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MORI Yuzo  森 勇蔵

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… Alternative Names

森 勇蔵  モリ ユウゾウ

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Researcher Number 00029125
Other IDs
Affiliation (Current) 2025: 大阪大学, その他部局等, 名誉教授
Affiliation (based on the past Project Information) *help 2006 – 2008: 大阪大学, 名誉教授
2005: 大阪大学, 工学研究科, 客員教授
2004: 大阪大学, 工学研究科, 名誉教授
2003 – 2004: MORI,Yuzo, 大学院・工学研究科, 客員教授
2003: 大阪大学, 客員教授 … More
1999 – 2002: 大阪大学, 大学院・工学研究科, 教授
1999: Dep. of Precision Science and Technology, Osaka Univ. Prof., 工学研究科, 助教授
1998: 大阪大学, 大学院工学研究科, 教授
1998: 大阪大学, 工学研究科, 教授
1992 – 1997: 大阪大学, 工学部, 教授
1989 – 1990: 大阪大学, 工学部, 教授
1987: Osaka University Faculty of Engineering, 工学部, 教授
1986: 阪大, 工学部, 教授 Less
Review Section/Research Field
Principal Investigator
機械工作・生産工学 / 機械工作 / Materials/Mechanics of materials / 機械材料工学 / Production engineering/Processing studies
Except Principal Investigator
機械工作・生産工学 / Production engineering/Processing studies / 機械工作・生産工学
Keywords
Principal Investigator
EEM / 大気圧プラズマ / プラズマCVD / プラズマCVM / ラジカル / 数値制御加工 / SOI / 第一原理分子動力学シュミレーション / 第一原理分子動力学シミュレーション / SiH_4 … More / ultra-fine particle / plasma CVD / 表面処理 / CVD / 表面改質 / 粉末粒子 / 薄膜 / LMIS / 高速回転電極 / Local Density of States / Lattice Defect / Photo-Reflectance Spectra / Surface characterization / Ultra-Precision Cutting / 局所状態密度 / 電子エネルギ状態 / 表面物性 / 格子欠陥 / 光反射率スペクトル / 加工表面評価 / 超精密切削 / planarization / First-principles molecular-dynamics simulation / catalytic reaction / hydrogen ion / hydroxyl ion / ultra precision machining / ultrapure water / electrochemical machining / 超清浄・超精密加工法 / イオン交換材料 / 触媒材料 / 表面酸化膜形成 / 超精密超清浄加工法 / 電解加工法 / 平坦化加工 / シリコン単結晶 / 触媒反応 / 水素イオン / 水酸イオン / 電解加工 / 超純水 / plane mirror / synchrotron radiation / numerical controlled / high-speed rotary electrode / radical / atmospheric pressure / plasma CVM / 薄膜化 / 平面ミラー / シンクロトロン放射光 / Ultra clean technology / First-principles molecular dynamics simulation / Electrochemical machining in ultrapure water / Atmospheric pressure plasma CVD / Plasma CVM / Ultra precision machining / Perfect surfaces / STM / 超純粋電解加工 / ウルトラクリーンテクノロジー / 超純水電解加工 / 大気圧プラズマCVD / 超精密加工 / 完全表面 / SF6 / Spatial resolution / Pulse modulation / Radical / Atmospheric plasma / 分解過程 / 六フッ化硫黄 / プラズマの局在化 / パルス変調 / ラジカル加工 / 高圧力プラズマ / atmospheric plasma / 微細粉末 / 超微粒子 / Low temperature deposition / Thin film / Silicon / Surface modification / Ion gun / 表面制御 / 薄膜用基板 / イオン照射 / シリコン薄膜 / 低温成膜 / シリコン / イオンガン / coating / surface preparation / マイクロ波プラズマ / コーティング / Plasma / Classification / Surface Modification / Powder Particle / RFプラズマ / コ-ティング / プラズマ / 分級 / Ultra-thin-film / Epitaxy / Ion Implantation / アルカリハライド / 超薄膜 / エピタキシ- / イオン注入 / リソグラフィー / 精密研磨 / プラズマ加工 / 石英ガラス / ローカルウエットエッチング / 平坦度 / ウエットエッチング / フォトマスク基板 / 液晶 / アモルファスシリコン / 高速成膜 … More
Except Principal Investigator
EEM / STS / STM / レーザ / 近接場 / 走査型近接場光学顕微鏡 / 非球面ミラー / 放射光 / シリコン / SPV / 数値制御加工 / 表面電子準位 / 超精密加工 / 分光 / 表面光起電力 / asymmetric aspheric figure / goniometers / normal vector / slope error / surface figuring / EUV / Synchrotron radiation optics / 基準面 / 法線ベクトル測定 / X線光学素子 / 大型ミラー / 非基準面 / 法線ベクトル計測 / 非球面形状 / 集効用ミラー / ナノメータ / 非球面 / スロープエラー / ゴニオメータ / 法線ベクトル / 基準面無し / 形状計測 / electrochemical etching / metal contamination / silicon wafer / silica / particle contamination / cleaning process / shear flow / ultrapure water / インジウム・シン・オキサイド / 液晶ディスプレー / 電気化学加工 / 金属汚染 / シリコンウエハ / シリカ / 微粒子汚染 / 洗浄 / せん断流 / 超純水 / High-rate deposition / Amorphous SiC / Atmospheric pressure plasma CVD / 超高速成膜 / アモルファスSiC / 大気圧プラズマCVD / Low temperature deposition / Thin film / Silicon / Surface modification / Ion gun / シリコンイオン / 表面改質 / TFT / 太陽電池 / 液体金属イオン源 / 多結晶 / 基板改質 / 低温成膜 / シリコン薄膜 / イオン照射 / ultra-precision machining / crystallographic properties / non-destructive / high sensitive / Si / surface photovaltage effects / 起精密加工 / 半導体 / 低温 / 加工変質層 / 非接触 / 超精密加工面 / 微弱表面電位計測システム / Si wafer / Elementary analysis / Si (001) 2*1 surface / Local density of states / First principle MD / H-terminated Si surface / Ab-inito MO / 電子構造 / 表面分析 / 金属汚染物 / シリコンウェーハ / 走査型トンネル分光法 / 水素終端化 / 走査型トンネル分光 / 走査型トンネル顕微鏡 / Si(001)2×1表面 / Siウェーハ / 元素分析 / Si (001) 2×1表面 / 局所状態密度 / 第一原理分子動力学 / 水素終端化Si表面 / Ab-initio分子軌道法 / Boundary Element Method / High Spatial Resolution / Polystirene Latex Sphere / Scanning Near-field Optical Microscope / 光による微細加工 / フォトレジスト / 微小突起 / 高分解能 / 高空間分解能 / ラテックス球プローブ / 境界要素法 / near field / ultra precision machined surface / surface of insulator / laser / piezo actuator / surface roughness / near-field / scanning near-field optical microscope / ニアフィールド / 超精密加工表面 / 絶縁体表面 / 圧電素子 / 表面粗さ / コヒーレントX線 / 超精密形状計測 / X線集光 / X線顕微鏡 / X線ミラー / CEM / エッチング / ポリシング Less
  • Research Projects

