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Michihata Masaki  道畑 正岐

… Alternative Names

MICHIHATA Masaki  道畑 正岐

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Researcher Number 70588855
Other IDs
  • ORCIDhttps://orcid.org/0000-0002-2373-6534
Affiliation (Current) 2025: 東京大学, 大学院工学系研究科(工学部), 准教授
Affiliation (based on the past Project Information) *help 2018 – 2024: 東京大学, 大学院工学系研究科(工学部), 准教授
2015 – 2018: 東京大学, 先端科学技術研究センター, 助教
2015: 大阪大学, 大学院工学研究科, 助教
2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 助教
2013: 大阪大学, 大学院工学研究科, 助教
2011: 大阪大学, 大学院・工学研究科, 助教
2010: 大阪大学, 工学研究科, 助教
Review Section/Research Field
Principal Investigator
Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Except Principal Investigator
Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics / Materials/Mechanics of materials
Keywords
Principal Investigator
Whispering gallery mode / 直径計測 / WGM / テーパ光ファイバー / 直径 / 光共振 / テーパファイバ / 真球度 / 定在波 / 近接場 … More / 伝搬定数 / 屈折率 / 球体 / WGM共振 / マイクロ球 / マイクロプローブ / 微小球共振 / 寸法計測 / 計測理論 / 内面形状 / 回折格子 / 内面構造 / 計測基準点 / 光周波数コム / 細径ファイバー / 光ファイバ / インプロセス計測 / Mie散乱 / 細径光ファイバー / 干渉照明 / マイクロファイバー / ナノファイバー / テーパ光ファイバ / 近接場プローブ / 有限要素解析 / SNOM / 偏光 / Goos-Haenchenシフト / 自律校正 / ビート周波数 / 光ファイバー / 球 / テーパファイバー / モード解析 / 微小球 / 標準計測 / 光共振器 / 金属微細構造 / 回折限界 / レーザ加工 / ハイスピードカメラ / ナノ加工 / 光放射圧ポテンシャル / 金属ナノ粒子 / 光放射圧 / 付加加工 / 光ピンセット / ベッセルビーム / インプロセス / 付加製造 / 光圧 / 校正 / 計測不確かさ / 切削油 / 工具刃先 / 共焦点 / 工具摩耗 / 蛍光 / 蛍光共焦点 / オンマシン計測 / 工具計測 / 切削油蛍光 / マイクロCMM / 微小球共振器 / 光カップリング / NSOM … More
Except Principal Investigator
レーザーアブレーション / レーザー加工 / 局在型表面プラズモン / 伝搬型表面プラズモン / ナノ粒子 / パルストレイン / パルストレインビーム / コヒーレントフォノン / 水酸化フラーレン / ウォータジェットレーザー加工 / ウォータジェットレーザ加工 / 高アスペクト比 / 微細穴加工 / 表面検査 / シリコンウエハ / 表面欠陥 / ナノ異物 / ナノ欠陥 / 異物検出 / コヒーレント結像 / 微細機能構造 / ナノ計測 / 超解像 / シミュレーション / 校正 / 圧縮 / 三次元座標導出 / FSR / アライメント / 電気双極子能率 / ミューオン異常磁気能率 / 測長網 / ボールレンズ / パルス間隔 / 自由スペクトル領域 / エタロン / 絶対測長干渉計 / 光周波数コム / EDM / g-2 / muon / ball lens / oprical frequency comb / interferometer / alignment monitor / ナノ除去加工 / マイクロレジン / 光触媒ナノ粒子 / 放射圧制御 / 光トラップ / 並列制御 / 空間局在光場 / 放射圧並列制御 / 空間局在光場制御 / レーザートラップ / ナノ・マイクロ加工 / マクロファクトリ / ナノマイクロ加工 / セルインマイクロファクトリ / マイクロファクトリ / 電子増強ラマン散乱効果 / 超微細レーザー加工計測 / ナノ局所界面 / ナノ微細加工 / ラマン散乱計測 / 超短パルスレーザー加工 / レーザーアブレ-ション / ナノ加工 / 表面加工 / ダメージレス加工 / 表面励起 / ダブルパルス / アブレーション / インコヒーレント励起 / コヒーレント励起 / 表面励起加工 / フェムト秒レーザー / 化学的相互作用 / 反応性ナノ粒子 / 表面微細構造クラスター / ナノ研磨プロセス / 表面増強ラマン散乱 / デバイストークスアインシュタインの法則 / 偏光解消 / 粘性計測 / 回転ブラウン運動 / 回転拡散係数 / ブラウン運動 / 蛍光偏光法 / 加工量計測 / 定在場スケール / 非熱的アブレーション加工 / フェムト秒パルスレーザー / 光放射圧 / 微粒子レンズ / 超高アスペクト比微細加工 / フォトニック・ナノジェット / 原子直接加工 / コヒーレント振動 / フェムト秒パルス / 非平衡状態 / 原子加工 / レーザ加工 / フェムト秒レーザ / 超短パルスレーザー / 加工現象計測・解析 / 表面増強ラマン散乱法 / 分子加工原理 / 材料除去過程 / ナノデジタルパターニング / 加工機能性超微粒子 Less
  • Research Projects

    (22 results)
  • Research Products

    (240 results)
  • Co-Researchers

    (11 People)
  •  3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測Principal Investigator

    • Principal Investigator
      道畑 正岐
    • Project Period (FY)
      2023 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      The University of Tokyo
  •  Diameter measurement of next generation nano optical fiber using destructive interference illuminationPrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2022 – 2023
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      The University of Tokyo
  •  次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発

    • Principal Investigator
      高橋 哲
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      The University of Tokyo
  •  Near-field liquid phase probing method with dynamic optical phase detection for autonomous search for 1 nm particulate contamination

    • Principal Investigator
      Takahashi Satoru
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      The University of Tokyo
  •  Wide diameter range measurement of silicon sphere for mass standardPrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2020 – 2022
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      The University of Tokyo
  •  Challenge of New Concept of Photo-Excited Nano-Removal Processing by Parallel Control of Spatially Localized Light

    • Principal Investigator
      Takahashi Satoru
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      The University of Tokyo
  •  Development of the alignment monitor for muon g-2/EDM experiment

    • Principal Investigator
      KUME Tatsuya
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics
    • Research Institution
      High Energy Accelerator Research Organization
  •  Nano-defect super-resolution measurement of next-generation micro-functional structures using localized optical fields with dynamic phase control

    • Principal Investigator
      Takahashi Satoru
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      The University of Tokyo
  •  Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonancePrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      The University of Tokyo
  •  Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potentialPrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2017 – 2019
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  On machine measurement of cutting tool profile using fluorescent from cutting fluidPrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  Measurement of a micro-sphere using whispering gallery mode resonancePrincipal Investigator

    • Principal Investigator
      Michihata Masaki
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structures

    • Principal Investigator
      Takahashi Satoru
    • Project Period (FY)
      2015 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laser

    • Principal Investigator
      Takaya Yasuhiro
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  In-process nano surface processing control by using time resolved coherent phonon excitation on semiconductor target with

    • Principal Investigator
      Hayashi Terutake
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Kyushu University
      Osaka University
  •  Laser micro-machining using photonic nanojets controlled by in-situ measurement

    • Principal Investigator
      Takaya Yasuhiro
    • Project Period (FY)
      2012 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Study on ultra-precision viscosity measurement using a fluorescent probe

    • Principal Investigator
      HAYASHI Terutake
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Osaka University
  •  Sphere measurement using whispering gallery modePrincipal Investigator

    • Principal Investigator
      MICHIHATA Masaki
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Analysis of polishing machanism using chemical reactive nanoparticles based on Raman spectrum enhanced by localized and propagating surface plasmon resonance

    • Principal Investigator
      TAKAYA Yasuhiro
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Microsphere resonator based micro-probe for 3-dimensional coordinate metrologyPrincipal Investigator

