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J. Vac. Sci. and Technol. B
巻: Vol. 32
10.1116/1.4864307
信学技報(IEICE Technical Report)
巻: 113 ページ: 41-45
巻: Vol.113 ページ: 41-45
http://www.ieice.org/ken/paper/20131023vBg8/
Technical Digest of 25th International Vacuum Nanoelectronics Conference (IEEE Catalog No. CFP12VAC-PRT)
ページ: 68-69
巻: - ページ: 44-45
Proceedings of the 19th International Conference on Ion Implantation Technology (IIT 2012) AIP Conference Proceedings
巻: 1946 ページ: 164-166
ページ: 44-45
Surface and Interface Analysis
巻: (On-line)
10.1002/sia.4878
巻: 44 ページ: 732-735
Proceedings of the 24th International Vacuum Nanoelectronics Conference
ページ: 109-110
Jpn.J.Appl.Phys. in print.
210000070717
Nucl.Instr.Meth.B in press
Jpn.J.Appl.Phys
巻: (印刷中)
J. Vac. Sci. Technol B28(in press)
J.Vac.Sci.Technol.B
巻: 28
Proceedings of 18th International Conference on Ion Implantation Technology (IIT2010) AIP Conference Proceedings
巻: 1321 ページ: 229-232
J.Vac.Sci.Technol.B 28
Proceedings of 18th International Conference on Ion Implantation Technology (IIT 2010)
ページ: 229-232
J.Vac.Sci.Technol.B 27
ページ: 721-724
J. Vac. Sci. Technol B27
Jpn J.of Appl.Phys. 48
Japanese Journal of Applied Physics 48(in press)
Journal of Vacuum Science & Technology B 27
J. Vacuum Science & Technology B 27(2)(In press)
Japanese Journal of Applied Physics 48
Journal of Vacuum Science & Technology B25, (4)
ページ: 1310-1314
Journal of Vacuum Science & Technology B25(4)
Journal of Vacuum Science & Technology.B 25,(4)
