Ito Toshimichi 伊藤利道

… Alternative Names

ITO Toshimichi 伊藤利道

ITO Toshimiti 伊藤利道

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Researcher Number	00183004
Other IDs
Affiliation (based on the past Project Information) *help	2016 – 2017: 大阪大学, 工学研究科, 教授 2014 – 2015: 大阪大学, 工学(系)研究科(研究院), 教授 2012: 大阪大学, 工学(系)研究科(研究院), 教授 2011 – 2012: 大阪大学, 大学院・工学研究科, 教授 2010: 大阪大学, 工学研究科, 助教 … More 2009: Osaka University, 工学研究科, 教授 2007 – 2008: Osaka University, 大学院・工学研究科, 教授 2001 – 2004: 大阪大学, 大学院・工学研究科, 教授 1991 – 1996: Osaka Univ., Electrical Engineering, Associate Professor, 工学部, 助教授 1990: 大阪大学, 工学部, 講師 1988 – 1989: 大阪大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator 表面界面物性 / Thin film/Surface and interfacial physical properties / Crystal engineering / Electronic materials/Electric materials / Applied materials Except Principal Investigator Applied materials / Electronic materials/Electric materials / 化学工学 / Applied materials science/Crystal engineering / Nuclear engineering
Keywords	Principal Investigator CVDダイヤモンド / マイクロ波プラズマCVD / 多孔質シリコン / 可視発光 / フォトルミネセンス / インジウムメッキ / 紫外線検出器 / 軟X線検出器 / n型ダイヤモンド / p型ダイヤモンド … More / マイクロ波プラズマＣＶＤ / マイクロ波プラズマ / Porous Silicon / Visible Luminescence / ダイヤモンド薄膜 / CVD / ナノサイズ / 増幅機能 / 応答速度 / 微斜面(001)基板 / ホウ素ドープ / 燐ドープ / 粒子検出器 / パワーデバイス / 不純物バンド伝導 / ホウ素ドープダイヤモンド / 燐ドープダイヤモンド / 微斜面基板 / 放射線検出器 / 自立膜 / 不純物伝導 / ダイヤモンド検出器 / ダイヤモンドパワーデバイス / 液中プロセス / 負性電子親和力 / 超音波 / キャビテーション / 多結晶ダイヤモンド / 微結晶シリコン / エレクトロルミネセンス / 量子サイズ効果 / 陽極酸化 / プラズマ酸化 / 熱酸化 / エレクトロルミネッセンス / Microcrystallne Silicon / Phtoluminescence / Electroluminescence / Quantum Size Effect / Anodic Oxidation / Plasma Oxidation / 電子親和力 / 電子エミッタ / ショットキー接合 / Diamond Thin Film / Electron Affinity / Electron Emitter / Schottky Junction / 時間分解スペクトル / Photoluminescence / Time-Resolved Spectrum / Indium Plating / 白金薄膜 / 白金微粒子 / 埋込み構造 / 水素吸蔵 / 自己組織化 / ナノ構造 / 水素 / CVDダイヤモンド薄膜 / 構造変化 / スケルトン構造 / platinum thin film / diamond thin film / platinum particles / buried structure / hydrogen / microwave plasma / self-assembly / ワイドギャップ半導体 / 不純物ドーピング / CVD製膜装置 / p型半導体 / CVD成膜装置 / ｐ型半導体 / ＣＶＤ成膜装置 / 成膜装置 … More Except Principal Investigator GaAs / 光電子分光法 / 