    • Principal Investigator
      MICHIHATA Masaki
    • Project Period (FY)
      2010 – 2011
    • Research Category
      Grant-in-Aid for Research Activity Start-up
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning

    • Principal Investigator
      TAKAYA Yasuhiro
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam

    • Principal Investigator
      HAYASHI Terutake
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 Other

All Journal Article Presentation Book Patent

  • [Book] Progress in Optomechatronic Technologies "chapter 4"2014

    • Author(s)
      Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
    • Total Pages
      205
    • Publisher
      Springer International Publishing
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Journal Article] Diameter Measurement for Micro-Spheres via Coherent Scanning Interferometry with Reference to Gauge Block2024

    • Author(s)
      Michihata Masaki、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      International Journal of Automation Technology

      Volume: 18 Issue: 1 Pages: 11-17

    • DOI

      10.20965/ijat.2024.p0011

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2024-01-05
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Journal Article] Propagation Constant-Based Diameter Measurement Technique for Sub-micrometer Scale Optical Fiber2024

    • Author(s)
      Liu Yushen、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
    • Journal Title

      Optics Letters

      Volume: in press Issue: 10 Pages: 2649-2649

    • DOI

      10.1364/ol.521545

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Journal Article] Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution2023

    • Author(s)
      Kume Hiromasa、Michihata Masaki、Takahashi Satoru
    • Journal Title

      Precision Engineering

      Volume: 80 Pages: 138-159

    • DOI

      10.1016/j.precisioneng.2022.11.011

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Journal Article] Measurement of diameter of sub-micrometer fiber based on analysis of scattered light intensity distribution under standing wave illumination2022

    • Author(s)
      Michihata Masaki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      CIRP Annals

      Volume: 71 Issue: 1 Pages: 421-424

    • DOI

      10.1016/j.cirp.2022.03.008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22K18747, KAKENHI-PROJECT-20H02040
  • [Journal Article] Measurement properties of electric field intensity distribution of whispering gallery mode with near-field optical probe2022

    • Author(s)
      Liu Yushen、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
    • Journal Title

      Measurement Science and Technology

      Volume: 33 Issue: 9 Pages: 095501-095501

    • DOI

      10.1088/1361-6501/ac74a2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Journal Article] Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator2022

    • Author(s)
      Y. Guan, S. Masui, S. Kadoya, M. Michihata and S. Takahashi
    • Journal Title

      J. Phys. Conf. Ser. 2368

      Volume: 1 Issue: 1 Pages: 12014-12014

    • DOI

      10.1088/1742-6596/2368/1/012014

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21K18668, KAKENHI-PROJECT-22KJ1106
  • [Journal Article] Numerical analysis on high resolution optical measurement method with long working distance objective for in-line inspection of micro-structured surface2021

    • Author(s)
      Kume Hiromasa、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 232-247

    • DOI

      10.1016/j.precisioneng.2020.09.012

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Journal Article] The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy2021

    • Author(s)
      Guan Yizhao、Kume Hiromasa、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
    • Journal Title

      Journal of Manufacturing Science and Engineering

      Volume: 144 Issue: 3

    • DOI

      10.1115/1.4051827

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Journal Article] In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination2021

    • Author(s)
      Michihata Masaki、Zheng Zhao、Funaiwa Daiki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Issue: 1 Pages: 28-36

    • DOI

      10.1007/s41871-020-00081-4

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18803, KAKENHI-PROJECT-20H02040
  • [Journal Article] The FDTD analysis for dark field in-process depth measurements of fine microgrooves2021

    • Author(s)
      Guan Yizhao、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
    • Journal Title

      Measurement: Sensors

      Volume: 18 Pages: 100257-100257

    • DOI

      10.1016/j.measen.2021.100257

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Journal Article] Micro-scale Additive Manufacturing Using the Optical Potential Generated by a Bessel Beam2020

    • Author(s)
      Michihata Masaki、Yokei Makoto、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 3 Issue: 4 Pages: 292-298

    • DOI

      10.1007/s41871-020-00079-y

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Journal Article] Advanced generation of functional dual-periodic microstructured surface based on optical in-process measurement2020

    • Author(s)
      Takahashi Satoru、Masui Shuzo、Michihata Masaki、Takamasu Kiyoshi
    • Journal Title

      CIRP Annals

      Volume: 69 Issue: 1 Pages: 477-480

    • DOI

      10.1016/j.cirp.2020.04.076

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Journal Article] Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere2019

    • Author(s)
      Kobayashi Yumeki、Michihata Masaki、Zhao Zheng、Chu Bohuai、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Measurement Science and Technology

      Volume: 30 Issue: 6 Pages: 065201-065201

    • DOI

      10.1088/1361-6501/ab1241

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Journal Article] In-process measurement for cure depth control of nano stereolithography using evanescent light2019

    • Author(s)
      S. Takahashi, D. Kong, M. Michihata, K. Takamasu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 68 Issue: 1 Pages: 527-530

    • DOI

      10.1016/j.cirp.2019.04.072

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Journal Article] Fundamental study on micro-scaled additive manufacturing using optical potential induced by optical radiation pressure by Bessel beam2019

    • Author(s)
      MICHIHATA Masaki、HAYASHI Masahiro、YOKEI Makoto、TAKAMASU Kiyoshi、TAKAHASHI Satoru
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 85 Issue: 880 Pages: 19-00244-19-00244

    • DOI

      10.1299/transjsme.19-00244

    • NAID

      130007772974

    • ISSN
      2187-9761
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Journal Article] Development of measuring system of whispering gallery mode resonances for evaluating a diameter of microsphere2019

    • Author(s)
      MICHIHATA Masaki、KOBAYASHI Yumeki、CHU Bohuai、TAKAMASU Kiyoshi、TAKAHASHI Satoru
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 85 Issue: 880 Pages: 19-00226-19-00226

    • DOI

      10.1299/transjsme.19-00226

    • NAID

      130007772938

    • ISSN
      2187-9761
    • Language
      Japanese
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Journal Article] Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats2019

    • Author(s)
      Masui Shuzo、Torii Yuki、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Optics Express

      Volume: 27 Issue: 22 Pages: 31522-31522

    • DOI

      10.1364/oe.27.031522

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18J21820, KAKENHI-PROJECT-15H02214
  • [Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018

    • Author(s)
      Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 1 Pages: 32-38

    • DOI

      10.1007/s41871-018-0004-0

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17H04900, KAKENHI-PROJECT-26249006
  • [Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018

    • Author(s)
      Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 2 Pages: 112-124

    • DOI

      10.1007/s41871-018-0013-z

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
  • [Journal Article] In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference Near Critical Angle2018

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 31 Issue: 3 Pages: 441-446

    • DOI

      10.2494/photopolymer.31.441

    • NAID

      130007481467

    • ISSN
      0914-9244, 1349-6336
    • Year and Date
      2018-06-25
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018

    • Author(s)
      Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 29 Issue: 5 Pages: 054011-054011

    • DOI

      10.1088/1361-6501/aab008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
  • [Journal Article] One-shot stereolithography for biomimetic micro hemisphere covered with relief structure2018

    • Author(s)
      Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Precision Engineering

      Volume: 54 Pages: 353-360

    • DOI

      10.1016/j.precisioneng.2018.07.004

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
  • [Journal Article] Precise diameter measurement of a microsphere based on polarization analysis of whispering gallery mode resonance2017

    • Author(s)
      Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya
    • Journal Title

      Applied Mechanics and Materials

      Volume: -

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Journal Article] Diameter measurement of a microsphere based on analysis of resonant wavelengths of whispering gallery modes2017

    • Author(s)
      Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya
    • Journal Title

      Journal of Engineering Manufacture

      Volume: -

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Journal Article] Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer2016

    • Author(s)
      Yasuhiro Takaya, Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 65 Pages: 467-470

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Journal Article] Evanescent Light Exposing System under Nitrogen Purge for Nano- Stereolithography2016

    • Author(s)
      Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Journal Title

