Sugawa Shigetoshi 須川成利

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SUGAWA Shigetoshi 須川成利

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Researcher Number	70321974
Other IDs
External Links
Affiliation (Current)	2025: 東北大学, 未来科学技術共同研究センター, 教授
Affiliation (based on the past Project Information) *help	2021 – 2024: 東北大学, 未来科学技術共同研究センター, 教授 2016 – 2017: 東北大学, 工学研究科, 教授 2013 – 2015: 東北大学, 工学(系)研究科(研究院), 教授 2012: 東北大学, 大学院・工学研究科, 教授 2007 – 2008: Tohoku University, 大学院・工学研究科, 教授 2002 – 2005: Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 2000 – 2001: 東北大学, 大学院・工学研究科, 助教授
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / Electronic materials/Electric materials / 電子デバイス・機器工学 / Science and Engineering Except Principal Investigator Medium-sized Section 39:Agricultural and environmental biology and related fields / 電子デバイス・機器工学 / Electronic materials/Electric materials
Keywords	Principal Investigator イメージセンサ / 電子デバイス・機器 / CMOS / Image Sensor / 半導体プロセス / 1光子検出 / フォトンカウンティング / 撮像素子 / センシングデバイス / Wide Dynamic Range … More / High Sensitivity / 広ダイナミックレンジ / 高感度 / Semiconductor Manufacturing / Resist-residue Removal / Photo-Resist Stripping / プラズマアッシング / 気液混合 / フォトレジスト剥離 / レジスト残渣除去 / レジスト剥離 / Object Extraction / Image Compression / plasma CVD / 高感度撮像素子 / 画像データ圧縮 / 並列画像処理 / 固体撮像システム / オブジェクト抽出 / 画像圧縮 / プラズマCVD / 平坦化 / ストレス誘起電流 / リーク電流 / シリコン / MOSFET / 電子デバイス・集積回路 / 雷子デバイス / 集積回路 / 電子デバイス / プラズマ加工 / マイクロ・ナノデバイス / 半導体超微細化 / システムオンチップ / シリコン面方位 / 低電子温度プラズマ / ゲート絶縁膜 / エッチング … More Except Principal Investigator SOI / 1 / LSI / トマト / 野菜 / 生理障害 / Microwave-excited high-density plasma / Channel mobility / System LSI / Room Temperature 5 step Cleaning / f noise / Balanced-CMOS / Si_3N_4 gate insulator / Si(110)surface / 陽極化成 / CMOS / Si(110) / マイクロ波励起高密度プラズマ / チャネル移動度 / システムLSI / 室温5工程洗浄 / fノイズ / Balanced-CMOS集積回路 / Si_3N_4ゲート絶縁膜 / Si(110)面 / low frequency noise / trap level / interface / mutual conductance / gas-isolated-interconnects / Ta metal gate / 金属基板 / 銅配線 / 無水HF / BPSG / 低周波ノイズ / トラップ準位 / 界面 / FD-SOI MOSFET / 相互コンダクタンス / 気体分離配線 / Ta メタルゲート Less

作物の生理障害の機構解明におけるブレークスルーテクノロジーの開発と検証
- Principal Investigator
  
  金山喜則
- Project Period (FY)
  2021 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 39:Agricultural and environmental biology and related fields
- Research Institution
  Tohoku University
Establishment of a CMOS image sensor with photon countable sensitivity, linear response and high full well capacityPrincipal Investigator
- Principal Investigator
  
  Sugawa Shigetoshi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
Accurate measurement and statistical analysis of gate leakage current of MOSFETs with atomically flat interfacePrincipal Investigator
- Principal Investigator
  
  SUGAWA Shigetoshi
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
A high performance CMOS image sensor with high sensitivity and wide dynamic rangePrincipal Investigator
- Principal Investigator
  
  SUGAWA Shigetoshi
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
An over-100dB wide dynamic range solid-state image sensor with high sensitivity and high S/N ratio.Principal Investigator
- Principal Investigator
  
  SUGAWA Shigetoshi
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
Ultra-High-Speed and High-Precision Integration Circuit Using Si(110) Surface Metal Substrate SOI Balanced-CMOS
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  TOHOKU UNIVERSITY
微細化世代に依存しないダメージフリー新規コンタクト/ビア形成技術の研究Principal Investigator
- Principal Investigator
  
  須川成利
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
Highly Sesitive and High-resolution Amplification Solid-State Imagine System with Instant Imaging Parareli ProcessorPrincipal Investigator
- Principal Investigator
  
  SUGAWA Shigetoshi
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  TOHOKU UNIVERSITY
Photo-resist. Stripping. Technology. by. Gas-liquid. mixture. for. Highly-efficient. Ultra-short-time. Semiconductor. ManufacturingPrincipal Investigator
- Principal Investigator
  
  SUGAWA Shigetoshi
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  TOHOKU UNIVERSITY
Development of ultra-high-speed LSI with gas-isolated-interconnects and Ta metal gate transistors on SOI substrate
- Principal Investigator
  