光電子分光 / 反射高速電子回折 / ダイヤモンド / 半導体材料 / Diamond / 金属-半導体界面 / マイクロエレクトロニクス / 界面反応 / 積層界面 / 高温超伝導体 / 凍結乾燥 / アルコキシド / 懸濁液 / 加水分解 / 焼結 / 微粉体 / 複合酸化物 / 多孔質シリコン / ガリウム・ひ素 / 分子線エピタキシャル成長 / 高速イオン散乱法 / 反射高速電子線回折 / 初期成長過程 / 欠陥 / 多孔質Si / 電子顕微鏡 / SOI構造 / 高イオン散乱法 / ガリウムヒ素 / 欠陥の低減 / Porous Si / Molecular Beam Epitaxy / Photoelectron Spectroscopy / High energy Ion Scattering / Reflection High Energy Electron Diffraction / Initial Growth Stage / Defects / 低速電子透過分光法 / 半導体ヘテロ界面 / シリコン / ゲルマニウム / 低速電子回折 / オージェ電子分光法 / 界面の構造 / 格子歪 / オ-ジェ電子分光法 / Low-energy electron transmission spectroscopy / Semiconductor heterointerface / Si / Ge / Low-energy electron diffraction / Auger electron spectroscopy / Interface structure / Lattice distortion / 間接遷移型半導体 / 超格子 / 発光 / 不規則 / ブリルアン領域 / 界面準位 / 量子効果 / 局在準位 / 人工局在準位 / 不規則超格子 / ブリルアン領域折り返し / サイズ効果 / 界面効果 / グリルアン領域折り返し / indirect gap semiconductor / superlattice / luminescence / disoredering / brillouin zone / surface state / quantum effect / lacalized level / 多結晶薄膜 / ECR放電 / プラズマCVD / パルス変調 / 発光分光測定 / 赤外レーザー吸収分光測定 / Semiconductor / Polycrystal / ECR discharge / Plasma CVD / Pulse modulation / Optical Emission / IRLAS / Si界面 / 電荷中性化構造 / II族単原子層 / Be / 層状成長 / UVオゾン処理 / Si基板 / GaAs薄膜 / X線光電子分光法 / Zn / 界面電荷中性化 / Ge基板 / Si interface / charge-balanced structure / monolayr of column II / Be atoms / layr grwoth / reflection high-energy electron diffraction / photoemission spectroscopy / UV Ozone treatment / ダイヤモンド薄膜 / ヘテロエピタキシャル成長 / 電子放出素子 / バイアス核発生 / 超微粒子種付け / シリコン基板 / 電極形成 / diamond thin film / heteroepitaxial growth / semiconductor material / electron emitter device / bias enhanced nucleation / nanocrystal seeding / silicon substrate / electrode / 放射線検出器 / 化学気相合成法 / 積層構造 / エネルギースペクトル / 結晶評価 / Radiation detector / Chemical vapor deposition / Layered structure / Energy spectroscopy / Characterization of crystal / 気相合成ダイヤモンド / カソ-ドルミネッセンス / 発光センタ- / エレクトロルミネッセンス / ド-ピング / 硼素、窒素 / 青色発光デバイス / ショットキ-・ダイオ-ド / エレクトロルミネセンス / LED / 単結晶粒子アレ- / ショットキー・ダイオード / EL / CVD diamond / Cathodoluminescence / B- or N-doping / Free exciton, bound Exciton / Schottky diode / Growth sectors / Electro-luminescence / ECR plasma CVD Less