      Procedia CIRP

      Volume: 42 Pages: 77-80

    • DOI

      10.1016/j.procir.2016.02.192

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Journal Article] Fundamental Study on Novel On-Machine Measurement Method of a Cutting Tool Edge Profile with a Fluorescent Confocal Microscopy2016

    • Author(s)
      Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
    • Journal Title

      Int. J. of Automation Technology

      Volume: 10 Pages: 106-113

    • NAID

      130007674010

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Journal Article] Fundamental Study on Novel On-Machine Measurement Method of a Cutting Tool Edge Profile with a Fluorescent Confocal Microscopy2016

    • Author(s)
      Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
    • Journal Title

      International Journal of Automation Technology

      Volume: 10 Issue: 1 Pages: 106-113

    • DOI

      10.20965/ijat.2016.p0106

    • NAID

      130007674010

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2016-01-05
    • Language
      English
    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Journal Article] Wide-range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere near Surface using Chromatic Confocal Sensor2015

    • Author(s)
      Shin-ichi Ueda, Masaki Michihata, Terutake Hayashi and Yasuhiro Takaya
    • Journal Title

      Int. J. of Optmechatronics

      Volume: 9 Issue: 2 Pages: 131-140

    • DOI

      10.1080/15599612.2015.1034901

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014

    • Author(s)
      Masaki Michihata, Ayano Fukui, Terutake Hayashi, Yasuhiro Takaya
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 55 Issue: 1 Pages: 469-472

    • DOI

      10.1016/j.cirp.2014.02.002

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第1報)-蛍光DNAプローブを用いた回転拡散係数測定システムの開発-2014

    • Author(s)
      石崎佑樹,林 照剛,道畑正岐,高谷裕浩
    • Journal Title

      精密工学会誌

      Volume: 2 Pages: 214-219

    • NAID

      130003394534

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第1報)-蛍光DNAプローブを用いた回転拡散係数測定システムの開発-2014

    • Author(s)
      石崎佑樹,林照剛,道畑正岐,高谷裕浩
    • Journal Title

      精密工学会誌

      Volume: VOl.80, No.3 Pages: 214-219

    • NAID

      130003394534

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014

    • Author(s)
      M. Michihata, T. Hayashi, A. Adachi, Y. Takaya
    • Journal Title

      CIRP Annals

      Volume: vol. 63, no. 1(in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Journal Article] ポリグリセロール修飾ナノダイヤモンドを用いた銅膜の平坦化加工に関する研究2014

    • Author(s)
      村井亮太,高谷裕浩,林照剛,道畑正岐,小松直樹
    • Journal Title

      砥粒加工学会誌

      Volume: Vol.58, No.2 Pages: 97-102

    • NAID

      130004835699

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Journal Article] Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation2013

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Ryota Murai, Kazumasa Kano
    • Journal Title

      Annals of the CIRP

      Volume: Vol.62, Issue 1 Issue: 1 Pages: 571-574

    • DOI

      10.1016/j.cirp.2013.03.019

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Journal Article] Development of nanoparticle sizing system using fluorescence polarization2013

    • Author(s)
      Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Fonog Lee
    • Journal Title

      ACTA IMEKO

      Volume: Vol. 2, No. 2 Pages: 67-72

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Journal Article] New technique for single-beam gradient-force optical trapping in air2013

    • Author(s)
      M.Michihata, T.Yoshikane, T.Hayashi, Y.Takaya
    • Journal Title

      International journal of Optomechatronics

      Volume: 7 Issue: 1 Pages: 46-59

    • DOI

      10.1080/15599612.2012.760122

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Journal Article] Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarization2012

    • Author(s)
      Terutake Hayashi, Yasuhiro Takaya and Masaki Michihata
    • Journal Title

      International Journal of Nanomanufacturing

      Volume: Vol. 8, Nos. 1/2 Pages: 54-56

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Journal Article] Dimensional measurement of microform with high aspect ratio using an opticaly controlled particle with standing wave scale sensing2012

    • Author(s)
      Yasuhiro Takaya, Michihata, Terutake Hayashi, Taisuke Washitani
    • Journal Title

      Annals of the CIRP

      Volume: Vol.61, Issue 1 Pages: 479-482

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Journal Article] Chemical mechanical polishing of patterend copper wafer surface using water-soluble fullerenol slurry2011

    • Author(s)
      Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata
    • Journal Title

      Annals of the CIRP

      Volume: Vol.60 Pages: 567-570

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Journal Article] Chemical mechanical polishing of patterned copper wafer surface using water-soluble fullerenol slurry2011

    • Author(s)
      Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata, Ken Kokubo
    • Journal Title

      CIRP Annals-Manufacturing Technology

      Volume: Vol.60, Issue1 Pages: 567-570

    • Data Source
      KAKENHI-PROJECT-21360064
  • [Patent] レーザ加工装置、レーザ加工システム、及びレーザ加工方法2023

    • Inventor(s)
      高橋哲、鷲尾涼太、増田秀征、増井周造、門屋祥太郎、道畑正岐
    • Industrial Property Rights Holder
      高橋哲、鷲尾涼太、増田秀征、増井周造、門屋祥太郎、道畑正岐
    • Industrial Property Rights Type
      特許
    • Filing Date
      2023
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Patent] レーザ加工装置、レーザ加工システム、及びレーザ加工方法2023

    • Inventor(s)
      高橋哲、鷲尾涼太、門屋祥太郎、道畑正岐、増井周造
    • Industrial Property Rights Holder
      高橋哲、鷲尾涼太、門屋祥太郎、道畑正岐、増井周造
    • Industrial Property Rights Type
      特許
    • Filing Date
      2023
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Patent] 母型の製造方法2016

    • Inventor(s)
      高橋哲,鈴木裕貴,鈴木邦和,道畑正岐,高増潔,田中大直,西村涼
    • Industrial Property Rights Holder
      東京大学,JXエネルギー株式会社
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-08-17
    • Overseas
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Patent] レーザー加工装置,レーザー加工方法及び加工物の製造方法2014

    • Inventor(s)
      林 照剛,高谷裕浩,道畑正岐
    • Industrial Property Rights Holder
      林 照剛,高谷裕浩,道畑正岐
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014
    • Data Source
      KAKENHI-PROJECT-25289017
  • [Presentation] ウォータガイドレーザによる超高アスペクト比微細穴加工に関する研究(第2報) -レーザパルス由来のジェット乱れの発見と高品質加工への応用-2023

    • Author(s)
      鷲尾涼太,宇井象一 ,大澤真悠子,増井周造,門屋祥太郎,道畑正岐,高橋哲
    • Organizer
      2023年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] ウォータガイドレーウォータガイドレーザ加工による機能表面の創製に関する研究(第3報)-サンプル沈水加工法による表面構造創製メカニズムの検討-2023

    • Author(s)
      大澤真悠子,宇井象一,鷲尾涼太、門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2023年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] 過酷環境下にて動作する高安定アライメントモニターの開発(第2報) -偏波保持光学系による干渉計性能の改善2023

    • Author(s)
      久米, 三部,道畑,高橋
    • Organizer
      2023年度精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] ウォータガイドレーザ加工現象のインプロセス観察に関する研究 -被削材内部の加工現象の高速顕微観察-2023

    • Author(s)
      宇井象一, 大澤真悠子, 鷲尾涼太, 門屋祥太郎, 道畑正岐, 高橋哲
    • Organizer
      2023年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第11報) ー空間光位相変調による液相プローブ高感度検出ー2022

    • Author(s)
      管 一兆, 増井 周造, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21K18668
  • [Presentation] Near-field Phase Analysis of Periodic Microgroove Structure for Metasurface Design based on FDTD Simulation2022

    • Author(s)
      管一兆,増井周造,門屋祥太郎,道畑正岐,高橋哲,岩見健太郎,稲秀樹
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] Extending maximum working distance in water-jet guided laser processing2022

