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Esashi Masayoshi  江刺 正喜

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… Alternative Names

ESASHI Masayoshi  江刺 正喜

江刺 正善  エサシ マサヨシ

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Researcher Number 20108468
Other IDs
External Links
Affiliation (Current) 2025: 東北大学, マイクロシステム融合研究開発センター, 名誉教授
Affiliation (based on the past Project Information) *help 2008 – 2011: Tohoku University, 原子分子材料科学高等研究機構, 教授
2007: Tohoku University, 大学院・工学研究科, 教授
2006: Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授
2004 – 2005: Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授
1998 – 2005: 東北大学, 未来科学技術共同研究センター, 教授 … More
2004: 未来科学技術共同研究センター, 教授
2004: 東北大学, 未来科学共同研究センター, 教授
2004: 東北大学, 未来科学技術研究センター, 教授
2002 – 2003: 東北大学, 未来科学技術センター, 教授
2001 – 2003: 東北大学, 未来科学技術共同センター, 教授
2001: 東北大学, 未来研究技術共同研究センター, 教授
2001: 東北大学, 未来科学共同研究センター, 教授
2000: 未来科学技術共同研究センター, 教授
1999: 東北大学, 未来科学技術共同研究サンタ?, 教授
1998: New Industry Creation Hatchery Center, Tohoku University Professor, 教授
1998: 東北大学, 未来科学技術共同研究, 教授
1996 – 1997: 東北大学, 大学院・工学研究科, 教授
1990 – 1997: 東北大学, 工学部, 教授
1990: 東北大学, 工学部精密工学科, 教授
1989: 東北大学, 医学部, 助教授
1986 – 1989: Department of Engineering Tohoku University, 工学部, 助教授
1985: 東北大学, 工, 助教授 Less
Review Section/Research Field
Principal Investigator
Applied physics, general / Microdevices/Nanodevices / 計測・制御工学 / 計算機工学 / 広領域 / Measurement engineering / 計測・制御工学 / 工業分析化学 / 電子機器工学
Except Principal Investigator
電子デバイス・機器工学 … More / Measurement engineering / 広領域 / 資源開発工学 / Applied physics, general / Biomedical engineering/Biological material science / Thermal engineering / Science and Engineering / General physiology / 医学一般 / Neurophysiology and muscle physiology / 計測・制御工学 / Laboratory medicine / Earth system and resources enginnering / Material processing/treatments / Applied physics, general / Cerebral neurosurgery / 病態科学系歯学(含放射線系歯学) / Intelligent mechanics/Mechanical systems / Applied materials science/Crystal engineering / Biomedical engineering/Biological material science / Fluid engineering / Production engineering/Processing studies / Radiation science / Thoracic surgery / 電力工学 Less
Keywords
Principal Investigator
マイクロマシニング / Micromachining / マイクロマシン / MEMS / Micromachine / マイクロマシ-ニング / Sensor / Resonator / センサ / 振動子 … More / 能動カテーテル / 立体的微細加工 / Microactuator / マイクロアクチュエータ / ナノマシニング / CAD / Actuator / アクチュエータ / PZT / Accelerometer / 加速度センサ / Active catheter / 文体的微細加工 / Resonant Sensor / 振動型センサ / 静電駆動 / マイクロマシーニング / 静電サーボ / 静電アクチュエータ / Flow sensor / フローセンサ / カーボンナノチューブ / 原子間力顕微鏡 / 集積化センサ / 圧力センサ / Integrated Sensor / Silicon Sensor / Biomedical Measurement / Pressure Sensor / 半導体センサ / 生体計測 / Parallel processor / Multi-processor / Layout design / Work station / Custom LSI / スイッチングネットワーク / 並列プロセッサ / マルチプロセッサ / レイアウト設計 / ワークステーション / カスタムLSI / Relay / Wireless / リレー / 無線 / マイクロマニシング / Data storage / Nanomachine / 近接場光学顕微鏡 / 近接場光学 / アクチュエーター / 電界放出エミッタ / 圧電アクチュエータ / 走査型プローブ顕微鏡 / 高密度記録 / データストレージ / ナノマシン / Fiber optic pressure sensor / Piezoelectric ceramic / 1-3 Composite / Ultrasonic endoscope / Integrated circuit / Shape memory alloy actuator / 光ファイバ圧力センサ / 圧電セラミック / 1-3コンポジット / 超音波内視鏡 / 集積回路 / 形状記憶合金アクチュエータ / Nanomachining / Nano pattern transfer / Microprobe for NSOM / Capacitive AFM probe / Precise micromachining / Gyroscope / Highly sensitive pressure sensor / NSOM用プローブ / ナノパターン転写 / NMOS用プローブ / 容量型AFMプローブ / 高精度マイクロマシニング / ジャイロスコープ / 高感度圧力センサ / Molding / Pump / Valve / Biochemical analysis / Micro fluid control / 射出成形 / ポンプ / バルブ / 生化学分析 / 微小流体制御 / Three-Dimensional Microfabrication / Motion Control / Gyro / Micro Machine / Inertia Measurement / 運動制御 / ジャイロ / 慣性計測 / Three-dimensinal machining / Distributed machine / Flexible machine / Micro motion system / 能動力カテーテル / 分布型機械 / 分布垂機械 / 柔構造機械 / マイクロ運動システム / Frequency stabilizing / Self oscillation / Electrostatic servo / Anglar rate sensor / Capacitive detection / Electrostatic excitation / 赤外線センサ / 自動振動 / 容量検出 / 角速度センサ / 振動形センサ / Flexible Manipulator / Active Catheter / Electrostatic Servo / Three-dimentional Microfabrication / Electrostatic Actuator / Photofabrication / レ-ザ-加工 / 3次元加工 / 微小機械 / 微小電子機械システム / フォトファブリケ-ション / アクチュエ-タ / ビーム加工 / 反応性イオンエッチング / フォトファブリーケション / ビーム加工技術 / 3次元立体加工 / フォトファブリケーション / 協調制御 / ファトファイブリケーション / Micropump / Microvalve / Micro Flow Control / Integrated System / Clinical Analysis / 化学分析 / マイクロアクチュエ-タ / マイクロポンプ / マイクロバルブ / 微量流体制御 / 集積化システム / 医用化学分析 / MEHS / ダイアモンド / 電子線描画装置 / 電子線描画 / マスクレス露光 / セルフアセンブル / 光制御電子源 / 並列電子線描画 / 電子描画装置 / 垂直エッチング / マクロポーラスシリコン / ウェットエッチング / 鏡面加工 / 深堀り反応性イオンエッチング / ケモメトリック分析 / マルチチャンネル / 分子認識チップ / 深堀反応性イオンエッチング / 水晶振動子マイクロバランス / ナノ構造 / 偏向光 / 密着露光 / 回折格子 / パターン転写 / ニアフィールド光 / 半導体 / 容量形センサ … More
Except Principal Investigator
MEMS / マイクロマシニング / マイクロマシン / マイクロセンサ / FPI / 並列処理 / マイクロアクチュエ-タ / ファブリ・ペロー干渉計 / BiTe / Telesurgery / Flow dynamics / Computer simulation / Aneurysm / Embolization / Intervention / Neurosurgery / Micromachining / 回析格子 / センサ / エンコーダ / Wafer Level Integration / Parallel Processing / マイクロバンプ / ウエーハ張り合わせ技術 / システムオンチップ / ウエーハレベルインテグレーション / ウェーハ張り合わせ技術 / LSI集積化技術 / 半導体技術 / システム オン チップ / ウェーハレベルインテグレーション / シリコン / Optical Accelerometer / Microsensor / 加速度センサー / 地下マイクロセンシング / マイクロゾンデ / 光干渉型加速度センサー / マイクロセンサー / 3次元積層技術 / 低侵襲治療 / ナノマシニング / 熱機械ノイズ / アクチュエータ / ペルチェ素子 / 人工心筋 / 微細加工 / 医療用マイクロマシン / Cerebral Cortex / Microelectrode / Multiunit / マイクロパタ-ニング / マイクロパタ-ンニング / 活動電位 / 大脳皮質 / 脳細胞活動 / 多重微小電極 / 培養平滑筋細胞 / DBCAMP / 平滑筋β受容体 / 単一イオンチャネル / Caイオン電流 / 単一Caイオンチャネル電流 / パッチクランプ / 電圧クランプ / DBcAMP / プリン性受容体 / ムスカリン性受容体 / 培養平滑筋 / Baイオン電流 / 電位依存性Caイオンチャネル / Silicon-to-Silicon Direct Bonding / Low Drift Micro Fabrication / Capacitive Type Pressure Sensor / Biomedical Application / Pressure Sensor / 圧力 / 絶対圧センサ / Si直接接着 / 低ドリフト / 集積化センサ / 容量形圧力センサ / 医用センサ / 圧力センサ / BIOSENSOR / BIOREACTOR / CLINICAL ANALYSIS / 血中成分分析 / 臨床検査 / 生体親和性 / 連続モニター / 固定化酵素 / バイオセンサー / バイオリアクター / 血液中生体成分 / 臨床化学検査 / 連続監視 / automatic tuning / operating point / accelerometer / microsensor / オートチューニング / 動作点 / 加速度センサ / ultrasound / laser treatment / minimally invasive surgery / embryo / intrauterine surgery / マイクロスキャナー / 超音波 / レーザー治療 / 胎児 / 子宮内手術 / 4C detector / Downhole seismic measurement / Multiplexing / Accelerometer / 多成分弾性波検出器 / スペクトル行列 / 3次元粒子運動軌跡 / 4成分弾性波検出器 / 4成分センサ / 坑井内弾性波計測 / 多重化 / micro-casting / glass-encapsulating process / materials micro-processing / microfabrication / micromachining / micro-module / thermoelectric material / PbTe / 熱間等方圧成形 / マイクロキャスティング / ガラスカプセル法 / 微細材料加工 / マイクロファブリケーション / マイクロ熱電素子 / 熱電材料 / grating / encoder / resonant cavity / standing wave / interferometer / stacking structure / integration / photodiode / 直接接合 / 共振構造 / 定在波 / 干渉計 / 積層構造 / 集積化 / フォトダイオード / Scanning Probe Microscopy / Near-field microscopy / High-Density Data-Storage / Ultra-sensitive sensor / Micromachinihg / 高感度センシング / 微小振動子 / 走査型プローブ顕微鏡 / 近接場光学顕微鏡 / 高感度センサー / 走査型プローブ / 高密度記録 / Neuroendovascular Therapy / 血管内治療 / シミュレーション / 三次元画像処理 / 脳動脈硬化 / コンピューター / 動脈硬化 / 三次元画像 / 脳動脈瘤 / 脳血管障害 / 脳卒中 / 脳血管 / Neuroendovascular therapy / Large Scale Integration Technology / Semiconductor Technology / Micro-Bump / Wafer Bonding Technology / System on Chip / Optical Waveguide / 光導波路 / Artificial Heart Muscle / Active Catheter / Thermoelectric Actuator / Peltier Actuator / Shape Memory Alloy / Peltier Elements / 人工補助心筋 / 能動カテーテル / 熱電運動素子 / ペルチェ運動素子 / 形状記憶合金 / Lithography / Sensor / Robot / Silicon / Grating / Encoder / 精密機器 / 光エンコーダ / 光リソグラフィ / 非平面リソグラフィ / ロボット用エンコーダ / ロータリーエンコーダ / 光計測 / リソグラフィ / ロボット / グレイティング / LSI / Semiconductor / Memory / Optical Interconnection / System on a Chip / Three Dimensional Integration / メモリー / 光インターコネクション / 3次元集積化技術 / evaluation method of cariogenicity / hydrogen-ion concentration / cariogenicity / critical pH / calcium-ion concentration / ion-sensitive field-effect transistor electrode / miniaturized calcium-ion electrode / 齲蝕誘発性評価法 / 水素イオン濃度 / 齲蝕誘発性 / 臨界pH / カルシウムイオン濃度 / イオン感受性電界効果トランジスタ電極 / 微小カルシウム電極 / NANO-OPTICS / ETCHING / SUB-WAVELENGTH / MICROMACHINING / ANTI-REFLECTION / GRATING / 無反射表面 / 高アスペクト比エッチング / 回折格子 / 光学素子 / 電子線描画 / 微細格子 / モスアイ構造 / 反射防止 / グレーティング / サブ波長格子 / ナノ光学 / エッチング / サブ波長 / 無反射 / グレーディング / Masticatory Function / Masticatory Organ / Analysis of Jaw Movement / Analysis of Tooth Wear / Biting Force Sensor / 咀嚼機能 / 咀嚼器官 / 顎運動測定 / 咬耗測定 / 咬合力センサ / Microsonde / Radon sensor / FBG / Optical yhdrophone / Capacitive Accelerometer / 弾性波センサー / シリコンプロセス / 光干渉型振動計 / ラドンセンサー / ファイバーグレーティングセンサー / 光干渉型ハイドロフォン / 容量型加速度センサー / WAFER BONDING / 3D INTEGRATION / PARALLEL PROCESSING / NEURAL NETWORK / ASSOCIATION / LEARNING / REAL-TIME / IMAGE PROCESSING / 三次元積層技術 / 張り合わせ技術 / ニューラルネットワーク / 連想機能 / 学習機能 / リアルタイム / 視覚情報処理 / ULSI / Deca-nano device / Device Simulation / Parallel Monte Carlo Analysis / Bus Bottle Neck / High Speed parallel Computing System / Three Dimensional Integrated Shard Memory / Three Dimensional Integration Technology / 大規模集積回路 / 極微細半導体素子 / デバイスシミュレーション / 並列モンテカルロ解析 / バスボトルネック / 超高速並列処理システム / 3次元集積型実共有メモリ / control fine gas flow / bakable / Au-Si eutectic bending / etching stop / corrugated diaphragm / micro valve / micro flow control system / monolayr growth / 真空センサ / フローセンサ / シリコンアクチュエータ / シリコンマイクロマシ-ニング / 圧空バルブ / シリコンマイクロマシニング / 微小流量 / ベ-カブル / 共晶接合 / エッチストップ / コルゲーションダイヤフラム / マイクロバルブ / 流量制御システム / 分子層成長 / Sleep apnea / Consciousness level / Autonomic activities / State dependency / Low power consumption / Large scale memory / Long-term recording / Programmable / 心臓血管系 / フラッシュメモリ / インパルス応答 / 心電図データ圧縮 / インターフェース / 意識状態 / 長期生体情報記録システム / 睡眠時無呼吸症候群 / 意識水準 / 自律神経系活動 / 状態依存性 / 低消費電力 / 大容量メモリ / 長期計測 / プログラマブル / Erosion / Bubble / Jet / Caviation / Nozzle / Ultra-pure-water / Ultra-highspeed-flow / Micro-flow / 空気含有度 / はく離 / マクロ液流 / 渦 / 壊食 / 気泡 / 噴流 / キャビテーション / ノズル / 超純水 / 超高速流 / マイクロ液流 / 内視鏡 / ナノイメージング / ピエゾ抵抗 / 変位センサ / 単電子トランジスタ / 磁気共鳴力顕微鏡 / 量子限界 / ダイポールアンテナ / 振動子 / 熱型輻射センサ / テラヘルツ波 / 熱型センサ / スパッタ / ZnO / 近接場 / 光伝導アンテナ / THz波 / コーティング / フォトリソグラフィー / 円筒面MEMSプロセス / 低侵襲検査治療 / カンチレバー / 光駆動 / 光ファイバ / スキャナ / 微小光学部品 / グレイスケールリソグラフィ / 非球面レンズ / SiC(炭化珪素) / 微細光学部品 / ガラスプレス / リアルタイム線量計 / 体内埋め込み型 / 放射線治療 / ボールスクリュー / ポールスクリュー / 心室カップ / エレクトロハイドローリック / 血圧反射制御 / ナノセンサ / ナノテクノロジー / 血行力学的効果 / 高齢者 / リモートセンシング / 埋め込み式型人工臓器 / 経皮エネルギ伝送システム / 循環器 / マイクロパワー源 / マイクロスラスター / 熱電発電 / 燃料改質器 / 触媒燃焼 / 化学分析 / 生体高分子 / 細胞 / バイオテクノロジー / 科学分析 / 微小空間内化学反応 / マイクロ流体システム / 表面処理 / 細胞培養 / 細胞利用センシング / ナノバイオ / 流体 / SOI / ウェーハ張り合わせ / イメージセンサ / 液晶表示素子 / スマートピクセル / 画像処理 / ナノテクノロジ- / マイクロテクノロジ- / 微小電気機械システム / マイクロ理工学 / マイクロメカトロニクス / マイクロマシ-ニング / 微小機械 / マイクロ運動システム / コンダクタンス減少性脱分極 / 細胞内Ca制御 / 過分極性K電流 / アドレナリン受容体 / チスカリン受容体 / 興奮性受容体作動性チャネル / 平滑筋細胞 / セルフ・アセンブリング / 自律分散システム / マイクロマシン用材料 / エキスプロラトリ・エンジニアリング / 超微細加工技術 / マイクロ・ロボット Less
  • Research Projects

