ISSHIKI Minoru 一色実

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ISSIKI Minoru 一色実

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Researcher Number	20111247
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Affiliation (based on the past Project Information) *help	2002 – 2012: 東北大学, 多元物質科学研究所, 教授 1995 – 1999: 東北大学, 素材工学研究所, 教授 1992 – 1993: 東北大学, 素材工学研究所, 教授 1991: 東北大学, 選鉱製錬研究所, 助教授 1987 – 1990: 東北大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Metal making engineering / Metal making engineering Except Principal Investigator Metal making engineering / Metal making engineering / 金属精錬・金属化学 / Structural/Functional materials / 無機工業化学
Keywords	Principal Investigator フォトルミネッセンス / 薄膜 / 成長機構 / MOCVD / Oxidation / Thin Film / Copper / Hafnium / Zirconium / 誘電特性 … More / 酸化 / 銅 / ハフニウム / ジルコニウム / high purity iron / high quality single crystal / Si substrate / hydrogen terminate / molecular beam epitaxy / chemical vapor transport / β-FeSi_2 / β-FeSi_2単結晶 / 化学気相輸送法 / 電気特性 / β-FeSi2単結晶 / 半導体用超高純度鉄 / 超高純度鉄 / 高品位単結晶 / Si基板 / 水素終端処理 / 分子線エピタキシー / 化学気相輸送 / β-FeSi2 / Kinetics / High purity metals / Refining / Hydrogen plasma / Plasma melting / 蒸発種 / 反応速度 / 分光学的解析 / 熱伝導 / 蒸発 / 発光スペクトル / シミュレーション / 高純度金属 / 精製 / 水素プラズマ / プラズマ溶解 / アクセプター・ドーピング / フォト・ルミネッセンス / P型伝導 / 伝導型制御 / セレン化亜鉛 / 格子間原子 / アクセプター / Znfe_x Te_<1-x> / 成長速度 / 熱力学モデル / ZnSe_xTe_1ー_x混晶薄膜 / MOCVD成長 / エピタキシャル成長 / ZnSexTe_<1ーx> / アクセプタ-準位 / カリウム / ナトリウム / ZnSe … More Except Principal Investigator 高純度金属 / 水素プラズマ / 高純度化 / 微量不純物 / ランタン / 金属生産工学 / 希土類金属 / ジルコニウム / 水素プラズマ溶解 / 高純度精製 / 精製 / 帯溶融 / Annealing effect / Trace impurity / Cobalt / Iron / Copper / Purity evaluation / Residual resistivity ratio / High purity metals / 伝導電子 / サイズ効果 / 真空焼鈍 / 水素焼鈍 / 比抵抗 / クロム / 焼鈍効果 / コバルト / 鉄 / 銅 / 純度評価 / 残留抵抗比 / Vacuum melting / Zone melting / Purification / Lantharum / Neodymium / Rare earth metal / 真空溶解 / 高真空溶解 / 帯域溶融 / ネオジム / フォト・ルミネッセンス / ドーピング / アクセプター / P型伝導 / 伝導型制御 / セレン化亜鉛 / 不純物除去 / バナジウム / プラズマ溶解 / 不純物 / 高融点金属 / 減圧水素プラズマ / バナジウムジルコニウム / モリブデン / 配線評価用TEG / パルスめっき技術 / 配線抵抗率 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / Cuの高純度化 / TEG / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 抵抗率 / 超高純度硫酸銅 / Cu配線 / LSI / 情報材料 / 電子 / 水素プラズマ溶解精製 / セリウム / 活性水素 / 帯溶融精製 / 精製機構 / プラズマ溶解精製 / 不純物強除去速度 / チタン / ハフニウム / 機能展開 / 超微細構造 / 化学マニピュレーション / 分子・粒子のテクトニクス / ナノテクノジ- / 活性金属 / レアメタル / 熱プラズマ Less

Purification of refractory metals used for the sputtering target
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.
- Principal Investigator
  
  ONUKI Jin (OONUKI Jin)
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Ibaraki University
Purification of sputtering target metals for high-k insulator films of MOSFET devices
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Low Temperature Oxidation of Ultra-High Purity Metals and Stoichiometry Control of Oxide FilmsPrincipal Investigator
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
Single Crystal Growth and Stoichiometory Control of Ecologically Friendly Semiconductor β-FeSi_2Principal Investigator
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
活性金属の化学マニュピュレーション
- Principal Investigator
  
