GOTO Toshio 後藤俊夫

Researcher Number	50023255
Other IDs
External Links
Affiliation (based on the past Project Information) *help	1997 – 2004: 名古屋大学, 工学研究科, 教授 2003: 名古屋大学, 大学院・工学研究科, 教授 1999 – 2000: 名古屋大学, 大学院・工学研究科, 教授 1987 – 1996: 名古屋大学, 工学部, 教授 1986: Professor, Faculty of Engineering, Nagoya University, 工学部, 助教授 1985: 名古屋大学, 工, 助教授
Review Section/Research Field	Principal Investigator 表面界面物性 / 電子機器工学 / 電子材料工学 / Applied physics, general / 電子デバイス・機器工学 Except Principal Investigator 表面界面物性 / プラズマ理工学 / Science and Engineering / Applied materials
Keywords	Principal Investigator プラズマ / CVD / プロセス / ラジカル / アモルファスシリコン / Ne / He / 自動予備電離方式 / XeClエキシマレーザ / plasma … More / UHF / Process / Radical / Plasma / 多結晶シリコン / 準安定原子 / 拡散定数 / イオン / CF_4プラズマ / 反応速度定数 / 拡散係数 / SiHm非発光ラジカル / シランプラズマ / Metastable Atom / Laser Adsorption Method / Rectangular Cross Section Laser / XeCl Excimer Laser / N_2 Laser / ShortーPulsed UV Laser / Longitudinal Excitation / Automatic Preionization / 電子密度測定 / レーザ吸収分光測定 / 準安定準位密度 / 窒素レーザ / 高速紫外パルスレーザ / 準安定原子密度 / シュタルク幅法 / 電子密度 / レ-ザ吸収分光測定 / 矩形断面レ-ザ管 / XeClエキシマレ-ザ / 窒素レ-ザ / 高速紫外パルスレ-ザ / 縦型放電励起 / 自動予備電離 / Lifetime / Level Excitation Cross Section / Emission Cross Section / Electron Collision / Non-Emissive Radical / <SiH_4> / Plasma Processing / LIF法 / 寿命 / 生成断面積 / 発光断面積 / 電子衝突 / ラジカル非発光種 / Si【H_4】 / プラズマプロセシング / discharge-pumped / Ar gas mixture / automatic preionization / XeCl excimer laser / 紫外レーザ / 放電励起 / Ar希釈 / fiber laser / femtosecond / organic molecule / surface reaction / cavity ring-down / absorption spectroscopy / near-infrared spectroscopy / プラズマプロセス / ファイバレーザー / 波長可変 / ファイバレーザ / フェムト秒 / 有機分子 / 表面反応 / 多重反射 / 吸収分光 / 近赤外分光 / gas phase reaction / process / etching / selective production / radical / electron temperature / 気相反応 / エッチング / 単色化 / 電子温度 / Large-scale / Polycrystalline Silicon / Thin Film / Si原子 / 大口径 / 薄膜 / Diamond / Absorption spectroscopy / Amorphous Silicon / Poly crystalline Silicon / Chemical vapor deposition / FT-IRRAS / 赤外半導体レーザー吸収分光法 / FT-IR / 赤外半導体レーザ吸収分光法 / ダイヤモンド / 吸収分光法 / laser absorption spectroscopy / copper vapor laser / saturated absorption spectroscopy / electron collisional de-excitation / diffusion coefficient / metastable atoms / Cu / 銅原子 / レーザー吸収分光 / 銅蒸気レーザー / 飽和吸収分光 / 電子衝突脱励起 / 銅 / ION / PROCESS / SPECTROSCOPY / MODELING / PARTICLES / LASER / PLASMA / FREE RADICAL / シリコン / 分光 / モデリング / 微粒子 / レーザー / フリーラジカル / 可視レーザー誘起蛍光法 / 赤外半導体レーザー吸収法 / 量子反応 / 省エネルギー / 省資源 / 環境 / 光イオン化質量分析法 / レ-ザ-誘起蛍光法 / CFラジカル / SiH_3ラジカル / リング色素レ-ザ-吸収法 / 赤外半導体レ-ザ-吸収法 / RFシランプラズマ / CF非発光ラジカル / レーザー誘起蛍光法 / 赤外レーザー吸収法 … More Except Principal Investigator プラズマの制御 / 反応性プラズマ / プラズマプロセシング / プラズマ / plasma / 光ファイバ / 非線形光学効果 / ソリトン / 超短パルス / フリーラジカル / nanotube / low temperature / radical / nanowall / align / carbon / ディスプレイ / カーボンナノフレーク / プラズマCVD / カーボンナノチューブ / ナノチューブ / 低温 / ラジカル / ナノウォール / 配向性 / カーボン / silylene / formyl radical / nitrate radical / free radical / シリレン / ホルミルラジカル / 硝酸塩ラジカル / プラズマプロセス / プロセシングプラズマ / 周波数分解光ゲート法 / 波長変換 / パルス捕捉 / 全光スイッチング / 表面反応 / その場観察 / 顕微分光 / 近接場 / 波長可変 / 脂質 / 水 / 多重反射 / レーザー / ファイバー / フェムト秒 / 吸収分光 / 近赤外分光 / ファイバ増幅器 / スーパーコンティニューム光 / ファイバレーザー / 近接場光学顕微鏡 / 放電素過程 / 高温プラズマ / 気体レーザー / スペースプ / 半導体プロセ / プラズマ生成 / 放電プラズマ / 太陽風 / オーロラ / 雷 / 活性種 / 放電 / 励起 / 電離 / プラズマ、表面相互作用 / プラズマ、固体相互作用 / シ-ス / プラズマ・表面相互作用 / プラズマ・固体相互作用 / シース Less