    (56 results)
  • Research Products

    (57 results)
  • Co-Researchers

    (108 People)
  •  Next Generation Therapeutic Devices for Deflectable Endoscope

    • Principal Investigator
      HAGA Yoichi
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Biomedical engineering/Biological material science
    • Research Institution
      Tohoku University
  •  Massive Parallel Electron Beam Lithography SystemPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      2007 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tohoku University
  •  ナノメカニカル・単電子トランジスタによるナノセンシング

    • Principal Investigator
      小野 崇人
    • Project Period (FY)
      2007 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  高機能細径医療ツールのための円筒面に適したMEMSプロセスの開発

    • Principal Investigator
      MATSUNAGA Tadao
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Biomedical engineering/Biological material science
    • Research Institution
      Tohoku University
  •  テラヘルツ波ナノ分光MEMSデバイス

    • Principal Investigator
      小野 崇人
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  極細径光ファイバ先端駆動形2次元マイクロ光スキャナ

    • Principal Investigator
      TOTSU Kentaro
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tohoku University
  •  生産性の高いシリコンのウェット垂直エッチングPrincipal Investigator

    • Principal Investigator
      江刺 正喜
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tohoku University
  •  SiCモールドを用いたマイクロ非球面ガラスレンズのプレス加工に関する研究

    • Principal Investigator
      田中 秀治
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  RF MEMS device based on micromachiningPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      2004 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tohoku University
  •  Development of an optical interference micro accelerometer with automatic tuning system

    • Principal Investigator
      ASANUMA Hiroshi
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Earth system and resources enginnering
    • Research Institution
      Tohoku University
  •  放射線治療におけるリアルタイム式体内埋め込み型放射線測定システムの開発

    • Principal Investigator
      山田 章吾
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Radiation science
    • Research Institution
      Tohoku University
  •  微小空間における燃焼の制御・利用に関する研究

    • Principal Investigator
      TANAKA Syuji
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Thermal engineering
    • Research Institution
      Tohoku University
  •  マルチチャンネル水晶振動子マイクロバランスの超小型化、高感度化に関する研究Principal Investigator

    • Principal Investigator
      江刺 正喜
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      工業分析化学
    • Research Institution
      Tohoku University
  •  埋め込み型インテリジェント人工心筋の開発

    • Principal Investigator
      YAMBE Tomoyuki
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Thoracic surgery
    • Research Institution
      Tohoku University
  •  Development of intrauterine endoscopic surgical tools at early stage during pregnancy

    • Principal Investigator
      HAGA Yoichi
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      広領域
    • Research Institution
      Tohoku University
  •  マイクロケモメカトロニクスの創成に関する総括研究

    • Principal Investigator
      藤田 博之
    • Project Period (FY)
      2001 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      The University of Tokyo
  •  Distributed Micro-Nanomachines which move with nanometer precisionPrincipal Investigator

    • Principal Investigator
      ESASHI Masahi
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  Development of four component optical interference micro accelerometer for dowohole seismic measurement

    • Principal Investigator
      NIITSUMA Hiroaki
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      資源開発工学
    • Research Institution
      Tohoku University
  •  Wafer-Scale Dynamic Neural-Network-System with Optical Waveguide

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tohoku University
  •  Development of Tele-Neuroendovascular Therapy Support System

    • Principal Investigator
      TAKAHASHI Akira
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Cerebral neurosurgery
    • Research Institution
      Tohoku University
  •  Micro/Nanomachined Device for High-density Data Storage

    • Principal Investigator
      ONO Takahito
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  Development of integrated optical measurement systems having layered structures

