research
- Research Institution
  University of Tokyo
Optical properties of modified potential quantum micro structures and their application to optical modulationlswiching devices
- Principal Investigator
  
  TADA Kunio
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  University of Tokyo
CVD製膜における微小温度勾配が製膜速度物性に及ぼす効果Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The University of Tokyo
CVDプロセスとエッチングプロセスの反応工学的比較考察Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  反応・分離工学
- Research Institution
  The University of Tokyo
ECRプラズマエッチング装置による化合物半導体エッチング反応機構の解明Principal Investigator
- Principal Investigator
  
  霜垣幸浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  反応・分離工学
- Research Institution
  The University of Tokyo
Advanced photonic functional materials based on quantum microstructures with atomic scale precision and their application to optical modulation / switching
- Principal Investigator
  
  TADA Kunio
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  電子材料工学
- Research Institution
  University of Tokyo

All 2013 2012 2011 2010 2005 2004 2003

All Journal Article Presentation

[Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013
- Author(s)
  Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Journal Title
  
  J.Supercritical Fluid
  
  Volume: 79 Pages: 244-250
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360329
[Journal Article] Ethanol-Assisted Flow-Type Supercritical Fluid Deposition of SrRuO3 for Stoichiometric Film Formation2013
- Author(s)
  Kyubong Jung, Yu Zhao, Takeshi Momose ,and Yukihiro Shimogaki
- Journal Title
  
  ECS Solid State Letters
  
  Volume: 2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360329
[Journal Article] Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system2013
- Author(s)
  Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Journal Title
  
  The Journal of Supercritical Fluid
  
  Volume: In Press Pages: 244-250
- DOI
  10.1016/j.supflu.2013.03.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360329
[Journal Article] Step Coverage Quality of Cu Films by Supercritical Fluid Deposition Compared with Chemical Vapor Deposition2010
- Author(s)
  T.Momose, M.Sugiyama, E.Kondoh, Y.Shimogaki
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: 49
- NAID
  210000068539
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360329
[Journal Article] Initial Cu Growth in Cu-Seeded and Ru-Lined Narrow Trenches for Supercritical Fluid Cu Chemical Deposition2010
- Author(s)
  E.Kondoh, M.Matsubara, K.Tamai, Y.Shimogaki
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: 49
- NAID
  210000068522
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360329
[Journal Article] Surface kinetics in MOVPE of InP and InGaP analyzed by flow modulation method2005
- Author(s)
  Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-20
  
  Pages: 1-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE2005
- Author(s)
  Haizheng Song, Xueliang Song, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17
  
  Pages: 1-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Prediction method for the bandgap profiles of InGaAsP multiple quantum well structures fabricated by selective area metal-organic vapor phase epitaxy2005
- Author(s)
  Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
- Journal Title
  
  Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-16
  
  Pages: 1-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Simulation and design of the emission wavelength of multiple quantum well structures fabricated by selective area metal-organic vapor phase epitaxy2004
- Author(s)
  Tomonari Shioda, Takeshi Doi, Abdullah Al Amin, Xue-Liang Song, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
- Journal Title
  
  Confenrence Synopsis, the 3rd Asian Conference on Chemical Vapor Deposition, Taipei, Taiwan, Novermber 12-14 B22
  
  Pages: 63-64
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] The effect of group V precursor on selective area MOVPE of InP/GaAs-related materials2004
- Author(s)
  Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Journal of Crystal Growth vol.261, no.2-3
  
  Pages: 419-426
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Examination of sub-surface in MOVPE by time modulation growth2004
- Author(s)
  Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Extended Abstracts of the 23rd Electronic Materials Symposium, Izu-Nagaoka, Shizuoka, July 7-9 D8
  
  Pages: 79-82
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] The role of the surface adsorption layer during InGaAsP MOVPE growth analyzed by the flow modulation method2004
- Author(s)
  Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Workbook, 12th International Conference on Metal-Organic Vapor Phase Epitaxy, p.9, Maui, Hawaii, May 30-June 4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Fundamental kinetics determining growth rate profiles of InP and GaAs in MOCVD with horizontal reactor2004
- Author(s)
  Ik-Tae Im, Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Journal of Crystal Growth vol.261, no.2-3
  