    (23 results)
  • Research Products

    (11 results)
  • Co-Researchers

    (19 People)
  •  Development of High?precision and High-ef icient Finishing Process of Over Meter Size Photomask Substrate for LCDPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      2006 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  Development of High Precision Profiler

    • Principal Investigator
      HIGASHI Yasuo
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      High Energy Accelerator Research Organization (KEK)
  •  超高精度X線ミラー作製による高分解能硬X線顕微鏡の開発

    • Principal Investigator
      山内 和人
    • Project Period (FY)
      2003 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  ナノデバイス用基板としての超薄膜SOIウエハの開発Principal Investigator

    • Principal Investigator
      佐野 泰久, 森 勇蔵
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  DEVELOPMENT OF ULTRAPRECISION CLEANING SYSTEM USING HIGH-VELOCITY SHEAR FLOW AND ELECTROCHEMICAL ETCHING PROCESS IN ULTRAPRE WATERPrincipal Investigator

    • Principal Investigator
      GOTO Hidekazu, 森 勇蔵
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      OSAKA UNIVERSITY
  •  Extremely High-Rate Deposition of High-Quality Amorphous Silicon Carbide Films

    • Principal Investigator
      YOSII Kumayasu
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Electrochemical machining using ultrapure waterPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  The development of the equipment for the ultra precision aspherical optics using plasma CVM.Principal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  表面光起電力を利用したSiウエハの加工変質層の高感度計測

    • Principal Investigator
      山内 和人
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  回転電極を用いた大気圧汎用プラズマCVD装置の開発Principal Investigator

    • Principal Investigator
      森 勇蔵
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Creation of Perfect SurfacesPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1996 – 2002
    • Research Category
      Grant-in-Aid for COE Research
    • Research Institution
      Osaka University
  •  Studies on radical generation mechanism in the atmospheric plasma etchingPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Substrate surface modification by ion beam irradiation-Deposition of a polycrystalline silicon at a low temperature-

    • Principal Investigator
      YAMAUCHI Kazuto
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Elementary Analysis of a single Metallic Atom on Si Wafer Surface by STM/STS

    • Principal Investigator
      ENDO Katsuyoshi
    • Project Period (FY)
      1994 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Development of the appratus for making the ultra-fine particles for EEM utilizing atmospheric plasma CVDPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  A high sensitive evalution method for Si surface crystallografic properties by employing surface photovoltage effects.