    • Author(s)
      Ryota Washio, Shusei Masuda, Shuzo Masui, Shotaro Kadoya, Masaki Michihata
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE) 2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] Fabrication of functional surface using water jet guided laser processing -Observation of lateral intensity distribution in water jet-2022

    • Author(s)
      Mayuko Osawa, Shusei Masuda, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE) 2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第8報) -試作光学モジュールの評価2022

    • Author(s)
      久米, 三部,道畑,高橋
    • Organizer
      2022年度精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第8報) ーストレプトアビジン,ビオチン相互作用を用いたマイクロ粒子接着ー2022

    • Author(s)
      増井 周造, 門屋 祥太郎, 道畑 正岐, 小阪 高広, 山口 哲志, 岡本 晃充, 高橋 哲
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K21913
  • [Presentation] Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis2022

    • Author(s)
      Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi
    • Organizer
      Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] ウォーターガイドレーザ加工法のガイドウォータ光学特性2022

    • Author(s)
      鷲尾涼太,増田秀征,増井周造,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      第14回日本機械学会生産加工・工作機械部門講演会
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] 微細構造基板を利用した超解像イメージングに関する研究(第6報)-機械学習による画像再構成における最適教師データの検討-2022

    • Author(s)
      門屋祥太郎,市川廉,増井周造,西川正俊,道畑正岐,高橋哲
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 過酷環境下にて動作する高安定アライメントモニターの開発-基準エタロンの自由スペクトル領域の評価と安定化2022

    • Author(s)
      久米, 三部,道畑,高橋
    • Organizer
      2022年度精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] Evaluation of a free spectral range of an etalon for a reference of an alignment monitor2022

    • Author(s)
      T. Kume, T. Mibe, M. Michihata and S. Takahashi
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] PROPOSAL AND FUNDAMENTAL VERIFICATION OF OPTICAL DEPTH MEASUREMENT FOR PERIODIC FINE STRUCTURES2022

    • Author(s)
      Shotaro Kadoya, Yizhao Guan,Shiwei Ye, Yosho Kanda, Masaki Michihata, Satoru Takahashi
    • Organizer
      the 2022 International Symposium on Flexible Automation, ISFA2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator2022

    • Author(s)
      Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihata and Satoru Takahashi
    • Organizer
      The 11th Global Conference on Materials Science and Engineering (CMSE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K18668
  • [Presentation] ウォータガイドレーザ加工による機能表面の創製に関する研究(第2報)-水中加工法の提案-2022

    • Author(s)
      大澤真悠子,増田秀征,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2022 年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-23K22643
  • [Presentation] コヒーレント結像型構造照明顕微法における機械学習を用いた画像再構成の基礎的検討2022

    • Author(s)
      友藤康司,門屋祥太郎,道畑正岐,高橋哲
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy2021

    • Author(s)
      Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
    • Organizer
      Optics and Photonics International Congress 2021
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] Evaluation of the Free Spectral Range of an Etalon by Referring an Optical Frequency Comb2021

    • Author(s)
      T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Centure (LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] Optical adhesion of photocurable emulsion droplets using laser trapping2021

    • Author(s)
      Shuzo Masui, Wakana Endo, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
    • Organizer
      SPIE Optics + Photonics 2021
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K21913
  • [Presentation] Interferometer Adopting a Ball Lens Both As a Beam Collimator and a Reflector2021

    • Author(s)
      T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
    • Organizer
      XXIII IMEKO World Congress “Measurement: sparking tomorrow’s smart revolution”, TC14-4-01
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] The FDTD analysis for dark field in-process depth measurements of fine microgrooves2021

    • Author(s)
      Yizho Guan, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
    • Organizer
      XXIII World Congress of the International Measurement Confederation
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] The FDTD analysis of near-field response for microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy2021

    • Author(s)
      Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
    • Organizer
      ASME 2021 16th International Manufacturing Science and Engineering Conference 60409
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] ファブリーペロー共振器を用いたマイクロCMMのプローブ径補正用ゲージの研究(第1報) -二平面間の距離測定-2021

    • Author(s)
      加藤千聖,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2021

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第6報) -ボールレンズを用いた干渉計2021

    • Author(s)
      久米, 三部,安田,道畑,高橋
    • Organizer
      2021年度精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 定在波照明における微細開口の近接場光応答解析(第2報)The FDTD analysis of near-field response for microgroove structure with standing wave illumination ーThe relationship of microgroove depth and near-field phase responseー2021

    • Author(s)
      管 一兆, 久米 大将, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第7報) ーマイクロレジン液滴の硬化モニタリングー2021

    • Author(s)
      増井 周造, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K21913
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第7報)-光周波数コムを基準としたエタロンFSRの評価2021

    • Author(s)
      久米, 三部,道畑,高橋
    • Organizer
      2021年度精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2021

    • Author(s)
      村上宗二朗,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Presentation] 微細構造基板を利用した超解像イメージングに関する研究(第5報) ―アノード酸化Al基板による構造照明特性の解析―2021

    • Author(s)
      市川廉,増井周造,久米大将,西川正俊,門屋祥太郎,道畑正岐,高橋哲
    • Organizer
      2021 年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 微細構造基板を利用した超解像イメージングに関する研究(第4報) ーディープラーニングによる再構成能力の評価ー2021

    • Author(s)
      市川 廉, 増井 周造, 久米 大将, 西川 正俊, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 半導体レーザと外部共振器機構を用いた高精度長さ計測(第1報) -計測手法提案-”2021

    • Author(s)
      合田周平,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2020

    • Author(s)
      村上宗二郎,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第4報) -ハイスピードカメラによる加工原理の検討-2020

    • Author(s)
      代慶 真,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit2020

    • Author(s)
      Yosho Kanda, Hiromasa Kume, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      18th International Conference on Precision Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-20H02040
  • [Presentation] コヒーレント結像型SIM実現を目指した微細構造表面のFDTD光学応答解析2020

    • Author(s)
      管 一兆, 久米 大将, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      日本光学会年次学術講演会 Optics & Photonics Japan 2020
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 回折限界を超えた表面微細周期構造の光学式非破壊深さ計測手法2020

    • Author(s)
      神田 曜昭, 久米 大将, 門屋 祥太郎, 道畑 正岐, 高橋 哲
    • Organizer
      第45回光学シンポジウム
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 微細構造基盤を利用した超解像イメージングに関する研究(第3報) ーディープラーニングによる再構成結果の空間周波数領域における評価ー2020

    • Author(s)
      市川 廉, 久米 大将, 西川 正俊, 門屋 祥太郎, 道畑 正岐, 髙橋 哲
    • Organizer
      2020年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第5報)- エタロンで圧縮された光周波数コムのパルス繰返し周波数の校正2020

    • Author(s)
      久米, 三部,安田,道畑,高橋
    • Organizer
      2020年度精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] Spatial-frequency-based evaluation of image reconstruction by structured-illumination microscopy with deep learning2020

    • Author(s)
      Ren Ichikawa, Hiromasa Kume, Masatoshi Nishikawa, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      18th International Conference on Precision Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第6報) -光放射圧遠隔操作による一体化連結構造の創成-2020

    • Author(s)
      圓道和奏,増井周造,門屋祥太郎,道畑正岐,高橋哲
    • Organizer
      2021年度春期精密工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K21913
  • [Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2020

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Comparison for Pulse Interval Calibration of an Optical Frequency Comb Compressedby an Etalon2020

    • Author(s)
      T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
    • Organizer
      The 18th International Conference on Precision Engineering (ICPE2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第4報) -圧縮されたパルス間隔の基準干渉計を用いた校正2020

    • Author(s)
      久米,三部,安田,道畑,高増
    • Organizer
      2020年度精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究2020

    • Author(s)
      道畑正岐,代慶 真,門屋祥太郎,高増 潔,高橋 哲
    • Organizer
      日本機械学会 2020年度年次大会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] 定在波照明を用いた表面微細加工構造の長作動距離超解像欠陥検査2019

    • Author(s)
      久米大将,道畑正岐,高増潔,高橋哲
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography2019