Establishment of dynamic measurement technique of plasma induced subsurface reaction by using wavelength-tunable femtosecond fiber laserPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied physics, general
- Research Institution
  Nagoya University
ソリトンパルスによるパルス捕捉を用いたパルス光の波長制御・スイッチングPrincipal Investigator
- Principal Investigator
  
  後藤俊夫, 西澤典彦
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Nagoya University
Studies on large area and low temperature fabrication and reaction dynamics of aligned carbon nanostructures
- Principal Investigator
  
  HORI Masaru
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
波長可変フェムト秒ファイバレーザーを用いた近接場顕微分光測定による基板表面観察
- Principal Investigator
  
  HORI Masaru
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
放電プラズマ現象とその応用に関する企画調査
- Principal Investigator
  
  河合良信
- Project Period (FY)
  2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kyushu University
環境調和量子反応制御プロセスに関する調査研究Principal Investigator
- Principal Investigator
  
  後藤俊夫
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
電離気体現象とその応用に関する企画調査
- Principal Investigator
  
  佐藤徳芳
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Tohoku University
Studies on selective productions of radicals using electron temperature controlled plasmasPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
Development of next generalion's large-scale functional thin film process Using UHF plasmaPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
Studies on surface reaction process and thin film formation by controlling radicalsPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  表面界面物性
- Research Institution
  Nagoya University
Coordination of the Studies on Free Radical Science
- Principal Investigator
  
  HIROTA Eizi
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  The Graduate University for Advanced Studies
STUDIES ON MEASUREMENTS OF RADICALS IN GAS PHASE USING SPECTROSCOPY TECHNIQUESPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
Study of elementary processes for the lower laser level of the copper vapor laserPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Nagoya University
フリーラジカルの科学
- Principal Investigator
  
  広田榮治
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Institution
  The Graduate University for Advanced Studies
反応性プラズマの制御(とりまとめ)
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Kyoto University
プロセス用プラズマのシース
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Co-operative Research (A)
- Research Field
  
  Applied materials
- Research Institution
  Niihama National College of Technology
  Kyoto University
分光法による反応性プラズマ内の非発光ラジカル密度測定法の開発Principal Investigator
- Principal Investigator
  
  後藤俊夫
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
反応性プラズマの制御
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Kyoto University
分光法による反応性プラズマ内の非発光ラジカル密度測定法の開発Principal Investigator
- Principal Investigator
  
