菅井 秀郎  SUGAI Hideo

Appl. Phys. Lett

巻: Vol. 104

Appl. Phys. Lett. Vol. 104

巻: 104

Appl. Phys. Express

巻: Vol. 6 ページ: 56202-1

10031174342

Appl. Phys. Express

巻: 6

10031174342

Jpn.J.Appl.Phys.

巻: 50

Chinese Physics B 29

Jpn.J.Appl.Phys. 50

210000138234

電気学会論文誌A

巻: 130 ページ: 930-934

10026693463

電気学会論文誌A 130

ページ: 930-934

10026693463

Chinese Physics B

巻: 19

Plasma Sources Science and Technology 28

ページ: 45009-45018

Proc.30th international symposium on dry process

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Proc. 30th international symposium on dry process

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Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/ 23rd Symp.Plasma Processing, (January 2006, Japan), P-3B-14

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Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

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Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

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Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

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Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

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Proceedings of 6th International Symposium on Dry Process

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Journal of Applied Physics 97・1

Proceedings of 5th International Symposium on Dry process

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静電気学会誌 29・3

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10015672530

Proceedings of 5th International Symposium on Dry process

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Abstracts of 17th International Symposium on Plasma Chemistry

ページ: 56-57

Proceedings of 5th International Symposium on Dry Process

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Journal of Applied Physics 97・1

Abstracts of 17th International Symposium on Plasma Chemistry

ページ: 56-57

American Vacuum Society 52nd Int.Symp.& Exhibition(October 2005, U.S.A) PS-TuP22

ページ: 107-107

XXVII International Conference on Phenomena in Ionized Gases, (July 17-22, Netherlands), 10-200 CD-ROM

Proc.ESCAMPIG 17 (The 17th European Conference on Atomic & Molecular Physics of Ionized Gases

ページ: 31-32

Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

ページ: 503-503

Journal of Applied Physics 95・5

ページ: 5172-5179

Proceedings of 4th International Symposium on Dry Process

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Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

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Proc.International Symposium on Dry Process ‘04

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Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources

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Abstracts of 15th Symposium of Materials Research Society of Japan

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Proc.International Symposium on Dry Process '04

ページ: 47-50

Abstracts Asia Pacific Conference on Plasma Science and Technology/Symposium on Plasma Science for Materials

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Journal of Applied Physics 95・5

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Abstracts Asia Pacific Conference on Plasma Science and Technology / Symposium on Plasma Science for Materials

ページ: 368-368

Abstracts of the 51th International Symposium on American Vacuum Society

ページ: 112-112

Abstracts of 15th Symposium of Materials Research Society of Japan

ページ: 143-143

Proceedings of International Workshop on Plasma Nano-Technology and Its Future Vision

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Journal of Applied Physics 95・5

ページ: 5172-5179

Abstracts of 15th Symposium of Materials Research Society of Japan

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Proceedings of 4th International Symposium on Dry Process

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Japanese Journal of Applied Physics Vol.43, No.11A

ページ: 7696-7700

Japanese Journal of Applied Physics 43・11A

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10014030844

Abstracts of the 57th Annual Gaseous Electronics Conference 49・5

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Proceedings of 4th International Symposium on Dry Process

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Proc.Int.COE Forum on Plasma Science and Technology

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Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

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Surface and Coatings Technology Vol.174-175

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Proc.Int.Sympo.Dry Process '03

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Surface and Coatings Technology 174-175

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American Vacuum Society 52nd Int.Symp. & Exhibition (October 2005, U.S.A) PS-TuP22

ページ: 107-107

Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/23rd Symp.Plasma Processing (January 2006, Japan) P-3B-14

ページ: 727-728

Proc.27th Int.Conf Phenomena in Ionized Gases(ICPIG-2005);(July 2005, The Netherlands) 10-200