  市川勝
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  無機工業化学
- Research Institution
  Hokkaido University
Precise Purity Evaluation of High-Purity Metals by Residual Resistivity Ratio
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Metal making engineering
- Research Institution
  TOHOKU UNIVERSITY
Impurity removal kinetics of hydrogen plasma arc meltingPrincipal Investigator
- Principal Investigator
  
  ISSHIKI Minoru
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
プラズマ帯溶融精製法の開発とレアメタル高純度化への応用
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Metal making engineering
- Research Institution
  Tohoku University
MOCVD法によるZnfex Te_<1-X>薄膜単結晶の成長と点欠陥の挙動Principal Investigator
- Principal Investigator
  
  一色実
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
Purification of Rare Earth Metals by Advanced Electron Beam Floating Zone Melting Method
- Principal Investigator
  
  MIMURA Kouji
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  金属精錬・金属化学
- Research Institution
  Tohoku University
光MOCVD法によるZnse_xTe_1‐_x薄膜単結晶の成長と点欠陥の挙動Principal Investigator
- Principal Investigator
  
  一色実
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
光MOCVD法によるZnSexTe_<1ーx>薄膜単結晶の成長と点欠陥の挙動Principal Investigator
- Principal Investigator
  
  一色実
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
超高純度単結晶を用いたZnSeの伝導型制御に関する研究Principal Investigator
- Principal Investigator
  
  一色実
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
超高純度単結晶を用いたZnSeの伝導型制御に関する研究
- Principal Investigator
  
  望月勝美
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University
超高純度単結晶を用いたZmSeの伝導型成業に関する研究Principal Investigator
- Principal Investigator
  
  一色実
- Project Period (FY)
  1987
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Tohoku University

All 2012 2011 2010 2009 2008 2007 2006 2005 2004

All Journal Article Presentation

[Journal Article] Development of a Nondestructive Method Utilizing X-ray Diffraction for the Evaluation of Grain Size Distributions of Cu Interconnects2011
- Author(s)
  T.Inami, J.Onuki, M.Isshiki
- Journal Title
  
  Electrochemical and Solid-State Letters
  
  Volume: 14
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Development of a Nondestructive Method Utilizing X-ray Diffraction for the Evaluation of Grain Size Distributions of Cu Interconnects2011
- Author(s)
  T.Inami, J.Onuki, M.Isshiki
- Journal Title
  
  Electrochemical and Solid-State Letters 14
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 門田裕行, 伊藤雅彦, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  日本金属学会誌
  
  Volume: 75(掲載決定)
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011
- Author(s)
  田代優, 打越雅仁, 三村耕司, 一色実, 大貫仁
- Journal Title
  
  本金属学会誌 75掲載決定
- NAID
  10029368773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Preparation of high purity metals for advanced devices2011
- Author(s)
  一色実、三村耕司、打越雅仁
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.519 Issue: 24 Pages: 8451-8455
- DOI
  10.1016/j.tsf.2011.05.038
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] 金属の高純度精製プロセス2011
- Author(s)
  三村耕司、打越雅仁、一色実
- Journal Title
  
  金属
  
  Volume: 81巻 Pages: 941-948
- URL
  http://www.agne.co.jp/kinzoku/
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Hydrogen effect on refining of Mo metal by Ar-H_2 plasma arc melting2010
- Author(s)
  J.W.Lim, K.Mimura, D.Miyawaki J.M.Oh, G.S.Choi, S.B.Kim, M.Uchikoshi, M.Isshiki
- Journal Title
  
  Materials Letters
  
  Volume: 64 Pages: 2290-2292
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Purification of CuC12 by anion-exchange separation using multi-column method2010
- Author(s)
  M.Uchikoshi, Y.Yamada, Y.Baba, J.Onuki, K.Mimura, M.Isshiki
- Journal Title
  
  High Temperature Materials and Processes
  
  Volume: 29 Pages: 469-481
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Hydrogen effect on refining of Mometal by Ar-H2 plasma arc melting2010
- Author(s)
  J.W.Lim, 三村耕司 , D.Miyawaki, J.M.Oh, G.S.Choi, S.B.Kim, 打越雅仁、一色実
- Journal Title
  