    • Author(s)
      Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahash
    • Organizer
      Proceedings of the 19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 微小球光共振を用いた形状標準のナノ精度計測2019

    • Author(s)
      道畑正岐
    • Organizer
      第153回微小光学研究会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation2019

    • Author(s)
      Masaki Michihata, Zheng Zhao, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII2019
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第2報) -計測精度改善の検討-2019

    • Author(s)
      船岩大輝,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 微細構造基板を利用した超解像イメージングに関する研究(第2報)-ディープラーニングによる再構成能力の評価-2019

    • Author(s)
      市川廉,久米大将,道畑正岐,高増潔,高橋哲,西川正俊
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] A novel optical super-resolution microscopy for coherent imaging system for micro-structured surface inspection2019

    • Author(s)
      Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第5報) -マイクロレジンの空間位置制御によるマイクロ粒子アセンブリ-2019

    • Author(s)
      福井 健太, 増井 周造, 道畑 正岐, 高増 潔, 高橋 哲
    • Organizer
      2020年度春期精密工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K21913
  • [Presentation] Pulse Interval Calibration of an Optical Frequency Comb Compressed by an Etalon2019

    • Author(s)
      久米,三部,安田,道畑,高増
    • Organizer
      The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] Experimental investigation on laser additive processing method for nanostructures based on optical trapping potential2019

    • Author(s)
      Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN),
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Optical trapping of airborne droplet for laser fabrication of 3-dimensional structure based on optical trapping potential using radially polarized beam2019

    • Author(s)
      Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      Optical Technology and Measurement for Industrial Applications Conference(OPTM)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Pulse Interval of an Optical Frequency Comb Compressed by an Etalon2019

    • Author(s)
      久米,三部,安田,道畑,高増
    • Organizer
      The 14th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII 2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第2報) -ラジアル偏光ビームを用いた空気中ミスト粒子の光トラップ効率の向上-2019

    • Author(s)
      代慶 真,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2019年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Sensing near-field light distribution for microsphere measurement based on whispering gallery mode2019

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII2019
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 光共振損失を用いたSPMプローブチップ評価に関する研究2019

    • Author(s)
      津田信道,儲 博懐,増井周造,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] System development for microsphere measurement based on whispering gallery mode resonance2019

    • Author(s)
      Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMQC2019
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第3報) -液滴を用いた構造化原理の実験的検討-2019

    • Author(s)
      代慶 真,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2019年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] 光周波数コムを用いた高精度アライメントモニター(第3報) -リンギングを用いない光周波数コムパルス間隔の校正2019

    • Author(s)
      久米,三部,安田,道畑,高増
    • Organizer
      2019年度精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19H01930
  • [Presentation] 光共振を利用したマイクロ球形状のナノ精度計測2019

    • Author(s)
      道畑正岐,小林夢輝,趙 正,儲 博懐,高増 潔,高橋 哲
    • Organizer
      レーザー学会第39回年次大会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Coherent optical microscopy for micro-structured surface inspection beyond diffraction limit2019

    • Author(s)
      Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H02036
  • [Presentation] 2光束照明における光散乱検出に基づくマイクロ光ファイバー直径計測の基礎的研究2019

    • Author(s)
      道畑正岐,趙 正,高増 潔,高橋 哲
    • Organizer
      日本機械学会 2019年度年次大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror2019

    • Author(s)
      S. Masui, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      8th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Numerical analysis of near-field light intensity of whispering gallery mode on microsphere surface with SNOM probe2019

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      OPTM2019
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 臨界角照明を用いたナノ光造形硬化樹脂のインプロセス計測(基本原理の検証)2018

    • Author(s)
      道畑正岐,孔徳卿,高増潔,高橋哲
    • Organizer
      日本機械学会 2018年度年次大会
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Investigation of super-resolution microscopy by use of a nano-patterned substrate2018

    • Author(s)
      Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Measurement of a microsphere diameter with a picometer resolution using whispering gallery mode resonances2018

    • Author(s)
      Masaki Michihata
    • Organizer
      International Symposium on Optoelectronic Technology and Application (OTA 2018)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第 4 報)一定在波制御によるマイクロ粒子整列・搬送に関する研究一2018

    • Author(s)
      藤原和,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Dielectric microsphere measurement using whispering gallery mode resonance2018

    • Author(s)
      Masaki Michihata
    • Organizer
      10th International Symposium on Precision Engineering Measurements and Instrument (ISPEMI 2018)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第 3 報)一FDTD 法によるマイクロ粒子の整理駆動現象の解明一2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018

    • Author(s)
      D. Kong, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究 (第1報) -ベッセルビームによる加工原理検討に向けた装置開発-2018

    • Author(s)
      林 政洋,林 晃平,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会春季大会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第2 報)-サブ波長表面構造の造形と光学特性評価-,2018

    • Author(s)
      増井周造,鈴木裕貴,道畑正岐,高増潔,高橋哲,柴沼俊彦,田中大直
    • Organizer
      2018 年度精密工学会春季大会学術講演会,中央大学,2018,K08
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018

    • Author(s)
      Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Whispering gallery mode 共振を用いたマイクロ球径計測 -比較計測による計測精度評価-2018

    • Author(s)
      道畑正岐,小林夢輝,儲 博懐,高増 潔,高橋 哲
    • Organizer
      第12回日本機械学会生産加工・工作機械部門講演会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances2018

    • Author(s)
      Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      The 1st JSPE affiliate workshop -Metrology and measurement
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source2018

    • Author(s)
      Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] WGM共振を利用した微小球の直径計測(第11報) -共振波長解析に基づく半径モード番号の推定-2018

    • Author(s)
      小林夢輝,趙 正,儲 博懐,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] Analyzing tapered fiber - microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance2018

    • Author(s)
      Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      International Conference on Precision Engineering (ICPE) 2018
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 光放射圧ポテンシャルによる局所化を用いた金属三次元微細構造創成 - 金属ナノ粒子局所化の確率解析 -2018

    • Author(s)
      林 晃平,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control - Analysis on handling performance of microparticles based on near-surface light wave -2018

    • Author(s)
      Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] WGM共振を利用した微小球の直径計測(第12報) -共振波長計測安定化に向けた測定装置の高度化-2018

    • Author(s)
      小林夢輝,儲 博懐,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会秋季大会
    • Data Source
      KAKENHI-PROJECT-18K18803
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究 -ナノ粒子の2次元局所化性能の評価-2018

    • Author(s)
      林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      第12回日本機械学会生産加工・工作機械部門講演会
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] Basic study on laser additive processing for nanostructures based on optical trapping potential2018

    • Author(s)
      Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17H04900
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第 3 報)一うなりによる干渉強度分布の変調特性検討一2018

    • Author(s)
      増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第2 報)-界面近接光波の任意制御によるマイクロ粒子整理・搬送システムの検討-,2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018 年度精密工学会春季大会学術講演会,中央大学,2018,P33
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第3報)-FDTD法によるマイクロ粒子の整理駆動現象の解明-2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018 年度精密工学会秋季大会学術講演会,函館,2018
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第1 報)-RCWA 法を用いた光学特性解析-,2017

    • Author(s)
      増井周造,鈴木裕貴,道畑正岐,高増潔,高橋哲
    • Organizer
      -,2017 年度精密工学会秋季大会学術講演会,大阪大学,2017,L23
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      Conference on Lasers and Electro-Optics (CLEO2017)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2017-05-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第26報)ー多光束干渉によるミリオーダ領域のサブミクロン表面微細構造創製ー2017

    • Author(s)
      鈴木裕貴,松本侑己,道畑正岐,高増潔,高橋哲
    • Organizer
      2017年度精密工学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2017-03-13
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      CLEO2017, San Jose, USA
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第27報)-エバネッセント光による面内形状制御性の解析-2017

    • Author(s)
      松本侑己,鈴木裕貴,道畑正岐,高増潔,高橋哲,工藤宏人
    • Organizer
      2017年度精密工学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2017-03-13
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017