  後藤俊夫
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
反応性プラズマの制御
- Principal Investigator
  
  ITATANI Ryohei
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Kyoto University
分光法による反応生プラズマ内の非発光ラジカル密度測定法の開発Principal Investigator
- Principal Investigator
  
  後藤俊夫
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagoya University
反応性プラズマの制御
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Kyoto University
Study on ShortーPulsed UV Lasers Using New Longitudinal Excitation TechniquesPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1988 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  電子機器工学
- Research Institution
  Nagoya University
反応性プラズマの制御
- Principal Investigator
  
  板谷良平
- Project Period (FY)
  1987
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Institution
  Kyoto University
Studies on non-emissive fragments of radicals of <SiH_4> used for plasma processingPrincipal Investigator
- Principal Investigator
  
  TOSHIO Goto
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  Nagoya University
Developmental Study on a compact He/Ar/XeCl Excimer Laser with Automatic PreionizationPrincipal Investigator
- Principal Investigator
  
  GOTO Toshio
- Project Period (FY)
  1984 – 1985
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  電子機器工学
- Research Institution
  Nagoya University

All 2004 2003

All Journal Article

[Journal Article] Simple chromatic dispersion measurement by use of wavelength tunable Raman soliton pulse and two-photon absorption2004
- Author(s)
  T.Hori, N.Nishizawa, H.Nagai, M.Yoshida, T.Goto
- Journal Title
  
  Electronics Letters Vol.41
  
  Pages: 32-32
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Synthesis of Aligned Carbon Nanostructures by Non-Equilibrium microwave Excited Atmospheric Pressure Plasma CVD2004
- Author(s)
  A.Matsushita, K.Yamakawa, M.Hiramatsu, M.Hori, T.Goto
- Journal Title
  
  Proceedings of International COE Forum on Plasma Science and Technology, 21^<st> Century COE Program : Plasma-Nano
  
  Pages: 227-227
- Data Source
  KAKENHI-PROJECT-14350019
[Journal Article] 高非線形分散シフトファイバを用いた超広帯域スーパーコンティニューム光のコヒーレンスの解析2004
- Author(s)
  岡本絢子, 堀喬, 西澤典彦, 後藤俊夫
- Journal Title
  
  電気学会論文誌 Vol.124-C, No.12
  
  Pages: 2395-2395
- NAID
  10014163109
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Experimental and numerical analysis of widely broadened supercontinuum generation in highly nonlinear dispersion shifted fiber with a femtosecond pulse2004
- Author(s)
  T.Hori, N.Nishizawa, T.Goto, M.Yoshida
- Journal Title
  
  Journal of Optical Society of America B Vol.21
  
  Pages: 1969-1969
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Analysis of coherence in widely broadened supercontinuum generation in highly nonlinear dispersion shifted fiber2004
- Author(s)
  A.Okamoto, T.Hori, N.Nishizawa, T.Goto
- Journal Title
  
  IEEJ Trans.EIS Vol.124
  
  Pages: 2395-2395
- NAID
  10014163109
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Experimental and numerical analysis of widely broadened supercontinuum generation in highly nonlinear dispersion shifted fiber with a femtosecond pulse2004
- Author(s)
  T.Hori, N.Nishizawa, T.Goto, M.Yoshida
- Journal Title
  
  Journal of Optical Society of America B Vol.21, No.11
  
  Pages: 1969-1969
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Simple chromatic dispersion measurement by use of wavelength tunable Raman soliton pulse and two-photon absorption2004
- Author(s)
  T.Hori, N.Nishizawa, H.Nagai, M.Yoshida, T.Goto
- Journal Title
  
  Electronics Letters Vol.41, No.1
  
  Pages: 32-32
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Generation of 14 fs ultrashort pulse in all fiber scheme by use of highly nonlinear hybrid fiber2004
- Author(s)
  T.Hori, N.Nishizawa, T.Goto
- Journal Title
  
  Technical digest of international conference on ultrafast phenomena
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Generation of flatly broadened, wideband and low noise supercontinuum by use of highly nonlinear hybrid fiber2004
- Author(s)
  T.Hori, N.Nishizawa, T.Goto
- Journal Title
  