  Materials Letters
  
  Volume: Vol.64 Issue: 21 Pages: 2290-2292
- DOI
  10.1016/j.matlet.2010.07.067
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360311
[Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010
- Author(s)
  三村耕司, J. W. Lim, J. M. Oh, G. S. Choi, S. W. Cho, 打越雅仁, 一色実
- Journal Title
  
  Materials Letters Vol. 64
  
  Pages: 411-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010
- Author(s)
  K.Mimura, J.W. Lim, J.M. Oh, G.S. Choi, S.W. Cho, M.Uchikoshi, M.Isshiki
- Journal Title
  
  Materials Letters 64
  
  Pages: 411-414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Impurity behavior in Cu refined by Ar plasma-arc zone melting2009
- Author(s)
  G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Metals and Materials International 15
  
  Pages: 753-757
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Purification of Cu by hydrogen plasma-arc zone melting and characterization of trace impurities by secondary ion mass spectrometry2009
- Author(s)
  G.M.Lalev, J.W.Lim, N.R.Munirathnmam, G.S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Materials Characterization 60
  
  Pages: 60-64
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Concentration Behavior of Non-Metallic Impurities in Cu Rods Refined by Argon and Hydrogen Plasma-Arc Zone Melting2009
- Author(s)
  G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
- Journal Title
  
  Materials Transactions 50
  
  Pages: 618-621
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Purification of lanthanum and cerium by plasma arczone melting2008
- Author(s)
  三村耕司、佐藤貴則、一色実
- Journal Title
  
  Journal of Materials Science 43
  
  Pages: 721-2730
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] Purification of lanthanum and cerium by plasma arc zone melting2008
- Author(s)
  三村耕司, 佐藤貴則, 一色実
- Journal Title
  
  Journal of Materials Science Vol. 43
  
  Pages: 2721-2730
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360339
[Journal Article] High quality beta-FeSi2 epitaxial film growth on hydrogen terminated Si(111) by Molecular Beam Epitaxy2005
- Author(s)
  M.Isshiki, et al.
- Journal Title
  
  Materials Letters (印刷中)
- Data Source
  KAKENHI-PROJECT-14350394
[Journal Article] Growth of β-FeSi2 single crystals by the chemical vapor transport method2004
- Author(s)
  M.Isshiki, et al.
- Journal Title
  
  Phys.stat.sol.(c) 1
  
  Pages: 2495-2499
- Data Source
  KAKENHI-PROJECT-14350394
[Journal Article] Production of semiconductor grade high purity iron2004
- Author(s)
  M.Isshiki, et al.
- Journal Title
  