  Pages: 214-224
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Polycrystals growth on dielectric masks during InP/GaAs selective MOVPE2004
- Author(s)
  Masakazu Sugiyama, Ho-jin Oh, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Journal of Crystal Growth vol.261, no.2-3
  
  Pages: 411-418
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Understanding the abnormal growth of InP-related materials in selective-area MOVPE2004
- Author(s)
  Noriaki Waki, Takayuki Nakano, Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Extended Abstracts of the 23rd Electronic Materials Symposium, Izu-Nagaoka, Shizuoka, July 7-9 D5
  
  Pages: 69-72
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Measurement of surface reaction rate constants and reactor-scale simulation of growth rate and composition in InGaAsP MOVPE2004
- Author(s)
  Masakazu Sugiyama, Ho-Jin Oh, Ik-Tae Im, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Workbook, 12th International Conference on Metal-Organic Vapor Phase Epitaxy, p.29, Maui, Hawaii, May 30-June 4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Study on the surface reaction kinetics of InGaAsP related materials MOCVD through analyses of growth rate distribution in the selective area growth2003
- Author(s)
  Ho-Jin Oh, Ik-Tae Im, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Conference Proceedings, 15th International Conference on Indium Phosphide and Related Materials(IPRM '03), Santa Barbara, California, May 12-16 ThP1
  
  Pages: 397-400
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy2003
- Author(s)
  Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Japanese Journal of Applied Physics vol.42, part 2, no.10A
- NAID
  10011766948
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Electron cyclotron resonance reactive ion etching of III-V semiconductors by cyclic injection of CH4/H2/Ar and O2 with constant Ar flow2003
- Author(s)
  Nobuo Haneji, Goh Segami, Tatsuya Suzuki, Taro Arakawa, Kunio Tada, Yukihiro Shimogaki, Yoshiaki Nakano
- Journal Title
  
  Japanese Journal of Applied Physics vol.42, part 1, no.6B
  
  Pages: 3958-3961
- NAID
  210000053700
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Journal Article] Surface reaction kinetics in metalorganic vapor phase epitaxy of GaAs through analyses of growth rate profile in wide-gap selective-area growth2003
- Author(s)
  Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
- Journal Title
  
  Japanese Journal of Applied Physics vol.42, part 1, no.10
  
  Pages: 6284-6291
- NAID
  10012448627
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205055
[Presentation] Kinetics study of TiO2 deposition in supercritical CO2 using Micro-/Macro-cavity method2013
- Author(s)
  Kyubong Jun, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  化学工学会第７８年会
- Place of Presentation
  大阪大学豊中キャンパス
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Supercritical fluid deposition (SCFD) of crystallized TiO2 with alcohol assistance2013
- Author(s)
  Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  E-MRS Spring Conference 2013
- Place of Presentation
  Strasbourg, France.
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Conformal step coverage TiO2 deposition using supercritical CO22013
- Author(s)
  Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  Materials for Advanced Metallization 2013
- Place of Presentation
  Leuven, Bergium.
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Supercritical fluid deposition of crystallized TiO2 with assistance of alcohol2013
- Author(s)
  Yu Zhao, Kyubong Jun, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  化学工学会第７８年会
- Place of Presentation
  大阪大学豊中キャンパス
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Deposition Mechanism of Metal Oxide for FeRAM Electrode using Flow Type Supercritical Fluid Deposition Reactor2012
- Author(s)
  Kyubong Jung, Yu Zhao, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  Pacific Rim Meeting on Electrochemical and Solid-state Science
- Place of Presentation
  Hawaii, USA.
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Low temperature process for Strontium Ruthenium Oxide in Supercritical Carbon Dioxide2012
- Author(s)
  Kyubong Jung, Takeshi Momose, and YukihiroShimogaki
- Organizer
  10th International Symposium on Supercritical Fluids
- Place of Presentation
  San Francisco, USA.
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] 超臨界流体を利用した次世代DRAM用高誘電体薄膜作製プロセスの開発2012
- Author(s)
  渡邊圭, 百瀬健, 霜垣幸浩
- Organizer
  化学工学会
- Place of Presentation
  工学院大学(新宿)
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Supercritical Fluid Deposition of Bismuth Titanate for Embedded FeRAM Applications2012
- Author(s)
  Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  Pacific Rim Meeting on Electrochemical and Solid-state Science
- Place of Presentation
  Hawaii, USA.
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Precursors Selection for TiO2 Thin Film Deposition in Supercritical CO22012
- Author(s)
  Yu Zhao, Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  International Union of Materials Research Societies- International Conference on Electronic Materials
- Place of Presentation
  Yokohama
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] 超臨界流体を利用したDRAM, FeRAM電極用Ru薄膜及びPt薄膜の作製2011
- Author(s)
  渡邊圭, 霜垣幸浩
- Organizer
  化学工学会第76回年会
- Place of Presentation
  東京農工大学小金井キャンパス
- Year and Date
  2011-03-23
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] RuO2 Deposition Using Supercritical Fluid Deposition (SCFD)2011
- Author(s)
  Kyubong Jung, Takeshi Momose, and Yukihiro Shimogaki
- Organizer
  Advanced Metallization Conference 2011, Asian Session
- Place of Presentation
  Tokyo
- Data Source
  KAKENHI-PROJECT-22360329
[Presentation] Ru and Pt Films Fabrication for 3D Capacitor Electrodes Using Supercritical Fluid Deposition Technique2011
- Author(s)
  Kei Watanabe, Takeshi Momose, and YukihiroShimogaki
- Organizer
  Advanced Metallization Conference 2011, Asian Session
- Place of Presentation
  Tokyo
- Data Source
  KAKENHI-PROJECT-22360329