  OHMI Tadahiro
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University

All 2022 2018 2017 2016 2015 2014 2013 2009 2008 2007 2006 2005 Other

All Journal Article Presentation Book Patent

[Book] The Micro-World Observed by Ultra High-Speed Cameras: We See What You Don’t See, Part III Cameras with CCD/CMOS Sensors, Cameras with on-chip memory CMOS image sensors2017
- Author(s)
  Rihito Kuroda, Shigetoshi Sugawa
- Total Pages
  22
- Publisher
  Springer International Publishing
- ISBN
  9783319614908
- Data Source
  KAKENHI-PROJECT-15H02245
[Journal Article] Effect of drain current on appearance probability and amplitude of random telegraph noise in low-noise CMOS image sensors2018
- Author(s)
  Ichino S.、Mawaki T.、Teramoto A.、Kuroda R.、Rark H.、Wakshima S.、Goto T.、Suwa T.、Sugawa S.
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 4S Pages: 04FF08-04FF08
- DOI
  10.7567/jjap.57.04ff08
- NAID
  210000148922
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-17H04921
[Journal Article] Experimental investigation of localized stress-induced leakage current distribution in gate dielectrics using array test circuit2018
- Author(s)
  Park H.、Teramoto A.、Kuroda R.、Suwa T.、Sugawa S.
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 4S Pages: 04FE11-04FE11
- DOI
  10.7567/jjap.57.04fe11
- NAID
  210000148908
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-17H04921
[Journal Article] A high sensitivity 20Mfps CMOS image sensor with readout speed of 1Tpixel/sec for visualization of ultra-high speed phenomena2017
- Author(s)
  Rihito Kuroda, Shigetoshi Sugawa
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 10328 Pages: 1032802-1032802
- DOI
  10.1117/12.2270787
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-17H04921
[Journal Article] Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator2017
- Author(s)
  Furukawa K.、Teramoto A.、Kuroda R.、Suwa T.、Hashimoto K.、Sugawa S.、Suzuki D.、Chiba Y.、Ishii K.、Shimizu A.、Hasebe K.
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 10 Pages: 105503-105503
- DOI
  10.7567/jjap.56.105503
- NAID
  210000148334
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-17H04921
[Journal Article] Analysis and reduction of leakage current of 2 kV monolithic isolator with wide trench spiral isolation structure2016
- Author(s)
  Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 4S Pages: 04EF07-04EF07
- DOI
  10.7567/jjap.55.04ef07
- NAID
  210000146330
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] [Paper] A CMOS Image Sensor with 240 μV/e<sup>–</sup> Conversion Gain, 200 ke<sup>–</sup> Full Well Capacity, 190-1000 nm Spectral Response and High Robustness to UV light2016
- Author(s)
  Satoshi Nasuno, Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
- Journal Title
  
  ITE Transactions on Media Technology and Applications
  
  Volume: 4 Issue: 2 Pages: 116-122
- DOI
  10.3169/mta.4.116
- NAID
  130005142728
- ISSN
  2186-7364
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] [Paper] A High Quantum Efficiency High Readout Speed 1024 Pixel Ultraviolet-Visible-Near Infrared Waveband Photodiode Array2016
- Author(s)
  Rihito Kuroda, Takahiro Akutsu, Yasumasa Koda, Kenji Takubo, Hideki Tominaga, Ryuta Hirose, Tomohiro Karasawa, Shigetoshi Sugawa
- Journal Title
  
  ITE Transactions on Media Technology and Applications
  
  Volume: 4 Issue: 2 Pages: 109-115
- DOI
  10.3169/mta.4.109
- NAID
  130005142727
- ISSN
  2186-7364
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] Introduction of Atomically Flattening of Si Surface to Large-Scale Integration Process Employing Shallow Trench Isolation2016
- Author(s)
  Tetsuya Goto, Rihito Kuroda, Naoya Akagawa, Tomoyuki Suwa, Akinobu Teramoto, Xiang Li, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Yutaka Kamata, Yuki Kumagai, and Katsuhiko Shibusawa
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 5 Issue: 2 Pages: P67-P72
- DOI
  10.1149/2.0221602jss
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-26820121
[Journal Article] [Paper] A 20Mfps Global Shutter CMOS Image Sensor with Improved Light Sensitivity and Power Consumption Performances2016
- Author(s)
  Rihito Kuroda, Yasuhisa Tochigi, Ken Miyauchi, Tohru Takeda, Hidetake Sugo, Fan Shao, Shigetoshi Sugawa
- Journal Title
  
  ITE Transactions on Media Technology and Applications
  
  Volume: 4 Issue: 2 Pages: 149-154
- DOI
  10.3169/mta.4.149
- NAID
  130005142726
- ISSN
  2186-7364
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] [Paper] Analysis and Reduction Technologies of Floating Diffusion Capacitance in CMOS Image Sensor for Photon-Countable Sensitivity2016
- Author(s)
  Fumiaki Kusuhara, Shunichi Wakashima, Satoshi Nasuno, Rihito Kuroda, Shigetoshi Sugawa
- Journal Title
  
  ITE Transactions on Media Technology and Applications
  
  Volume: 4 Issue: 2 Pages: 91-98
- DOI
  10.3169/mta.4.91
- NAID
  130005142720
- ISSN
  2186-7364
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] [Paper] Floating Capacitor Load Readout Operation for Small, Low Power Consumption and High S/N Ratio CMOS Image Sensors2016
- Author(s)
  Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
- Journal Title
  
  ITE Transactions on Media Technology and Applications
  
  Volume: 4 Issue: 2 Pages: 99-108
- DOI
  10.3169/mta.4.99
- NAID
  130005142719
- ISSN
  2186-7364
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26820121, KAKENHI-PROJECT-15H02245
[Journal Article] Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern2015
- Author(s)
  T. Goto, R. Kuroda, T. Suwa, A. Teramoto, N. Akagawa, D. Kimoto, S. Sugawa, T. Ohmi, Y. Kamata, Y. Kumagai, and K. Shibusawa
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 5 Pages: 285-292
- DOI
  10.1149/06605.0285ecst
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-26820121
[Journal Article] Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition2015
- Author(s)
  A. Teramoto, Y. Nakao, T. Suwa, K. Hashimoto, T. Motoya, M. Hirayama, S. Sugawa, and T. Ohmi
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 4 Pages: 151-159
- DOI
  10.1149/06604.0151ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245
[Journal Article] Analysis of breakdown voltage of area surrounded by multiple trench gaps in 4 kV monolithic isolator for communication network interface2015
- Author(s)
  Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 4S Pages: 04DB01-04DB01
- DOI
  10.7567/jjap.54.04db01
- NAID
  210000144957
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360129
[Journal Article] Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System2015
- Author(s)
  H. Sugita, Y. Koda, T. Suwa, R. Kuroda, T. Goto, H. Ishii, S. Yamashita, A. Teramoto, S. Sugawa, and T. Ohmi
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 4 Pages: 305-314
- DOI
  10.1149/06604.0305ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-26820121
[Journal Article] Atomically flattening of Si surface of silicon on insulator and isolation-patterned wafers2015
- Author(s)
  Tetsuya Goto, Rihito Kuroda, Naoya Akagawa, Tomoyuki Suwa, Akinobu Teramoto, Xiang Li, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Tadahiro Ohmi, Yutaka Kamata, Yuki Kumagai, and Katsuhiko Shibusawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 4S Pages: 04DA04-04DA04
- DOI
  10.7567/jjap.54.04da04
- NAID
  210000144951
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000010, KAKENHI-PROJECT-24360129, KAKENHI-PROJECT-26820121
[Journal Article] Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma2015
- Author(s)
  Tomoyuki Suwa, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Shigetoshi Sugawa, and Tadahiro Ohmi
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 5 Pages: 277-283
- DOI
  10.1149/06605.0277ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245
[Journal Article] Measurement and Analysis of Seismic Response in Semiconductor Manufacturing Equipment2015
- Author(s)
  Kaori Komoda, Masashi Sakuma, Masakazu Yata, Yoshio Yamazaki, Fuminobu Imaizumi, Rihito Kuroda and Shigetoshi Sugawa
- Journal Title
  
  IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
  
  Volume: 28 Issue: 3 Pages: 289-296
- DOI
  10.1109/tsm.2015.2427807
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02245, KAKENHI-PROJECT-26820121
[Journal Article] Si image sensors with wide spectral response and high robustness to ultraviolet light exposure2014
- Author(s)
  Rihito Kuroda and Shigetoshi Sugawa
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 11 Issue: 10 Pages: 20142004-20142004
- DOI
  10.1587/elex.11.20142004
- NAID
  130004725750
- ISSN
  1349-2543
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360129, KAKENHI-PROJECT-26820121
[Journal Article] High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET2014
- Author(s)
  Y. Nakao, T. Matsuo, A. Teramoto, H. Utsumi, K. Hashimoto, R. Kuroda, Y. Shirai, S. Sugawa, and T. Ohmi
- Journal Title
  
  ECS Transactions
  
  Volume: 61 Issue: 3 Pages: 29-37
- DOI
  10.1149/06103.0029ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360129, KAKENHI-PROJECT-26820121
[Journal Article] Amorphous InGaZnO Thin-Film Transistors Prepared by Magnetron Sputtering Using Kr and Xe Instead of Ar2014
- Author(s)
  Tetsuya Goto, Shigetoshi Sugawa and Tadahiro Ohmi
- Journal Title
  
  Journal of the Society for Information
  
  Volume: 21 Issue: 12 Pages: 517-523
- DOI
  10.1002/jsid.210
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360129
[Journal Article] Flattening Technique of (551) Silicon Surface Using Xe/H2 Plasma2014
- Author(s)
  Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa, and Tadahiro Ohmi
- Journal Title
  
  ECS Transactions
  
  Volume: 61 Issue: 2 Pages: 401-407
- DOI
  10.1149/06102.0401ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22000010, KAKENHI-PROJECT-24360129
[Journal Article] Stress induced leakage current generated by hot-hole injection2013
- Author(s)
  Akinobu Teramoto, Hyeonwoo Park, Takuya Inatsuka, Rihito Kuroda, Shigetoshi Sugawa, Tadahiro Ohmi
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 109 Pages: 298-301
- DOI
  10.1016/j.mee.2013.03.116
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360129
[Journal Article] High Sensitivity Dynamic Range Enhanced CMOS Imager with Noise Suppression2008
- Author(s)
  Satoru Adachi, Woonhee Lee, Nana Akahane, Hiromichi Oshikubo, Koichi Mizobuchi and Shigetoshi Sugawa
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages: 2761-2766
- NAID
  10022551652
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360151
[Journal Article] A Very Low Dark Current Temperature-Resistant Wide Dynamic Range Complementary Metal Oxide Semiconductor Image Sensor2008
- Author(s)
  Koichi Mizobuchi, Satoru Adachi, Jose Tajada,Hiromichi Oshikubo, Nana Akahane and Shigetoshi Sugawa
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages: 5390-5395
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360151
[Journal Article] A 200-μV/e^-CMOS Image Sensor With 100k-e^-Full Well Capacity2008
- Author(s)
  Satoru Adachi, Woonhee Lee, Nana Akahane, Hiromichi Oshikubo, Koichi Mizobuchi and Shigetoshi Sugawa
- Journal Title
  
  IEEE Journal of Solid-State Circuits 43
  
  Pages: 823-830
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360151
[Journal Article] 高温下の耐性・撮像性能を改善した広ダイナミックレンジCMOSイメージセンサ2008
- Author(s)
  溝渕孝一, 足立理, 山下友和, 岡村誠一郎, 押久保弘道, 赤羽奈々, 須川成利
- Journal Title
  
  映像情報メディア学会誌 62
  
  Pages: 368-375
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360151
[Journal Article] An Over 200dB DR CMOS Image Sensor Combined a Lateral Overflow Integration with Photo-Current Readout Operation2006
- Author(s)
  Shigetoshi Sugawa
- Journal Title
  
  ITE Technical Report 30-25
  
  Pages: 9-12
- NAID
  10018132659
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] 広ダイナミックレンジイメージセンサの最新動向2006
- Author(s)
  須川成利
- Journal Title
  
  映像情報メディア学会誌 60・3
  
  Pages: 299-302
- NAID
  110006838410
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] Recent Trend on Wide Dynamic Range Image Sensors2006
- Author(s)
  Shigetoshi Sugawa
- Journal Title
  
  The Journal of the institute of Image Information and Television Engineers 60-3
  
  Pages: 299-302
- NAID
  110006838410
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] 横型オーバーフロー蓄積容量と電流読み出し動作を組み合わせたダイナミックレンジ200dB超のCMOSイメージセンサ2006
- Author(s)
  須川成利
- Journal Title
  
  映像情報メディア学会技術報告 30・25
  
  Pages: 9-12
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] 横型オーバーフロー蓄積容量を用いた広ダイナミックレンジCMOSイメージセンサ2005
- Author(s)
  須川成利
- Journal Title
  
  映像情報メディア学会技術報告 29・24
  
  Pages: 29-32
- NAID
  10015700467
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] A 100 dB Dynamic Range CMOS Image Sensor Using a Lateral Overflow Integration Capacitor2005
- Author(s)
  Shigetoshi Sugawa
- Journal Title
  
  2005 IEEE International Solid-State Circuits Conference
  
  Pages: 352-353
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] A Sensitivity and Linearity Improvement of a 100 dB Dynamic Range CMOS Image Sensor Using a Lateral Overflow Integration Capacitor2005
- Author(s)
  Nana Akahane, Shigetoshi Sugawa, et al.
- Journal Title
  
  2005 Symposium on VLSI Circuits (発表予定)
- NAID
  10016894254
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] 横型オーバーフロー蓄積容量を用いた広ダイナミックレンジCMOSイメージセンサ2005
- Author(s)
  須川成利他
- Journal Title
  