Large-size clusterization of heavily-doped degenerate CVD diamond layer and its functional device applicationPrincipal Investigator
- Principal Investigator
  
  Ito Toshimichi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Crystal engineering
- Research Institution
  Osaka University
Restoration of negative electron affinity feature on high-quality diamond surfaces using liquid processPrincipal Investigator
- Principal Investigator
  
  Ito Toshimichi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Crystal engineering
- Research Institution
  Osaka University
Development of Fundamental Fabrication Processes for Functionalizing Electronic Devices Composed of High-Quality CVD DiamondPrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  2009 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Osaka University
Development of highly-sensitive diamond detectors with a large amplification functionPrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Osaka University
Development of layered type CVD single aystal diamond radiation detectors
- Principal Investigator
  
  KANEKO Junichi
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  Hokkaido University
Behavior of Hydrogen Atoms Incorporated into Specific Structures between Platinum and CVD Diamond FilmsPrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
ナノサイズ半導体微粒子表面の金属によるパッシベーション効果Principal Investigator
- Principal Investigator
  
  伊藤利道
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  表面界面物性
- Research Institution
  Osaka University
Heteroepitaxial Nucleation and Growth of Diamond
- Principal Investigator
  
  HIRAKI Akio
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for International Scientific Research.
- Research Institution
  Osaka University
Negative Electron Affinity of Semiconducting Diamond Thin Films and its Application to Electron EmittersPrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Osaka University
Efficient Visible Luminescence from Stabilized Porous SiliconPrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
LUMINESCENCE BY INDIRECT GAP SEMICONDUCTOR
- Principal Investigator
  
  SAKAKI Akio
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  KYOTO UNIVERSITY
Development of Diamond Film Synthesis at Room Temperature
- Principal Investigator
  
  HIRAKI Akio
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
Insertion Effect of the Monolayr of Column II Elements at GaAs/Si Interface
- Principal Investigator
  
  MAEHASHI Kenzo
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Osaka University
金属-半導体界面:マイクロエレクトロニクス発展への基礎研究
- Principal Investigator
  
  HIRAKI Akio
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Osaka University
金属アルコキシドの加水分解懸濁液の凍結乾燥法による高温超伝導体の調製
- Principal Investigator
  
  立脇徳松
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  化学工学
- Research Institution
  Doshisha University
Size Reduction of Crystalline Silicon in Anodized Porous Silicon by Partial Oxidation for Stable Visible LuminescencePrincipal Investigator
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  Osaka University
Study of semiconductor heterointerface using low-energy electron transmission spectroscopy
- Principal Investigator
  
  HASEGAWA Shigehiko
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  Osaka University
Molecular Beam Epitaxial Growth of GaAs on Porous Si
- Principal Investigator
  
  NAKASHIMA Hisao
- Project Period (FY)
  1989 – 1991
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  Osaka University
Fabrication of High-Power Blue Emission Diveces Using Chemical Vapor Deposition Diamond
- Principal Investigator
  
  HIRAKI Akio
- Project Period (FY)
  1988 – 1990
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B).
- Research Field
  
  Applied materials
- Research Institution
  Faculty of Engineering, Osaka University Grant-in-Aid for

All 2018 2017 2016 2012 2011 2010 2009 2008 2007

All Journal Article Presentation

[Journal Article] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2017
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Journal Title
  
  Materials Science in Semiconductor Processsing
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H03557
[Journal Article] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other in unintentionally boron-doped diamond layer2017
- Author(s)
  Maida Osamu、Tabuchi Tomohiro、Ito Toshimichi
- Journal Title
  
  Journal of Crystal Growth
  
  Volume: 480 Pages: 51-55
- DOI
  10.1016/j.jcrysgro.2017.10.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Behavior of nitrogen-related luminescence centers in laser-cut single-crystalline diamond under irradiation with keV electron beam2017
- Author(s)
  Maruoka Kenji、Naito Taiki、Maida Osamu、Ito Toshimichi
- Journal Title
  
  MRS Advances
  
  Volume: 2 Issue: 43 Pages: 2355-2360
- DOI
  10.1557/adv.2017.414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2017
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Journal Title
  
  Materials Science in Semiconductor Processing
  
  Volume: 印刷中 Pages: 203-206
- DOI
  10.1016/j.mssp.2016.12.001
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Survey meter combining CVD diamond and silicon detectors for wide range of dose rates and high accumulated doses2012
- Author(s)
  H. Sato, A. Yamaguchi, O. Maida, T. Ito
- Journal Title
  
  Radiation Meas
  
  Volume: Vol.47 Pages: 266-271
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Sensitivity improvement of γ-ray detector fabricated with self-standing CVD diamond by attaching heavy element film2012
- Author(s)
  H. Sato, O. Maida, T. Ito
- Journal Title
  
  Diam. Relat. Mater.
  
  Volume: Vol.29 Pages: 2-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011
- Author(s)
  O. Maida, H. Sato, M. Kanasugi, S. Iguchi, T. Ito
- Journal Title
  
  Diam. Relat. Mater.
  