    • Principal Investigator
      SASAKI Minoru
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  Manufacturing of Thermoelectric Microdevices

    • Principal Investigator
      LI Jing-feng
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Material processing/treatments
    • Research Institution
      TOHOKU UNIVERSITY
  •  Wafer Level Parallel Processing System Using Cubic Integration Technology

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Fabrication of micro rotary encoder for robot finger and precision machines

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  Creation of New Research Field and Industry Using Thermoelectric Actuators

    • Principal Investigator
      MARUYAMA Shigenao
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for University and Society Collaboration
    • Research Field
      Thermal engineering
    • Research Institution
      Tohoku University
  •  Joint Research on Micro Fluid Control SystemPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  STUDY OF ULTRA-FINE STRUCTURED OPTICAL COMPONENTS USIING MICROMACHINING

    • Principal Investigator
      HANE Kazuhiro
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      TOHOKU UNIVERSITY
  •  Ultra Sensing Using Highly Precise MicromachiningPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      Measurement engineering
    • Research Institution
      Tohoku University
  •  Multi-functional Active CatheterPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      広領域
    • Research Institution
      Tohoku University
  •  Trial manufacture of a miniaturized calcium-ion electrode, and its practical application to determine critical pH and to develop a new evaluation method of food cariogenicity

    • Principal Investigator
      YAMADA Tadashi
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      病態科学系歯学(含放射線系歯学)
    • Research Institution
      TOHOKU UNIVERSITY
  •  ニアフィールド光による波長限界を越える超微細パターンの一括転写Principal Investigator

    • Principal Investigator
      江刺 正喜
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tohoku University
  •  THREE-DIMENSIONALLY STACKED IMAGE PROCESSING SYSTEM WITH LEARNING FUNCTION

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Development of microsensors for subsurface microsensing

    • Principal Investigator
      NIITSUMA Hiroaki
    • Project Period (FY)
      1997 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      資源開発工学
    • Research Institution
      Tohoku University
  •  Analysis of masticatory function and oral morphology using the newly developed tooth wear sensing method

    • Principal Investigator
      SATA Toshio
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      広領域
    • Research Institution
      Toyota Technological Institute
  •  HIGH SPEED PARALLEL COMPUTER SYSTEM USING 3-DIMENTIONAL INTEGLATED SHARED MEMORY

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  イメージセンサと液晶表示素子を一体化した即時画像処理システム

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Tohoku University
  •  Joint study on high performance resonant sensorsPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Institution
      TOHOKU UNIVERSITY
  •  Flexible micro motion-systems having distributed actuatorsPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  Integrated Inertia Measurement SystemsPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      計測・制御工学
    • Research Institution
      Tohoku University
  •  Construction of Programmable Long-Term Measurement and Recording System for Biological Signals

    • Principal Investigator
      YAMAMOTO Mitsuaki
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Biomedical engineering/Biological material science
    • Research Institution
      Tohoku University
  •  Micro flow systems for semiconductor monolayr growth process

    • Principal Investigator
      KURABAYASHI Toru
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      Tohoku University
  •  A Study on Ultra-Highspeed Micro-Flow

    • Principal Investigator
      OBA Risaburo
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      Fluid engineering
    • Research Institution
      Tohoku University
  •  Joint Study on Integrated Clinical Analysis SystemPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1991 – 1992
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Institution
      Tohoku University
  •  Microactuator by PhotofabricationPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1991 – 1994
    • Research Category
      Grant-in-Aid for Specially Promoted Research
    • Research Institution
      Tohoku University
  •  マイクロインテリジェント運動システムの工学的基礎

    • Principal Investigator
      原島 文雄
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Field
      電力工学
    • Research Institution
      The University of Tokyo
  •  医療用マイクロマシンの研究

    • Principal Investigator
      藤正 巖
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Field
      医学一般
    • Research Institution
      The University of Tokyo
  •  集積化容量形圧力センサの高性能化Principal Investigator

    • Principal Investigator
      江刺 正喜
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      Tohoku University
  •  医療用マイクロマシンの研究

    • Principal Investigator
      藤正 巖
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Field
      医学一般
    • Research Institution
      The University of Tokyo
  •  平滑筋の化学的興奮性受容体の新しいKイオンチャネルの開閉とその制御機構

    • Principal Investigator
      猪又 八郎
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      General physiology
    • Research Institution
      Tohoku University
  •  Implantable Pressure Measurement SystemPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      計測・制御工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Multiunit Recording and Processing System and Its Application

    • Principal Investigator
      TANJI Jun
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      Neurophysiology and muscle physiology
    • Research Institution
      TOHOKU UNIVERSITY
  •  培養平滑筋の分化過程の神経伝達物質受容膜の単一Caイオンチャネル電流の解析

    • Principal Investigator
      猪又 八郎
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      General physiology
    • Research Institution
      Tohoku University
  •  Practicability Studies on Continuous Monitoring of BloodConstituents

    • Principal Investigator
      MURACHI Takashi
    • Project Period (FY)
      1985 – 1987
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      Laboratory medicine
    • Research Institution
      Kyoto University
  •  Development of Low Drift Monolithic Capacitive Pressure sensor for biomedical Applications

    • Principal Investigator
      MATSUO Tadayuki
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      計測・制御工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  Study on layout design station with custom LSIPrincipal Investigator