  映像情報メディア学会情報センシング研究会 (発表予定)
- NAID
  10015700467
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] A Wide Dynamic Range CMOS Image Sensor Using a Lateral Overflow Integration Capacitor2005
- Author(s)
  Shigetoshi Sugawa
- Journal Title
  
  ITE Technical Report 29-24
  
  Pages: 29-32
- NAID
  10015700467
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Journal Article] A 100 dB Dynamic Range CMOS Image Sensor Using a Lateral Overflow Integration Capacitor2005
- Author(s)
  Shigetoshi Sugawa, et al.
- Journal Title
  
  2005 IEEE International Solid-State Circuits Conference
  
  Pages: 352-353
- Data Source
  KAKENHI-PROJECT-16360165
[Patent] 光センサ及びその信号読み出し方法並びに固体撮像装置及びその信号読み出し方法2015
- Inventor(s)
  須川成利、黒田理人、若嶋駿一
- Industrial Property Rights Holder
  国立大学法人東北大学
- Industrial Property Rights Type
  特許
- Filing Date
  2015
- Acquisition Date
  2017
- Data Source
  KAKENHI-PROJECT-15H02245
[Patent] Solid-state imaging device, line sensor and optical sensor and method of operating solid-state imaging device2009
- Inventor(s)
  須川成利
- Industrial Property Rights Holder
  東北大学
- Filing Date
  2009-04-14
- Data Source
  KAKENHI-PROJECT-19360151
[Patent] 光センサ、固体撮像装置、および固体撮像装置の動作方法2005
- Inventor(s)
  須川成利
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2005-029615
- Filing Date
  2005-02-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Patent] 光センサ、固体撮像装置、および固体撮像装置の動作方法2005
- Inventor(s)
  須川成利他
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2005-029615
- Filing Date
  2005-02-04
- Data Source
  KAKENHI-PROJECT-16360165
[Patent] 光センサおよび固体撮像装置2005
- Inventor(s)
  須川成利
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2005-029614
- Filing Date
  2005-02-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360165
[Presentation] 高性能イメージセンサを用いたトマトの生理障害と品質の非破壊測定2022
- Author(s)
  青代香菜子・黒田理人・堀千秋・中山翔太・堀江駿斗・須川成利・金山喜則
- Organizer
  園芸学会
- Data Source
  KAKENHI-PROJECT-21H04721
[Presentation] High-speed multi-bandpass liquid-crystal filter using dual-frequency liquid crystal for real-time spectral imaging system2018
- Author(s)
  Takahiro Ishinabe, Kohei Terashima, Kazuhiro Wako, Yasuyuki Fujihara, Yusuke Aoyagi, Maasa Murata, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Yosei Shibata, Shigetoshi Sugawa, Hideo Fujikake
- Organizer
  SPIE PHOTONICS WEST 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Preliminary Chip Evaluation toward Over 50Mfps Burst Global Shutter Stacked CMOS Image Sensor2018
- Author(s)
  Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  IS&T International Symposium on Electronic Imaging 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 最高撮像速度5000万コマ/秒を有するプロトタイプグローバルシャッタ高速CMOSイメージセンサ2018
- Author(s)
  鈴木学, 鈴木将, 黒田理人, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Impact of Random Telegraph Noise with Various Time Constants and Number of States in CMOS Image Sensors2017
- Author(s)
  Rihito Kuroda, Akinobu Teramoto, Shigetoshi Sugawa
- Organizer
  2017 International Image Sensor Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 高密度アナログメモリを搭載した超高速グローバルシャッタCMOSイメージセンサ2017
- Author(s)
  鈴木学, 鈴木将, 黒田理人, 熊谷勇喜, 千葉亮, 三浦規之, 栗山尚也, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Place of Presentation
  NHK放送技術研究所（東京都・世田谷区）
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 局所的ストレス誘起ゲートリーク電流の統計的分布の解析とSi表面平坦化工程による低減2017
- Author(s)
  朴賢雨, 黒田理人, 後藤哲也, 諏訪智之, 寺本章伸, 木本大幾, 須川成利
- Organizer
  電子情報通信学会・シリコン材料・デバイス研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Impact of SiO2/Si Interface Micro-roughness on SILC Distribution and Dielectric Breakdown: A Comparative Study with Atomically Flattened Devices2017
- Author(s)
  Hyeonwoo Park, Tetsuya Goto, Rihito Kuroda, Akinobu Teramoto, Tomoyuki Suwa, Daiki Kimoto, Shigetoshi Sugawa
- Organizer
  International Reliability Physics Symposium 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 紫外吸光とチャージアンプ回路を用いた高感度・小型リアルタイムガス濃度計2017
- Author(s)
  石井秀和, 永瀬正明, 池田信一, 志波良信, 白井泰雪, 黒田理人, 須川成利
- Organizer
  電子情報通信学会・シリコン材料・デバイス研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Impact of Drain Current to Appearance Probability and Amplitude of Random Telegraph Noise in Low Noise CMOS Image Sensors2017
- Author(s)
  Shinya Ichino, Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Hyeonwoo Park, Takeru Maeda, Shunichi Wakashima, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa
- Organizer
  2017 International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Narrow-Bandpass Liquid Crystal Filter for Real-Time Multi Spectral Imaging Systems2017
- Author(s)
  Kohei Terashima, Takahiro Ishinabe, Kazuo Wako, Yasuyuki Fujihara, Yusuke Aoyagi, Maasa Murata, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Yosei Shibata, Shigetoshi Sugawa, Hideo Fujikake
- Organizer
  International Display Workshops
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] リアルタイム分光イメージングシステム用の高速ナローバンドパス液晶フィルタ2017
- Author(s)
  寺島康平, 石鍋隆宏, 若生一広, 藤原康行, 青柳雄介, 村田真麻, 那須野悟史, 若嶋駿一, 黒田理人, 柴田陽生, 須川成利, 藤掛英夫
- Organizer
  Optics & Photonics Japan 2017
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 高精度アレイテスト回路計測技術を用いたソースフォロアトランジスタの動作条件変化によるランダムテレグラフノイズの挙動解析2017
- Author(s)
  市野真也, 間脇武蔵, 寺本章伸, 黒田理人, 若嶋駿一, 須川成利
- Organizer
  電子情報通信学会・シリコン材料・デバイス研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 10Mfps 960 Frames Video Capturing Using a UHS Global Shutter CMOS Image Sensor with High Density Analog Memories2017
- Author(s)
  Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Yuki Kumagai, Akira Chiba, Noriyuki Miura, Naoya Kuriyama, Shigetoshi Sugawa
- Organizer
  2017 International Image Sensor Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 急峻pn接合Siダイオード技術を用いた高感度・高速性能低加速電圧電子線検出器2017
- Author(s)
  黒田理人, 幸田安真, 原昌也, 角田博之, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Place of Presentation
  NHK放送技術研究所（東京都・世田谷区）
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] SNR 70dB超のCMOSイメージセンサと半値幅10nmのチューナブルマルチバンドパスフィルタを用いた分光イメージングシステム2017
- Author(s)
  青柳雄介, 藤原康行, 村田真麻, 那須野悟史, 若嶋駿一, 黒田理人, 寺島康平, 石鍋隆宏, 藤掛英夫, 若生一広, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Statistical Analysis of Random Telegraph Noise in Source Follower Transistors with Various Shapes2017
- Author(s)
  Shinya Ichino, Takezo Mawaki, Shunichi Wakashima, Akinobu Teramoto, Rihito Kuroda, Phillipe Gaubert, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa
- Organizer
  2017 International Image Sensor Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Spectral Imaging System with an Over 70dB SNR CMOS Image Sensor and Electrically Tunable 10nm FWHM Multi-Bandpass Filter2017
- Author(s)