  Volume: Vol.20 Pages: 242-245
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Hall data analysis of heavily boron-doped CVD diamond films using a model considering an impurity band well separated from valence bands2011
- Author(s)
  M. Aono, O. Maida, T. Ito
- Journal Title
  
  Diam. Relat. Mater
  
  Volume: Vol.20 Pages: 1357-1362
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Improvement in low-voltage performance of surface-electrode soft-X-ray detectors composed of undoped homo- epitaxial CVD/HPHT Ib diamond layers2010
- Author(s)
  M. Kanasugi, Y. Iwakaji, T. Yamamoto, O. Maida, Y. Takeda, Y. Saitoh, T. Ito
- Journal Title
  
  Nucl. Instr. Methods Phys. Research A
  
  Volume: Vol.621 Pages: 650-655
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces fabricated using micro- wave-plasma chemical-vapor-deposition method2010
- Author(s)
  S. Iguchi, O. Maida, T. Ito
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.518
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Characterization of diamond ultraviolet detec-tors fabricated with high-quality single- crystal- line chemical vapor deposition films2009
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, T. Ito
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: Vol.94
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Fabrication and characterization of ultra-violet detectors using high-quality CVD diamond films2009
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, T. Ito
- Journal Title
  
  Applied Physics Letters (発表予定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of the soft-X-ray detectors fabricated with high-quality CVD diamond thin films2008
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, Y. Takeda, Y. Saitoh and T. Ito
- Journal Title
  
  Applied Surface Science (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of substrate off-angle effects for high-quality homoepitaxial CVD diamond films2008
- Author(s)
  O. Maida, H. Miyatake, T. Teraji, T. Ito
- Journal Title
  
  Diamond and Related Materials Vol. 17
  
  Pages: 435-439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2008
- Author(s)
  T. Nakai, O. Maida and T. Ito
- Journal Title
  
  Applied Surface Science (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2008
- Author(s)
  T. Nakai, O. Maida, T. Ito
- Journal Title
  
  Applied Surface Science Vol. 254
  
  Pages: 6281-6284
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of substrate off-angle effects for high-quality homoepitaxial CVD diamond films2008
- Author(s)
  O. Maida, H. Miyatake, T. Teraji and T. Ito
- Journal Title
  
  Diamond and Related Materials 17(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of the soft-X-ray detectors fabricated with high-quality CVD diamond thin films2008
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, Y. Takeda, Y. Saitoh, T. Ito
- Journal Title
  
  Applied Surface Science Vol. 254
  
  Pages: 6277-6280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Effects of vicinal angles from (001) surface on the boron-doping features of high-quality homoepitaxial diamond films grown by the high-power microwave plasma chemical-vapor-deposition method2007
- Author(s)
  K. Arima, H. Miyatake, T. Teraji, T. Ito
- Journal Title
  
  Journal of Crystal Growth Vol.309
  
  Pages: 145-152
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2007
- Author(s)
  T. Nakai, K. Arima, O. Maida and T. Ito
- Journal Title
  
  Journal of Crystal Growth 309
  
  Pages: 134-139
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2007
- Author(s)
  T. Nakai, K. Arima, O. Maida, T. Ito
- Journal Title
  
  Journal of Crystal Growth Vol. 309
  
  Pages: 134-139
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Effects of vicinal angles from(001)surface on the boron-doping features of high-quality homoepitaxial diamond films grown by the high-power microwave plasma chemical-vapor-deposition method2007
- Author(s)
  K. Arima, H. Miyatake, T. Terajiand T. Ito
- Journal Title
  