    • Principal Investigator
      ESASHI Masayoshi
    • Project Period (FY)
      1984 – 1985
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      計算機工学
    • Research Institution
      Tohoku University

All 2011 2010 2009 2008 2007 2006 2005 2004 2003

All Journal Article Presentation Book Patent

  • [Book] はじめてのMEMS2011

    • Author(s)
      江刺正喜
    • Total Pages
      230
    • Publisher
      森北出版株式会社
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Book] Next Generation Actuators Leading Breakthroughs2010

    • Author(s)
      T. Ono, M. Sabri, & M. Esashi
    • Publisher
      PZT Driven Micro XY Stage
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Book] Shape Memory Alloys (Sciyo) Chapter 6 Active Bending Catheter and Endoscope Using Shape Memory Alloy Actuators2010

    • Author(s)
      Y.Haga, T.Mineta, W.Makishi, T.Matsunaga, M.Esashi
    • Data Source
      KAKENHI-PROJECT-20300150
  • [Book] Future Medical Engineering Based on Bionanotechnology (Quartz-Crystal Cantilevered Resonator for Nanometric Sensing)2006

    • Author(s)
      M.Esashi
    • Total Pages
      1115
    • Publisher
      Imperial College Press
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Book] Future Medical Engineering Based on Bionanotechnology (Litium Niobate Bulk Micromachining for Medical Sensors)2006

    • Author(s)
      M.Esashi
    • Total Pages
      1115
    • Publisher
      Imperial College Press
    • Data Source
      KAKENHI-PROJECT-17651080
  • [Book] Frontiers in Electronics (Recent Progress of Application-oriented MEMS through Industry-university Collaboration)2006

    • Author(s)
      M.Esashi et al.
    • Publisher
      World Scientific
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Book] 2006 マイクロマシン/MEMS技術大全2006

    • Author(s)
      江刺 正喜
    • Total Pages
      626
    • Publisher
      電子ジャーナル
    • Data Source
      KAKENHI-PROJECT-17651080
  • [Book] Future Medical Engineering Based on Bionanotechnology (Quartz-Crystal Cantilevered Resonator for Nanometric Sensing)2006

    • Author(s)
      M.Esashi et al.
    • Publisher
      Imperial College Press
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Book] Recent Progress of Application-oriented MEMS through Industry-university Collaboration 「Frontiers in Electronics (Proceedings of the WOFE-04)」[Intl. J. of High Speed Electronics and Systems, 16, 2 (2006) 693-704] (MEMS-Based Thin Film Bulk Acoustic Resonator for Wireless Medical Sensing System)2006

    • Author(s)
      M.Esashi
    • Total Pages
      749
    • Publisher
      World Scientific
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] 使い捨て化と細径化を目指した形状記憶合金を用いた能動屈曲電子内視鏡の開発2011

    • Author(s)
      牧志渉, 池田雅春, 江刺正喜, 松永忠雄, 芳賀洋一
    • Journal Title

      電気学会論文誌E 131巻 3号

      Pages: 102-110

    • NAID

      10027805294

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20300150
  • [Journal Article] Microassembly of PZT actuators into silicon microstrcutures2009

    • Author(s)
      Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
    • Journal Title

      電気学会E部門誌 12

      Pages: 471-472

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Modeling and Experimental validation of the performance of a silicon XY-microstage driven by PZT actuators2009

    • Author(s)
      Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
    • Journal Title

      Journal of Micromechanics and Microengineering 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Modeling and Experimental validation of the performance of a silicon XY-microstage driven by PZT actuators2009

    • Author(s)
      M. F. M. Sabri, T. Ono, M. Esashi
    • Journal Title

      J. Micromech. Microeng 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators2009

    • Author(s)
      M. Sabri、T. Ono, and M. Esashi
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: Vol.19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Bonding of a Si microstructure using field-assisted glass melting2008

    • Author(s)
      H. Seki、T. Ono, Y. Kawai, & M. Esashi
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: Vol.18

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube2008

    • Author(s)
      J. Ho, T. Ono, C. Tsai, & M. Esashi
    • Journal Title

      Nanotechnology

      Volume: Vol.19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Photolithographic fabrication of gated self-aligned parallel electron beamemitters with a single-stranded carbon nanotube2008

    • Author(s)
      Justin Ho, Takahito Ono, Ching-Hsine Tsai. Masavoshi Esashi
    • Journal Title

      Nanotechnology 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Formation of a Flat Conductive Polymer Film Using Template-Stripped Gold(TSG)Surface and Surface-Graft Polymerization for Scanning Multiprobe Data Storage2008

    • Author(s)
      Shinya Yoshida, Takahito Ono, Masayoshi Esashi
    • Journal Title

      e-Journal of Surface Science and Nanotechnology 6

      Pages: 202-208

    • NAID

      130004439098

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded2008

    • Author(s)
      J. Ho, T. Ono, C.-H. Tsai, M. Esashi
    • Journal Title

      carbon nanotube Nanotechnology 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Bonding of a Si microstrcuture using filed-assisted glass melting2008

    • Author(s)
      Hironori Seki, Takahito Ono, Yusuke Kawai and Masayoshi Esashi
    • Journal Title