  Yasuyuki Fujihara, Yusuke Aoyagi, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Kohei Terashima, Takahiro Ishinabe, Hideo Fujikake, Kazuhiro Wako, Shigetoshi Sugawa
- Organizer
  2017 International Image Sensor Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Atomically flat interface for noise reduction in SOI-MOSFETs2017
- Author(s)
  Gaubert P.、Kircher A.、Park H.、Kuroda R.、Sugawa S.、Goto T.、Suwa T.、Teramoto A.
- Organizer
  2017 International Conference on Noise and Fluctuations
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Experimental Investigation of Localized Stress Induced Leakage Current Distribution in Gate Dielectrics Using Array Test Circuit2017
- Author(s)
  Hyeonwoo Park, Tomoyuki Suwa, Rihito Kuroda, Akinobu Teramoto, Shigetoshi Sugawa
- Organizer
  2017 International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 画素SFで発生するランダムテレグラフノイズの統計的解析～トランジスタ形状・時定数・遷移数の影響～2017
- Author(s)
  黒田理人, 寺本章伸, 市野真也, 間脇武蔵, 若嶋駿一, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 撮像速度1000万コマ／秒を超える高速度CMOSイメージセンサ技術の進展2017
- Author(s)
  黒田理人, 鈴木学, 鈴木将, 須川成利
- Organizer
  高速度イメージングとフォトニクスに関する総合シンポジウム2017
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Analysis of Random Telegraph Noise Behaviors of nMOS and pMOS toward Back Bias Voltage Changing2017
- Author(s)
  Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Shinya Ichino, Shigetoshi Sugawa
- Organizer
  2017 International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Spectral Absorption Imaging with an Over 70dB SNR CMOS Image Sensor2017
- Author(s)
  Maasa Murata, Yasuyuki Fujihara, Yusuke Aoyagi, Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  電気関係学会東北支部連合大会
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] An Over 1Mfps Global Shutter CMOS Image Sensor with 480 Frame Storage Using Vertical Analog Memory Integration2016
- Author(s)
  Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Yuki Kumagai, Akira Chiba, Noriyuki Miura, Naoya Kuriyama, Shigetoshi Sugawa
- Organizer
  2016 IEEE International Electron Devices Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2016-12-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A High Sensitivity Compact Gas Concentration Sensor using UV Light and Charge Amplifier Circuit2016
- Author(s)
  Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda,Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  IEEE Sensors 2016
- Place of Presentation
  Orlando, USA
- Year and Date
  2016-10-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 190-1100 nm Waveband Multispectral Imaging System using High Light Resistance Wide Dynamic Range CMOS Image Sensor2016
- Author(s)
  Yasuyuki Fujihara, Satoshi Nasuno, Shunichi Wakashima, Yusuke Aoyagi, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  IEEE Sensors 2016
- Place of Presentation
  Orlando, USA
- Year and Date
  2016-10-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] CMOSイメージセンサの高速化・高感度化・広光波長帯域化技術2016
- Author(s)
  黒田理人, 須川成利
- Organizer
  第191回研究集会シリコンテクノロジー分科会ナノ・接合技術研究会「接合技術の新展開」
- Place of Presentation
  宝塚大学梅田キャンパス（大阪府・大阪市）
- Year and Date
  2016-02-28
- Invited
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 190-1100 nm waveband multispectral imaging system using high UV-light resistance 94dB dynamic range CMOS image sensor2016
- Author(s)
  Yasuyuki Fujihara, Satoshi Nasuno, Shunichi Wakashima, Yusuke Aoyagi, Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  3rd International Workshop on Image Sensors and Imaging Systems
- Place of Presentation
  東京工業大学田町キャンパス（東京都・港区）
- Year and Date
  2016-11-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] On-Chip Optical Filter Technology with Low Extinction Coefficient SiN for Ultraviolet-Visible-Near Infrared Light Waveband Spectral Imaging2016
- Author(s)
  Yasumasa Koda, Yhang Ricardo Sipauba Carvalho da Silva, Loic Julien, Daisuke Sawada, Tetsuya Goto, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
- Place of Presentation
  函館国際ホテル（北海道・函館市）
- Year and Date
  2016-07-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Low Frequency Noise of Accumulation-Mode n- and p-MOSFETs fabricated on (110) Crystallographic Silicon-Oriented Wafers2016
- Author(s)
  Philippe Gaubert, Akinobu Teramoto and Shigetoshi Sugawa
- Organizer
  2016 International Conference on Solid State Devices and Materials
- Place of Presentation
  つくば国際会議場（茨城県・つくば市）
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Dead-time free global shutter stacked CMOS image sensor with in-pixel LOFIC and ADC using pixel-wise connections2016
- Author(s)
  Rihito Kuroda, Hidetake Sugo, Shunichi Wakashima, Shigetoshi Sugawa
- Organizer
  3rd International Workshop on Image Sensors and Imaging Systems
- Place of Presentation
  東京工業大学田町キャンパス（東京都・港区）
- Year and Date
  2016-11-17
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A High Sensitivity 20Mfps CMOS Image Sensor with Readout speed of 1Tpixel/sec for Visualization of Ultra-high Speed Phenomena2016
- Author(s)
  Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  The 31st International Congress on High-speed Imaging and Photonics
- Place of Presentation
  ホテル阪急エキスポパーク（大阪府・吹田市）
- Year and Date
  2016-11-07
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Dynamic Response of Random Telegraph Noise Time Constants toward Bias Voltage Changing2016
- Author(s)
  T. Mawaki, A. Teramoto, S. Ichino, R. Kuroda, T. Goto, T. Suwa, S. Sugawa
- Organizer
  平成28年度電気関係学会東北支部連合大会
- Place of Presentation
  東北工業大学八木山キャンパス（宮城県・仙台市）
- Year and Date
  2016-08-30
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 画素毎の接続を用いた画素内に横型オーバーフロー蓄積容量およびAD変換器を有する露光時間途切れのないグローバルシャッタ積層型CMOSイメージセンサ2016
- Author(s)
  黒田理人, 須郷秀武, 若嶋駿一, 須川成利
- Organizer
  映像情報メディア学会技術報告・情報センシング研究会
- Place of Presentation
  機会振興会館（東京都・港区）
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Random Telegraph Noise Measurement and Analysis based on Arrayed Test Circuit toward High S/N CMOS Image Sensors2016
- Author(s)
  Rihito Kuroda, Akinobu Teramoto and Shigetoshi Sugawa
- Organizer
  29th IEEE International Conference on Microelectronic Test Structures
- Place of Presentation
  メルパルク横浜（神奈川県・横浜市）
- Year and Date
  2016-03-28
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Dead-time Free Global Shutter CMOS Image Sensor with in-pixel LOFIC and ADC using Pixel-wise Connections2016
- Author(s)
  Rihito Kuroda, Hidetake Sugo, Shunichi Wakashima, and Shigetoshi Sugawa
- Organizer
  Symposium on VLSI Circuits 2016報告会
- Place of Presentation
  神戸大学・梅田インテリジェントラボラトリ（大阪府・大阪市）
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Dead-time Free Global Shutter CMOS Image Sensor with in-pixel LOFIC and ADC using Pixel-wise Connection2016