  Journal of Crystal Growth 309
  
  Pages: 145-152
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] ダイヤモンド(111)基板ホモエピタキシャル成長における基板オフ方位及びメタン濃度依存性2018
- Author(s)
  児玉大志、毎田修、伊藤利道
- Organizer
  第65回応用物理学会春季学術講演会（2018年春季）、早稲田大学
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 高温高圧合成ダイヤモンド基板上のホモエピタキシャルCVD成長段階で形成されるCVDダイヤモンド単結晶基板中の結晶欠陥の抑制2018
- Author(s)
  丸岡憲史、毎田修、伊藤利道
- Organizer
  第65回応用物理学会春季学術講演会（2018年春季）、早稲田大学
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Characterization of the high-quality CVD diamond films for quantum information device2018
- Author(s)
  O. Maida, T. Ito
- Organizer
  Advanced Materials World Congress 2018, Singapore,
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] CVDダイヤモンド検出器のkeV電子に対する検出特性における信号電流増幅現象2017
- Author(s)
  福島慎市，清水彰人，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] SiOxハードマスクを用いた高アスペクト比ダイヤモンドエッチングプロセス2017
- Author(s)
  別府晟多，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Behavior of nitrogen-related luminescence centers in laser-cut single-crystalline diamond under irradiation of keV electron beam2017
- Author(s)
  K. Maruoka, T. Naito, O. Maida, T. Ito
- Organizer
  2017 MRS Spring Meeting, Arizona, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] ホウ素添加ホモエピタキシャル成長ダイヤモンド薄膜の過渡光容量法を用いた結晶欠陥評価2017
- Author(s)
  児玉大志，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面におけるkeV電子線照射及び水素プラズマ照射効果2017
- Author(s)
  丸岡憲史，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Transient photocapacitance study of deep-level defects in boron-doped diamond films2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  International Conference on Diamond and Carbon Materials
- Place of Presentation
  Montpellier, France
- Year and Date
  2016-09-07
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面における電気伝導性及びCLスペクトルの表面処理依存性2016
- Author(s)
  丸岡憲史，内藤大樹，毎田修，伊藤利道
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟コンベンションセンター(新潟市)
- Year and Date
  2016-09-15
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  7th International Symposium on Control of Semiconductor Interfaces / International SiGe Technology and Device Meeting
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2016-06-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other2016
- Author(s)
  O. Maida, T. Tabuchi and T. Ito
- Organizer
  20th International Vacuum Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Micro- wave-plasma chemical-vapor-deposition homo- epitaxial processes suitable for heavily P-doped diamond films on vicinal (001) surfaces2012
- Author(s)
  S. Tada,H. Nishio, O. Maida, T. Ito
- Organizer
  11th Asia Pacific Conf. on Plasma Sci. and Technol.
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Improvement on p-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011
- Author(s)
  O. Maida, M. Aono, T. Ito
- Organizer
  15th Intl. Conf. on Thin Films
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Carrier transport property of heavily boron-doped degenerate diamond single-crystalline thin layers etched with hydrogen plasma2010
- Author(s)
  T. Kuki, O. Maida, T. Ito
- Organizer
  2012 Intl. Conf. on Solid State Devices and Materials
- Place of Presentation
  Kyoto. Japan
- Year and Date
  2010-09-26
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Reduced influ- ences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their UV detector performance2010
- Author(s)
  O. Maida, S. Iguchi, T. Ito
- Organizer
  4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Investigation of diamond radiation detectors combined with heavy elements2010
- Author(s)
  H. Sato, A. Yamaguchi, M. Maida, T. Ito
- Organizer
  21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
- Place of Presentation
  Budapest, Hungary
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010
- Author(s)
  O. Maida, S. Iguchi, T. Igarashi, H. Sato, T. Ito
- Organizer
  21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
- Place of Presentation
  Budapest, Hungary
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Growth and characterization of heavily phosphorus-doped homoepitaxial (001) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber2010
- Author(s)
  M. Maida, T. Hidaka, T. Ito
- Organizer
  4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] 高出力マイクロ波プラズマCVD法によるホモエピタキシャルダイヤモンド薄膜の基板品質及びオフ角依存性2008
- Author(s)
  川嶋慎也、宮武秀宇、有馬和也、毎田修、寺地徳之、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド積層構造におけるキャリア拡散制御2008
- Author(s)
  金杉将幸、岩鍛治陽子、山元貴、毎田修、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド薄膜を用いた軟X線・紫外線検出器の特性評価2008
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド薄膜を用いた軟X線検出器の特性評価2007
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学,北海道
- Year and Date
  2007-09-06
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド軟X線検出器の開発とその特性評価2007
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第48回真空に関する連合講演会
- Place of Presentation
  学習院大学,東京
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] Characterization of phosphorus-doped homoepitaxial (100 )diamond films grown using high-power-density MWPCVD method with conventional quartz-tube chamber2007
- Author(s)
  T. Nakai, O. Maida and T. Ito
- Organizer
  The Fifth International Symposium on Control of Semiconductor Interfaces
- Place of Presentation
  首都大学東京、東京
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 石英管型低出力MWPCVD装置を用いた高電力密度化によるリンドープダイヤモンド薄膜の作製とその電気的特性の評価2007
- Author(s)
  中井孝洋、毎田修、伊藤利道
- Organizer
  第48回真空に関する連合講演会
- Place of Presentation
  学習院大学,東京
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 石英管型簡易装置を用いた高電力密度MWPCVD法によるリンドープダイヤモンド薄膜合成2007
- Author(s)
  中井孝洋、毎田修、伊藤利道
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学,北海道
- Year and Date
  2007-09-06
- Data Source
  KAKENHI-PROJECT-19360018