      Journal of Micromechanics and Microengineering 18

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Fabrication of diamond Schottky emitter array by using electrophoresis pre-treatment and hot-filament chemical vapor deposition2007

    • Author(s)
      C. Tsai, T. Ono, & M. Esashi
    • Journal Title

      Diamond & Related Materials

      Volume: Vol.16 Pages: 1398-1402

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Proximity electron lithography using permeable electron windows2007

    • Author(s)
      W. Cho, T. Ono, & M. Esashi
    • Journal Title

      Applied Physics Letters

      Volume: Vol.91

    • NAID

      120000774969

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Fabrication of diamond Schottky emitter array by using electrophoresis pre-treatment and hot-filament chemical vapor deposition2007

    • Author(s)
      C.-H. Tsai, T. Ono, M. Esashi
    • Journal Title

      Diamond Rel.Mater. 16

      Pages: 1398-1402

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Journal Article] Si技術を使ったMEMS発振器 水晶発振器の置き換えを狙う2006

    • Author(s)
      江刺正喜
    • Journal Title

      日経エレクトロニクス 923

      Pages: 125-134

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] センサネットワークに関連するMEMS技術2006

    • Author(s)
      江刺正喜
    • Journal Title

      電子情報通信学会誌 89・5(印刷中)

    • NAID

      110004735700

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Low Actuation Voltage Capacitive Shunt RF-MEMS Switch having a Corrugated Membrane on a Concave Structure2006

    • Author(s)
      Y.T.Song, H.Y.Lee, M.Esashi
    • Journal Title

      IEICE Transactions on Electronics 89・12(印刷中)

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Si技術を使ったMEMS発振器 水晶発振器の置き換えを狙う2006

    • Author(s)
      江刺正喜 他
    • Journal Title

      日経エレクトロニクス 923

      Pages: 125-134

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Capacitive Resonant Mass Sensor with Frequency Demodulation Detection Based on Resonant Circuit2006

    • Author(s)
      S.J.Kim, T.Ono, M.Esashi
    • Journal Title

      Applied Physics Letters 88

    • NAID

      120000775862

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] MEMS Technology Related to Sensor Network (in Japanese)2006

    • Author(s)
      M.Esashi
    • Journal Title

      ICIEE Journal 89-5

      Pages: 395-398

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] センサネットワークに関連するMEMS技術2006

    • Author(s)
      江刺正喜
    • Journal Title

      電子情報通信学会誌 89・5

      Pages: 395-398

    • NAID

      110004735700

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Precision Silicon MEMS Resonators versus Traditional Quartz (in Japanese)2006

    • Author(s)
      MEsashi et al.
    • Journal Title

      Nikkei Electronics 923

      Pages: 125-134

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Optically Driven Microactuator for Two-Dimensional Laser Scanning2006

    • Author(s)
      Hyun-Chul Kang, Kentaro Totsu, Masayoshi Esashi
    • Journal Title

      Proc. of the Asia-Pacific Conference of Transducers and Micro-Nano Technology (採択済、2006年6月出版予定)

    • Data Source
      KAKENHI-PROJECT-17040002
  • [Journal Article] マイクロマシニングの新展開2006

    • Author(s)
      江刺 正喜
    • Journal Title

      センサ・アクチュエータ・マイクロマシン/ウイーク 2006 (印刷中)

    • Data Source
      KAKENHI-PROJECT-17651080
  • [Journal Article] Fabrication of High Aspect Retio Planar Microcoil Based on Silicon Molding Technique2005

    • Author(s)
      Y.Jiang, T.Ono, M.Esashi
    • Journal Title

      Proceedings of the 22th Sensor Symposium 22

      Pages: 29-32

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] MEMSによるスイッチとRF共振子2005

    • Author(s)
      江刺正喜
    • Journal Title

      第1回MEMSパークコンソーシアム研究会 1

      Pages: 61-64

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier2005

    • Author(s)
      Y.T.Song, H.Y.Lee, M.Esashi
    • Journal Title

      Jap.J.of Applied Physics 44・4A

      Pages: 129-133

    • NAID

      10015470011

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Paremetrically Amprified Resonant Sensor with Psudo-Cooling Effect2005

    • Author(s)
      H.Wakamatsu, T.Ono, M.Esashi
    • Journal Title

      Proceedings MEMS'2005 18

      Pages: 343-346

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] マスクレス露光装置を用いたグレイスケールフォトレジストパターンの作製2005

    • Author(s)
      戸津健太郎, 藤代健太, 田中秀治, 江刺正喜
    • Journal Title

      電気学会全国大会講演論文集 (発表予定)

    • Data Source
      KAKENHI-PROJECT-16656046
  • [Journal Article] Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2005

    • Author(s)
      Y.T.Song, T.Ono, H.Y.Lee, M.Esashi
    • Journal Title

      Technical Digest of Transducers (in press)

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] MEMS resonators : getting the packaging right2005

    • Author(s)
      A.Partridge, M.Lutz, B.Kim, M.Hopcroft, R.N.Candler, T.W.Kenny, K.Petersen, M.Esashi
    • Journal Title

      第9回SEMIマイクロシステム/MEMSセミナー 9

      Pages: 55-58

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] MEMS技術を用いた低侵襲検査治療ツールの開発2005