    • Author(s)
      Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] WGM 共振を利用した微小球の直径計測(第8報) -有限要素法を用いたWGM結合解析-2017

    • Author(s)
      趙 正,儲 博懐,林 晃平,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2017年度精密工学会学術講演会春季大会
    • Place of Presentation
      慶應義塾大学(神奈川県)
    • Year and Date
      2017-03-13
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] WGM 共振を利用した微小球の直径計測(第7報) -共振波長の精密計測-2017

    • Author(s)
      儲 博懐,道畑正岐,林 晃平,高増 潔,高橋 哲
    • Organizer
      2017年度精密工学会学術講演会春季大会
    • Place of Presentation
      慶應義塾大学(神奈川県)
    • Year and Date
      2017-03-13
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] Whispering gallery mode共振を利用したマイクロ球直径計測 -楕円体モデルの構築-2017

    • Author(s)
      林 晃平,儲 博懐,趙 正,道畑正岐,高増 潔,高橋 哲
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] 光触媒ナノ加工工具に関する基礎的研究(第9報)-ナノ粒子位置同定法の検討-2016

    • Author(s)
      増井周造・堀田陽亮・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究―エバネッセント露光用光硬化性樹脂の開発―2016

    • Author(s)
      松本侑己,鈴木裕貴,道畑正岐,高増潔,高橋哲
    • Organizer
      日本機械学会 第11回生産加工・工作機械部門講演会
    • Place of Presentation
      愛知
    • Year and Date
      2016-10-22
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] WGM 共振を利用した微小球の直径計測(第 6 報) -近似式を用いた屈折率推定法の検討-2016

    • Author(s)
      儲 博懐,道畑正岐,林 晃平,高増 潔
    • Organizer
      2016年度精密工学会学術講演会秋季大会
    • Place of Presentation
      茨城大学(茨城県)
    • Year and Date
      2016-09-06
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第25報)ー機能性評価に向けた表面微細構造創製装置の開発ー2016

    • Author(s)
      鈴木裕貴,松本侑己,道畑正岐,高増潔,高橋哲
    • Organizer
      2016年度精密工学会春秋学術講演会
    • Place of Presentation
      茨城
    • Year and Date
      2016-09-06
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      International Symposium on Optomechatronic Technology 2016
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2016-11-07
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 蛍光共焦点法による工具刃先形状の機上計測に関する研究 (第2報) 切削液からの蛍光の共焦点検出2016

    • Author(s)
      丸野兼治,道畑正岐,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016

    • Author(s)
      増井周造・堀田陽亮・道畑正岐・高増 潔・高橋 哲
    • Organizer
      日本機械学会2016年度年次大会
    • Place of Presentation
      九州
    • Year and Date
      2016-09-11
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      ASPE2016 Annual Meeting
    • Place of Presentation
      Portland, USA
    • Year and Date
      2016-10-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Whispering gallery mode共振を用いたマイクロ球径計測 -偏光に着目した屈折率校正法の提案-2016

    • Author(s)
      道畑正岐,高増 潔,高橋 哲
    • Organizer
      日本機械学会 2016 年度年次大会
    • Place of Presentation
      九州大学(福岡県)
    • Year and Date
      2016-09-11
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究(第2報)-液相内における工具創製の実験的検討-2016

    • Author(s)
      堀田陽亮・儲 博懐・増井周造・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] WGM共振を利用した微小球の直径計測(第5報) -光ファイバによるWGM励起の最適化-2016

    • Author(s)
      川嵜彬史,道畑正岐,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学(東京都)
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      31st Annual Meeting of the American Society for Precision Engineering
    • Place of Presentation
      Portland, Oregon, USA
    • Year and Date
      2016-10-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 光触媒ナノ工具に関する基礎的研究(第10報)-銀担持による工具チップ性能の向上-2016

    • Author(s)
      儲 博懐・堀田陽亮・増井周造・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究(第3報) ―レーザ捕捉微小球レンズの試料面近傍における位置制御―2016

    • Author(s)
      山口悠希,道畑正岐,水谷康弘,高谷裕浩
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016

    • Author(s)
      増井周造,堀田陽亮,道畑正岐,高増潔,高橋哲
    • Organizer
      日本機械学会年次大会2016
    • Place of Presentation
      福岡
    • Year and Date
      2016-09-12
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 切削液の蛍光共焦点検出を利用した工具刃先摩耗形状計測に関する基礎研究2016

    • Author(s)
      高谷裕浩,丸野兼治,道畑正岐,水谷康弘
    • Organizer
      日本機械学会 2016 年度年次大会
    • Place of Presentation
      九州大学(福岡県)
    • Year and Date
      2016-09-11
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究(第2報) ―レーザトラッピングされたマイクロ球によるイメージング―2016

    • Author(s)
      金鐘剛,道畑正岐,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      Proc. International Symposium on Optomechatronic Technologies (ISOT2016)
    • Place of Presentation
      板橋市民会館(東京都)
    • Year and Date
      2016-10-07
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] 光放射圧プローブによる表面微細形状計測に関する研究2015

    • Author(s)
      金 鐘剛,道畑正岐,高谷裕浩
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学(京都府・京都市)
    • Year and Date
      2015-06-23
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Accurate diameter measurement of microsphere based on analysis for polarization of whispering gallery mode resonance2015

    • Author(s)
      Akifumi Kawasaki, Masaki Michihata, Atsushi Adachi, Yasuhiro Takaya
    • Organizer
      12th International symposium of measurement technology and intelligent instruments (ISMTII)
    • Place of Presentation
      台北(台湾)
    • Year and Date
      2015-09-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究(第1報)-姿勢制御ユニット創製に関する実験的検討-2015

    • Author(s)
      堀田陽亮・儲 博懐・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2015年度精密工学会秋季学術講演会
    • Place of Presentation
      東北
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] Experimental study on measurement the surface topography by laser trapping probe2015

    • Author(s)
      Jonggang Kim, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Harbin (China)
    • Year and Date
      2015-08-15
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 蛍光共焦点法による工具刃先形状の機上計測に関する研究(第一報)水平面における切削液の油膜の基礎検討2015

    • Author(s)
      丸野兼治,道畑正岐,水谷康弘,高谷裕浩
    • Organizer
      2015年度精密工学会学術講演会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Presentation] 表面テクスチャ観察に用いる光放射圧制御微小球レンズの運動解析2015

    • Author(s)
      山口悠希,道畑正岐,高谷裕浩
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学(京都府・京都市)
    • Year and Date
      2015-06-23
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale using chromatic system2015

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda
    • Organizer
      XXII MEKO World Congress
    • Place of Presentation
      Prague (Czech Republic)
    • Year and Date
      2015-08-30
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Analysis of chemical reaction in Cu-CMP with reactive nanoparticles based on Raman spectra enhanced by surface plasmon2015

    • Author(s)
      Masafumi ASAHI, Yasuhiro TAKAYA, Masaki MICHIHATA
    • Organizer
      Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク (京都府・京都市)
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630027
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状 のスキャニング測定 (第5報) ―定在場スケール内挿によるスキャニング測定―2015

    • Author(s)
      上田真一,高谷裕浩,道畑正岐
    • Organizer
      2015年度精密工学会学術講演会春季大会
    • Place of Presentation
      東洋大学 (東京都)
    • Year and Date
      2015-03-17
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 超高精度 WGM 応用マイクロ球測定の新展開2015

    • Author(s)
      道畑正岐,川嵜彬史,高谷裕浩
    • Organizer
      2015年度精密工学会学術講演会秋季大会ユネスコ国際光年記念シンポジウム
    • Place of Presentation
      東北大学(宮城県)
    • Year and Date
      2015-09-04
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] Measurement of micro-sphere diameter based on whispering gallery mode2015

    • Author(s)
      Masaki Michihata, Akifumi Kawasaki, Adachi Atsushi, Yasuhiro Takaya
    • Organizer
      IMEKO XXI world congress
    • Place of Presentation
      プラハ(チェコ)
    • Year and Date
      2015-08-30
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05505
  • [Presentation] On-machine measurement of cutting tool edge profile by detecting fluorescence from cutting fluid2015