- Author(s)
  Hidetake Sugo, Shunichi Wakashima, Rihito Kuroda, Yuichiro Yamashita, Hirofumi Sumi, Tzu-Jui Wang, Po-Sheng Chou, Ming -Chieh Hsu and Shigetoshi Sugawa
- Organizer
  2016 Symposium on VLSI Circuits
- Place of Presentation
  Honolulu, USA
- Year and Date
  2016-06-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 動作電圧変化時の過渡状態におけるランダムテレグラフノイズの挙動に関する研究2016
- Author(s)
  間脇武蔵, 寺本章伸, 黒田理人, 市野真也, 後藤哲也, 諏訪智之, 須川成利
- Organizer
  電子情報通信学会技術研究報告・シリコン材料・デバイス研究会
- Place of Presentation
  東北大学青葉山キャンパス（宮城県・仙台市）
- Year and Date
  2016-10-26
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Wide dynamic range LOFIC CMOS image sensors: principle, achievements and extendibility2016
- Author(s)
  Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  International Forum on Detectors for Photon Science
- Place of Presentation
  富士ビューホテル（山梨県・富士河口湖町）
- Year and Date
  2016-02-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A 20Mfps Global Shutter CMOS Image Sensor with Improved Sensitivity and Power Consumption2015
- Author(s)
  Shigetoshi Sugawa, Rihito Kuroda, Tohru Takeda, Fan Shao, Ken Miyauchi and Yasuhisa Tochigi
- Organizer
  2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
- Place of Presentation
  Vaals, Netherlands
- Year and Date
  2015-06-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A CMOS Image Sensor with 240μV/e- Conversion Gain, 200ke- Full Well Capacity and 190-1000nm Spectral Response2015
- Author(s)
  Satoshi Nasuno, Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
- Place of Presentation
  Vaals, Netherlands
- Year and Date
  2015-06-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] ゲート絶縁膜/Si界面の原子オーダー平坦化によるランダムテレグラフノイズ低減効果2015
- Author(s)
  黒田理人, 後藤哲也, 赤川直也, 木本大幾, 寺本章伸, 須川成利
- Organizer
  映像情報メディア学会技術報告　情報センシング研究会
- Place of Presentation
  東京理科大学森戸記念館（東京都・新宿区）
- Year and Date
  2015-05-08
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] 電荷電圧変換ゲイン240uV/e-、飽和電子数200ke-、感度波長帯域190-1000nmを有するCMOSイメージセンサ2015
- Author(s)
  那須野悟史, 若嶋駿一, 楠原史章, 黒田理人, 須川成利
- Organizer
  映像情報メディア学会技術報告　情報センシング研究会
- Place of Presentation
  機会振興会館（東京都・港区）
- Year and Date
  2015-09-18
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition2015
- Author(s)
  Akinobu Teramoto, Yukihisa Nakao, Tomoyuki Suwa, Keiichi Hashimoto, Tsukasa Motoya, Masaki Hirayama, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  227th Meeting of The Electrochemical Society
- Place of Presentation
  Chicago, USA
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System2015
- Author(s)
  Hisaya Sugita, Yasukasa Koda, Tomoyuki Suwa, Rihito Kuroda, Tetsuya Goto, Hidekazu Ishii, Satoru Yamashita, Akinobu Teramoto, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  227th Meeting of The Electrochemical Society
- Place of Presentation
  Chicago, USA
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern2015
- Author(s)
  Tetsuya Goto, Rihito Kuroda, Tomoyuki Suwa, Akinobu Teramoto, Naoya Akagawa, Daiki Kimoto, Shigetoshi Sugawa, Tadahiro Ohmi, Yutaka Kamata, Yuki Kumagai and Katsuhiko Shibusawa
- Organizer
  227th Meeting of The Electrochemical Society
- Place of Presentation
  Chicago, USA
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] CMOSイメージセンサの高感度化・高速化・光波長広帯域－IISW2015・VLSI2015東北大学報告より－2015
- Author(s)
  須川成利
- Organizer
  次世代画像入力ビジョンシステム部会
- Place of Presentation
  機会振興会館（東京都・港区）
- Year and Date
  2015-08-07
- Invited
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] フローティングディフュージョン容量成分の解析・低減技術と高感度・高飽和CMOSイメージセンサへの適用2015
- Author(s)
  楠原史章, 若嶋駿一, 那須野悟史, 黒田理人, 須川成利
- Organizer
  映像情報メディア学会技術報告　情報センシング研究会
- Place of Presentation
  機会振興会館（東京都・港区）
- Year and Date
  2015-09-18
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A Linear Response Single Exposure CMOS Image Sensor with 0.5e- Readout Noise and 76ke- Full Well Capacity2015
- Author(s)
  Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  2015 SYMPOSIUM ON VLSI CIRCUITS
- Place of Presentation
  リーガロイヤルホテル京都（京都府・京都市）
- Year and Date
  2015-06-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] A 80% QE High Readout Speed 1024 Pixel Linear Photodiode Array for UV-VIS-NIR Spectroscopy2015
- Author(s)
  Rihito Kuroda, Takahiro Akutsu, Yasumasa Koda, Kenji Takubo, Hideki Tominaga, Ryuuta Hirose, Tomohiro Karasawa and Shigetoshi Sugawa
- Organizer
  2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
- Place of Presentation
  Vaals, Netherlands
- Year and Date
  2015-06-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] UV/VIS/NIR imaging technologies: challenges and opportunities2015
- Author(s)
  Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  2015 SPIE Sensing Technology + Applications
- Place of Presentation
  Baltimore, USA
- Year and Date
  2015-04-20
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Analysis and reduction of leakage current of 2kV monolithic isolator with wide trench spiral isolation structure2015
- Author(s)
  Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials
- Place of Presentation
  札幌コンベンションセンター（北海道・札幌市）
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma2015
- Author(s)
  Tomoyuki Suwa, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Shigetoshi Sugawa and Tadahiro Ohmi
- Organizer
  227th Meeting of The Electrochemical Society
- Place of Presentation
  Chicago, USA
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] An Ultraviolet Radiation Sensor Using Differential Spectral Response of Silicon Photodiodes2015
- Author(s)
  Yhang Ricardo Sipauba Carvalho da Silva, Yasumasa Koda, Satoshi Nasuno, Rihito Kuroda, Shigetoshi Sugawa
- Organizer
  IEEE Sensors 2015
- Place of Presentation
  Busan, South Korea
- Year and Date
  2015-11-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Analysis and Reduction of Floating Diffusion Capacitance Components of CMOS Image Sensor for Photon-Countable Sensitivity2015
- Author(s)
  Fumiaki Kusuhara, Shunichi Wakashima, Satoshi Nasuno, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
- Place of Presentation
  Vaals, Netherlands
- Year and Date
  2015-06-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02245
[Presentation] Demonstrating Individual Leakage Path from RTS of SILC2014
- Author(s)
  A. Teramoto, T. Inatsuka, T. Obara, N. Akagawa, R. Kuroda, S. Sugawa and T. Ohmi
- Organizer
  2014 IEEE International Reliability Physics Symposium
- Place of Presentation
  Waikoloa, USA
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Stress induced leakage current generated by hot-hole injection2013
- Author(s)
  A. Teramoto, H.W. Park, T. Inatsuka, R. Kuroda, S. Sugawa, T. Ohmi