1. NAKANO Yoshiaki (50183885)

# of Collaborated Projects: 9 results

# of Collaborated Products: 15 results
2. TADA Kunio (00010710)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
3. MURAI Tohru (60107571)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. 江頭靖幸 (70223633)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. MOMOSE Takeshi (10611163)

# of Collaborated Projects: 1 results

# of Collaborated Products: 15 results
6. ARAKAWA Taro (40293170)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. IHARA Manabu (90270884)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KUMAGAI Akibumi (60006319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. KATO Masaki (80312982)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. SUGIYAMA Masakazu (90323534)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
11. SHIMIZU Hiromasa (50345170)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 堀池靖浩 (20209274)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 財満鎭明 (70158947)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 角南英夫 (10311804)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 益一哉 (20157192)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 岩井洋 (40313358)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. SUDOH Tsurugi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. LUO Yi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. LAGASSE Paul

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. HIRATA Takaaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. OHBA Takayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. HAMAMURA Hirotaka

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. モルティエルヘールト

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. バーツルル

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. コルドレンラリー

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. MORTHIER Geert

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. BAETS Roel

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. COLDREN Larry A.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. コンドレンラリー

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Shimogaki Yukihiro 霜垣 幸浩

SHIMOGAKI Yukihiro 霜垣 幸浩

霜垣 幸浩 シモガキ ユキヒロ

SHIMOGAMI Yukihiro 霜垣 幸浩

Research Projects

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Co-Researchers

Nano-capacitor fabrication process development by using supercritical fluidPrincipal Investigator

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超臨界流体を利用したULSIカーボンナノチューブ配線用ナノ触媒粒子の高密度合成Principal Investigator

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変調操作CVD法による薄膜形成における初期核発生・成長過程の制御Principal Investigator

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Advanced ULSI multilevel metallization using non-steady state by Flow Modulation techniquePrincipal Investigator

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Research and development of selective area MOVPE process for the fabrication of monolithic OEIC devicesPrincipal Investigator

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ECR-RIBEによる化合物半導体エッチングプロセスの反応工学的解析Principal Investigator

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CVD製膜における微小温度勾配が製膜速度と物性に及ぼす効果Principal Investigator

Principal Investigator

Shimogaki Yukihiro 霜垣幸浩

SHIMOGAKI Yukihiro 霜垣幸浩

霜垣幸浩シモガキユキヒロ

SHIMOGAMI Yukihiro 霜垣幸浩