    • Author(s)
      Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
    • Organizer
      International Symposium on Optomechatronic Technologies (ISOT2015)
    • Place of Presentation
      Neuchatel, Switzerland
    • Year and Date
      2015-10-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13847
  • [Presentation] 表面テクスチャ観察に用いる微小球レンズの光放射圧運動制御に関する研究2015

    • Author(s)
      山口悠希,高谷裕浩,道畑正岐
    • Organizer
      2014年度日本機械学会関西学生会卒業研究発表講演会
    • Place of Presentation
      京都大学 (京都市)
    • Year and Date
      2015-03-14
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015

    • Author(s)
      Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu and Satoru Takahashi
    • Organizer
      The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
    • Place of Presentation
      Harbin, China
    • Year and Date
      2015-08-15
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02214
  • [Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第3 報) -DNA を用いたナノ粒子計測プローブの開発-2014

    • Author(s)
      林 照剛,石崎佑樹,道畑正岐,高谷裕浩,田中慎一
    • Organizer
      2014年度精密工学会春期全国大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第二報) -コヒーレントフォノン励起状態の時間分解計測-2014

    • Author(s)
      林 照剛, 大菊崇弘, 道畑正岐, 高谷裕浩
    • Organizer
      精密工学会春期全国大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-25289017
  • [Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第二報) -粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討-2014

    • Author(s)
      石崎佑樹,林照剛,道畑正岐,高谷裕浩
    • Organizer
      2014年度精密工学会春期全国大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] WGM共振を利用した微小球の直径計測 (第2報) -WGM波長スペクトルを用いた球径の推定方法-2014

    • Author(s)
      道畑正岐,足立 篤,林 照剛,高谷裕浩
    • Organizer
      2014年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第三報) -テラヘルツ帯域でのエネルギー伝達機構の検討-2014

    • Author(s)
      林 照剛, 大島玄喜, 道畑正岐, 高谷裕浩
    • Organizer
      精密工学会春期全国大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-25289017
  • [Presentation] Measurement of axial position of a microsphere using chromatic confocal system for probe system based on the laser trapping with the standing wave scale2014

    • Author(s)
      Shin-ichi Ueda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      International Symposium on Optomechatronic Technologies 2014
    • Place of Presentation
      University of Washington (Seattle, USA)
    • Year and Date
      2014-11-06
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] フォトニックナノジェットを利用した表面微細加工に関する研究2014

    • Author(s)
      上野原努,道畑正岐,高谷裕浩,林 照剛
    • Organizer
      2014年度砥粒加工学会学術講演会 (ABTEC2014)
    • Place of Presentation
      岩手大学(岩手市)
    • Year and Date
      2014-09-11
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第 4 報) ~マイクロ球光軸方向位置の共焦点計測~2014

    • Author(s)
      上野原努,道畑正岐,高谷裕浩,林 照剛
    • Organizer
      2014年度精密工学会学術講演会秋季大会
    • Place of Presentation
      鳥取大学 (鳥取市)
    • Year and Date
      2014-09-16
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析2014

    • Author(s)
      旭真史,高谷裕浩,林照剛,道畑正岐
    • Organizer
      日本機械学会関西支部学生員卒業研究発表講演会
    • Place of Presentation
      大阪府立大学(堺市)
    • Year and Date
      2014-03-17
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] 表面プラズモン励起ラマン計測による水酸化フラーレン分子加工原理に関する研究2014

    • Author(s)
      村井亮太,高谷裕浩,林照剛,道畑正岐
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学(東京都)
    • Year and Date
      2014-03-20
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第二報)-粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討-2014

    • Author(s)
      石崎佑樹,林照剛,道畑正岐,高谷裕浩
    • Organizer
      2014年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] WGM共振を利用した微小球の直径計測(第2報) -WGM波長スペクトルを用いた球径の推定方法-2014

    • Author(s)
      道畑正岐,足立篤,林照剛,高谷裕浩
    • Organizer
      2014年度精密工学会学術講演会春季大会講演論文集
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第3報)-DNAを用いたナノ粒子計測プローブの開発-2014

    • Author(s)
      林照剛,石崎佑樹,道畑正岐,高谷裕浩,田中慎一
    • Organizer
      2014年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京大学
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] Study on material removal mechanism by reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy2013

    • Author(s)
      Ryota Murai, Yasuhiro Yakaya, Terutake Hayashi and Masaki Michihata
    • Organizer
      5th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Taipei(Taiwan)
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] Study on material removal mechanism by reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy2013

    • Author(s)
      Ryota Murai, Yasuhiro Yakaya, Terutake Hayashi and Masaki Michihata
    • Organizer
      5^<th > International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Taipei(Taiwan)Howard Civil International Centre
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013

    • Author(s)
      Yuki Ishizaki,Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      ISMQC2013
    • Place of Presentation
      University, Cracow, Poland (Best paper award)
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] Study on surface processing by using femto-second pulse train beam with excitation of coherent phonon2013

    • Author(s)
      Terutake Hayashi, Yusuke Fukuta, Masaki Michihata, and Yasuhiro Takaya
    • Organizer
      28th Annual Meeting of the American Society for Precision Engineering, (ASPE2013)
    • Place of Presentation
      St. Paul, Minnesota, USA,
    • Data Source
      KAKENHI-PROJECT-25289017
  • [Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013

    • Author(s)
      Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
    • Organizer
      International Symposium on Optomechatronic Technologies (ISOT2013)
    • Place of Presentation
      Jeju island, South Korea
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第2報)―定在場中でのプローブ球の挙動解析―2013

    • Author(s)
      鷲谷泰佑,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013

    • Author(s)
      峨家諒介、道畑正岐、林 照剛、高谷裕浩
    • Organizer
      2013年度精密工学会学術講演会
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] WGモード解析に基づくマイクロプローブの直径計測原理に関する研究2013

    • Author(s)
      足立篤,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2012年度日本機械学会関西学生会卒業研究発表講演会
    • Place of Presentation
      大阪工業大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
    • Organizer
      The collaborative conference on Materials Research (CCMR) 2013
    • Place of Presentation
      Jeju Island(South Korea)
    • Invited
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] WGM共振を利用した微小球の直径計測(第1報) -結合条件が共振ピークに与える影響-2013

    • Author(s)
      足立篤,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会学術講演会秋季大会講演論文集
    • Place of Presentation
      関西大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉(第2報)―基板材料と表面離脱性の関係―2013

    • Author(s)
      吉兼匡昭,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013

    • Author(s)
      M. Michihata, R. Gake, T. Hayashi, Y. Takaya
    • Organizer
      Proc. the 11th international symposium on measurement technology and intelligent instruments
    • Place of Presentation
      Aachen/Braunschweig, Germany
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
    • Organizer
      The collaborative conference on Materials Research (CCMR) 2013
    • Place of Presentation
      Jeju Island(South Korea)
    • Invited
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method2013

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
    • Organizer
      International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN) 2013
    • Place of Presentation
      Singapore
    • Invited
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第3報)~スケールの内挿誤差の検討~2013

    • Author(s)
      上田真一,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学 (吹田市)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013

    • Author(s)
      Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
    • Organizer
      The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
    • Place of Presentation
      Aachen
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013

    • Author(s)
      峨家諒介,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会学術講演会春季大会講演論文集
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013

    • Author(s)
      Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
    • Organizer
      The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
    • Place of Presentation
      Aachen/Braunschweig, Germany
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013

    • Author(s)
      Yuki Ishizaki, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      ISMQC2013
    • Place of Presentation
      University, Cracow, Poland
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013

    • Author(s)
      A. Adachi, M. Michihata, T. Hayashi, Y. Takaya
    • Organizer
      International symposium on optomechatronic technologies
    • Place of Presentation
      Jeju island, South Korea, M1C-3
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉(第2報)~基板材質と表面離脱性の関係~2013