- Organizer
  18th Conference of “Insulating Films on Semiconductors”
- Place of Presentation
  Krakow, Poland
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Demonstrating Distribution of SILC Values at Individual Leakage Spots2013
- Author(s)
  Takuya Inatsuka, Rihito Kuroda, Akinobu Teramoto, Yuki Kumagai, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  IEEE International Reliability Physics Symposium 2013
- Place of Presentation
  Monterey, USA
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] High-Speed and Highly Accurate Evaluation of Electrical Characteristics in MOSFETs2013
- Author(s)
  Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi
- Organizer
  Proceedings of International Conference on IC Design and Technology 2013
- Place of Presentation
  Pavia, Italy
- Invited
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Impact of Injected Carrier Types to Stress Induced Leakage Current Using Substrate Hot Carrier Injection Stress2013
- Author(s)
  H. W. Park, A. Teramoto, T. Inatsuka, R. Kuroda, S. Sugawa, and T. Ohmi
- Organizer
  2013 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices
- Place of Presentation
  Seoul, Korea
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] The Dynamic-Range Enhancement Technology for CMOS Image Sensors2008
- Author(s)
  Shigetoshi Sugawa
- Organizer
  International Conference on Solid State Devices and Materials
- Place of Presentation
  茨城
- Year and Date
  2008-09-25
- Data Source
  KAKENHI-PROJECT-19360151
[Presentation] The Dynamic-R ange Enhancement Technology for CMOS Image Sensors2008
- Author(s)
  Shigetoshi Sugawa et.al.
- Organizer
  International Conference on Solid State Devices and Materials
- Place of Presentation
  つくば
- Year and Date
  2008-09-25
- Data Source
  KAKENHI-PROJECT-19360151
[Presentation] Recent Progress on Wide Dynamic Range CMOS Image Sensors2007
- Author(s)
  Shigetoshi Sugawa
- Organizer
  The 14th International Display Workshop
- Place of Presentation
  札幌コンベンションセンター
- Year and Date
  2007-12-05
- Data Source
  KAKENHI-PROJECT-19360151
[Presentation] Recent Progress on Wide Dynamic Range Image Sensors2007
- Author(s)
  Shigetoshi Sugawa et.al.
- Organizer
  International Display Workshops
- Place of Presentation
  札幌
- Year and Date
  2007-12-05
- Data Source
  KAKENHI-PROJECT-19360151
[Presentation] Analysis of Pixel Gain and Linearity of CMOS Image Sensor using Floating Capacitor Load Readout Operation
- Author(s)
  S. Wakashima, F. Kusuhara, R. Kuroda, S. Sugawa
- Organizer
  IS&T/SPIE Electronic Imaging
- Place of Presentation
  San Francisco, USA
- Year and Date
  2015-02-08 – 2015-02-12
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Demonstrating Individual Leakage Path from Random Telegraph Signal of Stress Induced Leakage Current
- Author(s)
  A. Teramoto, T. Inatsuka, T. Obara, N. Akagawa, R. Kuroda, S. Sugawa and T. Ohmi
- Organizer
  2014 IEEE International Reliability Physics Symposium
- Place of Presentation
  Waikoloa, USA
- Year and Date
  2014-06-03 – 2014-06-05
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Effect of Composition Ratio on Erbium Silicide Work Function on Different Morphology of Si(100) Surface Changed by Alkaline Etching
- Author(s)
  Hiroaki Tanaka, Tomoyuki Suwa, Akinobu Teramoto, Tsukasa Motoya, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  225th Meeting of The Electrochemical Society
- Place of Presentation
  Orlando, USA
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Wide spectral response and highly robust Si image sensor technology
- Author(s)
  Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  2nd Asian Image Sensor and Imaging System Symposium
- Place of Presentation
  東京工業大学キャンパス・イノベーションセンター（東京都・港区）
- Year and Date
  2014-12-01 – 2014-12-02
- Invited
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] A Novel Analysis of Oxide Breakdown based on Dynamic Observation using Ultra-High Speed Video Capturing Up to 10,000,000 Frames Per Second
- Author(s)
  Rihito Kuroda, Fan Shao, Daiki Kimoto, Kiichi Furukawa, Hidetake Sugo, Tohru Takeda, Ken Miyauchi, Yasuhisa Tochigi, Akinobu Teramoto and Shigetoshi Sugawa
- Organizer
  2014 IEEE International Reliability Physics Symposium
- Place of Presentation
  Waikoloa, USA
- Year and Date
  2014-06-03 – 2014-06-05
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Analysis of the breakdown voltage of an area surrounded by the multi-trench gaps in a 4kV monolithic isolator for a communication network interface
- Author(s)
  Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
- Organizer
  2014 International Conference on Solid State Devices and Materials
- Place of Presentation
  つくば国際会議場（茨城県・つくば市）
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Analyzing Correlation between Multiple Traps in RTN Characteristics
- Author(s)
  Toshiki Obara, Akinobu Teramoto, Akihiro Yonezawa, Rihito Kuroda, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  Toshiki Obara, Akinobu Teramoto, Akihiro Yonezawa, Rihito Kuroda, Shigetoshi Sugawa, and Tadahiro Ohmi
- Place of Presentation
  Waikoloa, USA
- Year and Date
  2014-06-03 – 2014-06-05
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions
- Author(s)
  Tetsuya Goto, Shigetoshi Sugawa, Tadahiro Ohmi
- Organizer
  Society for Information Display, SID International Symposium 2014
- Place of Presentation
  San Diego, USA
- Year and Date
  2014-06-01 – 2014-06-06
- Invited
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Flattening Technique of (551) Silicon Surface Using Xe/H2 Plasma
- Author(s)
  Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  225th Meeting of The Electrochemical Society
- Place of Presentation
  Orlando, USA
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] Atomically Flattening of Si Surface of SOI and Isolation-patterned Wafers
- Author(s)
  T. Goto, R. Kuroda, N. Akagawa, T. Suwa, A. Teramoto, X. Li, S. Sugawa, T. Ohmi, Y. Kumagai, Y. Kamata, and T. Shibusawa
- Organizer
  2014 International Conference on Solid State Devices and Materials
- Place of Presentation
  つくば国際会議場（茨城県・つくば市）
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-24360129
[Presentation] High Selectivity in a Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET
- Author(s)
  Yukihisa Nakao, Takatoshi Matsuo, Akinobu Teramoto, Hidetoshi Utsumi, Keiichi Hashimoto, Rihito Kuroda, Yasuyuki Shirai, Shigetoshi Sugawa, and Tadahiro Ohmi
- Organizer
  225th Meeting of The Electrochemical Society
- Place of Presentation
  Orlando, USA
- Year and Date
  2014-05-11 – 2014-05-15
- Data Source
  KAKENHI-PROJECT-24360129