    • Principal Investigator
      YAMAUCHI Kazuto
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Study on substrate surface modification by ion beam irradiationPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Osaka University
  •  Micro-Machining by Nearfield Optics

    • Principal Investigator
      KATAOKA Toshihiko
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Estimation of ultra precision machined surface by Scanning Near-field Optical Microscope

    • Principal Investigator
      KATOAOKA Toshihiko
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作・生産工学
    • Research Institution
      Osaka University
  •  Study on surface coating of ultra-fine particles for EEM machining.Principal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Osaka University
  •  Study on Substrate Surface ModificationPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械材料工学
    • Research Institution
      Osaka University
  •  Development of Surface Treatment Method for Ultra-Fine Powder Particles for Elastic Emission Machining (EEM)Principal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B).
    • Research Field
      機械工作
    • Research Institution
      Osaka University, The Faculty of Engineering
  •  Crystallographical Control in Urtra-Precision CuttingPrincipal Investigator

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Osaka University

All 2006 2005

All Journal Article

  • [Journal Article] A New Designed Ultra-high Precision Profiler - Study on Slope Error Measurement of a Mandrel for Wolter type-I mirror Fabrication -2006

    • Author(s)
      Yasuo.HIGASHI^<*a>.Yuichi.TAKAIE^b, Katsuyoshi.ENDO^b, Tatsuya.KUME^a, Kazuhiro.ENAMI^a, Kazuto.YAMAUCHI^c, Kazuya.YAMAMURA^c, Toshihisa.SANO^c, Kenji.UENO^a, Yuzo.MORI^c
    • Journal Title

      Proc.Of the 8^<th> International Conference on X-ray Microscopy ; 26-30, July, at Egret Himeji 2006.6月発行(In printing)

    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics -Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics-Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A New Designed Ultra-high Precision Profiler2006

    • Author(s)
      Y.HIGASHI^a, Y.TAKAIE^b, K.ENDO^b, T.KUME^a, K.ENAMI^a, K.YAMAUCHI^c, K.YAMAMURA^c, H.SANO^c, K.UENO^a, Y.MORI^c
    • Journal Title

      Proc of SPIE : Advances in Mirror Technology for X-ray, EUV Lithography, laser, and Other Applications, 3 August 2005, Sandiego, CA, USA Vol.# 5921(In printing)

    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] シンクロトロン放射光用ミラーのための超精密非球面形状測定装置の開発2006

    • Author(s)
      森勇蔵, 遠藤勝義, 宮脇崇, 瀬戸口大輔, 鷹家優一, 東保男, 久米達哉, 江並和宏
    • Journal Title

      2006年精密工学会春季大会学術講演会講演論文集

    • NAID

      130005027107

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler-Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Himeji, Japan (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler - Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Hirneji, Japan, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360073
  • 1.  YAMAUCHI Kazuto (10174575)
    # of Collaborated Projects: 19 results
    # of Collaborated Products: 10 results
  • 2.  YAMAMURSA Kazuya (60240074)
    # of Collaborated Projects: 13 results
    # of Collaborated Products: 10 results
  • 3.  SANO Yashuhisa (40252598)
    # of Collaborated Projects: 13 results
    # of Collaborated Products: 4 results
  • 4.  ENDO Katsuyoshi (90152008)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 11 results
  • 5.  KATOAOKA Toshihiko (50029328)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 6.  SUGIYAMA Kazuhisa (30112014)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 7.  HIROSE Kikuji (10073892)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 8.  YOSHII Kumayasu (30029152)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 9.  YASUTAKE Kiyoshi (80166503)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 10.  GOTO Hidekazu (80170463)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 11.  MORITA Mizuho (50157905)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  KAKIUCHI Hroaki (10233660)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  HIGASHI Yasuo (70208742)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 11 results
  • 14.  UENO Kenji (40370069)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 10 results
  • 15.  KUME Tatsuya (40353362)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 11 results
  • 16.  ENAMI Kazuhiro (00370073)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 11 results
  • 17.  稲垣 耕司 (50273579)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  三村 秀和 (30362651)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  青野 正和 (10184053)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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