  Technical digest of conference on lasers and electro-optics (CLEO)
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] 高非線形分散シフトファイバを用いた超広帯域スーパーコンティニューム光のコヒーレンスの解析2004
- Author(s)
  岡本絢子, 堀喬, 西澤典彦, 後藤俊夫
- Journal Title
  
  電気学会論文誌 Vol.124-C
  
  Pages: 2395-2395
- NAID
  10014163109
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206012
[Journal Article] Growth of Carbon Nanotubes by Microwave-excited Non-equilibrium Atmospheric-pressure Plasma2003
- Author(s)
  A.Matsushita, M.Nagai, K.Yamakawa, M.Hiramatsu, A.Sakai, M.Hori, T.Goto, S.Zaima
- Journal Title
  
  Japanese Journal of Applied Physics Vol.43
  
  Pages: 424-424
- NAID
  10011949973
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350019
[Journal Article] Wideband and nonmechanical sonogram measurement by use of an electronically controlled, wavelength-tunable, femtosecond soliton pulse2003
- Author(s)
  T.Hori, N.Nishizawa, T.Goto
- Journal Title
  
  Journal of Optical Society of America B Vol.20
  
  Pages: 2410-2410
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206012

1. KONO Akihiro (40093025)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
2. HATANO Yoshihiko (90016121)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
3. ITATANI Ryohei (90025833)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
4. HORI Masaru (80242824)

# of Collaborated Projects: 6 results

# of Collaborated Products: 12 results
5. 田頭博昭 (10001174)

# of Collaborated Projects: 6 results

# of Collaborated Products: 0 results
6. HIROTA Eizi (30011464)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
7. 広瀬全孝 (10034406)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
8. HIROMATSU Mineo (50199098)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
9. NISHIZAWA Norihiko (30273288)

# of Collaborated Projects: 3 results

# of Collaborated Products: 10 results
10. KISHIMOTO Shigeru (10186215)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
11. ITO Masafumi (10232472)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
12. 菅野卓雄 (50010707)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
13. 佐藤徳芳 (40005252)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
14. 河合良信 (10038565)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
15. ITO Mitsuo (20013469)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
16. SHIDA Tadamasa (60025484)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
17. MAKABE Toshiaki (60095651)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
18. SUGAI Hideo (40005517)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
19. TACHIBANA Kunihide (40027925)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
20. 井上元 (70101053)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
21. 鷲田伸明 (70101045)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
22. 山田千樫 (70037266)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
23. 酒井洋輔 (20002199)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
24. WATANABE Yukio (80037902)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. MURAOKA Katsunori (80038546)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. SEIKI Inaba (30110183)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. KAZUHIRO Hane (50164893)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. 堀池靖浩 (20209274)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. 石川順三 (80026278)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. 庭野道夫 (20134075)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. 八百隆文 (60230182)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. 神藤正士 (60023248)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
33. 吉田豊信 (00111477)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. TSUKADA Tsutomu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. SAMUKAWA Seiji

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. AKIHIRO Kono

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

GOTO Toshio 後藤 俊夫

Research Projects

Research Products

Co-Researchers

Establishment of dynamic measurement technique of plasma induced subsurface reaction by using wavelength-tunable femtosecond fiber laserPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

ソリトンパルスによるパルス捕捉を用いたパルス光の波長制御・スイッチングPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Principal Investigator

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Research Field

Research Institution

Principal Investigator

Project Period (FY)

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Research Institution

Principal Investigator

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環境調和量子反応制御プロセスに関する調査研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Studies on selective productions of radicals using electron temperature controlled plasmasPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of next generalion's large-scale functional thin film process Using UHF plasmaPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Studies on surface reaction process and thin film formation by controlling radicalsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Principal Investigator

Project Period (FY)

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STUDIES ON MEASUREMENTS OF RADICALS IN GAS PHASE USING SPECTROSCOPY TECHNIQUESPrincipal Investigator

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Study of elementary processes for the lower laser level of the copper vapor laserPrincipal Investigator

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GOTO Toshio 後藤俊夫