1. OHMI Tadahiro (20016463)

# of Collaborated Projects: 5 results

# of Collaborated Products: 2 results
2. KOTANI Koji (20250699)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
3. KURODA Rihito (40581294)

# of Collaborated Projects: 3 results

# of Collaborated Products: 77 results
4. HIRAYAMA Masaki (70250701)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 金山喜則 (10233868)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
6. 高橋英樹 (20197164)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 加藤一幾 (30613517)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 渡部敏裕 (60360939)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 栗原大輔 (90609439)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. GOTO Tetsiua

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
11. 諏訪智之

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

Sugawa Shigetoshi 須川 成利

SUGAWA Shigetoshi 須川 成利

Research Projects

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Co-Researchers

作物の生理障害の機構解明におけるブレークスルーテクノロジーの開発と検証

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Establishment of a CMOS image sensor with photon countable sensitivity, linear response and high full well capacityPrincipal Investigator

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Accurate measurement and statistical analysis of gate leakage current of MOSFETs with atomically flat interfacePrincipal Investigator

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A high performance CMOS image sensor with high sensitivity and wide dynamic rangePrincipal Investigator

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An over-100dB wide dynamic range solid-state image sensor with high sensitivity and high S/N ratio.Principal Investigator

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Ultra-High-Speed and High-Precision Integration Circuit Using Si(110) Surface Metal Substrate SOI Balanced-CMOS

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微細化世代に依存しないダメージフリー新規コンタクト/ビア形成技術の研究Principal Investigator

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Highly Sesitive and High-resolution Amplification Solid-State Imagine System with Instant Imaging Parareli ProcessorPrincipal Investigator

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Photo-resist. Stripping. Technology. by. Gas-liquid. mixture. for. Highly-efficient. Ultra-short-time. Semiconductor. ManufacturingPrincipal Investigator

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Development of ultra-high-speed LSI with gas-isolated-interconnects and Ta metal gate transistors on SOI substrate

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[Book] The Micro-World Observed by Ultra High-Speed Cameras: We See What You Don’t See, Part III Cameras with CCD/CMOS Sensors, Cameras with on-chip memory CMOS image sensors2017

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[Journal Article] Effect of drain current on appearance probability and amplitude of random telegraph noise in low-noise CMOS image sensors2018

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[Journal Article] Experimental investigation of localized stress-induced leakage current distribution in gate dielectrics using array test circuit2018

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Sugawa Shigetoshi 須川成利

SUGAWA Shigetoshi 須川成利

[Journal Article] [Paper] A CMOS Image Sensor with 240 μV/e<sup>–</sup> Conversion Gain, 200 ke<sup>–</sup> Full Well Capacity, 190-1000 nm Spectral Response and High Robustness to UV light2016