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Applied Physics Express
Volume: 14 Pages: 091003-091003
10.35848/1882-0786/ac18b0
IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY
Volume: 10 Pages: 1419-1422
10.1109/tcpmt.2020.3009640
IEEE Journal of the Electron Devices Society
Volume: 8 Pages: 1266-1271
10.1109/jeds.2020.3025336
Japanese Journal of Applied Physics
Volume: 59
10.35848/1347-4065/ab6867
Volume: 9 Pages: 181-188
10.1109/tcpmt.2018.2871764
IEEE TRANSACTIONS DEVICE LETTERS
Volume: 40 Pages: 95-98
10.1109/led.2018.2884452
Volume: 7 Pages: 1225-1231
10.1109/jeds.2019.2936180
Jpn. J. Appl. Phys.
Volume: 59 Issue: SB Pages: SBBA04-SBBA04
10.7567/1347-4065/ab4f3c
210000157397
電子情報通信学会論文誌 C
Volume: J101-C Pages: 58-65
Sensors and Materials
Volume: 30 Pages: 225-234
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume: 64 Pages: 2912-2918
10.1109/ted.2017.2705562
Volume: 64 Pages: 5065-5072
10.1109/ted.2017.2767598
Micromachins
Volume: 7
10.3390/mi7100184
Volume: 55 Issue: 4S Pages: 04EC07-04EC07
10.7567/jjap.55.04ec07
Volume: 55 Issue: 4S Pages: 04EC03-04EC03
10.7567/jjap.55.04ec03
210000146283
IEEE Journal of Microelectromechanical Systems
Volume: 25 Pages: 91-100
10.1109/jmems.2015.2480787
Volume: 61 Pages: 540-546
10.1109/ted.2013.2295463