1. HIRAKI Akio (50029013)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
2. HATTA Akimitsu (50243184)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
3. MAIDA Osamu (40346177)

# of Collaborated Projects: 3 results

# of Collaborated Products: 47 results
4. MAEHASHI Kenzo (40229323)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. HASEGAWA Shigehiko (50189528)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. KAWARADA Hiroshi (90161380)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. TERAJI Tokuyuki (50332747)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. NAKASHIMA Hisao (20198071)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. SAKAKI Akio (10025900)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KOSHIDA Nobuyoshi (50143631)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. MASUMOTO Yasuaki (60111580)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. SHIRAKI Yasuhiro (00206286)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. KUKIMOTO Hiroshi (50013488)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. INOUE Koichi (50159977)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. MORI Yusuke (90252618)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. KATODA Takashi (90013739)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. SASAKI Takatomo (50029237)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. KANEKO Junichi (90333624)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. SAWAMURA Teruko (30001316)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 寺倉清之 (40028212)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 安田幸夫 (60126951)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 大泊巌 (30063720)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 菊田惺志 (00010934)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. 立脇徳松 (00066250)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. 山口修 (40097861)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. OKADA Shigenobu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. LEE Chongmu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. NISHIZAWA Hirotaka

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. HABA Hoki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. NAKASHIMA Shigeo

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. 吉永博俊

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. 羽馬方紀

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Ito Toshimichi 伊藤 利道

ITO Toshimichi 伊藤 利道

ITO Toshimiti 伊藤 利道

Research Projects

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Co-Researchers

Large-size clusterization of heavily-doped degenerate CVD diamond layer and its functional device applicationPrincipal Investigator

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Restoration of negative electron affinity feature on high-quality diamond surfaces using liquid processPrincipal Investigator

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Development of Fundamental Fabrication Processes for Functionalizing Electronic Devices Composed of High-Quality CVD DiamondPrincipal Investigator

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Development of highly-sensitive diamond detectors with a large amplification functionPrincipal Investigator

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Behavior of Hydrogen Atoms Incorporated into Specific Structures between Platinum and CVD Diamond FilmsPrincipal Investigator

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ナノサイズ半導体微粒子表面の金属によるパッシベーション効果Principal Investigator

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Negative Electron Affinity of Semiconducting Diamond Thin Films and its Application to Electron EmittersPrincipal Investigator

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Efficient Visible Luminescence from Stabilized Porous SiliconPrincipal Investigator

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Ito Toshimichi 伊藤利道

ITO Toshimichi 伊藤利道

ITO Toshimiti 伊藤利道