    • Author(s)
      吉兼匡昭、道畑正岐、林 照剛、高谷裕浩
    • Organizer
      2013年度精密工学会学術講演会
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] WGM共振を利用した微小球の直径計測 (第1報) -結合条件が共振ピークに与える影響-2013

    • Author(s)
      足立篤,道畑正岐,林 照剛,高谷裕浩
    • Organizer
      2013年度精密工学会学術講演会秋季大会
    • Place of Presentation
      関西大学
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] Mode selective probing method of micro trench structure using optically trapped probe2012

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi and Taisuke Washitani
    • Organizer
      ISOT’12 (International Symposium on Optomechatronic Technologies)
    • Place of Presentation
      Paris (France)
    • Invited
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] Development of Nano Particle Sizing System Using Fluorescence Polarization2012

    • Author(s)
      Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Foong Lee
    • Organizer
      XX IMEKO World Congress Metrology for Green Growth
    • Place of Presentation
      Busan, Korea
    • Data Source
      KAKENHI-PROJECT-24656088
  • [Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train2012

    • Author(s)
      Yusuke Fukuta, Terutake Hayashi, Masaki Michihata and Yasuhiro Takaya,
    • Organizer
      International Conference on Precision Engineering
    • Place of Presentation
      To be published
    • Data Source
      KAKENHI-PROJECT-21656041
  • [Presentation] Scanning measurement of step height and freeform surface by using optically trapped microsphere2012

    • Author(s)
      Masaki Michihata, Yasuhiro Takaya, Taisuke Washitani, Terutake Hayashi
    • Organizer
      The 12th euspen International Conference
    • Place of Presentation
      Stockholm (Sweden)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] 水酸化フラーレンを用いたCu-CMPにおける化学反応過程の解明(第一報)-In-situラマン分光分析装置の開発ー2012

    • Author(s)
      鹿野和昌, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
    • Organizer
      精密工学会, 2012年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      首都大学東京
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Presentation] New technique of single-beam gradient-force laser trapping in air condition2012

    • Author(s)
      Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI and Yasuhiro TAKAYA
    • Organizer
      ISOT’12 (International Symposium on Optomechatronic Technologies)
    • Place of Presentation
      Paris (France)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] フェムトパルストレインによる表面原子加工システムの開発2012

    • Author(s)
      福田悠介, 林照剛, 道畑正岐, 高谷裕浩
    • Organizer
      2012年度精密工学会春季大会学術講演会(2012)
    • Place of Presentation
      金沢大学
    • Year and Date
      2012-09-22
    • Data Source
      KAKENHI-PROJECT-21656041
  • [Presentation] In Situ Raman Analysis of Chemical Reaction for Copper CMP Using Water-soluble Fullerenol2011

    • Author(s)
      Kazumasa Kano, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata and Ken Kokubo
    • Organizer
      Asian Symposium for Precision Engineering and Nanotechnology 2011
    • Place of Presentation
      China, Hong Kong
    • Year and Date
      2011-11-17
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Presentation] WGM共振を用いたマイクロ粒子における真球度評価の基礎的研究2011

    • Author(s)
      市川雄一, 林照剛, 高谷裕浩, 道畑正岐
    • Organizer
      2010年度日本機械学会関西学生会卒業研究発表講演会
    • Place of Presentation
      京都工芸繊維大学
    • Year and Date
      2011-03-18
    • Data Source
      KAKENHI-PROJECT-22860034
  • [Presentation] 水酸化フラーレンを用いたCu-CMP加工に関する研究(第3報)-パターンウエハの研磨特製の評価-2011

    • Author(s)
      岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
    • Organizer
      精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      東洋大学
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Presentation] 微小球共振器を用いた位置検出マイクロプローブのための基礎的研究2011

    • Author(s)
      峨家諒介, 林照剛, 高谷裕浩, 道畑正岐
    • Organizer
      2010年度日本機械学会関西学生会卒業研究発表講演会
    • Place of Presentation
      京都工芸繊維大学
    • Year and Date
      2011-03-18
    • Data Source
      KAKENHI-PROJECT-22860034
  • [Presentation] フェムトパルストレインによる表面原子加工技術の開発2011

    • Author(s)
      福田悠介, 林照剛, 道畑正岐, 高谷裕浩
    • Organizer
      2011年度精密工学会秋期大会学術講演会講演論文集
    • Place of Presentation
      金沢大学
    • Year and Date
      2011-09-22
    • Data Source
      KAKENHI-PROJECT-21656041
  • [Presentation] 水酸化フラーレンを用いたCu-CMP加工における表面反応層の形成2010

    • Author(s)
      岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
    • Organizer
      2010年度精密工学会秋季大会学術講演会講演論文集(JSPE)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-09-27
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Presentation] Weakly Copper-Fullerenol Layer on Chemical Mechanical Polishing Using Water Soluble Fullerenol, Proc2010

    • Author(s)
      Hirotaka Kishida, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo
    • Organizer
      2010 American Society for Precision Engineering(ASPE)
    • Place of Presentation
      Atlanta, USA
    • Year and Date
      2010-11-02
    • Data Source
      KAKENHI-PROJECT-21360064
  • [Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train

    • Author(s)
      Yusuke Fukuta, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      14th International Conference on Precision Engineering (ICPE 2012)
    • Place of Presentation
      Awaji, Hyogo(2012年11月発表予定)
    • Data Source
      KAKENHI-PROJECT-21656041
  • [Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第 2 報) -コヒーレントフォノンの時間分解計測システムの開発-

    • Author(s)
      大菊 崇弘, 林 照剛, 道畑 正岐, 高谷 裕浩
    • Organizer
      精密工学会春期全国大会
    • Place of Presentation
      東洋大学
    • Year and Date
      2015-03-17 – 2015-03-19
    • Data Source
      KAKENHI-PROJECT-25289017
  • [Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析

    • Author(s)
      旭真史,高谷裕浩,林照剛,道畑正岐
    • Organizer
      日本機械学会関西支部学生員卒業研究発表講演会
    • Place of Presentation
      大阪府立大学 (堺市)
    • Data Source
      KAKENHI-PROJECT-24656104
  • [Presentation] Laser trapping and whispering gallery mode for micro-scale metrology

    • Author(s)
      Masaki Michihata
    • Organizer
      NPL seminar
    • Place of Presentation
      National physical laboratory, Teddington, UK
    • Invited
    • Data Source
      KAKENHI-PROJECT-24656102
  • [Presentation] フォトニック・ナノジェットを利用した微細加工に関する基礎研究

    • Author(s)
      上野原 努,高谷裕浩,林照剛,道畑正岐
    • Organizer
      日本機械学会関西支部学生員卒業研究発表講演会
    • Place of Presentation
      大阪府立大学 (堺市)
    • Data Source
      KAKENHI-PROJECT-24246028
  • [Presentation] フォトニック・ナノジェットの生成に関する研究 ―ベッセルビーム照明条件の検討―

    • Author(s)
      大島玄喜,高谷裕浩,林照剛,道畑正岐
    • Organizer
      2013年度精密工学会関西地方定期学術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Data Source
      KAKENHI-PROJECT-24246028
  • 1.  Takahashi Satoru (30283724)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 102 results
  • 2.  TAKAYA Yasuhiro (70243178)
    # of Collaborated Projects: 8 results
    # of Collaborated Products: 73 results
  • 3.  HAYASHI Terutake (00334011)
    # of Collaborated Projects: 7 results
    # of Collaborated Products: 66 results
  • 4.  門屋 祥太郎 (60880234)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 27 results
  • 5.  高増 潔 (70154896)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 43 results
  • 6.  西川 正俊 (30444516)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 6 results
  • 7.  増井 周造 (00909939)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 4 results
  • 8.  KOKUBO Ken (20304008)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 9.  Mzutani Yasuhiro (40374152)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 10.  KUME Tatsuya (40353362)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 14 results
  • 11.  三部 勉 (80536938)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 14 results

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