    • Author(s)
      戸津 健太郎, 芳賀洋一, 江刺正喜
    • Journal Title

      第9回ナノメディシン研究科資料

      Pages: 4-4

    • Data Source
      KAKENHI-PROJECT-17040002
  • [Journal Article] MICRO/NANO GLASS PRESSMOLDINGUSING SILICON CARBIDEMOLDS FABRICATED RY SILICON LOSTMOLDING2005

    • Author(s)
      Kyong-Oh Min, Shuji Tanaka, Masayoshi Esashi
    • Journal Title

      Proc.IEEE MEMS 2005

      Pages: 475-478

    • Data Source
      KAKENHI-PROJECT-16656046
  • [Journal Article] Flat Panel Display用Membrane SW Arrayの研究開発2005

    • Author(s)
      原田和夫, 江刺正喜
    • Journal Title

      第22回「センサ・マイクロマシンと応用システム」シンポジウム(レートニュース) 22

      Pages: 76-76

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Resonance-free HRS MEMS Package for Microwave and Millimeter-wave2005

    • Author(s)
      Y.T.Song, T.Ono, H.Y.Lee, M.Esashi
    • Journal Title

      Technical Digest of Transducers 2005 13

      Pages: 427-432

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] Micro Press Molding of Pyrex Glass using SiC Molds2005

    • Author(s)
      Kyung-Oh Min, Shuji Tanaka, Masayoshi Esashi
    • Journal Title

      Proceedings of the 22nd Sensor Symposium

      Pages: 494-497

    • Data Source
      KAKENHI-PROJECT-16656046
  • [Journal Article] 高速伝送対応のSi貫通配線構造2004

    • Author(s)
      住川雅人, 江刺正喜
    • Journal Title

      エレクトロニクス実装学会学術講演大会

    • NAID

      130004588797

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Journal Article] AlN Based Thin Bulk Acoustic Resonator with an Energy-trapping Structures2004

    • Author(s)
      M.Hara, T.Abe, M.Esashi
    • Journal Title

      Proceedings of the 21th Sensor Symposium 21

      Pages: 23-26

    • Data Source
      KAKENHI-PROJECT-16201027
  • [Patent] 電子線描画装置用光スイッチング電子源2010

    • Inventor(s)
      宮下英俊、小野崇人、江刺正喜、友納栄一、川合祐輔
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Filing Date
      2010-03-02
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Patent] 電子線描画装置用光スイッチング電子源2010

    • Inventor(s)
      宮下英俊, 小野崇人, 江刺正喜, 友納栄一, 川合祐輔
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2010-004599
    • Filing Date
      2010-03-02
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Patent] 立体形状に適したフォトリソグラフィー装置2006

    • Inventor(s)
      芳賀洋一, 松永忠雄, 江刺正喜, 戸津健太郎
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2006-250761
    • Filing Date
      2006-09-15
    • Data Source
      KAKENHI-PROJECT-18650118
  • [Patent] 微小スイッチ2004

    • Inventor(s)
      大山 直樹, 江刺 正喜
    • Industrial Property Rights Holder
      三菱重工(株)
    • Industrial Property Number
      2004-170687
    • Filing Date
      2004-06-09
    • Data Source
      KAKENHI-PROJECT-16201027
  • [Patent] Scanning Mirror Unit and Beam Scanning Probe2004

    • Inventor(s)
      N.Kikuchi, M.Esashi, Y.Haga, M.Maeda
    • Industrial Property Rights Holder
      PENTAX corporation, M.Esashi, Y.Haga
    • Filing Date
      2004-06-09
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14390007
  • [Patent] 走査ミラー、ビーム走査型プローブ2003

    • Inventor(s)
      江刺 正喜, 芳賀 洋一, 前圧 真法, 菊地 直樹
    • Industrial Property Rights Holder
      ペンタックス株式会社, 江刺 正喜, 芳賀 洋
    • Industrial Property Number
      2003-163449
    • Filing Date
      2003-06-09
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14390007
  • [Presentation] Optically controllable emitter array with pn-junction integrated Si tip2011

    • Author(s)
      Y. Tanaka, H. Miyashita, E. Tomono, M. Esashi, & T. Ono
    • Organizer
      24th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Wuppertal, Germany
    • Year and Date
      2011-07-18
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Presentation] 光制御型並列電子源2010

    • Author(s)
      友納栄一, 宮下英俊, 小野崇人, 江刺正喜
    • Organizer
      平成22年 電気学会全国大会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Presentation] A Large Displacement Piezodriven Silicon XY-Microstage2009

    • Author(s)
      M. Sabri, T. Ono, & M. Esashi
    • Organizer
      15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009)
    • Place of Presentation
      Denver, USA
    • Data Source
      KAKENHI-PROJECT-19101005
  • [Presentation] Multiprobe systems for data storage and other applications2008

    • Author(s)
      M. Esashi, T. Ono, & S. Yoshida
    • Organizer
      5th International Symposium on Instrumentation Science and Technology (ISIST' 2008)
    • Place of Presentation
      Shenyang, China
    • Data Source
      KAKENHI-PROJECT-19101005
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    # of Collaborated Products: 0 results
  • 106.  ROOIJ N.F.de
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 107.  WANDT Michae
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 108.  MENZ Wolfgan
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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