  J.Thin Solid Films 461
  
  Pages: 94-99
- Data Source
  KAKENHI-PROJECT-14350394
[Presentation] 水素プラズマ溶解による金属Moの高純度精製2012
- Author(s)
  三村耕司、宮脇大、打越雅仁、一色実
- Organizer
  日本金属学会
- Place of Presentation
  横浜市
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] 水素プラズマ溶解による金属Moの溶解精製2012
- Author(s)
  三村耕司、宮脇大、打越雅仁、一色実
- Organizer
  日本金属学会
- Place of Presentation
  横浜国立大(横浜市)
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Hydrogen Plasma Arc Melting and Refining of Refractory Metals2011
- Author(s)
  K.Mimura, M.Isshiki
- Organizer
  International Symposium of Materials Integration
- Place of Presentation
  Sendai, Japan
- Year and Date
  2011-12-01
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] Hydrogen plasma arc melting and refining of refractory metals2011
- Author(s)
  三村耕司、一色実
- Organizer
  International Symposium ofMaterials Integration
- Place of Presentation
  東北大学(仙台市)
- Year and Date
  2011-12-01
- Data Source
  KAKENHI-PROJECT-22360311
[Presentation] 水素プラズマアーク溶解によるTi及びTi合金の精製2009
- Author(s)
  三村耕司, J. W. Lim, G. S. Choi, 一色実
- Organizer
  日本金属学会
- Place of Presentation
  京都大学(京都市)
- Year and Date
  2009-09-16
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Refining and Purification of Rare Metals using Plasma Arc Heating2008
- Author(s)
  三村耕司, 一色実
- Organizer
  Symposium on the Development and Applications of Rare Metals
- Place of Presentation
  大田(韓国)
- Year and Date
  2008-05-22
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Refining and Purification of Rare Metals using Plasma Are Heating2008
- Author(s)
  三村耕司、一色実
- Organizer
  Symposium on the Development and Applications of Rare Metals
- Place of Presentation
  Korea, Daejon
- Year and Date
  2008-05-22
- Data Source
  KAKENHI-PROJECT-19360339
[Presentation] Preparation and Characterization of High Purity Metals2007
- Author(s)
  M. Isshiki
- Organizer
  2007 International Symposium on Minerals and Materials Processing
- Place of Presentation
  Daejeon (Korea)
- Year and Date
  2007-04-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Preparation and Characterization of High Purity Metals2007
- Author(s)
  M. Isshiki
- Organizer
  2007 International Symposium on Minerals and Materials Processing
- Place of Presentation
  Korea, Daejeon
- Year and Date
  2007-04-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Plasma arc melting and refining of titanium and hafnium2007
- Author(s)
  Kouji Mimura J.-W. Lim, G.-S. Choi, Minoru Isshiki
- Organizer
  International Symposium of Resource Recycling 2007
- Place of Presentation
  Korea, Jeju
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Electrical resistivity of Cu films deposited by ion beam deposition: Effects of grain size, impurities, and morphological defect2006
- Author(s)
  J.-W. Lim, M. Isshiki
- Organizer
  Global Convention of Ethnic Korean Scientists and Engineers
- Place of Presentation
  Seoul (Korea)
- Year and Date
  2006-09-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Aqueous Purification Processes to Produce Advanced Materials for the Electronic and Semiconductors Industry2005
- Author(s)
  Minoru Isshiki
- Organizer
  EUROMAT 2005
- Place of Presentation
  Czech Republic, Prague
- Year and Date
  2005-09-07
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360366
[Presentation] Aqueous Purification Processes to Produce Advanced Materials for the Electronic and Semiconductors Industry2005
- Author(s)
  Minoru Isshiki
- Organizer
  EUROMAT 2005
- Place of Presentation
  Prague
- Year and Date
  2005-09-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360366

1. MIMURA Kouji (00091752)

# of Collaborated Projects: 9 results

# of Collaborated Products: 22 results
2. ISHIKAWA Yukio (40250823)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. 古川吉孝 (70209170)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. WANG Jifeng (30271977)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 望月勝美 (30089792)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. ONUKI Jin (70315612)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
7. ISHIKAWA Nobuhiro (00370312)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KONDO Kazuo (50250478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. INAMI Takashi (20091853)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
10. CHONAN Yasunori (30363740)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. ITO Shinji (50370317)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
12. UCHIKOSHI Masahito (60447191)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
13. OHTA Hiromichi (70168946)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. NAGANO Takatoshi (70343621)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. KIMURA Takashi (70370319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. SASAJIMA Yasushi (80187137)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. AOYAMA Takashi (80363737)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. TASHIRO Suguru (90272111)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
19. 市川勝 (70176288)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. 山中昭司 (90081314)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 北川進 (20140303)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 鈴木寛治 (30106629)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 杉本忠夫 (80235895)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

ISSHIKI Minoru 一色 実

ISSIKI Minoru 一色 実

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Low Temperature Oxidation of Ultra-High Purity Metals and Stoichiometry Control of Oxide FilmsPrincipal Investigator

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Single Crystal Growth and Stoichiometory Control of Ecologically Friendly Semiconductor β-FeSi_2Principal Investigator

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Impurity removal kinetics of hydrogen plasma arc meltingPrincipal Investigator

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MOCVD法によるZnfex Te_<1-X>薄膜単結晶の成長と点欠陥の挙動Principal Investigator

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光MOCVD法によるZnse_xTe_1‐_x薄膜単結晶の成長と点欠陥の挙動Principal Investigator

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光MOCVD法によるZnSexTe_<1ーx>薄膜単結晶の成長と点欠陥の挙動Principal Investigator

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超高純度単結晶を用いたZnSeの伝導型制御に関する研究Principal Investigator

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ISSHIKI Minoru 一色実

ISSIKI Minoru 一色実

[Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011